CN1908566A - Heat treatment equipment - Google Patents
Heat treatment equipment Download PDFInfo
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- CN1908566A CN1908566A CN 200610108205 CN200610108205A CN1908566A CN 1908566 A CN1908566 A CN 1908566A CN 200610108205 CN200610108205 CN 200610108205 CN 200610108205 A CN200610108205 A CN 200610108205A CN 1908566 A CN1908566 A CN 1908566A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E20/00—Combustion technologies with mitigation potential
- Y02E20/16—Combined cycle power plant [CCPP], or combined cycle gas turbine [CCGT]
- Y02E20/18—Integrated gasification combined cycle [IGCC], e.g. combined with carbon capture and storage [CCS]
Abstract
The invention provides a heat treatment device capable of preventing generation of tar in an exhaust pipe. This device comprises a collective exhaust pipe (200), a first furnace (100a) and a second furnace (100b). The first furnace (100a) is connected to the upstream side of gas flow in the collective exhaust pipe (200), and the second furnace (100b) is connected to the downstream side of gas flow in the collective exhaust pipe (200). The sectional area of the collective exhaust pipe (200) satisfies the equation of S<2>/S<1>=(H<2>/H<1>)<a> (0.1<=a<=0.9) when the sectional area in the connecting part of the exhaust pipe (200) with the first furnace (100a) is S<1>, the sectional area in the connecting part of the exhaust pipe (200) with the second furnace (100b) is S<2>, and the internal height of the first furnace (100a) is H<1>, and the total of the internal height of the first furnace (100a) and the internal height of the second furnace (100b) is H<2>.
Description
Technical field
The present invention relates to a kind of annealing device, particularly the blast pipe that the gas in drying oven or the roaster is discharged.
Background technology
When utilizing annealing device substrate, coated sheets and the parts that are coated with cream, glaze etc. to be carried out heat treatment such as drying or roasting, in the stove of heat-treating, produce the gas that comprises organic solvent.When being discharged to this gas outside the stove, organic solvent is aggegation in the gas pipe arrangement easily, thus local accumulation.Consequently, can produce dispersing or the pollution of the caused substrate of dropping liquid etc. of the corrosion of obstruction, blast pipe of air-flow and agglutinator.
In the past, in order to prevent the aggegation of organic solvent in the gas pipe arrangement, taked to utilize heat-barrier material to the gas pipe arrangement be incubated or utilize electric heater etc. from the outside to countermeasures such as the gas pipe arrangement heat.As the annealing device that has adopted such countermeasure, the device in patent documentation 1 record is for example arranged.Fig. 1 is the schematic diagram at the gas pipe arrangement with tar reply structure of patent documentation 1 record.
As shown in Figure 1, this gas pipe arrangement has the thermal decomposition gas pipe arrangement 2 that is used for carrying to upgrading stove (not shown) from thermal decomposition furnace (not shown) thermal decomposition gas.Thermal decomposition gas pipe arrangement 2 is to have periphery at the thermal decomposition air shooter 21 of central part to connect thereby the structure that spiral wall 25 has formed the double wall pipe 2a of spiral-shaped heated air stream 22 is set.Be provided with flange 23a, the 23b with opening 24a, 24b at the two ends of this double wall pipe 2a, thermal decomposition gas is sent into from an opening 24a, and 24b sends from another opening.In addition, near the two ends of this double wall pipe 2a, with the state that communicates with heated air stream 22 heated air connecting piece 28a, the 28b with flange 26a, 26b is being set, this flange 26a, 26b have opening 27a, 27b.
As mentioned above, gas pipe arrangement in the past is that thermal decomposition gas pipe arrangement 2 is made two-layer pipe, imports the burning and gas-exhausting of fuel in the periphery of the thermal decomposition air shooter 21 of central authorities as heated air, from the outside to 21 heating of thermal decomposition air shooter.Therefore, do not use the heater assembly etc. just can the heated air pipe arrangement,, just can suppress the aggegation of the tar in the thermal decomposition gas pipe arrangement, suppress the generation of tar so do not use energy from the outside.
Patent documentation 1: TOHKEMY 2004-277551 communique (the 3rd page, Fig. 1)
But the gas pipe arrangement in the past of patent documentation 1 record has the following technical problem that should solve.That is, when gas pipe arrangement that will be in the past used as the blast pipe of annealing device, in the position of the capacity control valve of regulating capacity, the exhaust flow path diameter sharply enlarged, and exhaust is cooled and produces tar thus.Therefore, in gas pipe arrangement in the past, existence can not prevent to produce in the pipe when using as blast pipe the problem of tar.
The problems referred to above are obvious especially in annealing device as shown in Figure 2, and this annealing device has and is assembled into multistage stove 10, and a plurality of blast pipes 11 of drawing from multistage stove 10 are connected with common blast pipe 12.Its reason is, in above-mentioned annealing device, since with identical flow to common blast pipe 12 exhausts, so the degree of closing of the capacity control valve 14 that is connected with higher level's stove 10 near exhaust fan 13 is bigger than the capacity control valve 14 that connects from exhaust fan 13 subordinate's stoves 10 far away, with blast pipe 11 that higher level's stove 10 is connected in the rapid expansion of generation exhaust flow path diameter.
Summary of the invention
Therefore, the present invention proposes in view of the above problems, and its purpose is to provide a kind of annealing device, even under the situation about using in being assembled into multistage stove, also can prevent to produce tar in blast pipe.
In order to achieve the above object, annealing device of the present invention has: the 1st heat treatment portion and the 2nd heat treatment portion; And the blast pipe of discharging the gas of above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion; Above-mentioned the 1st heat treatment portion is connected with the air-flow upstream side of above-mentioned blast pipe, and above-mentioned the 2nd heat treatment portion is connected with the airflow downstream side of above-mentioned blast pipe, and the sectional area of the air-flow upstream side of the above-mentioned blast pipe of sectional area ratio of the airflow downstream side of above-mentioned blast pipe is big.Can be that the sectional area with coupling part the 1st heat treatment portion above-mentioned blast pipe is being made as S at this electricity
1, the sectional area with coupling part the 2nd heat treatment portion above-mentioned blast pipe is made as S
2, the height of above-mentioned the 1st heat treatment portion inside is made as H
1, the height of above-mentioned the 1st heat treatment portion inside and the height sum of above-mentioned the 2nd heat treatment portion inside are made as H
2The time, the sectional area of above-mentioned blast pipe satisfies following formula:
S
2/ S
1=(H
2/ H
1)
a, 0.1≤a≤0.9 wherein.
