CN201053510Y - Super high vacuum hand-operated, pneumatic gate valve - Google Patents
Super high vacuum hand-operated, pneumatic gate valve Download PDFInfo
- Publication number
- CN201053510Y CN201053510Y CNU2007200132330U CN200720013233U CN201053510Y CN 201053510 Y CN201053510 Y CN 201053510Y CN U2007200132330 U CNU2007200132330 U CN U2007200132330U CN 200720013233 U CN200720013233 U CN 200720013233U CN 201053510 Y CN201053510 Y CN 201053510Y
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- valve plate
- valve
- ultrahigh vacuum
- plate frame
- screw
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Abstract
The utility model relates to a gate valve in an ultrahigh vacuum system, in particular to an ultrahigh vacuum manual and pneumatic gate valve which is used for regulating air flow, disconnecting or connecting pipelines. The utility model comprises an upper valve plate, a lower valve plate and a valve body, wherein, the valve body is provided inside with a valve plate support; the upper valve plate and the lower valve plate are respectively arranged at two sides of the valve plate support; the surfaces of the upper valve plate and the lower valve plate opposite to the valve plate support are respectively distributed with a plurality of drop-shaped grooves, and ball frames equal to the number of grooves are correspondingly arranged on the valve plate support; spaces between the drop-shaped grooves and the ball frames hold roll balls; the upper valve plate and the lower valve plate are both provided with grooves which are fixed with catch pins; one end of a leaf spring is connected with the catch pin, while the other end is a free end; the upper valve plate and the lower valve plate are connected through the leaf spring; one end of the valve plate support is provided with a positioning axis, while the other end of the valve plate support is provided with a bearing, and a four link rod mechanism is connected with the valve plate support through the bearing, while the other end of the four link rod mechanism is connected with a control unit. The utility model has the advantages of reducing micro-dust and air entraining, and achieving double functions of manual and pneumatic control.
Description
Technical field
The utility model relates to the gate valve in the ultra-high vacuum system, specifically a kind of adjustments of gas flow that is used for, ultrahigh vacuum hand, the pneumatic brake plate valve of cut-out or connection pipeline.
Background technique
At present, the ultrahigh vacuum hand that people generally use, pneumatic brake plate valve, its technology and performance index etc. are all relatively backward, complex structure, processing and assembling are all inconvenient, are difficult to satisfy the requirement of ultra-high vacuum system.Existing ultrahigh vacuum gate valve is made up of upper and lower valve plate, valve plate frame, drive unit, valve body etc., and valve plate frame is installed in the valve body, and upper and lower valve plate is connected to the both sides of valve plate frame.Valve plate frame is become by the slab car, and both sides and a surface are provided with axle, is with guide bearing on the axle.Be equipped with a screw rod on the upper and lower valve plate, connecting a sheet of leaf spring on the screw rod, fix by screw again.In addition, pneumatic brake plate valve and manually gate valve structure are inequality again.The ultrahigh vacuum gate valve of this existing structure is owing to have screw, screw rod, and guide bearing is again to be connected on the valve plate frame through axle, between screw and the screw rod, guide bearing with spool between have micronic dust.Have again, also can accompany gas between guide bearing and the axle, reduce the degree of vacuum of system, particularly can not satisfy the requirement of semiconductor manufacturing industry the cleaning ultra-high vacuum system.
The model utility content
Existing gate valve contains micronic dust, gas enclosure influences deficiencys such as degree of vacuum in order to solve, and the purpose of this utility model is to provide a kind of minimizing micronic dust, gas enclosure, but the ultrahigh vacuum hand of double-purpose, pneumatic brake plate valve.
The purpose of this utility model is achieved through the following technical solutions:
The utility model comprises valve plate, lower valve plate and valve body, be provided with valve plate frame in the valve body, upper and lower valve plate is installed in the both sides of valve plate frame respectively, upper and lower valve plate and valve plate frame facing surfaces are evenly equipped with a plurality of drops grooves respectively, be provided with the ball rack that number equates on the valve plate frame accordingly, the space content that drops groove and ball rack form is equipped with ball; Be equipped with groove on the upper and lower valve plate, be connected with pin on the groove, an end of leaf spring is connected on the pin, and the other end is a free end, and upper and lower valve plate is connected by leaf spring; One end of valve plate frame is provided with positioning shaft, and the other end is provided with bearing, and quadratic crank mechanism is connected with valve plate frame by bearing; The other end of quadratic crank mechanism is connected with control unit.
