CN200970591Y - Vertical quartz tube cleaner - Google Patents
Vertical quartz tube cleaner Download PDFInfo
- Publication number
- CN200970591Y CN200970591Y CN 200620158374 CN200620158374U CN200970591Y CN 200970591 Y CN200970591 Y CN 200970591Y CN 200620158374 CN200620158374 CN 200620158374 CN 200620158374 U CN200620158374 U CN 200620158374U CN 200970591 Y CN200970591 Y CN 200970591Y
- Authority
- CN
- China
- Prior art keywords
- cleaning
- cabinet
- quartz tube
- cleaning machine
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 20
- 238000004140 cleaning Methods 0.000 claims abstract description 45
- 239000002253 acid Substances 0.000 claims abstract description 14
- 239000007788 liquid Substances 0.000 claims abstract description 13
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- 239000007921 spray Substances 0.000 claims description 14
- 239000012530 fluid Substances 0.000 claims description 13
- 238000004064 recycling Methods 0.000 claims description 6
- 239000003708 ampul Substances 0.000 claims description 4
- 239000004033 plastic Substances 0.000 claims description 3
- 241001640558 Cotoneaster horizontalis Species 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 11
- 239000007789 gas Substances 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 6
- 238000001035 drying Methods 0.000 abstract description 2
- 238000005507 spraying Methods 0.000 abstract 1
- 238000005406 washing Methods 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000018044 dehydration Effects 0.000 description 2
- 238000006297 dehydration reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 241001417955 Agonidae Species 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Images
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200620158374 CN200970591Y (en) | 2006-11-15 | 2006-11-15 | Vertical quartz tube cleaner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200620158374 CN200970591Y (en) | 2006-11-15 | 2006-11-15 | Vertical quartz tube cleaner |
Publications (1)
Publication Number | Publication Date |
---|---|
CN200970591Y true CN200970591Y (en) | 2007-11-07 |
Family
ID=38881850
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200620158374 Expired - Fee Related CN200970591Y (en) | 2006-11-15 | 2006-11-15 | Vertical quartz tube cleaner |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN200970591Y (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101352714B (en) * | 2007-12-11 | 2010-11-03 | 苏青茂 | Combined bell glass washer and operation method thereof |
CN102152917A (en) * | 2011-02-14 | 2011-08-17 | 常州亿晶光电科技有限公司 | Liquid replenishing and storing tank with filter device |
CN102245318A (en) * | 2008-11-04 | 2011-11-16 | 西德尔公司 | Equipment for cleaning containers |
CN102284456A (en) * | 2011-05-16 | 2011-12-21 | 贾印峰 | Treatment machine for detecting glass container |
CN104226654A (en) * | 2014-09-04 | 2014-12-24 | 江苏亨通光纤科技有限公司 | Device and method for cleaning quartz central tube in optical fiber ultraviolet curing furnace |
CN104550086A (en) * | 2014-12-19 | 2015-04-29 | 福鼎市福海化油器有限公司 | Carburetor water cleaning machine |
-
2006
- 2006-11-15 CN CN 200620158374 patent/CN200970591Y/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101352714B (en) * | 2007-12-11 | 2010-11-03 | 苏青茂 | Combined bell glass washer and operation method thereof |
CN102245318A (en) * | 2008-11-04 | 2011-11-16 | 西德尔公司 | Equipment for cleaning containers |
CN102152917A (en) * | 2011-02-14 | 2011-08-17 | 常州亿晶光电科技有限公司 | Liquid replenishing and storing tank with filter device |
CN102284456A (en) * | 2011-05-16 | 2011-12-21 | 贾印峰 | Treatment machine for detecting glass container |
CN104226654A (en) * | 2014-09-04 | 2014-12-24 | 江苏亨通光纤科技有限公司 | Device and method for cleaning quartz central tube in optical fiber ultraviolet curing furnace |
CN104550086A (en) * | 2014-12-19 | 2015-04-29 | 福鼎市福海化油器有限公司 | Carburetor water cleaning machine |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Assignor: Xu Zhulin Contract fulfillment period: 2009.5.10 to 2014.5.9 Contract record no.: 2009320000946 Denomination of utility model: Automatic vertical quartz tube cleaning machine and cleaning technique thereof Granted publication date: 20071107 License type: Exclusive license Record date: 20090515 |
|
LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2009.5.10 TO 2014.5.9; CHANGE OF CONTRACT Name of requester: UZHOU CSE SEMICONDUCTOR EQUIPMENT TECHNOLOGYCO.,LT Effective date: 20090515 |
|
EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Assignor: Xu Zhulin Contract record no.: 2009320000946 Date of cancellation: 20100721 |
|
ASS | Succession or assignment of patent right |
Owner name: SUZHOU CSE SEMICONDUCTOR EQUIPMENT TECHNOLOGY CO., Free format text: FORMER OWNER: XU ZHULIN Effective date: 20100921 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100053 TO: 215000 |
|
TR01 | Transfer of patent right |
Effective date of registration: 20100921 Address after: 215000 Jiangsu city of Suzhou province Dushu Lake Industrial Park No. 398 waterway if higher education Patentee after: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Address before: 100053, Beijing Xuanwu District reservoir Camp No. nine Patentee before: Xu Zhulin |
|
DD01 | Delivery of document by public notice |
Addressee: Xu Zhulin Document name: Notification of Passing Examination on Formalities |
|
DD01 | Delivery of document by public notice |
Addressee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Document name: Notification to Pay the Fees |
|
DD01 | Delivery of document by public notice |
Addressee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Document name: Notification of Termination of Patent Right |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071107 Termination date: 20131115 |