CN1901136A - Multiple cathode pulse arc plasma source device - Google Patents
Multiple cathode pulse arc plasma source device Download PDFInfo
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- CN1901136A CN1901136A CN 200610010244 CN200610010244A CN1901136A CN 1901136 A CN1901136 A CN 1901136A CN 200610010244 CN200610010244 CN 200610010244 CN 200610010244 A CN200610010244 A CN 200610010244A CN 1901136 A CN1901136 A CN 1901136A
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- negative electrode
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- overcoat
- plasma source
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Abstract
This invention relates to a multi-cathode pulse arc plasma source device, in which, this invented push rod is set in the outer wear of the cathode and connected to it, an insulation porcelain cover is set between a trigger pole mounted on the cathode and the cathode, one end of a public spring trigger rod contacts with its corresponding trigger pole, a driven gear driven by screw is mounted on the push rod, the bottom of the moving rod is set in the cathode outer wear and mounted with a driving gear, the anode is placed just under the cathode and its bottom is mounted with a stainless steel siphon assembly, which has the advantage of long time of stable work and realizing free switch to multiple cathodes without breaking vacuum.
Description
Technical field
The present invention relates to a kind of pulsed plasma generation device.
Background technology
Plasma immersion ion injects and deposition (Plasma Immersion Ion Implantation andDeposition, PIIID) technology has obtained extensive concern with the world at home, countries and regions such as the U.S., Europe, Japan, Australia the PIIID technology as one of important means of precision component surface Hardening Treatment.At present, utilize the PIIID technology can realize that gas ion injects, gas+metal ion mixes multiple strengthening treatment process such as injection, compound deposition, performances such as the microhardness of material surface after the intensive treatment, wear-resistant, anticorrosive and contact fatigue life are improved significantly.
One of key technology of decision PIIID technology extensive use in industrial production is: whether pulsed cathode arc plasma source has the long steady operation time.Pulsed cathode arc plasma source mainly is made up of two parts: arc discharge device and magnetic filter.The arc discharge device mainly is made up of negative electrode, anode, trigger electrode and power pack thereof, and it is mainly used to produce metallic plasma; Magnetic filter partly is made up of the magnetic catheter and the magnetic field power supply of certain angle, and it is mainly used to macroscopic view and the neutral particle that the filtered arc electric discharge device produces.The mode that pulsed cathode arc plasma source generally adopts high voltage pulse the to trigger electric arc between negative electrode and the anode that ignites, because the macroparticle that produces during arc burning is easy to make trigger electrode and negative electrode short circuit after attaching on the insulated porcelain sleeve between trigger electrode and the negative electrode, thereby makes normally steady operation of pulsed cathode arc plasma source.Therefore, make the PIIID technology, must improve the steady operation time in pulsed cathode arc plasma source in industrial extensive use.
In addition, in the PIIID technology, the ion implantation and deposition Combined Processing is the critical process that obtains the high-performance surface strengthen layer.For example aluminum alloy part need carry out the Ti ion earlier and inject, synthetic then TiN and CrN film, and then synthetic diamond like carbon film.In this composite treatment process, require pulsed cathode arc plasma source can produce Ti, Cr and different plasmas such as C.At present, conventional pulsed cathode arc plasma source can only produce single plasma, produce different plasmas, generally take following two kinds of methods in the world: the one, the mode that a plurality of cathodic arc plasma sources are installed on vacuum chamber, realize the injection or the deposition of different ions by the rotation of sample, adopt the method, have the big problem of equipment investment; The 2nd, adopt the method for destroying vacuum, earlier vacuum system is exitted, the cathode material that changes plasma source under atmospheric conditions vacuumizes then to realize the generation of different plasma under the vacuum condition, though the equipment investment of this method is lower,, owing to destroy vacuum, ambient atmosphere might produce surface of the work to be polluted, and causes the strengthening layer degradation, in addition, because vacuum suction is chronic, its operating efficiency is lower.Therefore, realize multiple PIIID composite treatment process, must develop pulsed cathode arc plasma source, negative electrode can freely be switched under the situation of not destroying vacuum with many negative electrodes.
Summary of the invention
The purpose of this invention is to provide a kind of multiple cathode pulse arc plasma source apparatus, this device can solve plasma source that pulsed cathode arc plasma source causes owing to the easy short circuit of trigger electrode and negative electrode for a long time steady operation problem and for producing different plasmas, the mode of a plurality of cathodic arc plasma sources is installed in employing on vacuum chamber, there is the big problem of equipment investment and adopts the method for destroying vacuum, have the strengthening layer poor performance of workpiece, ineffective problem.
The present invention includes anode overcoat, negative electrode overcoat, upper end cover, field coil one, insulating washer, insulation cushion, thrust bearing, collets, arc discharge device and magnetic filter; The present invention also comprises driving gear, driven gear, pushing ram, carriage release lever, support bar, handle one, handle two, bearing one and rotor; Described arc discharge device is made up of negative electrode, anode, trigger electrode, insulated porcelain sleeve and public spring frizzen device; Described magnetic filter is made up of stainless steel elbow and field coil two; Between anode overcoat and the upper end cover insulating washer is housed, thrust bearing is housed on the rotor, the centre bore that upper end cover is passed in the lower end of rotor is fixedlyed connected with the upper end of negative electrode overcoat, negative electrode is sleeved on outward in the anode overcoat, fixedly connected with the upper end of negative electrode in the lower end that is contained in the pushing ram that negative electrode puts outward, negative electrode is along the circumference uniform distribution of the bottom face of negative electrode overcoat, trigger electrode is contained on the negative electrode by insulated porcelain sleeve, public spring frizzen device is housed in the anode overcoat, one end of public spring frizzen device contacts with corresponding trigger electrode, public spring frizzen device passes through collets, support bar is fixedlyed connected with upper end cover, has external screw thread on the upper end outer wall of pushing ram, the driven gear that is threaded with pushing ram is equipped with in the upper end of pushing ram, carriage release lever passes rotor and is contained in the negative electrode overcoat, fixedly connected with handle one in the upper end of carriage release lever, the driving gear that can be meshed with driven gear fixedly is equipped with in the lower end of carriage release lever, carriage release lever and rotor bearing one respectively is housed between the two ends up and down, handle two fixedly is housed on the sidewall of rotor, field coil one is housed on the outer face of anode overcoat, anode be positioned at cathode center circle under, anode is fixedlyed connected with the lower surface of anode overcoat, the stainless steel elbow of fixedlying connected with the lower surface of anode overcoat is equipped with in the lower end of anode, between anode and the stainless steel elbow insulation cushion is housed, is wound with field coil two on the outer wall of stainless steel elbow.
The present invention has following beneficial effect: one, the handle two that the present invention is fixedlyed connected with rotor by rotation, the driven rotary cylinder, the negative electrode overcoat, negative electrode, trigger electrode, insulated porcelain sleeve and pushing ram are around the central axis rotation of negative electrode overcoat, when the negative electrode along the circumference uniform distribution of negative electrode overcoat bottom face rotate to one by one anode directly over the time, if the negative electrode along negative electrode overcoat bottom face circumference uniform distribution adopts different materials to make, just can under the condition of not destroying vacuum, realize the switching of different plasma, thereby improved the kind of comprehensive ion implantation and deposition composite treatment process greatly, reduced equipment cost widely; When the negative electrode along negative electrode overcoat end face circumference uniform distribution rotate to one by one anode directly over the time, if the negative electrode along negative electrode overcoat end face circumference uniform distribution adopts same material to make, even one of them negative electrode and trigger electrode short circuit also can not influence the steady operation of plasma device of the present invention.Two, the present invention moves up and down by handle one drive carriage release lever, driving gear and any one driven gear of being contained on the carriage release lever are meshed, when handle one rotates, can drive the driven gear rotation, thereby drive corresponding pushing ram and negative electrode moves up and down; In addition, when cathode material in the course of work consumes, under the situation of not destroying vacuum, just can realize the propelling of negative electrode.Three, since public spring frizzen device fixedly connected with upper end cover with collets by support bar, when the negative electrode overcoat when its central axis rotates, telescopic frizzen can guarantee that trigger electrode closely contacts with public spring frizzen device.Four, the present invention have simple in structure, easy to use, steady operation time long, can under the condition of not destroying vacuum, realize the advantage of any switching of a plurality of negative electrodes, and solved multiple plasma and be difficult to problem by a pulsed cathode arc plasma source generation.
