CN201181695Y - Vacuum voltage regulation adsorber of scribing machine - Google Patents
Vacuum voltage regulation adsorber of scribing machine Download PDFInfo
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- CN201181695Y CN201181695Y CNU200820035555XU CN200820035555U CN201181695Y CN 201181695 Y CN201181695 Y CN 201181695Y CN U200820035555X U CNU200820035555X U CN U200820035555XU CN 200820035555 U CN200820035555 U CN 200820035555U CN 201181695 Y CN201181695 Y CN 201181695Y
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Abstract
A vacuum voltage-stabilizing absorption device of a dicing machine includes a sucker, a gas source, a solenoid pilot actuated valve and a vacuum generator. The gas source is connected with the vacuum generator through the solenoid pilot actuated valve; the vacuum generator includes a first vacuum generator and a second vacuum generator. A vacuum manostat is arranged between the vacuum port of the first vacuum generator and the sucker; the vacuum manostat is a sealed cylinder; the upper part of the sealed cylinder is provided with an air inlet and an air outlet; the lower part of the sealed cylinder is provided with a water outlet; the air inlet is connected with the sucker through a gas pipe; the air outlet is connected with the vacuum port of the first vacuum generator through a gas pipe; the water outlet is connected with the vacuum port of the second vacuum generator through the gas pipe. The technical scheme solves the problem of degressive cutting quality caused by that a silicon chip flies out of the sucker or a grinding wheel cutter penetrates the silicon chip caused by the unstable vacuum degree of the sucker of the dicing machine.
Description
Technical field
The utility model relates to a kind of semiconductor cutting scribing equipment, relates in particular to a kind of absorption vacuum degree that can stablize sucker in the wafer scribe course of processing, the scribing machine vacuum voltage stabilizing adsorbent equipment that makes wafer stable cutting on sucker.
Background technology
Sand-wheel slice cutting machine is the special cutting device of processing circular wafer such as various semiconductors and other similar substrates, and it is in the semiconductor production process one a very important equipment, is mainly used in the processing of products such as semiconductor chip, thermistor, solar cell.Sand-wheel slice cutting machine is to utilize thickness minimum that the subparticle diamond dust the makes disc wheel cutter for 0.02mm, under the cutting speed of 0.1～400mm/s, the emery wheel blade is cut into along being adsorbed on the sucker cut-off rule of silicon chip, and when silicon chip is carried out hemisect, only cut half of silicon wafer thickness into, and silicon chip to be adsorbed on fully on the sucker be a necessary condition of carrying out hemisect.
In the prior art, in order to make silicon chip be adsorbed on the sucker fully, being carved with one group on the sucker table top of absorption silicon chip is the concentric circles air drain of round dot with the sucker center, and these concentric circles air drains interconnect by a cross hairs air drain, and this cross hairs air drain is through the sucker center.As shown in Figure 1, adopt a cover vacuum absorption device to realize the vacuum degree of sucker 6 bottoms, described sucker 6 centers have a through hole to communicate with air entry, and this air entry links to each other with a vacuum generator through tracheae, and this vacuum generator links to each other with an air compressor 1 through electromagnetically operated valve 2.When silicon chip is placed on this sucker and contacts fully with chuck surface, sucker forms an induction chamber, and behind the startup vacuum generator, induction chamber forms the negative pressure that satisfies process requirements, thereby silicon chip is adsorbed on the sucker firmly, be convenient to the disc wheel cutter exactly the cut-off rule on silicon chip cut into.
Above-mentioned vacuum absorption device has used for many years, but still have some problems: 1, since cutting process in need by cooling fluid take away contact zone between emery wheel and the workpiece frictional heat, wash away abrasive dust and lubricated grinding position, this just keeps away unavoidably has some cooling fluids or water to siphon away from sucker, enter in the gas circuit, cause gas circuit to have some setbacks, sucker vacuum degree reduces or is unstable; 2, because sucker vacuum degree instability, the suction of silicon chip is reduced, regular meeting fly out sucker or crusher of silicon chip occur and cuts the phenomenon of wearing silicon chip in the course of the work, and cut quality is descended; 3, when silicon chip flew out sucker inadequately because of being subjected to suction, regular meeting beat on the emery wheel blade, because the emery wheel blade is thinner, is damaged easily, so just must change the emery wheel blade, thereby production efficiency is affected, and production cost improves greatly; 4, can piece together sheet or unfilled corner sheet for some, because it can not be fully fit with the air drain on the sucker, feasible air drain that can not the fitting part leaks gas, thereby these can piece together sheet or the unfilled corner sheet can not cut on this sucker, cause the waste of big content of starting materials.
