CN201195766Y - Novel polysilicon furnace - Google Patents
Novel polysilicon furnace Download PDFInfo
- Publication number
- CN201195766Y CN201195766Y CNU2008200806431U CN200820080643U CN201195766Y CN 201195766 Y CN201195766 Y CN 201195766Y CN U2008200806431 U CNU2008200806431 U CN U2008200806431U CN 200820080643 U CN200820080643 U CN 200820080643U CN 201195766 Y CN201195766 Y CN 201195766Y
- Authority
- CN
- China
- Prior art keywords
- heater
- furnace body
- dedusting
- vacuum pump
- polycrystalline silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
The utility model belongs to a novel polysilicon furnace, wherein a cross supporting stand on the front end of the bottom of a furnace body is vertically provided with a lifting guide rail, a driving wheel which is matched with a grooved rail in a sliding way is arranged on the lifting guide rail, a protecting cover is arranged on the driving wheel by a shaft, the protecting cover is provided with a rack bar which is parallel to the guide rail, the cross supporting strand which is corresponding to the rack bar is provided with a motor, a gear wheel of a driving rack bar is arranged on a motor shaft, the lateral side of the furnace body is provided with a viewing port, an alarm line is arranged at the bottom in the furnace body which is arranged on the positive lower portion of the viewing port, an alarm line pillar which is connected with an alarm line and a wiring hole for the alarm line to pass through are arranged on the lateral side of the furnace body, and dedusting tube bodies are arranged on a pipeline of the furnace body which is connected with the vacuum pump group. The utility model has the advantages of effectively protecting the security of operators, preventing silicon liquid from overflowing to break down the furnace body, damaging equipment, prolonging the maintenance intervals and the service span of the vacuum pump group.
Description
Technical field
The utility model belongs to a kind of New Polycrystalline silicon stove.
Background technology
The present polycrystalline silicon furnace of producing has following shortcoming:
(1), but constituted by chamber about the opening and closing at body of heater, the effect of chamber is at dress up and down, make things convenient for the silicon material during discharging, parts such as crucible turnover body of heater, but in actual mechanical process, the high temperature and high pressure that keeps in the body of heater can produce a large amount of high temperature and high pressure steams, when being in an emergency in the body of heater, body of heater internal pressure moment sharply raises, because pressure relief opening pressure release in time usually, thereby cause that the flange place of chamber separates body of heater connecting up and down, high temperature and high pressure steam in the furnace chamber can spray moment, cause the high-temperature steam that operator are sprayed in the body of heater to scald, operator's safety is made a big impact.
(2), the high temperature silicon material in stove normally exists with liquid state, is subjected to multiple factor affecting, occur the phenomenon that the silicon hydrorrhea flows out crucible in the stove and happen occasionally.The type of furnace of producing adopts usually under bottom of furnace body, silicon hydrorrhea stream the processing of this situation the overflow alarming line is installed at present, the overflow alarming line can play the effect of transmitter, the alarming line bottom is provided with connection jaws and the warning terminal (as shown in Figure 2) that is connected with the control warning, in the ordinary course of things, the silicon liquid of overflow can flow directly on the alarming line along the overflow weir of reserving, because the temperature of alarming line is lower than silicon liquid, can make alarming line moment fusing, thereby cause the apparatus control system warning that is connected with alarming line by the warning terminal.But in actual mechanical process, when silicon hydrorrhea stream occurring, because alarming line is to be connected with bottom of furnace body terminal stud outward by the connection jaws of establishing on the bottom of furnace body that is positioned at its lower end, high temperature overflow silicon liquid is when moment fusing alarming line, also with the fusing of the lead in the connection jaws, connection jaws is worn by the silicon liquid hammer, not only can not effectively report to the police, also can cause silicon liquid to flow out outside the body of heater along connection jaws, operator safety is damaged and injured to entire equipment.