According to this structure, reduced pressure poor of pressure in the heat treatment portion in the exhaust channel of heat treatment portion when a plurality of blast pipes set that will be connected, that connect with the blast pipe of airflow downstream side and blast pipe inlet with different heat treatment portion, so, the rapid expansion of the exhaust of capacity control valve part can be suppressed at, the generation of tar can be prevented.Its result, when the substrate that has been coated with the material that contains organic solvent and moisture is carried out drying, do not produce tar, the dropping liquid that causes by the pollution of the corrosion of its pipe arrangement that causes and substrate or because of the dewfall of steam of the gas that contains the organic solvent that volatilizes from material or get rusty, can reduce the loss that the production when safeguarding stops to cause.
In addition, the rising of the organic solvent concentration in the blast pipe in the time of can being suppressed at a plurality of blast pipes set that is connected with different heat treatment portion, the airflow downstream side can prevent that solvent strength from raising and the blast that may cause.
In addition, have the heat treatment portion that is assembled into multistage heat treatment portion, serial arrangement or be assembled in the annealing device of heat treatment portion of multistage and serial arrangement, can reduce the quantity of air feed blast pipe, so, the burden of the installation and the maintenance of air feed blast pipe can be alleviated.In addition, can also reduce manufacturing cost.In addition,, the heat of annealing device outside can be suppressed to escape into, the saving of the energy can be realized by gathering a plurality of air feed blast pipes.
In addition, can reduce the exhaust gas flow of discharging from the blast pipe of airflow downstream side, needn't carry out significantly Flow-rate adjustment by throttling mechanisms such as capacity control valves, just can make the approaching exhaust gas flow of discharging of exhaust gas flow of discharging from the blast pipe of airflow downstream side from the blast pipe of air-flow upstream side.Thus, throttling mechanisms such as capacity control valve needn't be set, thereby reduce the rapid expansion that is accompanied by the exhaust that Flow-rate adjustment that throttle mechanism carries out occurs, reduce, can prevent the generation of the tar that accompanies with it so can suppress the temperature of exhaust.In addition, can reduce the pressure loss that causes because of throttling mechanisms such as capacity control valves, so, the exhaust efficiency of annealing device can also be improved.
In addition, also can be, above-mentioned blast pipe has the dividing plate as the part of tube wall, and has aforementioned barriers as the part of tube wall and to the air supply pipe of above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion supply gas.
According to this structure, since air supply pipe and blast pipe is integrated, come the thermal exhaust pipe by making high-temperature gas flow into air supply pipe, so, can utilize the heat of pre-heated air feed to come the thermal exhaust pipe, prevent to cool off the generation of the tar that causes because of exhaust.In addition,, can reduce the surface area that is exposed in the outer gas by air supply pipe and blast pipe is integrated, so, can realize the saving of the energy.
In addition, also can be that gas passage that connects above-mentioned air supply pipe and blast pipe and the switching parts that open and close the above-mentioned gas path are set on aforementioned barriers.
According to this structure, because air feed is injected blast pipe, the solvent strength in the exhaust is reduced, so can prevent the blast that the solvent strength when a plurality of blast pipe of set rises and causes.In addition,, can improve the temperature of exhaust, prevent to cool off the generation of the tar that causes because of exhaust by pre-heated air feed heat is passed to the air feed blast pipe.
In addition, also can be, have the controlling organization that the switching of above-mentioned switching parts is controlled.
According to this structure, can carry out Flow-rate adjustment from the blast pipe outside, even so in intermittent delivery etc., when there is substrate near the same place the blast pipe in heat treatment portion and when not having substrate, under the situation that the concentration of the organic solvent of being discharged all changes constantly, also can suitably select flow, send into air feed, can reduce the consumption of air feed to blast pipe.
In addition, also can be to have the heater of heating aforementioned barriers.
According to this structure, can carry out the heating of exhaust internally, so thermal exhaust easily cools off and the position of generation tar selectively.In addition, not from outside but internally exhaust is directly heated, so that the heat of heater is imitated is good.
In addition, also can be that the above-mentioned air supply pipe of connection and the peristome of blast pipe and the transparent component that above-mentioned peristome is sealed are set on aforementioned barriers.
According to this structure, utilize the fog-level of the transparent component that judgements such as infrared ray sensor cause because of tar, can suppress the frequency that stops because of production that maintenance causes.
In addition, also can be that the tube wall of above-mentioned blast pipe contacts with the wall of above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion.
According to this structure, can utilize the heat thermal exhaust pipe of the wall of heat treatment portion, so can utilize the heat of the wall of the temperature heat treatment portion higher to come the thermal exhaust pipe, can prevent to cool off the generation of the tar that causes because of exhaust than exhaust.In addition, the wall by making heat treatment portion and the wall abuts of blast pipe can suppress to escape into outside heat, realize the saving of the energy.
In addition, also can be, on the tube wall that the wall with above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion of above-mentioned blast pipe contacts, the switching parts that the gas passage that connects above-mentioned blast pipe and above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion are set and the above-mentioned gas path implemented open and close.
According to this structure, the gas in the heat treatment portion can be injected exhaust, so the gas in the heat treatment portion can be injected the solvent strength that blast pipe reduce exhaust, the caused blast of rising of the solvent strength when preventing to gather a plurality of blast pipe.In addition,, can prevent that the temperature of exhaust from descending, prevent to cool off the generation of the tar that causes because of exhaust by the gas heat in the heat treatment portion is directly sent in the blast pipe.
In addition, also can be to have the capacity control valve that the gas flow that is discharged to above-mentioned blast pipe from above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion is regulated in above-mentioned blast pipe inside.
According to this structure, can utilize exhaust gas heat that the capacity control valve is heated, so, can come the thermal exhaust adjustable valve with exhaust gas heat all the time, even the rapid expansion because of the stream diameter in the capacity control valve that the blast pipe with the airflow downstream side is connected causes that exhaust cooling phenomenon continues under the situation of generation, the capacity control valve can not cool off yet.Consequently, can prevent near the capacity control valve, to cool off the generation of the tar that causes because of exhaust.
In addition, also can be, the peristome of open interior is set on above-mentioned blast pipe and seal above-mentioned peristome the door.
According to this structure,,, can safeguard simply by opening door even produced in blast pipe inside under the situation of tar.
In addition, also can be, have respectively by above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion constitutes and a plurality of set heat treatment portion of adjacent setting that above-mentioned blast pipe is arranged between 2 adjacent set heat treatment portions.
According to this structure, do not pull down the maintenance that blast pipe just can be heat-treated portion inside, can improve the transaction capabilities of annealing device.
The annealing device that the present invention relates to has aforesaid structure, so, can prevent from blast pipe, to produce the tar of the gas that contains organic solvent, prevent the obstruction of the blast pipe that the generation because of tar causes or the pollution of corrosion and substrate, can improve the operational efficiency and the maintainability of the annealing device of heat-treatment furnaces such as having drying oven and roaster.
Therefore, the present invention has great practical value as the blast pipe of the annealing device with heat-treatment furnaces such as drying oven and roasters of having eliminated technical problem in the past.
