CN200967836Y - Silicon carbide soft landing loader - Google Patents
Silicon carbide soft landing loader Download PDFInfo
- Publication number
- CN200967836Y CN200967836Y CNU2006200529410U CN200620052941U CN200967836Y CN 200967836 Y CN200967836 Y CN 200967836Y CN U2006200529410 U CNU2006200529410 U CN U2006200529410U CN 200620052941 U CN200620052941 U CN 200620052941U CN 200967836 Y CN200967836 Y CN 200967836Y
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- principal pressure
- vertical
- silicon carbide
- slide unit
- screw mandrel
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Abstract
A carborundum softlanding loader mechanism is an automatic substrate feeding and take-out device used in a horizontal plasma enhanced CVD equipment to feed substrates into or take substrates out of a reaction chamber. The utility model comprises a baseplate provided with two level guides. The level guides are provided with a level skid platform which can reciprocate along the level guides. The level skid platform is provided two vertical guides; the vertical guides are provided with a vertical skid platform which can reciprocate along the vertical guides. One end of a crossbar is permanently connected with the vertical skid platform, and the other end is provided with a cover box. The cover box is provided with a lower cover and an upper cover. A principal pressure pole connection chamber is provided between the upper cover and the lower cover. One end of the principal pressure pole is arranged in the principal pressure pole connection chamber. The upper cover and the lower cover are connected with screws; and the principal pressure pole is thereby compacted; each side of the principal pressure pole are fixed with a carborundum pole, respectively. The utility model can feed graphite boats into the reaction chamber, and take the graphite boats out of the reaction chamber. Throughout the process, the graphite boats can advance, be lifted, lowered and fall back stably to achieve soft contact of the graphite boats and the inner wall of the quartz reaction chamber.
Description
Technical field
The utility model relates to a kind of automatic film advance mechanism that is used for horizontal plasma-reinforced chemical vapor deposition apparatus, further is meant to transport the automatic film conveying and withdrawing device that substrate entered or withdrawed from equipment reaction chamber.
Background technology
In horizontal enhancing plasma body chemical vapor deposition (PECVD) equipment, reaction chamber is the quartzy cavity of a cylinder shape.In the prior art, the graphite boat that normally will load substrate places and pushes away on the boat, makes it to advance along with pushing away boat or retreat; In entire reaction course, graphite boat with push away boat and all be in the reaction chamber, and whole graphite boat gravity all acts on and pushes away on the boat, any weight is not carried in the quartz reaction chamber.But at present along with the raising of equipment and state of the art, when reaction, the graphite boat that requires to load substrate is arranged in reaction chamber and pushes away boat and must withdraw from reaction chamber, when promptly requiring reaction graphite boat with push away boat and separate, place quartz reaction indoor graphite boat.Therefore, push away boat and should possess such function: transport the graphite boat that loads substrate automatically and enter or withdraw from reaction chamber, and graphite boat can be positioned in the quartz reaction chamber or with it and take out from reaction chamber.
Realize above-mentioned requirements, the problem that needs to solve has: (1) whole mode of motion that pushes away boat also will have other motion to match and could realize except horizontal direction moves; (2) to guarantee that graphite boat docks with electrode; (3) guarantee graphite boat and to push away boat sepn process quartz reaction chamber unaffected; (4) in the graphite boat turnover reaction chamber process, in the finite space of reaction chamber, should guarantee that it steadily, reliably.
The utility model content
The technical problems to be solved in the utility model is, deficiency at the prior art existence, design a kind of silicon carbide soft landing loader mechanism, it is used for horizontal plasma-reinforced chemical vapor deposition apparatus, can realize transporting automatically the graphite boat that loads substrate enters and is positioned in the quartz reaction chamber, or graphite boat taken out from reaction chamber, apparatus structure is reasonable, reliable.
The technical solution of the utility model is, described silicon carbide soft landing loader mechanism comprises that the one side is equipped with, the substrate of following two horizontal guide rails, be equipped with on the described horizontal guide rail and can drive the horizontal sliding table that this horizontal guide rail of lower edge moves back and forth in respective drive mechanism, described horizontal sliding table one side is equipped with a left side, right two vertical guide, and be equipped with on this vertical guide and can drive the vertical slide unit that this vertical guide of lower edge moves back and forth in respective drive mechanism, the other end is equipped with the lid case to one end of transverse arm with described vertical slide unit is fixedly connected, be provided with in this lid case between lower casing and corresponding upper box cover and this two lid principal pressure bar connection chamber is arranged, one end of principal pressure bar is installed in the described principal pressure bar connection chamber, described lower casing is connected the described installation end that also compresses the principal pressure bar thus with upper box cover with screw, and the both sides of principal pressure bar are fixed with the silicon carbide bar respectively.