(3), traditional polycrystalline silicon furnace is equipped with the vacuum pump group and is communicated with the body of heater pipeline, its effect is that remaining impurities in the stove is discharged, to guarantee the quality of silicon seed.But the vacuum pump group to stove in during extracting air, Powdered or more short grained silicon material, and other residual material in the stove can be followed gas and directly be entered into the vacuum pump group, easily cause the pollution of vacuum pump group, shortened vacuum pump group service intervals and work-ing life.
Summary of the invention
The purpose of this utility model is a kind of New Polycrystalline silicon stove of design, overcomes the deficiency of existing installation, and the safety that can effectively protect operator is arranged, and stops silicon hydrorrhea stream and punctures body of heater, damage equipment and prolonged the service intervals of vacuum pump group and the advantage in work-ing life.For this reason, vertically be provided with lift rail on the lateral frame of the utility model employing body of heater front end, lift rail is provided with the card wheel of joining with the grooved rail cunning, the card wheel is gone up axle and is provided with shield cap, the parallel tooth bar that is provided with guide rail on the shield cap, the lateral frame corresponding with this tooth bar is provided with motor, motor shaft is provided with the gear of this tooth bar of transmission, the body of heater side is provided with porthole, alarming line is positioned at the body of heater inner bottom part under the porthole, the body of heater side is provided with warning terminal that is connected with alarming line and the connection jaws that passes through for alarming line, and the pipeline that body of heater is connected with the vacuum pump group is provided with the dedusting cylindrical shell.Said structure has reached the purpose of this utility model.
The utility model has the advantages that:
1, installs shield cap additional at the body of heater front end, effectively protect operator.
2, improve the position of warning terminal and connection jaws, stop the incident generation that silicon hydrorrhea stream punctures body of heater, damage equipment and injures operator.
3, on vacuum pump group and body of heater pipeline, install the dedusting tube additional, prolonged the service intervals and the normal work-ing life of vacuum pump group, and also have simple in structurely, make low, the easy to use advantage of use cost.
Description of drawings
Fig. 1 is a structural representation of the present utility model
Fig. 2 is traditional alarming line rod structure synoptic diagram
Fig. 3 is an alarming line rod structure synoptic diagram of the present utility model
Fig. 4 is a dedusting barrel structure synoptic diagram of the present utility model
Specific embodiments
As shown in Figure 1, a kind of New Polycrystalline silicon stove mainly is made up of body of heater 19, bell 6, vacuum pump group 18 and support 2.Support is used to support body of heater, and the support nock is provided with lateral frame 4.Vertically be provided with on the lateral frame of body of heater front end on two lift rail, 1, two lift rail that spacing distance distributes and be respectively equipped with and grooved rail 7 sliding cards wheels 3 of joining, the card wheel can be the card wheels of two to four compositions, with the stability that guarantees that shield cap rises.The card wheel is gone up axle and is provided with shield cap 8, the parallel tooth bar 20 that is provided with guide rail on the shield cap, and motor shaft is provided with the gear of this tooth bar of transmission, and the driven by motor tooth bar moves up and down and can make protection be covered with upper and the next two stationary states.During the loading, unloading material; it is upper that the shield cap that moves up is in it; get out of the way the position of parts turnover furnace chambers such as silicon material crucible; to make things convenient for the staff to operate; when up and down chamber was closed, then moving down shield cap, that it is in was the next, and is just sealing chamber seaming position up and down; so that blocked the protection operator safety by shield cap from the high-pressure and high-temperature steam of this seam ejection.Operator also can be located at the grooved rail at shield cap two ends and the miles of relative movement between the card wheel according to the manipulation require adjustment.
Described motor is a stepper-motor 5.With stability and the location that guarantees that shield cap rises.
As shown in Figure 2, be traditional alert terminal structural representation.Alarming line, connection jaws and warning terminal are located on inside and outside the bottom of furnace body, high temperature overflow silicon liquid is when moment fusing alarming line, also the lead in the connection jaws is fused, connection jaws is worn by the silicon liquid hammer, not only can not effectively report to the police, also can cause silicon liquid to flow out outside the body of heater along connection jaws, operator safety is damaged and injured to entire equipment.
