CN200979536Y - X-ray fluorescence spectrometer with a movable stage - Google Patents
X-ray fluorescence spectrometer with a movable stage Download PDFInfo
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- CN200979536Y CN200979536Y CN 200620016398 CN200620016398U CN200979536Y CN 200979536 Y CN200979536 Y CN 200979536Y CN 200620016398 CN200620016398 CN 200620016398 CN 200620016398 U CN200620016398 U CN 200620016398U CN 200979536 Y CN200979536 Y CN 200979536Y
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- axis
- sliding rail
- slide rail
- ray fluorescence
- rack
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Abstract
The utility model disclosed an X-ray fluorescence spectrum analyzer with a mobile stage, which relates to fluorescence spectrum analyzers, in particular to an X-ray fluorescence spectrum analyzer. The X-ray fluorescence spectrum analyzer comprises a board (1), a launching device (3) on one side of the board, a receiving and searching unit (4) and an imaging device (5). A mobile stage (2) and a drive power source are arranged on the other side of the board (1). Through-holes (11) are arranged on the board. A transmitting end of the launching device (3) and a receiving end of the receiving and searching unit (4) can launch and receive though through-holes (11). Through-holes (21) are arranged on middle of the stage (2). A stage move and guide mechanism (6) is arranged between the stage (2) and the board (1). One part on one side of analyzed material is tested and analyzed by the utility model, and test precision of the analyzer is improved.
Description
Technical field
The utility model relates to fluorescence spectrum analyzer, particularly the X-ray fluorescence spectra analyser.
Background technology
Existing X-ray fluorescence spectra analyser is provided with emissive source, receives sniffer and imaging device, but all be to adopt single-point to transmit and receive mode, just the focus of emissive source (X ray rifle) is beaten regularly at the more lip-deep fluorescence that produces of testee, receives and the imaging device imaging by receiving sniffer then.This mode can only detect testee a bit, so this mode is subjected to the influence of the starting material material degree of uniformity of testee and other impurity very big.
Summary of the invention
The purpose of this utility model is to provide a kind of can carry out the X-ray fluorescence spectra analyser that face of testee detects.
The purpose of this utility model can realize like this, designs a kind of X-ray fluorescence spectra analyser that is provided with moveable stage, comprises the machine plate, is fixed on machine plate emissive source device, reception sniffer and imaging device simultaneously; The another side of described machine plate is provided with movably objective table and driving power source, the machine plate is provided with through hole, the transmitting terminal of emissive source device and reception sniffer receiving end transmit and receive by through hole, this objective table zone line is provided with through hole, is provided with objective table mobile guide mechanism between objective table and the machine plate.
The utility model can carry out check and analysis to the part of a face of analyte, thereby improves the measuring accuracy of analyser.
Description of drawings
Fig. 1 is the decomposing schematic representation of the utility model preferred embodiment.
Fig. 2 is the schematic appearance of the utility model preferred embodiment.
Embodiment
The utility model will be further described below in conjunction with embodiment.
As shown in Figure 1 and Figure 2, a kind of X-ray fluorescence spectra analyser that is provided with moveable stage comprises machine plate 1, is fixed on machine plate emissive source device 3, reception sniffer 4 and imaging device 5 simultaneously; The another side of described machine plate 1 is provided with movably objective table 2 and driving power source, machine plate 1 is provided with through hole 11, the transmitting terminal of emissive source device 3 and reception sniffer 4 receiving ends transmit and receive by through hole 11, these objective table 2 zone lines are provided with through hole 21, are provided with objective table mobile guide mechanism 6 between objective table 2 and the machine plate 1.Through hole 21 is logical with 11 pairs of through holes, and the ray of the transmitting terminal emission of emissive source device 3 is penetrated on the surface that is placed on the testee on the through hole 21 by through hole 11 and produced fluorescence, receives sniffer 4 receiving ends and surveys and received signal by through hole 11.
