CN1987581A - Position alignment mark and liquid crystal panel with position alignment mark - Google Patents
Position alignment mark and liquid crystal panel with position alignment mark Download PDFInfo
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- CN1987581A CN1987581A CN 200510121243 CN200510121243A CN1987581A CN 1987581 A CN1987581 A CN 1987581A CN 200510121243 CN200510121243 CN 200510121243 CN 200510121243 A CN200510121243 A CN 200510121243A CN 1987581 A CN1987581 A CN 1987581A
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Abstract
The alignment marker includes an up alignment marker and a low alignment marker. The up alignment marker includes a first horizontal alignment marker and a first vertical alignment marker perpendicular to each other. The low alignment marker includes a second horizontal alignment marker and a second vertical alignment marker perpendicular to each other. The first horizontal alignment marker is corresponding to the second horizontal alignment marker; and both include cycle-distributed lines parallel to each other, and their cycles are equal. The first vertical alignment marker is corresponding to the second vertical alignment marker; and both include cycle-distributed lines parallel to each other, and their cycles are equal. When aligning operation is carried out, lines of up and low alignment markers are crossed so as to form interphase dark stripes and bright stripes. The alignment markers and liquid crystal faceplate possess high accuracy of alignment.
Description
[technical field]
The invention relates to a kind of alignment mark, refer to be used in the alignment mark of liquid crystal panel contraposition especially.
[background technology]
LCD now has been widely used in modernized information equipments such as TV, notebook, computing machine, mobile phone, personal digital assistant because it has advantages such as frivolous.
Need in the manufacture process of LCD two substrates up and down of liquid crystal panel are engaged, what engage precedingly at first must carry out contraposition by the alignment mark that is separately positioned on this two substrate with this two substrate, if this two substrates contraposition is inaccurate, the little defective of aperture opening ratio will appear in the LCD after the assembling.
As shown in Figures 1 and 2, a kind of liquid crystal panel of prior art comprises one first substrate 12 and one second substrate 14, and Fig. 1 is the synoptic diagram of first substrate 12, and Fig. 2 is the synoptic diagram of second substrate 14.This first substrate 12 is provided with a plurality of gate lines 121, data line 123 and four cross frames 127.These a plurality of gate lines 121 and these a plurality of data lines 123 intersect to form a plurality of pixel regions 124 that become arranged, (Thin Film Transistor TFT) is formed near the infall of these a plurality of gate lines 121 and a plurality of data line 123 a plurality of thin film transistor (TFT)s 125.These four cross frames 127 are alignment mark, and these four cross frames 127 lay respectively at four corners of this first substrate 12.
This second substrate 14 comprises a colored filter (figure does not show), black matrix 141 and four cross marks 143.When this first substrate 12 is fitted with this second substrate 14, it is corresponding with gate line 121, data line 123 and the thin film transistor (TFT) 125 of this first substrate 12 to deceive matrix 141, and should cover these gate lines 121, data line 123 and thin film transistor (TFT) 125 in case leak-stopping light by black matrix 141.These four cross marks 143 are alignment mark, lay respectively at four corners of this second substrate 14, and these four cross marks 143 are corresponding with these four cross frames 127 respectively.
When this first substrate 12 is engaged with this second substrate 14, each cross frame 127 of this first substrate 12 is aimed at the corresponding cross mark 143 of this second substrate 14 respectively, be that each cross mark 143 falls in the corresponding cross frame 127 respectively fully, thereby the gate line 121 of this first substrate 12, data line 123 and thin film transistor (TFT) 125 are aimed at the black matrix 141 of this second substrate 14 respectively, promptly should cover this gate line 121, data line 123 and thin film transistor (TFT) 125 by black matrix 141.