Wherein: described control unit is manually, comprises bellows, handle, leading screw and screw, and an end of leading screw is fixed on the handle, and the other end is connected with screw, an end of bellows and screw interlock, and the other end connects quadratic crank mechanism; Have slotted hole on the housing of manual control unit, be equipped with bearing pin in it, bearing pin and screw interlock, the revolute pair of restriction screw; Described control unit is pneumatic, comprises cylinder, and the connecting rod of cylinder is connected with quadratic crank mechanism; Described leaf spring is the clamp plate type structure, and an end is clipped in respectively on the pin of upper and lower valve plate, and the other end is a free end; The one side that valve plate is gone up in the both sides of described valve plate frame and connection is provided with guide bearing; The described valve plate inner peripheral wall of going up is provided with seal ring; Be evenly equipped with a plurality of vent holes on the described lower valve plate; Have circular hole on the described valve plate frame, ball rack circumference of living in is coaxial with it; Ball rack is the hemispherical dome structure of upward opening.
Advantage of the present utility model and good effect are:
1. minimizing micronic dust.The middle part of upper and lower valve plate of the present utility model all has two grooves, is welded with two pins on the groove respectively, leaf spring is connected on the pin, has avoided screw, screw rod to connect and the micronic dust that contains.
2. minimizing gas enclosure.Guide bearing of the present utility model is directly installed on the valve plate frame, has avoided accompanying gas because of being enclosed within on the axle.
3. realize hand, pneumatic double-purpose.The utility model control unit divides manual, pneumatic two-part, can exchange.
Description of drawings
Fig. 1 is the structural representation of the utility model manually gate valve;
Fig. 2 is the left view of Fig. 1;
Fig. 3 is the plan view of Fig. 1;
Fig. 4 is the perspective view of the utility model manually gate valve;
Fig. 5 is the explosive view of the utility model manually gate valve;
Fig. 6 is the perspective view of the utility model pneumatic brake plate valve;
Fig. 7 is the explosive view of the utility model pneumatic brake plate valve;
Fig. 8 is the structural representation of the utility model valve plate frame;
Fig. 9 is one of structural representation of valve plate on the utility model;
Figure 10 be valve plate on the utility model structural representation two;
Figure 11 is one of structural representation of the utility model lower valve plate;
Figure 12 be the utility model lower valve plate structural representation two;
Wherein: 1 is last valve plate, and 2 is lower valve plate, and 3 is valve plate frame, and 4 is control unit, 5 is valve body, and 6 is rectangular recess, and 7 is pin, and 8 is leaf spring, 9 is vent hole, and 10 is the drops groove, and 11 is circular hole, and 12 is ball rack, 13 is guide bearing, and 14 is bearing, and 15 is positioning shaft, and 16 is seal ring, 17 is quadratic crank mechanism, and 18 is bellows, and 19 is handle, and 20 is leading screw, 21 is screw, and 22 is cylinder, and 23 is slotted hole, and 24 is bearing pin.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
The utility model comprises valve plate 1, lower valve plate 2 and valve body 5, be provided with valve plate frame 3 in the valve body 5, last valve plate 1 and lower valve plate 2 are installed in the both sides of valve plate frame 3 respectively, as Fig. 9～shown in Figure 12, last valve plate 1 inner peripheral wall is provided with seal ring 16, has three vent holes 9 on the lower valve plate 2.Last valve plate 1 and lower valve plate 2 evenly have eight drops grooves 10 respectively with valve plate frame 3 facing surfaces, be provided with eight ball racks 12 on the valve plate frame 3 accordingly, each drops groove 10 and with its space that ball rack 12 forms accordingly in all be equipped with ball.It is that to be distributed in the center of circle with circular hole 11 be that ball rack 12 is the hemispherical dome structure of upward opening on the bigger circumference in the center of circle, radius ratio circular hole 11 that the central authorities of valve plate frame 3 have 11, eight ball racks 12 of circular hole.The middle part of last valve plate 1 and lower valve plate 2 is equipped with two rectangular recess 6, is welded with pin 7 on each rectangular recess 6, and an end of leaf spring 8 is connected on the pin 7, and the other end is a free end, and upper and lower valve plate 1,2 is connected by leaf spring 8.As shown in Figure 8, an end of valve plate frame 3 is provided with a positioning shaft 15, and the other end is provided with bearing 14, and quadratic crank mechanism 17 is connected with valve plate frame 3 by bearing 14, and the other end of quadratic crank mechanism 17 is connected with control unit 4.The one side that valve plate 1 is gone up in the both sides of valve plate frame 3 and connection is provided with eight guide bearings 13, play the guiding role.
As Fig. 1～shown in Figure 5, control unit 4 is manual, comprise bellows 18, handle 19, leading screw 20 and screw 21, have slotted hole 23 on the housing of manual control unit 4, be equipped with bearing pin 24 in it, can in slotted hole 23, move back and forth, bearing pin 24 and screw 21 interlocks, the revolute pair of restriction screw 21 moves up and down screw 21 only.One end of leading screw 20 is fixed on the handle 19, and the other end is connected with screw 21, an end of bellows 18 and screw 21 interlocks, and the other end connects quadratic crank mechanism 17.
