CN200967199Y - Synchronous clamping mechanical arm of silicon chip rinsing basket - Google Patents
Synchronous clamping mechanical arm of silicon chip rinsing basket Download PDFInfo
- Publication number
- CN200967199Y CN200967199Y CN 200620148205 CN200620148205U CN200967199Y CN 200967199 Y CN200967199 Y CN 200967199Y CN 200620148205 CN200620148205 CN 200620148205 CN 200620148205 U CN200620148205 U CN 200620148205U CN 200967199 Y CN200967199 Y CN 200967199Y
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- CN
- China
- Prior art keywords
- fixed
- shell
- bull stick
- silicon chip
- fixed block
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- Expired - Fee Related
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Abstract
The utility model relates to a clamping manipulator for solar silicon wafer cleaner, which comprises a synchronous claws, a rotating rod, a guiding block, a guiding axle, a fixed block, a cylinder and a support shell. The synchronous claws are fixed on the two ends of the rotating rod, which is provided on the support shell; the fixed block connects with the rotating rod by one end and holds a climbing roller, which contacts the guide block on the guiding axle on the other end; the two ends of guiding axle are fixed on the support shell; the cylinder is on the support shell and connects the guide block by the telescopic axis of the cylinder. The utility model supports the cleaner inside to reduce the size of the cleaning tank and the used amount of cleaning liquid. With a reasonable and economical structure, the eight claws can catch two cleaner each time, which improves the efficiency and realizes the large-scale production.
Description
Technical field
The utility model relates to a kind of synchronous clamping manipulator that solar silicon wafers cleans basket that is used for.
Background technology
The automatic making herbs into wool cleaning machine of silicon chip in the manufacture of solar cells line, before being mainly used in the solar silicon wafers diffusion, form the matte structureization by etchant solution at silicon chip surface, prolong the propagation path of light, improve the transformation efficiency of light, and in acid solution subsequently, neutralize, rinse well with high purity water, be ready to desirable surface for expanding phosphorus.
Clamping manipulator as the transfer instrument of silicon chip, is the critical component of equipment in the automatic making herbs into wool cleaning machine of silicon chip synchronously, directly influences the stability and the reliability of equipment.Previously used clamping manipulator cleans basket from outside clamping, makes the size of rinse bath strengthen, and the use amount of cleaning fluid also strengthens, and it is huge that device structure also becomes, and forms waste; Can only grasp a cleaning basket, cleaning efficiency is lower, can not satisfy requirement of massive production.
The utility model content
Technical problem to be solved in the utility model is to propose a kind of synchronous clamping manipulator that is used with solar silicon wafers cleaning basket.
For this reason, the utility model provides a kind of synchronous clamping manipulator that solar silicon wafers cleans basket that is used for, this manipulator includes same ambulatory claw, bull stick, guiding skewback, the axis of guide, fixed block, effect cylinder and supports shell, the described two ends that are fixed on bull stick with ambulatory claw, described bull stick is arranged on and supports on the shell, described fixed block one end is fixedlyed connected with bull stick, and the other end is provided with the roller that climbs, and this roller that climbs rolls with the guiding skewback and contacts; Described axis of guide two ends are fixed on to be supported on the shell, and the guiding skewback is set on the axis of guide; Described effect cylinder is fixed on and supports on the shell, and the telescopic shaft of this effect cylinder is connected with the guiding skewback.
This manipulator includes back-moving spring, and this back-moving spring one end is fixed on and supports on the shell, and the other end is connected with fixed block.
The utility model has following advantage: basket is cleaned in clamping internally, makes the compact size of rinse bath, and the use amount of cleaning fluid also lowers, and it is reasonable, economical that device structure also becomes; Eight handgrips move simultaneously and once can grasp two cleaning baskets, and cleaning efficiency is higher, satisfies requirement of massive production.
Description of drawings
Below in conjunction with drawings and embodiments the utility model is described in further detail.
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is with the ambulatory claw working state figure;
Fig. 4 is with ambulatory claw relaxation state figure.
Wherein: 1: with ambulatory claw 2: bull stick 3: the guiding skewback
4: the axis of guide 5: roller 6 climbs: the effect cylinder
7: back-moving spring 8: support shell 9: fixed block
The specific embodiment
A kind of synchronous clamping manipulator that is used for solar silicon wafers cleaning basket as illustrated in fig. 1 and 2, this manipulator includes with ambulatory claw 1, bull stick 2, guiding skewback 3, the axis of guide 4, fixed block 9, effect cylinder 6, back-moving spring 7 and supports shell 8, be fixed on the two ends of bull stick 2 with ambulatory claw 1 one ends, bull stick 2 is arranged on by bearing and supports on the shell 8, and fixed block 9 one ends are fixedly connected on bull stick 2 middle parts, the other end is provided with the roller 5 that climbs, and this roller 5 that climbs rolls with guiding skewback 3 and contacts; The axis of guide 4 two ends are fixed on to be supported on the shell 8, and guiding skewback 3 is set on the axis of guide 4, can move axially at the axis of guide 4; Effect cylinder 6 is fixed on and supports on the shell 8, and the telescopic shaft on this effect cylinder 6 is connected with guiding skewback 3; Back-moving spring 7 one ends are fixed on and support on the shell 8, and the other end is connected with fixed block 9.
In the use, telescopic shaft on the effect cylinder 6 stretches out, thereby promoting guiding skewback 3 moves on the axis of guide 4, correspondingly, the roller 5 that climbs that contacts with guiding skewback 3 rolls on the slope of guiding skewback 3, utilizes lever principle, bull stick 2 rotates under the effect of fixed block 9, drive turns over certain angle in vertical state with ambulatory claw 1 bar 2 that rotates, and makes with the cleft hand of ambulatory claw 1 to carry out grasping movement (promptly strutting from inside to outside) cleaning the basket corresponding site, as shown in Figure 3.In addition, as shown in Figure 4, need unclamp when cleaning basket, the telescopic shaft withdrawal on the effect cylinder 6, fixed block 9 makes with ambulatory claw 1 and gets back to heeling condition under the pulling force effect of back-moving spring 7, promptly unclamps the cleaning basket.
This clamping manipulator, clamping internally clean basket, make the compact size of rinse bath, and the use amount of cleaning fluid also lowers, and it is reasonable, economical that device structure also becomes; Eight cleft hands move simultaneously and once can grasp two cleaning baskets, and cleaning efficiency is higher, satisfies requirement of massive production.
Claims (2)
1, a kind of silicon chip cleans the synchronous clamping manipulator of basket, it is characterized in that: this manipulator includes same ambulatory claw (1), bull stick (2), guiding skewback (3), the axis of guide (4), fixed block (9), effect cylinder (6) and supports shell (8), described same ambulatory claw (1) is fixed on the two ends of bull stick (2), described bull stick (2) is arranged on and supports on the shell (8), described fixed block (9) one ends are fixedlyed connected with bull stick (2), the other end is provided with the roller that climbs (5), and this roller that climbs (5) rolls with guiding skewback (3) and contacts; The described axis of guide (4) two ends are fixed on to be supported on the shell (8), and guiding skewback (3) is set on the axis of guide (4); Described effect cylinder (6) is fixed on and supports on the shell (8), and the telescopic shaft of this effect cylinder (6) is connected with guiding skewback (3).
2, silicon chip according to claim 1 cleans the synchronous clamping manipulator of basket, and it is characterized in that: this manipulator includes back-moving spring (7), and these back-moving spring (7) one ends are fixed on and support on the shell (8), and the other end is connected with fixed block (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620148205 CN200967199Y (en) | 2006-10-31 | 2006-10-31 | Synchronous clamping mechanical arm of silicon chip rinsing basket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620148205 CN200967199Y (en) | 2006-10-31 | 2006-10-31 | Synchronous clamping mechanical arm of silicon chip rinsing basket |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200967199Y true CN200967199Y (en) | 2007-10-31 |
Family
ID=38966771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620148205 Expired - Fee Related CN200967199Y (en) | 2006-10-31 | 2006-10-31 | Synchronous clamping mechanical arm of silicon chip rinsing basket |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200967199Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101474832A (en) * | 2009-01-24 | 2009-07-08 | 无锡市奥曼特科技有限公司 | Structure for placing improved silicon rod clamper |
| CN102366753A (en) * | 2011-10-10 | 2012-03-07 | 江苏港星方能超声洗净科技有限公司 | Clamping device for cleaning organosilicon optical conductors |
| CN108380583A (en) * | 2018-02-26 | 2018-08-10 | 上海提牛机电设备有限公司 | A kind of manipulator for Wafer Cleaning |
-
2006
- 2006-10-31 CN CN 200620148205 patent/CN200967199Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101474832A (en) * | 2009-01-24 | 2009-07-08 | 无锡市奥曼特科技有限公司 | Structure for placing improved silicon rod clamper |
| CN101474832B (en) * | 2009-01-24 | 2015-03-18 | 无锡市奥曼特科技有限公司 | Structure for placing improved silicon rod clamper |
| CN102366753A (en) * | 2011-10-10 | 2012-03-07 | 江苏港星方能超声洗净科技有限公司 | Clamping device for cleaning organosilicon optical conductors |
| CN102366753B (en) * | 2011-10-10 | 2012-11-14 | 江苏港星方能超声洗净科技有限公司 | Clamping device for cleaning organosilicon optical conductors |
| CN108380583A (en) * | 2018-02-26 | 2018-08-10 | 上海提牛机电设备有限公司 | A kind of manipulator for Wafer Cleaning |
| CN108380583B (en) * | 2018-02-26 | 2020-12-18 | 上海提牛机电设备有限公司 | Manipulator for cleaning silicon wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071031 Termination date: 20151031 |
|
| EXPY | Termination of patent right or utility model |