Along with the raising that the portrait display quality of LCD is required, require liquid crystal panel unit area interior pixel quantity to increase gradually, thereby the spacing between a plurality of gate lines 121, a plurality of data line 123 and a plurality of thin film transistor (TFT) 125 reduces gradually, the spacing of black matrix 141 reduces equally gradually, and the size of said modules reduces equally gradually, therefore require to improve the contraposition degree of accuracy when first substrate 12 of liquid crystal panel carries out contraposition with second substrate 14, promptly require to improve the contraposition degree of accuracy of this alignment mark cross frame 127 and this cross mark 143.And this alignment mark cross frame 127 and cross mark 143 be in the contraposition process, cross mark 143 placed represent promptly in the cross frame 127 that contraposition is accurate.And this cross mark 143 has the certain deviation scope in this cross frame 127, and the skew in this deviation range is difficult for discovering, occur the coarse phenomenon of contraposition easily thereby adopt this alignment mark cross frame 127 and cross mark 143 to carry out contraposition, and then cause harmful effects such as liquid crystal panel aperture opening ratio reduction.
[summary of the invention]
In order to overcome the coarse phenomenon of alignment mark contraposition in the prior art, be necessary to provide a kind of contraposition degree of accuracy higher alignment mark.
Also be necessary to provide a kind of liquid crystal panel that has this alignment mark.
A kind of alignment mark, it comprises that alignment mark reaches alignment mark on one, alignment mark be should go up and orthogonal one first horizontal alignment mark and one first vertical alignment mark comprised, this time alignment mark comprises orthogonal one second horizontal alignment mark and one second vertical alignment mark, this first horizontal alignment mark is corresponding with the second horizontal alignment mark, include into the lines that are parallel to each other of period profile, and the lines cycle equates, this first vertical alignment mark is corresponding with the second vertical alignment mark, include into the lines that are parallel to each other of period profile, and the lines cycle equates, upward alignment mark and this time alignment mark are separately positioned on the two dull and stereotyped objects, and at least one dull and stereotyped object is transparent, when on time, the lines of the lines of this first horizontal correspondence markings and this second horizontal alignment mark intersect to form alternate dark line and bright rays, and the lines of this first vertical alignment mark intersect to form alternate dark line and bright rays with the lines of this second vertical alignment mark.
A kind of liquid crystal panel that has alignment mark, it comprises one first substrate and one second substrate, this first substrate comprises alignment mark on, this second substrate comprises alignment mark, alignment mark be should go up and orthogonal one first horizontal alignment mark and one first vertical alignment mark comprised, this time alignment mark comprises one second horizontal alignment mark and one second vertical alignment mark, this first horizontal alignment mark is corresponding with the second horizontal alignment mark, include into the lines that are parallel to each other of period profile, and the lines cycle equates, this first vertical alignment mark is corresponding with this second vertical alignment mark, include into the lines that are parallel to each other of period profile, and the lines cycle equates, when on time, the lines of the lines of this first horizontal correspondence markings and this second horizontal alignment mark intersect to form alternate dark line and bright rays, and the lines of this first vertical alignment mark intersect to form alternate dark line and bright rays with the lines of this second vertical alignment mark.
Compared with prior art, the last alignment mark of above-mentioned alignment mark and following alignment mark include into the lines of period profile, when last, following alignment mark is on time, upward the lines of alignment mark and the lines of this time alignment mark intersect to form alternate dark line and bright rays, alignment mark and this time alignment mark have skew each other on this, even be offset very little, this dark line and this bright rays will change a lot, promptly by this dark line and the scalable subtle change that should go up between alignment mark and this time alignment mark of bright rays, the variation that is difficult for discovering is enlarged into the variation of easily discovering, therefore adopts this alignment mark contraposition can improve the contraposition degree of accuracy.