Therefore, the utility model provides a kind of scribing machine vacuum voltage stabilizing adsorbent equipment, to overcome deficiency of the prior art from improving the angle of prior art.
Summary of the invention
The utility model provides a kind of scribing machine vacuum voltage stabilizing adsorbent equipment, and its purpose mainly is that the sucker that solves scribing machine because the unstable silicon chip that causes of sucker vacuum degree flies out or crusher are cut and worn silicon chip, makes the problem of cut quality decline.
For achieving the above object, the technical solution adopted in the utility model is: a kind of scribing machine vacuum voltage stabilizing adsorbent equipment, comprise sucker, source of the gas, electromagnetically operated valve and vacuum generator, source of the gas links to each other with vacuum generator through electromagnetically operated valve, described vacuum generator comprises first vacuum generator and second vacuum generator, be provided with a vacuum pressurizer between the vacuum ports of first vacuum generator and the sucker, this vacuum pressurizer is a closed cylindrical shell, the top of this closed cylindrical shell is provided with air inlet and gas outlet, its underpart is provided with delivery port, described air inlet links to each other with sucker through tracheae, the gas outlet links to each other through the vacuum ports of tracheae with first vacuum generator, and delivery port links to each other through the vacuum ports of tracheae with second vacuum generator.
Related content in the technique scheme is explained as follows:
1, in the such scheme, comprise a vacuum meter, the measurement mouth of this vacuum meter is communicated with the inner chamber of closed cylindrical shell, can intuitively find out scribing machine sucker vacuum degree by this vacuum meter, is convenient to this vacuum degree control in the required scope of technology.
2, in the such scheme, described source of the gas is an air compressor.
The utility model operation principle is: adopt between the vacuum ports of first vacuum generator and sucker and be provided with a vacuum pressurizer, the tracheorrhaphy that connects sucker and vacuum meter is arranged, and after being sucked in the endotracheal water suction closed cylindrical shell vacuum pressurizer from sucker, entering that water in the pressurizer is gentle will be separated, makes the vacuum meter index stable; The utility model adopts two vacuum generators, the delivery port of closed cylindrical shell bottom is directly linked to each other with the second vacuum generator vacuum ports, thereby the water of suction closed cylindrical shell is siphoned away, discharges by second vacuum generator; And the vacuum ports of first vacuum generator links to each other with the gas outlet on closed cylindrical shell top, can keep the sucker vacustat in the required scope of technology always, thereby solves because of the unstable a series of problems of bringing of sucker vacuum degree.
Because the technique scheme utilization, the utility model compared with prior art has following advantage:
1, because the utility model is provided with a vacuum pressurizer between the vacuum ports of first vacuum generator and sucker, and add one second vacuum generator simultaneously, the delivery port of closed cylindrical shell vacuum pressurizer bottom directly links to each other with the vacuum ports of second vacuum generator, make behind the water suction closed cylindrical shell vacuum pressurizer of sucker inspiration tracheae, directly siphoned away discharge by second vacuum generator, and the vacuum ports of first vacuum generator links to each other with the gas outlet on closed cylindrical shell top, can keep the sucker vacustat in the required scope of technology always.
2,, avoided in the course of processing, flying out or cutting the phenomenon of wearing silicon chip owing to the unstable silicon chip that causes of sucker vacuum degree because the utility model guarantees the sucker vacustat in the required scope of technology.
3, because the utility model guarantees the sucker vacustat in the required scope of technology, can piece together sheet or unfilled corner sheet for those and can be placed on this sucker and cut, thereby save raw material greatly, reduced the waste of raw material.
Description of drawings
Accompanying drawing 1 is a vacuum voltage stabilizing adsorbent equipment principle schematic in the prior art;
Accompanying drawing 2 is the utility model embodiment principle schematic.