Below the utility model made further specify.
Referring to Fig. 1, silicon carbide soft landing loader mechanism of the present utility model comprises that the one side is equipped with, following two horizontal guide rails 3,31 substrate 1, described horizontal guide rail 3, be equipped with on 31 and can drive the horizontal sliding table 8 that this horizontal guide rail of lower edge moves back and forth in respective drive mechanism, described horizontal sliding table 8 one sides are equipped with a left side, right two vertical guide 5,51, and this vertical guide 5, be equipped with on 51 and can drive the vertical slide unit 11 (referring to Fig. 2) that this vertical guide of lower edge moves back and forth in respective drive mechanism, one end of transverse arm 14 is fixedly connected and the other end is equipped with lid case 17 with described vertical slide unit 11, is provided with lower casing and corresponding upper box cover 18 and this two lid 18 in this lid case 17, form principal pressure bar connection chamber 12 between 19; Referring to Fig. 3, one end of principal pressure bar 21 is installed in the described principal pressure bar connection chamber 12, described lower casing 19 is connected and compresses thus the described installation end of principal pressure bar 21 with upper box cover 18 usefulness screws, the both sides of principal pressure bar 21 are fixed with silicon carbide bar 22,23 respectively.
As shown in Figure 2, the horizontal shift micro-adjusting mechanism of lid case 17 with respect to transverse arm 14 can be set between described transverse arm 14 and lid case 17, the composition of this mechanism can be, at two bearings 15,24 of transverse arm 14 fixed installations, screw rod is installed in these two bearings 15,24, and silk braid 16 is contained on the described screw rod between described two bearings 15,24 and its bottom is fixedly connected with lid case 17 tops.
As depicted in figs. 1 and 2, a kind of structure of the driving mechanism that described driving horizontal sliding table 8 moves back and forth on horizontal guide rail 3,31 is, in a rhizoid bar 4 is installed on the substrate 1 and between two horizontal guide rails 3,31, and the silk braid same level slide unit 8 that is contained on this screw mandrel 4 is fixedly connected, as Fig. 2, the belt pulley that is contained on 20 on the electric motor of substrate 1 opposite side connects through the belt pulley of pulley belt with screw mandrel 4 one ends.
As depicted in figs. 1 and 2, a kind of structure of the driving mechanism that the vertical slide unit 11 of described driving moves back and forth on vertical guide 5,51 is, base plate 6 is set at horizontal sliding table 8 tops and screw mandrel 7 is installed between its two vertical guide 5,51, the silk braid 25 that is contained on this screw mandrel 7 is fixedly connected with vertical slide unit 11, the beam warp universal coupling of installation electric motor 9 and step-down gear 10 and electric motor 9 is connected with the power input shaft of step-down gear 10 on the described base plate 6, and the power output shaft of step-down gear 10 connects through the end of another universal coupling with screw mandrel 7.
Also can on device, suitable position be installed by several optoelectronic switches and limit switch, to guarantee security, the reliability in localized accuracy and the operational process.For example, in Fig. 1, starting point, terminal point and intermediate reduction gear point that the optoelectronic switch 2 controlled levels directions on the base plate 1 move.
Working process of the present utility model is, as shown in Figure 2, actuating motor 20 drives screw mandrel 4 and rotates (4 rotations of this screw mandrel and do not move axially), and then the horizontal sliding table 8 that drives the axle sleeve on the screw mandrel 4 and be fixedly connected on this axle sleeve is made horizontal motion along described horizontal guide rail 3,31; When electric motor 9 starts, after slowing down by step-down gear 10, drive screw mandrel 7 and rotate (7 rotations of this screw mandrel and do not move axially), realize of the to-and-fro movement of vertical slide unit 11 thus in vertical direction; This two dimension moves the corresponding operation that has just realized with the silicon carbide bar 22,23 of the principal pressure bar 21 of vertical slide unit 11 synchronous operations and both sides thereof.Referring to Fig. 3, during actual the use, whole graphite boat just is placed on the silicon carbide bar 22,23, because silicon carbide bar the 22, the 23rd, to be carbofrax material be made for carrying force rod and this bar, and its hardness height, distortion are little; Static deformation was very little after simultaneously a whole set of stationary installation guaranteed the carrying graphite boat.
During actual motion, graphite boat is placed on the silicon carbide bar 22, actuating motor 20 then, drive a whole graphite boat tangential movement, maybe after optoelectronic switch 2 was run in operation, electric motor 9 started the arrival certain position, produces movement in vertical direction lentamente by step-down gear 10; After dropping to certain position, electric motor 20 drives the slow tangential movement of whole graphite boat again, when graphite boat with after electrode docks, tangential movement stops, whole graphite boat descends lentamente, up to contacting reposefully with the quartz reaction chamber, a whole set of then silicon carbide soft landing loader mechanism level is moved in the other direction and is withdrawed from reaction chamber, finishes whole graphite boat automatic feed quartz reaction chamber, soft landing process.After having reacted, will finish whole graphite boat and take out the quartz reaction chamber automatically, on the contrary action.
