CN201195228Y - A vacuum apparatus for laser processing - Google Patents
A vacuum apparatus for laser processing Download PDFInfo
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- CN201195228Y CN201195228Y CN 200820011889 CN200820011889U CN201195228Y CN 201195228 Y CN201195228 Y CN 201195228Y CN 200820011889 CN200820011889 CN 200820011889 CN 200820011889 U CN200820011889 U CN 200820011889U CN 201195228 Y CN201195228 Y CN 201195228Y
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Abstract
The utility model discloses a vacuum device for laser processing, which aims to solve the problem that numerous metal materials cannot be processed by laser under the unprotected state; the device mainly comprises a vacuum box body, an evacuated inflation subassembly and an industrial control computer used for controlling and connecting the vacuum box body and the evacuated inflation subassembly, and the laser processing operation in two dimensional surfaces under the vacuum environment or the shielding gas environment can be realized. The utility model has the advantages that a zinc selenide lens laser window is adopted, thereby the laser absorption rate is low, the permeability is good and the service life is long; a Roots vacuum pump and a rotary mechanical pump are adopted, thereby the evacuation efficiency is enhanced, and the laser processing efficiency and quality can be improved; a vacuum sensor and a vacuum manometer are adopted to read the vacuum degree in a vacuum box, thereby the operation is convenient, the reliability is high and the laser processing quality is guaranteed; the computer is adopted for the control and the management, thereby the operation is convenient, the interface is friendly, the automation degree as well as the performance stability and reliability of the laser processing are greatly enhanced, so as to facilitate the integration and the control with other systems.
Description
Technical field:
The utility model relates to a kind of vacuum plant that is used for air-isolation in laser process equipment, creates vacuum environment or protects the compression ring border, guarantees the part to be processed crudy, particularly relates to a kind of vacuum plant that is used for Laser Processing.
Background technology:
Laser is one of natural science applied great utility model of twentieth century.Since nineteen sixty, first laser instrument was born in the world, in nearly 50 years, the laser science technology has obtained developing rapidly and extensive use in nearly all fields such as national defence, science and technology, industry, agricultural, medical science, daily lifes with its exclusive characteristic and great vitality.
The excellent specific property of laser makes Laser Processing possess the excellent characteristics that other processing methods do not possess:
The energy of 1) contactless processing, and high energy laser beam and translational speed are all adjustable, can realize multiple processing purpose;
2) can process high rigidity, high fragility and dystectic multiple metal, nonmetallic materials;
3) do not have " cutting force " and act on the workpiece, " cutter " do not have wearing and tearing;
4) partial operation.Because laser beam energy density is higher, process velocity is fast, it is minimum that non-laser irradiating part branch is not influenced or influences, its heat affected area is little, the workpiece thermal deformation is little, the following process amount is little;
5) can carry out various processing to the workpiece in the airtight container by transparent medium;
6) processing method is very flexible, and can process complex part after digital control system combines;
7) production efficiency height, crudy is reliable, and is good in economic efficiency.
At present, the type of Laser Processing mainly comprises with application: laser surface engineering, laser material are removed, laser material is connected, the laser prototype is made or the like.Yet, have a lot of metal materials all can't under the unprotect state, carry out Laser Processing.For example, use the laser weld titanium alloy, titanium alloy is a kind of very active metal material, because the surface forms fine and close oxide-film, makes it highly stable at normal temperatures.But at high temperature, titanium alloy then has the ability of strong suction hydrogen, oxygen, nitrogen; Titanium alloy begins to inhale hydrogen at 250 ℃ in the air, 500 ℃ of beginning oxygen uptakes, and 600 ℃ begin to inhale nitrogen.Along with temperature improves, the ability that titanium alloy absorbs gas is stronger, finally causes the titanium alloy weldquality to descend so that can't use.Therefore require the laser weld of titanium alloy under adequately protect gaseity or vacuum state, to carry out.
Summary of the invention:
In order to solve above-mentioned numerous metal material can't carry out Laser Processing under the unprotect state problem; the utility model provides a kind of vacuum plant that is used for Laser Processing; it is contained among the laser process equipment system; the vacuum plant of on described laser process equipment, being furnished with Laser Processing, this device mainly by the vacuum tank body, supportingly with it vacuumize, inflatable component and the industrial control computer (1) of their control connections constituted.
The intrinsic table assembly of described vacuum tank (3) places on the base assembly (2), by vacuum chamber assembly (9) and vacuum tank cap assemblies (7) it is sealed in the casing; On described vacuum tank cap assemblies (7), also be provided with vacuum tank window assembly (8).
On the vacuum case lid ring flange (38) on described vacuum chamber assembly (9) top, be provided with case lid locating hole (33), be provided with case lid rubber seal groove (34) along the ring flange contour, vacuum tank sidewall (37) is provided with vacuum transducer connector (35), pressure vacuum gauge connector (36) and vacuum pumping opening (39).
Describedly vacuumize, inflatable component, be connected with vacuum transducer (5) by vacuum transducer connector (35), vacuum transducer (5) is connected with vacuum measurement and control instrument (4) again, pressure vacuum gauge (6) is connected on the connector (36); Be connected with rotary machine pump (16) with the roots-type vavuum pump (14) of casing outside by vacuum pumping opening (39).
Described industrial control computer (1) is electrically connected with vacuum transducer (5) by vacuum measurement and control instrument (4); Be electrically connected with electromagnetic release valve (10), electromagnetism charge valve (11), roots-type vavuum pump (14), electromagnetic isolation valve (15) and rotary machine pump (16) by motion control card; And the X-axis driver and the Y-axis driver that pass through on the table assembly (3) are electrically connected with X-axis stepper motor and y-axis stepper motor respectively.Can be implemented under the vacuum environment or protection compression ring border under carry out laser machining operation in the two dimensional surface.
Advantage of the present utility model and beneficial effect are:
1. the utility model not only can be implemented in less than the laser machining operation that carries out under the vacuum environment of 1Pa in the two dimensional surface, and can be implemented in the laser machining operation that carries out under 1 atmospheric pressure protection compression ring border in the two dimensional surface.
2. the utility model adopts the zinc selenide lens as laser window, and laser absorption rate is low, can see through visible light, service life is longer.
3. vacuum plant carried out vacuum pumping during the utility model employing roots-type vavuum pump and rotary machine pump compound mode were set up, and the working vacuum degree improves, vacuumizes efficient and improves, and helps improving Laser Processing efficient and quality.
4. the utility model adopts vacuum transducer and pressure vacuum gauge dual mode to read the interior vacuum of vacuum tank, has both made things convenient for the observation of operator in different angles, and the reliability of vacuum reading is further improved, and helps guaranteeing the Laser Processing quality.
5. the utility model adopts the integrated control and management of computer, and the applied in any combination by ZKY2000C-T type vacuum measurement and control instrument and PCI-1240 type motion control card improves laser processing procedure automaticity, stability and reliability greatly.
6. the utility model adopts the RS-485 communication interface to carry out the vacuum transfer of data, adopts PCI-1240 type motion control card to carry out motion control and I/0 operation, software development is simple, long distance for data, antijamming capability is strong, reliability is high, stable.
7. the utility model adopts the computer program of easy to operate, friendly interface, stable performance to vacuumize control, fills protection gas control system, two-dimentional work bench motion control and vacuum and show control, user-friendly, be convenient to and the integrated of other system with control.
Description of drawings
Fig. 1 is an apparatus structure schematic diagram of the present utility model;
Fig. 2 is the vacuum tank window assembly structural representation among Fig. 1;
Fig. 3, Fig. 4 are the vacuum tank cap assemblies structural representation among Fig. 1;
Fig. 5, Fig. 6 are the vacuum chamber modular construction schematic diagram among Fig. 1;
Fig. 7, Fig. 8 are the vacuum tank base assembly structural representation among Fig. 1;
Fig. 9 is the computer control modular construction schematic diagram among Fig. 1;
The specific embodiment
Referring to Fig. 1-Fig. 9, a kind of vacuum plant that is used for Laser Processing, it is contained among the laser process equipment system, the vacuum plant of on described laser process equipment, being furnished with Laser Processing, this device mainly by the vacuum tank body, supportingly with it vacuumize, inflatable component and the industrial control computer 1 of their control connections constituted.
The intrinsic table assembly 3 of described vacuum tank places on the base assembly 2, by vacuum chamber assembly 9 and vacuum tank cap assemblies 7 it is sealed in the casing; On described vacuum tank cap assemblies 7, also be provided with vacuum tank window assembly 8.
