CN200986397Y - Bottom cap - Google Patents
Bottom cap Download PDFInfo
- Publication number
- CN200986397Y CN200986397Y CN 200620136992 CN200620136992U CN200986397Y CN 200986397 Y CN200986397 Y CN 200986397Y CN 200620136992 CN200620136992 CN 200620136992 CN 200620136992 U CN200620136992 U CN 200620136992U CN 200986397 Y CN200986397 Y CN 200986397Y
- Authority
- CN
- China
- Prior art keywords
- plectane
- ring body
- boiler tube
- breach
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005516 engineering process Methods 0.000 claims abstract description 8
- 239000004065 semiconductor Substances 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 description 16
- 238000007689 inspection Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 6
- 238000005755 formation reaction Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
A bottom cap is applicable for a furnace tube used for the semiconductor technology. The furnace tube is provided with a plurality of injectors and a base. The bottom cap is arranged on the base of the furnace tube. The bottom cap comprises a disc and an external ring body. The external ring body is arranged on the exterior margin of the disc, and extends above a surface of the disc back on to the base; the external ring body is provided with a gap to accommodate the injectors.
Description
Technical field
The utility model relates to a kind of element of semiconductor machine, and particularly relates to a kind of bottom that is applicable to the boiler tube that semiconductor technology is used.
Background technology
Fig. 1 illustrate is the schematic diagram of existing a kind of boiler tube.
Please refer to Fig. 1, the inwall of the outer tube 102 of boiler tube 100 defines a film formation chamber, in the pipe 104 be disposed at outer tube 102 in, the inside of pipe 104 in brilliant boat 106 configurations, and outer tube 102 bottoms have outer pedestal tube 108, injector (injector) 110 enters boiler tube 100 inside by outer pedestal tube 108, and base 114 is in order to carrying brilliant boat 106, and disposes bottom (cap cover) 112 on the base 114.
When brilliant boat 106 is sent into wafer boiler tube 100 and is handled, because boiler tube 100 employed special gas easily are attached on the base 114, therefore need to be attached on the base 114 to avoid special gas by the contacting of bottom 112 isolated special gas and base 114.
Fig. 2 illustrate is the schematic diagram of existing a kind of bottom.Fig. 3 illustrate is the profile of existing a kind of bottom and injector.
Please refer to Fig. 2 and Fig. 3, be disposed at the outer ring body 112b that bottom 112 comprises plectane 112a and is disposed at plectane 112a outer rim.Outer ring body 112b has a plurality of adjacent breach 116.When base 114 rises when sending into brilliant boat 106 in the boiler tube 100, breach 116 can be in order to holding injector 110, with avoid injector 110 when base 114 rises by 112 pinch ofves of bottom.
Yet, in the design of bottom 112, big inadequately in order to the breach 116 that holds injector 110, the material that adds bottom 112 is for quartzy, can attenuation through volume after the wet-cleaned repeatedly, can cause displacement if any touching, therefore when brilliant boat 106 was loaded boiler tube 100 inside, the outer ring body 112b of bottom 112 can pinch off injector 110.
When injector 110 during by pinch off, the injector 110 that need more renew, therefore boiler tube 100 need carry out parameter and process environments adjustment, carry out test that gas leaks, whether the thickness that carries out the cleanliness factor of repeatedly cleaning, test boiler tube 100 inside and test film forming stable, these adjustment and check and all can make the whole process time increase.
Prior art is for fear of bottom 112 displacements and pinch off injector 110 can carry out the inspection and the adjustment of displacement to bottom 112.But when the inspection of carrying out displacement and adjustment, need brilliant boat 106 is loaded boiler tubes 100 inside, and after the inspection of carrying out displacement and adjusting, need brilliant boat was gone out outside the boiler tube 100 in 106 years, quite time-consuming.
In addition, in the inspection of bottom 112 being carried out displacement and when adjusting, must be in not good space and angle go to check and adjust that and the indoor hot gas of film formation reaction easily causes injury to personnel when adjusting bottom 112.
The utility model content
The purpose of this utility model is providing a kind of bottom exactly, and it can the pinch off injector when brilliant boat is loaded boiler tube inside.
Another purpose of the present utility model provides a kind of bottom, only needs to check to have or not after installing fixingly, does not need bottom is carried out the inspection and the adjustment of displacement.
The utility model proposes a kind of bottom, be applicable to the boiler tube that semiconductor technology is used, boiler tube has a plurality of injectors and base, and bottom is disposed on the base of boiler tube, and bottom comprises plectane and outer ring body.Outer ring body is disposed at the outer rim of plectane and extends the top of the one side of base dorsad to plectane, and outer ring body has a breach, and breach is enough to hold injector.
Described according to a preferred embodiment of the present utility model, in above-mentioned bottom, first distance and the second distance of respectively being separated by between the two-end-point of breach and outermost two injectors.
Described according to a preferred embodiment of the present utility model, in above-mentioned bottom, the angle at the two-end-point of breach and plectane center is that 54 degree are to 58 degree.
Described according to a preferred embodiment of the present utility model, in above-mentioned bottom, plectane central authorities have opening, and bottom also comprises inner ring body, are disposed at the opening outer rim and extend the top of the one side of base dorsad to plectane.
Described according to a preferred embodiment of the present utility model, in above-mentioned bottom, plectane, outer ring body and inner ring body comprise integrally formed.
Described according to a preferred embodiment of the present utility model, in above-mentioned bottom, plectane and outer ring body comprise integrally formed.
Described according to a preferred embodiment of the present utility model, in above-mentioned bottom, the material of bottom comprises quartz.
The utility model proposes a kind of bottom, be applicable to the boiler tube that semiconductor technology is used, boiler tube has an injector and base, and bottom is disposed on the base of boiler tube, and bottom comprises plectane and outer ring body.Outer ring body is disposed at the outer rim of plectane and extends the top of the one side of base dorsad to plectane, and outer ring body has a breach, and breach is enough to hold injector, first distance and the second distance of respectively being separated by between the two-end-point of breach and injector.
Because the bottom that the utility model proposed is a plurality of adjacent breach on the existing bottom all to be cut put down into a big breach, therefore do not have the possibility of pinch off injector.In addition, because can the pinch off injector, therefore can save the cost of changing injector, and save because of changing the time that injector is set again and tested boiler tube.
On the other hand,, therefore only need to check to have or not after installing fixingly, do not need bottom is carried out the inspection and the adjustment of displacement because bottom of the present utility model does not have the doubt of pinch off injector.Thus, can save the time that inspection and adjustment spent of carrying out displacement, also can avoid personnel when the inspection of bottom being carried out displacement and adjustment, to be injured by the hot gas of boiler tube because of to bottom.
For above-mentioned and other purpose, feature and advantage of the present utility model can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
Description of drawings
Fig. 1 illustrate is the schematic diagram of existing a kind of boiler tube.
Fig. 2 illustrate is the schematic diagram of existing a kind of bottom.
Fig. 3 illustrate is the profile of existing a kind of bottom and injector.
Fig. 4 illustrate is the schematic diagram of the boiler tube of the utility model one embodiment.
Fig. 5 illustrate is the schematic diagram of the bottom of the utility model one embodiment.
Fig. 6 illustrate is the bottom of the utility model one embodiment and the profile of injector.
Fig. 7 illustrate is the bottom of another embodiment of the utility model and the profile of injector.
The simple symbol explanation
100,200: boiler tube
102,202: outer tube
104,204: interior pipe
106,206: brilliant boat
108,208: outer pedestal tube
110,210: injector
112,212: bottom
112a, 212a: plectane
112b, 212b: outer ring body
114,214: base
116,216: breach
212c: inner ring body
218: opening
A, b: end points
D1, D2, D3, D4: distance
X: central point
θ: angle
The specific embodiment
Fig. 4 illustrate is the schematic diagram of the boiler tube of the utility model one embodiment.