In sum, the utility model device can realize that fully whole graphite boat passes in and out quartz reaction chamber, soft landing process automatically.Simultaneously because structure design has guaranteed the reliable, steady of operation.
Description of drawings
Fig. 1 realizes a kind of embodiment of the associated mechanisms that horizontal direction and vertical direction move for the utility model device and faces structural representation (this figure is the right TV structure figure of device shown in Figure 2 after removing vertical slide unit 11 and each structure of the right thereof);
Fig. 2 is the left TV structure of device shown in Figure 1 and transverse arm has been installed and the structural representation of lid case;
Fig. 3 is the loader mechanism vertical view of the utility model device.
In the drawings:
The 1-substrate, the 2-optoelectronic switch, 3, the 31-horizontal guide rail,
The 4-screw mandrel, 5, the 51-vertical guide, the 6-base plate,
The 7-screw mandrel, 8-horizontal sliding table 8, the 9-electric motor,
The 10-step-down gear, the vertical slide unit of 11-, 12-principal pressure bar connection chamber,
The 13-stiffening plate, the 14-transverse arm, 15, the 24-bearing,
The 16-silk braid, 17-lid case, the 18-upper box cover,
The 19-lower casing, the 20-electric motor, 21-principal pressure bar,
22,23-silicon carbide bar, the 25-silk braid.
Embodiment
Silicon carbide soft landing loader mechanism of the present utility model comprises that the one side is equipped with, following two horizontal guide rails 3,31 substrate 1, horizontal guide rail 3, be equipped with on 31 and can drive the horizontal sliding table 8 that this horizontal guide rail of lower edge moves back and forth in respective drive mechanism, its side is equipped with a left side, right two vertical guide 5,51, vertical guide 5, the vertical slide unit 11 that can move back and forth in this vertical guide of drive mechanism lower edge is housed (referring to Fig. 1 on 51, Fig. 2), one end of transverse arm 14 is fixedly connected and the other end is equipped with lid case 17 with described vertical slide unit 11, is provided with lower casing and corresponding upper box cover 18 and this two lid 18 in this lid case 17, be connected to form principal pressure bar connection chamber 12 with screw between 19; Referring to Fig. 3, one end of principal pressure bar 21 is installed in the described principal pressure bar connection chamber 12, described lower casing 19 is connected and compresses thus the described installation end of principal pressure bar 21 with upper box cover 18 usefulness screws, the both sides of principal pressure bar 21 are fixed with silicon carbide bar 22,23 respectively.
As shown in Figure 2, the horizontal shift micro-adjusting mechanism of lid case 17 with respect to transverse arm 14 is set between described transverse arm 14 and lid case 17, the structure of this mechanism is, at two bearings 15,24 of transverse arm 14 fixed installations, screw rod is installed in these two bearings 15,24, and silk braid 16 is contained on the described screw rod between described two bearings 15,24 and its bottom is fixedly connected with lid case 17 tops.
As depicted in figs. 1 and 2, the composition of the driving mechanism that described driving horizontal sliding table 8 moves back and forth on horizontal guide rail 3,31 is, in a rhizoid bar 4 is installed on the substrate 1 and between two horizontal guide rails 3,31, and the silk braid same level slide unit 8 that is contained on this screw mandrel 4 is fixedly connected, as Fig. 2, the belt pulley that is contained on 20 on the electric motor of substrate 1 opposite side connects through the belt pulley of pulley belt with screw mandrel 4 one ends.
As depicted in figs. 1 and 2, the structure of the driving mechanism that the vertical slide unit 11 of described driving moves back and forth on vertical guide 5,51 is, base plate 6 is set at horizontal sliding table 8 tops and screw mandrel 7 is installed between its two vertical guide 5,51, the silk braid 25 that is contained on this screw mandrel 7 is fixedly connected with vertical slide unit 11, the beam warp universal coupling of installation electric motor 9 and step-down gear 10 and electric motor 9 is connected with the power input shaft of step-down gear 10 on the described base plate 6, and the power output shaft of step-down gear 10 connects through the end of another universal coupling with screw mandrel 7.