On the vacuum case lid ring flange 38 on described vacuum chamber assembly 9 tops, be provided with case lid locating hole 33, be provided with case lid rubber seal groove 34 along the ring flange contour, vacuum tank sidewall 37 is provided with vacuum transducer connector 35, pressure vacuum gauge connector 36 and vacuum pumping opening 39.
Describedly vacuumize, inflatable component, be connected with vacuum transducer 5 by vacuum transducer connector 35, vacuum transducer 5 is connected with vacuum measurement and control instrument 4 again, pressure vacuum gauge 6 is connected on the connector 36; Be connected with rotary machine pump 16 with the roots-type vavuum pump 14 of casing outside by vacuum pumping opening 39.
Described roots-type vavuum pump 14 communicates with cabinets cavity through bellows 13 and mechanical baffle 12, electromagnetic release valve 10 or electromagnetism charge valve 11 by pipeline on the one hand, is connected with rotary machine pump 16 through bellows 13, electromagnetic isolation valve 15 by pipeline on the other hand.
Described vacuum tank cap assemblies 7; be provided with laser positioning hole 28 above the vacuum tank window assembly 8 on the lid 32, which is provided with lens protective cover 27, positioning supports pin 24 is corresponding one by one with the position of case lid locating hole 33; by case lid rubber seal groove 34, be tightly connected with vacuum chamber assembly 9 location.
Described window assembly 8 by rubber seal and lid 32 sealing and fixing that hold-down ring 29, window support ring 30 and window rubber seal groove 31 and Qi Nei install, is isolated vacuum tank inner chamber and vacuum tank outward; Zinc selenide lens 20 scioptics hold-down rings 19 and the lens rubber seal 21 concentric with laser positioning hole 28 are pressed on it in cooling jacket 17, around zinc selenide lens 20, be provided with annular cooling water chamber 22, on cooling water cavity 22 walls, be provided with cooling water input port 18 and cooling water delivery outlet 23.
The vacuum tank base 41 of described vacuum tank base assembly 2 is provided with workbench and connects boss 43, is provided with reinforcement 42 between boss 43 and the base 41, also is provided with vacuum tank locating slot 40 on base 41.
Described industrial control computer 1 is electrically connected with vacuum transducer 5 by vacuum measurement and control instrument 4; Be electrically connected with electromagnetic release valve 10, electromagnetism charge valve 11, roots-type vavuum pump 14, electromagnetic isolation valve 15 and rotary machine pump 16 by motion control card; And the X-axis driver and the Y-axis driver that pass through on the table assembly 3 are electrically connected with X-axis stepper motor and y-axis stepper motor respectively.
Operation principle:
The signal of telecommunication that is read vacuum transducer 5 by vacuum measurement and control instrument 4 also imports this signal of telecommunication in the industrial control computer 1 into, detect vacuum in real time by industrial control computer 1 and whether reach the value of setting, control the cut-out/connection of electromagnetic isolation valve 15, roots-type vavuum pump 14 and rotary machine pump 16 power supplys, and roots-type vavuum pump 14, rotary machine pump 16 stop/opening, and electromagnetic isolation valve 15 close; When reaching the value of setting of vacuum, industrial control computer 1 drives two-dimentional work bench assembly 3 by X-axis stepper motor and y-axis stepper motor and carries out the Laser Processing campaign.
The utility model is described in further detail below in conjunction with accompanying drawing.
Referring to Fig. 1, a kind of vacuum plant structure that is used for Laser Processing of the present utility model mainly comprise industrial control computer 1, vacuum tank body assembly and vacuumize, inflatable component.Wherein the vacuum tank body assembly comprises vacuum tank base assembly 2, two-dimentional work bench assembly 3, vacuum tank cap assemblies 7, vacuum tank window assembly 8, vacuum chamber assembly 9; Vacuumize, inflatable component comprises vacuum measurement and control instrument 4, vacuum transducer 5, pressure vacuum gauge 6, electromagnetic release valve 10, electromagnetism charge valve 11, mechanical baffle 12, bellows 13, roots-type vavuum pump 14, electromagnetic isolation valve 15 and rotary machine pump 16.Part to be processed is placed on location and clamping on the two-dimentional work bench assembly 3, builds vacuum tank cap assemblies 7; Under the integrated control of industrial control computer 1,15 work of rotary machine pump, electromagnetic isolation valve 15 are opened, 14 work of roots-type vavuum pump, pressure vacuum gauge 6 shows the vacuum in the vacuum tank in real time, vacuum measurement and control instrument 4 reads the signal of telecommunication of vacuum transducer 5 and this signal of telecommunication is imported in the industrial control computer 1, by the display demonstration vacuum values of industrial control computer 1; When vacuum reached the value of setting, industrial control computer 1 cut off electromagnetic isolation valve 15, roots-type vavuum pump 14 and rotary machine pump 16 power supplys, and roots-type vavuum pump 14, rotary machine pump 16 quit work, and electromagnetic isolation valve 15 cuts out; Industrial control computer 1 drives two-dimentional work bench assembly 3 and carries out the Laser Processing campaign then; Finish after the Laser Processing campaign, industrial control computer 1 control electromagnetic release valve 10 is opened, the vacuum tank venting, and when the vacuum tank inside and outside air pressure balance, industrial control computer 1 control electromagnetic release valve 10 is closed.Process under protection compression ring border if desired, then industrial control computer 1 control electromagnetism charge valve 11 is opened, and will protect gas to charge into vacuum tank.