Please refer to Fig. 4, this boiler tube 200 comprises outer tube 202, interior pipe 204, brilliant boat 206, outer pedestal tube 208, a plurality of injector 210, bottom 212 and base 214.
The inwall of the outer tube 202 of boiler tube 200 defines a film formation chamber, and outer tube 202 bottoms have outer pedestal tube 208, and interior pipe 204 be disposed at outer tube 202 in.The inside of pipe 204 in brilliant boat 206 configurations is in order to bearing wafer.Injector 210 enters boiler tube 200 inside by outer pedestal tube 208, in order to reacting gas is sent in the film formation chamber of boiler tube 200.Base 214 is in order to carry brilliant boat 206, and base 214 for example is brilliant boat elevating bracket.Bottom 212 is disposed on the base 214 of boiler tube 200, in order to contacting of isolated reacting gas and base 214.
Fig. 5 illustrate is the schematic diagram of the bottom of the utility model one embodiment.Fig. 6 illustrate is the bottom of the utility model one embodiment and the profile of injector.
Please be simultaneously with reference to Fig. 4 and Fig. 5, bottom 212 of the present utility model is applicable to the boiler tube 200 that semiconductor technology is used, bottom 212 is disposed on the base 214 of boiler tube 200.Bottom 212 comprises plectane 212a and outer ring body 212b.Plectane 212a and outer ring body 212b for example are integrally formed.The material of bottom 212 for example is quartzy.
In addition, plectane 212a central authorities can have opening 218, and opening 218 for example is in order to brilliant boat rotary system (not illustrating) to be set in wherein.Bottom 212 also comprises inner ring body 212c, is disposed at opening 218 outer rims and extends the top of the one side of base 214 dorsad to plectane 212a.Inner ring body 212c for example is integrally formed with plectane 212a and outer ring body 212b.
Then, please refer to Fig. 6, two-end-point a, the b of the breach 216 of outer ring body 212b and 210 each standoff distance D1 of outermost two injectors and distance D 2.Distance D 1 for example is 0.5 centimetre to 1.5 centimetres, preferably 1 centimetre.Distance D 2 for example is 0.5 centimetre to 1.5 centimetres, preferably 1 centimetre.
Fig. 7 illustrate is the bottom of another embodiment of the utility model and the profile of injector.
Please refer to the while with reference to Fig. 5 and Fig. 7, in another embodiment of the utility model, bottom 212 of the present utility model also is applicable to the boiler tube that only has an injector 210.In bottom 212,210 each standoff distance D3 of two-end-point a, the b of the breach 216 of outer ring body 212b and injector and distance D 4.Distance D 3 for example is 9 centimetres to 10.5 centimetres, preferably 9.7 centimetres.Distance D 4 for example is 9 centimetres to 10.5 centimetres, preferably 9.7 centimetres.
Based on above-mentioned, because the bottom 212 that the utility model proposed, be a plurality of adjacent breach on the existing bottom all to be cut put down into a big breach 216, therefore when brilliant boat 206 is loaded boiler tube 200 inside, do not have injector 210 by the possibility of bottom 212 pinch ofves.
In addition, because between two-end-point a, the b of breach 216 and injector 210, respectively be separated by a distance, therefore can prevent effectively that more injector 210 is by 212 pinch ofves of bottom.
In addition, because can pinch off injector 210, therefore can save the cost of changing injector 210, and save because of changing the time that injector 210 is set again and tested boiler tube 200.
On the other hand, because bottom 212 can pinch off injector 210, therefore have or not fixing after only needing inspection bottom 212 to install, do not need bottom 212 is carried out the inspection and the adjustment of displacement, therefore can save the time that inspection and adjustment spent of carrying out displacement, more can avoid personnel when the inspection of bottom 212 being carried out displacement and adjustment, to be injured by the hot gas of boiler tube 200 because of to bottom 212.
