CN1788913A - Automatic laser welding device for fibre-optical active component - Google Patents
Automatic laser welding device for fibre-optical active component Download PDFInfo
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- CN1788913A CN1788913A CN 200510032570 CN200510032570A CN1788913A CN 1788913 A CN1788913 A CN 1788913A CN 200510032570 CN200510032570 CN 200510032570 CN 200510032570 A CN200510032570 A CN 200510032570A CN 1788913 A CN1788913 A CN 1788913A
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Abstract
The automatic laser welding apparatus for active fiber device includes a work table, a control unit, a laser welding mechanism and a precise butt jointing mechanism, and the laser welding mechanism and the precise butt jointing mechanism are installed on the work table. The precise butt jointing mechanism includes a fiber position regulating mechanism and a light source device position regulating mechanism, the fiber position regulating mechanism includes three successively superposed 1D translation stages and one fiber device fixture on the stages, and the light source device position regulating mechanism includes one 2D inclined stage and two orthogonal micro platforms in the same structure and on the inclined stage. The control unit includes one host control computer and one light power meter and is connected via cables to other mechanisms. The present invention has the advantages of simple structure, simple control, low cost, great stroke, high resolution, etc.
Description
Technical field
The present invention is mainly concerned with the sub-micron of optical fibre device and makes theory and key technology area, refers in particular to a kind of automatic laser welding device for fibre-optical active component.
Background technology
In the prior art, fibre-optical active component comprises the assembly and the module of light source (LD, LED), detector, image intensifer, light source-fiber coupler, light source-all kinds of opto-electronic devices such as detection coupler.Fibre-optical active component is the core of fiber optic applications system, not only influences the performance of system, and also the cost to whole system has great influence.How with light from the light source coupled into optical fibres, obtain high coupling efficiency, be the key issue of fibre-optical active component encapsulation.Core technology is to realize sub-micron alignment and welding.
Aligning in the fibre-optical active component encapsulation is at present mostly finished by manual.At first preliminary alignment light source device and single-mode fiber under microscopical help, make single-mode fiber obtain a certain amount of initial coupled power, be coupled into the luminous power of single-mode fiber then by monitoring, manually adjust the relative position of light source device and single-mode fiber and realize fine registration, use laser weld fixed sealing arrangement at last.Because manual operations, therefore depend on operation skilled worker's qualification especially, also have simultaneously speed slow, yield poorly, shortcomings such as yield rate is low, the device performance uniformity is poor, product cost and price height, at present the military and civilian field is to high-performance, the fibre-optical active component demand is increasing cheaply, therefore need the development automatic laser welding device, to finish automatic aligning and the welding encapsulation on the submicron-scale, and at this wherein, the most critical technology just is the aligning guide of high Motion Resolution rate.
Summary of the invention
The technical problem to be solved in the present invention just is: at the technical problem of prior art existence, the invention provides a kind of have simple in structure, control simple, with low cost, big stroke and advantages such as high-resolution combines, can realize the automatic aligning and the welding encapsulation operation of fibre-optical active component encapsulation, thereby improve the automatic laser welding device for fibre-optical active component of the yield rate of device encapsulation.
In order to solve the problems of the technologies described above, the solution that the present invention proposes is: a kind of automatic laser welding device for fibre-optical active component, it is characterized in that: it comprises workbench, control module, laser weld mechanism and accurate docking mechanism, and laser weld mechanism and accurate docking mechanism all are installed on the workbench; This precision docking mechanism comprises fiber position guiding mechanism and light source device position adjusting mechanism, described fiber position guiding mechanism comprises three identical in structure X-axis translation stages, Y-axis translation stage and Z axle translation stages and optical fibre device anchor clamps, the mutual successively vertical pile of Y-axis translation stage, X-axis translation stage and Z axle translation stage, the optical fibre device anchor clamps are fixed on the Z axle translation stage; Described light source device position adjusting mechanism comprise the angle tilting table of a two dimension and two identical X of quadrature displacement structure to micromotion platform and Y to micromotion platform, X is installed on the top of the angle tilting table of two dimension to micromotion platform to micromotion platform and Y; Control module comprises main control computer and light power meter, and main control computer links to each other with the light source device position adjusting mechanism with the fiber position guiding mechanism respectively by cable.
Described X adopts the micromotion platform of same structure to micromotion platform and Y to micromotion platform, and this micromotion platform comprises stepper motor, connecting screw rod, compression spring, micromotion platform main body, flexible hinge, plane bearing and micrometric displacement output unit; One end of connecting screw rod is fixed on the output shaft of stepper motor, and the other end links to each other with the micromotion platform main body by axle; Compress spring on the front end sleeve of axle, the other end of this compression spring is enclosed within on the plane bearing, and this compression spring is arranged in the stopper slot of offering on the micromotion platform main body, and plane bearing is connected with the micrometric displacement output unit by the plane bearing locating hole; The micrometric displacement output unit links to each other with the micromotion platform main body by four flexible hinges, and four adjacent flexible hinges constitute parallelogram.
Described angle tilting table comprises tilting table base, the first angle hang plate, the second angle hang plate, tilting table, first stepper motor, second stepper motor, the first compression spring, second compression spring and the steel ball, the tilting table base is installed on the workbench, the first angle hang plate and the second angle hang plate are stacked in the top of tilting table base successively, tilting table is fixed in the top of the second angle hang plate, and is equipped with steel ball between the first angle hang plate and the second angle hang plate and the first angle hang plate and the tilting table base; First stepper motor is fixed in by the first stepping motor fixture on the side of tilting table base, the output shaft of first stepper motor be arranged at the first angle hang plate, one side on first the compression spring link to each other; Second stepper motor is fixed in the top of tilting table by the second stepper motor fixture, and the output shaft of second stepper motor links to each other with the second compression spring on being arranged at tilting table.
Described X-axis translation stage, the Y-axis translation stage adopts identical motion in one dimension translation stage with Z axle translation stage, this motion in one dimension translation stage comprises the stepper motor fixture, stepper motor, shaft coupling, threaded screw rod, the translation stage body, spherical guide and translation stage working face, stepper motor is installed on a side of translation stage body by the stepper motor fixture, threaded screw rod is positioned at translation stage body middle part hollow-out parts, one end of threaded screw rod links to each other with the output shaft of stepper motor by shaft coupling, the translation stage working face is installed on the threaded screw rod and is connected with the contact of translation stage body maintenance face, is provided with spherical guide in the contact-making surface of translation stage working face and translation playscript with stage directions body.
Described laser weld mechanism comprises solid state laser, optical splitter, three identical Transmission Fibers, three identical focus lamps and focus lamp guiding mechanism, three focus lamps are distributed on the workbench by the focus lamp guiding mechanism, be 120 ° angle between per two focus lamps, each focus lamp links to each other with solid state laser, optical splitter and control module successively by Transmission Fibers.
Described fiber clamp comprises main folder head, sub-folder head, connecting axle and spring, and this fiber clamp is fixed on the Z axle translation stage by the fiber clamp support, and main folder head and sub-folder head are hinged by connecting axle, and are provided with a spring between main folder head and sub-folder head.
Compared with prior art, the invention has the advantages that:
1, the basic machine of accurate docking mechanism adopts modularized design in the automatic laser welding device for fibre-optical active component of the present invention, realize the adjustment of multivariant position by the building block system combination, its adaptability is strong, flexibility is big: the different requirements of the alignment precision of different directions during with optical fiber align according to device, kinematic system adopts the mode of coarse adjustment and the combination of accurate adjustment joint, the requirement of big stroke can be satisfied, high-precision requirement can be reached again;
2, the fiber position guiding mechanism uses three leading screws to drive in the automatic laser welding device for fibre-optical active component of the present invention, the accurate translation stage of the one dimension of spherical guide transmission is combined into directions X, Y direction and Z direction three degrees of freedom of movement, carry out optical fiber and device aiming on these three directions, realize the position adjustment of directions X and Y direction coarse alignment and the aligned position adjustment of Z direction;
3, the light source device position adjusting mechanism of automatic laser welding device for fibre-optical active component of the present invention has used a two dimension angular tilting table, thereby can adjust the depth of parallelism of light source device and optical fiber, eliminates the angular deviation between them as far as possible.Because the Best Coupling of device and optical fiber is subjected to have the greatest impact perpendicular to the transversion malposition of optical axis, so lateral alignment needs the motion platform of higher Motion Resolution rate.Comprise two micromotion platforms of design voluntarily in the device position guiding mechanism, realize the fine registration of directions X and Y direction;
4, the designed micromotion platform of automatic laser welding device for fibre-optical active component of the present invention drives by stepper motor, utilize the strain of flexible hinge to realize the micrometric displacement of high Motion Resolution rate, owing to adopt the flexible hinge structure of parallelogram, avoided on the vertical direction of X, Y, producing the cross-couplings displacement, guaranteed the linearity of output displacement;
5, all motion platforms of automatic laser welding device for fibre-optical active component of the present invention are all driven by stepper motor, and control is simple, and system cost is low.By the combinations thereof of motion platform, realize that device and optical fiber are at X, Y, Z, θ
X, θ
YAligning on five frees degree.
In sum, automatic laser welding device for fibre-optical active component of the present invention is simple in structure, cost is low, control is convenient, automaticity is high, micromotion platform Motion Resolution rate height, do not have and creep and the gap, the cross-couplings that does not have the different motion direction, can realize high-resolution alignment function, improve the yield rate of device encapsulation; Wherein accurate docking mechanism also can be used for microfabrication, microelectronics assembling etc. and need the occasion of microposition and microoperation, and can take different compound modes.
Description of drawings
Fig. 1 is that the master of automatic laser welding device for fibre-optical active component of the present invention looks schematic diagram;
Fig. 2 is the schematic top plan view of automatic laser welding device for fibre-optical active component of the present invention;
Fig. 3 is that fiber position guiding mechanism master looks schematic diagram in the accurate docking mechanism of the present invention;
Fig. 4 is a fiber position guiding mechanism schematic top plan view in the accurate docking mechanism of the present invention;
Fig. 5 is that Y-axis is looked schematic diagram to the master of translation stage in the fiber position guiding mechanism of the present invention;
Fig. 6 be in the fiber position guiding mechanism of the present invention Y-axis to the schematic top plan view of translation stage;
Fig. 7 is that the master of light source device position adjusting mechanism of the present invention looks schematic diagram;
Fig. 8 is the schematic top plan view of light source device position adjusting mechanism of the present invention;
Fig. 9 is that the master of micromotion platform in the light source device position adjusting mechanism of the present invention looks schematic diagram;
Figure 10 is the cross-sectional schematic of A-A among Fig. 9;
Figure 11 is that the master of two dimension angular tilting table in the light source device position adjusting mechanism looks schematic diagram;
Figure 12 is the schematic top plan view of two dimension angular tilting table in the light source device position adjusting mechanism;
Figure 13 is that the master of fiber clamp looks schematic diagram among the present invention;
Figure 14 is the schematic top plan view of fiber clamp among the present invention;
Figure 15 is the principle schematic based on the automatic alignment methods of light distribution of fibre-optical active component encapsulation of the present invention.
Marginal data
1. workbench 2. light source device position adjusting mechanisms
21. two dimension angular tilting table 210. angle tilting table bases
211. the first angle hang plate, 2111. first stepper motors
2112. stepper motor fixture 2113. first compression springs
2114. steel ball 2115. first compression spring locating shafts
212. the second angle hang plate, 2121. second stepper motors
2122. stepper motor fixture 2123. second compression springs
2125. the second compression spring locating shaft, 213. angle tilting tables
2131. workpiece retaining thread hole 22.X is to micromotion platform
221. stepper motor 222. stepper motor fixtures
223. 224. of connecting screw rods
225. fixing hole 226. stopper slots
227. compression spring 228. micromotion platform main bodys
229. flexible hinge 2210. plane bearings
2211. plane bearing locating hole 2212. screwed holes
2214. micrometric displacement output unit 23.Y is to micromotion platform
231. stepper motor 232. stepper motor fixtures
24. first keyset, 25. second keysets
26. the 3rd keyset 3. fiber position guiding mechanisms
31. fiber position guiding mechanism base 32.X axle translation stage
321. stepper motor fixture 322. stepper motors
323. fixing hole 33.Y axle mobile platform
331. keyset 332. stepper motors
333. stepper motor fixture 334. shaft couplings
335. threaded screw rod 337. translation stage bodies
338. spherical guide 339. translation stage working faces
34.Z axle translation stage 341. fixed supports
342. stepper motor 343. stepper motor fixtures
4. laser weld part 41. focus lamps
42. focus lamp guiding mechanism 51. light source device anchor clamps
52. fiber clamp 521. main folder heads
522. sub-folder 523. connecting axle
524. spring 53. fiber clamp supports
54. light source device 55. optical fiber
56. optical fiber sleeve 6. light power meters
7. main control computer 8. solid state lasers
9. optical splitter 10. Transmission Fibers
The specific embodiment
Below with reference to the drawings and specific embodiments the present invention is described in further details.
As depicted in figs. 1 and 2, automatic laser welding device for fibre-optical active component of the present invention comprises workbench 1, control module, laser weld mechanism and accurate docking mechanism, and laser weld mechanism and accurate docking mechanism all are installed on the workbench 1.This precision docking mechanism comprises the fiber position guiding mechanism 3 of Three Degree Of Freedom and the light source device position adjusting mechanism 2 of four-degree-of-freedom, fiber position guiding mechanism 3 grip optical fibers, light source device position adjusting mechanism 2 installing devices, thus can realize the relative position adjustment of light source device and optical fiber five degree of freedom.This laser weld mechanism comprises solid state laser 8, optical splitter 9, three identical Transmission Fibers 10, three identical focus lamps 41 and focus lamp guiding mechanisms 42, three focus lamps 41 are distributed on the workbench 1 by focus lamp guiding mechanism 42,120 ° angle between per two focus lamps 41, each focus lamp 41 links to each other with solid state laser 8, optical splitter 9 and control module successively by Transmission Fibers 10, and this laser weld mechanism is used to provide three light beam pulse laser of 120 ° of circle symmetrical distributions.Control module comprises main control computer 7 and the desk-top light power meter 6 of JW3202 binary channels, and this control module links to each other with accurate docking mechanism with laser weld mechanism respectively by cable.Optical fiber on the fiber clamp 52 is connected to the input of light power meter 6, and the data output of light power meter 6 is read by main control computer 7 by serial ports of computers.
As Fig. 3, Fig. 4, Fig. 5 and shown in Figure 6, the fiber position guiding mechanism 3 of Three Degree Of Freedom of the present invention comprises fiber position guiding mechanism base 31, three identical in structure X-axis translation stages 32, Y-axis translation stage 33 and Z axle translation stage 34 and optical fibre device anchor clamps 5, wherein Y-axis translation stage 33, X-axis translation stage 32 and Z axle translation stage 34 mutual vertical pile, optical fibre device anchor clamps 5 are fixed on the Z axle translation stage 34.Y-axis translation stage 33 comprises keyset 331, stepper motor fixture 333, stepper motor 332, shaft coupling 334, threaded screw rod 335, translation stage body 337, spherical guide 338 and translation stage working face 339, keyset 331 is installed on the working face of X-axis translation stage 32, Y-axis translation stage 33 is fixed on the keyset 331, being the face contact connects, because can not directly connect between the translation stage, so needing increases keyset 331, Z axle translation stage 34 is fixed on the Y-axis translation stage 33 by fixed support 341.Stepper motor 332 is installed on a side of translation stage body 337 by stepper motor fixture 333, threaded screw rod 335 is positioned at translation stage body 337 middle part hollow-out parts, threaded screw rod 335 1 ends link to each other with the output shaft of stepper motor 332 by shaft coupling 334, translation stage working face 339 is connected on the threaded screw rod 335 and with the contact of translation stage body 337 maintenance faces and is connected, contact-making surface in translation stage working face 339 and translation playscript with stage directions body 337 is provided with spherical guide 338, and the output shaft by stepper motor 332 rotates and can drive threaded screw rod 335 and translation stage working face 339 moves together on the Y direction.Because X-axis translation stage 32 is identical with the structure of Y-axis translation stage 33 with Z axle translation stage 34, X-axis translation stage 32 in like manner also comprises stepper motor fixture 321, stepper motor 322, fixing hole 323 or the like, Z axle translation stage 34 also comprises stepper motor 342, stepper motor fixture 343 or the like, does not therefore repeat them here.X-axis translation stage 32 is positioned at the top of Y-axis translation stage 33 and is fixed on the translation stage working face 339, can on the Y direction, move with translation stage working face 339,34 of Z axle translation stages are installed on the X-axis translation stage 32, in like manner can realize the motion of Z axle translation stage 34 on directions X by X-axis translation stage 32.As Figure 13 and shown in Figure 14, be arranged at fiber clamp 52 on the Z axle translation stage and comprise main folder 521, sub-folder 522, connecting axle 523 and spring 524, this fiber clamp 52 is fixed on the Z axle translation stage 34 by fiber clamp support 53, can pass through the three-dimensional motion of X-axis translation stage 32, Y-axis translation stage 33 and Z axle translation stage 34 and control the motion and the location of realizing on the XYZ direction, main folder 521 and sub-folder 522 is hinged by connecting axle 523, and is provided with a spring 524 between main folder 521 and sub-folder 522.During use, optical fiber 55 is arranged in the optical fiber sleeve 56, and 56 in optical fiber sleeve is located between main folder 521 and the sub-folder 522, and the spring force by spring 524 clamps.
