CN201083958Y - Jet printing apparatus for mask process - Google Patents
Jet printing apparatus for mask process Download PDFInfo
- Publication number
- CN201083958Y CN201083958Y CNU2007201494502U CN200720149450U CN201083958Y CN 201083958 Y CN201083958 Y CN 201083958Y CN U2007201494502 U CNU2007201494502 U CN U2007201494502U CN 200720149450 U CN200720149450 U CN 200720149450U CN 201083958 Y CN201083958 Y CN 201083958Y
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- CN
- China
- Prior art keywords
- nozzle
- spray equipment
- support
- masking process
- adjusting bracket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to a spray device for masking craft, comprising a support and a nozzle. The nozzle is connected with the support by a fixing frame and at least one adjusting frame is arranged between the nozzle and the support. The adjusting frame is used for compensating the self deformation of the nozzle and keeping the straightness of the nozzle by forcing corresponding pull or push on the nozzle. The adjusting frame comprises a connecting corner plate fixed on the support and an adjusting rod which is used for forcing corresponding pull or push on the nozzle. One end of the adjusting rod is connected with the connecting corner plate and the other end is connected with the nozzle. The utility model adopts the adjusting frame between the support and the nozzle, reduces the deformation and compensating the produced deformation by forcing, so can continuously control the straightness of the nozzle in required technical range. The utility model also has the advantages of prolonging the life of the nozzle, reducing the production cost and improving the production quality.
Description
Technical field
The utility model relates to the equipment that uses in a kind of colored filter making, relates in particular to a kind of masking process spray equipment.
Background technology
At present, the masking process of making colored filter all adopts the strip nozzle to apply the mask material on substrate.Fig. 3 is the structural representation of prior art spray equipment, and spray equipment comprises support 10 and nozzle 30, and support 10 is connected with nozzle 30 by erecting frame 20, makes strip nozzle 30 be positioned at the top of substrate 50 straightly.During work, at first adjust erecting frame 20, make the distance of 50 of strip nozzle 30 identical and substrates have a flat preferably property with substrate 50 width, begin the mask operation then, nozzle 30 is on one side to substrate ejection mask material, end from substrate moves to the other end on one side, finishes the coating of whole base plate.Flat property between nozzle and the substrate directly influences the thickness and the uniformity coefficient of mask material coating, and thickness and uniformity coefficient have considerable influence to the exposure effect of subsequent technique, flatness requirement to nozzle in the therefore existing mask processing procedure is very high, and the flatness of control nozzle has become the key factor in the colored filter making.
The actual use shows that there is following deficiency in the prior art spray equipment in structural design with in using:
(1) along with substrate size is increasing, nozzle length is more and more longer, and the nozzle of prior art structure can shorten maintenance cycle because of deformation inevitably takes place the influence of extraneous factors such as gravity in long-time the use, and increase servicing time, lowered production efficiency;
(2) owing to adopt the end to regulate, can't regulate the deformation of nozzle self, therefore when nozzle deformation surpasses certain limit, need keep in repair shaping to nozzle, the serviceable life of nozzle is short, has increased production cost.
The utility model content
The purpose of this utility model provides a kind of masking process spray equipment, effectively solves the prior art nozzle and deformation easily takes place, can't regulate technological deficiencies such as the nozzle maintenance cycle that causes is short, serviceable life is short to deformation.
For achieving the above object, the utility model provides a kind of masking process spray equipment, comprise support and be connected nozzle on the described support, be connected with at least one between described nozzle and the support and make nozzle keep the adjusting bracket of flatness with compensating jet self deformation by nozzle being produced corresponding pulling force or thrust by erecting frame.
Described connection gusset comprises riser and transverse slat, and described riser is connected with described support, and described transverse slat is connected with described adjuster bar by a mounting hole.
Described mounting hole is provided with internal thread, is provided with externally threaded adjuster bar and is screwed onto in the described mounting hole.
The end of described adjuster bar also is provided with knob.
Offer the connecting hole that internal thread is set on the described nozzle, be provided with externally threaded adjuster bar and be screwed onto in the described connecting hole.
On the technique scheme basis, described adjusting bracket can be one, is arranged on the middle part of described nozzle; Described adjusting bracket can be two also, is symmetricly set near the middle part of described nozzle; Described adjusting bracket can also be three, and one of them is arranged on the middle part of described nozzle, near other two middle parts that are symmetricly set on described nozzle.
The utility model proposes a kind of masking process spray equipment of new structure, by between support and nozzle, adjusting bracket being set, reduce nozzle deformation and the deformation that has produced applied external force to compensate, thereby can make the grazing Sustainable Control of nozzle own in required technical scope, efficiently solve the deformation problems after nozzle uses for a long time.Compared with prior art, along with substrate size is increasing, nozzle length is more and more longer, and the utility model can delay the distortion of nozzle, prolongs maintenance cycle, reduces servicing time, enhances productivity.Even nozzle deformation surpasses certain limit, the utility model can keep in repair shaping to nozzle by comprising that two ends are adjusted in interior middle part and regulate, and has prolonged the serviceable life of nozzle greatly, has reduced production cost.The utility model can be simple and direct, the long-time deformation of using the back to produce of compensating jet self effectively, makes the grazing of nozzle have long-time stability, improved the cut-out governing precision, improves the production quality.