In the above accompanying drawing: 1, air compressor; 2, electromagnetically operated valve; 3, first vacuum generator; 4, second vacuum generator; 5, vacuum pressurizer; 6, sucker; 7, vacuum meter; 8, air inlet; 10, gas outlet; 11 delivery ports.
Embodiment
Below in conjunction with drawings and Examples the utility model is further described:
Embodiment:
As shown in Figure 2, a kind of scribing machine vacuum voltage stabilizing adsorbent equipment, comprise sucker 6, air compressor 1, electromagnetically operated valve 2 and vacuum generator, air compressor 1 links to each other with vacuum generator through electromagnetically operated valve 2, described vacuum generator comprises first vacuum generator 3 and second vacuum generator 4, be provided with a vacuum pressurizer 5 between the vacuum ports of first vacuum generator 3 and the sucker 6, this vacuum pressurizer 5 is a closed cylindrical shell, the top of this closed cylindrical shell is provided with air inlet 8 and gas outlet 10, its underpart is provided with delivery port 11, described air inlet 8 links to each other with sucker 6 through tracheae, gas outlet 10 links to each other through the vacuum ports of tracheae with first vacuum generator 3, and delivery port 11 links to each other through the vacuum ports of tracheae with second vacuum generator 4.
This scribing machine vacuum voltage stabilizing adsorbent equipment also comprises a vacuum meter 7, the measurement mouth of this vacuum meter 7 is communicated with the inner chamber of closed cylindrical shell vacuum pressurizer 5, can intuitively find out scribing machine sucker vacuum degree by this vacuum meter 7, be convenient to this vacuum degree control in the required scope of technology.
Because the utility model is provided with a vacuum pressurizer 5 between the vacuum ports of first vacuum generator 3 and sucker 6, and add one second vacuum generator 4 simultaneously, the delivery port 11 of closed cylindrical shell vacuum pressurizer 5 bottoms directly links to each other with the vacuum ports of second vacuum generator 4, make behind the water suction closed cylindrical shell of sucker 6 inspiration tracheaes, directly siphoned away discharge by second vacuum generator 4, and the vacuum ports of first vacuum generator 3 links to each other with the gas outlet 10 on closed cylindrical shell vacuum pressurizer 5 tops, thereby can guarantee sucker 6 vacustats in the required scope of technology, in the course of processing, fly out or cut the phenomenon of wearing silicon chip with regard to having avoided simultaneously owing to the unstable silicon chip that causes of sucker 6 vacuum degrees; Because sucker 6 vacustats in the required scope of technology, can be pieced together sheet or unfilled corner sheet for those and can be placed on this sucker 6 and cut, thereby save raw material greatly, reduced the waste of raw material again.
The foregoing description only is explanation technical conceive of the present utility model and characteristics, and its purpose is to allow the personage who is familiar with this technology can understand content of the present utility model and enforcement according to this, can not limit protection range of the present utility model with this.All equivalences of being done according to the utility model spirit change or modify, and all should be encompassed within the protection range of the present utility model.
Claims (3)
1, a kind of scribing machine vacuum voltage stabilizing adsorbent equipment, comprise sucker (6), source of the gas, electromagnetically operated valve (2) and vacuum generator, source of the gas links to each other with vacuum generator through electromagnetically operated valve (2), it is characterized in that: described vacuum generator comprises first vacuum generator (3) and second vacuum generator (4), be provided with a vacuum pressurizer (5) between the vacuum ports of first vacuum generator (3) and the sucker (6), this vacuum pressurizer (5) is a closed cylindrical shell, the top of this closed cylindrical shell is provided with air inlet (8) and gas outlet (10), its underpart is provided with delivery port (11), described air inlet (8) links to each other with sucker (6) through tracheae, gas outlet (10) links to each other through the vacuum ports of tracheae with first vacuum generator (3), and delivery port (11) links to each other through the vacuum ports of tracheae with second vacuum generator (4).
2, scribing machine vacuum voltage stabilizing adsorbent equipment according to claim 1 is characterized in that: comprise a vacuum meter (7), the measurement mouth of this vacuum meter (7) is communicated with the inner chamber of closed cylindrical shell.
