CN1769855B - Endoscope detuning monitoring system based on positive branch confocal unstable resonator and monitoring method thereof - Google Patents
Endoscope detuning monitoring system based on positive branch confocal unstable resonator and monitoring method thereof Download PDFInfo
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Abstract
A novel method for monitoring the cavity mirror disorder of a positive branch confocal unstable resonator is characterized in that: the monitoring system consists of a He-Ne light source, an unstable resonator cavity mirror, a spectroscope, a focusing lens, a light beam mass center detection CCD, a light beam matching telescope, a stepping motor and a controller thereof, an H-S wavefront sensor, an image acquisition card, an autocollimator and a data acquisition processing computer, wherein the positive branch confocal unstable resonator consists of a 45-degree reflector group, a coupling output mirror, a convex reflector and a concave reflector. The novel method for monitoring the cavity mirror disorder can be used for conveniently judging which type of optical elements in the cavity disorder and accurately calculating the disorder quantity. And the cavity mirror detuning mass center monitoring software also has the advantages of good real-time performance and convenient implementation of accurate detection of the detuning quantity of the optical element in the cavity.
Description
Affiliated technical field
The present invention relates to a kind of monitoring system and monitoring method thereof of laserresonator cavity mirror misalignment, particularly a kind of quick judgement and accurate measuring system of misalignment rate and measuring method thereof based on different elements imbalance in the positive-branch confocal unstable resonator chamber.
Background technology
Because the laser works wavelength that adopts the positive-branch confocal unstable resonator structure at present is generally all at region of ultra-red (such as 1.315 μ m, 3.8 μ m), can directly bring the near field intensity distribution inequality after discovering cavity mirror misalignment, light beam off-centre, and if the increase that chamber Jing Shixiejiao also can directly bring many optical aberrations when big, therefore how the imbalance of chamber mirror is done monitoring in real time and it is adjusted back to the initial alignment position, this is for judge whether resonator cavity (pulsed laser) before bright dipping imbalance occurs and be that imbalance etc. has appearred in which face chamber mirror very crucial actually, this is to guarantee that resonator cavity exports one of important prerequisite of better beam quality, has forefathers to do some explorations and trial in the unstable cavity mirror imbalance aspect the influence of optical cavity pattern at present.
People such as D.anafi are at " Intracavity Adaptive Optics.2:Tilt CorrectionPerformance ", Applied Optics, Vol.20, No.11, June 1981, experimental study in pp.1926～1,932 1) unsteady cavity is introduced static tilt, COAT adaptive system closed loop; 2), static tilt amount that increase to introduce, adaptive system is in the continuous closed-loop pattern; 3) introduce dynamic tilt, adaptive system closed loop; Studied adaptive system for the calibration result that tilts in the chamber.Find that inclination is less in the chamber, the suitable closed-loop mode system of employing is better to the calibration result effect of inclined aberration, but when disturbance increases to certain value, adopt the in-chamber adaptive aberration correction of climbing method principle to fail.
Robert L.Sanderson etc. are at " Laser Resonators with Tilted Reflectors ", Applied Optics, Vol.8, No.11, November 1969, adopted the numerical computation method quantitative examination in pp.2241～2248 and tilted to lack of proper care for the influence to low-order mode diffraction loss in the chamber.
Domestic Du Yanyi is " passive pseudo confocal unsteady resonator beam characteristics simulation ", the light laser and the particle beams, and Vol.12, No.2, April 2000, adopt the FFT method to study the beam characteristics of passive empty confocal resonator in pp.164～168, provided the three-dimensional steady state model.Studied problems such as beam quality that chamber mirror gap tilt effect and reflectivity-variable output coupling mirror cause and output power variation, near field beam characteristics and far field beam quality under medium magnification and big Fresnel digital modeling have been discussed.
