CN1788942A - 3-PPTTRS six freedom degree parallel precise jiggle robot - Google Patents

3-PPTTRS six freedom degree parallel precise jiggle robot Download PDF

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Publication number
CN1788942A
CN1788942A CN 200510125990 CN200510125990A CN1788942A CN 1788942 A CN1788942 A CN 1788942A CN 200510125990 CN200510125990 CN 200510125990 CN 200510125990 A CN200510125990 A CN 200510125990A CN 1788942 A CN1788942 A CN 1788942A
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Prior art keywords
ppttrs
flexible hinge
freedom degree
robot
degree parallel
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CN100355536C (en
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张之敬
叶鑫
金鑫
张卫民
王西彬
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Beijing Institute of Technology BIT
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Beijing Institute of Technology BIT
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Abstract

The 3-PPTTRS six-freedom parallel precise micro robot consists of five parts, including a 3-PPTTRS mechanism, a flexible hinge pair, a hydrostatic screw-nut mechanism, a hydraulic oil supplier and an opened numerically controller. The robot has six freedoms, linear X, Y and Z motion range of 10 mmX10 mmX10 mm, linear resolution of 0.01 micromX0.01 micromX0.01 microm, rotation motion range of 10 degX16 degX10 deg, and rotation resolution of 0.023 degX0.055 degX0.023 deg, and is superior to available similar robots. The present invention has capacity of bearing great impact load, great weight load and relatively large precise installing range, combines the macro and micro motion system tightly, and has practical application value in micro displacement field.

Description

A kind of 3-PPTTRS six freedom degree parallel precise jiggle robot
Technical field
The present invention relates to a kind of 3-PPTTRS six freedom degree parallel precise jiggle robot, belong to the electromechanical integration field.
Background technology
Precise jiggle robot is with a wide range of applications in the micro-/ nano technical field owing to have very high positional precision and operating accuracy.Along with the development of robot mounting technology, the robot assembling has become one of importance of robot industry application.In little assembling field, along with further developing of microminiature manufacturing technology and micro electro mechanical system (MEMS) technology, the foundation of the accurate automatic assembly system of active demand microminiature device, the high-precision precise jiggle robot of active demand.
General robot generally adopts open-chain structure, and the free degree is more, and physical dimension is also bigger, so component elasticity distortion, driving error and joint space etc. are bigger in the accumulated error that its end caused.The precision of code-disc and the error of calculation of coordinate transform etc. also can exert an influence to robot end's positional precision, and therefore their positional precision is not high usually.On the other hand, because the transmission chain length, and motional inertia is bigger, adds the coordinate transform more complicated, needs the cost certain hour, so the frequency response of all-purpose robot is general also not too high, so robot is restricted aspect precise operation.
In order to overcome the drawback of traditional common robot, occurred utilizing parallel institution to replace the robot new technology of tradition polyphone open chain mechanism in recent years.Because replacing traditional cantilever beam and two fulcrum beams with the truss leverage, parallel institution comes load bearing component gravity, the quality that adds moving component obviously reduces and mainly is made up of electromechanical integration parts such as electric main shaft, ball-screw, linear electric motors, thereby has rigidity height, good, the robot modularized degree height of dynamic property, is easy to advantages such as reconstruct and frame for movement is simple.And at present a lot of precision machinery people, though with having adopted parallel institution, but generally all adopt Stewart mechanism and variant form thereof, the piezoelectric ceramics that adopt as driver more, thereby be subjected to the restriction of size and drive system, the robot moving range is generally all at micron order, though precision can reach requirement, does not have great practical value.
In order to satisfy the requirement in precise jiggle robot market, widen the usage range of precise jiggle robot, must on the basis that guarantees precision machinery people precision, enlarge the range of movement and the bearing capacity of robot, solve problems such as mechanical stiffness, vibration, control and security protection.Must study in all many-sides such as mechanism design, precision analysis, stiffness analysis, control modes, seek optimal solution.
