CN1856651A - Detection of contaminants within fluid pumped by a vacuum pump - Google Patents
Detection of contaminants within fluid pumped by a vacuum pump Download PDFInfo
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- CN1856651A CN1856651A CN 200480027275 CN200480027275A CN1856651A CN 1856651 A CN1856651 A CN 1856651A CN 200480027275 CN200480027275 CN 200480027275 CN 200480027275 A CN200480027275 A CN 200480027275A CN 1856651 A CN1856651 A CN 1856651A
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Abstract
A vacuum pump has, in fluid communication with a location intermediate an inlet thereof for receiving fluid and an outlet thereof for exhausting pumped fluid, a sensor for receiving at least part of the fluid received by the pump and for sensing the presence of one or more contaminants therein.
Description
The present invention relates to survey the pollutant in the fluid that utilizes vacuum pump and particularly molecular pump suction.
A lot of manufacture processes and test are extremely sensitive to polluting, and therefore carry out in vacuum or parital vacuum environment.The specific fabrication process in semiconductor devices is produced particularly, for example corrode, deposit and ion injects and to require vacuum condition guaranteeing the chemical pure cleanliness of this process, and obtain the correct physical condition (molecule mean free path etc.) that is suitable for forming plasma active or even process is provided.Recently, designed extreme ultraviolet (EUV) projection printing process, wherein the reflecting surface of optical member is extremely sensitive to damaging when having water or hydrocarbon pollution.
In order to guarantee environmental conditions, very advantageously be that having can be from painstakingly introducing the local compression sensing means that other gas the vacuum chamber picks out the contaminant gases material for this responsive vacuum process.These other gas can be reaction gas, or inert gas, needs them to be used to form necessary pressure and flox condition.
Exist several different methods to be used for the matter selective gas pressure measurement in the prior art.
(1). residual gas analyser (RGA)
In the prior art, the local compression analyzer is used for measuring the gas componant of vacuum chamber.This RGA generally is quadrupole mass spectrometer (QMS), and it is very expensive, and generally only can measure under low-level total pressure.In the method, produce spectrum, it is corresponding to the local compression of existing ion, and as their quality-charge ratio (m/z).Generally, the gas molecule that exists in the system decomposes in ion source, produces littler ion, and they generally are revealed as lower m/z value in spectrum.
(2). the sampling rga
Fig. 1 has illustrated a kind of layout, wherein the level that allowed of total pressure Overpressure of a safety valve sensing means.Chamber 1 utilizes pump 2 suctions, is generally turbomolecular pump 2, and backing pump 3, is generally positive-displacement pump.RGA4 is connected to auxiliary chamber 6, and it is connected to chamber via current limiting device 5.This auxiliary chamber 6 is equipped with other molecular pump 7 and positive-displacement pump 8, and it allows RGA4 to operate under the acceptable overall stress level.This system allows to measure the gaseous matter that is rich in the most in chamber 1, but energy measurement does not have the gaseous matter of low-down local compression; Generally, survey bureau is limited to magnitude in per 1,000,000,000 parts level relatively.The other suction of molecular pump 7 and positive-displacement pump 8 is arranged and is also caused very costliness of system.
(3). the transient state rga
Reflux in order to measure the oil of arranging from suction, be known that RGA is connected to the vacuum chamber that is positioned at this pump layout upstream.In case this system has reached final pressure, RGA is closed, and allows near the surface cool of chamber and therefore adsorbs the oil gas that exists in the chamber.When RGA was opened once more, the temperature increase of being followed caused the fast desorption of oil gas attached, and this detects in RGA.This causes highly " peak value " of the detection oil gas of amplification, and when forming thermal equilibrium once more, it falls into a decline then.The response of this amplification can be used for improving the susceptibility of measuring system.
(4). the adverse current rga
As Fig. 2 signal, a kind of optional method (often being applied in the helium leak detection) is that RGA is connected in the counterflow configuration.In this arrangement, RGA4 is connected to the inlet of molecular pump 2.The outlet of this pump 2 is connected to positive-displacement pump 3, and this pump also is connected to chamber 1.When molecular pump 2 remains on fully low total pressure with RGA4, allow helium to reflux, and should arrange therefore that promptly the compressibility of molecular pump 2 was lower for the specific gas material based on this fact, particularly light gas helium for example by molecular pump 2.