Description of drawings
Fig. 1 is the figure of the gas pipe arrangement of the tar reply structure of expression with patent documentation 1 record.
Fig. 2 is the overall diagram with annealing device of multistage stove.
Fig. 3 is the side view of the annealing device structure in expression first embodiment of the present invention.
Fig. 4 is the chart that concerns between the shape of set blast pipe of this first embodiment of expression and the tar generation.
Fig. 5 is the side view of modified configuration of the annealing device of this first embodiment of expression.
Fig. 6 (a) is the vertical view of the annealing device structure of expression second embodiment of the present invention; Fig. 6 (b) is the side view of the annealing device structure of this second embodiment of expression.
Fig. 7 is the figure of structure of the set air feed blast pipe of this second embodiment of expression.
Fig. 8 A is the outside drawing of structure of the set air feed blast pipe of this second embodiment.
Fig. 8 B is the outside drawing of structure of the set air feed blast pipe of this second embodiment.
Fig. 8 C is the profile (along the profile of the A-A ' line of Fig. 8 B) of the set air feed blast pipe of this second embodiment.
Fig. 9 is the figure of variation of the capacity governor motion of this second embodiment of expression.
Figure 10 A is the profile that is used to illustrate the annealing device of the shape of set air feed blast pipe of this second embodiment and diaphragm structure (along the profile of the A-A ' line of Fig. 7).
Figure 10 B is the profile that is used to illustrate the annealing device of the shape of set air feed blast pipe of this second embodiment and diaphragm structure (along the profile of the A-A ' line of Fig. 7).
Figure 10 C is the profile that is used to illustrate the annealing device of the shape of set air feed blast pipe of this second embodiment and diaphragm structure (along the profile of the A-A ' line of Fig. 7).
Figure 10 D is the profile that is used to illustrate the annealing device of the shape of set air feed blast pipe of this second embodiment and diaphragm structure (along the profile of the A-A ' line of Fig. 7).
Figure 10 E is the profile that is used to illustrate the annealing device of the shape of set air feed blast pipe of this second embodiment and diaphragm structure (along the profile of the A-A ' line of Fig. 7).
Figure 11 A is the profile that is used to illustrate the annealing device of the shape of set air feed blast pipe of this second embodiment and diaphragm structure (along the profile of the B-B ' line of Fig. 7).
Figure 11 B is the profile that is used to illustrate the annealing device of the shape of set air feed blast pipe of this second embodiment and diaphragm structure (along the profile of the B-B ' line of Fig. 7).
Figure 11 C is the profile that is used to illustrate the annealing device of the shape of set air feed blast pipe of this second embodiment and diaphragm structure (along the profile of the B-B ' line of Fig. 7).
Figure 12 is the profile (along the profile of the B-B ' line of Fig. 7) of annealing device that is used to illustrate the set air feed blast pipe shape of this second embodiment.
Figure 13 is the profile of structure of the set air feed blast pipe that annealing device had of expression the 3rd embodiment of the present invention.
Figure 14 is the profile of structure of the set air feed blast pipe that annealing device had of expression the 4th embodiment of the present invention.
The specific embodiment
Below, with reference to the annealing device of description of drawings embodiments of the present invention.
(first embodiment)
Fig. 3 is the side view of the annealing device structure of expression first embodiment of the present invention.
This annealing device is included in and is assembled into the 1st multistage stove 100a, the 2nd stove 100b and the 3rd stove 100c on the longitudinal direction successively, be connected and gather with the 1st stove 100a, the 2nd stove 100b and the 3rd stove 100c the gas in each stove is carried out the blast pipe of exhaust and the set blast pipe 200 that forms, be connected the exhaust portion 203 between set blast pipe 200 and the exhaust fan (figure is outer).In addition, the 1st stove 100a, the 2nd stove 100b and the 3rd stove 100c are respectively examples of heat treatment of the present invention portion.
The 1st stove 100a, the 2nd stove 100b and the 3rd stove 100c for example are drying oven or the roasters that the substrate that is coated with the material that contains organic solvent is carried out drying or roasting, the air of accepting in stove by air supply pipe injects drying or the roasting of carrying out glass substrate by heating.At this moment,, be coated on the organic solvent volatilization that contains in cream on the glass substrate, the glaze etc., in stove, produce the gas that contains organic solvent by drying or roasting.
Set blast pipe 200 is columnar blast pipes, comprise blast pipe main body 201, the first exhaust outlet 202a, the second exhaust outlet 202b and the 3rd exhaust outlet 202c with blast pipe main body 201 and the 1st stove 100a, the 2nd stove 100b and the 3rd stove 100c are connected respectively are discharged to the annealing device outside with the gas that produces in each stove.
And set blast pipe 200 is preferably formed by the material with hear resistance, corrosion resistance and anti-morphotropism.As such material, specifically, have with stainless steel, aluminium, pottery, nickel and chromium be Main Ingredients and Appearance as heat-resisting/resistant material Yin Kenaier (Inconel, registration mark) or the such heat-resistant resin of fluorine-type resin Teflon (Teflon, registration mark).
In having the annealing device of said structure, the gas that produces in stove is by the first exhaust outlet 202a, the second exhaust outlet 202b and the 3rd exhaust outlet 202c of set blast pipe 200, be sent to the blast pipe main body 201 of set blast pipe 200, be discharged from by exhaust portion 203.
At this, in order in the exhaust gear of annealing device, to regulate extraction flow, for example each exhaust outlet at set blast pipe 200 is provided with the capacity control valve, if the difference of the cross-sectional area of set blast pipe 200 and the aperture area of capacity control valve is very big, then produce the rapid expansion of exhaust in the exit of capacity control valve.When this phenomenon takes place continuously, cooling around the capacity control valve, exhaust is cooled off thereupon, thereby produces tar.Therefore, when discharging solvent-laden gas, need prevent to gather the rapid expansion of the exhaust flow path of blast pipe 200 inside.
Therefore, present inventors in longitudinal load in the annealing device of the stove more than 2 grades, in order to form the exhaust stream and different in the past exhaust gears that makes to go out from each fire grate, adopt cross-sectional area along with the set blast pipe 200 that increases gradually towards the blast pipe of airflow downstream side from the blast pipe of air-flow upstream side, thereby reduced generation at the tar at capacity control valve place with cone shape.For example, adopt cross-sectional area along with the set blast pipe 200 that increases gradually towards the blast pipe of the airflow downstream side that is connected with the 2nd stove 100b from the blast pipe of the air-flow upstream side that is connected with the 1st stove 100a.