A kind of 3-PPTTRS six freedom degree parallel precise jiggle robot provided by the invention yet there are no similar achievement in research, and this robot adopts the type of drive of special 3-PPTTRS mechanism, flexible hinge pair and HYDRAULIC CONTROL SYSTEM static pressure screw mechanism.The technical indicator of robot is as follows:
Number of degrees of freedom, 6
Linear motion range X 10mm
Y 10mm
Z 10mm
Rectilinear motion resolution ratio X 0.01μm
Y 0.01μm
Z 0.01μm
Scope rotatablely moves ψ 10°
θ 16°
10°
Resolution ratio rotatablely moves ψ 0.023°
θ 0.055°
0.023°
Bear a heavy burden 4Kg
Bear maximum impact force 40N
Mechanical part weight 0.7Kg
Summary of the invention
The object of the present invention is to provide a kind of six freedom degree parallel precise jiggle robot that is used for little assembling.The present invention mainly comprises 3-PPTTRS mechanism, flexible hinge pair, static pressure screw mechanism, five parts of hydraulic oil supply system and digital control system in open type.This robot adopts special 3-PPTTRS mechanism, realizes interior in a big way precision positioning in conjunction with the flexible hinge pair, micro part to be assembled is installed on the workbench of 3-PPTTRS six freedom degree parallel precise jiggle robot by the microminiature anchor clamps, drive system applies displacement to six mobile driver parts, thereby make workbench carry out the conversion of coordinate and pose, workbench drives micro part and carries out the motion of micro-displacement and small pose.
Beneficial effect
3-PPTTRS six freedom degree parallel precise jiggle robot of the present invention has six degree of freedom, and the straight line and the scope that rotatablely moves are big, the resolution ratio height, and it is big to bear a heavy burden, and the power that withstands shocks is big, and control is convenient, and the characteristics of good reliability are applicable to the digitlization assembling of microminiature device.
Description of drawings
Fig. 1 is the version of 3-PPTTRS six freedom degree parallel precise jiggle robot
Fig. 2 is the version of 3-PPTTRS six freedom degree parallel precise jiggle robot single armed
Fig. 3 is the operation principle of 3-PPTTRS six freedom degree parallel precise jiggle robot
Fig. 4 is the 3-PPTTRS mechanism principle figure
Fig. 5 is the basic structure schematic diagram of kinematic chain
Fig. 6 a is that single shaft flexible hinge Fig. 6 b flexible hinge is that shaft flexible hinge Fig. 6 c is the three-degree of freedom flexible hinge
Fig. 7 a is that static pressure feed screw nut axially loaded schematic diagram Fig. 7 b is a static pressure feed screw nut radial force schematic diagram
Fig. 8 is the oil supply system schematic diagram
Fig. 9 is oil supply system control principle figure
Figure 10 is the control system schematic diagram
Among the figure: center Bi, the Ci-representative of the ball pair that secondary 3-of 1-parallel precise jiggle robot workbench 2-flexible hinge hammer flexible hinge revolute pair 4-flexible hinge Hooke's hinge 5-secondary 9-of micro part 6-guide rail 7-moving sets 8-ball Hooke's hinge 10-moving sets 11-revolute pair 12-screw rod 13-nut 14-oil pocket 15-fuel tank 16-filter 17-motor 18-pump 19-overflow valve 20-electromagnetic servo valve 21-static pressure oil pad 22-static-pressure screw nut Ai-to be assembled representative links to each other with workbench with drive moving sets center Di-that guide rail links to each other be about two revolute pair centers that bar is connected.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is described further:
The present invention mainly comprises 3-PPTTRS mechanism, flexible hinge pair, static pressure screw mechanism, five parts of hydraulic oil supply system and digital control system in open type.3-PPTTRS of the present invention mechanism can produce bigger stroke range, and can carry out the motion of six degree of freedom system by simple straight line moving sets 10 input displacements; In same system, adopt single shaft, twin shaft and three-degree of freedom flexible hinges as the kinematic pair in the 3-PPTTRS mechanism simultaneously, utilize the special construction of flexible hinge, having avoided the conventional motion synetion is the error that friction, gap and rollback idle running cause; Though the static pressure technical know-how is quite ripe, but high-precision static pressure screw mechanism is applied to the parallel precise jiggle robot field still for the first time, adopt the static pressure screw mechanism as the moving sets in the 3-PPTTRS mechanism, straight-line feed resolution ratio can reach 0.01 μ m, and this mechanism is stable by a cover pressure, temperature constant, the demanding oil supply system of filtration drive; The digital control system in open type that adopts computer to combine with the PMAC card carries out precision control in conjunction with corresponding control strategies.