Referring to Fig. 2, the vacuum tank window assembly 8 among Fig. 1 mainly is made up of cooling jacket 17, cooling water input port 18, lens hold-down ring 19, zinc selenide lens 20, lens rubber seal 21 and cooling water delivery outlet 23.Laser beam via zinc selenide lens 20 from the external world incide carry out in the vacuum tank under the vacuum state or the protection gaseity under Laser Processing.Lens hold-down ring 19 scioptics rubber seal 21 are pressed on zinc selenide lens 20 in the cooling jacket 17, the laser energy that reliably zinc selenide lens 20 is absorbed passes in the cooling water cavity 22 on the one hand, take away by cooling water, will isolate inside and outside the vacuum tank reliably on the other hand.The cooling water cooling water cavity 22 that 18 inflow cooling jackets 17 surround from the cooling water input port is taken away the laser energy that zinc selenide lens 20 absorb, and with 20 coolings of zinc selenide lens, flows out from cooling water delivery outlet 23 then.
Referring to Fig. 3, Fig. 4, the vacuum tank cap assemblies 7 among Fig. 1 is made up of uncap handle 25,4 case lid reinforcements 26, lens protective cover 27, window assembly hold-down ring 29, window assembly support ring 30, window rubber seal 31 and case lid bodies 32 of 24,2 of 3 positioning supports pins.Positioning supports pin 24 is used for vacuum tank cap assemblies 7 in the location on the vacuum chamber assembly 9 with the support after uncapping; The handle 25 of uncapping is used for vacuum tank cap assemblies 7 uncapped and mentions; Case lid reinforcement 26 effectively reduces case lid body 32 and produce distortion under vacuum state; Lens protective cover 27 protects zinc selenide lens 20 to avoid polluting on the one hand, by laser positioning hole 28 laser beam is positioned at the center of zinc selenide lens 20 on the other hand; Window assembly hold-down ring 29 locatees vacuum tank window assembly 8 and compress with window support ring assembly 30; Rubber seal is installed in the window rubber seal groove 31, can will isolates inside and outside the vacuum tank.
Referring to Fig. 5, Fig. 6, the vacuum chamber assembly 9 among Fig. 1 is welded by vacuum tank sidewall 37 and vacuum case lid flange 38.3 case lid locating holes 33 of processing and case lid rubber seal groove 34 play location and sealing function to vacuum tank cap assemblies 7 on the vacuum tank sidewall 37; Vacuum case lid flange 38 processes vacuum transducer connector 35, pressure vacuum gauge connector 36 and vacuum pumping opening 39, is respectively applied for to connect vacuum transducer 5, pressure vacuum gauge 6 and vacuumize inflatable component.
Referring to Fig. 7, Fig. 8, the vacuum tank base assembly 2 among Fig. 1 is connected boss 43 by 41,4 base reinforcements 42 of vacuum tank base and forms with workbench.Base reinforcement 42 is welded on the vacuum tank base 41, reduces vacuum tank base 41 and produce distortion under vacuum state; Workbench connects boss 43 and is welded on the vacuum tank base 41, is used to install two-dimentional work bench assembly 3.Vacuum tank base 41 processes 4 vacuum tank locating slots 40, is used for location and clamping with laser-processing system.