In sum, have following advantage at least at the utility model:
1. the bottom that the utility model proposed can the pinch off injector when brilliant boat is loaded boiler tube inside.
2. because bottom that the utility model proposed can the pinch off injector, therefore can save the cost of changing injector and because of changing the time that injector is set again and tested boiler tube.
3. use the bottom that the utility model proposed to save the time that inspection and adjustment spent of carrying out displacement.
4. because the use bottom that the utility model proposed does not need bottom is carried out the inspection and the adjustment of displacement, can avoid personnel when the inspection of bottom being carried out displacement and adjustment, to be injured by the hot gas of boiler tube.
Though the utility model discloses as above with preferred embodiment; yet it is not in order to limit the utility model; those skilled in the art is not in breaking away from spirit and scope of the present utility model; can do a little change and retouching, therefore protection domain of the present utility model should with accompanying Claim the person of being defined be as the criterion.
Claims (13)
1, a kind of bottom is applicable to the boiler tube that semiconductor technology is used, and this boiler tube has a plurality of injectors and base, and this bottom is disposed on this base of this boiler tube, it is characterized in that, this bottom comprises:
Plectane; And
Outer ring body is disposed at the outer rim of this plectane and to the top extension of the one side of this base dorsad of this plectane, this outer ring body has breach, and this breach is enough to hold those injectors.
2, bottom as claimed in claim 1 is characterized in that, first distance and the second distance of respectively being separated by between the two-end-point of this breach and outermost two injectors.
3, bottom as claimed in claim 1 is characterized in that, the angle at the two-end-point of this breach and this plectane center is that 54 degree are to 58 degree.
4, bottom as claimed in claim 1 is characterized in that, these plectane central authorities have opening, and this bottom also comprises inner ring body, is disposed at this opening outer rim and extends the top of the one side of this base dorsad to this plectane.
5, bottom as claimed in claim 4 is characterized in that, this plectane, this outer ring body and this inner ring body comprise integrally formed.
6, bottom as claimed in claim 1 is characterized in that, this plectane and this outer ring body comprise integrally formed.
7, bottom as claimed in claim 1 is characterized in that, the material of this bottom comprises quartz.
8, a kind of bottom is applicable to the boiler tube that semiconductor technology is used, and this boiler tube has injector and base, and this bottom is disposed on this base of this boiler tube, it is characterized in that, this bottom comprises:
Plectane; And
Outer ring body is disposed at the outer rim of this plectane and to the top extension of the one side of this base dorsad of this plectane, this outer ring body has breach, and this breach is enough to hold those injectors, first distance and the second distance of respectively being separated by between the two-end-point of this breach and this injector.
9, bottom as claimed in claim 8 is characterized in that, the angle at the two-end-point of this breach and this plectane center is that 54 degree are to 58 degree.
10. bottom as claimed in claim 8 is characterized in that, these plectane central authorities have opening, and this bottom also comprises inner ring body, is disposed at this opening outer rim and extends the top of the one side of this base dorsad to this plectane.
11, bottom as claimed in claim 10 is characterized in that, this plectane, this outer ring body and this inner ring body comprise integrally formed.
12, bottom as claimed in claim 8 is characterized in that, this plectane and this outer ring body comprise integrally formed.
13, bottom as claimed in claim 8 is characterized in that, the material of this bottom comprises quartz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620136992 CN200986397Y (en) | 2006-11-01 | 2006-11-01 | Bottom cap |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620136992 CN200986397Y (en) | 2006-11-01 | 2006-11-01 | Bottom cap |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200986397Y true CN200986397Y (en) | 2007-12-05 |
Family
ID=38915854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620136992 Expired - Fee Related CN200986397Y (en) | 2006-11-01 | 2006-11-01 | Bottom cap |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200986397Y (en) |
-
2006
- 2006-11-01 CN CN 200620136992 patent/CN200986397Y/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071205 Termination date: 20091201 |