3-PPTTRS mechanism structure schematic diagram as shown in Figure 3, this mechanism names according to the naming method of parallel institution, expression has 3 kinematic chain parallel connections, each kinematic chain is by two moving sets 10, two Hooke's hinges 9, the secondary 8 and revolute pairs 11 of ball are formed, be connected with workbench 1 by ball secondary 8, wherein the axis of two moving sets 10 is on same the straight line perpendicular to ground all the time, two Hooke's hinges 9 link to each other with two moving sets 10 respectively, revolute pair 11 connects two bars that stretched out by Hooke's hinge 9, and the end that ball pair 8 is positioned at stock links to each other with workbench, and the kinematic chain structural principle as shown in Figure 4.3-PPTTRS mechanism has six-freedom degree, adopts symmetric design, three strip kinematic chains in the space with workbench 1 be the center according to 120 ° of symmetrical distributions to keep the balance of system, the dynamic performance of raising entire system.
This mechanism drives by moving sets 10, and the axis that is in two moving sets 10 of same kinematic chain is on same the straight line.The drive system of HYDRAULIC CONTROL SYSTEM static pressure screw mechanism all can be installed by each moving sets 10 place, and it is the straight-line displacement of 0.01 μ m that mobile accuracy is provided.Kinematic pair among the present invention in the 3-PPTTRS mechanism is not traditional kinematic pair, and is to use flexible hinge to replace traditional Hooke's hinge 9, revolute pair 11 and ball pair 8, can improve the precision and the resolution ratio of system so greatly.Wherein revolute pair 11 adopts the single shaft flexible hinge, and Hooke's hinge 9 adopts the shaft flexible hinge, and ball secondary 8 adopts the three-degree of freedom flexible hinge.The version of these three kinds of flexible hinges such as Fig. 6.
The code name of every kinematic chain is with alphabetical i (i=1,2,3) expression, and wherein Bi, Ci have represented and driven the moving sets center that guide rail links to each other, Di for about two revolute pair centers that bar is connected, Ai has then represented the center of the ball pair that links to each other with workbench.Because the special construction of kinematic chain makes the motion analysis of workbench get up more convenient.Because | AiDi|=BiDi|=|CiDi|, 3 of AiBiCi have constituted a right angled triangle in the space so, and the Bi place is the summit, right angle, and Ai and Bi be in same height all the time, and promptly Ai equates all the time with the Z coordinate of Bi.The Z coordinate at workbench center also can be determined by Bi so.The position of Ci has then determined the position of workbench center in the XY plane.
The flexible hinge pair is to be made into special structure with flexible hinge, in this robot mechanism, is used for substituting the various kinematic pairs of 3-PPTTRS mechanism.Applications of Flexure Hinge is to guarantee that mechanism can realize a major technique of precision positioning.Flexible hinge is a kind of resiliency supported that can make finite angular displacements around axle, and the middle part is weak, can produce significantly angular flexibility distortion under moment loading, can play the effect of hinge in frame for movement.Compare with general hinge, flexible hinge does not have the gap on the frame for movement, and flexible restoring force, thereby has eliminated friction and the rollback idle running in the motion.Flexible hinge is divided into two kinds of single shaft and twin shafts, and the single shaft flexible hinge is around an axle elastic bending, and the shaft flexible hinge is along the elastic bendings of two mutually perpendicular axles, and this elastic bending is reversible.Use flexible hinge to replace traditional Hooke's hinge, revolute pair and ball pair, can improve the precision of system greatly.
Traditional Hooke's hinge has the free degree of rotating around two mutually perpendicular axles, and the shaft flexible hinge among Fig. 5 b can rotate around mutually perpendicular two axles by its center, can replace traditional Hooke's hinge in the online elastic range fully.Traditional revolute pair has the single-degree-of-freedom of rotating around an axle, and the single shaft flexible hinge among Fig. 5 a then can rotate around the axle by its center, can replace traditional revolute pair in the online elastic range fully.Traditional ball pair can be around doing any rotation by the X under the Cartesian coordinates at its center, Y, three axles of Z in the space, three-degree of freedom flexible hinge among Fig. 5 c then can around by its center with the perpendicular plane of its axis in orthogonal two axles rotate, also can rotate, can replace traditional ball pair in the online elastic range fully around its axis.
The sub-kinematic chain structure that is replaced fully by the flexible hinge pair as shown in Figure 2,7 pairs of systems drive by moving sets, the secondary relation of determining between each member of flexible hinge drives movable workbench and rotation.
