CN1854696A - Structure of miniature fibre-optical spectrograph and its making method of slit - Google Patents
Structure of miniature fibre-optical spectrograph and its making method of slit Download PDFInfo
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- CN1854696A CN1854696A CN 200510016752 CN200510016752A CN1854696A CN 1854696 A CN1854696 A CN 1854696A CN 200510016752 CN200510016752 CN 200510016752 CN 200510016752 A CN200510016752 A CN 200510016752A CN 1854696 A CN1854696 A CN 1854696A
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Abstract
A micro type of optical fiber spectrograph consists of erection chute, support, the first and the second as well as the third thread holes, the first and the second as well as the third slots, shutter, stage surface, inlet, outlet, gland, imaging reflector, collation reflector, grating and slit. It is featured as carrying out oxidation, glue coating and photo etching on slit ingot to form pit image; forming slit hole image by corroding, gluing/degluing and photo etching; using ICP etching to form slit ingot body of nonthrough notch then degluing and using ICP etching to obtain pit and slit hole.
Description
Technical field:
The invention belongs to the Micro-Opto-Electro-Mechanical Systems field, relate to the structure and the slit method for making thereof of mini optical fibre spectrometer.
Background technology:
Spectrometer is one of important component part of optical instrument, the basic equipment that can measure and analyze the structure and the composition of material, have advantages such as analysis precision height, measurement range is big, speed responsive is fast, be widely used in the research of subjects such as medical science, chemistry, geology, physics and uranology.And modern optical spectrometer technology starts from commercial Application during the Second World War.In 1940, Arnold Beckman produced the instrument that is called Beckman DU and has been considered to first Tianwan businessman ultraviolet of usefulness---visible spectrophotometer already.Constantly perfect along with the improving constantly of its performance, function, what the volume of instrument also became is heavy huge, though they can satisfy the needs of the high precision scientific analysis in the laboratory, in addition application will be restricted in the laboratory.
The design of mini optical fibre spectrometer is owing to the restriction in space, for should oversimplifying of structure as far as possible.But, for mini optical fibre spectrometer, some problems have just produced, and for example adopt the influence of the aberration in transmission-type collimation and the imaging system to make spectral instrument can't obtain then producing in straight spectrum face and the autocollimatic imaging system secondary diffraction and diffraction phenomena repeatedly.In case the problem that will bring after the spectrometer miniaturization resolution to descend, the processing of optical element and mechanism thereof and assembling complicated.The spectrometer that requires of the mini optical fibre spectrometer of commercial usefulness must assemble fast, firmly antidetonation.
Summary of the invention: have secondary diffraction, diffraction and resolution is low, space structure is complicated, processing and assembling is complicated, shock resistance is poor, interface generality difference and mechanical slot can not be applicable to problems such as mini optical fibre spectrometer repeatedly in order to solve in the background technology mini optical fibre spectrometer, purpose of the present invention will provide structure of a kind of mini optical fibre spectrometer based on classical Czerny-Turner structure and preparation method thereof.
Mini optical fibre spectrometer of the present invention comprises as shown in the figure: mounting groove, first threaded hole, first groove, second groove, diaphragm, three-flute, the 4th groove, step surface, inlet, second threaded hole, the 3rd screw, outlet, gland, imaging mirror, collimating mirror, grating, slit are arranged on rack body; Wherein the mounting groove on rack body, first groove, second groove, three-flute and the 4th groove and the first threaded hole axis are parallel to each other, and perpendicular to the upper surface of support; Intersect the axis of inlet and the bottom surface of second groove; First groove is between the mounting groove and second groove, and the bottom surface of first groove is relative with outlet; The upper surface and the lower surface of support are parallel to each other; The side of the diaphragm of close second groove is parallel with the bottom surface of second groove, and the workplace of diaphragm and the 4th groove are near the parallel sided in exit; Step surface and the 4th groove intersect near a side of inlet; The axis of the inlet and second threaded hole is parallel to each other, and perpendicular to the side of support near inlet; Three-flute is near outlet; The 3rd screw axis and outlet are parallel to each other, and perpendicular to the side of support near outlet; The installed surface of imaging mirror is placed in first groove, the installed surface of collimating mirror is placed in second groove, the installed surface of grating is placed in the 4th groove, is formed the optical system of a spectrometer by imaging mirror, collimating mirror and grating three's workplace; Gland is placed in the mounting groove, and slit is placed in the gland.
System principle: light enters inlet through guiding fiber, through slit light is controlled, width of light beam width is on request incided on the collimating mirror, incide after collimating mirror collimates light and carry out beam split on the grating, light beam after the beam split shines on the imaging mirror again, is imaged on the exit.
Advantage of the present invention: adopt support of the present invention, its compact conformation, volume are little, and the present invention adopts support and optical system to form one, produces simple, the integrated mini optical fibre spectrometer of space structure.Because the optical element of optical system of the present invention adopts support, mounting groove and gland location, make optical element accurately locate fast and step up, easy to adjust, fixation, thereby make processing and assembling is simple, shock resistance is strong.Because the present invention prepares integrated diaphragm is arranged, guarantee to eliminate secondary diffraction, multistage diffraction and aberration on rack body.Because the slit that the present invention adopts can be controlled unpolarized light beam and shelter from the incident of natural light, in the present invention when adopting silicon chip to do material, owing to utilized micromechanical process processing of the present invention, make the volume of slit small, cheap, solved the problem that mechanical slot can not be applicable to mini optical fibre spectrometer, thereby realized the making of mini optical fibre spectrometer, in the time of can having difference to require according to the unpolarized light beam width simultaneously, can realize the slit replacing at an easy rate.The resolution of optical system is subjected to the influence of the width of slit, utilizes the width of the silicon chip slit pore of micromachined processes among the present invention to satisfy the requirement of systemic resolution to slit width fully from selecting arbitrarily between the 1 μ m-100 μ m.Support of the present invention, optical element and gland can mass productions, adopt the silicon chip slit of micromechanical process processing to be fit to mass production, the suitable for industrial of mini optical fibre spectrometer of the present invention, commercialization especially.Mini optical fibre spectrometer of the present invention has obtained using widely in many fields such as industry and scientific researches, as environment measuring, medical diagnosis, chemical analysis, wastewater treatment, science and technology agricultural, military analysis and industrial flow monitoring etc., also applicable to online spectral detection.
Description of drawings:
The structural representation of Fig. 1 mini optical fibre spectrometer support of the present invention;
The structural representation of Fig. 2 mini optical fibre spectrometer entrance and exit of the present invention;
Fig. 3 the present invention lays the structural drawing behind optical element and the slit; It also is Figure of abstract
The structural representation of Fig. 4 slit of the present invention;
The structural representation of Fig. 5 gland of the present invention;
The assembling synoptic diagram of Fig. 6 slit of the present invention and gland;
Embodiment:
The present invention is further described below in conjunction with drawings and Examples, but the invention is not restricted to these embodiment.Mini optical fibre spectrometer support of the present invention and related elements thereof such as accompanying drawing 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, shown in Figure 6 comprise mounting groove 1, support 2, first threaded hole 3, first groove 4, second groove 5, diaphragm 6, three-flute 7, the 4th groove 8, step surface 9, inlet 10, second threaded hole 11, the 3rd screw 12, outlet 13, gland 14, imaging mirror 15, collimating mirror 16, grating 17, slit 23.
The bottom surface of first groove 4 is 13 staggered relatively with outlet, light behind grating 17 diffraction is converged be imaged on outlet 13 places; The side of the diaphragm 6 of close second groove 5 is parallel or crossing with the bottom surface of second groove 5, and diaphragm 6 workplaces and the 4th groove 8 are near the side coplanes at outlet 13 places, or diaphragm 6 workplaces are parallel and be higher than the 4th groove 8 near the sides that export 13; Both axis coplane or antarafacial of the inlet 10 and second threaded hole 11 is parallel; Inlet 10 is used for guiding fiber, can guarantee that optical fiber enters along fixing direction.
Slit 23 comprises pit 24, slit pore 25; Its pits 24 is positioned at the central authorities of slit 23; Slit pore 25 is positioned on the center line of slit 23.The width of slit pore can be from 1 μ m-100 μ m, can select according to spectrometer system resolution, for example: when spectrometer system requires high resolving power, can select 1 μ m for use, when spectrometer system low to resolution requirement, and when the light intensity that requires to enter spectrometer system is strong, adopt 100 μ m, when spectrometer system is all moderate to resolution and light intensity, adopt 50 μ m.Pit 24 can be rectangle, square, circle, ellipsoidal structure.
The installed surface of first groove 4, second groove 5, three-flute 7, the 4th groove 8 adopts square groove or V-type groove, when first groove 4, second groove 5, three-flute 7, the 4th groove 8 employing square grooves, the connected mode of imaging mirror 15, collimating mirror 16, grating 17 can be to connect by adhesive such as 502 glue or high performance structures AB glue; Or when first groove 4, second groove 5, three-flute 7, the 4th groove 8 employing V-type grooves, the connected mode of imaging mirror 15, collimating mirror 16, grating 17 is inlayed connection, so just can guarantee the shock resistance of spectrometer system.Imaging mirror 15 and collimating mirror 16 can adopt sphere concave surface, non-spherical reflector structure, plate one deck 0.5mm aluminium on its surface again after grinding on the K9 glass substrate.Grating 17 can adopt mechanical scratching grating or holographic grating.
Two through hole 18 symmetry or asymmetric both sides that are distributed in boss 22, and the axis coplane or the antarafacial of the axis of two through holes 18 and light hole 21.
Four the 4th threaded hole 19 symmetry or the asymmetric both sides that are distributed in through hole 18.
Slit 23 adopts silicon materials as shown in Figure 4, and the preparation method of slit of the present invention is:
A. at first slit body is carried out oxidation, on slit body, form silicon dioxide layer;
B. to carrying out gluing on the slit body that silicon dioxide layer is arranged among the step a, photoetching forms band pit 24 figures on slit body then, then finishes the slit body of band pit 24 figures and photoresist layer and makes;
C. the slit body to band figure photoresist layer among the step b corrodes the silicon dioxide layer of not covered protection by photoresist with hydrofluorite, and above-mentioned photoresist layer is removed photoresist, and then forms the silicon dioxide layer of band pit 24 figures on slit body;
D. the slit body among the step c is carried out gluing, photoetching forms band slit pore figure on slit body, then finishes the slit body of band slit pore figure and photoresist layer and makes;
E. to utilizing inductively coupled plasma etching (ICP) slit body figure in the steps d, obtain the not slit body of penetrating groove of certain depth, or utilize wet corrosion technique to make, then finish the not making of the slit body of penetrating groove;
F. the slit body to the not penetrating groove that obtains among the step e removes photoresist, and then finishes the making of the slit body that has not penetrating groove, pit 24 figures and silicon dioxide layer;
G. the slit body to not penetrating groove, pit 24 figures and silicon dioxide layer among the step f utilizes inductively coupled plasma to carry out etching (ICP), thereby obtains pit 24 and slit pore 25, then finishes the making of slit; Or utilize wet corrosion technique to make pit 24 and slit pore 25, then finish the making of slit.
Claims (10)
1, the structure of mini optical fibre spectrometer is characterized in that: comprising: mounting groove (1), first threaded hole (3), first groove (4), second groove (5), diaphragm (6), three-flute (7), the 4th groove (8), step surface (9), inlet (10), second threaded hole (11), the 3rd screw (12), outlet (13), gland (14), imaging mirror (15), collimating mirror (16), grating (17), slit (23) are arranged on support 2 bodies; Mounting groove (1) on support (2) body, first groove (4), second groove (5), three-flute (7) and the 4th groove (8) and first threaded hole (3) axis are parallel to each other, and perpendicular to the upper surface of support (2); Intersect the axis of inlet (10) and the bottom surface of second groove (5); First groove (4) is positioned between mounting groove (1) and second groove (5), and the bottom surface of first groove (4) is relative with outlet (13), light behind grating (17) diffraction is converged be imaged on outlet (13) to locate; The upper surface and the lower surface of support (2) are parallel to each other; The side of the diaphragm (6) of close second groove (5) is parallel or crossing with the bottom surface of second groove (5), the parallel sided that the workplace of diaphragm (6) and the 4th groove (8) are located near outlet (13); Step surface (9) intersects near a side of inlet (10) with the 4th groove (8); Inlet (10) and both axis of second threaded hole (11) are parallel to each other, and perpendicular to the side of support (2) near inlet (10); Three-flute (7) is near outlet (13); The 3rd screw (12) axis and outlet (13) are parallel to each other, and perpendicular to the side of support (2) near outlet (13); The installed surface of imaging mirror (15) is placed in first groove (4), and the installed surface of collimating mirror (16) is placed in second groove (5), and the installed surface of grating (17) is placed in the 4th groove (8); Gland (14) is placed in the mounting groove (1), and slit (23) is placed in the gland (14).
2, the structure of mini optical fibre spectrometer according to claim 1, it is characterized in that: the side coplane that diaphragm (6) workplace and the 4th groove (8) are located near outlet (13), or diaphragm (6) workplace is parallel and be higher than the 4th groove (8) near the side that exports (13); Both axis coplane or antarafacial of inlet (10) and second threaded hole (11) is parallel.
3, the structure of mini optical fibre spectrometer according to claim 1 is characterized in that: comprise on the body of gland (14): through hole (18), the 4th threaded hole (19), slit groove (20), light hole (21), boss (22); The axis of through hole (18), the 4th threaded hole (19) and light hole (21) is parallel to each other and perpendicular to the lower surface of gland (14); Two through holes (18) are distributed in the both sides of boss (22), and the axis of the axis of two through holes (18) and light hole (21) is parallel to each other; Four the 4th threaded holes (19) are distributed in the both sides of through hole (18).
4, the structure of mini optical fibre spectrometer according to claim 1, it is characterized in that: gland (14) and mounting groove (1) adopt the fixedly connected or mosaic mode of second threaded hole (11) to be connected, and gland (14) is fixedly connected with slit (23) employing or inlay and be connected.
5, according to the structure of claim 1 and 4 described mini optical fibre spectrometers, it is characterized in that: slit (23) comprises pit (24), slit pore (25); Its pits (24) is positioned at the central authorities of slit (23); Slit pore (25) is positioned on the center line of slit (23).
6, the structure of mini optical fibre spectrometer according to claim 5 is characterized in that: pit (24) can be rectangle, square, circle, ellipsoidal structure.
7, the structure of mini optical fibre spectrometer according to claim 1 is characterized in that: the installed surface of first groove (4), second groove (5), three-flute (7), the 4th groove (8) adopts square groove or V-type groove.
8, the structure of mini optical fibre spectrometer according to claim 3 is characterized in that: two through holes (18) symmetry or the asymmetric both sides that are distributed in boss (22), and the axis coplane or the antarafacial of the axis of two through holes (18) and light hole (21).
9, the structure of mini optical fibre spectrometer according to claim 3 is characterized in that: four the 4th threaded holes (19) symmetry or the asymmetric both sides that are distributed in through hole (18).
10, according to the method for making of claim 1 and 5 described mini optical fibre spectrometer narrow slits, it is characterized in that:
A. at first slit body is carried out oxidation, on slit body, form silicon dioxide layer;
B. to carrying out gluing on the slit body that silicon dioxide layer is arranged among the step a, photoetching forms the band pit pattern on slit body then, then finishes the slit body of band pit pattern and photoresist layer and makes;
C. the slit body to band figure photoresist layer among the step b corrodes the silicon dioxide layer of not covered protection by photoresist with hydrofluorite, and above-mentioned photoresist layer is removed photoresist, and then forms the silicon dioxide layer of band pit pattern on slit body;
D. the slit body among the step c is carried out gluing, photoetching forms band slit pore figure on slit body, then finishes the slit body of band slit pore figure and photoresist layer and makes;
E. to utilizing inductively coupled plasma etching slit body figure in the steps d, obtain the not slit body of penetrating groove of certain depth, or utilize wet corrosion technique to make, then finish the not making of the slit body of penetrating groove;
F. the slit body to the not penetrating groove that obtains among the step e removes photoresist, and then finishes the making of the slit body that has not penetrating groove, pit pattern and silicon dioxide layer;
G. the slit body to not penetrating groove, pit pattern and silicon dioxide layer among the step f utilizes inductively coupled plasma to carry out etching, thereby obtains pit and slit pore, then finishes the making of slit; Or utilize wet corrosion technique to make pit and slit pore, then finish the making of slit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100167528A CN100434884C (en) | 2005-04-27 | 2005-04-27 | Structure of miniature fibre-optical spectrograph and its making method of slit |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100167528A CN100434884C (en) | 2005-04-27 | 2005-04-27 | Structure of miniature fibre-optical spectrograph and its making method of slit |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CNA2008101344576A Division CN101327905A (en) | 2005-04-27 | 2005-04-27 | Method for making mini optical fibre spectrometer narrow slit |
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| CN1854696A true CN1854696A (en) | 2006-11-01 |
| CN100434884C CN100434884C (en) | 2008-11-19 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100483161C (en) * | 2007-04-13 | 2009-04-29 | 中国科学院上海微***与信息技术研究所 | Slit arrangement and its preparing process |
| WO2011134149A1 (en) * | 2010-04-28 | 2011-11-03 | 台湾超微光学股份有限公司 | Slit seat module for spectrometer and spectrometer |
| WO2011134156A1 (en) * | 2010-04-29 | 2011-11-03 | 晶兆科技股份有限公司 | Optomechanical module of micro-spectrometer with conical slit and slit structure thereof |
| CN102869965A (en) * | 2010-04-28 | 2013-01-09 | 台湾超微光学股份有限公司 | Micro spectrometer and assembling method thereof |
| CN103162825A (en) * | 2013-03-26 | 2013-06-19 | 中国科学院高能物理研究所 | Slit device and four-blade slit |
| TWI457549B (en) * | 2012-10-17 | 2014-10-21 | Oto Photonics Inc | Spectrometer and optical module thereof |
| TWI506253B (en) * | 2010-04-21 | 2015-11-01 | Oto Photonics Inc | Miniaturized optical spectrometer and fabricating method using the same |
| CN107003181A (en) * | 2015-01-23 | 2017-08-01 | 台湾超微光学股份有限公司 | Spectrometer and its light input unit |
| WO2020228361A1 (en) * | 2019-05-14 | 2020-11-19 | 长光禹辰信息技术与装备(青岛)有限公司 | Manufacturing method of imaging spectrometer having convex grating |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3487242B2 (en) * | 1999-11-05 | 2004-01-13 | 株式会社島津製作所 | Microchip electrophoresis device |
| CN2784916Y (en) * | 2005-04-27 | 2006-05-31 | 中国科学院长春光学精密机械与物理研究所 | Structure of minisize optical fiber spectrometer |
-
2005
- 2005-04-27 CN CNB2005100167528A patent/CN100434884C/en not_active Expired - Fee Related
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100483161C (en) * | 2007-04-13 | 2009-04-29 | 中国科学院上海微***与信息技术研究所 | Slit arrangement and its preparing process |
| TWI506253B (en) * | 2010-04-21 | 2015-11-01 | Oto Photonics Inc | Miniaturized optical spectrometer and fabricating method using the same |
| CN102869962A (en) * | 2010-04-28 | 2013-01-09 | 台湾超微光学股份有限公司 | Slit seat module for spectrometer and spectrometer |
| CN102869965B (en) * | 2010-04-28 | 2015-05-13 | 台湾超微光学股份有限公司 | Micro spectrometer and assembling method thereof |
| CN102869965A (en) * | 2010-04-28 | 2013-01-09 | 台湾超微光学股份有限公司 | Micro spectrometer and assembling method thereof |
| CN102869962B (en) * | 2010-04-28 | 2014-05-07 | 台湾超微光学股份有限公司 | Slit seat module for spectrometer and spectrometer |
| WO2011134149A1 (en) * | 2010-04-28 | 2011-11-03 | 台湾超微光学股份有限公司 | Slit seat module for spectrometer and spectrometer |
| WO2011134156A1 (en) * | 2010-04-29 | 2011-11-03 | 晶兆科技股份有限公司 | Optomechanical module of micro-spectrometer with conical slit and slit structure thereof |
| US9746616B2 (en) | 2010-04-29 | 2017-08-29 | Oto Photonics Inc. | Optical module of micro spectrometer with tapered slit and slit structure thereof |
| CN102762966B (en) * | 2010-04-29 | 2014-08-06 | 台湾超微光学股份有限公司 | Optomechanical module of micro-spectrometer with conical slit and slit structure thereof |
| CN102762966A (en) * | 2010-04-29 | 2012-10-31 | 台湾超微光学股份有限公司 | Optomechanical module of micro-spectrometer with conical slit and slit structure thereof |
| TWI457549B (en) * | 2012-10-17 | 2014-10-21 | Oto Photonics Inc | Spectrometer and optical module thereof |
| CN103162825B (en) * | 2013-03-26 | 2014-12-17 | 中国科学院高能物理研究所 | Slit device and four-blade slit |
| CN103162825A (en) * | 2013-03-26 | 2013-06-19 | 中国科学院高能物理研究所 | Slit device and four-blade slit |
| CN107003181A (en) * | 2015-01-23 | 2017-08-01 | 台湾超微光学股份有限公司 | Spectrometer and its light input unit |
| WO2020228361A1 (en) * | 2019-05-14 | 2020-11-19 | 长光禹辰信息技术与装备(青岛)有限公司 | Manufacturing method of imaging spectrometer having convex grating |
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| CN100434884C (en) | 2008-11-19 |
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