That is, in the exhaust gear of the annealing device that has loaded the stove more than 2 layers,, the gas in the stove is discharged by the power that difference produced of the pressure that utilizes furnace pressure and produce by exhaust fan.When blast pipe is gathered the gas of once discharging in the stove, the difference of the pressure of furnace pressure and blast pipe inlet is according to each exhaust channel and different, be used for the energy that the exhaust of the stove that will be connected with near the blast pipe of the airflow downstream side exhaust fan attracts up, little just more passable than the energy that the exhaust of the stove that is used for being connected with blast pipe away from the air-flow upstream side of exhaust fan attracts up, so near the vent ratio of the stove the exhaust fan is away from the easier discharge of exhaust of the stove of exhaust fan.Therefore, the aperture area of the capacity control valve that is connected with the blast pipe of airflow downstream side, aperture area than the capacity control valve that is connected with the blast pipe of air-flow upstream side is little, so at the capacity control valve place that the blast pipe with the airflow downstream side is connected, exhaust sharply enlarges, thereby produces tar.But, because set blast pipe 200 has above-mentioned cone shape, so the pressure of the inlet of the blast pipe near the exhaust channel of the stove the exhaust fan becomes big.Consequently, the difference of pressure near the exhaust channel of the stove the exhaust fan, furnace pressure and blast pipe inlet diminishes, and has suppressed the rapid expansion of exhaust, thereby has prevented the generation of tar.
At this moment, the diameter (area) of set blast pipe 200 along with situation about increasing gradually towards the blast pipe of airflow downstream side from the blast pipe of air-flow upstream side under, if cumulative rate (the blast pipe diameter (area) of blast pipe diameter (the area)/air-flow upstream side of airflow downstream side) is less, then the capacity of discharging in the unit interval near the exhaust channel of the stove the exhaust fan is big, and it is big that the flow velocity of exhaust becomes.Therefore, the blast pipe inlet pressure near the exhaust channel of the stove the exhaust fan does not reduce to the degree of the rapid expansion that can suppress exhaust, and produces tar.On the other hand,,, and produce the rapid expansion of exhaust in set blast pipe 200, produce tar then owing to exhaust enlarges if cumulative rate (the blast pipe diameter (area) of blast pipe diameter (the area)/air-flow upstream side of airflow downstream side) is bigger.
Therefore, the diameter (area) of set blast pipe 200 need be set in the appropriateness value, the diameter (area) of setting set blast pipe 200 for satisfies following formula 1 or formula 2.
[formula 1]
D
N/D
1＝(H
N/H
1)
a (0.05≤a≤0.45)
[formula 2]
S
N/S
1＝(H
N/H
1)
a (0.1≤a≤0.9)
In addition, the variables D of in formula 1,2, using
NThe diameter (m) of representing the blast pipe central portion on the coupling part of N (N is the natural number greater than 1) level stove and set blast pipe 200, variables D
1The diameter (m) of representing the blast pipe central portion on the coupling part of subordinate stove and set blast pipe 200, variable H
NThe furnace interior height sum (m) of expression till from subordinate stove to N level stove, variable H
1The height (m) of representing subordinate furnace interior, variable S
NRepresent the cross-sectional area (m of blast pipe central portion on the coupling part of N level stove and set blast pipe 200
2), variable S
1Cross-sectional area (the m that represents the blast pipe central portion on the coupling part of subordinate stove and set blast pipe 200
2).In addition, the D shown in here
N, D
1Be the representative length of the diameter of set blast pipe 200.
Fig. 4 is the figure that concerns between the shape of expression set blast pipe 200 and the tar generation.In Fig. 4, the longitudinal axis represents to gather the cumulative rate of diameter (the diameter D of the central portion of the set blast pipe 200 on the coupling part of N level stove and set blast pipe 200 of blast pipe 200
NThe diameter D of the central portion of the set blast pipe 200 on the coupling part of/subordinate stove and set blast pipe 200
1), transverse axis is represented stove height (the summation H of the furnace interior height till from subordinate stove to N level stove
NThe height H of/subordinate furnace interior
1).And, in Fig. 4, be illustrated in when 50 substrates that have been coated with organic solvent are heat-treated with " * " and near the capacity control valve, produced tar, be illustrated in " △ " and produced tar when 100 heat-treated, be illustrated in " zero " 100 moment of heat-treating are not produced tar.In addition, dot the situation of diameter indeclinable straight tube on the blast pipe of the blast pipe of airflow downstream side and air-flow upstream side of set blast pipe 200, that is, and the situation of a=0.0 in formula 1.In addition, similarly, the cross-sectional area that also dots set blast pipe 200 becomes 1 to 1 ground to become big situation with extraction flow, that is, and and the situation of a=0.5 in formula 1.
As can be seen from Figure 4, in formula 1, adhere to tar under the situation of the situation of a=0.0 and a=0.5.In addition, as can be known in formula 1 under the situation of 0.05≤a≤0.45, promptly under the situation in the scope of in Fig. 4, representing with oblique line, non-cohesive tar.Moreover, as can be known at the diameter of set blast pipe 200 along with increasing gradually and cumulative rate (D towards the blast pipe of airflow downstream side from the blast pipe of air-flow upstream side
N/ D
1) under the very little situation, promptly in the formula 1 under the situation of a＜0.05, adhere to tar.Consider that its reason is,,, and caused the generation of tar so the blast pipe inlet pressure near the exhaust channel of the stove the exhaust fan does not have little degree to the rapid expansion that can suppress exhaust because the extraction flow of discharging in the unit interval is many and the exhaust flow velocity is fast.Moreover also know, at cumulative rate (D
N/ D
1) under the bigger situation, promptly in the formula 1 under the situation of a＞0.45, adhere to tar.Consider that its reason is,, cause the generation of tar in set blast pipe 200 because exhaust sharply enlarges.
As mentioned above, according to the annealing device of present embodiment, set blast pipe 200 has cross-sectional area along with the cone shape that increases gradually towards the blast pipe of airflow downstream side from the blast pipe of air-flow upstream side.Therefore, the furnace pressure near the exhaust channel of the higher level's stove the exhaust fan and the difference of blast pipe inlet pressure diminish, so can suppress the rapid expansion of exhaust, prevent the generation of tar.In addition, formed the shape that the cross-sectional area of blast pipe increases gradually along with the blast pipe to the airflow downstream side, so can suppress the rising of organic solvent concentration in the blast pipe of the airflow downstream side will be with a plurality of set of the blast pipe that different stove connects the time, can prevent because solvent strength uprises and contingent blast.
In addition, annealing device according to present embodiment, can reduce the extraction flow of discharging from the blast pipe of the airflow downstream side that is connected with higher level's stove, do not need to utilize throttling mechanism such as capacity control valve that the extraction flow of discharging from the blast pipe that is connected with higher level's stove is carried out significantly Flow-rate adjustment, just can be near extraction flow from the blast pipe discharge of the air-flow upstream side that is connected with the subordinate stove.Therefore, do not need to be provided with throttling mechanisms such as capacity control valve, just can reduce the rapid expansion of the exhaust of following Flow-rate adjustment,, can prevent to follow the generation of its tar so the temperature that can suppress exhaust reduces.Therefore, can reduce the loss that the production when safeguarding stops to cause, improve the productivity ratio of annealing device.In addition, owing to can reduce the pressure loss that causes by throttling mechanisms such as capacity control valves, so can improve the exhaust efficiency of annealing device.
In addition, according to the annealing device of present embodiment, have the blast pipe set that connects with different stove is a plurality of and set blast pipe 200 that constitute.Therefore, can in multistage stove, serial stove or multistage serial stove, reduce the quantity of air feed blast pipe, so, the burden of the installation and the maintenance of air feed blast pipe can be reduced.In addition, can also reduce manufacturing cost.Moreover, by gathering a plurality of air feed blast pipes, can suppress to escape into the heat of annealing device outside, can realize saving the energy.
In addition, in the annealing device of present embodiment, the set blast pipe that the blast pipe of the stove that will load at longitudinal direction gathers has been described, but the set blast pipe also can be the structure of the blast pipe set that will arrange in the horizontal direction.At this moment, the height H that needs only furnace interior is considered to the actual flow straight length.
In addition, in the annealing device of present embodiment, the set blast pipe is parallel with the loading direction of stove, but direction also can be set with respect to the loading of stove.
In addition, in the annealing device of present embodiment, the set blast pipe is a pipe, but so long as cross-sectional area along with the shape that increases gradually towards the blast pipe of airflow downstream side from the blast pipe of air-flow upstream side, just be not limited to this, for example the cross section can also be that section is tetragonal quadrangular tube.
In addition, in the annealing device of present embodiment, the set blast pipe has cone shape, also can have the step shape that cross-sectional area as shown in Figure 5 increases towards the blast pipe of airflow downstream side gradually from the blast pipe of air-flow upstream side.
(second embodiment)
Fig. 6 (a), Fig. 6 (b) are the vertical view and the side views of structure of the annealing device of expression second embodiment of the present invention.Fig. 7 is the schematic diagram of the structure of the set air feed blast pipe 400 that has of this annealing device of expression.
This annealing device is included in and is assembled into the 1st multistage stove 100a, the 2nd stove 100b and the 3rd stove 100c on the longitudinal direction successively, is connected and gathers gas to each furnace interior with the 1st stove 100a, the 2nd stove 100b and the 3rd stove 100c and carry out the blast pipe of exhaust and supply gas to the air supply pipe of each furnace interior and the set air feed blast pipe 400 that forms.
The 1st stove 100a, the 2nd stove 100b and the 3rd stove 100c for example are drying oven or the roasters that the substrate that has been coated with the material that contains organic solvent is carried out drying or roasting, the high temperature air of accepting in stove by set air feed blast pipe injects drying or the roasting of carrying out glass substrate by heating.At this moment, be coated on the organic solvent volatilization that contains in cream on the glass substrate, the glaze etc., in stove, produce the gas that comprises organic solvent.
Set air feed blast pipe 400 is the face of tube wall and the air feed blast pipe of the box that furnace wall 500 disposes in contact, comprise blast pipe main body 401, air supply pipe main body 404, the first exhaust outlet 402a, the second exhaust outlet 402b, the 3rd exhaust outlet 402c and the 4th exhaust outlet 402d, the first air supply opening 403a, the second air supply opening 403b, the 3rd air supply opening 403c and the 4th air supply opening 403d, the gas that will produce in each stove is discharged to the annealing device outside, also from annealing device outside supply gas in stove.
Blast pipe main body 401 has cross-sectional area along with the cone shape that increases gradually towards the blast pipe of airflow downstream side from the blast pipe of air-flow upstream side.
The first exhaust outlet 402a, the second exhaust outlet 402b, the 3rd exhaust outlet 402c couple together blast pipe main body 401 and the 1st stove 100a, the 2nd stove 100b and the 3rd stove 100c respectively, carry exhausts from stove to blast pipe main body 401.
The first air supply opening 403a, the second air supply opening 403b, the 3rd air supply opening 403c couple together air supply pipe main body 404 and the 1st stove 100a, the 2nd stove 100b and the 3rd stove 100c respectively, carry air feed from air supply pipe main body 404 to stove.
The 4th exhaust outlet 402d connects blast pipe main body 401 with outside, carries exhaust from blast pipe main body 401 to the outside.
The 4th air supply opening 403d connects air supply pipe main body 404 with outside, carries air feed from the outside to air supply pipe main body 404.
Here, be provided with dividing plate 490 in set air feed blast pipe 400 inside, the chamber, left side of being separated by dividing plate 490 is the effect that air supply pipe main body 404 has the set air supply pipe, has the effect of set blast pipe as the blast pipe main body 401 of chamber, right side.Therefore, formed set air supply pipe and the set blast pipe that dividing plate 490 is had as the part of tube wall in set air feed blast pipe 400 inside.To be formed with the gas passage (not shown) of articulation set air supply pipe and set blast pipe, the transparent component that opens and closes the gas passage to carry the switching parts of gas from the set air supply pipe to the set blast pipe be dividing plate shutter 470, the peristome of articulation set air supply pipe and set blast pipe is sealed on dividing plate 490 be windowpane 471, be positioned at the slim heater 472 of set blast pipe and heated barrier 490.In addition, as dividing plate shutter 470, can consider the structure of perforate on dividing plate 490 or be used to prevent valve arrangement of back flow of gas etc.
In addition, be provided with capacity control valve 411, furnace wall shutter 460, be positioned at the infrared ray sensor 480 of gathering air supply pipe, heat-barrier material 450 is arranged in the outer setting of gathering air feed blast pipe 400 in the inside of set air feed blast pipe 400.
In addition, shown in the profile of the set air feed blast pipe 400 of the outside drawing of the set air feed blast pipe 400 of Fig. 8 A, Fig. 8 B and Fig. 8 C (along the profile of the A-A ' line of Fig. 8 B), set air feed blast pipe 400 is provided with the door 700 that the peristome to open set air feed blast pipe 400 inside seals.Therefore, even produced under the situation of tar,, can safeguard simply by opening door 700 in set air feed blast pipe 400 inside.As door 700, can consider the door 700 of the structure that is screwed at two ends shown in Fig. 8 A, perhaps the door 700 of the structure that at one end is screwed shown in Fig. 8 B.
In addition, as shown in Figure 6, set air feed blast pipe 400 is configured between stove by the continuous oven that constitutes in abutting connection with a plurality of set stoves of arranging on the transverse direction, and this set stove is made of the 1st stove 100a, the 2nd stove 100b and the 3rd stove 100c respectively.Thus, can not remove set air feed blast pipe 400 and just can carry out the maintenance of furnace interior, can improve the operability of annealing device.In addition, the set stove is an example of set heat treatment of the present invention portion.