As Fig. 6, shown in Figure 7, control unit 4 is pneumatic, can be cylinder.The connecting rod of cylinder 22 is connected with quadratic crank mechanism 17.
Working procedure of the present utility model and principle are:
With manual control unit is example, and valve is when opening, and the valve both sides communicate, and pressure equates.In the time of the needs throttle down, shake handle 19, drive leading screw 20 rotations, and then drive screw 21 and move up, again by power being passed to quadratic crank mechanism 17, drive quadratic crank mechanism 17 and move upward with the bellows 18 of screw 21 interlocks.Valve plate frame 3 is connected with quadratic crank mechanism 17 by its terminal bearing 14 and moves upward.In the process that valve plate frame 3 moves upward, eight guide bearings 13 on the valve plate frame 3 roll in the track of valve casing.Ball on the valve plate frame 3 crouches in eight drops grooves 10 of last valve plate 1 and lower valve plate 2 at this moment, along with driving upper and lower valve plate 1,2, the motion of valve plate frame 3 moves together, upper and lower valve plate 1,2 is close on the valve plate frame 3, and upper and lower valve plate 1,2 links together by the leaf spring 8 that is clipped in valve plate frame 3 front ends, but the leaf spring 8 of this moment does not stress.Push up on valve body 5 inwalls up to the leaf spring 8 that moves to when being clipped in valve plate frame 3 front ends, valve plate 1 and lower valve plate 2 stop motions on this moment, valve plate frame 3 then moves forward, up to guide bearing 13 on the valve plate frame 3 push up no longer move on valve body 5 inwalls till.When last valve plate 1 and lower valve plate 2 stop motion and valve plate frame 3 continues in the process of motion, originally the ball that rested between drops groove 10 and the ball rack 12 will be owing to the continuation campaign of valve plate frame 3, and roll to its tip along drops groove 10, thereby ball rolls out drops groove 10 gradually.Like this, along with moving forward of valve plate frame 3, ball will roll out drops groove 10, support valve plate, thereby valve plate 1 and lower valve plate 2 are separated with valve plate frame 3 gradually.Along with constantly travelling forward of valve plate frame 3, lower valve plate 2 is run into valve casing, stop motion earlier.At this moment, valve plate frame 3 does not also have stop motion, the above valve plate 1 of institute continues to separate with valve plate frame 3, lower valve plate 2 stop to separate and in valve plate 1 this process of continuing to separate, the seal ring 16 of last valve plate 1 touches flange and along with last valve plate 1 is compacted with constantly separating of valve plate frame 3, till the guide bearing on the valve plate frame 3 13 pushed up on valve body 5 inwalls, this moment, valve was fully closed.
When valve open, valve plate frame 3 at first moves downward, ball rolls in groove gradually along the terminal rail of drops groove 10, till the positioning shaft on the valve plate frame 3 15 is run into leaf spring 8, this moment, ball entered in the drops groove 10 fully, seal ring 16 on the last valve plate 1 thoroughly separates with flange, and lower valve plate 2 thoroughly separates with valve casing, and last valve plate 1 and lower valve plate 2 are all got back on the valve plate frame 3.Afterwards, valve plate frame 3 is being with and is being gone up valve plate 1 and lower valve plate 2 and leaf spring 8 and move downward together, thereby valve is opened fully.
Claims (9)
1. a ultrahigh vacuum hand, pneumatic brake plate valve, it is characterized in that: comprise valve plate (1), lower valve plate (2) and valve body (5), be provided with valve plate frame (3) in the valve body (5), upper and lower valve plate (1,2) is installed in the both sides of valve plate frame (3) respectively, upper and lower valve plate (1,2) is evenly equipped with a plurality of drops grooves (10) respectively with valve plate frame (3) facing surfaces, be provided with the ball rack (12) that number equates on the valve plate frame (3) accordingly, drops groove (10) is equipped with ball with the space content that ball rack (12) forms; Upper and lower valve plate is equipped with groove (6) on (1,2), is connected with pin (7) on the groove (6), and an end of leaf spring (8) is connected on the pin (7), and the other end is a free end, and upper and lower valve plate (1,2) is connected by leaf spring (8); One end of valve plate frame (3) is provided with positioning shaft (15), and the other end is provided with bearing (14), and quadratic crank mechanism (17) is connected with valve plate frame (3) by bearing (14); The other end of quadratic crank mechanism (17) is connected with control unit (4).
