Disclosure of Invention
An object of the present invention is to provide an ultrasonic apparatus and method for measuring a concentration and a flow rate of a gas, which can accurately measure a concentration and a flow rate of a sample gas without complicated signal processing and additional hardware.
According to the present invention, there is provided an ultrasonic apparatus for measuring a concentration and a flow rate of a sample gas, comprising:
a conduit for flow of sample gas;
a first ultrasonic transmitter-receiver installed in the pipe;
a second ultrasonic transmitter-receiver installed in the pipe opposite to the first ultrasonic transmitter-receiver;
a transmission/reception switch for switching operation modes of the first and second ultrasonic wave transmitter/receivers between a transmission mode of transmitting ultrasonic waves and a reception mode of receiving ultrasonic waves;
a temperature sensor disposed within the conduit for measuring the temperature of the sample gas flowing through the conduit;
the first ultrasonic transmitter-receiver generating an ultrasonic wave forward with respect to the flow direction of the sample gas in its transmission mode, and generating a backward waveform based on the received ultrasonic wave generated by the second ultrasonic transmitter-receiver when it is in the reception mode;
the second ultrasonic transmitter-receiver generates an ultrasonic wave backward with respect to the flow direction of the sample gas in its transmission mode, and generates a forward waveform based on the received ultrasonic wave generated by the first ultrasonic transmitter-receiver when it is in the reception mode;
means for generating a trigger signal when the forward and backward waveforms exceed a predetermined level;
means for generating forward and backward zero-crossing signals when the forward and backward waveforms exceed zero level;
propagation time calculation means, which is connected to the temperature sensor, the trigger signal generation means, and the zero-crossing signal generation means, for (1) calculating a possible propagation time range based on the gas temperature measured by the temperature sensor, (2) determining whether phases of two first trigger signals, which are generated on the basis of forward and backward waveforms, respectively, (3) processing the zero-crossing signals so that the phases thereof coincide with each other if they do not coincide with each other, (4) obtaining a reference zero-crossing time by calculating an average of the forward and backward zero-crossing times, (5) subtracting an integral multiple of the ultrasonic wave period so that the subtracted result falls within the possible propagation time range, thereby obtaining an ultrasonic wave reception point, and (6) estimating the ultrasonic wave propagation time based on the ultrasonic wave reception point.
Further, according to another feature of the present invention, there is provided a method of measuring a concentration of a sample gas flowing through a pipe, comprising the steps of:
generating an ultrasonic wave forward with respect to a flow direction of the sample gas;
generating an ultrasonic wave backward with respect to a flow direction of the sample gas;
measuring the temperature of the sample gas flowing through the conduit;
generating a trigger signal when the forward and backward waveforms exceed a predetermined level;
generating forward and backward zero-crossing signals when the forward and backward waveforms exceed zero level;
calculating a range of possible travel times based on the gas temperature measured by the temperature sensor;
determining whether phases of two first trigger signals, which are generated on a forward and backward waveform basis, respectively, coincide with each other;
processing the zero-crossing signals to make their phases coincide with each other if they do not coincide with each other;
obtaining a reference zero-crossing time by calculating an average of the forward and backward zero-crossing times;
subtracting integral multiple of the ultrasonic period to make the subtracted result fall into a possible propagation time range, thereby obtaining an ultrasonic receiving point; and
estimating the propagation time of the ultrasonic wave on the basis of the ultrasonic wave reception point.
Further, according to another feature of the present invention, there is provided an oxygen concentration system that generates an oxygen-enriched gas, including:
an oxygen concentration device for generating an oxygen-rich gas by absorbing nitrogen to remove nitrogen from air; and
an ultrasonic apparatus for measuring an oxygen concentration in an oxygen-enriched gas and a flow rate of the oxygen-enriched gas, the ultrasonic apparatus comprising:
a conduit for receiving and flowing an oxygen-enriched gas;
a first ultrasonic transmitter-receiver installed in the pipe;
a second ultrasonic transmitter-receiver installed in the pipe opposite to the first ultrasonic transmitter-receiver;
a transmission/reception switch for switching operation modes of the first and second ultrasonic wave transmitter/receivers between a transmission mode of transmitting ultrasonic waves and a reception mode of receiving ultrasonic waves;
a temperature sensor disposed within the conduit for measuring the temperature of the oxygen-enriched gas flowing through the conduit;
the first ultrasonic wave transmitter-receiver generates an ultrasonic wave forward with respect to the flow of the oxygen-enriched gas in its transmission mode, and generates a backward waveform based on the received ultrasonic wave generated by the second ultrasonic wave transmitter-receiver when it is in the reception mode;
the second ultrasonic wave transmitter-receiver generates an ultrasonic wave backward with respect to the oxygen-enriched gas flow in its transmission mode, and generates a forward waveform based on the received ultrasonic wave generated by the first ultrasonic wave transmitter-receiver when it is in the reception mode;
means for generating a trigger signal when the forward and backward waveforms exceed a predetermined level;
means for generating forward and backward zero-crossing signals when the forward and backward waveforms exceed zero level;
propagation time calculation means, which is connected to the temperature sensor, the trigger signal generation means, and the zero-crossing signal generation means, for (1) calculating a possible propagation time range based on the gas temperature measured by the temperature sensor, (2) determining whether phases of two first trigger signals, which are generated on the basis of forward and backward waveforms, respectively, (3) processing the zero-crossing signals so that the phases thereof coincide with each other if they do not coincide with each other, (4) obtaining a reference zero-crossing time by calculating an average of the forward and backward zero-crossing times, (5) subtracting an integral multiple of the ultrasonic wave period so that the subtracted result falls within the possible propagation time range, thereby obtaining an ultrasonic wave reception point, and (6) estimating the ultrasonic wave propagation time based on the ultrasonic wave reception point.
Further, according to another feature of the present invention, there is provided an oxygen concentration system for generating an oxygen-enriched gas, comprising
An oxygen concentration device for generating an oxygen-rich gas by absorbing nitrogen to remove nitrogen from air; and
an ultrasonic apparatus for measuring an oxygen concentration in the oxygen-enriched gas and a flow rate of the oxygen-enriched gas, the ultrasonic apparatus comprising:
a conduit for flowing a target gas of measured concentration;
a first ultrasonic transmitter-receiver installed in the pipe;
a second ultrasonic transmitter-receiver installed in the pipe opposite to the first ultrasonic transmitter-receiver;
the pipe comprises a straight part and a vertical part vertically connected with the straight part;
the first and second ultrasonic wave transmitter-receivers are disposed at the vertical portion so as to face the end of the linear portion; and is
The distances between the first and second ultrasonic transmitter-receivers and the respective ends of the straight portions of the pipe satisfy the following relationship.
0<D<f-r2/C
Wherein:
d: a distance (m) between the first and second ultrasonic transmitter-receivers and respective ends of the straight portion
f: frequency (Hz) of ultrasonic waves in sample gas
r: inner diameter of pipe (m)
C: velocity of ultrasonic wave (m/sec)
Best Mode for Carrying Out The Invention
Preferred embodiments of the present invention are described below. In the embodiments described below, the sample gas consists of oxygen and nitrogen. However, the measurable sample gas is not limited to a gas sample of oxygen and nitrogen, and the present invention can also be applied to a mixture containing other gases.
FIG. 1 shows a schematic diagram of an oxygen concentration system with an ultrasonic gas concentration and flow measurement device according to a preferred embodiment of the present invention.
The plant 100 includes an oxygen concentration plant 102 that produces an oxygen-enriched gas by removing nitrogen from air, which is provided from outside the system by a compressor 104 through a filter 106. The oxygen-enriched gas produced by the oxygen concentration device 102 is supplied to the ultrasonic device 200 of the present invention through a flow setting means 108, such as a pressure reducing valve. The resulting oxygen-enriched gas is then provided to the user or patient through product filter 110.
The oxygen concentration apparatus includes a plurality of columns (not shown) for containing a nitrogen adsorbent such as zeolite, piping (not shown) including piping for directing compressed air from the compressor 104 to each of the plurality of columns and for directing the generated oxygen-enriched gas from the columns to the flow setting device 108, and valves (not shown) disposed in the piping for selectively opening and closing the piping so that the adsorbent contained in one of the columns absorbs nitrogen to generate the oxygen-enriched gas, while the adsorbent contained in the other of the columns releases the adsorbed nitrogen to regenerate the adsorbent.
Referring to fig. 2, an ultrasonic apparatus 200 for measuring the concentration and flow rate of a sample gas according to the present invention will be described.
The gas concentration and flow measurement device 200 includes a conduit 202 for the flow of sample gas or oxygen-enriched gas generated by the oxygen concentration device 102. The pipe 202 has a straight portion 208 and vertical portions 204 and 206 connecting the ends of the straight portion. The straight portion 208 comprises a pipe element having a circular cross-section, the diameter of which does not vary with the longitudinal axis.A first ultrasonic transducer 218 providing a first ultrasonic transmitter-receiver is fixed at one end in the straight portion, and a second ultrasonic transducer 222 providing a second ultrasonic transmitter-receiver is fixed at the other end in the straight portion 208, opposite to the first ultrasonic transducer 218. In this embodiment, the distance between first and second ultrasonic transducers 218 and 222 is referred to as the propagation length LS。
The vertical portion 204 is disposed relatively upstream in the gas flow direction through the pipe 202, and has an inlet 204 a. The oxygen concentration device 102 is connected to the inlet 204a by a supply line 210 as a source of sample gas 212.
The vertical portion 206 is disposed relatively downstream in the direction of gas flow through the conduit 202 and has an outlet 206a that is connected to the product filter 110.
A transmit-receive switch 224 is coupled to the first and second ultrasonic transducers 218 and 222. The transmit-receive switch 224 independently switches the operating mode of the first and second ultrasonic transducers 218 and 222 between a transmit mode in which the first and second ultrasonic transducers 218 and 222 transmit ultrasonic waves and a receive mode in which the first and second ultrasonic transducers 218 and 222 receive ultrasonic waves. The transmit-receive switch 224 is connected to a microcomputer 226 so that the switching operation of the transmit-receive switch 224 is controlled by the microcomputer 226.
Temperature sensors 216 and 220 for measuring the temperature of the gas flowing through the pipe 202 are preferably arranged in said vertical sections 204 and 206 so as not to disturb the flow in the straight section 208. The temperature sensors 216 and 220 are connected to a microcomputer 226. In this connection, if the temperature change of the sample gas is small, only one temperature sensor 216 or 220 may be provided.
A driver 228 for driving the first and second ultrasonic transducers 218 and 222, a zero crossing detection circuit 230 for detecting zero crossing times of signals from the first and second ultrasonic transducers 218 and 222, a display unit 234 for displaying, for example, an operation state and a measurement result of the apparatus 200, and a memory 232 for storing an operating system of the microcomputer 226 and various parameters, including a fixed memory or a magnetic disk device, are connected to the microcomputer 226.
The operation of the ultrasonic concentration and flow rate measuring device 200 of the present embodiment will be described below.
A sample gas, such as a nitrogen-oxygen gas mixture, is supplied to the conduit 202 in a mixture ratio of P: (1-P) (0. ltoreq. P.ltoreq.1). At this time, the temperature of the sample gas is measured by the temperature sensors 216 and 220, and the average value thereof is stored in the memory 232 as a reference temperature T0 (K). According to this embodiment, the operating temperature range of the system 100 is preferably, for example, 5-35 degrees Celsius.
In supplying the sample gas, a pulse for generating an ultrasonic wave is sent from the microcomputer 226 to the driver 228. A pulsed voltage is applied from driver 228 to first ultrasonic transducer 218 through transmit-receive switch 224. The first ultrasonic transducer 218 emits ultrasonic waves corresponding to the pulse voltage. The ultrasonic waves emitted by the first ultrasonic transducer 218 propagate in the sample gas flowing through the straight portion 208 of the pipe 202 and are received by the second ultrasonic transducer 222. The second ultrasonic transducer 222 generates an electric signal corresponding to the received ultrasonic wave, and transmits the electric signal to the microcomputer 226 through the transmission/reception switch 224 and the zero-crossing detection circuit 230. The microcomputer 226 calculates the forward propagation time t based on the time at which the transmitted pulse is generated to the driver 228 and the time at which the electrical signal is received from the second ultrasonic transducer 222S1(sec)。
Subsequently, upon receiving the electrical signal from the second ultrasonic transducer 222, the transmit-receive switch 224 switches the operation mode of the first ultrasonic transducer 218 from the transmission mode to the reception mode immediately while switching the operation mode of the second ultrasonic transducer 222 from the reception mode to the transmission mode. Then, the microcomputer 226 transmits a pulse for generating an ultrasonic wave to the driver 228. The pulsed voltage from the driver 228 is supplied to the second ultrasonic transducer 222 through the transmit-receive switch 224. The second ultrasonic transducer 222 generates ultrasonic waves corresponding to the pulse voltage. The ultrasonic waves are received by the first ultrasonic transducer 218. The first ultrasonic transducer 218 generates an electric signal corresponding to the received ultrasonic wave, and transmits the electric signal to the microcomputer 226 through the transmission/reception switch 224 and the zero-crossing detection circuit 230. The microcomputer 226 calculates the backward propagation time t based on the time of the generation of the transmit pulse to the driver 228 and the time of the reception of the electrical signal from the first ultrasonic transducer 218S2(sec)。
Obtaining tS1And tS2Can be eliminated from the influence of the sample gas flow in the pipe 202. Propagation time t of ultrasonic waves in a stationary sample gasSDefined by the following equation (4).
tS=(tS1+tS2)/2 ....(4)
The microcomputer 226 then calculates the propagation velocity C of the ultrasonic wave in the stationary sample gas by the following equation (5)S(m/sec)。
CS=LS/tS...(5)
Oxygen concentration PSThis is obtained by the following equation (6) on the basis of equations (1) and (2).
PS=(κRTS/CS 2-MN2)/(MO2-MN2) ...(6)
Further, the oxygen concentration in the sample gas can be determined from the ratio of the propagation velocity of the ultrasonic wave in the sample gas to the propagation velocities of the ultrasonic wave in 100% oxygen and 100% nitrogen. That is, the temperature T can be easily obtained by equation (1)S(K) Propagation velocity C of ultrasonic waves in 100% oxygenO2(m/sec), and temperature TS(K) Propagation velocity C of ultrasonic waves in 100% nitrogenN2(m/sec). Therefore, let C be the propagation velocity of the ultrasonic wave in the sample gasS(m/sec), P can be calculated by the following equation (7)S。
PS=(1/CS 2-1/CN2 2)/(1/CO2 2-1/CN2 2) ...(7)
The operation may be performed by the microcomputer 126 and the result displayed by the display unit 134.
Next, obtaining t will be explainedS1And tS2The method of (1). In this relation, the timing at which the first or second ultrasonic transducer 218 or 222 transmits the ultrasonic wave is referred to as a transmission time, and the timing at which the first or second ultrasonic transducer 218 or 222 receives the ultrasonic wave is referred to as an ultrasonic wave reception point in the present application.
Fig. 3A shows a typical ultrasonic waveform received by the microcomputer 226, and fig. 3B is an enlargement of the waveform portion shown in cycle 3B. As shown in fig. 3A and 3B, the waveform contains a plurality of noise components, so that it is difficult to detect the ultrasonic wave receiving point of the ultrasonic wave propagating in the sample gas. Therefore, according to the present invention, the ultrasonic wave reception point can be estimated based on the zero-crossing timing of the measured waveform after the amplitude of the waveform has sufficiently increased to some extent. To this end, the zero-crossing detection circuit 230 includes a zero-crossing comparator and a flip-flop comparator.
Referring to fig. 4, the flip-flop comparator outputs a trigger signal S when the waveform exceeds a predetermined level upwardtiTo the microcomputer 226. The zero-crossing comparator outputs a zero-crossing signal Z when the waveform crosses zero level upwardciTo the microcomputer 226. When the microcomputer 226 receives the first trigger signal StiThe microcomputer 226 then determines each zero crossing signal ZciAs the zero crossing time. Preferably, the microcomputer 226 determines the first three zero-crossing signals as the first to third zero-crossing times Zc1、Zc2And Zc3。
The interval between the respective zero-crossing instants is theoretically related to the period of the ultrasonic wave. Thus, from the first zero-crossing time Z along the time axisc1Tracing back, multiplying by integral multiple of ultrasonic wave period to estimate ultrasonic wave receiving pointThe travel time can be estimated by subtracting the transmit time and an integer multiple of the ultrasound period from the ultrasound receive point.
As described above, the propagation velocity C (m/sec) of the ultrasonic wave in the stationary gas can be obtained by equation (1). For example, the propagation velocity of the ultrasonic wave in pure nitrogen gas at 20 degrees Celsius is 349.1m/sec, and the velocity in pure oxygen gas at 20 degrees Celsius is 326.6 m/sec. Therefore, the propagation speed of the ultrasonic wave in the oxygen-nitrogen gas mixture at 20 degrees centigrade falls within the range of 326.6 to 349.1 m/sec. FIG. 5 is a graph showing the relationship between the speed of ultrasonic waves and the gas temperature, in which the upper limit and the lower limit of the propagation speed of ultrasonic waves in an oxygen-nitrogen gas mixture are respectively represented by Cmax(T) and Cmin(T). Possible propagation time range is LS/Cmax(T) to LS/Cmin(T). Thus, if the propagation length L is chosenSThe following relationship (8) is satisfied, and only one integer may be selected so that the ultrasonic wave reception point falls within the possible propagation time range.
(LS/Cmin(T)-LS/Cmax(T))<1/f ...(8)
Wherein:
f: frequency of ultrasonic waves in sample gas
Make (L)S/Cmax(T)-LS/Cmin(T)) the gas temperature T having the maximum value is the lower limit of the operating temperature. If the operating temperature is 5 degrees Celsius and the ultrasonic frequency is 40KHz, the propagation length L of the relation (8) is satisfiedSThe calculation is as follows.
LS<12.3cm ...(9)
According to this embodiment, L is usedS0.1m as an example.
In order to obtain the propagation time t of the ultrasonic waveSThe forward and backward propagation times t are measured in advanceS1And tS2. See the figureWhen the second of the forward and backward waveforms exceeds the trigger level, a trigger signal is generated. In this case, the trigger signal is generated at the same time or phase relative to the waveform, and at the difference between the zero crossing times between the forward and backward waves, a ═ ZcBi-ZcFiSubstantially equal to the propagation time t between the forward and backward wavesS1And tS2Difference t ofd(ZcFi: zero crossing time of the forward waveform, ZcBi: the zero-crossing time, i, of the backward waveform is 1, 2, 3. (number of waves)).
However, even when the same trigger level is used, the trigger signal StiBut also typically at different waveform phases between the forward and backward waves. Referring to fig. 7, for a forward wave, the trigger signal is generated when the third wave exceeds the trigger level, and for a backward wave, the trigger signal is generated when the second wave exceeds the trigger level. Therefore, the trigger signal of the backward wave is generated one cycle earlier than the trigger signal of the forward wave. In this case, the difference between zero crossing times between the forward and backward waves, a ═ ZcBi-ZcFiAnd is a negative value. If sample gas flows through the conduit 102, A ═ ZcBi-ZcFiMust not be negative. Thus, if A ═ ZcBi-ZcFiNegative values, it is clear that the trigger signal for the backward wave is generated earlier than the trigger signal for the forward wave.
On the other hand, referring to fig. 8, for a forward wave, the trigger signal is generated when the second wave exceeds the trigger level. For backward waves, the trigger signal is generated when the third wave exceeds the trigger level. In this case, the zero-crossing time difference between the forward and backward waves, a ═ ZcBi-ZcFiGreater than one cycle of the ultrasonic wave, indicating that the trigger signal for the forward wave is generated earlier than the trigger signal for the backward wave.
According to an embodiment of the invention, the pipe 102 is designed such that the difference t between the propagation time between the forward and backward wavesdAlways fall within one ultrasound cycle. This feature enables the microcomputer 226 to distinguish the cases shown in fig. 7 and 8 from each other, andcalculating the difference t between the propagation timesd. That is, if A ═ ZcBi-ZcFiNegative, it is the case shown in fig. 7, and if a ═ ZcBi-ZcFiGreater than one ultrasonic cycle is the case shown in fig. 8.
Thus, the structure of the duct 102 having the above-described features will be described below.
The possible range of the sample gas flow velocity V (m/sec) is shown by the following inequality (10).
0≤V≤Q/(60000π/r2) ..(10)
Wherein:
q: flow rate of sample gas (liter/min)
r: inner diameter of pipe (cm)
As mentioned above, the velocity of the ultrasonic wave propagating forward with respect to the sample gas flow is C1C + V, the ultrasonic velocity propagating backwards with respect to the sample gas flow is C2=C-V。
Wherein:
c: velocity of ultrasonic waves (m/sec) propagating in a stationary gas
C1: forward propagating ultrasonic velocity (m/sec) with respect to sample gas flow
C2: velocity of ultrasonic wave (m/sec) propagating backward with respect to sample gas flow
V: flow velocity (m/sec)
Difference in propagation time tdCalculated by the following equation.
td=LS/C2-LS/C1
=LS/(C-V)-LS/(C+V) ...(11)
Therefore, if the inner diameter of the pipe 102 satisfies the following relational expression(12) The difference t of propagation timedWill be less than the ultrasonic period.
LS/(C-Q/(60000π/r2))-LS/(C+Q/(60000π/r2))<1/f ...(12)
When the ultrasonic velocity through the pipe 102 is minimum (C ═ C)min(5 degrees celsius) 318.1m/sec, the left term of the inequality (12) takes the maximum value. Thus, for example, if the ultrasonic frequency passing through the pipe 102 is 40(KHz), the flow Q is 10(litter/min) and the length of the pipe 102 is 10(cm), the inner diameter r (mm) of the pipe 102 is r > 2.05 (mm). According to the present embodiment, r is selected to be 2.5(mm) as an example.
Next, a method of measuring the concentration and flow rate of the sample gas will be described in detail below.
First, in the case shown in fig. 6, the propagation time difference t between the forward and backward wavesdAccording to formula A ═ ZcBi-ZcFiIs obtained because, as mentioned above, the propagation time difference tdIs substantially equal to the difference A ═ ZcBi-ZcFiIs. In the case shown in FIG. 7, the propagation time difference tdAccording to B ═ ZcBi+1-ZcFiThus obtaining the product. In the case shown in fig. 8, the propagation time difference is Z as indicated by BcBi-ZcFi+1Thus obtaining the product. Preferably, a plurality of a or B values are obtained for arithmetic averaging.
Next, the ultrasonic velocity in the sample gas is estimated assuming that the sample gas is static. For this purpose, the phase difference in the trigger signal output result is determined in advance based on the value a. If there is no phase difference, the average Z of the first zero-crossing times of the forward and backward waveforms is shown in FIG. 6c_aveCalculated by the following equation.
Zc_ave=(ZcF1+ZcB1)/2 ...(13)
In the case shown in fig. 7, the average value Z of the first zero-crossing instants of the forward and backward waveformsc_aveCalculated by the following equationAnd (4) calculating.
Zc_ave=(ZcF1+ZcB2)/2 ...(14)
In the case shown in fig. 8, the average value Z of the first zero-crossing instants of the forward and backward waveformsc_aveCalculated by the following equation.
Zc_ave=(ZcF2+ZcB1)/2 ...(15)
Assuming that the ultrasonic wave passes through a static sample gas, the average value Zc_aveCan be seen as the first zero-crossing instant obtained. Zc_aveReferred to in this application as the reference zero-crossing instant.
As described above, the length of the pipe 102 is designed so that only an integer can be selected so that the ultrasonic wave reception point falls within the range of possible propagation times (fig. 9). Thus, from the first zero-crossing time Z along the time axisc_aveTracing back, multiplying by integral multiple of ultrasonic wave period until the ultrasonic wave receiving point falls into possible range, and estimating the ultrasonic wave propagation time tS。
Ultrasonic velocity C in static sample gasSEstimated by the following equation (16).
CS=LS/tS ...(16)
Oxygen concentration PSC calculated by equation (6) or (7)SCan be obtained.