This layout provides RGA for for example improvement of the relative sensitivity of helium of gas, but is unsuitable for other gas, for example water vapour or hydrocarbon.Because device depends on the compressibility of molecular pump for this predetermined substance for the susceptibility of all gases material, this system is unsuitable for as multiple gas analyzer.This method is effective for helium, is because molecular pump has bad compressibility for helium, but invalid for most of heavy hydrocarbon pollutants, because molecular pump presents high compressibility for these heavy molecules.Analyzer and other the expensive of pump 2 also are disadvantageous.
(5). pump is assisted leak detection
When helium leak is surveyed the large-scale vacuum system of the vacuum pump be used to have himself, can improve speed of response by the helium leak prober being connected to the foreline of vacuum pump rather than being directly connected to vacuum chamber.Speed of response in leak detection and S/V are than relevant, and wherein S is the pumping velocity of leak detection system, and V is the volume of vacuum chamber.Most of leak detectors have the low pumping velocity in the scope of several liters/second, therefore and for large-scale vacuum chamber with corresponding bigger vacuum pump, by with itself and these large-scale vacuum series connection of pumps, effective pumping velocity of leak detector is greatly improved.Though it is highly beneficial that this method is surveyed for helium leak, it is unpractiaca for the hydrocarbon pollution of surveying in the chamber, because be present in dense (often being caused by backing pump) of the hydrocarbon pollution thing in the foreline usually.
(6) .GC-MS inlet concentrator
In gaschromatographic mass spectrometric analysis (GC-MS), analyzed gas can be surveyed by multiple technologies, comprises the quadruple analyzer, flight time (TOF) and other method, in order to improve the susceptibility of these methods, use sometimes by " inlet concentrator ", also be called as " purifying and ventilation " device.These devices comprise little chamber, and it is full of for example active carbon of sorbing material, and its temperature can change.This device is exposed to the gas that will analyze, and rapid heating then is to disperse the gas that all gather at short notice.The concentration that improves has been improved the susceptibility of sensitive detection parts.
(7). temperature desorption spectroscopy able to programme (TPDS)
In this analytical method, gas absorption is to the adsorption layer that remains low temperature, and the speed (general several K/s) with Steady-State Control improves temperature then.Utilize suitable prober to survey dispersed gas like this then, for example quadruple mass spectrometer (QMS) still also can use the flight time (TOF) spectrometer.This method provides the gas pressure spectrum as temperature function, and therefore its soluble relative abundance that is used to indicate the gas with different surfaces binding energy provides the valuable information about gas componant.For example, in Fig. 3, be that the formic acid of the copper matrix of m/z=2 and 44 illustrates QMS output for being adsorbed onto the atom value.This only illustrates the hydrogen (m/z=2) of faint absorption, and it is in about 280K desorption, and at the approximately hydrogen and the carbon dioxide (m/z=44) of 470K desorption.
(8). gas-selectively capacitive measurement device
A kind of possibility is to use the gas-selectively measuring element, and for example capacitance sensor wherein often is the dielectric material of film polymer, changes character in response to the water vapour that exists.The shortcoming of this device is them only to specific gas material (being water vapour in this example) sensitivity, and they also have lower absolute susceptibility usually.They also are easy to drift.Yet because they are only to the specific gas material sensitive, they can be measured under low relative local compression, and wherein the material of being paid close attention to is the sub-fraction of other gas of existence.They also have the advantage cheaper than residual gas analyser.
(9). the little balance of quartz crystal (QCM)
These devices are based on measuring the quality of absorption (condensation) to the pollutant of device surface.This device comprises quartz crystal, is excited by high-frequency voltage, and its natural frequency is subjected to because the influence of the additional mass that adsorbed material causes.These devices do not rely on material, because they are only in the response of the gas of its surface condensation, and they distinguish that the ability of gas can be by applying suitable material or by comprising that in different temperatures operated device changes under the cryogenic temperature in its surface.