Below by drawings and Examples, the technical solution of the utility model is described in further detail.
Description of drawings
Fig. 1 is the utility model structural representation;
Fig. 2 be among Fig. 1 A-A to synoptic diagram;
Fig. 3 is the structural representation of prior art spray equipment.
Description of reference numerals:
The 10-support; The 20-erecting frame; The 30-nozzle;
The 40-adjusting bracket; The 50-substrate; 41-connects gusset;
The 42-adjuster bar; The 43-knob; The 41a-riser;
The 41b-transverse slat; The 41c-mounting hole; The 41d-connecting hole.
Embodiment
Fig. 1 is the utility model structural representation, masking process comprises support 10 and nozzle 30 with the agent structure of spray equipment, nozzle 30 is connected on the support 10 by erecting frame 20, the middle part of nozzle 30 is connected with support 10 by at least one adjusting bracket 40, be arranged near the adjusting bracket 40 in middle part and can produce corresponding pulling force or thrusts nozzle 30, reduce the distortion in nozzle 30 long-term the uses on the one hand, make in the long-time use of nozzle and guarantee grazing, producing the distortion back at nozzle 30 on the other hand makes it keep required flatness by compensating this deformation, make strip nozzle 30 be positioned at substrate 50 tops straightly, guarantee the thickness and the uniformity coefficient of nozzle coating mask material.
Particularly, the utility model adjusting bracket 40 can be one, be arranged on the middle part of nozzle 30, the distortion that can avoid nozzle to cause effectively because of gravity, even after nozzle produces distortion, by the nozzle middle part is applied the distortion that external force directly changes nozzle, the adjustment of auxilliary two ends erecting frame makes the adjustment of nozzle flatness very quick and accurate.Adjusting bracket 40 can be two also, is symmetricly set near the middle part of nozzle 30, and the distortion that can not only effectively avoid nozzle to cause because of gravity can also be eliminated the nozzle variant that other factors cause, and the stress when making nozzle operation is more reasonable.Further, adjusting bracket 40 also can be three, one of them is arranged on the middle part of nozzle 30, near other two middle parts that are symmetricly set on nozzle 30, not only make nozzle stressed rationally, and can realize all in all cases that the nozzle flatness is quick and adjust accurately, improve nozzle serviceable life to greatest extent, prolong maintenance cycle.
The utility model proposes a kind of masking process spray equipment of new structure, by between support and nozzle, adjusting bracket being set, reduce nozzle deformation and the deformation that has produced applied external force to compensate, thereby can make the grazing Sustainable Control of nozzle own in required technical scope, efficiently solve the deformation problems after nozzle uses for a long time.Along with substrate size is increasing, nozzle length is more and more longer, and the utility model technique scheme can delay the distortion of nozzle, prolongs maintenance cycle, reduces servicing time, enhances productivity.Even nozzle deformation surpasses certain limit, the utility model technique scheme can be keeped in repair shaping to nozzle by comprising that two ends are adjusted in interior middle part and regulate, and has prolonged the serviceable life of nozzle greatly, has reduced production cost.
Fig. 2 be among Fig. 1 A-A to synoptic diagram.On the technique scheme basis, the utility model adjusting bracket can have multiple implementation structure, Figure 2 shows that a kind of preferred enforcement structure.As shown in Figure 2, adjusting bracket 40 comprises connection gusset 41 and adjuster bar 42, connecting gusset 41 is fixed on the support 10, one end of adjuster bar 42 be connected gusset 41 and connect, the other end is connected with nozzle 30, by nozzle 30 corresponding pulling force of generation or thrust are reduced nozzle variant and the distortion that has produced is applied external force to compensate.Particularly, connect gusset 41 and comprise riser 41a and transverse slat 41b, riser 41a and transverse slat 41b connect into the gusset shape by an end, riser 41a by screw retention on support 10, transverse slat 41b is provided with mounting hole 41c, mounting hole 41c is provided with internal thread, and adjuster bar 42 is provided with and the suitable external thread of the internal thread of mounting hole 41c, and adjuster bar 42 is connected on the transverse slat 41b adjuster bar 42 by being spirally connected with mounting hole 41c.In the present embodiment, the upper end of adjuster bar 42 also is provided with knob 43, is used to make adjuster bar 42 to rotate, and offers the connecting hole 41d that internal thread is set on the nozzle 30, and adjuster bar 42 is screwed onto in the connecting hole 41d, and realization adjuster bar 42 is connected with nozzle 30.During work, adjuster bar 42 relative transverse slat 41b are moved up and down, nozzle 30 is produced corresponding pulling force or thrust, reduce nozzle variant and the distortion that has produced is applied external force to compensate, make between nozzle 30 and the substrate 50 apart from being consistent by rotary knob 43.