Claims (3)
1, a kind of silicon carbide soft landing loader mechanism, it is characterized in that, it comprises that the one side is equipped with, following two horizontal guide rails (3,31) substrate (1), described horizontal guide rail (3,31) be equipped with on and can drive the horizontal sliding table (8) that this horizontal guide rail of lower edge moves back and forth in respective drive mechanism, described horizontal sliding table (8) one sides are equipped with a left side, right two vertical guide (5,51), and this vertical guide (5,51) be equipped with on and can drive the vertical slide unit (11) that this vertical guide of lower edge moves back and forth in respective drive mechanism, the other end is equipped with lid case (17) to one end of transverse arm (14) with described vertical slide unit (11) is fixedly connected, be provided with lower casing and corresponding upper box cover (18) and this two lid (18 in this lid case (17), principal pressure bar connection chamber (12) is arranged 19), one end of principal pressure bar (21) is installed in the described principal pressure bar connection chamber (12), described lower casing (19) is connected the described installation end that also compresses principal pressure bar (21) thus with upper box cover (18) with screw, and the both sides of principal pressure bar (21) are fixed with silicon carbide bar (22 respectively, 23).
2, according to the described silicon carbide soft landing of claim 1 loader mechanism, it is characterized in that, the structure of the driving mechanism that described driving horizontal sliding table (8) moves back and forth on horizontal guide rail (3,31) is, go up and between two horizontal guide rails (3,31), install a rhizoid bar (4) in substrate (1), and the silk braid same level slide unit (8) that is contained on this screw mandrel (4) is fixedly connected, and the belt pulley that is contained on electric motor (20) axle of substrate (1) opposite side connects through the belt pulley of same screw mandrel (4) one ends of pulley belt.
3, according to the described silicon carbide soft landing of claim 1 loader mechanism, it is characterized in that, the vertical slide unit of described driving (11) is in vertical guide (5, the structure of the driving mechanism that moves back and forth 51) is, at horizontal sliding table (8) top base plate (6) is set and in its two vertical guide (5, screw mandrel (7) is installed 51), the silk braid (25) that is contained on this screw mandrel (7) is fixedly connected with vertical slide unit (11), described base plate (6) is gone up the power input shaft that the electric motor (9) and the same step-down gear of beam warp universal coupling (10) of step-down gear (10) and electric motor (9) are installed and is connected, and the power output shaft of step-down gear (10) connects through an end of the same screw mandrel of another universal coupling (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006200529410U CN200967836Y (en) | 2006-11-24 | 2006-11-24 | Silicon carbide soft landing loader |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006200529410U CN200967836Y (en) | 2006-11-24 | 2006-11-24 | Silicon carbide soft landing loader |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200967836Y true CN200967836Y (en) | 2007-10-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2006200529410U Expired - Fee Related CN200967836Y (en) | 2006-11-24 | 2006-11-24 | Silicon carbide soft landing loader |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200967836Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102328827A (en) * | 2011-06-15 | 2012-01-25 | 湖南红太阳光电科技有限公司 | Graphite boat trolley for plasma enhanced chemical vapor deposition (PECVD) automatic wafer loading and unloading system |
| CN102534555A (en) * | 2011-12-31 | 2012-07-04 | 无锡市奥曼特科技有限公司 | Wafer discharge mechanism for automatic silicon wafercharge and discharge system |
| CN102760674A (en) * | 2012-07-10 | 2012-10-31 | 中国电子科技集团公司第四十八研究所 | Push-boat movement executing device for soft-landing diffusion furnace |
| CN102983092A (en) * | 2012-10-25 | 2013-03-20 | 南通康比电子有限公司 | Die stripping device of row layout machine |
| CN105261575A (en) * | 2014-05-30 | 2016-01-20 | 盛美半导体设备（上海）有限公司 | Magnetic connecting device |
-
2006
- 2006-11-24 CN CNU2006200529410U patent/CN200967836Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102328827A (en) * | 2011-06-15 | 2012-01-25 | 湖南红太阳光电科技有限公司 | Graphite boat trolley for plasma enhanced chemical vapor deposition (PECVD) automatic wafer loading and unloading system |
| CN102534555A (en) * | 2011-12-31 | 2012-07-04 | 无锡市奥曼特科技有限公司 | Wafer discharge mechanism for automatic silicon wafercharge and discharge system |
| CN102760674A (en) * | 2012-07-10 | 2012-10-31 | 中国电子科技集团公司第四十八研究所 | Push-boat movement executing device for soft-landing diffusion furnace |
| CN102983092A (en) * | 2012-10-25 | 2013-03-20 | 南通康比电子有限公司 | Die stripping device of row layout machine |
| CN102983092B (en) * | 2012-10-25 | 2015-06-10 | 南通康比电子有限公司 | Die stripping device of row layout machine |
| CN105261575A (en) * | 2014-05-30 | 2016-01-20 | 盛美半导体设备（上海）有限公司 | Magnetic connecting device |
| CN105261575B (en) * | 2014-05-30 | 2020-07-28 | 盛美半导体设备(上海)股份有限公司 | Magnetic connecting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071031 Termination date: 20151124 |