The multiple mode that can adopt guiding mechanism 6 realizes that article carrying platform in one plane moves arbitrarily.Adopting slide rail is one of method, and described guiding mechanism 6 comprises slide rail 61 and sliding rail rack 62, and sliding rail rack 62 is provided with chute 621, and chute 621 and slide rail 61 are movingly.By chute 621, sliding rail rack 62 can relatively move with slide rail 61.
Described guiding mechanism also can be other forms, as on machine plate 1, one slide-plate being set, can slide relatively between slide plate and the machine plate, if a drive unit drives slide plate and moves as X-direction, objective table 2 is installed on the slide plate, can relatively move between objective table 2 and the slide plate, establish a drive unit driving objective table 2 and move as Y direction.
One of form of the guiding mechanism 6 that present embodiment adopted, as shown in Figure 1, described slide rail 61 and sliding rail rack 62 comprise the slide rail 61 ', sliding rail rack 62 ' of X-axis and the slide rail 61 of Y-axis ", sliding rail rack 62 ", X-axis sliding rail rack 62 ' is installed on the objective table 2, X-axis slide rail 61 ' is installed in Y-axis sliding rail rack 62 " on, Y-axis slide rail 61 " be installed on the machine plate 1; X-axis drives coupling shaft 7 and is connected with X-axis sliding rail rack 62 ' by breakout box, and Y-axis drives coupling shaft 7 by breakout box and Y-axis slide rail 61 " be connected.
The slide rail form of guiding mechanism 6 also can adopt other modes, described slide rail 61 and sliding rail rack 62 comprise the slide rail 61 ', sliding rail rack 62 ' of X-axis and the slide rail 61 of Y-axis ", sliding rail rack 62 ", X-axis slide rail 61 ' is installed on the objective table, X-axis sliding rail rack 62 ' is installed in Y-axis slide rail 61 " on, Y-axis sliding rail rack 62 " be installed on the machine plate 1; X-axis drives coupling shaft 7 and is connected with objective table 1 by breakout box, and Y-axis drives coupling shaft 7 by breakout box and Y-axis sliding rail rack 62 " be connected.
The front end of described driving coupling shaft 7 is provided with screw rod, is equipped with the coupling shaft slide block on screw rod, and the coupling shaft slide block is connected with rail brackets 62.In the present embodiment, the front end that the X/Y axle drives coupling shaft is the screw rod that accurate thread is arranged, and is equipped with the coupling shaft slide block on screw rod, and the coupling shaft slide block is connected with rail brackets by screw.The screw rod drive coupling shaft slide block that the driving coupling shaft rotates by front end moves forward and backward, and the coupling shaft slide block moves forward and backward rail brackets, and the X/Y axle drives respectively, has so just realized the axial motion of X/Y.
Described power source is a servomotor.Adopt servomotor in the present embodiment, also can adopt other power source, as hydraulic stem, stepper motor or the like.
During work, measured object is put at the circular hole place in the middle of the objective table.Objective table X, Y-axis all adopt servomotor control, and objective table can drive measured object and axially moves forward and backward in the process of test.Y-axis is done step motion, and the stroke in per step approximates the focus size of ray, and X-axis is done linear uniform motion.Just can finish a part of fluorescence excitation on a face of testee and survey reception by the stepping number of times of setting Y-axis and the stroke of X-axis like this.Can obtain different test area according to the numerical value that actual conditions are set correlated variables like this.
Claims (6)
1, a kind of X-ray fluorescence spectra analyser that is provided with moveable stage comprises machine plate (1), is fixed on machine plate emissive source device (3), reception sniffer (4) and imaging device (5) simultaneously; It is characterized in that: the another side of described machine plate (1) is provided with movably objective table (2) and driving power source, machine plate (1) is provided with through hole (11), the transmitting terminal of emissive source device (3) and reception sniffer (4) receiving end transmit and receive by through hole (11), this objective table (2) zone line is provided with through hole (21), be provided with objective table mobile guide mechanism (6) between objective table (2) and the machine plate (1), through hole (21) and through hole (11) are to logical.
2, X-ray fluorescence spectra analyser according to claim 1 is characterized in that: described guiding mechanism (6) comprises slide rail (61) and sliding rail rack (62), and sliding rail rack (62) is provided with chute (621), and chute (621) and slide rail (61) are movingly.
