CN201130669Y - HIT solar cell lighting on two surfaces - Google Patents

HIT solar cell lighting on two surfaces Download PDF

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Publication number
CN201130669Y
CN201130669Y CNU2007200677328U CN200720067732U CN201130669Y CN 201130669 Y CN201130669 Y CN 201130669Y CN U2007200677328 U CNU2007200677328 U CN U2007200677328U CN 200720067732 U CN200720067732 U CN 200720067732U CN 201130669 Y CN201130669 Y CN 201130669Y
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CN
China
Prior art keywords
amorphous silicon
film
sic
type
hit solar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNU2007200677328U
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Chinese (zh)
Inventor
李华维
胡宏勋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NINGBO SHANSHAN YOULIKA SOLAR ENERGY TECHNOLOGY DEVELOPMENT Co Ltd
Original Assignee
NINGBO SHANSHAN YOULIKA SOLAR ENERGY TECHNOLOGY DEVELOPMENT Co Ltd
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Application filed by NINGBO SHANSHAN YOULIKA SOLAR ENERGY TECHNOLOGY DEVELOPMENT Co Ltd filed Critical NINGBO SHANSHAN YOULIKA SOLAR ENERGY TECHNOLOGY DEVELOPMENT Co Ltd
Priority to CNU2007200677328U priority Critical patent/CN201130669Y/en
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Publication of CN201130669Y publication Critical patent/CN201130669Y/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/548Amorphous silicon PV cells

Abstract

The utility model relates to a new type HIT solar battery structure with both sides illumination, two layers of intrinsic amorphous silicon film (i a-Si) are respectively deposited on the two sides of a N-shaped monocrystalline silicon wafer, then a P-shaped hydrogenation amorphous silicon carbide film (p a-SiC:H) is deposited on the front intrinsic amorphous silicon film, a N-shaped hydrogenation amorphous silicon carbide film (n a-SiC:H) or an N-shaped microcrystalline silicon film (n uc-Si) is deposited on the back intrinsic amorphous silicon film, then an ITO transparent conductive film is respectively plated on the two sides, the front and back metal electrodes are prepared by screen printing, the metal is sintered, i.e. electrode metallization. The new type HIT solar battery structure has the advantages of very high conversion efficiency and good stability.

Description

The please both parties HIT solar cell of photograph
Technical field
The utility model relates to a kind of HIT solar battery structure.
Background technology
On the market, silicon chip holds at high price now, and the cost of silion cell is high, reduce the cost of silion cell, a direction is the turning film battery production, and another direction is to be devoted to improve the transformation efficiency of silion cell, and the purpose of this utility model is to improve the transformation efficiency of silion cell.
Summary of the invention
Be the technical problem of the transformation efficiency that solves aforementioned raising silion cell, the utility model provides a kind of HIT solar cell of the photograph of pleasing both parties; The structure of this solar cell is on the intrinsic amorphous silicon film ia-Si of the front of n type single crystal silicon sheet, to deposit P type hydrogenated amorphous silicon carbide film pa-SiC:H; On the intrinsic amorphous silicon film ia-Si of the back side of n type single crystal silicon sheet,
A, deposition N type hydrogenated amorphous silicon carbide film na-SiC:H forms N/N+ and just ties; Perhaps
B, deposition N type microcrystalline silicon film n uc-Si forms N/N+ and just ties.
The front and back of this solar cell all adopts indium tin oxide target transparent conductive film ITO and palisade Al as electrode.
The utility model has the advantages that battery front side replaces P type amorphous silicon hydride (p a-Si:H) with P type hydrogenated amorphous silicon carbide (pa-SiC:H).Hydrogenated amorphous silicon carbide (a-SiC:H) is compared with amorphous silicon hydride (a-Si:H), can be with and widen, and more helps absorbing sunlight, improves the effect as Window layer.Cell backside is just tied with N type hydrogenated amorphous silicon carbide (n a-SiC:H) and is replaced N type amorphous silicon hydride (n a-Si:H), also is in order to improve the effect as back side Window layer.Replace N type amorphous silicon hydride (n a-Si:H) with N type microcrystal silicon (n uc-Si), help improving the stability of battery.
Description of drawings
Accompanying drawing is a layer structural representation of the present utility model.
The drawing reference numeral explanation:
1--is an Al metal grid lines positive electrode;
2--is positive indium tin oxide target transparent conductive film (ITO);
3--is a P type hydrogenated amorphous silicon carbide film (p a-SiC:H);
4--is positive intrinsic amorphous silicon film (i a-Si);
5--is n type single crystal silicon sheet (n c-Si);
6--is the intrinsic amorphous silicon film (i a-Si) at the back side;
7--is a N type hydrogenated amorphous silicon carbide film (n a-SiC:H);
8--is the indium tin oxide target transparent conductive film (ITO) at the back side;
9--is an Al metal grid lines back electrode.
Embodiment
The utility model is pressed each layer of accompanying drawing structure, utilizes straight flow magnetic control sputtering device plating ito thin film 50~100nm, deposition P type hydrogenated amorphous silicon carbide film (pa-SiC:H), and thickness is 3~20nm; The intrinsic amorphous silicon film (i a-Si) that deposition is positive, thickness is 3~20nm; Deposition n type single crystal silicon sheet (n c-Si), thickness is 200~300um, resistivity is 0.2~15 Ω .cm, minority carrier life time 1~100us; The intrinsic amorphous silicon film (i a-Si) at the deposition back side, thickness is 3~20nm; Deposition N type hydrogenated amorphous silicon carbide film (n a-SiC:H), thickness 3~20nm, perhaps: deposition N type microcrystalline silicon film (n uc-Si), thickness 5~20nm; The indium tin oxide target transparent conductive film (ITO) at the back side, thickness is 50~100nm.
Specific embodiment is:
1. cleaning
Monocrystalline silicon piece polishes with CP4, and the silicon chip after the cleaning is a burnishing surface, requires surface-brightening, immaculate, cut, water mark, and the silicon chip surface clean level requires very high.
2. pecvd process
Flat-plate type PECVD will be distinguished deposition intrinsic amorphous silicon membrane (i a-Si), P type hydrogenated amorphous silicon carbide film (p a-SiC:H), N type hydrogenated amorphous silicon carbide film (n a-SiC:H) or N type microcrystalline silicon film (n uc-Si), and depositing temperature is lower than 300 ℃.
3. magnetron sputtering technique
Utilize straight flow magnetic control sputtering device plating ito thin film 50~100nm, light transmittance is greater than 85%;
4. silk-screen sintering process
With screen printer print low temperature aluminium paste, low-temperature sintering becomes electrode again.Whole manufacture craft is very crucial to temperature controlling, so requirement is very strict, maximum temperature is not above 300 ℃.Front and back electrode symmetry is printed.

Claims (2)

1. the HIT solar cell of the photograph of pleasing both parties is characterized in that, on the intrinsic amorphous silicon film ia-Si of the front of n type single crystal silicon sheet, and deposition P type hydrogenated amorphous silicon carbide film pa-SiC:H; On the intrinsic amorphous silicon film ia-Si of the back side of n type single crystal silicon sheet,
A, deposition N type hydrogenated amorphous silicon carbide film na-SiC:H forms N/N+ and just ties; Perhaps
B, deposition N type microcrystalline silicon film nuc-Si forms N/N+ and just ties.
2. by the HIT solar cell of the described photograph of pleasing both parties of claim 1, it is characterized in that front and back all adopts indium tin oxide target transparent conductive film ITO and palisade Al as electrode.
CNU2007200677328U 2007-03-09 2007-03-09 HIT solar cell lighting on two surfaces Expired - Lifetime CN201130669Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2007200677328U CN201130669Y (en) 2007-03-09 2007-03-09 HIT solar cell lighting on two surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2007200677328U CN201130669Y (en) 2007-03-09 2007-03-09 HIT solar cell lighting on two surfaces

Publications (1)

Publication Number Publication Date
CN201130669Y true CN201130669Y (en) 2008-10-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNU2007200677328U Expired - Lifetime CN201130669Y (en) 2007-03-09 2007-03-09 HIT solar cell lighting on two surfaces

Country Status (1)

Country Link
CN (1) CN201130669Y (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102136517A (en) * 2011-02-21 2011-07-27 芜湖明远新能源科技有限公司 Crystalline silicon heterojunction lamination solar cell and manufacture method thereof
CN102299206A (en) * 2011-08-30 2011-12-28 南京航空航天大学 Heterojunction solar cell and manufacturing method thereof
CN102522446A (en) * 2011-12-30 2012-06-27 常州天合光能有限公司 HIT solar cell structure and manufacturing method thereof
CN103000741A (en) * 2012-11-21 2013-03-27 国电光伏(江苏)有限公司 Black heterogeneous crystalline cell and manufacture method thereof
CN104393066A (en) * 2014-11-28 2015-03-04 常州天合光能有限公司 Solar cell apparatus structure with point contact structure and preparation method of solar cell apparatus structure
CN105244402A (en) * 2015-10-14 2016-01-13 广东爱康太阳能科技有限公司 Efficient heterojunction solar cell and manufacturing method thereof
RU2590284C1 (en) * 2015-04-10 2016-07-10 Общество с ограниченной ответственностью "НТЦ тонкопленочных технологий в энергетике при ФТИ им. А.Ф. Иоффе", ООО "НТЦ ТПТ" Solar cell
RU2632266C2 (en) * 2016-02-09 2017-10-03 Общество с ограниченной ответственностью "НТЦ тонкопленочных технологий в энергетике при ФТИ им. А.Ф. Иоффе", ООО "НТЦ ТПТ" Heterostructure photoelectric converter based on crystalline silicon

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102136517A (en) * 2011-02-21 2011-07-27 芜湖明远新能源科技有限公司 Crystalline silicon heterojunction lamination solar cell and manufacture method thereof
CN102299206A (en) * 2011-08-30 2011-12-28 南京航空航天大学 Heterojunction solar cell and manufacturing method thereof
CN102299206B (en) * 2011-08-30 2013-11-06 南京航空航天大学 Heterojunction solar cell and manufacturing method thereof
CN102522446A (en) * 2011-12-30 2012-06-27 常州天合光能有限公司 HIT solar cell structure and manufacturing method thereof
CN102522446B (en) * 2011-12-30 2014-02-26 常州天合光能有限公司 HIT solar cell structure and manufacturing method thereof
CN103000741A (en) * 2012-11-21 2013-03-27 国电光伏(江苏)有限公司 Black heterogeneous crystalline cell and manufacture method thereof
CN104393066A (en) * 2014-11-28 2015-03-04 常州天合光能有限公司 Solar cell apparatus structure with point contact structure and preparation method of solar cell apparatus structure
RU2590284C1 (en) * 2015-04-10 2016-07-10 Общество с ограниченной ответственностью "НТЦ тонкопленочных технологий в энергетике при ФТИ им. А.Ф. Иоффе", ООО "НТЦ ТПТ" Solar cell
CN105244402A (en) * 2015-10-14 2016-01-13 广东爱康太阳能科技有限公司 Efficient heterojunction solar cell and manufacturing method thereof
RU2632266C2 (en) * 2016-02-09 2017-10-03 Общество с ограниченной ответственностью "НТЦ тонкопленочных технологий в энергетике при ФТИ им. А.Ф. Иоффе", ООО "НТЦ ТПТ" Heterostructure photoelectric converter based on crystalline silicon

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