As shown in Figure 7 and Figure 8, the light source device position adjusting mechanism 2 of four-degree-of-freedom of the present invention comprise the angle tilting table 21 of a two dimension and two identical X of quadrature displacement structure to micromotion platform 22 and Y to micromotion platform 23, X is installed on the top of the angle tilting table 21 of two dimension to micromotion platform 23 to micromotion platform 22 and Y, angle tilting table 21 links to each other by first keyset 24 to micromotion platform 22 with X, X links to each other by second keyset 25 to micromotion platform 23 with Y to micromotion platform 22, and light source device anchor clamps 51 are fixing by the 3rd keyset 26.As Figure 11 and shown in Figure 12, angle tilting table 21 comprises tilting table base 210, the first angle hang plate 211, the second angle hang plate 212, tilting table 213, first stepper motor 2111, second stepper motor 2121, the first compression spring 2113, second compression spring 2123 and the steel ball 2114, tilting table base 210 is installed on the workbench 1, the first angle hang plate 211 and the second angle hang plate 212 are stacked in the top of tilting table base 210 successively, tilting table 213 is fixed in the top of the second angle hang plate 212 by workpiece retaining thread hole 2131, and is equipped with steel ball 2114 between the first angle hang plate 211 and the second angle hang plate 212 and the first angle hang plate 211 and the tilting table base 210; First stepper motor 2111 is fixed on the side of tilting table base 210 by the first stepping motor fixture 2112, the output shaft of first stepper motor 2111 links to each other with the first compression spring 2113 on being arranged at the first angle hang plate, 211 1 sides, and the first compression spring 2113 is socketed in first and compresses on the spring locating shaft 2115; Second stepper motor 2121 is fixed in the top of tilting table 213 by the second stepper motor fixture 2122, the output shaft of second stepper motor 2121 links to each other with the second compression spring 2123 on being arranged at tilting table 213, and the second compression spring 2123 is socketed in first and compresses on the spring locating shaft 2125.Active device 54 is fixed in the top of tilting table 213 by the light source device anchor clamps.During work, the rotation of first stepper motor 2111 and second stepper motor, 2121 output shafts makes the first compression spring 2113 and 2123 compressions of the second compression spring respectively or replys, thereby make the tilting table 213 and the second angle hang plate 212 be a spot wobble with steel ball 2114 respectively, realize the adjusting of angle; The swing principle of another direction is identical.To micromotion platform 22, this micromotion platform 22 comprises stepper motor 221, connecting screw rod 223, axle 224, stopper slot 226, compression spring 227, micromotion platform main body 228, flexible hinge 229, plane bearing 2210 and micrometric displacement output unit as Fig. 9 and X of the present invention shown in Figure 10; One end of connecting screw rod 223 is fixed on the output shaft of stepper motor 221, the other end cooperates with axle 224 by external screw thread, the inside of axle 224 has internal thread, compression spring 227 on the front end sleeve of axle 224, the other end of compression spring 227 is enclosed within on the plane bearing 2210, this compression spring 227 is arranged in the stopper slot of offering on the micromotion platform main body 228 226, and plane bearing 2210 is connected by 2214 contacts of plane bearing locating hole 2211 and micrometric displacement output unit.Axle 224 is slidingly matched with the guide rail of micromotion platform, and friction fit and gap between them are very little, to guarantee the linearity and the resolution ratio of input displacement.Micrometric displacement output unit 2214 links to each other with micromotion platform main body 228 by four flexible hinges 229, and four flexible hinges 229 form parallelogram sturcutre.Y is identical to the structure of micromotion platform 22 with X to micromotion platform 23, and it comprises stepper motor 231, stepper motor fixture 232 or the like equally, is not therefore giving unnecessary details at this.During use, forward and reverse rotation by stepper motor 221 output shafts connecting screw rod 223 is pulled back or forward impeller-hub 224 form and seesaw, thereby cause the compression and the answer of compression spring 227, elastic force is delivered to plane bearing 2210, by the strain formation micrometric displacement of flexible hinge 229 and by micrometric displacement output unit 2214 this micrometric displacement is transferred out.The deflection that compress spring 227 is depended in the input displacement, and the size and the position of stopper slot 226 that is used for installing compression spring 227 is definite in view of the above.The stroke and the resolution ratio of output displacement depend on stroke and the resolution ratio of importing displacement, and the multiple that the input displacement is dwindled depends on the rigidity of system.Because micromotion platform 2 adopts the flexible hinge structure of parallelogram, avoided on the vertical direction of X, Y, producing the cross-couplings displacement, guaranteed the linearity of output displacement.
The automatic alignment methods of automatic laser welding device that is used for the fibre-optical active component encapsulation of the present invention is the active aligning based on the light distribution feature.Automatically alignment principles as shown in figure 15, there is a focal plane in the laser that light source device 54 sends, i.e. the beam waist position of mould field distribution, as the p2 among Fig. 8, this place's spot radius minimum.In addition, the light distribution of laser beam on each cross section is approximately gaussian shape.These characteristics according to the laser beam intensity distribution, automatically aligning carries out as follows: adjust the back initial position from installing, at first utilize X-axis translation stage 32, Y-axis translation stage 33 and the Z axle translation stage 34 of fiber position guiding mechanism 3 on X, Y, Z three degree of freedom, to carry out coarse alignment, find the position of certain initial coupled power, enter the coupled zone; Then, carry out fine registration, two identical X of quadrature displacement structure that fine registration uses earlier light source device position adjusting mechanism 2 to micromotion platform 22 and Y to micromotion platform 23 at X, find two-dimentional maximum in the Y plane, cutting plane may be at p1, also may be at p3, use the Z in the fiber position guiding mechanism 3 to adjust along the Z axle then to translation stage 34, seek the maximum point position of Z axle, promptly find focal plane p2, at this moment, utilize the two dimension angular tilting table 21 in the light source device position adjusting mechanism 2 to carry out theta alignment, after this reuse two identical X of quadrature displacement structure in the light source device position adjusting mechanism 2 to micromotion platform 22 and Y to micromotion platform 23 at X, seek two-dimentional maximum in the Y plane, with the influence of elimination error component, thereby obtain maximum coupled power.Whole alignment procedures all utilizes the luminous power feedback to carry out, promptly on time, after motion platform moves at every turn, light power meter 6 is measured the performance number of coupled into optical fibres 55, computer 7 reads the measured value of light power meter 6, according to the information that relatively provides of current luminous power data that read and last secondary data, control software is differentiated next step motion mode, and computer 7 drives corresponding motion platform by I/O card and stepper motor.Welding encapsulation work behind the aligning is partly finished by laser weld.The high power pulsed laser that solid state laser 8 produces forms three beams of laser by optical splitter 9, sends into three identical focus lamps 41, the luminous point that line focus is formed for welding by three same Transmission Fibers 10.Three beams of laser is symmetrically distributed with 120 degree angle circles, and incidence angle is 45 degree.Focus lamp 41 can be finely tuned incident angle and focal position by being fixed on the focus lamp guiding mechanism 42.Computer 7 can be controlled the pulse energy and the burst length of solid state laser 8 emission laser.
The course of work: the course of work of automatic laser welding device for fibre-optical active component of the present invention can be divided into active automatic aligning and weld two processes.At first open LASER Light Source and light power meter 6, the power of light power meter 6 test coupled into optical fibres, computer 7 reads in test data, begins active auto-alignment process according to the alignment algorithm in the control software.During coarse alignment, real-time measuring data according to light power meter 6, X-axis translation stage 32, Y-axis translation stage 33 and Z axle translation stage 34 in the computer 7 control step motor-driven fiber position guiding mechanisms 3, on X, Y and Z direction, carry out the luminous power search, when detected luminous power reaches the noise level of a certain setting, start the fine registration program; To micromotion platform 22, the Y Z axle translation stage 34 in micromotion platform 23, angle tilting table 21 and fiber position guiding mechanism 3, utilize the luminous power feedback to carry out fine registration by X in the control module adjusting device.During fine registration, at first utilize X to search for simultaneously at X and Y direction to micromotion platform 23 to micromotion platform 22 and Y, then, the adjustment of carrying out on the Z direction with the Z axle translation stage 34 in the optical fiber position adjusting mechanism 3; After this, carry out theta alignment with the angle tilting table in the light source device position guiding mechanism 2 21, last, utilize X to search in the plane at X, Y to micromotion platform 23 once more to micromotion platform 22 and Y, to eliminate the influence of various error components, obtain maximum coupled power.Automatically after aligning is finished, enable the laser weld program and finish encapsulation.
Claims (10)
1, a kind of automatic laser welding device for fibre-optical active component is characterized in that: it comprises workbench (1), control module, laser weld mechanism and accurate docking mechanism, and laser weld mechanism and accurate docking mechanism all are installed on the workbench (1); This precision docking mechanism comprises fiber position guiding mechanism (3) and light source device position adjusting mechanism (2), described fiber position guiding mechanism (3) comprises three identical in structure X-axis translation stages (32), Y-axis translation stage (33) and Z axle translation stage (34) and optical fibre device anchor clamps (5), the mutual successively vertical pile of Y-axis translation stage (33), X-axis translation stage (32) and Z axle translation stage (34), optical fibre device anchor clamps (5) are fixed on the Z axle translation stage (34); Described light source device position adjusting mechanism (2) comprise the angle tilting table (21) of a two dimension and two identical X of quadrature displacement structure to micromotion platform (22) and Y to micromotion platform (23), X is installed on the top of the angle tilting table (21) of two dimension to micromotion platform (23) to micromotion platform (22) and Y; Control module comprises that main control computer (7) links to each other with light source device position adjusting mechanism (2) with fiber position guiding mechanism (3) respectively with light power meter (6) and by cable.
2, automatic laser welding device for fibre-optical active component according to claim 1, it is characterized in that: described X adopts the micromotion platform of same structure to micromotion platform (22) and Y to micromotion platform (23), and this micromotion platform comprises stepper motor, connecting screw rod, compression spring, micromotion platform main body, flexible hinge, plane bearing and fine motion displacement output unit; One end of connecting screw rod is fixed on the output shaft of stepper motor, and the other end links to each other with the micromotion platform main body by axle; Compress spring on the front end sleeve of axle, the other end of this compression spring is enclosed within on the plane bearing, and this compression spring is arranged in the stopper slot of offering on the micromotion platform main body, and plane bearing is connected with the micrometric displacement output unit by the plane bearing locating hole; The micrometric displacement output unit links to each other with the micromotion platform main body by four flexible hinges, and four adjacent flexible hinges constitute parallelogram.
3, automatic laser welding device for fibre-optical active component according to claim 1 and 2, it is characterized in that: described angle tilting table (21) comprises tilting table base (210), the first angle hang plate (211), the second angle hang plate (212), tilting table (213), first stepper motor (2111), second stepper motor (2121), the first compression spring (2113), second compression spring (2123) and the steel ball (2114), tilting table base (210) is installed on the workbench (1), the first angle hang plate (211) and the second angle hang plate (212) are stacked in the top of tilting table base (210) successively, tilting table (213) is fixed in the top of the second angle hang plate (212), and is equipped with steel ball (2114) between the first angle hang plate (211) and the second angle hang plate (212) and the first angle hang plate (211) and the tilting table base (210); First stepper motor (2111) is fixed on the side of tilting table base (210) by the first stepping motor fixture (2112), the output shaft of first stepper motor (2111) be arranged at the first angle hang plate (211) one sides on first the compression spring (2113) link to each other; Second stepper motor (2121) is fixed in the top of tilting table (213) by the second stepper motor fixture (2122), and the output shaft of second stepper motor (2121) links to each other with the second compression spring (2123) on being arranged at tilting table (213).
4, automatic laser welding device for fibre-optical active component according to claim 1 and 2, it is characterized in that: described X-axis translation stage (32), Y-axis translation stage (33) adopts identical motion in one dimension translation stage with Z axle translation stage (34), this motion in one dimension translation stage comprises the stepper motor fixture, stepper motor, shaft coupling, threaded screw rod, the translation stage body, spherical guide and translation stage working face, stepper motor is installed on a side of translation stage body by the stepper motor fixture, threaded screw rod is positioned at translation stage body middle part hollow-out parts, one end of threaded screw rod links to each other with the output shaft of stepper motor by shaft coupling, the translation stage working face is installed on the threaded screw rod and is connected with the contact of translation stage body maintenance face, is provided with spherical guide in the contact-making surface of translation stage working face and translation playscript with stage directions body.
5, automatic laser welding device for fibre-optical active component according to claim 3, it is characterized in that: described X-axis translation stage (32), Y-axis translation stage (33) adopts identical motion in one dimension translation stage with Z axle translation stage (34), this motion in one dimension translation stage comprises the stepper motor fixture, stepper motor, shaft coupling, threaded screw rod, the translation stage body, spherical guide and translation stage working face, stepper motor is installed on a side of translation stage body by the stepper motor fixture, threaded screw rod is positioned at translation stage body middle part hollow-out parts, one end of threaded screw rod links to each other with the output shaft of stepper motor by shaft coupling, the translation stage working face is installed on the threaded screw rod and is connected with the contact of translation stage body maintenance face, is provided with spherical guide in the contact-making surface of translation stage working face and translation playscript with stage directions body.
6, automatic laser welding device for fibre-optical active component according to claim 1 and 2, it is characterized in that: described laser weld mechanism comprises solid state laser (8), optical splitter (9), three identical Transmission Fibers (10), three identical focus lamps (41) and focus lamp guiding mechanism (42), three focus lamps (41) are distributed on the workbench (1) by focus lamp guiding mechanism (42), be 120 ° angle between per two focus lamps (41), each focus lamp (41) by Transmission Fibers (10) successively with solid state laser (8), optical splitter (9) and control module link to each other.
7, automatic laser welding device for fibre-optical active component according to claim 3, it is characterized in that: described laser weld mechanism comprises solid state laser (8), optical splitter (9), three identical Transmission Fibers (10), three identical focus lamps (41) and focus lamp guiding mechanism (42), three focus lamps (41) are distributed on the workbench (1) by focus lamp guiding mechanism (42), be 120 ° angle between per two focus lamps (41), each focus lamp (41) by Transmission Fibers (10) successively with solid state laser (8), optical splitter (9) and control module link to each other.
8, automatic laser welding device for fibre-optical active component according to claim 4, it is characterized in that: described laser weld mechanism comprises solid state laser (8), optical splitter (9), three identical Transmission Fibers (10), three identical focus lamps (41) and focus lamp guiding mechanism (42), three focus lamps (41) are distributed on the workbench (1) by focus lamp guiding mechanism (42), be 120 ° angle between per two focus lamps (41), each focus lamp (41) by Transmission Fibers (10) successively with solid state laser (8), optical splitter (9) and control module link to each other.
9, automatic laser welding device for fibre-optical active component according to claim 1 and 2, it is characterized in that: described fiber clamp (52) comprises main folder head (521), sub-folder head (522), connecting axle (523) and spring (524), this fiber clamp (52) is fixed on the Z axle translation stage (34) by fiber clamp support (53), main folder head (521) and sub-folder head (522) are hinged by connecting axle (523), and are provided with a spring (524) between main folder head (521) and sub-folder head (522).
10, automatic laser welding device for fibre-optical active component according to claim 8, it is characterized in that: described fiber clamp (52) comprises main folder head (521), sub-folder head (522), connecting axle (523) and spring (524), this fiber clamp (52) is fixed on the Z axle translation stage (34) by fiber clamp support (53), main folder head (521) and sub-folder head (522) are hinged by connecting axle (523), and are provided with a spring (524) between main folder head (521) and sub-folder head (522).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200510032570XA CN100351033C (en) | 2005-12-19 | 2005-12-19 | Automatic laser welding device for fibre-optical active component |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200510032570XA CN100351033C (en) | 2005-12-19 | 2005-12-19 | Automatic laser welding device for fibre-optical active component |
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| CN1788913A true CN1788913A (en) | 2006-06-21 |
| CN100351033C CN100351033C (en) | 2007-11-28 |
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| CNB200510032570XA Expired - Fee Related CN100351033C (en) | 2005-12-19 | 2005-12-19 | Automatic laser welding device for fibre-optical active component |
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| FR2715092B1 (en) * | 1994-01-20 | 1996-04-05 | Lorraine Laminage | Edge-to-edge referencing device for at least two sheet blanks in a welding installation by means of a high energy density beam. |
| US5961858A (en) * | 1996-06-06 | 1999-10-05 | Engauge Inc. | Laser welding apparatus employing a tilting mechanism |
| JPH1094889A (en) * | 1996-09-24 | 1998-04-14 | Mitsubishi Heavy Ind Ltd | Piping laser beam welding equipment |
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| CN2712532Y (en) * | 2004-06-15 | 2005-07-27 | 武汉楚天激光（集团）股份有限公司 | Multiaxial support for optical fiber laser head |
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