2. by the described ultrahigh vacuum hand of claim 1, pneumatic brake plate valve, it is characterized in that: described control unit (4) is for manual, comprise bellows (18), handle (19), leading screw (20) and screw (21), one end of leading screw (20) is fixed on the handle (19), the other end is connected with screw (21), one end of bellows (18) and screw (21) interlock, the other end connects quadratic crank mechanism (17).
3. by the described ultrahigh vacuum hand of claim 2, pneumatic brake plate valve, it is characterized in that: have slotted hole (23) on the housing of manual control unit (4), be equipped with bearing pin (24) in it, bearing pin (24) and screw (21) interlock, the revolute pair of restriction screw (21).
4. by the described ultrahigh vacuum hand of claim 1, pneumatic brake plate valve, it is characterized in that: described control unit (4) comprises cylinder (22) for pneumatic, and the connecting rod of cylinder (22) is connected with quadratic crank mechanism (17).
5. by the described ultrahigh vacuum hand of claim 1, pneumatic brake plate valve, it is characterized in that: described leaf spring (8) is the clamp plate type structure, and an end is clipped in respectively on the pin (7) of upper and lower valve plate (1,2), and the other end is a free end.
6. by the described ultrahigh vacuum hand of claim 1, pneumatic brake plate valve, it is characterized in that: the one side that valve plate (1) is gone up in the both sides of described valve plate frame (3) and connection is provided with guide bearing (13).
7. by the described ultrahigh vacuum hand of claim 1, pneumatic brake plate valve, it is characterized in that: described valve plate (1) inner peripheral wall of going up is provided with seal ring (16).
8. by the described ultrahigh vacuum hand of claim 1, pneumatic brake plate valve, it is characterized in that: be evenly equipped with a plurality of vent holes (9) on the described lower valve plate (2).
9. by the described ultrahigh vacuum gate valve of claim 1, it is characterized in that: have circular hole (11) on the described valve plate frame (3), ball rack (12) circumference of living in is coaxial with it; Ball rack (12) is the hemispherical dome structure of upward opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200132330U CN201053510Y (en) | 2007-07-11 | 2007-07-11 | Super high vacuum hand-operated, pneumatic gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200132330U CN201053510Y (en) | 2007-07-11 | 2007-07-11 | Super high vacuum hand-operated, pneumatic gate valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201053510Y true CN201053510Y (en) | 2008-04-30 |
Family
ID=39393173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200132330U Expired - Fee Related CN201053510Y (en) | 2007-07-11 | 2007-07-11 | Super high vacuum hand-operated, pneumatic gate valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201053510Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104776238A (en) * | 2015-03-30 | 2015-07-15 | 济南夫驰科技有限公司 | Pneumatic vacuum gate valve for dust-free operation dry-sweeping truck |
| US10738895B2 (en) | 2015-08-28 | 2020-08-11 | Vat Holding Ag | Vacuum valve |
| CN111609163A (en) * | 2020-06-12 | 2020-09-01 | 蓝晶晶 | Industrial gate valve |
| CN111765261A (en) * | 2020-05-29 | 2020-10-13 | 成都中科唯实仪器有限责任公司 | Vacuum valve with locking function |
| CN112999798A (en) * | 2021-02-24 | 2021-06-22 | 南京思丹鼎建筑科技有限公司 | Intelligent construction site management and control platform and supervision and analysis method |
-
2007
- 2007-07-11 CN CNU2007200132330U patent/CN201053510Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104776238A (en) * | 2015-03-30 | 2015-07-15 | 济南夫驰科技有限公司 | Pneumatic vacuum gate valve for dust-free operation dry-sweeping truck |
| CN104776238B (en) * | 2015-03-30 | 2017-06-06 | 济南夫驰科技有限公司 | Dust-free operation dry type road sweeper Pneumatic vacuum gate valve |
| US10738895B2 (en) | 2015-08-28 | 2020-08-11 | Vat Holding Ag | Vacuum valve |
| CN111765261A (en) * | 2020-05-29 | 2020-10-13 | 成都中科唯实仪器有限责任公司 | Vacuum valve with locking function |
| CN111609163A (en) * | 2020-06-12 | 2020-09-01 | 蓝晶晶 | Industrial gate valve |
| CN112999798A (en) * | 2021-02-24 | 2021-06-22 | 南京思丹鼎建筑科技有限公司 | Intelligent construction site management and control platform and supervision and analysis method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: CAS SHENYANG SCIENTIFIC INSTRUMENTS CO., LTD. Free format text: FORMER NAME: SHENYANG SCIENTIFIC INSTRUMENT RESEARCH + MFG. CENTER CO., LTD., C.A.S |
|
| CP03 | Change of name, title or address |
Address after: Hunnan Shenyang 110197 Liaoning province Xinyuan street, No. 1 Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080430 Termination date: 20150711 |
|
| EXPY | Termination of patent right or utility model |