CN1967176A - Piezoelectric resonant diaphragm type sensor - Google Patents
Piezoelectric resonant diaphragm type sensor Download PDFInfo
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- CN1967176A CN1967176A CN 200610125132 CN200610125132A CN1967176A CN 1967176 A CN1967176 A CN 1967176A CN 200610125132 CN200610125132 CN 200610125132 CN 200610125132 A CN200610125132 A CN 200610125132A CN 1967176 A CN1967176 A CN 1967176A
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Abstract
The piezoelectric resonance diaphragm sensor belongs to the sensors, and it overcomes the limitation of the existing vibration tube icing sensor, for the detection of the icing phenomenon. In the invention, the tube stainless steel shell, one end jointing connects the vibration diaphragm, and another end forms a airtight cavity closed with the rear board; (1) the said vibration diaphragm is attached by the piezoelectric element, the airtight cavity wall abutting the piezoelectric element and vibration diaphragm installed temperature-detecting element, and the piezoelectric element and the temperature-detecting element electrical connect with the drive and signal detection circuit through shielding cable of the airtight cavity; (2) the said piezoelectric element comprises: the one surface of the piezoelectric element connects the reference ground electrode, and another surface connects the driven electrode and the signal electrode encircled by the driven electrode. The invention is high sensitivity for the ice layer detection, and low power consumption, and small size, and it can be installed flush on some detection surfaces, such as highways, aircraft wing leading edge, and so on.
Description
Technical field
The invention belongs to a kind of sensor, be used for the phenomenon of freezing is detected.
Background technology
Freezing is a kind of spontaneous phenomenon that may work the mischief, and can hinder normally taking off of aircraft and lands as icing on the aircraft runway; It is out of control that icing meeting on the highway is skidded automobile, causes traffic hazard; Can produce at some position of body (as the leading edge of a wing) when aircraft aloft flies and freeze the safe flight of serious threat aircraft.
Freezing sensor is to survey a kind of information acquisition device or the device that the do not freeze generation and the icing order of severity being arranged.Existing freezing sensor is based on vibration tube principle, to vibrate tube and make the rod-type detector bar, the vibration tube is made flexible harmonic moving under electromagnetic force drives, when having icing phenomenon to take place on the detector bar, the resonance frequency of vibration tube can descend, and the bright icing degree of speaking more more of descending is serious more.The application of this freezing sensor is restricted, as is used for aircraft, then can not flush surfaces such as being installed on wing, can only stretch in the air outward.This sensor can not be applied to the icing detection of airfield runway and highway.
Summary of the invention
The present invention proposes a kind of piezoelectric resonant diaphragm type sensor, overcomes the limitation of existing vibration tube freezing sensor, is used for the phenomenon of freezing is detected.
A kind of piezoelectric resonant diaphragm type sensor of the present invention, tubular Stainless Steel Shell one end welding vibrating diaphragm, the other end forms closed chamber by the back shroud sealing; It is characterized in that: be bonded with piezoelectric element on (1) described vibrating diaphragm, the closed chamber wall is equipped with temperature element near piezoelectric element and vibrating diaphragm, and piezoelectric element is connected with input electronic circuit electric signal with driving by the band screen layer cable that passes closed chamber with temperature element; (2) described piezoelectric element consists of: the piezoelectric element body simultaneously connects with reference to ground electrode, and piezoelectric element body another side connects drive electrode and is the signal electrode that drive electrode centered on.
Described piezoelectric resonant diaphragm type sensor, it is characterized in that: described piezoelectric element body is made by the lead lanthanum zirconate titanate (PLZT) electrooptical ceramics material through modification, describedly is created on the piezoelectric element body based on ag material and with sintering process with reference to ground electrode, drive electrode and signal electrode; Described closed chamber inside is provided with back up pad, is used for closed cavity and transfers piezoelectric element and temperature element signal extension line.
Described piezoelectric resonant diaphragm type sensor, it is characterized in that: the constituting of described driving and input electronic circuit: the signal of signal electrode amplifies by signal amplifier, produce drive signal through driving amplifier again and act on drive electrode, constitute the self-excited oscillator of positive feedback, its frequency of operation is the resonance frequency of piezoelectric element and vibrating diaphragm; The frequency signal of drive electrode is delivered to the frequency counting line by signal detection line through switch, delivers to TT﹠C system again and carries out frequency measurement.
Described piezoelectric resonant diaphragm type sensor, it is characterized in that: described driving and input electronic circuit comprise excitation chain again: TT﹠C system encourages after testing selects signal wire to send switch controlling signal, make signal detection line be connected to the pumping signal line, TT﹠C system is sent the train of impulses pumping signal through pumping signal alignment drive electrode again, makes piezoelectric element vibrate work again.
By the character of piezoelectric element as can be known, apply the alternating voltage signal between reference ground electrode and drive electrode, then the piezoelectric element body produces the radial expansion distortion, and this is the inverse piezoelectric effect of piezoelectric element.When piezoelectric element in some way, for example bonding by powerful conducting resinl and vibrating diaphragm, then vibrating diaphragm is because of the radial expansion distortion of the piezoelectric element vibration that can occur bending and deformation.Utilize the direct piezo electric effect of piezoelectric element can on signal electrode, obtain the flexural deformation vibration signal again.The present invention adopts such mode of operation, makes the Round Membranes sheet do flexural vibrations, and the vibration frequency working point is the single order tuning-points of vibrating diaphragm.The one side of vibrating diaphragm is as the test surface that freezes, and when there not being when freezing on it, working sensor is on a certain original frequency; When the generation of freezing is arranged on the test surface, layers of ice has increased the rigidity of vibrating diaphragm greatly, thereby cause the increase of freezing sensor resonance frequency, in resonant circuit, obtain frequency signal and increment thereof, just can learn whether the phenomenon of freezing takes place, and learn what of the thickness that freezes from the size of frequency increment.
The present invention also comprises a minute sized Pt100 temperature element, the acting as of this temperature element: the temperature of (1) survey sensor itself, temperature signal are as the usefulness of sensor temperature compensation, to guarantee the stability of sensor frequency to temperature; (2) when sensor temperature is higher than 20 ℃, electronic measurement system will cut away the frequency signal of sensor, reduces false alarm rate, so that the warning of freezing is more reliable.
The principal feature of sensor of the present invention is: (1) utilizes the inverse piezoelectric effect of piezoelectric element to make and surveys vibrating diaphragm generation flexural vibrations distortion, utilize the direct piezo electric effect of piezoelectric element to pick up the vibration signal of diaphragm simultaneously, by the driving of electronic circuit, make working sensor on resonance frequency.Therefore working stability is high to the sensitivity that ice sheet detects; (2) owing to use piezoelectric element, the power consumption of sensor is very low; (3) built-in miniature temperature element can carry out intelligent compensation to the frequency temperature variation of sensor, has improved the reliability of system greatly; (4) size sensor is little, can flush to be installed on the surface of detecting that needs to freeze, and as highway, aircraft wing leading edge etc., this existing freezing sensor is difficult to realize.
Description of drawings
Figure 1A is the piezoelectric element structural drawing among the present invention;
Figure 1B is the vertical view of Figure 1A;
Fig. 2 is the structural representation of one embodiment of the invention;
Driving and input electronic line structure synoptic diagram that Fig. 3 adopts for the present invention.
Embodiment
Now embodiments of the present invention are illustrated in conjunction with Figure 1A, Figure 1B, Fig. 2, Fig. 3.
Figure 1A, Figure 1B are a kind of wafer-type piezoelectric element of three electrode radial expansion deformation vibrations, with reference to ground electrode 1 is circle and the one side that covers piezoelectric element body 2, the another side of piezoelectric element body 2 is a drive electrode 4, is partitioned into a small pieces signal electrode 3 in the drive electrode 4.Each electrode all is ag materials and is created on the piezoelectric element body with sintering process.
Figure 2 shows that one embodiment of the present of invention, tubular Stainless Steel Shell 7 one ends welding vibrating diaphragm 6, the other end forms closed chamber by back shroud 9 sealings; The piezoelectric element that bonds on the vibrating diaphragm 6, piezoelectric element is to make through the lead lanthanum zirconate titanate (PLZT) electrooptical ceramics material of modification, and piezoelectric element is by reference ground electrode 1, piezoelectric element body 2, and a small pieces signal electrode 3 that is partitioned in drive electrode 4 and the drive electrode 4 is formed.Each electrode is to be created on the piezoelectric element body 2 based on ag material and with sintering process.Temperature element 12, it is near piezoelectric element and vibrating diaphragm, thereby can record the temperature of piezoelectric element and vibrating diaphragm with fast speeds.Sensor internal back up pad 10, its function are closed cavity and tandem signal extension line.Band screen layer cable 8 is drawn piezoelectric element and each signal wire of temperature element.In addition, also be evenly distributed with 4 mounting holes 11 around the sensor.
A microsize Pt100 temperature element 12 among the present invention act as: the temperature of (1) survey sensor itself, temperature signal are as the usefulness of sensor temperature compensation, to guarantee the stability of sensor frequency to temperature; (2) when sensor temperature is higher than 20 ℃, electronic measurement system will cut away the frequency signal of sensor, reduces false alarm rate, so that the warning of freezing is more reliable.
Fig. 3 is basic driving and input electronic line structure synoptic diagram.The signal that obtains from signal electrode 3 amplifies by signal amplifier 20, produce drive signal through driving amplifier 19 again and act on drive electrode 4, so just, constituted the self-excited oscillator of positive feedback, its frequency of operation is exactly the resonance frequency of the vibrational system that constituted of piezoelectric element and vibrating diaphragm 6.The frequency signal of drive electrode 4 is delivered to frequency counting line 17 by signal detection line 14 through switch 15, delivers to the TT﹠C system 21 that is made of single-chip microcomputer again and carries out frequency measurement.When vibrating diaphragm 6 outside surfaces do not have when icing, working sensor is in an original frequency; When the generation of freezing was arranged on it, then the frequency of operation of sensor rose, and in certain ice layer thickness scope, the frequency of operation of sensor has good corresponding one by one linear relationship with the thickness that freezes.Therefore, measuring frequency values and variable quantity thereof just can realize whether detection with the ice layer thickness signal is taken place the phenomenon of freezing.
When ice layer thickness reached certain value, sensor can stop vibration, this moment need be after melt freezing again to the sensor exciting so that its resume work.Again exciting is achieved in that singlechip computer system encourages selection signal wire 16 to send switch controlling signal after testing, make signal detection line 14 be connected to pumping signal line 18, TT﹠C system 21 is sent the train of impulses pumping signal through pumping signal line 18 to piezoelectric sensor again, makes piezoelectric element vibrate work again.
Claims (4)
1. piezoelectric resonant diaphragm type sensor, tubular Stainless Steel Shell one end welding vibrating diaphragm, the other end forms closed chamber by the back shroud sealing; It is characterized in that: be bonded with piezoelectric element on (1) described vibrating diaphragm, the closed chamber wall is equipped with temperature element near piezoelectric element and vibrating diaphragm, and piezoelectric element is connected with input electronic circuit electric signal with driving by the band screen layer cable that passes closed chamber with temperature element; (2) described piezoelectric element consists of: the piezoelectric element body simultaneously connects with reference to ground electrode, and piezoelectric element body another side connects drive electrode and is the signal electrode that drive electrode centered on.
2. piezoelectric resonant diaphragm type sensor as claimed in claim 1, it is characterized in that: described piezoelectric element body is made by the lead lanthanum zirconate titanate (PLZT) electrooptical ceramics material through modification, describedly is created on the piezoelectric element body based on ag material and with sintering process with reference to ground electrode, drive electrode and signal electrode; Described closed chamber inside is provided with back up pad, is used for closed cavity and transfers piezoelectric element and temperature element signal extension line.
3. piezoelectric resonant diaphragm type sensor as claimed in claim 1 or 2, it is characterized in that: the constituting of described driving and input electronic circuit: the signal of signal electrode amplifies by signal amplifier, produce drive signal through driving amplifier again and act on drive electrode, constitute the self-excited oscillator of positive feedback, its frequency of operation is the resonance frequency of piezoelectric element and vibrating diaphragm; The frequency signal of drive electrode is delivered to the frequency counting line by signal detection line through switch, delivers to TT﹠C system again and carries out frequency measurement.
4. piezoelectric resonant diaphragm type sensor as claimed in claim 3, it is characterized in that: described driving and input electronic circuit comprise excitation chain again: TT﹠C system encourages after testing selects signal wire to send switch controlling signal, make signal detection line be connected to the pumping signal line, TT﹠C system is sent the train of impulses pumping signal through pumping signal alignment drive electrode again, makes piezoelectric element vibrate work again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610125132 CN1967176A (en) | 2006-11-24 | 2006-11-24 | Piezoelectric resonant diaphragm type sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610125132 CN1967176A (en) | 2006-11-24 | 2006-11-24 | Piezoelectric resonant diaphragm type sensor |
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| CN1967176A true CN1967176A (en) | 2007-05-23 |
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| CN 200610125132 Pending CN1967176A (en) | 2006-11-24 | 2006-11-24 | Piezoelectric resonant diaphragm type sensor |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103207057A (en) * | 2013-03-19 | 2013-07-17 | 大连理工大学 | Piezoelectric type measuring device of control surface hinge moment |
| CN105182203A (en) * | 2015-09-30 | 2015-12-23 | 广西电网有限责任公司电力科学研究院 | Device and method for detecting partial discharge of power capacitor |
| CN109780986A (en) * | 2017-11-15 | 2019-05-21 | 武汉市瑞莱斯特科技有限公司 | A kind of method and apparatus measuring solidifying ice rate |
| CN110017800A (en) * | 2019-03-12 | 2019-07-16 | 华中科技大学 | A kind of method and device detecting icing thickness |
| CN110081807A (en) * | 2019-04-12 | 2019-08-02 | 哈尔滨理工大学 | A kind of ice layer thickness detection system and its detection method based on resonant mode piezoelectric ceramics |
-
2006
- 2006-11-24 CN CN 200610125132 patent/CN1967176A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103207057A (en) * | 2013-03-19 | 2013-07-17 | 大连理工大学 | Piezoelectric type measuring device of control surface hinge moment |
| CN103207057B (en) * | 2013-03-19 | 2015-10-14 | 大连理工大学 | A kind of piezoelectric type control surface hinge moment measurement mechanism |
| CN105182203A (en) * | 2015-09-30 | 2015-12-23 | 广西电网有限责任公司电力科学研究院 | Device and method for detecting partial discharge of power capacitor |
| CN109780986A (en) * | 2017-11-15 | 2019-05-21 | 武汉市瑞莱斯特科技有限公司 | A kind of method and apparatus measuring solidifying ice rate |
| CN110017800A (en) * | 2019-03-12 | 2019-07-16 | 华中科技大学 | A kind of method and device detecting icing thickness |
| CN110081807A (en) * | 2019-04-12 | 2019-08-02 | 哈尔滨理工大学 | A kind of ice layer thickness detection system and its detection method based on resonant mode piezoelectric ceramics |
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Open date: 20070523 |