CN1868837A - Substrate transfer device - Google Patents
Substrate transfer device Download PDFInfo
- Publication number
- CN1868837A CN1868837A CN 200510034984 CN200510034984A CN1868837A CN 1868837 A CN1868837 A CN 1868837A CN 200510034984 CN200510034984 CN 200510034984 CN 200510034984 A CN200510034984 A CN 200510034984A CN 1868837 A CN1868837 A CN 1868837A
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- China
- Prior art keywords
- base
- conveying device
- mechanical arm
- board conveying
- substrate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A substrate transport device is composed of a base, a main body structure supported by said base, and a substrate carrying unit with a manipulator consisting of upper and lower groups of bars and a fixture connected to said main body structure and holding said manipulator. The distance between two upper bars in a group is different from that between two lower bars in a group.
Description
[technical field]
The present invention relates to a kind of base-board conveying device that transports semiconductor chip or display panels.
[background technology]
Usually in the processing procedure of semiconductor device or the material identical, use micro-photographing process so that form circuit and electrode pattern with its character.In micro-photographing process, implement a series of treatment step, just, the cleaning of substrate and formation dry, photoresistance film on substrate, exposure, development and the step identical of photoresistance film with its character.When stating treatment step on the implementation, be transported to processing unit after the card casket unloading down of substrate from place card casket station and be subjected to comprising that cleaning waits the processing of treatment step, afterwards, one of the processed substrate of each processing unit then one be sent back among the card casket.Wherein the carrying of this substrate is to be finished by the arm of base-board conveying device.
As shown in Figure 1, be a kind of work scheme drawing of base-board conveying device 10 of prior art.This base-board conveying device 10 is after card casket 4 taking-ups that are placed on card casket bench board 2 are housed in the substrate 7 of this card casket 4, be transported to the processing equipment processing such as (figure do not show) of being disposed at the card casket bench board 2 cooresponding faces of tossing about, otherwise, after the processing device is discharged the substrate of handling 7, be contained in card casket 4.
Wherein, this base-board conveying device 10 comprises a base 11, an actuating device 12, an agent structure 13 and a base plate carrying mechanism 14.This base plate carrying mechanism 14 is linked to each other with this agent structure 13 by an embolus (not indicating), and this above-mentioned structure that links to each other is positioned on this base 11, and moves along certain guide rail, and this actuating device 12 places on this base 11.
This agent structure 13 comprises a supporter 132, a lifting shaft 134, a pair of dwang 136,137.This supporter 132 is positioned at base 11 appropriate locations, and this lifting shaft 134 is supported for liftable and rotatable in this supporter 132, and a pair of dwang 136,137 is rotatably connected, and is linked to each other with this lifting shaft 134 by a stay bearing plate (not indicating).
This substrate holding structure 14 comprises one group of mechanical arm 141a, 141b, next group mechanical arm 142a, 142b and anchor clamps 145.These anchor clamps 145 are connected with this dwang 137 by an embolus, and these anchor clamps 145 fixings are somebody's turn to do two groups of mechanical arm 141a up and down, 141b, 142a, 142b, be somebody's turn to do two groups of mechanical arm 141a up and down, 141b, 142a, 142b is identical and parallel elongated plate type member, the one end is fixed on these anchor clamps 145, and should last one group of mechanical arm 141a and 141b between width and this next to organize mechanical arm 142a identical with width between the 142b, base-board conveying device 10 is two groups of mechanical arm 141a about this, 141b and 142a, 142b keeps stretching out placement substrate 7 under the horizontal state simultaneously, makes mechanical arm 141a at this state, 141b, 142a, 142b rotates, lifting, in horizontal surface, move and between card casket 4 and processing equipment, transport substrate 7.Industry generally adopts the base-board conveying device close with substrate size of the width between the mechanical arm to transport substrate, and becomes upper and lower two groups of mechanical arms carried base board respectively in order to transport efficient design.
But, the mechanical arm of above-mentioned this base-board conveying device is owing to be to be made of upper and lower two groups of identical and parallel elongated plate type members, be that its spacing is fixing and can't change, can only pick and place a kind of size substrate or with the substrate of the substrate similar sizes of this kind size, when the bigger substrate of corresponding another size difference, can only increase by a stylobate plate conveyer again, this can increase manufacturing cost.
[summary of the invention]
For overcoming the defective that the prior art base-board conveying device can't transport the substrate of two kinds of bigger sizes of size difference, be necessary to provide a kind of base-board conveying device that transports the substrate of two kinds of bigger different sizes of size difference.
In one embodiment, the technical scheme that the technical solution problem is adopted is: a kind of base-board conveying device, it comprises an agent structure, a base plate carrying mechanism and a base, this base plate carrying mechanism comprises a mechanical arm and anchor clamps, these anchor clamps link to each other with this agent structure and this mechanical arm of fixing, this mechanical arm constitutes this agent structure of this base support by two group leader's strip members up and down.Wherein, the distance between last group leader's strip member of this mechanical arm is different from the distance between next group leader's strip member.
Compared with prior art, because the distance between last group leader's strip member of mechanical arm of the present invention is different from the distance between next group leader's strip member, promptly be somebody's turn to do the substrate of the corresponding a kind of size of last group leader's strip member, the bigger substrate of corresponding another size difference of this next group leader's strip member, therefore the present invention's base-board conveying device can pick and place two kinds of substrates that the size difference is bigger, therefore when the substrate of the bigger different size of corresponding two kinds of size difference, compare prior art and can save base-board conveying device quantity, thereby can reduce the Liquid Crystal Display (LCD) manufacturing cost.
[description of drawings]
Fig. 1 is the scheme drawing of prior art base-board conveying device.
Fig. 2 is the scheme drawing of the present invention's one better embodiment base-board conveying device.
Fig. 3 is the scheme drawing that the small size substrate is carried in base-board conveying device support shown in Figure 2.
Fig. 4 is the scheme drawing that large-size substrate is carried in base-board conveying device support shown in Figure 2.
[specific embodiment]
Please refer to Fig. 2, the scheme drawing of a better embodiment base-board conveying device 200.This base-board conveying device 200 comprises a base 210, an actuating device 220, an agent structure 230 and a base plate carrying mechanism 240.This base plate carrying mechanism 240 links to each other with this agent structure 230, this above-mentioned continuous structure is placed on this base 210, this actuating device 220 is arranged on the suitable position of this base 210, the drive source that it comprises base 210 such as motor drives the operation between individual each worker station (figure shows) of this base-board conveying device 200.
This agent structure 230 comprises a supporter 232, a lifting shaft 234, a pair of dwang 236,237.This supporter 232 is positioned at the appropriate location of base 210, and this lifting shaft 234 is supported for liftable and rotatable in this supporter 232, and a pair of dwang 236,237 connects into rotatable, and is linked to each other with this lifting shaft 234 by a stay bearing plate (not indicating).
This base plate carrying mechanism 240 comprises a pair of two groups of mechanical arm 241a, 241b, 242a, 242b and anchor clamps 245 up and down.These anchor clamps 245 interconnect with this dwang 237, and this mechanical arm 241a, 241b, 242a, 242b are the identical elongated plate type members of a pair of upper and lower two group length, and the one end is fixed on these anchor clamps 245.
Wherein, distance between this last one group of mechanical arm 241a, 241b is greater than the distance between this next group mechanical arm 242a, 242b, the substrate 280 (shown in the 3rd figure) of the corresponding reduced size of distance between this next group mechanical arm 242a, 242b, the substrate 290 (shown in the 4th figure) of the corresponding large-size of distance on this between a group of mechanical arm 241a, 241b.
Wherein, the distance between this next group mechanical arm 242a, 242b also can be designed to the substrate of a corresponding large-size, and is corresponding, and the distance on this between a group of mechanical arm 241a, 241b can be designed to the substrate of a corresponding reduced size.
When the moderate dimensions of substrate, the substrate that these upper and lower two groups of mechanical arms carry this moderate size simultaneously respectively transports (figure does not show).
Compared to prior art, because upper one group of mechanical arm 241a, 242b of the present invention Between distance be different from distance between next group mechanical arm 242a, 242b, namely should on The substrate of the corresponding a kind of large-size of distance between a group of mechanical arm 241a, 242b should The base of the corresponding another kind of reduced size of distance between next group mechanical arm 242a, 242b Plate, therefore base-board conveying device 200 of the present invention can pick and place two kinds of bases that the size difference is bigger Therefore plate is compared prior art and can be saved base when the bigger substrate of corresponding two kinds of size difference Plate conveyer quantity, thus the liquid crystal display manufacturing cost can be reduced.