Moving sets 10 in the 3-PPTTRS mechanism adopts the static pressure screw-nut body, and its operation principle as shown in Figure 7.Static pressure feed screw nut 22 is a kind of precision drive mechanisms, has that coefficient of friction is little, the life-span is long, transmission efficiency is high, a good anti-vibration, operating accuracy advantages of higher.Creeping phenomenon that the static pressure screw-nut body does not cause because of friction or the existence of idle stroke oppositely the time, and very high axial rigidity is arranged, the positioning accuracy height.The resolution ratio of empty static pressure screw mechanism can reach 0.01 μ m, and its feed accuracy is than high 2 orders of magnitude of C0 level ball-screw.The performance characteristics of mechanism is very suitable for the use of high-precision parallel robot moving sets, and its drive unit is that a cover pressure is stable, temperature constant, the demanding oil supply system of filtration.
The axial operation principle of static pressure screw-nut body is shown in Fig. 7 a.Have relative oil pocket 14 in the both sides of static pressure feed screw nut, pressure oil enters oil pocket 14 through flow controller.No-load is done the time spent, and the gap, two sides equates that the flow that flows out along the gap by each oil pocket equates, so oil pocket pressure equates that also this is the centre position that leading screw is positioned at nut, the maintenance balance.After the static pressure feed screw nut is subjected to a responsive to axial force, the leading screw secundly, this is the side clearance minimizing of pressurized, and oil pocket pressure also increases thereupon, and opposite side is then opposite, and the gap increases, and pressure descends, and has formed pressure differential, keeps balance with the opposing external applied load.
The radially operation principle of static pressure screw-nut body is shown in Fig. 7 b.When unloaded, pressure oil enters oil pocket through capillary restrictor, and leading screw is in the center under the effect of the corresponding oil pocket pressure of every button, and at this moment the oil-recovery tank from crest and tooth bottom flows out fluid through the gap.After leading screw is subjected to the radial load effect, on loading direction, produce displacement, oil return gap, lower oil cavitie place is reduced, the oil return resistance increases, and oil pocket pressure raises.And oil return gap, upper oil cavitie place increases, and the oil return resistance reduces, and oil pocket pressure descends, and has formed pressure differential and external applied load balance thus.This moment is owing to the variation of each oil pocket pressure, so the pressure oil of lower oil cavitie except returning the mailbox from crest, tooth underflow the interior flow phenomenon to upper oil cavitie takes place also.
This explanation static pressure screw-nut body can either bear axial load, also can bear radial load.By axial driving, can realize the micrometric displacement of axis.
Hydraulic oil supply system is a drive unit of the present invention.Static pressure feed screw nut 22 adopts structure multi-cavity type, no oil scupper, can bear eccentric load, and anti-turning over ability is arranged.In order to guarantee pressure stability in each oil pocket, adopt proportional valve to each oil pocket fuel feeding, obtain pressure stability, temperature constant, the demanding oil supply system of filtration as shown in Figure 8.The control of oil supply system as shown in Figure 9.
Fig. 8 is the schematic diagram of proportional valve to each oil pocket fuel feeding.Motor 17 drives pump 18 rotations, and oil is extracted out from fuel tank 15, filters through filter 16.Fluid is divided into two after by pump 17, and one is that unnecessary fluid is got back in the fuel tank 15 by overflow valve 19, and another then flows into static pressure lubricating pads 21 by electromagnetic servo valve 20, and then drives the static pressure screw-nut body and do the micrometric displacement motion.This fuel system can be regulated oil pocket pressure automatically with the variation of oil film thickness, to adapt to the variation of load.
Hydraulic pressure fuel feeding drive system is connected by drive control signal with digital control system in open type, as shown in Figure 9.Drive model by after potentiometer, the electric charge amplification, pass to by hydraulic efficiency servo-valve.Hydraulic efficiency servo-valve converts drive control signal to fluid flow and controls the static pressure screw-nut body and carry out micrometric displacement motion.Certainly, to reach the system of 0.01 μ m must be a closed-loop system to precision.On the static pressure screw-nut body, reprint displacement detector, and displacement signal is fed back to charge amplifier.
Control system adopts the open mode of " PC+ motion controller ", and forming with the PC is that host computer, motion controller are the distribution control of slave computer, as shown in figure 10.Main hardware module comprises industrial computer, motion controller, I/O template, driving and detection etc.But open digital control system has guaranteed the movement locus precision of 3-PPTTRS six freedom degree parallel precise jiggle robot system when fully guaranteeing portability, extensibility concertedness and the scalable of digital control system.
Control system comprises six cover drive systems, and six groups of static pressure feed screw nuts that are respectively applied for the accurate parallel micromotion of six degree of freedom robot drive.Motion control card calculates the straight-line displacement of six drive ends of robot by the inverse kinematics relation, respectively by the driving signal of six drivers generations to each magnetic valve, magnetic valve is received the openings of sizes of regulating flow valve behind the signal, thereby regulate the size of flow, the trace by flow changes and reaches the accurate purpose that the static pressure screw-nut body produces micrometric displacement that drives.See miscellaneous function equipment, driving indicating device and warning device, detect control panel input signal etc. by I/O panel control robot.Industrial computer comprises contents such as driver, panel and keypad, memory and display.
The above only is preferred embodiment of the present invention, and is in order to restriction the present invention, within the spirit and principles in the present invention not all, any modification of being done, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (6)

1, a kind of 3-PPTTRS six freedom degree parallel precise jiggle robot is characterized in that mainly being made of 3-PPTTRS mechanism, flexible hinge pair, static pressure screw-nut body, hydraulic oil supply unit and five major parts of open cnc device;
2, a kind of 3-PPTTRS six freedom degree parallel precise jiggle robot according to claim 1, it is characterized in that there are 3 kinematic chain parallel connections in 3-PPTTRS mechanism, each kinematic chain is made up of two moving sets, two Hooke's hinges, a revolute and a ball pair, is connected with workbench by ball is secondary;
3, a kind of 3-PPTTRS six freedom degree parallel precise jiggle robot according to claim 1, what it is characterized in that the secondary employing of flexible hinge is that friction is creeped, do not had to no gap, nothing, can make the resiliency supported of finite angular displacements around axle, the middle part weak the flexible hinge pair;
4, a kind of 3-PPTTRS six freedom degree parallel precise jiggle robot according to claim 1 is characterized in that having relative oil pocket in the both sides of static pressure feed screw nut;
5, a kind of 3-PPTTRS six freedom degree parallel precise jiggle robot according to claim 1 is characterized in that adopting the open mode of " PC+ motion controller ", and forming with the PC is that host computer, motion controller are the distribution control system of slave computer;
6, a kind of 3-PPTTRS six freedom degree parallel precise jiggle robot according to claim 3, it is characterized in that flexible hinge is divided into two kinds of single shaft and twin shafts, the single shaft flexible hinge is around an axle elastic bending, and the shaft flexible hinge is along the elastic bending of two mutually perpendicular axles.
CNB2005101259902A 2005-12-02 2005-12-02 3-PPTTRS six freedom degree parallel precise jiggle robot Expired - Fee Related CN100355536C (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100446939C (en) * 2006-10-13 2008-12-31 北京理工大学 Macrography/microcosmic association 12 freedom degree micro assembly system
CN103111999A (en) * 2013-02-23 2013-05-22 北京工业大学 Flexible-joint parallel robot device
CN103878766A (en) * 2014-04-04 2014-06-25 苏州大学 Three-PRS type micro-motion parallel robot
CN109471409A (en) * 2018-11-09 2019-03-15 福州大学 A kind of application method using numerical control macroprogram in parallel machine

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100334902B1 (en) * 1999-12-06 2002-05-04 윤덕용 6 Degree-of-freedom Parallel Mechanism for Micro-positioning Task
CN1127401C (en) * 2001-02-27 2003-11-12 燕山大学 Three free degree moving parallel connected robot mechanism
JP2003172418A (en) * 2001-12-07 2003-06-20 Koji Kondo Parallel mechanism robot arm (3)
CN100345665C (en) * 2003-12-25 2007-10-31 电子科技大学 Precisely micro-operated robot structure
CN1292877C (en) * 2004-11-15 2007-01-03 北京工业大学 Microgenerator for realizing microcutting operation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100446939C (en) * 2006-10-13 2008-12-31 北京理工大学 Macrography/microcosmic association 12 freedom degree micro assembly system
CN103111999A (en) * 2013-02-23 2013-05-22 北京工业大学 Flexible-joint parallel robot device
CN103878766A (en) * 2014-04-04 2014-06-25 苏州大学 Three-PRS type micro-motion parallel robot
CN109471409A (en) * 2018-11-09 2019-03-15 福州大学 A kind of application method using numerical control macroprogram in parallel machine

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