Compared with prior art, first substrate of above-mentioned liquid crystal panel comprises alignment mark on, and this second substrate comprises alignment mark.Should go up the lines that alignment mark and following alignment mark include into period profile, when alignment mark up and down on time, upward the lines of alignment mark and the lines of this time alignment mark intersect to form alternate dark line and bright rays, alignment mark and this time alignment mark have skew each other on this, even be offset very little, this dark line and this bright rays will change a lot, promptly by this dark line and bright rays, the scalable subtle change that should go up between alignment mark and this time alignment mark, the variation that is difficult for discovering is enlarged into the variation of easily discovering, thereby adopt this alignment mark contraposition can improve the contraposition degree of accuracy, even and then the number of pixels in the liquid crystal panel unit area increases, and the gate line of one of this first substrate and this second substrate, when the spacing of data line and thin film transistor (TFT) and another black matrix and size reduce, adopt this alignment mark still can carry out accurate contraposition.
[description of drawings]
Fig. 1 is the first substrate synoptic diagram of the liquid crystal panel of prior art.
Fig. 2 is the second substrate synoptic diagram of the liquid crystal panel of prior art.
Fig. 3 is the first substrate synoptic diagram of liquid crystal panel of the present invention.
Fig. 4 is the second substrate synoptic diagram of liquid crystal panel of the present invention.
Fig. 5 is first substrate of liquid crystal panel of the present invention and the synoptic diagram of second baseplate-laminating.
The applying synoptic diagram of the horizontal alignment mark when Fig. 6 is the accurate contraposition of first substrate and second substrate.
Fig. 7 is the applying synoptic diagram of the vertical alignment mark of first substrate during with the accurate contraposition of second substrate.
Fig. 8 is the contraposition principle schematic of alignment mark of the present invention.
Fig. 9 is the section enlarged diagram of alignment mark of the present invention.
Figure 10 is the synoptic diagram of first substrate, chip and the flexible circuit board of liquid crystal panel of the present invention.
Figure 11 is the synoptic diagram of the another kind distortion of alignment mark of the present invention.
Figure 12 is the synoptic diagram that the another kind of the lines of alignment mark of the present invention is out of shape.
[embodiment]
As shown in Figures 3 and 4, liquid crystal panel of the present invention comprises one first substrate 22 and one second substrate 24, and Fig. 3 is the synoptic diagram of first substrate 22, and Fig. 4 is the synoptic diagram of second substrate 24.This first substrate 22 is provided with a plurality of gate lines 221, data line 223 and four alignment marks 224.These a plurality of gate lines 221 and these a plurality of data lines 223 intersect to form a plurality of pixel regions 222 that become arranged, (Thin Film Transistor TFT) is formed near the infall of these a plurality of gate lines 221 and a plurality of data line 223 a plurality of thin film transistor (TFT)s 226.This four alignment mark 224 lays respectively at four corners of this first substrate 22.This four alignment mark 224 comprises 2 first horizontal alignment marks 225 and 2 first vertical alignment marks 227 respectively, and this 2 first horizontal alignment mark 225 is arranged in this 2 first vertical alignment mark 227 and forms a cruciform.This first horizontal alignment mark 225 and the first vertical alignment mark 227 include into the lines that are parallel to each other of period profile, and these lines are light tight, and other regional printing opacity of this first horizontal alignment mark 225 and the first vertical alignment mark 227.The lines cycle of this first horizontal alignment mark 225 and this first vertical alignment mark 227 equates.
This second substrate 24 comprises a colored filter (figure does not show), black matrix 241 and four alignment marks 243.When this first substrate 22 was fitted with this second substrate 24, this black matrix 241 was corresponding with a plurality of gate lines 221, data line 223 and the thin film transistor (TFT) 226 of this first substrate 22.This four alignment mark 243 lays respectively at four corners of this second substrate 24, and each alignment mark 243 is corresponding with a contraposition mark 224 of first substrate 21 respectively.This four alignment mark 243 comprises 2 second horizontal alignment marks 245 and 2 second vertical alignment marks 247 respectively, and this each second horizontal alignment mark 245 is corresponding with one first horizontal alignment mark 225 respectively, and this each second vertical alignment mark 247 is corresponding with one first vertical alignment mark 227 respectively.This second horizontal alignment mark 245 and the second vertical alignment mark 247 include into the lines that are parallel to each other of period profile, and these lines are light tight, and other regional printing opacity of this second horizontal alignment mark 245 and this second vertical alignment mark 247.The lines orientation of the orientation of the lines of this second horizontal alignment mark 245 and this first horizontal alignment mark 225 is inequality, and the orientation of the lines of this second vertical alignment mark 247 is inequality with the orientation of the lines of this first vertical alignment mark 227.The lines cycle of this second horizontal alignment mark 245 and the second vertical alignment mark 247 equates, and equals the lines cycle of this first horizontal alignment mark 225.