(10). surface acoustic wave (SAW) sensor
These devices are similar to QCM, but are based on the ripple of propagating on device surface, but not the ripple of advancing by its main body.This has greatly improved them for the susceptibility that is adsorbed onto its surperficial small quantity of material.
(11). the metal conductive oxide sensor
These devices use thin layer of metal oxide, and this thin layer utilizes the chemical vapor deposition (CVD) method to deposit usually, and to produce sensing layer, its electric conductivity is to the sorbing material sensitivity.Special manufacturing technique allows the array deposition of this thin-film device on independent matrix, and each device is to specific material group sensitivity.Because these devices depend on oxidation, they are easy to drift about in vacuum environment, and this is an oxygen reduction.
(12). solid-state electro-chemical cell
These sensors comprise the solid electrolyte between two electrodes, and based on surveying by the electric current of oxidation negative ion carrying or the voltage of generation.These are suitable for measuring hydrocarbon pollution, but have the detection limit that is higher than the required limit in a lot of the application.They also should at high temperature be operated so that promote the negative ion conduction.In some situations, electrolyte allow oxygen from the atmospheric diffusion to the vacuum system in, this itself can become the process pollution sources.
Above-mentioned these art methods (1) have various shortcomings to (12), thereby make them be unsuitable for being used as the method for quantitative measurment local compression in process is used.
(A). cost
Art methods (1) to (7) depends on quadruple mass analyzer or similar expensive sensitive detection parts substantially.In most of situations, they also require to have the assisted vacuum chamber of the vaccum pump unit of himself.The cost of this system is often too high and be unsuitable for extensive use in a lot of processes.
(B). explain
Explanation to quadruple mass spectrometer data is very complicated, because big hydrocarbon molecules divides in ion source, and requires the operator that are skilled in technique to make an explanation to determine the parent chemical composition from the schizotype of lightweight fragment.This makes it be unsuitable for automated procedure control software.
(C). susceptibility
RGA is difficult to differentiate little local compression under other gentle gaseous environment.Particularly, it is difficult to survey water in strong ar gas environment, because dual Ionized argon occurs at 20amu, and water occurs 18.And, the nytron deposits yields C of division
3H
4 +(40amu) fragment and other quality are near the fragment of 40amu.These also are difficult to differentiate in the presence of argon.Argon is in being usually used in semiconductor fabrication and EUV planography instrument.The low cost of sensor (8) to (11) does not have equally by the shortcoming of other gases affect, but generally has bad susceptibility.
(D). speed of response
The speed of response of the sampling residual gas analyser of art methods (2) is lower, because, referring again to Fig. 1, current limiting device 5 has limited the speed that pollutant enters auxiliary chamber 6.
(E). to the effect of vacuum system
Art methods (6) and (7) relate to temperature regulation, and generally are used for analysis purpose so that only determine the relative concentration of different material.It is generally acknowledged that they are unsuitable for the local compression of quantitative measurment process in using, because the change of temperature causes the raising of contaminant concentration, this has influence on this process unfriendly.Generally, this temperature regulation time that the improvement of susceptibility is determined by " pulse spacing ratio "-promptly the surface heated with it is kept the ratio of the time of cooling.
(F). thermal radiation and conduction
RGA and solid-state electro-chemical cell should at high temperature be operated, they by the conduction or radiation with the heat transferred vacuum system.This is very unfavorable in planography or system of weight and measure, and these systems are very responsive to temperature variation.
(G). charged particle
RGA produces high energy charged particles (ion or electronics) usually, and they are also very harmful to process.
(H) pollution of Chan Shenging
Some sensors also produce pollution.In the situation of solid-state electro-chemical cell, but oxygen is from the diffusion pollution course of atmosphere.
In a word, because pollutant can highly damage expensive component, importantly, sensing means is very responsive to low-level pollution, and also has fast response time, thereby can provide sufficient protection by process control software.
In first aspect, the invention provides the equipment that comprises vacuum pump, this vacuum pump has the outlet that is used to receive the inlet of fluid and is used to discharge the suction fluid, and form fluid with the entrance and exit position intermediate and is communicated with, be used to receive by at least a portion of the fluid of this pump reception and be used to survey the wherein sensor of the existence of one or more pollutants.