Description of drawings
Fig. 1 is overall structure master's pseudosection of the present invention, and Fig. 2 is the A-A profile of Fig. 1, and Fig. 3 is the B portion enlarged drawing of Fig. 1, and Fig. 4 adopts three plan structure schematic diagrames that negative electrode 4 is uniformly distributed along the circumference.
Embodiment
Embodiment one: in conjunction with Fig. 1～4 explanation present embodiments, present embodiment is made up of anode overcoat 1, negative electrode overcoat 2, upper end cover 3, field coil 1, insulating washer 8, insulation cushion 11, thrust bearing 23, collets 22, driving gear 12, driven gear 13, pushing ram 14, carriage release lever 15, support bar 16, handle 1, handle 2 18, bearing 1, rotor 21, arc discharge device 101 and magnetic filter 102; Described arc discharge device 101 is made up of negative electrode 4, anode 5, trigger electrode 6, insulated porcelain sleeve 7 and public spring frizzen device 20; Described magnetic filter 102 is made up of stainless steel elbow 10 and field coil 2 25; Between anode overcoat 1 and the upper end cover 3 insulating washer 8 is housed, thrust bearing 23 is housed on the rotor 21, the centre bore that upper end cover 3 is passed in the lower end of rotor 21 is fixedlyed connected with the upper end of negative electrode overcoat 2, negative electrode overcoat 2 is contained in the anode overcoat 1, fixedly connected with the upper end of negative electrode 4 in the lower end that is contained in the pushing ram 14 on the negative electrode overcoat 2, negative electrode 4 is along the circumference uniform distribution of the bottom face 2-1 of negative electrode overcoat 2, trigger electrode 6 is contained on the negative electrode 4 by insulated porcelain sleeve 7, public spring frizzen device 20 is housed in the anode overcoat 1, one end of public spring frizzen device 20 contacts with corresponding trigger electrode 6, public spring frizzen device 20 is by collets 22, support bar 16 is fixedlyed connected with upper end cover 3, has external screw thread 14-1 on the upper end outer wall of pushing ram 14, the driven gear 13 that is threaded with pushing ram 14 is equipped with in the upper end of pushing ram 14, carriage release lever 15 passes rotor 21 and is contained in the negative electrode overcoat 2, fixedly connected with handle 1 in the upper end of carriage release lever 15, the driving gear 12 that can be meshed with driven gear 13 fixedly is equipped with in the lower end of carriage release lever 15, carriage release lever 15 and rotor 21 bearing 1 respectively is housed between the two ends up and down, handle 2 18 fixedly is housed on the sidewall of rotor 21, field coil 1 is housed on the outer face of anode overcoat 1, anode 5 be positioned at negative electrode 4 center circle 4-1 under, anode 5 is fixedlyed connected with the lower surface of anode overcoat 1, the stainless steel elbow 10 of fixedlying connected with the lower surface of anode overcoat 1 is equipped with in the lower end of anode 5, be wound with field coil 2 25 on the outer wall of stainless steel elbow 10, between anode 5 and the stainless steel elbow 10 insulation cushion 11 is housed, can guarantee the insulation of anode 5 and stainless steel elbow 10, but the macroparticle and the neutral particle of stainless steel elbow 10 filtered arc discharge generation, the field coil 2 25 that is twined can produce 100～600 Gausses' magnetic field.
Embodiment two: in conjunction with Fig. 1 present embodiment is described, the difference of present embodiment and embodiment one is: the bent angle alpha of the stainless steel elbow 10 of present embodiment is 45 °～90 °.So be provided with, have magnetic filter effect preferably.
Embodiment three: in conjunction with Fig. 1 present embodiment is described, the difference of present embodiment and embodiment one, two is: the external diameter Φ 1 of the stainless steel elbow 10 of present embodiment is 80～300mm.Can select according to the diameter of negative electrode 4 and anode 5.
Embodiment four: in conjunction with Fig. 1 and Fig. 3 present embodiment is described, the difference of present embodiment and embodiment one is: the public spring frizzen device 20 of present embodiment is made up of spring 20-1, spring socket sleeve 20-2 and public frizzen 20-3; The end of public frizzen 20-3 passes spring socket sleeve 20-2 and contacts with corresponding trigger electrode 6, the public frizzen 20-3 that is contained in the spring socket sleeve 20-2 is provided with boss shoulder 20-3-1, between the inner face of boss shoulder 20-3-1 and spring socket sleeve 20-2 spring 20-1 is housed, spring socket sleeve 20-2 is fixedlyed connected with upper end cover 3 with support bar 16 by collets 22.So be provided with, can realize the insulation between trigger electrode 6 and the upper end cover 3, the flexible distance that also can guarantee public frizzen 20-3 is between 1～20mm, and public frizzen 20-3 is held out against by spring 20-1, can guarantee that public frizzen 20-3 contacts with the tight of trigger electrode 6.
Embodiment five: in conjunction with Fig. 1, Fig. 2 and Fig. 4 present embodiment is described, the difference of present embodiment and embodiment one is: the negative electrode 4 of present embodiment is evenly distributed in 6 along the bottom face 2-1's of negative electrode overcoat 2.Can select according to actual needs.
Embodiment six: in conjunction with Fig. 1 present embodiment is described, the difference of present embodiment and embodiment one, five is: the diameter of phi 2 of the negative electrode 4 of present embodiment is 20～80mm.Can select according to actual needs.
Embodiment seven: in conjunction with Fig. 1 present embodiment is described, the difference of present embodiment and embodiment one is: the negative electrode 4 and the insulation distance h between the trigger electrode 6 of present embodiment are 1～10mm.Can adjust as required.
Embodiment eight: in conjunction with Fig. 1 present embodiment is described, the difference of present embodiment and embodiment one is: the port internal diameter Φ 3 of the anode 5 of present embodiment is 40～100mm.The port internal diameter Φ 3 of the anode 5 that adapts according to the different choice of negative electrode 4 diameters.
Embodiment nine: in conjunction with Fig. 1 and Fig. 4 present embodiment is described, 6,1 anode 5 of 7,3 trigger electrodes of 4,3 magnetic insulating sleeves of negative electrode and a public spring frizzen device 20 that the arc discharge device 101 in the present embodiment is 30mm by 3 diameters are formed; Insulation distance h between each negative electrode 4 and the trigger electrode 6 is 3mm, and the material of 3 negative electrodes 4 is respectively Ti, Cr and C, and the port internal diameter Φ 3 of anode 5 is 40mm; The external diameter Φ 1 of the stainless steel elbow 10 in the magnetic filter 102 in the present embodiment is 200mm, and the bent angle alpha of stainless steel elbow 10 is 90 °.So be provided with, can realize the switching of these three kinds of different plasma of Ti, Cr and C.
Embodiment ten: in conjunction with Fig. 1 and Fig. 4 present embodiment is described, 6,1 anode 5 of 7,3 trigger electrodes of 4,3 magnetic insulating sleeves of negative electrode and 1 public spring frizzen device 20 that the arc discharge device 101 in the present embodiment is 30mm by 3 diameters are formed; Insulation distance h between each negative electrode 4 and the trigger electrode 6 is 3mm, and the material of 3 negative electrodes 4 is Ti, and the port internal diameter Φ 3 of anode 5 is 40mm; The external diameter Φ 1 of the stainless steel elbow 10 in the magnetic filter 102 in the present embodiment is 200mm, and the bent angle alpha of stainless steel elbow 10 is 90 °.So be provided with.
Claims (8)
1, a kind of multiple cathode pulse arc plasma source apparatus, it comprises anode overcoat (1), negative electrode overcoat (2), upper end cover (3), field coil one (9), insulating washer (8), insulation cushion (11), thrust bearing (23), collets (22), arc discharge device (101) and magnetic filter (102); It is characterized in that the present invention also comprises driving gear (12), driven gear (13), pushing ram (14), carriage release lever (15), support bar (16), handle one (17), handle two (18), bearing one (19) and rotor (21); Described arc discharge device (101) is made up of negative electrode (4), anode (5), trigger electrode (6), insulated porcelain sleeve (7) and public spring frizzen device (20); Described magnetic filter (102) is made up of stainless steel elbow (10) and field coil two (25); Between anode overcoat (1) and the upper end cover (3) insulating washer (8) is housed, thrust bearing (23) is housed on the rotor (21), the centre bore that upper end cover (3) is passed in the lower end of rotor (21) is fixedlyed connected with the upper end of negative electrode overcoat (2), negative electrode overcoat (2) is contained in the anode overcoat (1), fixedly connected with the upper end of negative electrode (4) in the lower end that is contained in the pushing ram (14) on the negative electrode overcoat (2), negative electrode (4) is along the circumference uniform distribution of the bottom face (2-1) of negative electrode overcoat (2), trigger electrode (6) is contained on the negative electrode (4) by insulated porcelain sleeve (7), public spring frizzen device (20) is housed in the anode overcoat (1), one end of public spring frizzen device (20) contacts with corresponding trigger electrode (6), public spring frizzen device (20) is by collets (22), support bar (16) is fixedlyed connected with upper end cover (3), has external screw thread (14-1) on the upper end outer wall of pushing ram (14), the driven gear (13) that is threaded with pushing ram (14) is equipped with in the upper end of pushing ram (14), carriage release lever (15) passes rotor (21) and is contained in the negative electrode overcoat (2), fixedly connected with handle one (17) in the upper end of carriage release lever (15), the driving gear (12) that can be meshed with driven gear (13) fixedly is equipped with in the lower end of carriage release lever (15), carriage release lever (15) and rotor (21) bearing one (19) respectively is housed between the two ends up and down, handle two (18) fixedly is housed on the sidewall of rotor (21), field coil one (9) is housed on the outer face of anode overcoat (1), anode (5) be positioned at negative electrode (4) center circle (4-1) under, anode (5) is fixedlyed connected with the lower surface of anode overcoat (1), the stainless steel elbow (10) of fixedlying connected with the lower surface of anode overcoat (1) is equipped with in the lower end of anode (5), between anode (5) and the stainless steel elbow (10) insulation cushion (11) is housed, is wound with field coil two (25) on the outer wall of stainless steel elbow (10).
2, multiple cathode pulse arc plasma source apparatus according to claim 1, the bent angle alpha that it is characterized in that described stainless steel elbow (10) is 45 °～90 °.
3, multiple cathode pulse arc plasma source apparatus according to claim 1 and 2 is characterized in that the external diameter Φ 1 of described stainless steel elbow (10) is 80～300mm.
4, multiple cathode pulse arc plasma source apparatus according to claim 1 is characterized in that described public spring frizzen device (20) is made up of spring (20-1), spring socket sleeve (20-2) and public frizzen (20-3); One end of public frizzen (20-3) passes spring socket sleeve (20-2) and contacts with corresponding trigger electrode (6), the public frizzen (20-3) that is contained in the spring socket sleeve (20-2) is provided with boss shoulder (20-3-1), between the inner face of boss shoulder (20-3-1) and spring socket sleeve (20-2) spring (20-1) is housed, spring socket sleeve (20-2) is fixedlyed connected with upper end cover (3) with support bar (16) by collets (22).
5, multiple cathode pulse arc plasma source apparatus according to claim 1 is characterized in that described negative electrode (4) is evenly distributed in 3～6 along the bottom face (2-1) of negative electrode overcoat (2).
6, multiple cathode pulse arc plasma source apparatus according to claim 1 or 5 is characterized in that the diameter of phi 2 of described negative electrode (4) is 20～80mm.