As shown in Figure 3, the body of heater side is provided with porthole 12, and operator can be directly understand practical situation in the stove from porthole, avoid the generation of unscheduled event.Alarming line is positioned at the body of heater inner bottom part under the porthole, the body of heater side is provided with warning terminal 10 that is connected with alarming line 11 and the connection jaws 13 that passes through for alarming line, warning terminal and connection jaws side, the phenomenon of having avoided silicon hydrorrhea stream to puncture body of heater and damage equipment takes place, and loading and unloading have increased the security of body of heater easily.
As shown in Figure 4, the pipeline 9 that is connected with the vacuum pump group of body of heater is provided with dedusting cylindrical shell 14.Be provided with filter core 15 in the described dedusting cylindrical shell, its effect be the vacuum pump group to stove in during extracting air, gas enters the dedusting cylindrical shell by pump-line, by filter core with Powdered or more short grained silicon material, and other residual material filters in the stove, to guarantee the normal operation of vacuum pump group, prolonged the service intervals and the normal work-ing life of vacuum pump group.The dedusting barrel front end is provided with dedusting cover 16, and the dedusting cover passed through the card screw with the dedusting cylindrical shell and is connected, and loading and unloading are efficient and convenient during cleaning.The dedusting cover is provided with sight glass plate 17, can observe the intravital situation of dedusting tube at any time, in time clears up and keeps in repair the dedusting tube and reach more renew cartridge.Described porthole seals with sealing glass.Described shield cap length face is curved.
In a word, the utility model can effectively be protected operating personnel's safety, stops silicon hydrorrhea stream and punctures body of heater, damage Equipment and prolonged the service intervals of vavuum pump group and the advantage in service life.
Claims (5)
1. New Polycrystalline silicon stove, mainly by body of heater, bell, vacuum pump group and support are formed, it is characterized in that: vertically be provided with lift rail on the lateral frame of body of heater front end, lift rail is provided with the card wheel of joining with the grooved rail cunning, the card wheel is gone up axle and is provided with shield cap, the parallel tooth bar that is provided with guide rail on the shield cap, the lateral frame corresponding with this tooth bar is provided with motor, motor shaft is provided with the gear of this tooth bar of transmission, the body of heater side is provided with porthole, alarming line is positioned at the body of heater inner bottom part under the porthole, and the body of heater side is provided with warning terminal that is connected with alarming line and the connection jaws that passes through for alarming line, and the pipeline that body of heater is connected with the vacuum pump group is provided with the dedusting cylindrical shell.
2. by the described a kind of New Polycrystalline silicon stove of claim 1, it is characterized in that: described motor is a stepper-motor.
3. by the described a kind of New Polycrystalline silicon stove of claim 1, it is characterized in that: be provided with filter core in the described dedusting cylindrical shell, the dedusting barrel front end is provided with the dedusting cover, and the dedusting cover is provided with the sight glass plate.
4. by the described a kind of New Polycrystalline silicon stove of claim 1, it is characterized in that: described porthole seals with sealing glass.