Therefore, being used to survey wherein, the sensor of the existence of one or more pollutants is arranged in the middle of this pump intake and this pump discharge.Therefore accordingly, the local compression of a kind of or all contaminations that sensor detects is controlled by the fluid flow that this pump intake received, and has minimum influence from any backflow of the backing pump that is connected to this pump discharge for the local compression of pollutant.
Preferably, this pump comprises at least the first and second suction stations, and described position is between first and second stations.By improve the susceptibility of sensor in the position operation sensor that the pollutant in the reception fluid is compressed to higher local compression by this pump first suction station.For example, if the pumping velocity of first stop is S
a, and that second station is S
b, then at the pollutant local compression p at sensor place
s, by concerning p
s=p
c* S
a/ S
bAnd with chamber in local compression p
cRelevant.And the suction effect at second station can guarantee that this sensor is not subjected to the pollutant effects that exist in the foreline.
One of them station preferably includes the branch substation.For example, one of them station can comprise turbine-minute substation, and/or one of them station can comprise molecular drag stage.
This sensor preferably is connected this pump outside, comprises port at this pump of this situation in described position, comprises being used for towards the equipment of sensor from the device of described port conveyance fluid.This equipment preferably has the housing that holds this pump and sensor.Can provide control gear to control this pump and sensor, this control gear preferably is contained in the public housing.
Preferably, in use, this sensor is independent of pollutant (for example water vapour or the hydrocarbon) sensitivity in the pressure versus flow body of uncontamination thing in the fluid substantially.This sensor is preferably only to one or more selected pollutant sensitivities, and this can provide the sensor output signal that is easy to make an explanation and use automated procedure to control the process of software.Preferably, this sensor is set to be used for providing the output of indication fluid pollutant local compression.
This sensor can be the little balance sensor of quartz crystal, saw sensor, perhaps capacitor type-sensor.
In one embodiment, this sensor combines to improve its susceptibility with the inlet concentrator, perhaps improves the ability that it differentiates the gas with various material.Temperature regulation in the inlet concentrator can be to be stepped form substantially, this can allow the gathering of pollutant, and the surface is in lower temperature simultaneously, and the pollutant of attached these gatherings of fast desorption when temperature improves fast, form the big transient state concentration of pollutant thus, this is easy to sensed arriving.
Optionally, this temperature regulation can be basic toothing formula, this can allow pollutant to assemble at a lower temperature, and desorption more lentamente when temperature progressively improves, thereby the pollutant with low binding energy is desorption at a lower temperature, and pollutant desorption under higher temperature that those have higher binding energy provides the ability of differentiating the pollutant with different binding energy thus.In another optional mode, this temperature regulation may be substantially of the form of inclination pulse.
This sensor can comprise the surface that is coated with the material that is used to absorb one or more pollutants.Can be provided for sensor is cooled to be lower than the device of the temperature of environment temperature, this can improve the ability of the sensor absorption pollutant of paying close attention to.
This equipment preferably includes the backing pump that is connected to this pump discharge and is used for suction from the vacuum pump fluid discharged.This inlet can be communicated with the vacuum chamber fluid so that receive fluid from it.
According to the equipment of the arbitrary claim in front, wherein pollutant comprises at least a in water and the hydrocarbon.
The present invention also provides a kind of vacuum pump with combination, it has the outlet that is used to receive the inlet of fluid and is used to discharge the suction fluid, with a kind of sensor, it is communicated with this entrance and exit position intermediate formation fluid, with the existence that is used to receive at least a portion of the fluid that is received by this pump and is used to survey one or more pollutants wherein.
The present invention also provides a kind of method, is used for surveying the existence of one or more pollutants that aspirate fluid, is included in the vacuum pump inlet place and receives fluid; And at least a portion of the fluid that this pump is received from this vacuum pump inlet and outlet position in the middle is transferred to sensor to be used to survey the existence of one or more pollutants wherein.
The feature that relates to the present device aspect can be applicable to method of the present invention aspect equally, and vice versa.