7, multiple cathode pulse arc plasma source apparatus according to claim 1 is characterized in that the insulation distance h between described negative electrode (4) and the trigger electrode (6) is 1～10mm.
8, multiple cathode pulse arc plasma source apparatus according to claim 1 is characterized in that the port internal diameter Φ 3 of described anode (5) is 40～100mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100102443A CN100490052C (en) | 2006-06-30 | 2006-06-30 | Multiple cathode pulse arc plasma source device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100102443A CN100490052C (en) | 2006-06-30 | 2006-06-30 | Multiple cathode pulse arc plasma source device |
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| CN1901136A true CN1901136A (en) | 2007-01-24 |
| CN100490052C CN100490052C (en) | 2009-05-20 |
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| CNB2006100102443A Expired - Fee Related CN100490052C (en) | 2006-06-30 | 2006-06-30 | Multiple cathode pulse arc plasma source device |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101321427B (en) * | 2008-07-22 | 2011-03-16 | 核工业西南物理研究院 | DC magnetic filtering cathode vacuum arc plasma source |
| CN101828433B (en) * | 2007-08-06 | 2013-04-24 | 普拉斯马外科投资有限公司 | Cathode assembly and method for pulsed plasma generation |
| CN103915305A (en) * | 2014-04-18 | 2014-07-09 | 中国工程物理研究院流体物理研究所 | Resistance trigger type vacuum arc ion source device |
| CN103953518A (en) * | 2014-05-13 | 2014-07-30 | 哈尔滨工业大学 | Anode of multi-stage cusped magnetic field plasma thruster |
| CN104018115A (en) * | 2013-06-04 | 2014-09-03 | 黄山明明德轴承有限公司 | Ion filling and depositing combined treatment method of rolling bearing ring raceways |
| CN111022192A (en) * | 2019-12-04 | 2020-04-17 | 中国人民解放军空军工程大学 | Multi-cathode sliding arc plasma igniter |
| CN113382525A (en) * | 2021-06-23 | 2021-09-10 | 大连理工大学 | Multi-channel large-area high-density direct current arc plasma source |
-
2006
- 2006-06-30 CN CNB2006100102443A patent/CN100490052C/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101828433B (en) * | 2007-08-06 | 2013-04-24 | 普拉斯马外科投资有限公司 | Cathode assembly and method for pulsed plasma generation |
| CN101321427B (en) * | 2008-07-22 | 2011-03-16 | 核工业西南物理研究院 | DC magnetic filtering cathode vacuum arc plasma source |
| CN104018115A (en) * | 2013-06-04 | 2014-09-03 | 黄山明明德轴承有限公司 | Ion filling and depositing combined treatment method of rolling bearing ring raceways |
| CN104018115B (en) * | 2013-06-04 | 2016-07-06 | 黄山明明德轴承有限公司 | A kind of rolling bearing lasso raceway ion implanting and precipitation compounding method |
| CN103915305A (en) * | 2014-04-18 | 2014-07-09 | 中国工程物理研究院流体物理研究所 | Resistance trigger type vacuum arc ion source device |
| CN103953518A (en) * | 2014-05-13 | 2014-07-30 | 哈尔滨工业大学 | Anode of multi-stage cusped magnetic field plasma thruster |
| CN103953518B (en) * | 2014-05-13 | 2016-08-17 | 哈尔滨工业大学 | A kind of anode of multistage cusped magnetic field plasma thruster |
| CN111022192A (en) * | 2019-12-04 | 2020-04-17 | 中国人民解放军空军工程大学 | Multi-cathode sliding arc plasma igniter |
| CN111022192B (en) * | 2019-12-04 | 2021-12-10 | 中国人民解放军空军工程大学 | Multi-cathode sliding arc plasma igniter |
| CN113382525A (en) * | 2021-06-23 | 2021-09-10 | 大连理工大学 | Multi-channel large-area high-density direct current arc plasma source |
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| CN100490052C (en) | 2009-05-20 |
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Granted publication date: 20090520 Termination date: 20100630 |