Referring to Fig. 9, industrial control computer 1 is electrically connected with vacuum transducer 5 by vacuum measurement and control instrument 4; Be electrically connected with electromagnetic release valve 10, electromagnetism charge valve 11, roots-type vavuum pump 14, electromagnetic isolation valve 15 and rotary machine pump 16 by motion control card; And the X-axis driver and the Y-axis driver that pass through on the table assembly 3 are electrically connected with X-axis stepper motor and y-axis stepper motor respectively.Industrial control computer 1 control associated component collaborative work.
The reference of the utility model technical indicator:
1. two-dimentional work bench stroke: 100 * 100mm in the vacuum tank
2
2. work top is to window distance: 250mm.
3. final vacuum:＜1Pa.
4. be extracted into the final vacuum time by 1 atmospheric pressure:＜10 minutes.
Claims (6)
1, a kind of vacuum plant that is used for Laser Processing, it is contained among the laser process equipment system, it is characterized in that: on described laser process equipment, be furnished with the vacuum plant of Laser Processing, this device mainly by the vacuum tank body, supportingly with it vacuumize, inflatable component and the industrial control computer (1) of their control connections constituted; The intrinsic table assembly of described vacuum tank (3) places on the base assembly (2), by vacuum chamber assembly (9) and vacuum tank cap assemblies (7) it is sealed in the casing; On described vacuum tank cap assemblies (7), also be provided with vacuum tank window assembly (8); Describedly vacuumize, inflatable component, be connected with vacuum transducer (5) by vacuum transducer connector (35), vacuum transducer (5) is connected with vacuum measurement and control instrument (4) again; Be connected with rotary machine pump (16) with the roots-type vavuum pump (14) of casing outside by vacuum pumping opening (39); Described industrial control computer (1) is electrically connected with vacuum transducer (5) by vacuum measurement and control instrument (4); Be electrically connected with electromagnetic release valve (10), electromagnetism charge valve (11), roots-type vavuum pump (14), electromagnetic isolation valve (15) and rotary machine pump (16) by motion control card; And the X-axis driver and the Y-axis driver that pass through on the table assembly (3) are electrically connected with X-axis stepper motor and y-axis stepper motor respectively.
2, a kind of vacuum plant that is used for Laser Processing according to claim 1, it is characterized in that: on the vacuum case lid ring flange (38) on described vacuum chamber assembly (9) top, be provided with case lid locating hole (33), be provided with case lid rubber seal groove (34) along the ring flange contour, vacuum tank sidewall (37) is provided with vacuum transducer connector (35), pressure vacuum gauge connector (36) and vacuum pumping opening (39).
3, a kind of vacuum plant that is used for Laser Processing according to claim 1, it is characterized in that: described roots-type vavuum pump (14) communicates with cabinets cavity through bellows (13) and mechanical baffle (12), electromagnetic release valve (10) or electromagnetism charge valve (11) by pipeline on the one hand, is connected with rotary machine pump (16) through bellows (13), electromagnetic isolation valve (15) by pipeline on the other hand.
4, according to claim 1 or 2 or 3 described a kind of vacuum plants that are used for Laser Processing; it is characterized in that: described vacuum tank cap assemblies (7); vacuum tank window assembly (8) top on lid (32) is provided with laser positioning hole (28); which is provided with lens protective cover (27); positioning supports pin (24) is corresponding one by one with the position of case lid locating hole (33); by case lid rubber seal groove (34), be tightly connected with vacuum chamber assembly (9) location.
5, according to claim 1 or 2 or 3 described a kind of vacuum plants that are used for Laser Processing, it is characterized in that: described window assembly (8), by the rubber seal and lid (32) sealing and fixing of hold-down ring (29), window support ring (30) and window rubber seal groove (31) and installation in it, vacuum tank inner chamber and vacuum tank are isolated outward; Zinc selenide lens (20) scioptics hold-down rings (19) and the lens rubber seal (21) concentric with laser positioning hole (28) are pressed on it in cooling jacket (17), be provided with annular cooling water chamber (22) on every side at zinc selenide lens (20), on cooling water cavity (22) wall, be provided with cooling water input port (18) and cooling water delivery outlet (23).