Please in the lump with reference to Fig. 5, this first substrate 22 is aimed at this second substrate 24 when fitting, the gate line 221 of this first substrate 22, data line 223 and thin film transistor (TFT) 226 are aimed at the black matrix 241 of this second substrate 24, promptly should cover this gate line 221, data line 223 and thin film transistor (TFT) 226 by black matrix 241.
When this first substrate 22 being aimed at applying with this second substrate 24, earlier the alignment mark 224 of this first substrate 22 is aimed at the alignment mark 243 of this second substrate 24.The orientation of the lines of the lines of this first horizontal alignment mark 225 and this second horizontal alignment mark 245 is inequality, and the lines of this first vertical alignment mark 227 are inequality with the orientation of the lines of this second vertical alignment mark 247, to on time, the lines cross occurrence of the lines of this first horizontal alignment mark 225 and the second horizontal alignment mark 245 pattern (Fig. 6 is that first substrate 22 and 24 pairs of second substrates are punctual, the enlarged drawing that the first horizontal alignment mark 225 is aimed at the second horizontal alignment mark 245) as shown in Figure 6; The lines cross occurrence of the lines of this first vertical alignment mark 227 and this second vertical alignment mark 247 pattern (Fig. 7 is that first substrate 22 and 24 pairs of second substrates are punctual, the enlarged drawing that the first vertical alignment mark 227 is aimed at the second vertical alignment mark 247) as shown in Figure 7.
The alignment mark 224,243 that the present invention adopts, its contraposition principle as shown in Figure 8.For example, one group of alignment mark 300 comprises that alignment mark 310 reaches alignment mark 320 on one.Should go up alignment mark 310 corresponding to this first horizontal alignment mark 225, this time alignment mark 320 is corresponding to this second horizontal alignment mark 245, perhaps, alignment mark 310 is corresponding to this first vertical alignment mark 227 on this, and this time alignment mark 320 is corresponding to this second vertical alignment mark 247.The lines cycle that should go up alignment mark 310 and this time alignment mark 320 is p, and this lines range of period p is 0.3 to 1.5 μ m.In the lump with reference to Fig. 9, be the profile of alignment mark 310 on this please, the xsect of these lines becomes a rectangle.The width of these lines represents that with a the spacing of these lines represents that with b the scope of i.e. a+b=p, and a/b gets 1/3 to 3.
Suppose when upward alignment mark 310 is aimed at applying with this time alignment mark 320, the lines that should go up the lines of alignment mark 310 and this time alignment mark 320 θ that has angle, when the scope of this angle theta is got 0.001 to 0.1 radian, the dark line 330 and bright rays 350 that the space is period profile appears in the place of being superimposed with each other that should go up alignment mark 310 and this time alignment mark 320, and this dark line 330 is commonly called folded line (Moire).The cycle of this dark line 330 is represented with D, and the bearing of trend of this dark line 330 is vertical with the angular bisector 301 of this angle theta.
The relational expression of the cycle D of this dark line 330 and the lines period p of this alignment mark 300 is
D＝(1/θ)·p
This angle theta adopts Rad to represent.By this relational expression as can be known, when p certain, θ more hour, D is just big more, for example: during θ=0.01 radian, D=100p.And cycle D is big more, mean the easy more resolution of dark line 330, and when angle theta changes, the easy more resolution of variation in the cycle of dark line 330, when also just being equivalent on this alignment mark 310 with 320 misalignment of this time alignment mark, easy more resolution, easy more resolution when promptly being equivalent to this first horizontal alignment mark 225 and this second horizontal alignment mark 245 or this first vertical alignment mark 227 with these second vertical alignment mark 247 misalignment.Therefore control angle theta, can improve the degree of accuracy of contraposition.
In addition according to Heisenberg uncertainty principle: Δ x Δ f 〉=C, wherein Δ f represents the spatial frequency inaccuracy of lines, and Δ x represents the space displacement inaccuracy of lines, and C is a constant.Spatial frequency f is the inverse of lines period p.The physical significance of this principle is: increase spatial frequency inaccuracy Δ f and can reduce space displacement inaccuracy Δ x.The alignment mark of prior art is the lines simple patterns, and its spatial frequency is lower, and the spatial frequency inaccuracy is less, so the space inaccuracy is bigger.And the lines period p of this alignment mark 300 is less, thereby f is higher for this spatial frequency, f is bigger for this spatial frequency inaccuracy Δ, thereby x is less for this space displacement inaccuracy Δ, when then explanation adopts this alignment mark 300 to carry out contraposition, it is less the contraposition inaccuracy to occur, promptly adopts the contraposition degree of accuracy of alignment mark 300 to be higher than the alignment mark of prior art, just adopts the contraposition degree of accuracy of alignment mark 224,243 to be higher than the alignment mark of prior art.
Punctual when the last alignment mark 310 of alignment mark 300 with 320 pairs of following alignment marks, move horizontally alignment mark 310 on this up or down, this 330 of dark line moves horizontally to the right or left; Move horizontally alignment mark 310 on this to the left or to the right, this dark line 330 moves horizontally up or down, and when the moving displacement of alignment mark on this 310 equals the integral multiple of lines period p, this dark line 330 will overlap once more, and promptly this dark line 330 will appear on the same space position once more.Therefore, when judging these alignment mark 300 determined positions for position accurately, multiple result will appear, thus the situation that may occur judging by accident.Whether accurately the gained result is unique result in the contraposition process in order to make, must get a sizeable zone as judging contraposition standard at this alignment mark 300.
Please refer to Fig. 8 again, this zone 340 comprises two bright rays 350 and the dark line 330 between this two bright rays 350.The part of alignment mark 300 of getting these zone 340 correspondences respectively is as the first horizontal alignment mark, 225, the first vertical alignment mark 227 of the present invention, the second horizontal alignment mark 245 and the second vertical alignment mark 247.And when judging that contraposition whether accurately, the pattern that is shown with this zone 340 is as judging contraposition standard accurately, a dark line promptly occurs and be positioned at two bright rays of these dark line both sides, and the width of the dark line that occurs equals the width of the dark line 330 in this zone 340, and the width of two bright rays of appearance equals the width of two bright rays 350 in this zone 340 respectively.
As mentioned above, compared with prior art, because the alignment mark 224 that liquid crystal panel of the present invention adopts, 243 comprise into the lines that are parallel to each other of period profile, this alignment mark 224,243 aim at when fitting mutually, this alignment mark 224,243 lines have angle, this alignment mark 224,243 fit mutually dark line 330 occurs, and when changing this angle, even the value that changes is very little, very big variation will appear in this dark line 330, promptly by these dark line 330 scalable alignment marks 224, subtle change between 243 is enlarged into the variation that is difficult for discovering the variation of easily discovering.Thereby adopt this alignment mark 224,243 to carry out contraposition, can improve the contraposition degree of accuracy of first substrate 22 and second substrate 24 of this liquid crystal panel.Therefore, even the number of pixels in the liquid crystal panel unit area increases, and when the spacing of the black matrix 241 of the gate line 221 of this first substrate 22, data line 223, thin film transistor (TFT) 226 and second substrate 24 and size reduce, adopt this alignment mark 224,243 still can carry out accurate contraposition.
Liquid crystal panel of the present invention further comprises a plurality of chips 25 and a flexible circuit board 27, and these a plurality of chips 25 are gate drivers and data driver, and this flexible circuit board 27 comprises a pressing portion 270.This chip 25 and this pressing portion 270 are corresponding with a pressing district 229 respectively.This chip 25 comprises two alignment marks 250, and this two alignment mark 250 lays respectively at the two ends of this chip 25, and each alignment mark 250 is corresponding with a contraposition mark 230 in corresponding pressing district 229.This two alignment mark 250 comprises 2 the 4th horizontal alignment marks 251 and 2 the 4th vertical alignment marks 252 respectively, and this each the 4th horizontal alignment mark 251 is corresponding with one the 3rd horizontal alignment mark 231 respectively, and this each the 4th vertical alignment mark 252 is corresponding with one the 3rd vertical alignment mark 232 respectively.The 4th horizontal alignment mark 251 and the 4th vertical alignment mark 252 include into the lines that are parallel to each other of period profile, and the color in this lines zone is dark than other field color of the 4th horizontal alignment mark 251 and the 4th vertical alignment mark 252.The lines cycle of the 4th horizontal alignment mark 251 and the 4th vertical alignment mark 252 equates, and equals the lines cycle of first horizontal alignment mark 225.
The pressing portion 270 of this flexible circuit board 27 comprises two alignment marks 271.This two alignment mark 271 lays respectively at the two ends of this pressing portion 270, and each alignment mark 271 is corresponding with a contraposition mark 230 in corresponding pressing district 229 respectively.This alignment mark 271 comprises 2 the 5th horizontal alignment marks 272 and 2 the 5th vertical alignment marks 273 respectively, and each the 5th horizontal alignment mark 272 is corresponding with one the 3rd horizontal alignment mark 231 respectively, and this each the 5th vertical alignment mark 273 is corresponding with one the 3rd vertical alignment mark 232 respectively.The 5th horizontal alignment mark 272 and the 5th vertical alignment mark 273 include into the lines that are parallel to each other of period profile, and the color in this lines zone is dark than other field color of the 5th horizontal alignment mark 272 and the 5th vertical alignment mark 273.The lines cycle of the 5th horizontal alignment mark 272 and the 5th vertical alignment mark 273 equates, and equals the lines cycle of this first horizontal alignment mark 225.
When the pressing portion 270 of this chip 25 and this flexible circuit board 27 being aimed at applying with the pressing district 229 of this first substrate 22, fit with the 3rd horizontal alignment mark 231 respectively when the 4th horizontal alignment mark 251 and the 5th horizontal alignment mark 272 and the pattern of Fig. 6 to occur, and when the pattern of Fig. 7 appears in vertical with the 3rd respectively alignment mark 232 applyings of the 4th vertical alignment mark 252 and the 5th vertical alignment mark 273, then show a plurality of circuit pins (figure does not show) a plurality of metal couplings in accurate and corresponding pressing district 229 (figure does not show) electric connection respectively on the chip 25; A plurality of metal couplings in the pressing district 229 that a plurality of leads of the pressing portion 270 of flexible circuit board 27 (figure does not show) are accurate and corresponding respectively electrically connect.
The alignment mark that liquid crystal panel of the present invention adopted is not limited to as mentioned above, for example:, therefore only adopt one group of corresponding alignment mark can realize contraposition because alignment mark 224,243,230,250,271 includes orthogonal horizontal alignment mark and vertical alignment mark; And each alignment mark 224,243,230,250,271 also can include only the vertical alignment mark with of a horizontal alignment mark; The horizontal alignment mark of this alignment mark 224,243,230,250,271 can be different with the lines cycle of vertical alignment mark; The lines cycle of alignment mark 230,250,271 is identical, but can be inequality with the lines cycle of alignment mark 224; This alignment mark 224,243,230,250,271 also can become a rectangle respectively, as shown in figure 11; Alignment mark 224,243,230,250,271 can use simultaneously with the alignment mark of prior art; Alignment mark 224,243,230,250,271 also can be corresponding to another part in this alignment mark 300, as a bright rays and be positioned at two dark lines of these bright rays both sides or the part of pairing this alignment mark 300 of two adjacent bright rays and two adjacent dark lines or the like; Light-permeable is gone back in the lines zone of alignment mark 224,243,230, but light transmission is weaker than other zone of alignment mark 224,243,230; The section of the lines of alignment mark 224,243,230,250,271 also can be trapezoidal, as shown in figure 12.