Forward and backward propagation times t in the sample gas flowing through the pipe 102S1And tS2Estimated by the following equations (17) and (18).
tS1=tS-td/2 ...(17)
tS2=tS+td/2 ...(18)
Forward and backward velocity C of ultrasonic waves in sample gas flowing through the pipe 1021And C2Estimated by the following equations (19) and (20).
C1=LS/tS1 ...(19)
C2=LS/tS2 ...(20)
Then, the sample gas flow rate V through the pipe 102 is obtained by equations (3), (19) and (20). Further, the flow rate Q of the sample gas is calculated by the following equation (21).
Q=6000πr2V ....(21)
Next, referring to fig. 11 to 15, an ultrasonic concentration and flow rate measuring apparatus of a preferred embodiment will be described below.
Ultrasonic concentration and flow measurement device 10 includes conduit 27 which provides conduit 102 of the embodiment of FIG. 2. The housings 25 and 26, which enclose the first and second ultrasonic transducers 20 and 21, are fixed to both ends of the pipe 27 by welding portions 41 and 42. The housings 25 and 26 include ports 28 and 29 extending perpendicular to the conduit 27 to provide inlet and outlet portions 204a and 206a in the embodiment of fig. 2. The conduit 27 and the housings 25 and 26 are preferably made of the same metal material, such as an aluminum alloy.
The pipe 27 and the housings 25 and 26 are fixed to the base plate 30 or the housing of the oxygen concentration apparatus at one position by bolts 45. This configuration allows the tube 27 to freely deform longitudinally when subjected to external forces that may occur when the tube 27 thermally deforms.
The covers 23 and 24 are connected to the housings 25 and 26 by bolts 43 and 44 so that the O-rings 39 and 40 are sandwiched between the housings 25 and 26 and the covers 23 and 24, thereby closing the end openings of the housings. The first and second ultrasonic transducers 20 and 21 are attached to the inner surfaces of the covers 23 and 24. The first and second ultrasonic transducers 20 and 21 generate ultrasonic waves of 40 KHz.
In addition, temperature sensors 37 and 38 for detecting the temperature of the gas are attached to the inner surfaces of the covers 23 and 24. The first and second ultrasonic transducers 20 and 21 and the temperature sensors 37 and 38 are connected to the microcomputer 226 through connectors 31 and 34 attached to the outer surfaces of the covers 23 and 24, and cables 33 and 36 and connectors 32 and 35 are mounted on the substrate 30.
The distance D between the end faces of the first and second ultrasonic transducers 20 and 21 and the corresponding end of the pipe 27 is an important design consideration. Generally, the sound field formed by the ultrasonic waves from the ultrasonic transducer includes a near sound field and a far sound field, as shown in fig. 12. Ultrasonic waves propagate linearly through the near-sound field, while on the other hand, in the far-sound field, they propagate in the form of spherical waves. Thus, if the end of the pipe 27 exceeds the near field, the ultrasonic energy transmitted in the pipe 27 will be reduced compared to a pipe whose end is disposed in the near field, and thus the sound/noise ratio of the signal from the transducer will be reduced.
It is well known that the division between the near and far sound fields is at point Z0Expressed, its distance D from the end face of the ultrasonic transducer along the center line of the transducer is expressed by the following equation (22).
D=f-r2/C ...(22)
Wherein:
f: frequency of ultrasonic waves (Hz) in sample gas
r: inner diameter of pipe (m)
C: ultrasonic velocity (m/sec)
As described above, the velocity C in the sample gas is represented by equation (1). Thus, the higher the gas temperature and the smaller the molecular weight, the higher the velocity C. According to this embodiment, Z is0The maximum value is that, for example, the sample gas is 35 degrees Celsius air, and Z is0Approximately 1.4 mm.
FIGS. 13-15 show the results of ultrasonic waveform experiments obtained by the apparatus of FIG. 11, in which the distances d are 0.3mm, 1.0mm and 1.8 mm. The experimental results show that when the distance d is 1.8mm, the ultrasonic energy received by the ultrasonic transducer is significantly reduced compared to the case where the distance d is 0.3mm and 1.0 mm.