In having the annealing device of said structure, the exhaust that goes out from fire grate is sent to blast pipe main body 401 by the first exhaust outlet 402a, the second exhaust outlet 402b and the 3rd exhaust outlet 402c, is discharged to set air feed blast pipe 400 outsides from the 4th exhaust outlet 402d.In addition, a part of air feed of delivering to air supply pipe main body 404 from the 4th air supply opening 403d is sent to blast pipe main body 401 by the dividing plate shutter 470 that is installed on the dividing plate 490, and remaining air feed is sent in the stove by the first air supply opening 403a, the second air supply opening 403b and the 3rd air supply opening 403c.
As mentioned above, according to the annealing device of present embodiment, the reason according to identical with the annealing device of first embodiment can prevent the generation of tar.
In addition, according to the annealing device of present embodiment, set air feed blast pipe 400 have by dividing plate 490 divide forms, in stove extroversion stove supply gas the set air supply pipe and the gas in the stove is discharged to set blast pipe outside the stove.That is, set air feed blast pipe 400 has set air supply pipe and the set blast pipe that forms integrative-structure.Therefore, can heat the set blast pipe, can heat the set blast pipe, can prevent to cool off the generation of the tar that causes because of exhaust by the heat of pre-heated air feed by making high-temperature gas flow to the set air supply pipe.In addition, integrated by gathering air supply pipe and gathering blast pipe, can reduce the surface area that contacts with outer gas, so, can realize saving the energy.
In addition, according to the annealing device of present embodiment, set air feed blast pipe 400 has on the dividing plate 490 of dividing set air supply pipe and set blast pipe and has formed the shutter structure of air feed being injected the dividing plate shutter 470 of exhaust.Therefore, air feed can be injected into the set blast pipe, the solvent strength in the exhaust is reduced, so, the caused blast of rising of the solvent strength in the time of can preventing to gather a plurality of blast pipe.Therefore, this dividing plate shutter 470 is particularly more effective under the situation on the blast pipe that is installed in the airflow downstream side.In addition,, the temperature of exhaust can be improved, the generation of the tar that causes can be prevented to cool off because of exhaust by transmit the heat of pre-heated air feed to the set blast pipe.Therefore, this dividing plate shutter 470 is particularly being installed under near the situation about heating the capacity control valve 411 that can cool off easily exhaust, and is more effective.
In addition, according to the annealing device of present embodiment,, the dividing plate shutter 470 that is arranged on the dividing plate 490 of dividing set air supply pipe and set blast pipe is carried out open and close controlling by the control part of set air feed blast pipe 400 outsides.Therefore, can adjust flow from set air feed blast pipe 400 outsides, so, in intermittently transporting etc., during near the existing substrate of the homologous field the blast pipe in stove and when not having substrate, under the situation that the organic solvent concentration of being discharged at every moment changes, also can suitably select flow, send into air feed to the set blast pipe, can reduce the consumption of air feed.As the control method of dividing plate shutter 470, can consider that the flow that the use traffic measuring transducer is measured carries out FEEDBACK CONTROL and comes method of automatic shutter dividing plate shutter 470 etc.In addition,, can consider to be installed in flowmeter or the blast pipe, come the device of perceived flux etc. by mechanical displacement in the mode that hinders exhaust as flow measuring sensor.
In addition, according to the annealing device of present embodiment, on the face of dividing the set air supply pipe and the set blast pipe side of the dividing plate 490 of set blast pipe, slim heater 472 has been installed.Therefore, can be internally to the exhaust heating, so heat in the place that can produce tar selectively to the easy cooling of exhaust.Therefore, particularly be installed under near the situation about heating the capacity control valve 411 that can cool off easily exhaust selectively at this slim heater 472, more effective.In addition, not from outside but internally exhaust is directly heated, so that the heat of heater is imitated is good.In addition, as slim heater 472, can consider slim ceramic heater etc.
In addition, annealing device according to present embodiment, gather air feed blast pipe 400 and have the window construction that has formed windowpane 471 on the dividing plate 490 of dividing set air supply pipe and set blast pipe, the windowpane 471 in the inside of gathering air supply pipe towards dividing plate 490 is equipped with infrared ray sensor 480.Therefore, the fog-level of the windowpane 471 that can be caused by tar according to the threshold decision of infrared ray sensor 480 can suppress the frequency that is stopped by the production that maintenance causes.In addition, infrared ray sensor 480 is provided in the set air supply pipe, so exhaust is without infrared ray sensor 480, annealing device can use for a long time.
In addition, according to the annealing device of present embodiment, the tube wall of set air feed blast pipe 400 contacts with furnace wall 500.Therefore, can utilize the heat of furnace wall 500 to heat set air feed blast pipe 400, so, can utilize the heat of the temperature furnace wall 500 higher to heat set air feed 400 (particularly gathering blast pipe) of blast pipe than exhaust, can prevent to cool off the generation of the tar that causes because of exhaust.In addition,, can suppress to escape into outside heat, can realize the saving of the energy by making the wall abuts of furnace wall 500 and set blast pipe.At this moment, easily be transferred to set air feed blast pipe 400 in order to make the heat in the stove, the furnace wall 500 that contacts with the tube wall of set air feed blast pipe 400 is not preferably by heat insulation.In addition, by the configuration first exhaust outlet 402a, the second exhaust outlet 402b, the 3rd exhaust outlet 402c between furnace wall 500 and blast pipe main body 401,, can prevent that exhaust is cooled at exhaust outlet so that be not exposed in the outer gas.
In addition, according to the annealing device of present embodiment, set air feed blast pipe 400 has the structure that is provided with furnace wall shutter 460 on furnace wall 500 and tube wall that furnace wall 500 with the set blast pipe contacts.Therefore, the gas in the stove can be injected exhaust, so, the gas in the stove can be injected into the set blast pipe, reduce the solvent strength in the exhaust, prevent the blast that the rising of the solvent strength when gathering a plurality of blast pipe causes.Therefore, this furnace wall shutter 460 is particularly more effective under the situation on the blast pipe that is installed in the airflow downstream side.In addition, directly send in the set blast pipe, can prevent that the temperature of exhaust from descending, can prevent to cool off the generation of the tar that causes because of exhaust by the gas heat in the stove.Therefore, this furnace wall shutter 460 is particularly being installed under near the situation about heating the capacity control valve 411 that can cool off easily exhaust, and is more effective.As furnace wall shutter 460, can consider the structure of perforate on dividing plate 490 or be used to prevent valve arrangement of back flow of gas etc.
In addition, according to the annealing device of present embodiment, capacity control valve 411 is arranged on the inside of set blast pipe.Thus, can utilize exhaust gas heat to 411 heating of capacity control valve, so, can use exhaust gas heat thermal exhaust adjustable valve 411 all the time, even the rapid expansion because of the current path diameter in the capacity control valve 411 that the blast pipe with the airflow downstream side is connected causes that exhaust cooling phenomenon continues under the situation of generation, capacity control valve 411 can not cool off yet.Consequently, can prevent near capacity control valve 411, to cool off the generation of the tar that causes because of exhaust.This capacity control valve 411 can also be throttle orifice or simple parts as shown in Figure 9 except valve.In capacity governor motion shown in Figure 9, exit at the first exhaust outlet 402a, the second exhaust outlet 402b or the 3rd exhaust outlet 402c, extraction flow adjusting parts 610 as the lid of exhaust outlet are installed, make the cross-section variation of blast pipe exhaust flow path, thereby regulate the discharge rate of exhaust.This structure is simple structure, can realize the cost degradation of annealing device.
In addition, in the annealing device of present embodiment, set air feed blast pipe 400 also can be the pipe of the cuboid of the rectangle cross sectional shape shown in the profile with annealing device of Figure 10 A (along the profile of the A-A ' line of Fig. 7).Thus, set air feed blast pipe 400 has the rectangular cross sectional shape of easy manufacturing, so can realize annealing device cheaply.In addition, set air feed blast pipe 400 also can be the pipe of the semicolumn of the semicircular sectional shape shown in the profile with annealing device of Figure 10 B (along the profile of the A-A ' line of Fig. 7).Thus, set air feed blast pipe 400 have contact area with furnace wall 500 big and with the little semicircular sectional shape of surface area that is exposed in the outer gas, so, can realize annealing device efficiently.
In addition, in the annealing device of present embodiment, dividing plate 490 also can be configured to vertical with furnace wall 500 shown in the profile of the annealing device of Figure 10 A like that, also can be configured to parallel with furnace wall 500 shown in the profile of the annealing device of Figure 10 C (along the profile of the A-A ' line of Fig. 7) like that.Thus, exhaust can be configured in the wall side, air feed is configured in a side opposite with furnace wall 500, can utilize the heat of furnace wall 500 expeditiously, prevent the generation of the tar that causes because of the exhaust cooling.In addition, dividing plate 490 also can be configured to tilt with respect to furnace wall 500 shown in the profile of the annealing device of Figure 10 D (along the profile of the A-A ' line of Fig. 7) like that.Thus, exhaust can be configured in furnace wall 500 1 sides, air feed is configured in a side opposite with furnace wall 500, can utilize the heat of furnace wall 500 efficiently, prevent the generation of tar.And, form sidepiece (part that comprises right side minor face A of Figure 10 D) structure to be opened/closed that makes set air feed blast pipe 400 simultaneously, can improve the maintainability of annealing device.Moreover, also can be shown in the profile of the annealing device of Figure 10 E (along the profile of the A-A ' line of Fig. 7), make set air feed blast pipe 400 become semicolumn pipe, dividing plate 490 is configured to be configured to set blast pipe with semicircular sectional shape with semicircular sectional shape.Thus, gather blast pipe and gathered the air supply pipe covering, the area that the set blast pipe is exposed in the outer gas reduces, so, can prevent to cool off the tar generation of the exhaust that causes because of the set blast pipe.
In addition, in the annealing device of present embodiment, shown in the profile of the annealing device of Figure 11 A (along the profile of the B-B ' line of Fig. 7), by making the bottom angled of dividing plate 490 with respect to set air feed blast pipe 400, the cross-sectional area of blast pipe is along with the blast pipe from the air-flow upstream side increases gradually towards the blast pipe of airflow downstream side.But, also can be shown in the profile of the annealing device of Figure 11 B, Figure 11 C (along the profile of the B-B ' line of Fig. 7), trapezoidal by the interior shape of gathering air feed blast pipe 400 is become, the cross-sectional area that makes blast pipe is along with the blast pipe from the air-flow upstream side increases gradually towards the blast pipe of airflow downstream side.In addition, also can be shown in the profile of the annealing device of Figure 12 (along the profile of the B-B ' line of Fig. 7), step-like by the interior shape of gathering air feed blast pipe 400 is become, the cross-sectional area that makes blast pipe is along with the blast pipe from the air-flow upstream side increases gradually towards the blast pipe of airflow downstream side.
In addition, in the annealing device of present embodiment, utilize capacity control valve 411 to regulate the flow of exhaust, still, also can be shown in the profile of the annealing device of Figure 12, the cross-sectional area of the exhaust outlet by changing articulation set blast pipe and stove is regulated the flow of exhaust.
(the 3rd embodiment)
Figure 13 is the profile of the structure of the set air feed blast pipe 800 that annealing device had in expression the 3rd embodiment of the present invention.
The difference of the set air feed blast pipe of this set air feed blast pipe 800 and second embodiment is that dividing plate 810 is movable structures, and the exhaust flow path cross-sectional area of set blast pipe is adjustable structure.In the set blast pipe of set air feed blast pipe 800,, can regulate the pressure in the set blast pipe by dividing plate 810 being moved regulate the flow path cross sectional area of exhaust.In the past, by being set, throttling mechanisms such as capacity control valve changed the exhaust flow path sectional area on the set blast pipe, even in the different stream of pressure differential, be constant also with Flow-rate adjustment.But, by this structure, flow control devices such as capacity control valve can be set, just change the flow path cross sectional area of set blast pipe, regulate the flow of the exhaust that goes out from fire grates at different levels.In addition, also can with the combination of throttling mechanism such as capacity control valve, regulate the flow of exhaust.
(the 4th embodiment)
Figure 14 is the profile of the structure of the set air feed blast pipe 900 that annealing device had in expression the 4th embodiment of the present invention.
The difference of the set air feed blast pipe of this set air feed blast pipe 900 and second embodiment is, have the exhaust rheology parts 910 more that are installed in set blast pipe inside, by the exhaust rheology pressure of parts 910 change set blast pipes inlet more, regulate the flow that comes out from each exhaust outlet thus.By by this exhaust rheology more the exhaust rheology carried out of parts 910 more cause pressure oscillation.Therefore, even because of the expansion of exhaust make the exhaust rheology more the temperature of parts 910 peripheries temporarily descend, but since the exhaust rheology more parts 910 be arranged on set blast pipe inside, all the time heat by exhaust, so can not cause the more temperature decline of parts 910 peripheries of exhaust rheology, can prevent the generation of tar.At this moment, as exhaust rheology parts 910 more, can consider with the flat board of rotating state configuration in set blast pipe inside.Thus, can form more mechanism of exhaust rheology with simple structure, so, can realize that cost descends.In addition,, can use streamlined structure to reduce the resistance of air-flow, can also use network structure as exhaust rheology mechanism more.