3, scribing machine vacuum voltage stabilizing adsorbent equipment according to claim 1, it is characterized in that: described source of the gas is an air compressor (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200820035555XU CN201181695Y (en) | 2008-04-22 | 2008-04-22 | Vacuum voltage regulation adsorber of scribing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200820035555XU CN201181695Y (en) | 2008-04-22 | 2008-04-22 | Vacuum voltage regulation adsorber of scribing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201181695Y true CN201181695Y (en) | 2009-01-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU200820035555XU Expired - Fee Related CN201181695Y (en) | 2008-04-22 | 2008-04-22 | Vacuum voltage regulation adsorber of scribing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201181695Y (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101671122B (en) * | 2009-08-18 | 2011-05-25 | 济南德佳玻璃机器有限公司 | Vacuum control system of hollow glass roller pressing machine |
| CN102179881A (en) * | 2011-04-01 | 2011-09-14 | 石金精密科技（深圳）有限公司 | System for adsorbing and fixing plane thin plate |
| CN102267131A (en) * | 2011-07-19 | 2011-12-07 | 惠州Tcl移动通信有限公司 | Mobile phone fixing device and mobile phone fixing platform |
| CN104057387A (en) * | 2014-06-05 | 2014-09-24 | 苏州凯锝微电子有限公司 | Cutting system with vacuum voltage stabilizer |
| CN109531841A (en) * | 2017-09-21 | 2019-03-29 | 株式会社迪思科 | The installing mechanism of cutting tool |
| CN110907217A (en) * | 2019-11-25 | 2020-03-24 | 长沙永昌车辆零部件有限公司 | Sample sampling equipment for detecting sealing strip and using method |
| CN112963391A (en) * | 2021-05-18 | 2021-06-15 | 沈阳和研科技有限公司 | Gas circuit control system suitable for abrasive wheel scribing machine |
| CN116494403A (en) * | 2023-06-28 | 2023-07-28 | 沈阳和研科技股份有限公司 | Vacuum gas circuit filtering device and filtering method of dicing saw |
-
2008
- 2008-04-22 CN CNU200820035555XU patent/CN201181695Y/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101671122B (en) * | 2009-08-18 | 2011-05-25 | 济南德佳玻璃机器有限公司 | Vacuum control system of hollow glass roller pressing machine |
| CN102179881A (en) * | 2011-04-01 | 2011-09-14 | 石金精密科技（深圳）有限公司 | System for adsorbing and fixing plane thin plate |
| CN102267131A (en) * | 2011-07-19 | 2011-12-07 | 惠州Tcl移动通信有限公司 | Mobile phone fixing device and mobile phone fixing platform |
| CN102267131B (en) * | 2011-07-19 | 2015-06-10 | 惠州Tcl移动通信有限公司 | Mobile phone fixing device and mobile phone fixing platform |
| CN104057387A (en) * | 2014-06-05 | 2014-09-24 | 苏州凯锝微电子有限公司 | Cutting system with vacuum voltage stabilizer |
| CN104057387B (en) * | 2014-06-05 | 2017-03-15 | 苏州凯锝微电子有限公司 | A kind of diced system with vacuum voltage regulation device |
| CN109531841A (en) * | 2017-09-21 | 2019-03-29 | 株式会社迪思科 | The installing mechanism of cutting tool |
| CN109531841B (en) * | 2017-09-21 | 2022-03-11 | 株式会社迪思科 | Mounting mechanism for cutting tool |
| CN110907217A (en) * | 2019-11-25 | 2020-03-24 | 长沙永昌车辆零部件有限公司 | Sample sampling equipment for detecting sealing strip and using method |
| CN112963391A (en) * | 2021-05-18 | 2021-06-15 | 沈阳和研科技有限公司 | Gas circuit control system suitable for abrasive wheel scribing machine |
| CN116494403A (en) * | 2023-06-28 | 2023-07-28 | 沈阳和研科技股份有限公司 | Vacuum gas circuit filtering device and filtering method of dicing saw |
| CN116494403B (en) * | 2023-06-28 | 2023-10-13 | 沈阳和研科技股份有限公司 | Vacuum gas circuit filtering device and filtering method of dicing saw |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090114 Termination date: 20160422 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |