CN201068158Y

CN201068158Y - Wafer transporting vehicle

Info

Publication number: CN201068158Y
Application number: CNU2007200719320U
Authority: CN
Inventors: 李雨庭
Original assignee: Individual
Current assignee: Liuhe Peak (tianjin) Polytron Technologies Inc
Priority date: 2007-06-29
Filing date: 2007-06-29
Publication date: 2008-06-04
Anticipated expiration: 2017-06-29

Abstract

The utility model discloses an ingot cylinder transporting vehicle. The rack height arranged by the prior double-layer fixed type rack transporting vehicle does not comply with the principle of the human engineering, and the height can not be adjusted, to cause that the back and the waist of a worker are easy to be damaged when a crystal box is taken or put from the rack, and the long term operation has serious damage to health. In order to solve the above problem, the utility model provides the ingot cylinder transporting vehicle with a movable type rack, which comprises a vehicle body and two layers of racks, the upper layer rack is formed by hinging two baffle plates to an axle rod, the axle rod is fixed on the supporting frame of the vehicle body, the two baffle plates can rotate around the axle rod, and have a spreading status and a collecting status; two groups of gliding wheels are fixed on the vehicle body, a pulling rope is arranged on each group of gliding wheels, one end of the pulling rope is fixed on the lower layer rack, and the lower layer rack can be lifted by pulling the other end of the pulling rope. The transporting vehicle adopting the utility model can adjust the rack to the height of complying with the principle of the human engineering, thereby avoiding the human body damage of workers.

Description

A kind of vehicle for transporting silicon wafer

Technical field

The utility model relates to the wafer conveying arrangement, particularly a kind of vehicle for transporting silicon wafer with mobile shelving.

Background technology

Along with wafer size is increased to 12 cun from 8 cun, the size that is used to place the brilliant box (FOUP) of front open type of wafer and spare and accessory parts thereof is also increasing, makes the weight of brilliant box constantly increase, and a weight of carrying the FOUP of full wafer is about 9.8Kg.If these materials all are automatic jobs, the increase of so this size and weight may not can cause any great human-body biological engineering risk.But full-automatic operation can not realize fully, therefore still has the situation of a dead lift inevitably, and for example chip is measured, brilliant box is transported to links such as artificial shelf.Along with increasing chip manufacturer shifts toward the Asia, and most operating personnel is the women, and it is more obvious that the size of FOUP and weight issue become.

From the angle of human-body biological engineering science, optimal carrying height should be about people's waist during carrying heavy goods.And along with the raising of the operating cost and the work efficiency of existing clean room, it is unpractiaca that the shelves high of transporting the go-cart of FOUP is located at the so single height of operating personnel's waist, can influence conveying efficiency greatly like this.Usually, adopt the transport trolley with double-deck fixed type shelf to carry, place the brilliant box of two front open types for every layer, the so inevitable height that has one deck shelf does not at least meet the human-body biological engineering science and requires.The operating personnel need repeat to place the action of the brilliant box of front open type from low to high or from high to low, puts skill if can not defer to correct act, can cause the continuation chronic ache of operating personnel back and waist, thereby have a strong impact on employee's physical and mental health.

Therefore, how to provide a kind of vehicle for transporting silicon wafer that meets human-body biological engineering science principle to become the technical matters that industry needs to be resolved hurrily.

The utility model content

The purpose of this utility model is to provide a kind of new vehicle for transporting silicon wafer, the multilayer shelf of this transport trolley all can be transferred to ergonomical height, thus the injury of human that occurs when avoiding the operating personnel to cause carrying because of brilliant box placement location is too high or too low.

In order to realize above-mentioned purpose, the utility model provides a kind of vehicle for transporting silicon wafer, comprise vehicle body and two-layer shelf, wherein, the upper strata shelf is hinged to an axostylus axostyle by two shelves and forms, described axostylus axostyle is fixed on the support of vehicle body, and two shelves can be around spindle rotation, and has a deployed condition and a rounding state; Be fixed with two groups of pulleys on the vehicle body, all stride on every group of pulley and be provided with stay cord, an end of described stay cord is fixed on lower floor's shelf, can rise lower floor's shelf by the other end that spurs stay cord.

The bottom of described lower floor shelf also is provided with the live metal post, and an end of described stay cord is connected to the live metal post, rises the live metal post by the other end that spurs stay cord and holds up lower floor's shelf.

Be connected by damping spring between the bottom of described shelf and the body support.

Described shelf bottom has the twice chute, is provided with sliding part in the chute, and links to each other by a chain wheel rope between each sliding part and the corresponding live metal post, and described chain wheel rope is crossed on the pulley.

Also be provided with shock absorber, for example damping spring between described lower floor shelf and the underbody.

The position that the both sides of described vehicle body are positioned at the pulley below is provided with one group of trip, and described trip links to each other with vehicle body by articulated structure; The trip button also is housed, with folding of control trip on the vehicle body.

Compare with existing vehicle for transporting silicon wafer with multilayer fixed type shelf, transport trolley of the present utility model has adopted the upper strata shelf that can draw in, lower floor's shelf can be risen by pulley and stay cord, make the operating personnel when access crystalline substance box, its operation height can remain on the optimum position that meets human engineering, has avoided unnecessary injury of human.

Description of drawings

Vehicle for transporting silicon wafer of the present utility model is provided by following embodiment and accompanying drawing.

Fig. 1 is the inner structure scheme drawing of vehicle for transporting silicon wafer of the present utility model;

Fig. 2 is the structural representation of the upper strata shelf of vehicle for transporting silicon wafer when being positioned at rounding state;

Fig. 3 is the structural representation of the utility model first embodiment;

Fig. 4 is the structural representation of the utility model second embodiment;

Fig. 5 is the structural representation of the utility model the 3rd embodiment.

The specific embodiment

Below will be described in further detail vehicle for transporting silicon wafer of the present utility model.

Referring to Fig. 1, vehicle for transporting silicon wafer of the present utility model comprises vehicle body 10 and two-layer shelf.The upper strata shelf is made up of two

shelves

31,32 and an axostylus axostyle 33, and

shelf

31,32 is hinged to axostylus axostyle 33, and can turn to a deployed condition or a rounding state around axostylus axostyle 33.Shown in Figure 1 is deployed condition, under this state, can place a brilliant box 40 respectively on two shelves 31,32.Lower floor's shelf 20 is movable shelf, by cooperating of pulley 21 and stay cord 22, can make lower floor's shelf 20 do dipping and heaving under the traction of stay cord 22 in vehicle body 10.

After the brilliant box 40 on the shelf of upper strata is taken away by the operating personnel, need the brilliant box 40 on the continuation access lower floor shelf 20.Referring to Fig. 2, when the operation personnel were risen lower floor's shelf 20 by stay cord 22,

shelf

31,32 turned to rounding state along axostylus axostyle 33, reserves the passage that passes through for brilliant box 40.When lower floor's shelf 20 hit the ceilings, shelf 20 is fixing, thus the operating personnel can carry out the work that picks and places of brilliant box 40.Though be somebody's turn to do the height of height, but still in meeting the reasonable altitudes scope of human engineering a little less than the upper strata shelf.

Referring to Fig. 3, in first embodiment of the present utility model, the position at corresponding four angles, the bottom of lower floor's shelf 20 also is provided with live metal post 23, and an end of stay cord 22 is fixed on the live metal post 23, rises live metal post 23 by the other end that spurs stay cord 22 and holds up lower floor's shelf 20.Between the bottom of two

shelves

31,32 of upper strata shelf and the body support 11 damping spring 34 is housed, this damping spring 34 makes

shelf

31,32 can be automatically brought to the

curling position shelf

31,32 jack-up upwards.Control the folding of

shelf

31,32 for convenience, have twice chute 35, be embedded with sliding part in the chute 35, for example the small sheave (not shown) in the bottom of every shelf.Link to each other by chain wheel rope 24 between each sliding part and the corresponding live metal post 23, this chain wheel rope 24 also is crossed on the pulley 21.When lower floor's shelf 20 rose, chain wheel rope 24 loosened, and sliding part slides to the axostylus axostyle direction along chute 35, and at this moment, damping spring 34 is loosened, and

shelf

31,32 rotates to the curling position under the promotion of damping spring 34 elastic force gradually; When lower floor's shelf 20 descended, live metal post 34 affected chain wheel rope 24 to tighten up gradually, and sliding part slides to the direction away from axostylus axostyle along chute 35, and at this moment, chain wheel rope 24 is given 31,32 1 downward pulling force of shelf, makes

shelf

31,32 slowly get back to expanded position.

Referring to Fig. 4, in second embodiment of the present utility model, also be provided with shock absorber between lower floor's shelf 20 and vehicle body 10 bases, for example damping spring 12.When lower floor's shelf 20 descended, damping spring 12 can play buffer action, avoids shelf 20 to descend rapidly; When the pulling stay cord rises shelf 20, because damping spring 12 has elastic restoring force, give 20 1 thrusts that make progress of shelf, therefore can reach the labour-saving purpose.

As shown in Figure 5, in the 3rd embodiment of the present utility model, the position that vehicle body 10 both sides are positioned at pulley 21 belows also is provided with trip 13 and corresponding trip button 14, and trip 13 is connected with vehicle body 10 by articulated structure, and the position under its state of nature as shown in Figure 5.When lower floor's shelf 20 rose, drew in trip 13 both sides to vehicle body 10 under the promotion of shelf 20, thereby lower floor's shelf 20 can be passed through smoothly.When shelf 20 passed through trip 13 fully, because trip 13 suffered external force are cancelled, it returned to the position of state of nature again.At this moment, unclamp stay cord 22, then lower floor's shelf 20 supports and is fixed on shown position by trip 13.When the brilliant box on lower floor's shelf 20 pick and place finish after, draw trips 13 in by pressing trip button 14, make lower floor's shelf 20 again can be following current, get back to initial position.

Vehicle for transporting silicon wafer of the present utility model also can carry out horizontal and vertical expansion as required, changes over the structure more than three layers, to realize the further raising of conveying efficiency.Any apparatus structure of the present utility model is done replacement well know in the art, combination, discrete, all do not exceed exposure of the present utility model and protection domain.

Claims

1. vehicle for transporting silicon wafer, comprise vehicle body and two-layer shelf, it is characterized in that: the upper strata shelf is hinged to an axostylus axostyle by two shelves and forms, and described axostylus axostyle is fixed on the support of vehicle body, two shelves can be around spindle rotation, and has a deployed condition and a rounding state; Be fixed with two groups of pulleys on the vehicle body, and all stride on every group of pulley and be provided with stay cord, an end of described stay cord is fixed on lower floor's shelf, and the other end by the pulling stay cord can rise lower floor's shelf.

2. vehicle for transporting silicon wafer as claimed in claim 1 is characterized in that: the bottom of described lower floor shelf also is provided with the live metal post, and an end of described stay cord is connected to the live metal post, rises the live metal post by the other end that spurs stay cord and holds up lower floor's shelf.

3. vehicle for transporting silicon wafer as claimed in claim 2 is characterized in that: be connected by damping spring between the bottom of described shelf and the body support.

4. vehicle for transporting silicon wafer as claimed in claim 2 is characterized in that: described shelf bottom has the twice chute, is provided with sliding part in the chute, and links to each other by a chain wheel rope between each sliding part and the corresponding live metal post.

5. vehicle for transporting silicon wafer as claimed in claim 4 is characterized in that: described chain wheel rope is crossed on the pulley.

6. vehicle for transporting silicon wafer as claimed in claim 1 is characterized in that: also be provided with shock absorber between described lower floor shelf and the underbody.

7. vehicle for transporting silicon wafer as claimed in claim 6 is characterized in that: described shock absorber is a damping spring.

8. vehicle for transporting silicon wafer as claimed in claim 1 is characterized in that: the position that the both sides of described vehicle body are positioned at the pulley below is provided with one group of trip, and described trip links to each other with vehicle body by articulated structure.

9. vehicle for transporting silicon wafer as claimed in claim 8 is characterized in that: the trip button also is housed, with folding of control trip on the vehicle body.