3, X-ray fluorescence spectra analyser according to claim 2, it is characterized in that: described slide rail (61) and sliding rail rack (62) comprise the slide rail (61 "), sliding rail rack (62 ") of slide rail (61 '), sliding rail rack (62 ') and the Y-axis of X-axis, X-axis sliding rail rack (62 ') is installed on the objective table (2), X-axis slide rail (61 ') is installed on the Y-axis sliding rail rack (62 "), and the Y-axis slide rail (61 ") be installed on the machine plate (1); X-axis drives coupling shaft (7) and is connected with X-axis sliding rail rack (62 ') by breakout box, and Y-axis driving coupling shaft (7) is connected by breakout box and Y-axis slide rail (61 ").
4, X-ray fluorescence spectra analyser according to claim 2, it is characterized in that: described slide rail (61) and sliding rail rack (62) comprise the slide rail (61 "), sliding rail rack (62 ") of slide rail (61 '), sliding rail rack (62 ') and the Y-axis of X-axis, X-axis slide rail (61 ') is installed on the objective table, X-axis sliding rail rack (62 ') is installed on the Y-axis slide rail (61 "), and the Y-axis sliding rail rack (62 ") be installed on the machine plate (1); X-axis drives coupling shaft (7) and is connected with objective table (1) by breakout box, and Y-axis driving coupling shaft (7) is connected by breakout box and Y-axis sliding rail rack (62 ").
5, according to claim 2 or 3 described X-ray fluorescence spectra analysers, it is characterized in that: the front end of described driving coupling shaft (7) is provided with screw rod (71), is equipped with the coupling shaft slide block on screw rod, and the coupling shaft slide block is connected with rail brackets (62) by screw.
6, X-ray fluorescence spectra analyser according to claim 1 is characterized in that: described driving power source is a servomotor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620016398 CN200979536Y (en) | 2006-12-11 | 2006-12-11 | X-ray fluorescence spectrometer with a movable stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620016398 CN200979536Y (en) | 2006-12-11 | 2006-12-11 | X-ray fluorescence spectrometer with a movable stage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200979536Y true CN200979536Y (en) | 2007-11-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620016398 Expired - Fee Related CN200979536Y (en) | 2006-12-11 | 2006-12-11 | X-ray fluorescence spectrometer with a movable stage |
Country Status (1)
| Country | Link |
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| CN (1) | CN200979536Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103558221A (en) * | 2013-11-04 | 2014-02-05 | 武汉理工大学 | Device and method for detecting uniformity of infrared optimal material |
| CN104502386A (en) * | 2014-12-16 | 2015-04-08 | 韩晓朋 | X-ray fluorescence spectrum analyzer |
| CN110161064A (en) * | 2019-06-10 | 2019-08-23 | 重庆大学 | A kind of XRD three-dimensional crystal reconstructs three axis sample stages and application method |
| CN113075216A (en) * | 2020-01-06 | 2021-07-06 | 深圳中科飞测科技股份有限公司 | Detection device and detection method |
-
2006
- 2006-12-11 CN CN 200620016398 patent/CN200979536Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103558221A (en) * | 2013-11-04 | 2014-02-05 | 武汉理工大学 | Device and method for detecting uniformity of infrared optimal material |
| CN103558221B (en) * | 2013-11-04 | 2016-01-06 | 武汉理工大学 | A kind of uniformity detection of infrared optical material and method |
| CN104502386A (en) * | 2014-12-16 | 2015-04-08 | 韩晓朋 | X-ray fluorescence spectrum analyzer |
| CN110161064A (en) * | 2019-06-10 | 2019-08-23 | 重庆大学 | A kind of XRD three-dimensional crystal reconstructs three axis sample stages and application method |
| CN110161064B (en) * | 2019-06-10 | 2024-04-02 | 重庆大学 | XRD three-dimensional crystallographic reconstruction triaxial sample stage and application method thereof |
| CN113075216A (en) * | 2020-01-06 | 2021-07-06 | 深圳中科飞测科技股份有限公司 | Detection device and detection method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |