Ice template is made the job operation of microlens array
Technical field
The present invention relates to a kind of lenticule job operation, particularly a kind of ice template is made the job operation of microlens array.
Background technology
Microlens array is the important component part of contemporary optics system, all has very widely at a lot of optical fields and uses.As optical communication, optical information stores, and optics becomes phase system and display etc.Compare with traditional lens, lenticule not only takes advantage aspect volume, and can become phase more clearly, controls laser beam more accurately, and detects or the like more accurately.Aspect microlens array processing, low cost, high-level efficiency, easy job operation become the focus of people's common concern.
Prior art mainly adopts photoetching method to make the pattern of photoresist, is heated to more than the glass temperature of photoresist, realizes the fusion of photoresist, utilizes the surface tension of fluid to obtain having the microlens array of spherical structure.But this method has certain limitation aspect material, and exists lithographic equipment costliness, process complexity in the photoetching process, requires to control environment temperature and shortcomings such as cleanliness factor, procedure of processing complexity.
In addition, people such as U.S. Xia Younan has delivered the article (the 34th page of " advanced material " the 13rd volume of being published by Wiley publishing house January 5 calendar year 2001) of " self-assembling method is processed with the two-dimensional array of micro-lenses of the patterning of organic polymer " by name.The circular opening structural limitations polystyrene sphere of the photoresist that the employing photoetching obtains in this article is heated to the above fusion that realizes polystyrene sphere of glass temperature of polystyrene in the arrangement of substrate, obtains having the microlens array of spherical structure.Though this method has overcome in the lithography process method restriction to material, and can control lenticular arrangement and size, but the photoresist template of arranging in substrate as the restriction polystyrene sphere can not reuse in process, therefore still is subjected to the restriction of photoetching process.
Summary of the invention
In order to overcome the shortcoming of prior art, the invention provides the job operation that ice template is made microlens array.By regulation and control, can realize the adjusting of lenticule curvature to substrate surface character.
At first utilize the wetting removal behavior of water on the elastomeric stamp surface that has the square indentations pattern, water droplet is limited in the groove on elastomeric stamp surface, utilize the reversible transition between water and the ice to realize that the water on elastomeric stamp surface is to the transfer of substrate and the formation of sphere pattern in thin polymer film of water droplet then, at last, utilize duplicating molded that the design transfer on thin polymer film surface is arrived other polymer surfaces, obtain microlens structure with the drop consistent appearance.By regulation and control, can regulate prepared lenticular curvature to the substrate wetting state.
The concrete steps and the condition of the inventive method are as follows:
1. as shown in Figure 1, option table is worn the elastomeric stamp 1 of square indentations pattern, the elastomeric stamp 1 that the surface is had the square indentations pattern upwards vertically lifts in aqueous solution 2, aqueous solution 2 can since wetting removal be filled in the groove on surface of elastomeric stamp 1 that the surface has the square indentations pattern.
The elastomeric stamp 1 that the surface that is loaded with aqueous solution 2 is had the square indentations pattern places on the target substrate 4.The elastomeric stamp 1 and the target substrate 4 that the surface are had the square indentations pattern place-25 ℃~-15 ℃ refrigerators, make aqueous solution 2 be transformed into ice.Remove the elastomeric stamp 1 that the surface has the square indentations pattern, on target substrate 4, obtain ice template 3.Target substrate 4 is a substrate of glass, and its water contact angle is 5 °-110 °.
Described surface has the elastomeric stamp 1 of square indentations pattern, can select the dimethyl silicone polymer Elastic forming board.
2. the polymethylmethacrylate chloroformic solution is placed-25 ℃~-15 ℃ refrigerators to lower the temperature, cast in then on the target substrate 4 that has ice template 3.4 taking-ups of target substrate after the casting are placed under the room temperature condition.Ice-out forms drop template 6, after the solvent evaporates in the polymethylmethacrylate chloroformic solution, obtains the polymethyl methacrylate film 5 that the pattern according to drop is fixed up.Place aqueous solution to realize separating of polymethyl methacrylate film 5 and target substrate 4 polymethyl methacrylate film 5 and target substrate 4.