More than, based on embodiment annealing device of the present invention has been described, but the present invention is not limited to this embodiment.Conceive the various distortion that those skilled in the art of implementing in the scope can contemplate and be also contained in the scope of the present invention not breaking away from the present invention.
For example, shown in formula 1, formula 2, the height H of stove is defined the diameter (area) of set blast pipe as variable, but also the volume of stove can have been come the diameter (area) of definition set blast pipe as variable.That is, the diameter (area) of set blast pipe also can be set at and satisfy following formula 3, formula 4.
[formula 3]
D
N/D
1＝(V
N/V
1)
a (0.05≤a≤0.45)
[formula 4]
S
N/S
1＝(V
N/V
1)
a (0.1≤a≤0.9)
In addition, the variable V of in formula 3, formula 4, using
NSummation (the m of expression from the stove of subordinate to the furnace interior volume of the stove of N level
3), variable V
1Volume (the m that represents subordinate furnace interior
3).
The present invention can be used for annealing device, particularly can be used to have the blast pipe etc. of the annealing device of a plurality of stoves.
Claims (10)
1, a kind of annealing device is characterized in that, has:
The 1st heat treatment portion and the 2nd heat treatment portion; And
Discharge the blast pipe of the gas of above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion;
Above-mentioned the 1st heat treatment portion is connected with the air-flow upstream side of above-mentioned blast pipe,
Above-mentioned the 2nd heat treatment portion is connected with the airflow downstream side of above-mentioned blast pipe,
The sectional area of the air-flow upstream side of the above-mentioned blast pipe of sectional area ratio of the airflow downstream side of above-mentioned blast pipe is big.
2, annealing device as claimed in claim 1 is characterized in that,
Sectional area with coupling part the 1st heat treatment portion above-mentioned blast pipe is being made as S
1, the sectional area with coupling part the 2nd heat treatment portion above-mentioned blast pipe is made as S
2, the height of above-mentioned the 1st heat treatment portion inside is made as H
1, the height of above-mentioned the 1st heat treatment portion inside and the height sum of above-mentioned the 2nd heat treatment portion inside are made as H
2The time, the sectional area of above-mentioned blast pipe satisfies following formula:
S
2/ S
1=(H
2/ H
1)
a, 0.1≤a≤0.9 wherein.
3, annealing device as claimed in claim 2 is characterized in that,
Above-mentioned blast pipe has the dividing plate as the part of tube wall;
Above-mentioned annealing device has aforementioned barriers as the part of tube wall and to the air supply pipe of above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion supply gas.
4, annealing device as claimed in claim 3 is characterized in that,
The tube wall of above-mentioned blast pipe contacts with the wall of above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion.
5, annealing device as claimed in claim 4 is characterized in that,
Has the capacity control valve that the gas flow that is discharged to above-mentioned blast pipe from above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion is regulated in above-mentioned blast pipe inside.
6, annealing device as claimed in claim 2 is characterized in that,
The tube wall of above-mentioned blast pipe contacts with the wall of above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion.
7, annealing device as claimed in claim 2 is characterized in that,
Has the capacity control valve that the gas flow that is discharged to above-mentioned blast pipe from above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion is regulated in above-mentioned blast pipe inside.
8, annealing device as claimed in claim 1 is characterized in that,
Above-mentioned blast pipe has the dividing plate as the part of tube wall;
Above-mentioned annealing device has aforementioned barriers as the part of tube wall and to the air supply pipe of above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion supply gas.
9, annealing device as claimed in claim 1 is characterized in that,
The tube wall of above-mentioned blast pipe contacts with the wall of above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion.
10, annealing device as claimed in claim 1 is characterized in that,
Has the capacity control valve that the gas flow that is discharged to above-mentioned blast pipe from above-mentioned the 1st heat treatment portion and the 2nd heat treatment portion is regulated in above-mentioned blast pipe inside.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| JP225876/2005 | 2005-08-03 | ||
| JP2005225876A JP4796352B2 (en) | 2005-08-03 | 2005-08-03 | Heat treatment equipment |
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| CN1908566A true CN1908566A (en) | 2007-02-07 |
| CN1908566B CN1908566B (en) | 2010-05-26 |
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| CN114932376A (en) * | 2022-05-05 | 2022-08-23 | 中国科学院上海高等研究院 | Batch heat treatment device for hollow fiber electrodes, manufacturing method and application |
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| WO2023153132A1 (en) * | 2022-02-08 | 2023-08-17 | 株式会社日本触媒 | Handling device for easily polymerizable substance |
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| JPS552438U (en) * | 1978-06-21 | 1980-01-09 | ||
| JPS59127722U (en) * | 1983-02-18 | 1984-08-28 | 日立プラント建設株式会社 | dust collector |
| JPS61105092A (en) * | 1984-10-27 | 1986-05-23 | 株式会社 中国地所 | Method of drying cereals |
| US4609009A (en) * | 1985-12-11 | 1986-09-02 | Environmental Elements Corp. | Stepped plenum system |
| ES2030935T3 (en) * | 1988-05-13 | 1992-11-16 | Hoechst Aktiengesellschaft | PROCEDURE AND DEVICE FOR DRYING A LIQUID LAYER APPLIED ON A MOVING SUPPORT MATERIAL. |
| KR0147044B1 (en) * | 1990-01-23 | 1998-11-02 | 카자마 젠쥬 | Heat treatment apparatus having exhaust system |
| JP2004277551A (en) * | 2003-03-14 | 2004-10-07 | Ngk Insulators Ltd | Pyrolysis gas piping |
| CN1287432C (en) * | 2003-06-09 | 2006-11-29 | 友达光电股份有限公司 | Method and equipment for preventing base plate from being polluted by condensation liquid |
| JP4348122B2 (en) * | 2003-06-18 | 2009-10-21 | エスペック株式会社 | Heating device |
| JP2005071632A (en) * | 2003-08-25 | 2005-03-17 | Fujitsu Hitachi Plasma Display Ltd | Method and device for manufacturing plasma display panel |
| JP4604527B2 (en) * | 2004-03-19 | 2011-01-05 | Ｊｆｅスチール株式会社 | Method for adjusting atmospheric temperature in induction heating furnace, and drying and baking equipment for painted metal strip |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114932376A (en) * | 2022-05-05 | 2022-08-23 | 中国科学院上海高等研究院 | Batch heat treatment device for hollow fiber electrodes, manufacturing method and application |
| CN114932376B (en) * | 2022-05-05 | 2023-11-17 | 中国科学院上海高等研究院 | Hollow fiber electrode batch heat treatment device, manufacturing method and application |
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| Publication number | Publication date |
|---|---|
| JP4796352B2 (en) | 2011-10-19 |
| JP2007040621A (en) | 2007-02-15 |
| CN1908566B (en) | 2010-05-26 |
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