CN1797000A - Sensor - Google Patents
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- CN1797000A CN1797000A CN 200510097511 CN200510097511A CN1797000A CN 1797000 A CN1797000 A CN 1797000A CN 200510097511 CN200510097511 CN 200510097511 CN 200510097511 A CN200510097511 A CN 200510097511A CN 1797000 A CN1797000 A CN 1797000A
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Abstract
The sensor comprises a base, a plurality of pins fixed to the base, a sensor element, and a plurality of leads connecting the sensor element to the plurality of the pins. The sensor element is supported by the plurality of the pins via the plurality of the leads. Each of the plurality of the leads is provided along a straight line extending between a connected pin, out of the plurality of the pins, and the sensor element, and is bent plural times between the connected pin and the sensor element in order to prevent stress in the sensing element.
Description
Technical field
The present invention relates to a kind of sensor, for example have the sensor of the gas sensor element that detects specific gas with sensing element.
Background technology
At for example optical sensor, in the various sensors of Magnetic Sensor, temperature sensor, sound transducer etc., majority is to be configured to sensing element to be independent of framework.This is in order to make sensing element not be subjected to the influence (light reflection, magnetic, heat, vibration etc.) of sensor framework.
Have the gas sensor that detects the concentration of specific gas in the atmosphere gas as this sensor.As gas sensor, general known in the past have: have the gas sensor element that detects specific gas, constitute this sensing element and be connected to the gas sensor that is fixed on many pins on the base by many lead-in wires.On such gas sensor, each lead-in wire forms linearity, connects gas sensor element and each pin, and gas sensor element is supported for vacant state by this group lead-in wire.Such formation for example is disclosed in the publication communique spy of Japan and puts down among the Fig. 1 and Fig. 6 that opens 9-68512 number.
Summary of the invention
But, in the existing various sensors of above-mentioned gas sensor etc., because one group of lead-in wire is formed linearity, so after in manufacturing engineering, the base end part of each lead-in wire being connected in sensing element, when the leading section of each lead-in wire is connected in each pin, the load (loading) of controlling lead-in wire acts on the base end part of lead-in wire, and Yin Xian base end part can be lost and break sometimes.
In addition, the situation of gas sensor for example, under its user mode, be set at the well heater adstante febre on the gas sensor element, each lead-in wire is owing to thermal expansion relaxes, so when applying impact from the outside of sensor, the sensing element violent oscillatory motion, on the base end part of lead-in wire, apply the vibration loading, its result, Yin Xian base end part can be lost and break sometimes.
Except the problem of above-mentioned structure, outside electromagnetic wave enters sensing element by lead portion, has the problem that temperature is controlled and accuracy of detection reduces that makes Sensor section.
Thus, the object of the present invention is to provide and a kind ofly can prevent the broken string of the lead-in wire in the manufacturing process and the broken string of the lead-in wire under the user mode etc. and the sensor that can use with high precision.
Sensor of the present invention has base, many pins, sensing element, many lead-in wires.Pin is fixed on the base.Lead-in wire is connected in sensing element on the pin.The straight line of connected pin and sensing element is provided with each lead-in wire in the many pins along connecting, and repeatedly bending between this connected pin and sensing element.
In sensor of the present invention, load (loading) is being connected on the respectively lead-in wire of sensor element and pin with oscillating action, and between pin and sensing element, each lead-in wire is flexible absorption load (loading) and vibration by its elasticity.So, can prevent the broken string that each goes between.Particularly, on this sensor, because each lead-in wire mainly is flexible on the bearing of trend of the straight line that connects sensing element and pin, the stress that produces on the end of each lead-in wire of connecting pin and sensing element is little.
In addition, because lead-in wire is repeatedly crooked, sensor of the present invention can reduce the intrusion of electromagnetic wave noise.For example, on gas sensor, most cases is to well heater energising control temperature, simultaneously by other the current potential of lead-in wire detecting sensor or the variation of impedance from part lead-in wire.In this case, the energising of sensor etc. is undertaken by DC current, when the electromagnetic wave noise of certain frequency is added on this DC current, with regard to the detection of the current potential of the control of having heaters and sensor or the impedance variation unsettled tendency that becomes.Most cases is that the major part of this electromagnetic wave noise invades sensor by each lead-in wire.
To this, in the present invention, because each lead-in wire is repeatedly crooked, so have impedance.That is,, invade sensor so can suppress noise because each lead-in wire has the impedance from the high-frequency electromagnetic wave noise of direct current.Thus, can control temperature and correctly detect current potential or impedance variation etc. accurately.
On sensor of the present invention, preferred many lead-in wires comprise periodically crooked part respectively.That is, on sensor of the present invention, preferred each lead-in wire has the part of continuous periodicity bending.Feature of each lead-in wire can at least a portion have continuously and periodically crooked corrugated, continuously and periodically crooked zigzag or the bend of coiled type grade.
In addition, the meaning of so-called in the present invention " periodically " not necessarily is limited to the sweep that the bending by same curvature or equal angular constitutes, and can constitute by different curvature or different angular bend to the opposing party from a side of sweep.For example, when sweep is coiled type, also can constitute a side constituting to the opposing party's curved transition with the similar shape of so-called involute urve from coiler part.In addition, repeatedly the cycle of sweep also can be an one-period.For example, the sweep of each lead-in wire also can be formed the coil of one-period.
On sensor of the present invention, the end of preferred each lead-in wire has the restraint structure.So, the width of many lead-in wire ends separately, i.e. the width of the direction that intersects with the bearing of trend of above-mentioned straight line, it is thick also can for example to constitute the wire rod of lead-in wire than the parts that constitute this lead-in wire.Get on very well particularly, on sensor of the present invention, can form sweep and flattening part in the end of each lead-in wire or spheroidite is set.
End by each lead-in wire constitutes like that according to above-mentioned, and each lead-in wire can inadvertently not taken off from connecting portion, and in addition, the strength of joint of the end of each lead-in wire increases.Resistance value at connecting portion reduces.
In addition, the restraint structure also can constitute as described below.That is, also a plurality of through holes can be set on sensing element, corresponding through hole is passed in many lead-in wire ends separately.Owing to make the end of each lead-in wire pass through hole like this, so increase with the bond strength of the sensing element of each lead-in wire.
In addition, many lead-in wire ends separately, its front end passes pairing through hole in the side-prominent mode to a face of sensing element, and this end is relative with a described face.So constitute, each lead-in wire increases more with the bond strength of sensing element.In addition, the end of each lead-in wire also can join on the face of sensing element by the grafting material of pastel or solder flux etc., perhaps, also can be crimped on the face of sensing element.In addition, for relative with a face of sensing element, the front end of end of each lead-in wire also can be split pin, and the front end of the end of each lead-in wire also can be deformed into spheroidite by heat etc. in addition.
In addition, on sensor of the present invention, sensing element has a face and another face, and many lead-in wire ends separately have a face with sensing element relative first and relative with the another side of sensing element second, and sensing element also can be clipped between first and second.Even in such formation, pastel or solder bonding also can be passed through to sensing element in the end of each lead-in wire, perhaps also can be crimped on the sensing element.
In sensor of the present invention, many lead-in wires material separately is preferably the material with impedance lower than the impedance of sensing element.Each lead-in wire has sweep, but by constituting with such material, the resistance value during energising is further reduced.As such material, lead-in wire is preferably by the noble metal of gold (Au) and platinum (Pt) etc. or contain these precious metal alloys and constitute.
Description of drawings
Fig. 1 represents the outboard profile of concise and to the point structure of the gas sensor of one embodiment of the present invention.
Fig. 2 is the planimetric map of gas sensor shown in Figure 1.
Fig. 3 is the amplification sectional view of gas sensor element shown in Figure 1.
Fig. 4 is the amplification view of lead-in wire shown in Figure 2.
Fig. 5 is the planimetric map of first variation of lead-in wire shown in Figure 4.
Fig. 6 is the planimetric map of second variation of lead-in wire shown in Figure 4.
Fig. 7 is the planimetric map of the 3rd variation of lead-in wire shown in Figure 4.
Fig. 8 is the planimetric map of the 4th variation of lead-in wire shown in Figure 4.
Fig. 9 is the planimetric map of the 5th variation of lead-in wire shown in Figure 4.
Fig. 1 O is the planimetric map of the 6th variation of lead-in wire shown in Figure 4.
Figure 11 is the planimetric map of the 7th variation of lead-in wire shown in Figure 4.
Figure 12 is the oblique view of the 8th variation of lead-in wire shown in Figure 4.