3. dimethyl silicone polymer is mixed with crosslinking chemical and stir evenly after cast on the polymethyl methacrylate film 5, be placed on then dimethyl silicone polymer solidified.The dimethyl silicone polymer film that solidifies from polymethyl methacrylate film 5 sur-face peelings, is obtained having the microlens array of targeted graphical on dimethyl silicone polymer film 7 surfaces.
Beneficial effect of the present invention is clearly: compare with photoetching technique, the device just that method of the present invention is used is wanted simply equipment such as refrigerator and drying box, and does not need hot conditions in the process, so processing technology is simpler.Compare in the lenticular technology of substrate arrangement preparation with utilizing photoresist pattern restriction polystyrene sphere, the described surface in the method for the present invention has the elastomeric stamp 1 of square indentations pattern, or selects dimethyl silicone polymer Elastic forming board 1.This template 1 can reuse, and the polymethyl methacrylate film that has pattern 5 that processing obtains also can repeatedly duplicate, to the not influence of quality of targeted graphical.Therefore cost is lower.And the regulation and control by to substrate surface character can realize the processing of the microlens array of different curvature.
Description of drawings
Fig. 1 microlens structure manufacturing process synoptic diagram.
The A of Fig. 1 is that aqueous solution 2 is at dimethyl silicone polymer Elastic forming board 1 surperficial wetting removal process synoptic diagram.
The B of Fig. 1 is that the dimethyl silicone polymer Elastic forming board 1 that is loaded with aqueous solution 2 contacts with target substrate 4, and aqueous solution 2 is frozen into ice template 3 process synoptic diagram.
The C of Fig. 1 is in ice template 3 top casting polymethyl methacrylate solution and ice template 3 is melted into the process synoptic diagram of water template 6.
The D of Fig. 1 is the synoptic diagram of the dimethyl silicone polymer film 7 that obtains having object construction in polymethyl methacrylate film 5 top casting dimethyl silicone polymers and crosslinking chemical and curing.
The E of Fig. 1 is the synoptic diagram of the microlens structure that finally obtains.
Among Fig. 1,1-has the dimethyl silicone polymer elastomeric stamp of pattern, 2-aqueous solution, 3-ice template, 4-substrate, 5-polymethyl methacrylate film, the water template that the 6-ice-out obtains, 7-dimethyl silicone polymer film.
The electron scanning micrograph of the microlens structure of Fig. 2 preparation.
Embodiment
Embodiment 1
1) option table is worn the dimethyl silicone polymer Elastic forming board 1 of square indentations pattern, dimethyl silicone polymer Elastic forming board 1 is upwards vertically lifted in aqueous solution 2, and aqueous solution 2 can be filled in the groove on dimethyl silicone polymer Elastic forming board 1 surface owing to wetting removal.The dimethyl silicone polymer Elastic forming board 1 that is loaded with aqueous solution 2 is placed on the target substrate 4.Target substrate 4 is 5 ° substrate of glass for water contact angle.Dimethyl silicone polymer Elastic forming board 1 and target substrate 4 are placed-15 ℃ of refrigerators, make aqueous solution be transformed into ice.Remove dimethyl silicone polymer Elastic forming board 1, on target substrate 4, obtain ice template 3.
2) the polymethylmethacrylate chloroformic solution is placed-15 ℃ of refrigerators lower the temperature, cast in then on the target substrate 4 that has ice template 3.4 taking-ups of target substrate after the casting are placed under the room temperature condition.Ice-out forms drop template 6, after the solvent evaporates in the polymethylmethacrylate chloroformic solution, obtains the polymethyl methacrylate film 5 that the pattern according to drop is fixed up.Place aqueous solution to realize separating of polymethyl methacrylate film 5 and target substrate 4 polymethyl methacrylate film 5 and target substrate 4.