In the utility model technique scheme, erecting frame 20 can adopt the identical structure of adjusting bracket 40, and erecting frame 20 can be two, is arranged on the two ends of nozzle 30.When a plurality of adjusting bracket was set, the connection gusset in each adjusting bracket can be provided with separately, also can adopt the joint angle plate structure of one, and promptly a plurality of adjuster bars are connected in turn on the diverse location of a connection gusset.In addition, on the adjuster bar respective nut can also be set, improve connection and regulating effect.
During the utility model masking process was used with spray equipment, the adjustment process of nozzle flatness was: everywhere distance between gaging nozzle and the substrate at first according to maximal value that records and minimum value, can obtain the mean value of the two; Whether judge mean value less than default domain value range, in this way, adjust and finish,, then the nozzle middle part is applied the distortion of external force compensating jet by the knob on the rotation adjusting bracket as not; Repeat above-mentioned steps afterwards, until nozzle everywhere and the gap between substrate all in the specification range of control, satisfy and produce needed flatness.Therefore the utility model technique scheme can simple and direct, the long-time deformation of using the back to produce of compensating jet self effectively, makes the grazing of nozzle have long-time stability, has improved the cut-out governing precision, improves the production quality.
It should be noted last that, above embodiment is only unrestricted in order to the explanation the technical solution of the utility model, although the utility model is had been described in detail with reference to preferred embodiment, those of ordinary skill in the art is to be understood that, can make amendment or be equal to replacement the technical solution of the utility model, and not break away from the spirit and scope of technical solutions of the utility model.
Claims (9)
1. masking process spray equipment, comprise support and be connected nozzle on the described support by erecting frame, it is characterized in that, be connected with at least one between described nozzle and the support and make nozzle keep the adjusting bracket of flatness with compensating jet self deformation by nozzle being produced corresponding pulling force or thrust.
2. masking process spray equipment according to claim 1, it is characterized in that, described adjusting bracket comprises the connection gusset that is fixed on the support and nozzle produced the adjuster bar of corresponding pulling force or thrust, and an end of described adjuster bar connects with the described gusset that is connected, and the other end is connected with described nozzle.
3. masking process spray equipment according to claim 2 is characterized in that, described connection gusset comprises riser and transverse slat, and described riser is connected with described support, and described transverse slat is connected with described adjuster bar by a mounting hole.
4. masking process spray equipment according to claim 3 is characterized in that described mounting hole is provided with internal thread, is provided with externally threaded adjuster bar and is screwed onto in the described mounting hole.
5. masking process spray equipment according to claim 2 is characterized in that the end of described adjuster bar also is provided with knob.
6. masking process spray equipment according to claim 2 is characterized in that, offers the connecting hole that internal thread is set on the described nozzle, is provided with externally threaded adjuster bar and is screwed onto in the described connecting hole.
7. according to arbitrary described masking process spray equipment in the claim 1～6, it is characterized in that described adjusting bracket is one, be arranged on the middle part of described nozzle.
8. according to arbitrary described masking process spray equipment in the claim 1～6, it is characterized in that described adjusting bracket is two, be symmetricly set near the middle part of described nozzle.
9. according to arbitrary described masking process spray equipment in the claim 1～6, it is characterized in that described adjusting bracket is three, one of them is arranged on the middle part of described nozzle, near other two middle parts that are symmetricly set on described nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201494502U CN201083958Y (en) | 2007-06-05 | 2007-06-05 | Jet printing apparatus for mask process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201494502U CN201083958Y (en) | 2007-06-05 | 2007-06-05 | Jet printing apparatus for mask process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201083958Y true CN201083958Y (en) | 2008-07-09 |
Family
ID=39626429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007201494502U Expired - Lifetime CN201083958Y (en) | 2007-06-05 | 2007-06-05 | Jet printing apparatus for mask process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201083958Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102854760A (en) * | 2012-09-27 | 2013-01-02 | 上海宏力半导体制造有限公司 | Nozzle device for wafer machining and semiconductor manufacturing equipment |
| CN107848051A (en) * | 2015-07-17 | 2018-03-27 | 本田技研工业株式会社 | Electro-deposition instrument, gear grinding helical form grinding tool, the manufacture method of the manufacture method of electro-deposition instrument and gear grinding helical form grinding tool |
-
2007
- 2007-06-05 CN CNU2007201494502U patent/CN201083958Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102854760A (en) * | 2012-09-27 | 2013-01-02 | 上海宏力半导体制造有限公司 | Nozzle device for wafer machining and semiconductor manufacturing equipment |
| CN107848051A (en) * | 2015-07-17 | 2018-03-27 | 本田技研工业株式会社 | Electro-deposition instrument, gear grinding helical form grinding tool, the manufacture method of the manufacture method of electro-deposition instrument and gear grinding helical form grinding tool |
| US10857652B2 (en) | 2015-07-17 | 2020-12-08 | Honda Motor Co., Ltd. | Electroplated tool, screw-shaped grindstone for grinding gear, method for manufacturing electroplated tool, and method for manufacturing screw-shaped grindstone for grinding gear |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150616 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150616 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150616 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176 Beijing economic and Technological Development Zone, West Central Road, No. 8 Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20080709 |