Figure 13 is the planimetric map of the 9th variation of lead-in wire shown in Figure 4.
Figure 14 is the planimetric map of the tenth variation of lead-in wire shown in Figure 4.
Figure 15 is the sectional view of structure of end of the lead-in wire of expression variation.
Figure 16 is the sectional view of structure of end of the lead-in wire of expression variation.
Figure 17 is the sectional view of structure of end of the lead-in wire of expression variation.
Figure 18 is the sectional view of structure of end of the lead-in wire of expression variation.
Figure 19 is the sectional view of structure of end of the lead-in wire of expression variation.
Figure 20 is the sectional view of structure of end of the lead-in wire of expression variation.
Figure 21 is the outboard profile of structure of end of the lead-in wire of expression variation.
Figure 22 is the outboard profile of structure of end of the lead-in wire of expression variation.
Figure 23 is the outboard profile of structure of end of the lead-in wire of expression variation.
Figure 24 is the outboard profile of structure of end of the lead-in wire of expression variation.
Figure 25 is the outboard profile of the concise and to the point structure of gas sensor of expression variation.
Figure 26 is the outboard profile of the concise and to the point structure of gas sensor of expression variation.
Embodiment
Below, with reference to accompanying drawing, in sensor of the present invention, illustrate with the gas sensor to be the embodiment of example.In the accompanying drawing of reference, Fig. 1 is the outboard profile of concise and to the point structure of the gas sensor of expression one embodiment, and Fig. 2 is the planimetric map of gas sensor shown in Figure 1.
The gas sensor 1 of an embodiment illustrated in figures 1 and 2 is as the specific gas carbon dioxide (CO for example that detects in the atmosphere gas
2) the gas sensor of concentration, have detection carbon dioxide (CO
2) gas sensor element 2.This gas sensor element 2 respectively by 4 lead-in wires 5 be connected in with near 4 pins on running through 4 angles that state is fixed on bedplate 3, be supported on each pin 4 by each root lead-in wire 5 state with suspension.
As shown in Figure 3, be formed with on the surface of the solid electrolyte substrate 2A that constitutes at NASICON (Na, Si, Zr, P composite oxides) etc. of gas sensor element 2 and detect utmost point 2B and the unilateral type element of utmost point 2C.Then, on the back side of solid electrolyte substrate 2A, be formed with the insulated substrate 2D of insulativity pastel, on this insulated substrate 2D, be formed with the well heater 2E that is used for solid electrolyte substrate 2A is heated to the temperature (for example more than 350 ℃) that is suitable for ionic conduction.
As shown in Figure 2, detect the middle body that utmost point 2B is configured in approximate foursquare solid electrolyte substrate 2A, utmost point 2C is configured in the side of this detection utmost point 2B.This detection utmost point 2B has detection layers is layered in structure on the current collector layer, and utmost point 2C is had the structure that the key horizon protected seam covers.
For example near the surface 4 jiaos of solid electrolyte substrate 2A, be formed with electrode heelpiece 6A～6D respectively by the alloy composition of (Au-Pt), (Au-Rh), (Au-Pd) etc.Electrode heelpiece 6A is by conductive strips 7 and detection utmost point 2B conducting, and electrode heelpiece 6B is by conductive strips 8 and to utmost point 2C conducting.Electrode heelpiece 6C, 6D are connected with well heater 2E (with reference to Fig. 3) respectively by the not shown through hole that forms on solid electrolyte substrate 2A.
Each end of 5 of going between is by the parallel clearance welding and use the suitable method of the roasting etc. of metal paste respectively with after electrode heelpiece 6A～6D engages, and the other end engages with the head 4A of each pin 4 respectively with same joint method.
Each material of 5 of going between is used to have the material of the impedance lower than the impedance of gas sensor element 2, the increase of the resistance value in the time of can suppressing to switch on thus.Particularly, respectively go between 5 material can adopt the noble metal of low gold of resistance value (Au) and platinum (Pt) etc. or contain these precious metal alloys.As these precious metal alloys, can enumerate (Pt-W), (Pt-Cr), (Pt-Fe), (Pt-Ni), (Pt-Rh), (Au-Pt), (Au-Rh), (Au-Pd), (Au-Pd-Mo), (RuO
2) etc.
Consider the balance between intensity and the resistance value, each linear diameter of 5 of going between suitably is set in the scope of 10～100 μ m for example.
Amplify expression as Fig. 4, each 5 straight line along the electrode heelpiece that connects pin 4 and gas sensor element 2 that go between is provided with.In addition, lead-in wire 5 has repeatedly crooked part (sweep) 5A between pin 4 and gas sensor element 2.In the present embodiment, bend 5A constitutes continuous periodicity sweep.Particularly, bend 5A forms the corrugated of continuous bend.
In addition, on each lead-in wire both ends 5B, 5B of 5, be provided with and prevent the come off restraint structure of usefulness of junction surface.Both ends 5B, 5B make bending and are approximate dimetric shape.That is, as the width that the width of both ends 5B promptly intersects with the extending direction of above-mentioned straight line, the wire material that promptly constitutes lead-in wire 5 than the parts that constitute lead-in wire 5 is thick.Thus, each end 5B of 5 of going between is as the restraint structure of the usefulness that prevents to come off and work.
At this moment, though controlling the load (loading) of lead-in wire 5 acts on the lead-in wire 5, but on the gas sensor 1 of an embodiment, the bend 5A of lead-in wire 5 is flexible absorption load (loading) and vibration by its elasticity, so can not cause the end 5B of base end side of the lead-in wire 5 of electrode heelpiece 6A～6D side to lose, the broken string of the end 5B of 5 the base end side of can preventing to go between.
And, because on the end 5B of each lead-in wire base end side of 5, be provided with by the wire material that will constitute lead-in wire 5 and be bent into the restraint structure that approximate quadrangle constitutes, so the strength of joint that engages with electrode heelpiece 6A～6D increases, the end 5B of 5 the base end side of can preventing from respectively to go between inadvertently comes off and breaks from electrode heelpiece 6A～6D.
In addition, under the user mode of the gas sensor 1 of an embodiment, because the heating of the well heater 2E of gas sensor element 2, each goes between and 5 expands, but this thermal expansion is absorbed by the extension of the bend 5A of lead-in wire 5.In addition, apply impact in the outside from gas sensor 1, during gas sensor element 2 violent oscillatory motions, each bend 5A of 5 of going between flexibly absorbs its vibration.
In addition, by lead-in wire 5, the main deformation direction of bend 5A is the bearing of trend that connects pin 4 and the straight line of the electrode heelpiece of gas sensor element 2.So, on the end 5B of lead-in wire 5 base end side, to along the direction that intersects with above-mentioned straight line, for example gas sensor element 2 is rotated direction on do not act on bigger stress.So, the broken string of the end 5B of 5 the base end side of can preventing from effectively to go between.
Like this,, can prevent that 5 the end 5B of respectively going between of electrode heelpiece 6A～6D side from losing, perhaps come off and break from electrode heelpiece 6A～6D by the gas sensor 1 of an embodiment.Similarly, the end 5B of 5 pin 4 sides of can preventing from respectively to go between loses, and perhaps comes off and breaks from the head 4A of pin 4.
In addition, under the user mode of the gas sensor 1 of an embodiment, when each lead-in wire 5 energising, because the material of lead-in wire 5 is noble metals of low gold of resistance value (Au) and platinum (Pt) etc., the precious metal alloys that perhaps contain these, no matter so whether have bend 5A, the increase of 5 the resistance value of can suppressing fully to go between.So bend 5A can not cause the reduction of the function of gas sensor 1 in fact.
In addition, under the user mode of the gas sensor 1 of an embodiment, on the bend 5A of each lead-in wire 5, because its shape causes the generation of impedance.Consequently on each lead-in wire 5, produce impedance, so can suppress the intrusion of external electromagnetic waves with respect to radio-frequency component.
That is, heat control is used, the electric current composition of detection usefulness is a direct current owing to logical adding on lead-in wire 5, so can fully suppress the increase of resistance value according to the material of above-mentioned lead-in wire 5.So,, only influence the radio-frequency component when invading electromagnetic wave from the outside by the impedance that the shape of bend 5A causes.Thus, can be suppressed at overlapping on the direct current component, improve the precision of sensor 1 further.
Gas sensor as sensor of the present invention is not limited to an above-mentioned embodiment.For example, lead-in wire 5 shown in Figure 4 also can become Fig. 5～shape shown in Figure 14, the lead-in wire of structure.
Lead-in wire 9 shown in Figure 5, having between the 9B of both ends is the bend 9A of zigzag bending continuously.Both ends 9B has the restraint structure same with the both ends 5B of lead-in wire shown in Figure 45.This lead-in wire 9 is the performance and the 5 identical action effects that go between also.
Lead-in wire 10 shown in Figure 6, having between the 10B of both ends is the bend 10A of coiled type bending continuously.Both ends 10B has the restraint structure same with the both ends 5B of lead-in wire shown in Figure 45.This lead-in wire 10 is the performance and the 5 identical action effects that go between also.
Lead-in wire 11 shown in Figure 7 has the bend 11A identical with the bend 5A of lead-in wire shown in Figure 45 between the 11B of both ends.Both ends 11B has hook-shaped restraint structure.That is, both ends 11B is along circular-arc curve setting.This lead-in wire 11 is the performance and the 5 identical action effects that go between also.
Lead-in wire 12 shown in Figure 8 has the bend 12A identical with the bend 5A of lead-in wire shown in Figure 45 between the 12B of both ends.Both ends 12B has jagged restraint structure.That is, both ends 12B is along being bent into jagged curve setting.This lead-in wire 12 is the performance and the 5 identical action effects that go between also.
Lead-in wire 13 shown in Figure 9 has the bend 13A identical with the bend 5A of lead-in wire shown in Figure 45 between the 13B of both ends.Both ends 13B has the restraint structure of the flat shape that is sub-circular.Its both ends 13B for example flattens processing by 13 the both ends of will going between and forms.This lead-in wire 13 is the performance and the 5 identical action effects that go between also.
Lead-in wire 14 shown in Figure 10 has the bend 15A identical with the bend 5A of lead-in wire shown in Figure 45 between the 14B of both ends.Both ends 14B has the restraint structure of the flat shape that is square.Its both ends 14B for example flattens processing by 14 the both ends of will going between and forms.This lead-in wire 14 is the performance and the 5 identical action effects that go between also.
Lead-in wire 15 shown in Figure 11 has the bend 14A identical with the bend 5A of lead-in wire shown in Figure 45 between both ends.The both ends of lead-in wire 15 are provided with along linearly extended line part 15B, 15B.On these line parts 15B, 15B, be respectively arranged with spheroidite 15C, 15C as the restraint structure.Spheroidite 15C has through hole, with the line part 15B tabling that passes through on this through hole.Spheroidite 15C is fixed on the line part 15B with suitable joint method.In addition, this spheroidite 15C, 15C also can be by with the both ends fusions of line part 15B, 15B, made it the method for spheroidizing and constituted by surface tension.
On this lead-in wire 15, line part 15B, the 15B of the inboard of spheroidite 15C, 15C engages with the head 4A of electrode heelpiece 6A～6D and pin 4, and this lead-in wire 15 is the performance and the 5 identical action effects that go between also.
Lead-in wire 16 shown in Figure 12 has the both ends 16B identical with both ends 5B shown in Figure 4.Lead-in wire 16 has bend 16A between the 16B of both ends.The squiggle that this bend 16A gradually changes from one end to the other side along bending direction and being provided with.In this example, bend 16A, from one end to the other side between crooked direction change 90 degree.
Lead-in wire 17 shown in Figure 13 has the both ends 17B identical with both ends 5B shown in Figure 4.Lead-in wire 17 has bend 17A between the 17B of both ends.This bend 17A is along from the long squiggle that diminishes of mediad one end and other end cycle and be provided with.
Lead-in wire 18 shown in Figure 14 has the both ends 18B identical with both ends 5B shown in Figure 4.Lead-in wire 18 has bend 18A between the 18B of both ends.This bend 18A is along from one end to the other side the cycle becomes big squiggle and is provided with.
As described above, the bend of lead-in wire is along repeatedly crooked curve, and when the straight line that connects gas sensor element and pin extends, can have arbitrary shape.
In addition, the both ends of lead-in wire have when preventing that the restraint that breaks from constructing, and can adopt arbitrary shape.For example, as the both ends of above-mentioned lead-in wire, the width of the direction that the width of end that also can be by making lead-in wire promptly intersects with the bearing of trend of the straight line that is connected gas sensor element and pin, bigger than the rugosity of the parts that constitute lead-in wire, realize the restraint structure.
The end of the gas sensor element side of lead-in wire also can have the structure shown in Figure 15～Figure 22.In addition, in the following description, 6A～6D is generically and collectively referred to as electrode heelpiece 6 with the electrode heelpiece.In the sensor of Figure 15～shown in Figure 19, gas sensor element is provided with through hole ht, and the end Le of the gas sensor element side of lead-in wire L passes through hole ht.End Le passes through hole ht with its front end to a side-prominent mode of a face of gas sensor.
As shown in figure 15, end Le also can be with the mode bending relative with a face of gas sensor element.In example shown in Figure 15, the electrode heelpiece 6 of end Le on the face that is arranged on gas sensor element.In addition, as shown in figure 15, end Le both can engage with electrode heelpiece 6 by the grafting material S of solder flux and pastel etc., in addition, also can be crimped on the electronic pads 6 without grafting material S.In addition, as shown in figure 16, the direction of end Le bending also can be different with direction shown in Figure 15.Also have, as shown in figure 16, end Le both can be crimped on the electrode heelpiece 6, also can be joined on the electrode heelpiece 6 by grafting material S, also can be crimped on the electronic pads 6 without grafting material S in addition.
As shown in figure 17, the front end of end Le also can be split pin.Under this formation, the front end of end Le is opened, with the mode bending relative with a face of sensing element.And end Le is engaged on the electrode heelpiece 6.Also have as shown in figure 17, end Le both can be joined on the electrode heelpiece 6 by grafting material S, also can be crimped on the electronic pads 6 without grafting material S in addition.
As Figure 18 and shown in Figure 19, the front end of end Le also can be out of shape by heat or laser in the mode relative with a face of sensing element.That is, as shown in figure 18, the front end of end Le also can be deformed into spherical, and in addition as shown in figure 19, the front end of end Le also can be to be out of shape along the mode of electrode heelpiece 6.And end Le such as Figure 18 and shown in Figure 19, end Le both can have been joined on the electrode heelpiece 6 by grafting material S, also can be crimped on the electronic pads 6 without grafting material S in addition.
In addition, shown in Figure 20～22, the end Le of the gas sensor element side of lead-in wire L also can have the structure of controlling.Be exactly as shown in figure 20 particularly, the end Le of gas sensor element side of lead-in wire L can have the structure of controlling that comprises face f1 relative with the face of a side of gas sensor element and the face f2 relative with the face of the opposite side of gas sensor element.In this constituted, by gas sensor element being clipped between face f1 and the face f2, the end Le of lead-in wire L was controlled.
In addition, the end Le of lead-in wire L shown in Figure 20 forms one with other parts of lead-in wire L, but as shown in figure 21, and the end Le of lead-in wire L also can be the structure that other parts with lead-in wire L are separated.In formation shown in Figure 21, end Le is provided with hole h, and the front end Lb1 of the bend Lb of lead-in wire L passes hole h and is fixed.
In addition, as shown in figure 22, also can form face f1 and face f2 by many bendings of end Le of the L that will go between.In this formation,, further improve so control the intensity of gas sensor element because the end Le of lead-in wire L is the laminated spring structure.
In addition, end Le both can engage with electrode heelpiece 6 by grafting material S shown in Figure 20～22, also can be crimped on the electronic pads 6 without grafting material S in addition.In addition, the front end of end Le both can be as shown in figure 23, parallel the ground bending with face f2, also can be as shown in figure 24, to a part of bending of the end Le that constitutes face f2 like that by bending.
In addition, omit diagram, on the lead-in wire shown in Fig. 4～Figure 14, omit the restraint structure at both ends, will be all as bend.Also the restraint structure at both ends can be become the shape of straight line in addition.In addition, the structure as the end of the bend of Fig. 4～shown in Figure 14 and Fig. 4～shown in Figure 22 can at random make up.
In addition, in gas sensor shown in Figure 11, with the surface with respect to gas sensor element 2, well heater 2E is positioned at the mode of bedplate 3 sides, and gas sensor element 2 is set.Substitute this, gas sensor 1B that also can be as shown in figure 25 and gas sensor 1C shown in Figure 26 are such, and with respect to well heater 2E, the surface of gas sensor element 2 is positioned at the mode of bedplate 3 sides, and gas sensor element 2 is set.In addition, gas sensor 1C that also can be as shown in figure 26, the back side at the gas sensor element 2 that well heater 2E is set is provided with electrode heelpiece 6E and 6F, by through hole electrode 6G electrode heelpiece 6E is connected on the electrode heelpiece 6A, electrode heelpiece 6F is connected on the electrode heelpiece 6B by through hole electrode 6H.On this gas sensor 1C, electrode heelpiece 6E and 6F 5 are connected on the head 4A of pin 4 by going between.
In addition, the gas sensor of one embodiment of the present invention is not limited only to detect the sensor of gas concentration lwevel, also can be used as all gases sensor that detects inflammable gas, hydrogen, CO gas, ethanol etc. and constitutes.
In addition, sensor of the present invention is not limited to gas sensor, also can be used as the various sensors of optical sensor, Magnetic Sensor, temperature sensor, acoustic sensor etc. and constitutes.
In sensor of the present invention, in service load (loading) and when vibration on each lead-in wire,, sweep of each lead-in wire is flexible by its elasticity to absorb load (loading) and vibration, so can prevent the broken string that each goes between.That is, can prevent at the manufacturing process of sensor and the broken string of the lead-in wire under the user mode.In addition,, can suppress electromagnetic wave noise and invade sensor, thus, can improve the precision of sensor by the impedance that the sweep at each lead-in wire produces.
Claims (12)
1. sensor is characterized in that having:
Base;
Be fixed on many pins on the described base;
Sensing element;
Described sensing element is connected in many lead-in wires on the described many pins,
The straight line of connected pin and sensing element is provided with described many lead-in wires in the described many pins along connecting respectively, and repeatedly bending between this pin and sensing element.
2. sensor as claimed in claim 1 is characterized in that:
Described many lead-in wires comprise periodically crooked part respectively.
3. sensor as claimed in claim 1 or 2 is characterized in that:
The width of described many lead-in wires end separately is the width of the direction that intersects of the bearing of trend with described straight line, and this width is than the parts that constitute this lead-in wire.
4. sensor as claimed in claim 3 is characterized in that:
Described many lead-in wires end bent separately.
5. sensor as claimed in claim 3 is characterized in that:
On described many lead-in wires end separately, be formed with the flattening part.
6. sensor as claimed in claim 3 is characterized in that:
Described many lead-in wires end separately is provided with spheroidite.
7. sensor as claimed in claim 1 or 2 is characterized in that:
Described sensing element is provided with a plurality of through holes, and through hole corresponding in described a plurality of through hole is passed in described many lead-in wires end separately.
8. sensor as claimed in claim 7 is characterized in that:
Described many lead-in wires end separately, its front end is to pass through hole corresponding in described a plurality of through hole to a side-prominent mode of a face of sensing element, and is relative with a described face.
9. sensor as claimed in claim 1 or 2 is characterized in that:
Described sensing element has a face and another face,
Described many lead-in wires end separately has first and with described another face relative second relative with a described face,
Described sensing element is sandwiched between described first and described second.
10. sensor as claimed in claim 1 is characterized in that:
Described many lead-in wires material separately is the material with impedance lower than the impedance of described sensing element.
11. sensor as claimed in claim 10 is characterized in that:
Described many lead-in wires material separately is noble metal or precious metal alloys.
12. sensor as claimed in claim 1 is characterized in that:
Described sensing element is for detecting the gas sensor element of specific gas.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004381176 | 2004-12-28 | ||
| JP2004381176 | 2004-12-28 | ||
| JP2005282798 | 2005-09-28 |
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| Publication Number | Publication Date |
|---|---|
| CN1797000A true CN1797000A (en) | 2006-07-05 |
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| CN 200510097511 Pending CN1797000A (en) | 2004-12-28 | 2005-12-28 | Sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109761187A (en) * | 2019-01-21 | 2019-05-17 | 中国科学院电子学研究所 | For reducing the package assembly and preparation method of MEMS sensor stress |
| CN114167028A (en) * | 2021-11-15 | 2022-03-11 | 天地（常州）自动化股份有限公司 | Mine methane sensor and pseudo data processing method |
-
2005
- 2005-12-28 CN CN 200510097511 patent/CN1797000A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109761187A (en) * | 2019-01-21 | 2019-05-17 | 中国科学院电子学研究所 | For reducing the package assembly and preparation method of MEMS sensor stress |
| CN114167028A (en) * | 2021-11-15 | 2022-03-11 | 天地（常州）自动化股份有限公司 | Mine methane sensor and pseudo data processing method |
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