3) dimethyl silicone polymer mixed with crosslinking chemical and stir evenly after, cast on the polymethyl methacrylate film 5, be placed on then dimethyl silicone polymer solidified.The dimethyl silicone polymer film that solidifies from polymethyl methacrylate film 5 sur-face peelings, is obtained having the microlens array of targeted graphical on dimethyl silicone polymer film 7 surfaces.
Embodiment 2
1) option table is worn the dimethyl silicone polymer Elastic forming board 1 of square indentations pattern, dimethyl silicone polymer Elastic forming board 1 is upwards vertically lifted in aqueous solution 2, and aqueous solution 2 can be filled in the groove on dimethyl silicone polymer Elastic forming board 1 surface owing to wetting removal.The dimethyl silicone polymer Elastic forming board 1 that is loaded with aqueous solution 2 is placed on the target substrate 4.Target substrate 4 is 60 ° substrate of glass for water contact angle.Dimethyl silicone polymer Elastic forming board 1 and target substrate 4 are placed-20 ℃ of refrigerators, make aqueous solution be transformed into ice.Remove dimethyl silicone polymer Elastic forming board 1, on target substrate 4, obtain ice template 3.
2) the polymethylmethacrylate chloroformic solution is placed-20 ℃ of refrigerators lower the temperature, cast in then on the target substrate 4 that has ice template 3.4 taking-ups of target substrate after the casting are placed under the room temperature condition.Ice-out forms drop template 6, after the solvent evaporates in the polymethylmethacrylate chloroformic solution, obtains the polymethyl methacrylate film 5 that the pattern according to drop is fixed up.Place aqueous solution to realize separating of polymethyl methacrylate film 5 and target substrate 4 polymethyl methacrylate film 5 and target substrate 4.
3) dimethyl silicone polymer mixed with crosslinking chemical and stir evenly after, cast on the polymethyl methacrylate film 5, be placed on then dimethyl silicone polymer solidified.The dimethyl silicone polymer film that solidifies from polymethyl methacrylate film 5 sur-face peelings, is obtained having the microlens array of targeted graphical on dimethyl silicone polymer film 7 surfaces.
Embodiment 3
1) option table is worn the dimethyl silicone polymer Elastic forming board 1 of square indentations pattern, dimethyl silicone polymer Elastic forming board 1 is upwards vertically lifted in aqueous solution 2, and aqueous solution 2 can be filled in the groove on dimethyl silicone polymer Elastic forming board 1 surface owing to wetting removal.The dimethyl silicone polymer Elastic forming board 1 that is loaded with aqueous solution 2 is placed on the target substrate 4, and target substrate 4 is 110 ° substrate of glass for water contact angle.Dimethyl silicone polymer Elastic forming board 1 and target substrate 4 are placed-25 ℃ of refrigerators, make aqueous solution be transformed into ice.Remove dimethyl silicone polymer Elastic forming board 1, on target substrate 4, obtain ice template 3.
2) the polymethylmethacrylate chloroformic solution is placed-25 ℃ of refrigerators lower the temperature, cast in then on the target substrate 4 that has ice template 3.4 taking-ups of target substrate after the casting are placed under the room temperature condition.Ice-out forms drop template 6, after the solvent evaporates in the polymethylmethacrylate chloroformic solution, obtains the polymethyl methacrylate film 5 that the pattern according to drop is fixed up.Place aqueous solution to realize separating of polymethyl methacrylate film 5 and target substrate 4 polymethyl methacrylate film 5 and target substrate 4.
3) dimethyl silicone polymer mixed with crosslinking chemical and stir evenly after, cast on the polymethyl methacrylate film 5, be placed on then dimethyl silicone polymer solidified.The dimethyl silicone polymer film that solidifies from polymethyl methacrylate film 5 sur-face peelings, is obtained having the microlens array of targeted graphical on dimethyl silicone polymer film 7 surfaces.