CN201000497Y

CN201000497Y - Multi-stage low loss integrated optical power distributor

Info

Publication number: CN201000497Y
Application number: CNU2006200419834U
Authority: CN
Inventors: 陈谷红
Original assignee: Individual
Current assignee: Individual
Priority date: 2006-05-23
Filing date: 2006-05-23
Publication date: 2008-01-02
Anticipated expiration: 2016-05-23

Abstract

The utility model relates to an integrated optics technical field. The utility model discloses a multilevel low loss integrated optical power divider, which is made by the machining technology and the process of the silicon-based deposit silicon dioxide optic waveguide, the Y shaped optical branching structure of the grating can make the optical power dividers with different branching ratio flexibly composed, thus the insertion loss of the optical component is reduced and the transmission efficiency of the optical signal is improved. The optical component not only has a flexible and compact structure, but also the integration degree is high, the volume is small, the weight is light, the performance is stable and reliable, the mass production is suitable, the production efficiency is high, and the cost is low. The optical component can be widely used for the application fields, such as optical communication system, optical instrument equipment, and fiber to the home (FTTH), etc.

Description

Multistage low-loss integrated optical power divider

Technical field

The utility model is the multistage integrated optical power divider of a kind of low-loss, belongs to the integrated optics technique field.

Background technology

Existing luminous-power distributor generally all is to adopt traditional optical fiber sintering process to make, and the production technology difficulty is big, stability and reliability are not high enough, is not suitable for producing in enormous quantities, more is difficult to realize multistage integrated optical device.The luminous-power distributor of common y-type structure, it is bigger that it inserts loss ratio, and when constituting multistage integrated optical device, it is more outstanding that this weakness just seems especially, therefore the progression of device (along separate routes than) is subjected to certain restriction, and its application scenario also is subjected to very big influence and limitation.

Summary of the invention

The purpose of this utility model provides a kind of low insertion loss, can form the integrated optical power divider of multilevel hierarchy as required flexibly, and can be widely used in optical communication system, optical instrumentation and Fiber to the home application scenarios such as (FTTH).

Scheme of the present utility model is that the semiconductor processing technology of silica-based deposition of silica and the planar optical waveguide that technology is made are adopted in one of design, waveguide light core is deposited on the silicon-based wafer, and place refractive index and thickness all to be different from the silicon dioxide liner and the covering covering of light core, the refractive index of its liner and covering covering is slightly less than the refractive index of light core, and thickness then is three to five times of light core thickness; And this slab guide light channel structure feature is the Y type shunt of band echelon grating, can reduce the insertion loss of light path, form neatly different along separate routes than multilevel hierarchy.

The utility model has following advantage compared with the prior art:

1 owing to adopt the semiconductor processing technology of silica-based deposition of silica and technology to make, stability and integrity problem that device that traditional optical fiber sintering process makes exists have been overcome on production technology and device performance, the production efficiency and the performance of device have been improved, make device be fit to produce in enormous quantities, and volume is little, in light weight, the integrated level height, cost is low.

2 because the Y type shunt of band echelon grating can reduce the insertion loss of light path, has overcome the big shortcoming of normal optical splitter losses, has improved the efficient that device signal transmits.

3 owing to adopted low-loss optical branching device unit, makes that luminous-power distributor can be as required, form neatly different along separate routes than luminous-power distributor, improved the economy of device, the range of application of the device of expansion.

Description of drawings

The utility model has following accompanying drawing:

Fig. 1 is the utility model planar optical waveguide cross section structure synoptic diagram.

Fig. 2 is the structural representation of the Y type shunt unit of the utility model band echelon grating.

Fig. 3 is the multistage low-loss integrated optical power of a utility model dispensing arrangement synoptic diagram.

1. silicon-based wafers among the figure, 2. liner, 3. waveguide light core, 4. covering covering, 5. stepped appearance grating

Embodiment

Set forth embodiment of the present utility model below in conjunction with accompanying drawing:

The utility model is to adopt the semiconductor processing technology and the technology of silica-based deposition of silica to be made, shown in Fig. 1 planar optical waveguide cross section structure synoptic diagram, by silicon-based wafer (1), liner (2), waveguide light core (3) and covering covering (4) constitute, its processing step is: 1 adopts chemical vapour deposition technique, on silicon-based wafer (1), and deposit liner (2) and waveguide light core (3); 2 utilize reactive ion etching technology to form designed slab guide light path; 3 on the basis of liner (2) and waveguide light core (3), and deposition of silica covers covering (4) again, after high annealing and HIGH PRESSURE TREATMENT, finishes the processing of wafer; The cutting of 4 wafers, the nude film polishing grinding is finished the encapsulation of chip at last.Wherein the refractive index of waveguide light core (3) earth silicon material is slightly larger than the refractive index of liner (2) and covering covering (4) earth silicon material, and the thickness of liner (2) and covering covering (4) is 3-5 times of waveguide light core (3) thickness, to guarantee that light signal transmits expeditiously in waveguide light core.In order to reduce the insertion loss of common y-type structure optical branching device, the utility model has designed the shunt of band stepped appearance grating (5) structural unit, as shown in Figure 2.Its grating (5) structure starts from the bifurcation of Y type shunt, and along the Delta Region between shunt two output bifurcated branch roads, by the stepped distribution that stretches out gradually from short to long, to suppress the effect weakening of electromagnetic field at the y-type structure crotch.New semiconductor fabrication and processing technology are the bases of integrated optical device, adopt the low-loss y-type structure optical branching device unit of Planar Optical Waveguide Structures shown in Figure 1 and the utility model design, just can be combined into different neatly along separate routes than (as 1: 4,1: 8,1: 16,1: 32 ...) and luminous-power distributor, the divider of this structure, the output power on its each road is all identical.Also can form different output power as required, arbitrarily along separate routes than luminous-power distributor.As shown in Figure 3, be one along separate routes than being 1: 32, the application example of 5 grades of low-loss integrated optical power dividers, the size of its each road output power is all identical, under the condition of not considering loss, is about 1/32 of its power input.

Claims

1. multistage low-loss integrated optical power divider, by silicon-based wafer, liner, waveguide light core and covering covering constitute, it is characterized in that: by being deposited on refractive index and the different silicon dioxide liner of thickness on the silicon-based wafer, waveguide light core and covering covering constitute planar optical waveguide; Y type optical branching device with band echelon grating structure is an elementary cell, constitutes multistage integrated optical power divider.

2. by the described luminous-power distributor of claim 1, it is characterized in that: the bottom is a silicon-based wafer, is followed successively by the silicon dioxide liner on it, waveguide light core and covering covering; The refractive index of liner and covering covering is slightly less than the refractive index of waveguide light core; The thickness of liner and covering covering then is three to five times of waveguide light core thickness.

3. by the described luminous-power distributor of claim 1, it is characterized in that: with Y type optical branching device be its basic optical path unit, press the arborizations form, be combined into have the difference shunt than multistage smooth shunt structure.

4. by the described luminous-power distributor of claim 1, it is characterized in that: the Y type optical branching device unit of band stepped appearance optical grating construction, its grating be by being in the Y bifurcation, by stepped, constitutes along the bifurcated branch road vertical line that distributes that stretches out gradually from short to long.