With reference now to accompanying drawing, only preferred feature of the present invention is described by example, wherein:
Fig. 1 has illustrated a kind of layout of sampling residual gas analyser;
Fig. 2 has illustrated a kind of layout of adverse current residual gas analyser;
Fig. 3 is the figure that the desorption spectrum of adsorbed formic acid is shown;
Fig. 4 has illustrated one embodiment of the present of invention; And
Fig. 5 (a) to (c) has illustrated can be applicable to the thermoregulator various forms of Fig. 4 sensor.
With reference to figure 4, pump 12, for example turbo-molecular, molecular drag or composite turbine molecule/molecular drag have the inlet 15 that is connected to vacuum chamber 11 by inlet pipe or conduit, and are connected to for example elementary delivery side of pump 17 of dry type of second vacuum pump 13 by outlet conduit or conduit.This pump 12 has the first pumping unit 12a, and the second pumping unit 12b.This first pumping unit 12a comprises at least one suction station, and for example at least one turbo-molecular station, and this second pumping unit 12b comprises at least one suction station, for example at least one molecular drag stage.
The local compression sensor, or measuring element 14 is connected to the molecular pump port that is positioned at this pump intake 15 and this pump discharge 17 centres by connecting tube or conduit 16.Local compression measuring element 14 can be QCM (the little balance of quartz crystal), SAW (surface acoustic wave) or capacitor type (or similar specific gas sensor), and but serviceability temperature regulates improving its susceptibility, or improves the ability that it differentiates the gas with various material.As schematically shown in Figure 4, controller 18 can be set to control this pump 12 and local pressure measurement device 14, this pump 12 wherein, local compression measuring element 14 and controller 18 are preferably placed in the public housing 19.
Temperature regulation can be to be stepped form substantially, shown in Fig. 5 (a), can be to be sawtooth form substantially, shown in Fig. 5 (b), perhaps is the form of inclination pulse substantially, shown in Fig. 5 (c).The effect that step is regulated is to make gathers pollutant when the surface is in lower temperature, and when temperature improves fast the attached pollutant that these gather of fast desorption, form high pollutant transient state concentration thus, this is easy to sensed.The effect that sawtooth is regulated is, under lower temperature, gather pollutant, then when temperature progressively improves with its desorption more lentamente, thereby the pollutant with low binding energy is desorption at a lower temperature, and pollutant desorption under higher temperature that those have higher binding energy provides the ability of differentiating the pollutant with different binding energy thus.
In use, the contaminant gases utilization that exists in the chamber 11 is this pump pumping unit 12a suction of close this pump intake, and utilizes this pumping unit 12a to be compressed to higher pressure.Utilize this device, the pressure of contaminant gases is enhanced and makes pollutant to be detected by local compression measuring element 14 more easily.
Owing to be present in pollutant in its bearing and lubrication system or its electric motor drive system, perhaps owing to be present in pollutant in second vacuum pump 14, contaminant gases also may be present in this pump 12 delivery channel 17 near.Generally, these pollutants are influence process chamber 11 not, because this pump pumping unit 12a, 12b provide effectively these pollutants stops.Yet importantly, local compression measuring element 14 is not in response to the increase of pollutant in the delivery channel.This suction effect by the pumping unit 12 of contiguous delivery channel 17 is guaranteed.
The present invention has and is better than above-mentioned art methods (1) to a plurality of significant advantage of (12).
(A). cost
By using the gas-selectively measuring element of lower cost, the present invention has overcome the cost shortcoming of residual gas analyser.When the present invention is applied to use the vacuum system of molecular pump, need not other aspirator.By the higher position of this device total pressure in system is connected the absolute susceptibility that improves this gas-selectively measuring element.
(B). explain
Only the output of this sensor of concern pollutant sensitivity is easy to explain in essence and this process is used automated procedure control software.
(C). susceptibility
Be compressed to operation sensor in the zone of higher local compression by the pollutant in being present in vacuum chamber, the present invention has improved the susceptibility of sensor.If the pumping velocity of the pumping unit 12a of this pump 12 is S
a, and that this pump 12 pumping unit 12b is S
b, then at the pollutant local compression p at sensor place
sBy concerning p
s=p
c* S
a/ S
bAnd with chamber in local compression p
cRelevant.And the suction effect of the pumping unit 12a of this pump 12 can guarantee that this sensor is not present in the pollutant effects in the foreline.
(D). speed of response
By the pumping velocity that uses this pump 12 12a of first portion pollutant is drawn into and has improved speed of response in the sensor.
(E). the effect of against vacuum system
The suction effect of the 12a of first portion of molecular pump 12 can avoid process chamber 11 to be subjected to because the adverse effect of the contaminant pressure change that temperature regulation causes.It also with the process chamber with insulate by sensor self produced pollution thing.
(F). thermal effect
Because sensor is provided with away from the process chamber because sensor self or since the thermal effect that thermoregulator radiation in the concentrator that enters the mouth or conduction cause greatly reduced.
In a word, this vacuum pump has, form fluid with the outlet position intermediate that is used to receive the inlet of fluid and is used to discharge the suction fluid and is communicated with, be used to receive by at least a portion of the fluid of this pump reception and be used for the sensor of the existence of one or more pollutants that sensing wherein exists.
Claims (30)
1. equipment, comprise aspirator, described aspirator has the outlet that is used to receive the inlet of fluid and is used to discharge the suction fluid, and forms fluid with the entrance and exit position intermediate and is communicated with and is used to receive by at least a portion of the fluid of described aspirator reception and is used to survey the wherein sensor of the existence of one or more pollutants.
2. equipment 1 according to claim 1 is characterized in that, described aspirator comprises at least the first and second suction stations, and described position is between described first and second stations.
3. equipment according to claim 2 is characterized in that, one in these stations comprises the branch substation.
4. according to claim 2 or 3 described equipment, it is characterized in that one in these stations comprises the turbo-molecular station.
5. according to each described equipment in the claim 2 to 4, it is characterized in that one in these stations comprises molecular drag stage.
6. according to the described equipment of each claim of front, it is characterized in that described aspirator comprises port in described position, described equipment comprises from the device of described port towards the sensor conveyance fluid.
7. according to the described equipment of each claim of front, it is characterized in that, comprise the housing that is used to hold described aspirator and sensor.
8. according to the described equipment of each claim of front, it is characterized in that, comprise the device that is used to control described aspirator and sensor.
9. equipment according to claim 8 is characterized in that, comprises the housing that is used for described control gear.
10. according to the described equipment of each claim of front, it is characterized in that in use, described sensor is independent of the pollutant sensitivity in the pressure versus flow body of uncontamination thing in the fluid substantially.
11., it is characterized in that sensor is set to provide the output that can indicate the local compression of pollutant in the fluid according to the described equipment of each claim of front.
12., it is characterized in that described sensor is the little balance sensor of quartz crystal according to the described equipment of each claim of front.
13., it is characterized in that described sensor is a saw sensor according to each described equipment in the claim 1 to 11.
14. equipment according to claim 13 is characterized in that, the pollutant for the treatment of sensing is a hydrocarbon.
15., it is characterized in that described sensor is the solid electro-chemical cell according to each described equipment in the claim 1 to 11.
16. equipment according to claim 15 is characterized in that, the pollutant for the treatment of sensing is a hydrocarbon.
17., it is characterized in that described sensor is gas-selectively capacitor element according to each described equipment in the claim 1 to 11.
18. equipment according to claim 17 is characterized in that, the pollutant for the treatment of sensing is a water vapour.
19., it is characterized in that described sensor is provided with temperature regulation according to the described equipment of each claim of front.
20. equipment according to claim 19 is characterized in that, described temperature regulation is stepped form substantially.
21. equipment according to claim 19 is characterized in that, described temperature regulation is sawtooth form substantially.
22. equipment according to claim 19 is characterized in that, described temperature regulation is the inclined-plane pulse shape substantially.
23., it is characterized in that described sensor has the surface that applies the material be used to absorb one or more pollutants according to the described equipment of each claim of front.
24. according to the described equipment of each claim of front, it is characterized in that, comprise the device that sensor is cooled to be lower than the temperature of environment temperature.
25. according to the described equipment of each claim of front, it is characterized in that, comprise that the backing pump that is connected to outlet is to be used for suction from described aspirator fluid discharged.
26., it is characterized in that described inlet forms fluid with vacuum chamber and is communicated with to be used for receiving fluid from it according to the described equipment of each claim of front.
27., it is characterized in that described pollutant comprises at least a in water and the hydrocarbon according to the described equipment of each claim of front.
28. vacuum pump that combines, it has the outlet that is used to receive the inlet of fluid and is used to discharge the suction fluid, and forms fluid with the entrance and exit position intermediate and is communicated with and is used to receive by at least a portion of the fluid of described pump reception and is used to survey the wherein sensor of the existence of one or more pollutants.
29. a method is used for surveying the existence of one or more pollutants of suction fluid, is included in the vacuum pump inlet place and receives fluid; And at least a portion of the fluid that described pump is received from described vacuum pump inlet and outlet position in the middle is transferred to sensor to be used to survey the existence of one or more pollutants wherein.
30. a method is used for surveying the existence of one or more pollutants of suction fluid, is included in place, the first suction station and receives fluid; And be transported to the second suction station and second fluid streams is transported to sensor to survey the existence of one or more pollutants wherein from the described first suction station with first strand of suction fluid.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0322609.9 | 2003-09-26 | ||
| GB0322609A GB0322609D0 (en) | 2003-09-26 | 2003-09-26 | Detection of contaminants within pumped fluid |
| GB0409275.5 | 2004-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1856651A true CN1856651A (en) | 2006-11-01 |
Family
ID=29286923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200480027275 Pending CN1856651A (en) | 2003-09-26 | 2004-09-16 | Detection of contaminants within fluid pumped by a vacuum pump |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN1856651A (en) |
| GB (2) | GB0322609D0 (en) |
| TW (1) | TW200526873A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102818684A (en) * | 2007-12-01 | 2012-12-12 | 因菲康有限公司 | Device for detecting sealability |
| CN102928154A (en) * | 2012-11-27 | 2013-02-13 | 中国航天科技集团公司第五研究院第五一〇研究所 | Method for reducing error in polar altitude vacuum measurement of ESD (Electro Simulated Desorption) neutral particles |
| CN103519883A (en) * | 2012-07-02 | 2014-01-22 | 博为医疗公司 | Apparatus for use with a medical device, electrosurgical generator and electrosurgical system |
| CN101622530B (en) * | 2007-02-28 | 2014-03-12 | 安捷伦科技有限公司 | Methods and apparatus for test gas leak detection |
-
2003
- 2003-09-26 GB GB0322609A patent/GB0322609D0/en not_active Ceased
-
2004
- 2004-04-26 GB GB0409275A patent/GB0409275D0/en not_active Ceased
- 2004-09-16 CN CN 200480027275 patent/CN1856651A/en active Pending
- 2004-09-24 TW TW93129081A patent/TW200526873A/en unknown
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101622530B (en) * | 2007-02-28 | 2014-03-12 | 安捷伦科技有限公司 | Methods and apparatus for test gas leak detection |
| CN102818684A (en) * | 2007-12-01 | 2012-12-12 | 因菲康有限公司 | Device for detecting sealability |
| CN103519883A (en) * | 2012-07-02 | 2014-01-22 | 博为医疗公司 | Apparatus for use with a medical device, electrosurgical generator and electrosurgical system |
| CN103519883B (en) * | 2012-07-02 | 2017-08-08 | 博为医疗公司 | Device, Electrosurgical generator and the Electrosurgical system used for Medical Devices |
| CN102928154A (en) * | 2012-11-27 | 2013-02-13 | 中国航天科技集团公司第五研究院第五一〇研究所 | Method for reducing error in polar altitude vacuum measurement of ESD (Electro Simulated Desorption) neutral particles |
| CN102928154B (en) * | 2012-11-27 | 2014-05-28 | 中国航天科技集团公司第五研究院第五一〇研究所 | Method for reducing error in polar altitude vacuum measurement of ESD (Electro Simulated Desorption) neutral particles |
Also Published As
| Publication number | Publication date |
|---|---|
| GB0409275D0 (en) | 2004-05-26 |
| GB0322609D0 (en) | 2003-10-29 |
| TW200526873A (en) | 2005-08-16 |
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