5. by the described a kind of New Polycrystalline silicon stove of claim 1, it is characterized in that: described shield cap length face is curved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200806431U CN201195766Y (en) | 2008-05-15 | 2008-05-15 | Novel polysilicon furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200806431U CN201195766Y (en) | 2008-05-15 | 2008-05-15 | Novel polysilicon furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201195766Y true CN201195766Y (en) | 2009-02-18 |
Family
ID=40415403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200806431U Expired - Lifetime CN201195766Y (en) | 2008-05-15 | 2008-05-15 | Novel polysilicon furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201195766Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101831689A (en) * | 2010-05-31 | 2010-09-15 | 常州亿晶光电科技有限公司 | Secondary dust exhaust apparatus of primary dust storage tank of crystal pulling furnace |
| CN101831690A (en) * | 2010-05-31 | 2010-09-15 | 常州亿晶光电科技有限公司 | Primary dust suction and storage tank of crystal pulling furnace |
| CN101698480B (en) * | 2009-10-28 | 2011-06-15 | 宜昌南玻硅材料有限公司 | Method for producing polysilicon by adopting square silicon chip and device thereof |
| CN107308745A (en) * | 2016-04-26 | 2017-11-03 | 兰州蓝星纤维有限公司 | The device and application method of waste solids in a kind of continuous cleaning carbide furnace exhaust passage |
-
2008
- 2008-05-15 CN CNU2008200806431U patent/CN201195766Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101698480B (en) * | 2009-10-28 | 2011-06-15 | 宜昌南玻硅材料有限公司 | Method for producing polysilicon by adopting square silicon chip and device thereof |
| CN101831689A (en) * | 2010-05-31 | 2010-09-15 | 常州亿晶光电科技有限公司 | Secondary dust exhaust apparatus of primary dust storage tank of crystal pulling furnace |
| CN101831690A (en) * | 2010-05-31 | 2010-09-15 | 常州亿晶光电科技有限公司 | Primary dust suction and storage tank of crystal pulling furnace |
| CN107308745A (en) * | 2016-04-26 | 2017-11-03 | 兰州蓝星纤维有限公司 | The device and application method of waste solids in a kind of continuous cleaning carbide furnace exhaust passage |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201195766Y (en) | Novel polysilicon furnace | |
| CN102534073B (en) | Steam condensation tower for a granulation installation | |
| CN102323156B (en) | Free water pressure test equipment for gas cylinder of CO2 fire extinguisher | |
| CN104190177B (en) | A kind of anti-explosion dust remover | |
| EP3017071B1 (en) | Steam condensation tower for a granulation installation | |
| CN111828601B (en) | Forced lubrication indicating and alarming device for speed reducer of scraper conveyor on coal face | |
| CN102350142B (en) | Device and method for collecting waste gas during water quenching of liquid slag | |
| CN106424681B (en) | A kind of vacuum casting apparatus | |
| CN201535634U (en) | Fining furnace bleed-out alarm device | |
| CN105569721B (en) | A kind of annular jet dust pelletizing system of mining aerosol linkage | |
| CN103451391A (en) | Quenching device utilizing forging residual heat | |
| CN212202106U (en) | Mine recooling device | |
| CN205699997U (en) | A kind of wash mill of desulfuration absorbing tower | |
| CN204208434U (en) | For the tail gas filter of titanium sponge production | |
| CN210972382U (en) | Powder bin device | |
| CN205663462U (en) | Blasting door protector of steam turbine direct air cooling system | |
| CN205340944U (en) | A exhaust apparatus for wet ball mill | |
| CN206240262U (en) | A kind of purification system of ammonia | |
| CN206185131U (en) | Vacuum casting equipment | |
| CN216434709U (en) | Visual monitoring system for mechanical cleaning of oil storage tank | |
| CN215233152U (en) | Activated carbon adsorption emergency fire-fighting system | |
| CN220878387U (en) | Purifying device for salt bath quenching medium | |
| CN100432340C (en) | Full automatic instant car arrester | |
| CN218611692U (en) | Molten aluminum continuous flow supply system for producing aluminum fibers based on melt-blowing method | |
| CN218507556U (en) | Aviation oil recovery device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: BEIJING JINGYUNTONG TECHNOLOGY CO., LTD. Free format text: FORMER NAME: BEIJING JINGYUNTONG SCIENCE CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: No. four, No. 158, Hai Jing Road, Beijing economic and Technological Development Zone, post code: 100176 Patentee after: Beijing JingyuntongTechnology Co.,Ltd. Address before: Beijing, Xicheng District, Desheng street, No. 11, zip code: 100044 Patentee before: Beijing Jingyuntong Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20090218 |