6, according to claim 1 or 2 or 3 described a kind of vacuum plants that are used for Laser Processing, it is characterized in that: the vacuum tank base (41) of described vacuum tank base assembly (2) is provided with workbench and connects boss (43), be provided with reinforcement (42) between boss (43) and the base (41), on base (41), also be provided with vacuum tank locating slot (40).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200820011889 CN201195228Y (en) | 2008-04-01 | 2008-04-01 | A vacuum apparatus for laser processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200820011889 CN201195228Y (en) | 2008-04-01 | 2008-04-01 | A vacuum apparatus for laser processing |
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| CN201195228Y true CN201195228Y (en) | 2009-02-18 |
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| CN 200820011889 Expired - Fee Related CN201195228Y (en) | 2008-04-01 | 2008-04-01 | A vacuum apparatus for laser processing |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102284790A (en) * | 2011-07-07 | 2011-12-21 | 中国科学院上海光学精密机械研究所 | Femtosecond laser micro-nano processing device capable of controlling gas atmosphere and processing method thereof |
| CN103231168A (en) * | 2013-04-26 | 2013-08-07 | 中国东方电气集团有限公司 | Device for vacuum laser welding |
| CN103323568A (en) * | 2013-06-26 | 2013-09-25 | 哈尔滨工业大学 | Material smelting and welding experimental apparatus under ground microgravity and methods for smelting and welding material under microgravity based on device |
| CN103612017A (en) * | 2013-11-21 | 2014-03-05 | 中国科学院半导体研究所 | Laser machining cover |
| CN103817445A (en) * | 2014-03-06 | 2014-05-28 | 上海电气钠硫储能技术有限公司 | Protection device of vacuum laser welding protection lens for sodium-sulfur battery |
| CN104942451A (en) * | 2015-07-03 | 2015-09-30 | 厦门大学 | Vacuum laser cutting device and method for porous metal material |
| CN106695120A (en) * | 2016-12-23 | 2017-05-24 | 西北工业大学（张家港）智能装备技术产业化研究院有限公司 | Vacuum laser processing device |
| CN109014583A (en) * | 2018-07-24 | 2018-12-18 | 西安交通大学 | It is a kind of to prepare the laser anaerobic processing unit (plant) for inhaling wave silicon materials |
| CN115712036A (en) * | 2022-11-16 | 2023-02-24 | 遨天科技(北京)有限公司 | Electric propulsion electromagnetic compatibility testing device and system |
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2008
- 2008-04-01 CN CN 200820011889 patent/CN201195228Y/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102284790A (en) * | 2011-07-07 | 2011-12-21 | 中国科学院上海光学精密机械研究所 | Femtosecond laser micro-nano processing device capable of controlling gas atmosphere and processing method thereof |
| CN102284790B (en) * | 2011-07-07 | 2014-05-07 | 中国科学院上海光学精密机械研究所 | Femtosecond laser micro-nano processing device capable of controlling gas atmosphere and processing method thereof |
| CN103231168A (en) * | 2013-04-26 | 2013-08-07 | 中国东方电气集团有限公司 | Device for vacuum laser welding |
| CN103231168B (en) * | 2013-04-26 | 2015-05-13 | 中国东方电气集团有限公司 | Device for vacuum laser welding |
| CN103323568A (en) * | 2013-06-26 | 2013-09-25 | 哈尔滨工业大学 | Material smelting and welding experimental apparatus under ground microgravity and methods for smelting and welding material under microgravity based on device |
| CN103612017A (en) * | 2013-11-21 | 2014-03-05 | 中国科学院半导体研究所 | Laser machining cover |
| CN103817445A (en) * | 2014-03-06 | 2014-05-28 | 上海电气钠硫储能技术有限公司 | Protection device of vacuum laser welding protection lens for sodium-sulfur battery |
| CN103817445B (en) * | 2014-03-06 | 2015-08-26 | 上海电气钠硫储能技术有限公司 | A kind of sodium-sulphur battery vacuum laser welding protection lens shield device |
| CN104942451A (en) * | 2015-07-03 | 2015-09-30 | 厦门大学 | Vacuum laser cutting device and method for porous metal material |
| CN106695120A (en) * | 2016-12-23 | 2017-05-24 | 西北工业大学（张家港）智能装备技术产业化研究院有限公司 | Vacuum laser processing device |
| CN109014583A (en) * | 2018-07-24 | 2018-12-18 | 西安交通大学 | It is a kind of to prepare the laser anaerobic processing unit (plant) for inhaling wave silicon materials |
| CN115712036A (en) * | 2022-11-16 | 2023-02-24 | 遨天科技(北京)有限公司 | Electric propulsion electromagnetic compatibility testing device and system |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090218 Termination date: 20120401 |