Claims (10)
1. alignment mark, it comprises that alignment mark reaches alignment mark on one, alignment mark be should go up and orthogonal one first horizontal alignment mark and one first vertical alignment mark comprised, this time alignment mark comprises orthogonal one second horizontal alignment mark and one second vertical alignment mark, it is characterized in that: this first horizontal alignment mark is corresponding with the second horizontal alignment mark, include into the lines that are parallel to each other of period profile, and the lines cycle equates, this first vertical alignment mark is corresponding with the second vertical alignment mark, include into the lines that are parallel to each other of period profile, and the lines cycle equates, upward alignment mark and this time alignment mark are separately positioned on the two dull and stereotyped objects, and at least one dull and stereotyped object is transparent, when on time, the lines of the lines of this first horizontal alignment mark and this second horizontal alignment mark intersect to form dark line and bright rays, and the lines of this first vertical alignment mark intersect to form alternate dark line and bright rays with the lines of the second vertical alignment mark.
2. alignment mark as claimed in claim 1 is characterized in that: this lines cycle is more than or equal to 0.3 μ m and smaller or equal to 1.5 μ m.
3. alignment mark as claimed in claim 1 is characterized in that: the width of these lines and the ratio of its spacing are more than or equal to 1/3 and smaller or equal to 3.
4. alignment mark as claimed in claim 1, it is characterized in that: when on time, the lines of this first horizontal alignment mark and the lines of this second horizontal alignment mark intersect the angle that become more than or equal to 0.001 radian and smaller or equal to 0.1 radian, and the lines of this first vertical alignment mark and the lines of this second vertical alignment mark intersect the angle that become more than or equal to 0.001 radian and smaller or equal to 0.1 radian.
5. alignment mark as claimed in claim 1, it is characterized in that: alignment mark further comprises orthogonal one first horizontal alignment mark and one first vertical alignment mark on this, and this time alignment mark further comprises orthogonal one second horizontal alignment mark and one second vertical alignment mark.
6. alignment mark as claimed in claim 5 is characterized in that: this 2 first horizontal alignment mark is formed a cruciform with this 2 first vertical alignment mark, and this 2 second horizontal alignment mark is formed a cruciform with 2 second vertical alignment marks.
7. alignment mark as claimed in claim 5 is characterized in that: this 2 first horizontal alignment mark is formed a rectangle with this 2 first vertical alignment mark, and this 2 second horizontal alignment mark is formed a rectangle with 2 second vertical alignment marks.
8. alignment mark as claimed in claim 1 is characterized in that: the lines cycle of this first horizontal alignment mark equated with the lines cycle of this first vertical alignment mark.
9. alignment mark as claimed in claim 1, it is characterized in that: light transmission in the lines zone of alignment mark is weaker than other regional light transmission of this alignment mark on this, and the light transmission of the lines of this time alignment mark is weaker than other regional light transmission of this time alignment mark.
