CN1955089B - Substrate conveying device and substrate processing device containing the same - Google Patents
Substrate conveying device and substrate processing device containing the same Download PDFInfo
- Publication number
- CN1955089B CN1955089B CN2006101499544A CN200610149954A CN1955089B CN 1955089 B CN1955089 B CN 1955089B CN 2006101499544 A CN2006101499544 A CN 2006101499544A CN 200610149954 A CN200610149954 A CN 200610149954A CN 1955089 B CN1955089 B CN 1955089B
- Authority
- CN
- China
- Prior art keywords
- mentioned
- upper plate
- side buffer
- outer side
- buffer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (8)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050100238 | 2005-10-24 | ||
KR10-2005-0100238 | 2005-10-24 | ||
KR1020050100238A KR100674882B1 (en) | 2005-10-24 | 2005-10-24 | Transfer for use in transmitting works |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1955089A CN1955089A (en) | 2007-05-02 |
CN1955089B true CN1955089B (en) | 2011-09-28 |
Family
ID=38014984
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006101499544A Active CN1955089B (en) | 2005-10-24 | 2006-10-19 | Substrate conveying device and substrate processing device containing the same |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100674882B1 (en) |
CN (1) | CN1955089B (en) |
TW (1) | TWI332930B (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4450081B2 (en) * | 2008-02-13 | 2010-04-14 | セイコーエプソン株式会社 | Parts testing equipment |
KR101105416B1 (en) * | 2009-07-23 | 2012-01-17 | 주식회사 디엠에스 | Apparatus for processing substrate |
CN102136407B (en) * | 2009-12-31 | 2013-11-06 | 丽佳达普株式会社 | Guide rack of substrate processing device |
KR101331507B1 (en) * | 2010-08-09 | 2013-11-20 | 엘지디스플레이 주식회사 | Substrate cleaning/drying apparatus and substrate processing apparatus comprising the same, substrate cleaning/drying method, and method for manufacturing of display device the same |
WO2013011107A1 (en) * | 2011-07-21 | 2013-01-24 | Thyssenkrupp System Engineering Gmbh | Device and method for stopping and/or aligning transport goods on a conveying device, and conveying device |
CN108444265B (en) * | 2018-03-26 | 2020-06-16 | 东莞市银泰玻璃有限公司 | Glass plate's transportation airing device |
KR102640243B1 (en) | 2023-07-31 | 2024-02-23 | (주)템스코 | Pick-up and transfer device for manufacturing shield-type OLED metal mask with synchronous opening and closing structure |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2517701Y (en) * | 2001-09-20 | 2002-10-23 | 黄平尧 | Steering device of circuit board |
CN1576199A (en) * | 2003-06-25 | 2005-02-09 | 显示器生产服务株式会社 | Apparatus for conveying substrate in horizontal and verticle direction |
-
2005
- 2005-10-24 KR KR1020050100238A patent/KR100674882B1/en active IP Right Grant
-
2006
- 2006-10-16 TW TW095138005A patent/TWI332930B/en active
- 2006-10-19 CN CN2006101499544A patent/CN1955089B/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2517701Y (en) * | 2001-09-20 | 2002-10-23 | 黄平尧 | Steering device of circuit board |
CN1576199A (en) * | 2003-06-25 | 2005-02-09 | 显示器生产服务株式会社 | Apparatus for conveying substrate in horizontal and verticle direction |
Also Published As
Publication number | Publication date |
---|---|
CN1955089A (en) | 2007-05-02 |
TWI332930B (en) | 2010-11-11 |
KR100674882B1 (en) | 2007-01-29 |
TW200716468A (en) | 2007-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140225 |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20140225 Address after: Gyeonggi Do, South Korea Patentee after: Display Production Service Co., Ltd. Patentee after: Weihai dianmei Shiguang electromechanical Co Ltd Address before: Gyeonggi Do, South Korea Patentee before: Display Production Service Co., Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: DMS Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |