CN1809735A - Multi-axis sensor - Google Patents

Abstract

A sensor strain causer can be made into a simple shape, and the attachment work for strain gauges is made easy. In a multiaxial sensor 1 for measuring one or more of multiaxial force, moment, acceleration, and angular acceleration, externally applied, a plurality of strain gauges R11 to R48 disposed on one plane are provided. Thereby, because the time for the attachment work for the strain gauges R11 to R48 can be shortened, the mass productivity can be improved and the cost can be reduced.

Description

Multi-axial sensor

Technical field

But the present invention relates to a kind of instrumentation at least and be applied to any one multi-axial sensor the power, torque, acceleration, angular acceleration of multiaxis on the 1st parts and the 2nd parts from the outside.

Background technology

In patent documentation 1, as shown in figure 49, put down in writing power-torque sensor 103, it has: the 1st parts 100 and the 2nd parts 101 that are made of a pair of opposed circular slab; The bridge element 102 that links the ring-type of these the 1st parts 100 and the 2nd parts 101; And be installed on foil gauge on each bridge element 102.

In this sensor 103, bridge element 102 vertically is provided with respect to the 1st parts 100 and the 2nd parts 101.On the inner face of foil gauge by bonding outer peripheral face that is installed to bridge element 102 or hole 104.To which direction how many distortion taking place owing to put on the toroidal that power between the 1st parts 100 and the 2nd parts 101 or torque make each bridge element 102 by detecting, calculates the power and the torque that apply.

Patent documentation 1: the spy opens clear 63-78032 communique (Fig. 1 ,～the 6 page of upper left hurdle of the 5th page of hurdle, bottom right the 12nd row the 14th row, the 7th page of upper left hurdle the 20th row～upper right hurdle the 12nd row)

In patent documentation 1 in the technology of record and since install foil gauge the strain transducer body, be that bridge element 102 is complicated 3D shape, so the cost of assembling processing the 1st parts 100 and the 2nd parts 101, bridge element 102 increases.Again, owing to foil gauge must be installed on the curved surface etc. of bridge element 102 three-dimensionally, so cause elongated, mass production variation of the time of installation exercise, cost up.

Summary of the invention

Therefore, the object of the present invention is to provide a kind ofly can become the strain transducer bodily form simple shape, and the multi-axial sensor that the installation exercise of foil gauge is oversimplified.

The power of the multi-axial sensor of the present invention multiaxis that to be instrumentation apply from the outside, torque, acceleration, the angular acceleration any one or a plurality of multi-axial sensors wherein, have configuration a plurality of foil gauges in one plane.

According to this formation,,, can shorten the installation exercise time so compare with the situation on the curved surface that like that foil gauge was installed to bridge element etc. in the past three-dimensionally because the configuration of each response body in one plane.Therefore, mass production is good, can reduce cost.

In multi-axial sensor of the present invention, can further have the 1st barrier film of the aforementioned foil gauge of a plurality of installations.Constitute according to this, because it is simple that the strain transducer shape of foil gauge is installed, so can reduce the cost of assembling multi-axial sensor.

In multi-axial sensor of the present invention, the configurable former central point of stating the plane of aforementioned the 1st barrier film is that the center separates on equal angles and the equidistant position of the aforementioned central point of distance.According to above-mentioned formation, can calculate by simple, calculate power, torque, acceleration, the angular acceleration of multiaxis from the variation of the resistance value of the foil gauge of each the 1st barrier film.

In multi-axial sensor of the present invention, aforementioned angle can be 90 degree.Constitute according to this, can easily calculate at the central point with the plane is the X-axis of normal coordinates of initial point and the power on the Y-axis, torque, acceleration, angular acceleration.

In multi-axial sensor of the present invention, aforementioned the 1st barrier film can be respectively along with of X-axis and positive dirction Y-axis on and the negative direction configuration of aforementioned central point as initial point.Constitute according to this, can calculate power, torque, acceleration, angular acceleration on X-axis and Y-axis easy as can.

In multi-axial sensor of the present invention, aforementioned angle can be 120 degree.Constitute according to this, owing to can calculate power, torque, acceleration, the angular acceleration of the multiaxis on 3 the 1st barrier films, so the formation of multi-axial sensor can further be oversimplified.

The thinner wall section of aforementioned the 1st barrier film of multi-axial sensor of the present invention is a toroidal, and have 8 aforementioned foil gauges, and the allocation position of aforementioned foil gauge can be the edge portion and the inner edge portion of aforementioned the 1st barrier film on the line of the central point on central point that links aforementioned the 1st barrier film and aforementioned plane, is the edge portion and the inner edge portion of aforementioned the 1st barrier film on the perpendicular line of the aforementioned line of the central spot of aforementioned the 1st barrier film.Constitute according to this, owing to can be in the 1st barrier film foil gauge be installed on the position of strain maximum, so can improve sensitivity.

Multi-axial sensor of the present invention can further have the acting body on the central portion that is arranged on aforementioned the 1st barrier film, and instrumentation acts on the acceleration and the angular acceleration of the multiaxis on this multi-axial sensor.According to this formation,, then the inertial force acting body is worked if on multi-axial sensor, apply acceleration.Therefore, acting body produces displacement, produces strain on the 1st barrier film.Can come the acceleration and the angular acceleration of instrumentation multiaxis by detecting the strain of the 1st barrier film.

Multi-axial sensor of the present invention has: the 1st parts have aforementioned the 1st barrier film; The 2nd parts have with aforementioned the 1st barrier film opposedly, and do not have the 2nd barrier film of aforementioned foil gauge; Connection shaft links opposed aforementioned the 1st barrier film and aforementioned the 2nd barrier film; Instrumentation acts on the power and the torque of the multiaxis between aforementioned the 1st parts and aforementioned the 2nd parts.According to this formation, foil gauge is only installed in one plane, get final product the power and the torque of instrumentation multiaxis.

Multi-axial sensor of the present invention has: the 1st parts have aforementioned the 1st barrier film; The 2nd parts have the 2nd barrier film, and described the 2nd barrier film and aforementioned the 1st barrier film are opposed, and a plurality of aforementioned foil gauge that is configured on the plane is installed; Connection shaft links opposed aforementioned the 1st barrier film and aforementioned the 2nd barrier film; Instrumentation acts on the power and the torque of the multiaxis between aforementioned the 1st parts and aforementioned the 2nd parts.Constitute according to this, independently exist in 2 systems because the electric signal of the component of identical power or torque is shown, thus sensor can be exported two-foldization, thus realize high precision int.

In multi-axial sensor of the present invention, the aforementioned foil gauge of aforementioned the 1st parts and the aforementioned foil gauge of aforementioned the 2nd parts are configurable to be on the centrosymmetric position at the focus point with multi-axial sensor.Constitute according to this, owing to can handle on a 50-50 basis the electric signal of 2 systems, so precision is higher.

The some output signal of multi-axial sensor of the present invention in each output of the aforementioned foil gauge of the aforementioned foil gauge of aforementioned the 1st parts and aforementioned the 2nd parts can adopt another output signal outside the scope of regulation the time.According to this formation,, the utilization of multi-axial sensor is proceeded because certain reason foil gauge takes place to utilize other foil gauges when unusual.Therefore, can construct the high control system of reliability.

In multi-axial sensor of the present invention, aforementioned the 1st barrier film that is configured on the aforementioned plane can be 1.According to this formation, owing to can a plurality of the 1st barrier films be set on a plane, so can make the multi-axial sensor miniaturization.Again, owing to can make the simple shapeization of multi-axial sensor, so can reduce cost required in the cut.

The former central point of stating the plane of multi-axial sensor of the present invention is that the center separates on equal angles and the equidistant position of the aforementioned central point of distance, further have the acting body that is provided with in mode, measure the acceleration and the angular acceleration that act on the multiaxis on this multi-axial sensor with aforementioned the 1st barrier film butt.According to this formation, if apply acceleration on multi-axial sensor, then inertial force works to acting body.Therefore, acting body produces displacement, produces strain on the 1st barrier film.Can come the acceleration and the angular acceleration of instrumentation multiaxis by detecting the strain of the 1st barrier film.

Multi-axial sensor of the present invention has: the 1st parts have aforementioned the 1st barrier film; The 2nd parts have the 2nd barrier film of not having aforementioned foil gauge; Acting body links aforementioned the 1st barrier film and aforementioned the 2nd barrier film; Aforementioned the 1st parts and aforementioned the 2nd parts dispose in the opposed mode of central point of aforementioned the 2nd barrier film of the central point of aforementioned the 1st barrier film of aforementioned the 1st parts and aforementioned the 2nd parts, and, by aforementioned acting body, to be that the center separates equal angles and connected to each other apart from the equidistant position of aforementioned central point with each aforementioned central point of aforementioned the 1st barrier film and aforementioned the 2nd barrier film, instrumentation acts on the power and the torque of the multiaxis between aforementioned the 1st parts and aforementioned the 2nd parts.According to this formation,, get final product the power and the torque of instrumentation multiaxis by foil gauge only is installed on the plane.

Multi-axial sensor of the present invention has: the 1st parts have aforementioned the 1st barrier film; The 2nd parts have the 2nd barrier film, and described the 2nd barrier film is equipped with a plurality of aforementioned foil gauge that is configured on the plane; Acting body links aforementioned the 1st barrier film and aforementioned the 2nd barrier film; Aforementioned the 1st parts and aforementioned the 2nd parts dispose in the opposed mode of central point of aforementioned the 2nd barrier film of the central point of aforementioned the 1st barrier film of aforementioned the 1st parts and aforementioned the 2nd parts, and, by aforementioned acting body, to be that the center separates equal angles and connected to each other apart from the equidistant position of aforementioned central point with each aforementioned central point of the aforementioned the 1st and the 2nd barrier film, instrumentation acts on the power and the torque of the multiaxis between aforementioned the 1st parts and aforementioned the 2nd parts.Constitute according to this, independently exist in 2 systems because the electric signal of the component of identical power or torque is shown, thus sensor can be exported two-foldization, thus realize high precision int.

In multi-axial sensor of the present invention, the aforementioned foil gauge of aforementioned the 1st parts and the aforementioned foil gauge of aforementioned the 2nd parts are configurable to be on the centrosymmetric position at the focus point with multi-axial sensor.Constitute according to this, owing to can handle on a 50-50 basis the electric signal of 2 systems, so precision is higher.

In multi-axial sensor of the present invention, the aforementioned foil gauge of aforementioned the 1st parts and the aforementioned foil gauge of aforementioned the 2nd parts each output in some output signals the regulation scope outside the time, can adopt other output signal.According to this formation,, the utilization of multi-axial sensor is proceeded because certain reason foil gauge takes place to utilize other foil gauges when unusual.Therefore, can construct the high control system of reliability.

In multi-axial sensor of the present invention, aforementioned angle can be 90 degree.Constitute according to this, can easily calculate at the central point with the 1st barrier film is the X-axis of normal coordinates of initial point and the power on the Y-axis, torque, acceleration, angular acceleration.

In multi-axial sensor of the present invention, aforementioned the 1st barrier film respectively along with aforementioned central point as the X-axis of initial point and positive dirction on the Y-axis and negative direction configuration.Constitute according to this, can calculate at the central point with the 1st barrier film easy as can is the X-axis of normal coordinates of initial point and the power on the Y-axis, torque, acceleration, angular acceleration.

In multi-axial sensor of the present invention, aforementioned angle can be 120 degree.According to this formation, owing on the 1st barrier film, form 3 acting bodies, thus can calculate power, torque, acceleration, the angular acceleration of multiaxis, so the structure of multi-axial sensor is further oversimplified.

In multi-axial sensor of the present invention, the allocation position of aforementioned foil gauge is: on the line that the central point with the central point of the part corresponding with aforementioned acting body on the aforementioned plane and aforementioned the 1st barrier film links, be the limit portion of aforementioned acting body; On the perpendicular line to the aforementioned line in the central point of the part corresponding on the aforementioned plane, be the limit portion of aforementioned acting body with aforementioned acting body; Separating equal angles and on aforementioned central point equidistant position lighting from the center of aforementioned the 1st barrier film, is some in the limit portion of the limit portion of aforementioned acting body and aforementioned the 1st barrier film.Constitute according to this, owing to foil gauge can be installed on the position of strain maximum in the 1st barrier film, so can improve sensitivity.Again, compare with the situation that a plurality of the 1st barrier films are set on a plane, available less foil gauge is calculated power, torque, acceleration, the angular acceleration of multiaxis.Therefore, can cut down the cost of foil gauge and the cost of distribution.

In multi-axial sensor of the present invention, aforementioned foil gauge can be pressure drag component.Pressure drag component is compared the coefficient of strain with foil strain gauge big more than 10 times, with the situation of utilizing foil strain gauge mutually specific sensitivity can improve more than 10 times.

In multi-axial sensor of the present invention, aforementioned foil gauge is the foil gauge that is formed by chromium oxide film on dielectric film.Constitute according to this, compare the coefficient of strain with general foil strain gauge big more than 10 times, so specific sensitivity can be big more than 10 times mutually with the situation of utilizing general foil strain gauge.

Description of drawings

Figure 1A is the figure that describes according to the multi-axial sensor of the 1st embodiment of the present invention, is the vertical view of the configuration of the foil gauge when describing to have an X-rayed from the 2nd component side along Z-direction.

Figure 1B is the figure that describes according to the multi-axial sensor of the 1st embodiment of the present invention, is central vertical profile front view.

Fig. 2 is the stereographic map of expression orthogonal axis.

Fig. 3 is the central vertical profile front view of the displacement of expression when multi-axial sensor applied power Fx.

Fig. 4 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied power Fx.

Fig. 5 is the central vertical profile front view of the displacement of expression when multi-axial sensor applied power Fz.

Fig. 6 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied power Fz.

Fig. 7 is the central vertical profile front view of the displacement of expression when multi-axial sensor applied torque M x.

Fig. 8 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied torque M x.

Fig. 9 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied torque M z.

Figure 10 is the circuit diagram of an example of the bridge diagram of expression multi-axial sensor.

Figure 11 is the central vertical profile front view of describing according to the multi-axial sensor of the 2nd embodiment.

Figure 12 is the circuit diagram of expression according to an example of the bridge diagram of the 3rd embodiment.

Figure 13 is the central vertical profile front view of describing according to the multi-axial sensor of the 4th embodiment.

Figure 14 is that expression is according to the amplifier circuit of the multi-axial sensor of the 4th embodiment and the block diagram of deterministic process.

Figure 15 is the vertical view of describing from according to the configuration of the 2nd component side of the multi-axial sensor of the 5th embodiment foil gauge when Z-direction is had an X-rayed.

Figure 16 is the circuit diagram of an example of the bridge diagram of expression multi-axial sensor.

Figure 17 is the central vertical profile front view of the displacement of expression when multi-axial sensor applied power Fy.

Figure 18 is the central vertical profile front view of the displacement of expression when multi-axial sensor applied power Fz.

Figure 19 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied power Fz.

Figure 20 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied torque M z.

Figure 21 is the central vertical profile front view of the displacement of expression when multi-axial sensor applied torque M z.

Figure 22 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied torque M z.

Figure 23 is the central vertical profile front view of describing according to the multi-axial sensor of the 6th embodiment.

Figure 24 is the vertical view of describing along the configuration of the foil gauge of the opposite direction of Z axle perspective during according to the multi-axial sensor of the 6th embodiment.

Figure 25 is the central vertical profile front view of the displacement of expression when multi-axial sensor applied acceleration ax.

Figure 26 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied acceleration a x.

Figure 27 is the central vertical profile front view of the displacement of expression when multi-axial sensor applied acceleration az.

Figure 28 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied acceleration az.

Figure 29 is the central vertical profile front view of the displacement of expression when multi-axial sensor applied angular acceleration y.

Figure 30 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied angular acceleration y.

Figure 31 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied angular acceleration z.

Figure 32 is the circuit diagram of an example of the bridge diagram of expression multi-axial sensor.

Figure 33 is the circuit diagram of expression according to an example of the bridge diagram of the 7th embodiment.

Figure 34 is the vertical view of expression according to the multi-axial sensor of the 8th embodiment.

Figure 35 is the central vertical profile front view of describing according to the multi-axial sensor of the 8th embodiment.

Figure 36 is the central vertical profile front view of describing according to the multi-axial sensor of the 9th embodiment.

Figure 37 is the vertical view of describing from according to the configuration of the 2nd component side of the multi-axial sensor of the 9th embodiment foil gauge when Z-direction is had an X-rayed.

Figure 38 is the central vertical profile front view of the displacement of expression when multi-axial sensor applied power Fx.

Figure 39 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied power Fx.

Figure 40 is the central vertical profile front view of the displacement of expression when multi-axial sensor applied power Fz.

Figure 41 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied power Fz.

Figure 42 is the central vertical profile front view of the displacement of expression when multi-axial sensor applied torque M x.

Figure 43 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied torque M x.

Figure 44 is the vertical view of variation of the resistance value of the foil gauge of expression when multi-axial sensor applied torque M z.

Figure 45 is the circuit diagram of an example of the bridge diagram of expression multi-axial sensor.

Figure 46 is the circuit diagram of an example of the virtual circuit of expression multi-axial sensor.

Figure 47 is the vertical view of describing from according to the configuration of the 2nd component side of the multi-axial sensor of the 10th embodiment foil gauge when Z-direction is had an X-rayed.

Figure 48 is the circuit diagram of expression according to an example of the bridge diagram of the 10th embodiment.

Figure 49 is a stereographic map of describing multi-axial sensor in the past.

Reference numeral

1 multi-axial sensor

2 the 1st parts

3 the 2nd parts

4,5,6,7 barrier films

8 central shafts

10 pressure drag components

16,17,18,19 acting bodies

R11～R48, R111～R148 foil gauge

Embodiment

Below, just preferred embodiment of the present invention, describe with reference to accompanying drawing.Figure 1A is a vertical view of describing from the 2nd parts 3 sides along Z-direction the configuration of the foil gauge when having an X-rayed according to the multi-axial sensor of the 1st embodiment of the present invention, and Figure 1B is the central vertical profile front view of multi-axial sensor 1.In Figure 1A and Figure 1B, multi-axial sensor 1 instrumentation puts on any one the power, torque, acceleration, angular acceleration of the multiaxis on the 1st parts 2 and the 2nd parts 3 from the outside.This multi-axial sensor 1 has a plurality of foil gauge R11～R48 that are disposed on the plane.The 1st parts 2 and the 2nd parts 3 are formed by the flange of disc-shape.Foil gauge R11～R48 only is installed on the table side 2a of the 1st parts 2.

At this, define the XYZ three-dimensional system of coordinate for convenience of explanation, with reference to this coordinate system each parts is configured explanation.In Figure 1B, the center with the table side 2a of the 1st parts 2 is defined as initial point O respectively, and right horizontal direction is defined as X-axis, perpendicular to paper nearby direction be defined as Y-axis, following vertical direction is defined as the Z axle.That is, the face side 2a of the 1st parts 2 regulation XY plane, the Z axle passes the center of the 1st parts 2.

The 1st parts 2 and the 2nd parts 3 have opposed four barrier films 4,5,6,7 respectively.Each barrier film 4～7 is a thin wall shape.The central portion of each barrier film 4～7 is provided with central shaft 8.The central shaft 8 of the barrier film 4～7 of subtend links by bolt 9 each other mutually.Thus, the 1st parts 2 and the 2nd parts 3 form integrated.Again, each barrier film 4～7 is owing to having central shaft 8, so thinner wall section becomes toroidal.

It is that the center separates equal angles and on the equidistant position of initial point O that the barrier film 4～7 of the 1st parts 2 is configured in initial point O.At this, separate 90 degree ground configurations.And then the barrier film 4～7 of the 1st parts 2 is positive dirction on X-axis and the Y-axis and negative direction configuration respectively.Again, the barrier film 4～7 of the 2nd parts 3 disposes in barrier film 4～7 opposed modes with the 1st parts 2.This multi-axial sensor 1 works as 3 the power that is used to measure three-dimensional quadrature with around its 6 power sense sensors of torque.In Fig. 2, represent the direction of X-axis, Y-axis, Z axle and with respect to torque M x, the My of each, the direction of Mz.

Each barrier film 4～7 of the 1st parts 2 has 8 foil gauges.The allocation position of foil gauge R11～R48 on each of the X-axis of the 1st parts 2 and Y-axis, is the edge portion and the inner edge portion of the thin-walled portion of barrier film 4～7 shown in Figure 1A.That is, foil gauge R11～R48 sticks on the position that maximum strain takes place in the multi-axial sensor 1.In addition, the diagram of the lead-in wire of foil gauge is omitted.

As foil gauge R11～R48, use metal forming foil gauge or tinsel foil gauge.Foil gauge R11～R48 is as a kind of resistive element, is to stick on the position that produces strain and the detecting element that uses.Can be by the generation of strain, resistance value changes, thereby measures strain stress.In general, have following ratio characteristic: with respect to the strain stress that stretching causes, it is big that resistance value becomes, and with respect to the strain stress that compression causes, resistance value diminishes.Again, usually, material uses in proportional elasticity territory with respect to strain stress at stress σ.In the present embodiment also as the parts that in the elasticity territory of the 1st parts 2, use.

Each barrier film 4～7 is made big or small identical with thickness.Therefore, rigidity is identical.Thus, for example shown in Figure 3, when the 1st parts the 2, the 2nd parts 3, central shaft 8 are carried out displacement in the mode on four limits that constitute parallelogram as a whole, owing on each barrier film 4～7, be created on foil gauge R11～R48, so can detect power and torque accurately with the corresponding strain of the size and Orientation of power.In addition,, realize the protection of foil gauge, jump can be set on the installation site in order to make the installation exercise summary of foil gauge.Also can on the part beyond the barrier film 4～7, form the screw that usefulness is installed on miscellaneous part again.Again, the 1st parts 2 and the 2nd parts 3 link by bolt 9 each other with center pit 8, but also can not use bolt 9, and directly the one cut forms, and also can central shaft 8 be engaged with each other by welding.

Then, the principle along detection power and torque on each direction of principal axis is described.Below, fix the 1st parts 2, the 2nd parts 3 are applied power or torque.

State when Fig. 3 represents to apply the power Fx of X-direction.At this moment, all barrier films 4～7 of the 1st parts 2 and the 2nd parts 3 carry out displacement as shown like that, detect strain.The variation of expression foil gauge R11～R48 in Fig. 4.The increase of (+) expression resistance value among the figure, the minimizing of (-) expression resistance value.The foil gauge resistance value that any symbol does not all have does not almost change.

Then, when applying the power Fy of Y direction, 90 degree that stagger of the state when being thought of as the power Fx that applies X-direction get final product, so in this omission.

The state of the multi-axial sensor 1 when expression applies the power Fx of Z-direction in Fig. 5.The variation of expression each foil gauge at this moment in Fig. 6.

The state of the multi-axial sensor 1 when expression applies the torque M x of X-axis in Fig. 7.The variation of expression each foil gauge at this moment in Fig. 8.

Then, when applying the torque M y of Y-axis, the state when applying X-axis torque M x of being thought of as 90 degree that stagger get final product, so in this omission.

When applying the torque M z of Z axle, making the 2nd parts 3 is the center rotation with the Z axle.The variation of expression each foil gauge at this moment in Fig. 9.

Expression foil gauge R11～R48 is with respect to each the above-mentioned power and the variation of torque in table 1.In the table, the increase of+expression resistance value, the minimizing of-expression resistance value does not have the symbolic representation resistance value almost not change.Again, under the power in the opposite direction or the situation of torque, opposite in sign.

[table 1]

Power	R11	R12	R13	R14	R15	R16	R17	R18	R21	R22	R23	R24	R25	R26	R27	R28
																	Fx	-	+	-	+					-	+	-	+
Fy					-	+	-	+					-	+	-	+
																	Fz	-	+	+	-	-	+	+	-	-	+	+	-	-	+	+	-
Mx									+	-	-	+	+	-	-	+
																	My	+	-	-	+	+	-	-	+
Mz					-	+	-	+	-	+	-	+

Power	R31	R32	R33	R34	R35	R36	R37	R38	R41	R42	R43	R44	R45	R46	R47	R48
																	Fx	-	+	-	+					-	+	-	+
Fy					-	+	-	+					-	+	-	+
																	Fz	-	+	+	-	-	+	+	-	-	+	+	-	-	+	+	-
Mx									-	+	+	-	-	+	+	-
																	My	-	+	+	-	-	+	+	-
Mz					+	-	+	-	+	-	+	-

Utilize above character,, can detect each power and torque by the calculation of numerical expression 1.

[several 1]

Fx＝(R22+R42)-(R23+R43)

Fy＝(R16+R36)-(R17+R37)

Fz＝(R13+R26+R32+R47)-(R11+R28+R34+R45)

Mx＝(R25+R46)-(R27+R48)

My＝(R14+R33)-(R12+R31)

Mz＝(R18+R24+R 35+R41)-(R15+R21+R38+R44)

In this calculation,,, again, be suitable for being transformed into voltage, situation about performing calculations with the OP amplifier so can not cause waste because foil gauge R11～R48 uses one by one.Again, strengthen for textural rigidity, Fz and Mz that sensitivity reduces, because when distributing all the other 2 times totally 8 foil gauges, so can improve sensitivity.In addition, much less calculation method is not limited to numerical expression 1.

Again, the calculation of numerical expression 1 can use known or new method that each resistance value is transformed into voltage, performs calculations with the OP amplifier, or uses the AD transducer and use microcomputer or computing machine performs calculations.

Perhaps, also can constitute bridge diagram as shown in figure 10 and decide voltage or decide electric current, detection power and torque.And then, also can constitute half-bridge, the number that reduces foil gauge detects (not shown).In addition, much less the combination of foil gauge is not limited in situation shown in Figure 10.

In addition, in the present embodiment, each barrier films 4～7 of the 1st parts 2 is configured on X-axis or the Y-axis, but is not limited to this.That is, the multi-axial sensor 1 of variable same configuration direction is set, each barrier film 4～7 of the 1st parts 2 is not positioned on the axle.In this case, do not work, and become 5 axle sensors as 6 axle sensors.Again, use as 6 axle sensors in the present embodiment, but be not limited to this, 2 axle sensors that also can be used as the power that for example only detects X-axis and Y-axis 2 directions use.

Then, about the 2nd embodiment of the present invention, describe with reference to Figure 11.As shown in figure 11, the 2nd embodiment uses pressure drag component 10 as foil gauge.Utilize semiconductor fabrication process, the pressure drag component 10 that 1 barrier film is needed is integrated on 1 piece of semiconductor Si wafer 11, and tube core is welded on the barrier film and fixes.Pressure drag component 10 is compared the coefficient of strain with foil strain gauge big more than 10 times, with the situation of utilizing foil strain gauge mutually specific sensitivity can improve more than 10 times.

Then, with regard to the 3rd embodiment of the present invention, describe with reference to Figure 12.As the structure of multi-axial sensor 1, the 3rd embodiment is the same with the 1st embodiment, but the formation of electric bridge is out of shape.As shown in figure 12, each electric bridge by linearity 4 foil gauges being disposed on each barrier film 4～7 constitute.Thus, the situation occurred of the strain of each barrier film 4～7 is directly exported as 8 voltages.

In this case, can perform calculations, calculate power and torque according to numerical expression 2.

[several 2]

Fx＝V4-V2

Fy＝V3-V1

Fz＝V5+V6+V7+V8

Mx＝V8-V6

My＝V7-V5

Mz＝V1+V2+V3+V4

The calculation of numerical expression 2 can use known or new method that each resistance value is transformed into voltage, performs calculations with the OP amplifier, or uses the AD transducer, and use microcomputer or computing machine to perform calculations.

Then, about the 4th embodiment of the present invention, describe with reference to Figure 13 and Figure 14.The 4th embodiment is the same with the 1st embodiment, and foil gauge R11～R48 is installed on the 1st parts 2, and as shown in figure 13, with the point-symmetric position of focus point O ' on foil gauge R111～R148 is installed on the 2nd parts 3.According to so mechanical symmetry, if on multi-axial sensor 1, apply power or torque, the then strain of the corresponding symmetry of kind of generation and power on each barrier film 4～7.That is, utilize following characteristics: because the foil gauge of multi-axial sensor 1 of the present invention is configured on the plane, so 2 groups of foil gauge R11～R48, R111～R148 can be configured on the position of symmetry.

Foil gauge R11～R48 constitutes the circuit the same with Figure 10, and output is corresponding to power Fx, Fy, Fz and torque M x, My, voltage Vfx1, the Vfy1 of Mz, Vfz1, Vmx1, Vmy1, Vmz1.Also constitute the circuit the same with Figure 10 about foil gauge R111～R148, output is corresponding to power Fx, Fy, Fz and torque M x, My, voltage Vfx2, the Vfy2 of Mz, Vfz2, Vmx2, Vmy2, Vmz2.Carry out the setting on the circuit in advance, make that under the situation that applies certain power or torque, the increase and decrease of the signal of voltage Vfx1, Vfy1, Vfz1, Vmx1, Vmy1, Vmz1 is consistent with the increase and decrease of the signal of voltage Vfx2, Vfy2, Vfz2, Vmx2, Vmy2, Vmz2.

As described above, in the present embodiment, the electric signal that the component of identical power or torque is shown has an independent existence in 2 systems, realizes the two-foldization of sensor output.

Figure 14 is the electric bridge signal that is used for detecting each power or torque, is an example of the amplifier circuit 12 of Vfx1, Vfy1, Vfz1, Vmx1, Vmy1, Vmz1, Vfx2, Vfy2, Vfz2, Vmx2, Vmy2, Vmz2 amplification.At this, in the scope of rated load, adjust the feasible magnitude of voltage that becomes 25～75% scopes of supply voltage.And then, the output of this amplifier is imported in the AD of microcontroller 13 conversion mouth 14.

In general and since the output of the circuit that constitutes by foil gauge to be changed to several mV small like that, so must be with amplification such as amplifiers to more than hundreds of times.Promptly use highly sensitive pressure drag component 10, output sensitivity also is about 10 times of metal forming foil gauge.Thus, if the foil gauge that constitutes bridge diagram then can destroy the balance of amplifier output because of certain reason broken string, cause being biased near the lower limit or the upper limit of supply voltage.

Therefore, utilize signal of sensor, carry out following processing as shown in figure 14 by two-foldization.

Low side of the supply voltage of amplifier is made as Vee, and higher side is made as Vcc.A less side of the voltage that multi-axial sensor 1 is considered to not export in common usable range is made as VL, and a bigger side is made as VH.Vee＜VL, VH＜Vcc, VL and VH are the value after the AD conversion.In addition, VL and VH also can with the characteristic of multi-axial sensor 1 matchingly, according to each output decision.

Under the situation of the power Fx of X-direction, judge whether satisfy VLVfx1≤VH, VL≤Vfx2≤VH (S1, S2) with microcontroller.If the both is (S1: be, S2: be) in scope, then the signal of preferred Vfx1 adopts (S3) as control signal.

If Vfx1 is (S1: not), be judged as output abnormality and confirm Vfx2 (S4) outside scope.If Vfx2 (S2: be) in scope then replaces Vfx1 that Vfx2 is handled as the signal of power Fx.If Vfx2 is scope outside (S2: deny) also, the output of the two is judged as unusually, abnormality processing (S5) such as stops very much.

About power and the torque beyond the Fx, also handle equally.

According to present embodiment, by with the output signal two-foldization, even a side output also can utilize the opposing party's output resume to carry out the utilization of multi-axial sensor 1 because the broken string of foil gauge etc. cause output abnormality.Thus, can construct the high control system of reliability.

Then, about the 5th embodiment of the present invention, describe with reference to Figure 15.Figure 15 is the vertical view of the configuration of the foil gauge R11～R38 when describing from the 2nd parts 3 sides along the Z direction perspective according to the multi-axial sensor 1 of the 5th embodiment.In the 5th embodiment, the 1st parts 2 and the 2nd parts 3 have opposed 3 barrier films 4～6 respectively.This multi-axial sensor 1 is for 3 power being used to measure three-dimensional quadrature with around its 6 power sense sensors of torque.

It is that the center separates equal angles that the barrier film 4～6 of the 1st parts 2 is configured in initial point O, and on the equidistant position of initial point O.At this, be configured to separate 120 degree.Again, the barrier film 4～6 of the 2nd parts 3 disposes in barrier film 4～6 opposed modes with the 1st parts.Each barrier film 4～6 of the 1st parts 2 has 8 foil gauges.On the allocation position of the foil gauge R11～R48 on the 2a of the table side of the 1st parts 2 straight line for the central point that linking barrier film 4～6 and initial point O is the edge portion and the inner edge portion of barrier film 4～6, and is the edge portion and the inner edge portion of barrier film 4～6 on the perpendicular line of the above-mentioned straight line of the central spot of barrier film 4～6.

Specifically, foil gauge R11～R14 is configured in by initial point O and is on the line segment OC of 120 degree to the X-axis positive dirction from the negative direction of Y-axis.Foil gauge R 31～R34 is configured in by initial point O and is on the line segment OD of 120 degree to the X-axis negative direction from the negative direction of Y-axis.Again, foil gauge R15～R18 is configured on the direction with line segment OC quadrature.Foil gauge R35～R38 is configured on the direction with line segment OD quadrature.Foil gauge R21～R28 is the same with the 1st embodiment.

Again, can or equally with the 1st embodiment use the metal forming foil gauge as foil gauge, or the same pressure drag component 10 that uses with the 2nd embodiment.Remaining formation is the same with the 1st embodiment, so omit explanation.

According to present embodiment, the principle that detects power and torque by each direction of principal axis is described.Below, the 1st parts 2 are fixing, the 2nd parts 3 are applied power or torque.The foil gauge group who forms by 4 foil gauges that are configured to linearity the column direction along configuration applying stretch and the situation of the strain of compression under, with respect to the rate of change maximum of the resistance value of strain, sensitivity is the highest.6 foil gauge groups are arranged as shown in figure 15, the direction difference of sensitivity maximum separately.But,, then can detect the power and the torque of 6 components if consider each foil gauge group's sensitivity is resolved into along the vector of X, Y, Z-direction.

With respect to foil gauge R11～R38 shown in Figure 15, constitute bridge diagram shown in Figure 16 and apply and decide voltage or decide electric current.Thus, available foil gauge R15～R18 detects from the X-axis positive dirction and is the component of force of 60 degree directions as voltage V1 to the Y-axis negative direction, available foil gauge R25～R28 detects from the X-axis positive dirction and is 90 component of forces of spending directions as voltage V2 to the Y-axis negative direction, and available foil gauge R35～R38 detects from the X-axis positive dirction and is the component of force of 300 degree directions as voltage V3 to the Y-axis negative direction.Again, available R11～R14, R25～R28, R31～R34 detect the power of Z-direction at center of each barrier film 4～6 respectively as V4, V5, V6.

At this,, derive numerical expression 3 if the node voltage among Figure 16 of each bridge diagram is made as e1～e12.

[several 3]

V1＝e1-e2

V2＝e3-e4

V3＝e5-e6

V4＝e7-e8

V5＝e9-e10

V2＝e11-e12

Wherein, about V1, V2, V3, can resolve into the vector of X-axis and Y-axis component, and as numerical expression 4, represent.

[several 4]

V1＝(V1X、V1Y)＝(V1/2、V1·3/2)

V2＝(V2X、V2Y)＝(V2、0)

V3＝(V3X、V3Y)＝(V3/2、V3·3/2)

Therefore, if will act on the Fy that makes a concerted effort to be made as that makes a concerted effort to be made as Fx, Y direction of the X-direction on the 2nd parts 3, then can as numerical expression 5, detect.

[several 5]

FX＝(V1/2)+V2+(V3/2)

FY＝(V1·3/2)+(V3·3/2)

The state of the displacement of the barrier film 5 of expression when the Y-axis negative direction applies power Fy in Figure 17.At this moment, foil gauge R25 and R27 produce the strain of draw direction, and it is big that resistance value becomes, and foil gauge R26 and R28 produce the strain of compression direction, and resistance value diminishes.With the foil gauge R21～R24 of power Fy orthogonal directions configuration on produce strain hardly.

On remaining two barrier film 4,6, also produce and same displacement and the strain of Y direction.But, because the configuration direction of foil gauge R11～R18, R31～R38 is different with X-axis or Y direction, so the variation of the resistance value of each foil gauge is different with foil gauge R21～R28.Because foil gauge to be pasting along the mode of column direction sensitivity maximum of configuration, so direction by each foil gauge group and power Fy of foil gauge R11～R18, foil gauge R31～R38, be that the angle that Y-axis is determines sensitivity.

About the power Fx of X-direction too.Thus, the power of X-axis and Y direction can be calculated by numerical expression 5.

The state of the displacement of the barrier film 5 when then, in Figure 18, being illustrated in the power Fz that applies Z-direction.The variation of expression foil gauge R11～R38 in Figure 19.In bridge diagram shown in Figure 16, V1, V2, V3 and changes in resistance are cancelled out each other and are not changed.V4, V5, V6 change corresponding to the power Fz of Z-direction.Therefore, power Fz can obtain by numerical expression 6.

[several 6]

Fz＝V4+V5+V6

Then, the 2nd parts 3 are being applied under the situation of torque M x, applying with the power of X-axis as the center rotation.Therefore, on each barrier film 4～6, apply the power F2 of Z-direction.At this, in Figure 20, torque M x plays barrier film 4,6 is pushed from accompanying drawing table side direction inboard, and the effect that barrier film 5 is stretched to the table layback from the inboard of accompanying drawing.If will be from initial point 0 to barrier film distance 4～6 the center be made as R, then the center from barrier film 4,6 is R/2 to the distance the X-axis, is R from the center of barrier film 5 to the distance the X-axis.Therefore, the torque M x around X-axis represents with numerical expression 7.

[several 7]

Mx＝(V4·R/2)-(V5·R)+(V6·R/2)

Then, the 2nd parts 3 are being applied under the situation of torque M y, owing to the center from barrier film 4,6 is √ 3R/2 to the distance the Y-axis, so represent with numerical expression 8 around the torque M y of Y-axis.

[several 8]

My＝(V4·3R/2)+V5·0-(V6·3R/2)

＝3R/2(V4-V6)

The state of the displacement of the barrier film 4～6 when then, in Figure 21, being illustrated in the torque M z that applies around the dextrorotation of Z axle.The variation of expression foil gauge R11～R38 in Figure 22.Foil gauge group R15～R18, R21～R24, R35～R38 are along the highest direction generation strain of sensitivity, and the V1 of Figure 16, V2, V3 maximum sensitivity ground change.

On the other hand, because foil gauge group R11～R14, R25～R28, R31～R34 are the orientation of the sensitivity minimum of foil gauge, so the V4 of Figure 16, V5, V6 change hardly.Therefore, torque M z represents with numerical expression 9.

[several 9]

Mz＝V1+V2+V3

Can perform calculations by the numerical expression 5～numerical expression 9 that illustrates more than utilizing, obtain power and torque.For example output voltage V 1～V6 can be carried out the AD conversion, use microcontroller or computing machine to perform calculations.

At this, to be made as Vfx, Vfy, Vfz, Vmx, Vmy, Vmz towards power Fx, Fy, Fz and torque M x, the My of multi-axial sensor 1, the output voltage of Mz, when the actual load that applies is made as Fx, Fy, Fz, Mx, My, Mz on the multi-axial sensor 1, become the relation of numerical expression 10.

[several 10]

$\left[\begin{array}{c}\mathrm{Vfx}\\ \mathrm{Vfy}\\ \mathrm{Vfz}\\ \mathrm{Vmx}\\ \mathrm{Vmy}\\ \mathrm{Vmz}\end{array}\right]=\left[A\right]\left[\begin{array}{c}\mathrm{Fx}\\ \mathrm{Fy}\\ \mathrm{Fz}\\ \mathrm{Mx}\\ \mathrm{My}\\ \mathrm{Mz}\end{array}\right]$

[A] is the calibration ranks

At this, multiply by [A] if begin both sides from a left side ^-1, then become numerical expression 11.

[several 11]

$\left[\begin{array}{c}\mathrm{Fx}\\ \mathrm{Fy}\\ \mathrm{Fz}\\ \mathrm{Mx}\\ \mathrm{My}\\ \mathrm{Mz}\end{array}\right]={\left[A\right]}^{-1}\left[\begin{array}{c}\mathrm{Vfx}\\ \mathrm{Vfy}\\ \mathrm{Vfz}\\ \mathrm{Vmx}\\ \mathrm{Vmy}\\ \mathrm{Vmz}\end{array}\right]$

Thus, can obtain correct 6 power and torque from output voltage.

Then, about the 6th embodiment of the present invention, describe with reference to Figure 23 and Figure 24.Figure 23 is the central vertical profile front view according to the multi-axial sensor 1 of the 6th embodiment, and Figure 24 is a vertical view of describing the configuration of the foil gauge R11～R48 along with Z axle reverse direction perspective multi-axial sensor 1 time.In the 6th embodiment, multi-axial sensor 1 is 1 disc-shape as a whole, has 4 barrier films 4～7.This multi-axial sensor 1 is for the 3 axial acceleration that are used to measure three-dimensional quadrature with around its 6 axle sensors of angular acceleration.Again, with the position except that barrier film 4～7 of multi-axial sensor 1, for example edge portion is fixed on the determination object 15.

Barrier film 4～7 disposes with the 1st embodiment the samely.Just different with the 1st embodiment, there is not opposed barrier film 4～7.The central portion of each barrier film 4～7 is provided with and bears the acting body 16,17,18,19 that acceleration carries out displacement.One end of acting body 16～19 is fixed on the barrier film 4～7, and the other end becomes free end.Again, acting body 16～19 all is same shape.

Again,, can or equally with the 1st embodiment use the metal forming foil gauge as foil gauge R11～R48, or the same pressure drag component that uses with the 2nd embodiment.Remaining formation is the same with the 1st embodiment, so omit explanation.

In addition, in the present embodiment, in Figure 23, the central point of line segment that will link the center of gravity G of the center of gravity G of acting body 16 and acting body 18 respectively is defined as initial point O, right horizontal direction is defined as X-axis, perpendicular to paper nearby direction be defined as Y-axis, following vertical direction is defined as the Z axle.

According to present embodiment, the method by each direction of principal axis sense acceleration and angular acceleration is described.

Under the situation of the acceleration ax that bears X-direction, as shown in figure 25, acting body 16～19 is subjected to displacement, and produces strain on each barrier film 4～7.At this moment, foil gauge R11～R48 as shown in figure 26, only the foil gauge of arranging along X-direction changes.

Again, under the situation of the acceleration ay that bears Y direction, owing to only depart from 90 degree with the situation of the acceleration ax that bears X-direction, so omit explanation.

Then, under the situation of the acceleration az that bears Z-direction, as shown in figure 27, acting body 16～19 is subjected to displacement.Thus, foil gauge R11～R48 becomes as shown in figure 28.

And then, consider about doing in order to each situation as the angular acceleration at center.The acceleration vertical with the barrier film 4～7 on acting on acting body 16～19 is made as az1, az2, az3, az4.If doing in order to Y-axis is the angular acceleration y of rotation center, then as shown in figure 29, effect acceleration az1, az3 on acting body 16,18 and produce displacement produce strain on barrier film 4～7.The variation of foil gauge R11～R48 of this moment is represented in Figure 30.

Then, if work is the angular acceleration z of rotation center in order to the Z axle, then acting body 16～19 produces strain being that the center is subjected to displacement along sense of rotation with the Z axle equally on barrier film 4～7.The variation of foil gauge R11～R48 of this moment is represented in Figure 31.

Variation corresponding to the resistance value of the foil gauge R11～R48 of each above acceleration and each angular acceleration is represented in table 2.

[table 2]

Power	R11	R12	R13	R14	R15	R16	R17	R18	R21	R22	R23	R24	R25	R26	R27	R28
																	ax	-	+	-	+					-	+	-	+
ay					-	+	-	+					-	+	-	+
																	az	+	-	-	+	+	-	-	+	+	-	-	+	+	-	-	+
αx									-	+	+	-	-	+	+	-
																	αy	-	+	+	-	-	+	+	-
αz					-	+	-	+	-	+	-	+

Power	R31	R32	R33	R34	R35	R36	R37	R38	R41	R42	R43	R44	R45	R46	R47	R48
																	ax	-	+	-	+					-	+	-	+
ay					-	+	-	+					-	+	-	+
																	az	+	-	-	+	+	-	-	+	+	-	-	+	+	-	-	+
αx									+	-	-	+	+	-	-	+
																	αy	+	-	-	+	+	-	-	+
αz					+	-	+	-	+	-	+	-

This multi-axial sensor 1 is the aggregate of 43 axle acceleration sensors, but can utilize following principle from the acceleration detection angular acceleration.At first, if when carrying out circular motion (rotatablely moving) on the circumference of radius r, angular acceleration is made as α, then its tangential acceleration a is a=r α, i.e. α=a/r.

If observe from the center of multi-axial sensor 1, then so-called tangential acceleration a is the same with acceleration on acting on acting body 16～19.Because radius r is certain, so, then can obtain angular acceleration if obtain the acceleration of X, Y, Z-direction.

By utilizing these calculations of carrying out numerical expression 12, but sense acceleration and angular acceleration.

[several 12]

ax＝(R22+R42)-(R23+R43)

ay＝(R16+R36)-(R17+R37)

az＝(R11+R28+R34+R45)-(R13+R26+R32+R47)

αx＝(R25+R46)-(R27+R48)

αy＝(R14+R33)-(R12+R31)

αz＝(R18+R24+R35+R41)-(R15+R21+R38+R44)

Again, constitute bridge diagram shown in figure 32, even but the voltage and decide electric current also sense acceleration and angular acceleration of reordering outward.

In the present embodiment, can adjust the big or small equidimension of the thickness of the thickness of barrier film 4～7, beam or width, acting body 16～19, and adjust transducer sensitivity.Again, in the present embodiment, obtain angular acceleration, thereby can obtain angular velocity by this angular acceleration is carried out integration.

Then, about the 7th embodiment of the present invention, describe with reference to Figure 33.The 7th embodiment is the same with the 6th embodiment as the structure of multi-axial sensor 1, but the formation of electric bridge is out of shape.As shown in figure 33, each electric bridge by linearity 4 foil gauges being configured on each barrier film 4～7 constitute.

Vx1, Vx2 are the voltage signals of the acceleration of expression X-direction, and Vy1, Vy2 are the voltage signals of the acceleration of expression Y direction.Again, Vz1～Vz4 is the voltage signal of the acceleration of expression Z-direction.If carry out calculation shown in numerical expression 13 based on these signals, then sense acceleration and angular acceleration in high sensitivity.

[several 13]

ax＝(Vx2)-(Vx1)

ay＝(Vy2)-(Vy1)

az＝(Vz1)+(Vz2)+(Vz3)+(Vz4)

αx＝(Vz2)-(Vz4)

αy＝(Vz1)-(Vz3)

αz＝(Vx1)+(Vx2)+(Vy1)+(Vy2)

Ax, ay can use among Vx1, Vx2 or Vy1, the Yy2 any one to detect.No matter which is, can be by differential raising sensitivity.

Then, about the 8th embodiment of the present invention, describe with reference to Figure 34 and Figure 35.Figure 34 is the vertical view of the multi-axial sensor 1 of the 8th embodiment, and Figure 35 is the central longitudinal cut-open view of multi-axial sensor 1.This multi-axial sensor 1 is the same with the 6th embodiment, is the 3 axial acceleration that are used to measure three-dimensional quadrature and 6 axle sensors of angular acceleration around it.In this multi-axial sensor 1, utilize semiconductor machining, on silicon substrate 20, form pressure drag component 10, and utilize pressure drag component 10 to be formed for the bridge diagram of sense acceleration and angular acceleration.And then junction of glass substrate on silicon wafer 11 utilizes Micrometer-Nanometer Processing Technology to form pedestal 21 and acting body 16～19.In addition, though the coefficient of strain is according to the face orientation of the silicon wafer 11 of form pressing set of pieces 10 and difference, can by selecting discrete the be defined as minimum of suitable face orientation with sensitivity.

In the present embodiment, make detecting element, to be pressure drag component 10 work as connecting the beam 22 of acting body 16～19 with pedestal 21.Again, can be by peristome 23 be set, make acting body 16～19 bear the effect of acceleration and displacement easily, thereby improve sensitivity.In addition, this peristome 23 can also can be circle for square, again, neither be provided with.

According to present embodiment, can utilize semiconductor machining on silicon substrate 20, to form treatment circuit of sensor signal etc. simultaneously, can make the constituting body of signal processing circuit and sensor integrated compactly.Thus, owing to can shorten the distribution of the detecting element of signal processing circuit and sensor, the stable action so can not be subject to the influence of noise, and make multi-axial sensor 14 typeizations, therefore, also favourable aspect being provided with.And then, utilize semiconductor machining and Micrometer-Nanometer Processing Technology, but low-cost high-efficiency ground make, and can improve assembly precision.

Then, about the 9th embodiment of the present invention, describe with reference to Figure 36 and Figure 37.Figure 36 is the central cross sectional view of the multi-axial sensor 1 of the 9th embodiment of the present invention, and Figure 37 is the vertical view of the configuration of the foil gauge when describing from the 2nd parts 3 sides along the Z direction perspective multi-axial sensor 1.The multi-axial sensor 1 of present embodiment is the same with the multi-axial sensor 1 of the 1st embodiment, for 3 power being used to measure three-dimensional quadrature with around its 6 power sense sensors of torque.The formation of the multi-axial sensor 1 of present embodiment and the multi-axial sensor of the 1st embodiment 1 main difference is: in the 1st embodiment, the 1st parts 2 and the 2nd parts 3 have four barrier films 4,5,6,7 respectively; And have 1 barrier film 4 respectively at the 1st parts 2 and the 2nd parts 3 of present embodiment.

The multi-axial sensor 1 of present embodiment has: the 1st parts the 2, the 2nd parts 3 and acting body 16～19.The 1st parts 2 and the 2nd parts 3 dispose with the upper surface of the 1st parts 2 and the opposed mode of lower surface of the 2nd parts 3.The 1st parts 2 and the 2nd parts 3 link by acting body 16～19.

The barrier film 4 that is equipped with respectively on the 1st parts 2 and the 2nd parts 3 is the toroidal with the diameter that equates mutually, and forms circular wall thickness 24 near the edge.On the upper surface of the barrier film 4 of the 1st parts 2, be formed with 4 acting bodies 16～19 of cylindrical shape again.Acting body 16 forms in the equidistant mode of distance initial point O respectively along the positive dirction on the Y-axis along the negative direction on the X-axis, acting body 19 along the negative direction on the Y-axis, acting body 18 along the positive dirction on the X-axis, acting body 17.The upper end of acting body 16～19 joins on the lower surface with the barrier film 4 of the 1st parts 2 opposed the 2nd parts 3 by welding.

In addition, the 1st parts 2 and acting body 16～19 can be parts independently, also can utilize cut that the 1st parts the 2, the 2nd parts 3, acting body 16～19 are formed.Again, the 2nd parts 3 also can link by bolt with acting body 16～19.

As shown in figure 37,20 foil gauge R11～R45 are configured on the lower surface of barrier film 4 of the 1st parts 2.At the lower surface of the barrier film 4 of the 2nd parts 3, on position, dispose foil gauge R11～R14 corresponding to the edge of acting body 16.Foil gauge R11, R12 dispose than the mode of the more close initial point O of foil gauge R11 with foil gauge R12 on X-axis.Foil gauge R13, R14 with the axle of the orthogonality of center shaft of X-axis and acting body 16 on configuration, make foil gauge R13 corresponding with the Y-axis positive dirction, foil gauge R14 is corresponding with the Y-axis negative direction.On the edge of barrier film 4, on the position corresponding, dispose foil gauge R15 with X-axis again.

Equally, lower surface at the barrier film 4 of the 2nd parts 3, on the position corresponding, dispose foil gauge R21～R24 with the edge of acting body 17, on the position corresponding, dispose foil gauge R31～R34, on the position corresponding, dispose foil gauge R41～R44 with the edge of acting body 19 with the edge of acting body 18.Again, on the limit of barrier film 4, on the part corresponding, dispose foil gauge R25, on the position corresponding, dispose foil gauge R35, on the position corresponding, dispose foil gauge R45 with the Y-axis positive dirction with the X-axis negative direction with the Y-axis negative direction.

In addition, allocation position about foil gauge R15, R25, R35, R45 is not limited thereto, also can be on the limit portion of the barrier film 4 in the lower surface of the barrier film 4 of the 1st parts 2 or the position corresponding with the edge of acting body 16～19, be that the center separates 90 degree and on the equidistant position of initial point O as long as be configured in initial point O.

Then, the principle according to each component detection power and torque is described.Below, fix the 1st parts 2, the 2nd parts 3 are applied power or torque.

The state of the multi-axial sensor 1 when expression applies the power Fx of X-direction with respect to the 2nd parts 3 in Figure 38.At this moment, the barrier film 4 of the 1st parts 2 and the 2nd parts 3 is subjected to displacement as shown like that, detects strain.The variation of resistance value of foil gauge R11～R45 of this moment is represented in Figure 39.Again, when applying the power Fy of Y direction with respect to the 2nd parts 3,90 degree because the state can be thought of as the power Fx that applies X-direction the time staggers are so can omit at this.The state of the multi-axial sensor 1 when again, expression applies the power Fz of Z-direction with respect to the 2nd parts 3 in Figure 40.The variation of the resistance value of each the foil gauge R11～R45 when expression applies the power Fz of Z-direction with respect to the 2nd parts 3 in Figure 41.

The state of the multi-axial sensor 1 when expression applies the torque M x of X-axis with respect to the 2nd parts 3 in Figure 42.The variation of the resistance value of each foil gauge R11～R45 of expression in Figure 43.Again, when applying the torque M y of Y-axis with respect to the 2nd parts 3,90 degree because the state can be thought of as the torque M x that applies X-axis the time staggers are so can omit at this.Again, when applying Z shaft torque Mz with respect to the 2nd parts 3, making the 2nd parts 3 is the center rotation with the Z axle.The variation of the resistance value of each the foil gauge R11～R45 when expression applies the torque M z of Z axle with respect to the 2nd parts 3 in Figure 44.

Expression is with respect to the variation of the foil gauge R11～R45 of above-mentioned each power and torque in table 3.

[table 3]

Power	R11	R12	R13	R14	R15	R21	R22	R23	R24	R25
											Fx	+	-			-	+	-
Fy			+	-				+	-	+
											Fz	+				-				+	-
Mx								-	-	+
											My	+	+			-
Mz			-	+		-	+

Power	R31	R32	R33	R34	R35	R41	R42	R43	R44	R45
											Fx	+	-			+	+	-
Fy			+	-				+	-	-
											Fz		+			-			+		-
Mx								+	+	-
											My	-	-			+
Mz			+	-		+	-

Utilize above character, the calculation by numerical expression 14 can detect each power and torque.In addition, much less calculation method is not limited to numerical expression 14.

[several 14]

Fx＝R41-R22

Fy＝R13-R34

Fz＝R15+R25+R35+R45

Mx＝(R43+R44)-(R23+R24)

My＝(R11+R12)-(R31+R32)

Mz＝(R14+R33)-(R21+R42)

If constitute bridge diagram like that as shown in figure 45, the voltage and decide electric current and come detection power and torque of reordering outward, then above-mentioned calculation can be carried out expeditiously.Figure 45 represents the outer voltage condition of reordering.At this, as shown in figure 45, the circuit that detects Fx and Fy is a half-bridge, and this half-bridge can not compensate the error of the output valve that produces according to temperature variation.Therefore, virtual circuit as shown in figure 46 further is set, to and this output voltage V 1 between difference perform calculations.Thus, can eliminate deviation and common-mode noise, obtain stable output by the variation generation of environment temperature.In addition, foil gauge Rd1, Rd2 shown in Figure 46 is such shown in fixed part 8, is disposed under with respect to the situation of multi-axial sensor 1 imposed load to produce hardly on the position of strain.

Again, being contained in resistance R a, Rb in the bridge diagram that detects Fz all is virtual fixed resistance on the circuit.The resistance value of resistance R a, Rb is preferably Ra=(R15+R25), Rb=(R35+R45).

As described above, in the multi-axial sensor 1 of present embodiment, on the 1st parts 2 and the 2nd parts 3, a barrier film 4 is set respectively.Therefore, compare, can realize the miniaturization of multi-axial sensor 1 with the situation that a plurality of barrier films are set on the 1st parts 2 and the 2nd parts 3.Again, because the simple shapeization of multi-axial sensor, so can reduce needed cost in the cut.

Again, in the multi-axial sensor 1 of present embodiment, compare with the situation that a plurality of barrier films are set on the 1st parts 2, available less foil gauge comes the power and the torque of instrumentation multiaxis.Therefore, can reduce the cost of foil gauge and the cost of distribution.

Then, about the 10th embodiment of the present invention, describe with reference to Figure 47.Figure 47 is the vertical view of the configuration of the foil gauge R11～R35 when describing from the 2nd parts 3 sides along the Z direction perspective according to the multi-axial sensor 1 of the 10th embodiment.The multi-axial sensor 1 of present embodiment is the same with the multi-axial sensor 1 of the 1st embodiment, for 3 power being used to measure three-dimensional quadrature with around its 6 power sense sensors of torque.The formation of the multi-axial sensor 1 of present embodiment and the multi-axial sensor of the 1st embodiment 1 main difference is: in the 1st embodiment, the 1st parts 2 and the 2nd parts 3 have four barrier films 4,5,6,7 respectively; And have 1 barrier film 4 respectively at the 1st parts 2 and the 2nd parts 3 of present embodiment.

The multi-axial sensor 1 of present embodiment has: the 1st parts the 2, the 2nd parts 3 and acting body 16～18.The 1st parts 2 and the 2nd parts 3 dispose with the upper surface of the 1st parts 2 and the opposed mode of lower surface of the 2nd parts 3.The 1st parts 2 and the 2nd parts 3 link by acting body 16～18.

The barrier film 4 that is equipped with respectively on the 1st parts 2 and the 2nd parts 3 is the toroidal with the diameter that equates mutually, and forms circular wall thickness 24 near the edge.On the upper surface of the barrier film 4 of the 1st parts 2, be formed with 4 acting bodies 16～18 of cylindrical shape again.Acting body 16 pass initial point O from the Y-axis negative direction to the X-axis positive dirction be 120 the degree line segment CO on, acting body 17 passing along the negative direction on the Y-axis, acting body 18 initial point O from the Y-axis negative direction to the X-axis negative direction be 120 the degree line segment DO on form in the equidistant mode of distance initial point O respectively.The upper end of acting body 16～18 joins on the lower surface with the barrier film 4 of the 1st parts 2 opposed the 2nd parts 3 by welding.

As shown in figure 47,15 foil gauge R11～R35 are configured on the lower surface of barrier film 4 of the 1st parts 2.Lower surface at the barrier film 4 of the 2nd parts 3, on position, dispose foil gauge R11～R14 respectively corresponding to the edge of acting body 16, on the position corresponding, dispose foil gauge R21～R24 with the edge of acting body 17, on the position corresponding, dispose foil gauge R31～R34, in the one of the limit of barrier film 4, dispose foil gauge R15, R25, R35 with the edge of acting body 18.

Below, the principle that detects power and torque according to each direction of principal axis is described.The foil gauge group who forms by a plurality of foil gauges that are configured to linearity the column direction along configuration applying stretch and the situation of the strain of compression under, with respect to the rate of change maximum of the resistance value of strain, sensitivity is the highest.6 foil gauge groups present embodiment, that form by foil gauge R11, R12, foil gauge R13, R14, foil gauge R21, R22, foil gauge R23, R24, foil gauge R31, R32, foil gauge R33, R34, the direction difference of sensitivity maximum separately.But,, then can detect the power and the torque of 6 components if consider each foil gauge group's sensitivity is resolved into along the vector of X, Y, Z-direction.

With respect to foil gauge R11～R33 shown in Figure 47, constitute bridge diagram shown in Figure 48, and apply and decide voltage or decide electric current.At this, be contained in resistance R a～Ro in the bridge diagram of Figure 48 and all be the virtual fixed resistance on the circuit.In addition, the resistance value of each resistance R a～Ro preferably with the resistance value of each foil gauge R11～R33 about equally.

Bridge diagram by Figure 48, available foil gauge R11, R12 detects from the X-axis positive dirction and is the force component of 30 degree directions as voltage Va to the Y-axis positive dirction, available foil gauge R13, R14 detects from the X-axis positive dirction and is the force component of 60 degree directions as voltage Vb to the Y-axis negative direction, available foil gauge R21, R22 detects from the X-axis positive dirction and is the force component of 180 degree directions as voltage Vc to the Y-axis positive dirction, available foil gauge R23, R24 detects from the X-axis positive dirction and is the force component of 90 degree directions as voltage Vd to the Y-axis positive dirction, available foil gauge R31, R32 detects from the X-axis positive dirction and is 150 force components of spending directions as voltage Ve to the Y-axis positive dirction, available foil gauge R33, R34 detects from the X-axis positive dirction and is the force component of 120 degree directions as voltage Vf to the Y-axis positive dirction.Again, half-bridge circuit by Figure 48, the center of available foil gauge R15 detection effect body 16 along the force component of Z-direction as voltage Vz1, the center of available foil gauge R25 detection effect body 17 along the force component of Z-direction as voltage Vz2, the center of available foil gauge R35 detection effect body 18 along the force component of Z-direction as voltage Vz3.

At this,, then can as numerical expression 15, represent if will resolve into the vector of X-axis and Y-axis component respectively from the output voltage V a～Vf of half-bridge circuit.

[several 15]

Va＝(Vax、Vax)＝(Va/2、Va·3/2)

Vb＝(Vbx、Vby)＝(Vb·3/2、-Vb/2)

Vc＝(Vcx、Vcy)＝(Vc、0)

Vd＝(Vdx、Vdy)＝(0、Vd)

Ve＝(Vex、Vey)＝(Ve/2、-Ve·3/2)

Vf＝(Vfx、Vfy)＝(Vf·3/2、Vf/2)

Therefore, if will act on the Fy that makes a concerted effort to be made as that makes a concerted effort to be made as Fx, Y direction of the X-direction on the 2nd parts 3, then can as numerical expression 16, detect.

[several 16]

Fx＝Vax+Vbx+Vcx+Vdx+Vex+Vfx

＝(Va/2)+(Vb·3/2)+Vc+(Ve/2)+(Vf·3/2)

Fy＝Vay+Vby+Vcy+Vdy+Vey+Vfy

＝(Va·3/2)-(Vb/2)+Vd-(Ve·3/2)+(Vf/2)

Again, the output voltage V z1 of half-bridge circuit, Vz2, Vz3 and the power Fz of Z-direction is corresponding changes.Therefore, about power Fz, can obtain according to numerical expression 17.

[several 17]

Fz＝V21+Vz2+Vz3

Then, the 2nd parts 3 are being applied under the situation of torque M x, applying with the X-axis is the power of center rotation.At this, torque M x works, and makes to push to Z axle positive dirction from the Z axle negative direction part that Y-axis is positive, and stretches to Z axle negative direction from the Z axle positive dirction part that Y-axis is negative.Again, if will be from initial point 0 to acting body distance 16～18 the center be made as R, then each the center from acting body 16,18 is R/2 to the distance the X-axis, is R from the center of acting body 17 to the distance the X-axis.Therefore, if consider the direction of the supercentral power that acts on each acting body 16～18, then the torque M x around X-axis represents with numerical expression 18.

[several 18]

Mx＝(Fz1·R/2)-(Fz2·R)+(Fz3·R/2)

Then, consider the 2nd parts 3 are applied torque M y, make and push to Z axle negative direction from the Z axle positive dirction part that X-axis is positive, and situation about stretching to Z axle positive dirction from the Z axle negative direction part that X-axis is negative.At this, the distance from the center of acting body 16,18 to Y-axis is made as √ 3R/2, and the center of acting body 17 is on Y-axis.Therefore, if consider the direction of the supercentral power that acts on each acting body 16～18, then the torque M y around Y-axis represents with numerical expression 19.

[several 19]

My＝(Fz1·3R/2)+Fz2·0-(Fz3·3R/2)

＝3/2(Fz1-Fz3)

Then, consider to apply the axial situation of right torque M z around Z with respect to the 2nd parts 3.At this moment, 3 foil gauge groups that are made of foil gauge R13, R14, R21, R22, R33, R34 are along the highest direction generation strain of sensitivity.Therefore, the output voltage V b of the circuit of Figure 48, Vc, Vf maximum sensitivity ground change.On the other hand, 3 foil gauge groups that are made of foil gauge R11, R12, R23, R24, R31, R32 arrange along the minimum direction of the sensitivity of foil gauge.Therefore, the output voltage V a of the circuit of Figure 48, Vd, Ve change hardly.Therefore, if consider the direction of the supercentral power that acts on each acting body 16～18, then torque M z represents with numerical expression 20.

[several 20]

Mz＝-Vb+Vc-Vf

Can perform calculations by the numerical expression 15～numerical expression 20 that illustrates more than utilizing, obtain power and torque.For example output voltage V a～Vf and Vz1～Vz3 can be carried out the AD conversion, use microcontroller and computing machine to perform calculations.

As described above, in the multi-axial sensor 1 of present embodiment, can obtain the effect the same with the 9th embodiment.Owing on barrier film, form 3 acting bodies, can calculate the power and the torque of multiaxis, so the formation of multi-axial sensor 1 further can be oversimplified again.

More than, preferred embodiment be illustrated with regard to of the present invention, but the present invention is not limited to above-mentioned embodiment, only limit in the scope of claim, put down in writing, multiple design alteration possibility is just arranged.For example, in above-mentioned the 1st～the 10th embodiment, foil gauge is sticked on respectively on the 1st parts 2, but be not limited thereto, also can utilize all foil gauges are pasted in one plane, on each barrier film 4～7 foil gauge is being integrated on 1 piece of substrate, and paste barrier film 4～7.Perhaps also can be integrated and stick on 1 plate base with all foil gauges.Also the conductive wires that forms foil gauge and circuit can be formed thin dielectric film by splash or evaporation on barrier film 4～7, the chromium oxide film that on dielectric film, forms by splash or evaporation again.The foil gauge of Xing Chenging is because compare the coefficient of strain with general foil strain gauge big more than 10 times like this, thus with the situation of utilizing general foil strain gauge mutually specific sensitivity can increase more than 10 times.Again, the flow chart that foil gauge is sticked on the barrier film 4～7 is oversimplified, be improved operating efficiency, throughput rate is significantly improved, realize the reduction of cost.

In the 1st～the 10th above-mentioned embodiment, just detect 6 the power and the multi-axial sensor of torque or acceleration and angular acceleration and be illustrated again.But be not limited to this, 2 axle sensors that also can be used as the power that only detects X-axis and Y-axis 2 directions use.

Again, in the 1st～the 10th above-mentioned embodiment, barrier film disposes every equal angles ground, but is not limited to this.And then, also unqualified to barrier film apart from this point of the equidistant configuration of initial point O.

Again, in the 9th and the 10th above-mentioned embodiment, acting body disposes every equal angles ground, but is not limited to this.And then, also unqualified to acting body apart from this point of the equidistant configuration of initial point O.

Utilize possibility on the industry

The present invention amounts to the direction of at least one component 6 components and the multi-axial sensor of size is preferably as measuring from 3 axial power of the quadrature of external action with around the torque of its axle direction of rotation. Therefore, in the practical robot in the field of for example wishing in amusement, if multi-axial sensor of the present invention is assembled in the hand and pin of robot, then since high responsiveness accurately detection effect in the power that applies or the torque of hand and the pin of robot, so become possibility than in the past sensor low cost.

Claims

(according to the modification of the 19th of treaty)

1. axle sensor, 6 power that instrumentation applies from the outside and torque or 6 acceleration and angular acceleration,

It is characterized in that, have configuration a plurality of foil gauges in one plane.

2. 6 axle sensors as claimed in claim 1 is characterized in that, further have the 1st barrier film of the aforementioned foil gauge of a plurality of installations.

3. 6 axle sensors as claimed in claim 2 is characterized in that, the former central point of stating the plane of aforementioned the 1st diaphragm configuration is that the center separates on equal angles and the equidistant position of the aforementioned central point of distance.

4. 6 axle sensors as claimed in claim 3 is characterized in that, aforementioned angle is 90 degree.

5. 6 axle sensors as claimed in claim 4 is characterized in that, aforementioned the 1st barrier film respectively along with aforementioned central point as the X-axis of initial point and positive dirction on the Y-axis and negative direction configuration.

6. 6 axle sensors as claimed in claim 3 is characterized in that, aforementioned angle is 120 degree.

7. as each described 6 axle sensors of claim 2～6, it is characterized in that the thinner wall section of aforementioned the 1st barrier film is a toroidal, and have 8 aforementioned foil gauges, and

The allocation position of aforementioned foil gauge is the edge portion and the inner edge portion of aforementioned the 1st barrier film on the line of the central point on central point that links aforementioned the 1st barrier film and aforementioned plane, is the edge portion and the inner edge portion of aforementioned the 1st barrier film on the perpendicular line of the aforementioned line of the central spot of aforementioned the 1st barrier film.

8. as each described 6 axle sensors of claim 2～7, it is characterized in that, further have the acting body on the central portion that is arranged on aforementioned the 1st barrier film, and

Instrumentation acts on 6 acceleration and angular acceleration on this 6 axle sensor.

9. as each described 6 axle sensors of claim 2～7, it is characterized in that, have:

The 1st parts have aforementioned the 1st barrier film;

The 2nd parts have with aforementioned the 1st barrier film opposedly, and do not have the 2nd barrier film of aforementioned foil gauge;

Connection shaft links opposed aforementioned the 1st barrier film and aforementioned the 2nd barrier film;

Instrumentation acts on 6 power and torque between aforementioned the 1st parts and aforementioned the 2nd parts.

10. as each described 6 axle sensors of claim 2～7, it is characterized in that, have:

The 1st parts have aforementioned the 1st barrier film;

The 2nd parts have the 2nd barrier film, and described the 2nd barrier film and aforementioned the 1st barrier film are opposed, and a plurality of aforementioned foil gauge that is configured on the plane is installed;

Connection shaft links opposed aforementioned the 1st barrier film and aforementioned the 2nd barrier film;

Instrumentation acts on 6 power and torque between aforementioned the 1st parts and aforementioned the 2nd parts.

11. 6 axle sensors as claimed in claim 10 is characterized in that, the focus point that the aforementioned foil gauge of aforementioned the 1st parts and the aforementioned foil gauge of aforementioned the 2nd parts are configured in 6 axle sensors is on the centrosymmetric position.

12. 6 axle sensors as claimed in claim 11 is characterized in that, the some output signals in each output of the aforementioned foil gauge of the aforementioned foil gauge of aforementioned the 1st parts and aforementioned the 2nd parts adopt another output signal outside the scope of regulation the time.

13. 6 axle sensors as claimed in claim 2 is characterized in that, aforementioned the 1st barrier film that is configured on the aforementioned plane is 1.

14. 6 axle sensors as claimed in claim 13, it is characterized in that, the former central point of stating the plane is that the center separates on equal angles and the equidistant position of the aforementioned central point of distance, further have the acting body that is provided with in mode, measure 6 acceleration and angular acceleration acting on this 6 axle sensor with aforementioned the 1st barrier film butt.

15. 6 axle sensors as claimed in claim 13 is characterized in that, have:

The 1st parts have aforementioned the 1st barrier film;

The 2nd parts have the 2nd barrier film of not having aforementioned foil gauge;

Acting body links aforementioned the 1st barrier film and aforementioned the 2nd barrier film;

Aforementioned the 1st parts and aforementioned the 2nd parts dispose in the opposed mode of central point of aforementioned the 2nd barrier film of the central point of aforementioned the 1st barrier film of aforementioned the 1st parts and aforementioned the 2nd parts, and,

By aforementioned acting body, to be that the center separates equal angles and connected to each other apart from the equidistant position of aforementioned central point with each aforementioned central point of aforementioned the 1st barrier film and aforementioned the 2nd barrier film, instrumentation acts on 6 power and torque between aforementioned the 1st parts and aforementioned the 2nd parts.

16. 6 axle sensors as claimed in claim 13 is characterized in that, have:

The 1st parts have aforementioned the 1st barrier film;

The 2nd parts have the 2nd barrier film, and described the 2nd barrier film is equipped with a plurality of aforementioned foil gauge that is configured on the plane;

Acting body links aforementioned the 1st barrier film and aforementioned the 2nd barrier film;

Aforementioned the 1st parts and aforementioned the 2nd parts dispose in the opposed mode of central point of aforementioned the 2nd barrier film of the central point of aforementioned the 1st barrier film of aforementioned the 1st parts and aforementioned the 2nd parts, and,

By aforementioned acting body, will be that the center separates equal angles and connected to each other apart from the equidistant position of aforementioned central point with the aforementioned central point of the aforementioned the 1st and the 2nd barrier film, instrumentation acts on 6 power and torque between aforementioned the 1st parts and aforementioned the 2nd parts.

17. 6 axle sensors as claimed in claim 16 is characterized in that, the focus point that the aforementioned foil gauge of aforementioned the 1st parts and the aforementioned foil gauge of aforementioned the 2nd parts are configured in 6 axle sensors is on the centrosymmetric position.

18. 6 axle sensors as claimed in claim 17 is characterized in that, the some output signals in each output of the aforementioned foil gauge of the aforementioned foil gauge of aforementioned the 1st parts and aforementioned the 2nd parts adopt another output signal outside the scope of regulation the time.

19., it is characterized in that aforementioned angle is 90 degree as each described 6 axle sensors of claim 14～18.

20. 6 axle sensors as claimed in claim 19 is characterized in that, aforementioned the 1st barrier film is respectively along with X-axis and positive dirction on the Y-axis and the negative direction configuration as initial point of the central point of aforementioned the 1st barrier film.

21., it is characterized in that aforementioned angle is 120 degree as each described 6 axle sensors of claim 14～18.

22. as each described 6 axle sensors of claim 14～21, it is characterized in that,

The allocation position of aforementioned foil gauge is:

On the line that the central point with the central point of the part corresponding with aforementioned acting body on the aforementioned plane and aforementioned the 1st barrier film links, be the limit portion of aforementioned acting body;

On the perpendicular line of the aforementioned line of the central spot of the part corresponding on the aforementioned plane, be the limit portion of aforementioned acting body with aforementioned acting body;

Separating equal angles and on aforementioned central point equidistant position lighting from the center of aforementioned the 1st barrier film, is some in the limit portion of the limit portion of aforementioned acting body and aforementioned the 1st barrier film.

23., it is characterized in that aforementioned foil gauge is a pressure drag component as each described 6 axle sensors of claim 1～22.

24., it is characterized in that aforementioned foil gauge is the foil gauge that is formed by chromium oxide film on dielectric film as each described 6 axle sensors of claim 1～22.

Claims (24)

1. any one the power of the multiaxis that multi-axial sensor, instrumentation apply from the outside, torque, acceleration, the angular acceleration or a plurality of,

It is characterized in that, have configuration a plurality of foil gauges in one plane.

2. multi-axial sensor as claimed in claim 1 is characterized in that, further has the 1st barrier film of the aforementioned foil gauge of a plurality of installations.

3. multi-axial sensor as claimed in claim 2 is characterized in that, the former central point of stating the plane of aforementioned the 1st diaphragm configuration is that the center separates on equal angles and the equidistant position of the aforementioned central point of distance.

4. multi-axial sensor as claimed in claim 3 is characterized in that, aforementioned angle is 90 degree.

5. multi-axial sensor as claimed in claim 4 is characterized in that, aforementioned the 1st barrier film respectively along with aforementioned central point as the X-axis of initial point and positive dirction on the Y-axis and negative direction configuration.

6. multi-axial sensor as claimed in claim 3 is characterized in that, aforementioned angle is 120 degree.

7. as each described multi-axial sensor of claim 2～6, it is characterized in that the thinner wall section of aforementioned the 1st barrier film is a toroidal, and have 8 aforementioned foil gauges, and

The allocation position of aforementioned foil gauge is the edge portion and the inner edge portion of aforementioned the 1st barrier film on the line of the central point on central point that links aforementioned the 1st barrier film and aforementioned plane, is the edge portion and the inner edge portion of aforementioned the 1st barrier film on the perpendicular line of the aforementioned line of the central spot of aforementioned the 1st barrier film.

8. as each described multi-axial sensor of claim 2～7, it is characterized in that, further have the acting body on the central portion that is arranged on aforementioned the 1st barrier film, and

Instrumentation acts on the acceleration and the angular acceleration of the multiaxis on this multi-axial sensor.

9. as each described multi-axial sensor of claim 2～7, it is characterized in that, have:

The 1st parts have aforementioned the 1st barrier film;

The 2nd parts have with aforementioned the 1st barrier film opposedly, and do not have the 2nd barrier film of aforementioned foil gauge;

Connection shaft links opposed aforementioned the 1st barrier film and aforementioned the 2nd barrier film;

Instrumentation acts on the power and the torque of the multiaxis between aforementioned the 1st parts and aforementioned the 2nd parts.

10. as each described multi-axial sensor of claim 2～7, it is characterized in that, have:

The 1st parts have aforementioned the 1st barrier film;

The 2nd parts have the 2nd barrier film, and described the 2nd barrier film and aforementioned the 1st barrier film are opposed, and a plurality of aforementioned foil gauge that is configured on the plane is installed;

Connection shaft links opposed aforementioned the 1st barrier film and aforementioned the 2nd barrier film;

Instrumentation acts on the power and the torque of the multiaxis between aforementioned the 1st parts and aforementioned the 2nd parts.

11. multi-axial sensor as claimed in claim 10 is characterized in that, the focus point that the aforementioned foil gauge of aforementioned the 1st parts and the aforementioned foil gauge of aforementioned the 2nd parts are configured in multi-axial sensor is on the centrosymmetric position.

12. multi-axial sensor as claimed in claim 11 is characterized in that, the some output signals in each output of the aforementioned foil gauge of the aforementioned foil gauge of aforementioned the 1st parts and aforementioned the 2nd parts adopt another output signal outside the scope of regulation the time.

13. multi-axial sensor as claimed in claim 2 is characterized in that, aforementioned the 1st barrier film that is configured on the aforementioned plane is 1.

14. multi-axial sensor as claimed in claim 13, it is characterized in that, the former central point of stating the plane is that the center separates on equal angles and the equidistant position of the aforementioned central point of distance, further have the acting body that is provided with in mode, measure the acceleration and the angular acceleration that act on the multiaxis on this multi-axial sensor with aforementioned the 1st barrier film butt.

15. multi-axial sensor as claimed in claim 13 is characterized in that, has:

The 1st parts have aforementioned the 1st barrier film;

The 2nd parts have the 2nd barrier film of not having aforementioned foil gauge;

Acting body links aforementioned the 1st barrier film and aforementioned the 2nd barrier film;

Aforementioned the 1st parts and aforementioned the 2nd parts dispose in the opposed mode of central point of aforementioned the 2nd barrier film of the central point of aforementioned the 1st barrier film of aforementioned the 1st parts and aforementioned the 2nd parts, and,

By aforementioned acting body, to be that the center separates equal angles and connected to each other apart from the equidistant position of aforementioned central point with each aforementioned central point of aforementioned the 1st barrier film and aforementioned the 2nd barrier film, instrumentation acts on the power and the torque of the multiaxis between aforementioned the 1st parts and aforementioned the 2nd parts.

16. multi-axial sensor as claimed in claim 13 is characterized in that, has:

The 1st parts have aforementioned the 1st barrier film;

The 2nd parts have the 2nd barrier film, and described the 2nd barrier film is equipped with a plurality of aforementioned foil gauge that is configured on the plane;

Acting body links aforementioned the 1st barrier film and aforementioned the 2nd barrier film;

Aforementioned the 1st parts and aforementioned the 2nd parts dispose in the opposed mode of central point of aforementioned the 2nd barrier film of the central point of aforementioned the 1st barrier film of aforementioned the 1st parts and aforementioned the 2nd parts, and,

By aforementioned acting body, will be that the center separates equal angles and connected to each other apart from the equidistant position of aforementioned central point with the aforementioned central point of the aforementioned the 1st and the 2nd barrier film, instrumentation acts on the power and the torque of the multiaxis between aforementioned the 1st parts and aforementioned the 2nd parts.

17. multi-axial sensor as claimed in claim 16 is characterized in that, the focus point that the aforementioned foil gauge of aforementioned the 1st parts and the aforementioned foil gauge of aforementioned the 2nd parts are configured in multi-axial sensor is on the centrosymmetric position.

18. multi-axial sensor as claimed in claim 17 is characterized in that, the some output signals in each output of the aforementioned foil gauge of the aforementioned foil gauge of aforementioned the 1st parts and aforementioned the 2nd parts adopt another output signal outside the scope of regulation the time.

19., it is characterized in that aforementioned angle is 90 degree as each described multi-axial sensor of claim 14～18.

20. multi-axial sensor as claimed in claim 19 is characterized in that, aforementioned the 1st barrier film is respectively along with X-axis and positive dirction on the Y-axis and the negative direction configuration as initial point of the central point of aforementioned the 1st barrier film.

21., it is characterized in that aforementioned angle is 120 degree as each described multi-axial sensor of claim 14～18.

22. as each described multi-axial sensor of claim 14～21, it is characterized in that,

The allocation position of aforementioned foil gauge is:

On the line that the central point with the central point of the part corresponding with aforementioned acting body on the aforementioned plane and aforementioned the 1st barrier film links, be the limit portion of aforementioned acting body;

On the perpendicular line of the aforementioned line of the central spot of the part corresponding on the aforementioned plane, be the limit portion of aforementioned acting body with aforementioned acting body;

Separating equal angles and on aforementioned central point equidistant position lighting from the center of aforementioned the 1st barrier film, is some in the limit portion of the limit portion of aforementioned acting body and aforementioned the 1st barrier film.

23., it is characterized in that aforementioned foil gauge is a pressure drag component as each described multi-axial sensor of claim 1～22.

24., it is characterized in that aforementioned foil gauge is the foil gauge that is formed by chromium oxide film as each described multi-axial sensor of claim 1～22 on dielectric film.

Images