Claims (6)
1. base-board conveying device, it comprises an agent structure, a base plate carrying mechanism and a base, this base plate carrying mechanism comprises a mechanical arm and anchor clamps, these anchor clamps link to each other with this agent structure and this mechanical arm of fixing, this mechanical arm is made of two group leader's strip members up and down, this agent structure of this base support is characterized in that: the distance between last group leader's strip member of this mechanical arm is different from the distance between next group leader's strip member.
2. base-board conveying device as claimed in claim 1 is characterized in that: two group leader's strip members are same by a pair of elongated plate type member formation and its identical length up and down for this.
3. base-board conveying device as claimed in claim 2 is characterized in that: the distance on this between group leader's strip member is greater than the distance between this next group leader's strip member.
4. base-board conveying device as claimed in claim 1 is characterized in that: it comprises that further one is arranged on the actuating device on this base.
5. base-board conveying device as claimed in claim 1, it is characterized in that: this agent structure further comprises a supporter, a lifting shaft and a pair of dwang, this supporter is arranged on this base, this lifting shaft is supported for liftable and rotatable in this supporter, and links to each other with this a pair of dwang.
6. base-board conveying device as claimed in claim 5 is characterized in that: this a pair of dwang is rotatably connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2005100349846A CN1868837B (en) | 2005-05-29 | 2005-05-29 | Substrate transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2005100349846A CN1868837B (en) | 2005-05-29 | 2005-05-29 | Substrate transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1868837A true CN1868837A (en) | 2006-11-29 |
| CN1868837B CN1868837B (en) | 2011-12-21 |
Family
ID=37442647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2005100349846A Expired - Fee Related CN1868837B (en) | 2005-05-29 | 2005-05-29 | Substrate transfer device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1868837B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102642714A (en) * | 2012-04-27 | 2012-08-22 | 深圳市华星光电技术有限公司 | Base plate removing device |
| CN108313782A (en) * | 2018-01-31 | 2018-07-24 | 六安维奥智能科技有限公司 | A kind of dixie cup cup body paper paper feed |
| WO2020042306A1 (en) * | 2018-08-31 | 2020-03-05 | 惠科股份有限公司 | System and method for handling display panel |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102774652A (en) * | 2012-07-31 | 2012-11-14 | 深圳市华星光电技术有限公司 | Supporting arm of LCD (liquid crystal display) panel handling device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4000036B2 (en) * | 2002-09-30 | 2007-10-31 | 東京エレクトロン株式会社 | Transport device |
| CN1291901C (en) * | 2003-08-23 | 2006-12-27 | 鸿富锦精密工业（深圳）有限公司 | Substrate carrier |
| CN1594048A (en) * | 2003-09-08 | 2005-03-16 | 鸿富锦精密工业（深圳）有限公司 | Base plate moving and carrying device |
-
2005
- 2005-05-29 CN CN2005100349846A patent/CN1868837B/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102642714A (en) * | 2012-04-27 | 2012-08-22 | 深圳市华星光电技术有限公司 | Base plate removing device |
| CN102642714B (en) * | 2012-04-27 | 2015-02-18 | 深圳市华星光电技术有限公司 | Base plate removing device |
| CN108313782A (en) * | 2018-01-31 | 2018-07-24 | 六安维奥智能科技有限公司 | A kind of dixie cup cup body paper paper feed |
| WO2020042306A1 (en) * | 2018-08-31 | 2020-03-05 | 惠科股份有限公司 | System and method for handling display panel |
| US11358798B2 (en) | 2018-08-31 | 2022-06-14 | HKC Corporation Limited | Display panel conveying system and conveying method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1868837B (en) | 2011-12-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: QIMEI ELECTRONIC CO LTD Free format text: FORMER OWNER: INNOLUX DISPLAY CORPORATION |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20111021 Address after: 518109 Longhua, Shenzhen, town, Foxconn science and Technology Industrial Park E District, building 1, floor 4, Applicant after: Qunkang Technology (Shenzhen) Co., Ltd. Co-applicant after: Chimei Optoelectronics Co., Ltd. Address before: 518109 Longhua, Shenzhen, town, Foxconn science and Technology Industrial Park E District, building 1, floor 4, Applicant before: Qunkang Technology (Shenzhen) Co., Ltd. Co-applicant before: Innolux Display Group |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111221 Termination date: 20160529 |