10. liquid crystal panel that has alignment mark, it comprises one first substrate and one second substrate, this first substrate comprises alignment mark on, this second substrate comprises alignment mark, it is characterized in that: alignment mark and this time alignment mark are each described alignment mark and following alignment marks gone up of claim 1 to 9 on this.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510121243 CN1987581A (en) | 2005-12-23 | 2005-12-23 | Position alignment mark and liquid crystal panel with position alignment mark |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510121243 CN1987581A (en) | 2005-12-23 | 2005-12-23 | Position alignment mark and liquid crystal panel with position alignment mark |
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| CN1987581A true CN1987581A (en) | 2007-06-27 |
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| CN 200510121243 Pending CN1987581A (en) | 2005-12-23 | 2005-12-23 | Position alignment mark and liquid crystal panel with position alignment mark |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101890613A (en) * | 2009-05-23 | 2010-11-24 | 鸿富锦精密工业（深圳）有限公司 | Processing method of alignment mark and workpiece with alignment mark |
| US8330903B2 (en) | 2009-09-02 | 2012-12-11 | Beijing Boe Optoelectronics Technology Co., Ltd. | Liquid crystal display and substrate thereof |
| CN103258478A (en) * | 2013-05-09 | 2013-08-21 | 友达光电(厦门)有限公司 | Substrate for displayer and display panel |
| TWI457195B (en) * | 2009-06-02 | 2014-10-21 | Hon Hai Prec Ind Co Ltd | Method of machining position marker and workpiece having same |
| CN104849896A (en) * | 2015-05-26 | 2015-08-19 | 合肥京东方光电科技有限公司 | Liquid crystal display panel, and method and device for reading alignment numerical values |
| CN105974638A (en) * | 2016-07-26 | 2016-09-28 | 京东方科技集团股份有限公司 | Display substrate and display device |
| CN108132558A (en) * | 2018-01-26 | 2018-06-08 | 福州京东方光电科技有限公司 | Alignment detecting method and display device |
| CN109461715A (en) * | 2018-09-29 | 2019-03-12 | 南京中感微电子有限公司 | A kind of multi-die packages body |
| CN109963401A (en) * | 2018-09-14 | 2019-07-02 | 友达光电股份有限公司 | The manufacturing method and Double-side line substrate of Double-side line substrate |
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2005
- 2005-12-23 CN CN 200510121243 patent/CN1987581A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101890613A (en) * | 2009-05-23 | 2010-11-24 | 鸿富锦精密工业（深圳）有限公司 | Processing method of alignment mark and workpiece with alignment mark |
| CN101890613B (en) * | 2009-05-23 | 2013-08-21 | 鸿富锦精密工业（深圳）有限公司 | Processing method of alignment mark and workpiece with alignment mark |
| TWI457195B (en) * | 2009-06-02 | 2014-10-21 | Hon Hai Prec Ind Co Ltd | Method of machining position marker and workpiece having same |
| US8330903B2 (en) | 2009-09-02 | 2012-12-11 | Beijing Boe Optoelectronics Technology Co., Ltd. | Liquid crystal display and substrate thereof |
| CN103258478A (en) * | 2013-05-09 | 2013-08-21 | 友达光电(厦门)有限公司 | Substrate for displayer and display panel |
| CN103258478B (en) * | 2013-05-09 | 2015-04-15 | 友达光电(厦门)有限公司 | Substrate for displayer and display panel |
| CN104849896A (en) * | 2015-05-26 | 2015-08-19 | 合肥京东方光电科技有限公司 | Liquid crystal display panel, and method and device for reading alignment numerical values |
| CN104849896B (en) * | 2015-05-26 | 2017-10-10 | 合肥京东方光电科技有限公司 | A kind of liquid crystal display panel and read method, the reading device for aligning numerical value |
| CN105974638A (en) * | 2016-07-26 | 2016-09-28 | 京东方科技集团股份有限公司 | Display substrate and display device |
| CN108132558A (en) * | 2018-01-26 | 2018-06-08 | 福州京东方光电科技有限公司 | Alignment detecting method and display device |
| CN108132558B (en) * | 2018-01-26 | 2020-08-25 | 福州京东方光电科技有限公司 | Alignment detection method and display device |
| CN109963401A (en) * | 2018-09-14 | 2019-07-02 | 友达光电股份有限公司 | The manufacturing method and Double-side line substrate of Double-side line substrate |
| CN109461715A (en) * | 2018-09-29 | 2019-03-12 | 南京中感微电子有限公司 | A kind of multi-die packages body |
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