Above-mentioned research is benefited our pursuits to the influence of resonator cavity output mode to inclined aberration in the chamber, the imbalance of element but all do not relate to a key issue: owing to may exist some general character at the chamber external monitor in the chamber, in brief, the concave mirror imbalance has some similarity with convex lens imbalance effect, for example all can cause the near field intensity distribution inequality, the increase of light beam off-centre and inclined aberration.If concave mirror imbalance back mistake adopts convex lens to compensate, thereby just will bring the not coaxial increase that may cause some optical aberration of light path, therefore how to judge and monitor the imbalance of different optical element in the chamber, and it is recalled to the initial alignment position respectively is a very problem of key.At present do not see bibliographical information at home as yet about monitoring method respectively to different elements in the unsteady cavity chamber.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcome the deficiencies in the prior art, proposed a kind of based on positive-branch confocal unstable resonator detection of cavity mirror's misalignment and monitoring method thereof, can make judgement fast to resonator cavity cavity mirror misalignment reason, analyze and occur the optical element of imbalance in the resonator cavity and it is recalled to the initial alignment position, thereby optical cavity chamber mirror has been accomplished to adjust respectively targetedly, reached and shorten the laser instrument bright dipping purpose of preceding stand-by period.
Technical solution of the present invention is: based on positive-branch confocal unstable resonator detection of cavity mirror's misalignment system, it is characterized in that: it is by the He-Ne light source, unstable cavity mirror, the Beam matching system, the H-S Wavefront sensor, spectroscope, autocollimator, image acquisition and data handling machine, condenser lens, centroid detection CCD, two stepper motors and controller thereof are formed, wherein unstable cavity mirror is by 45 ° of reflector group, output coupling mirror, convex mirror, concave mirror constitutes, the He-Ne light source is before 45 ° of reflector group, 45 ° of reflector group are the magnifier module group, by two angles is that 90 ° catoptron 1 and 2 constitutes, have hole (general diameter is about φ 1.5mm) in 45 ° of reflector group on the catoptron, also (the two spacing was that 200～300mm is advisable near concave mirror before convex mirror was positioned at concave mirror, reason is: one, chamber illuminating apparatus tool adjusting mechanism itself has certain size, so spacing can not be zero; Its two, when avoiding the main laser bright dipping because the disturbance that optical cavity middle part dynamic gain medium brings should make concave, convex chamber mirror all try one's best away from gain media; And should make that the system chamber is long design the long L in chamber for unsteady cavity), the resonator cavity chamber is long to be that to design the chamber long, wherein 45 ° of reflector group, output coupling mirror, convex mirror, concave mirror are formed unsteady cavity and accent chamber light output light path jointly; Output coupling mirror be positioned at before the convex mirror and try one's best convex mirror and with optical axis included angle be 45 °; The Beam matching system is positioned at output coupling mirror the place ahead, and the H-S sensor is positioned at before the Beam matching system; Spectroscope is between He-Ne light source and catoptron module, centroid detection CCD is positioned on the focal plane of condenser lens, condenser lens is between spectroscope and centroid detection CCD, the hot spot that centroid detection CCD detects carries out image acquisition and analyzing and processing by image acquisition and data handling machine, calculate light beam centroid position side-play amount (x and y direction in real time by real-time monitoring software, about 15 frame/seconds), two stepper motors and controller thereof are accurately adjusted the convex mirror after the imbalance and the chamber mirror of concave mirror respectively.
Based on positive-branch confocal unstable resonator detection of cavity mirror's misalignment method, it is characterized in that: at first observe the real-time software for calculation of light beam barycenter (at light beam centroid detection CCD), whether light beam x and y direction barycenter depart from, if occur departing from then adopt the stepper motor Adjustment System (precision 0.6 ") is adjusted convex mirror (the two dimension rotation is regulated) to demarcating zero point; Whether next observes each rank Zernike aberration coefficients (the H-S Wavefront sensor is write) in the wavefront reconstruction software and departs from and demarcate zero point, adopt stepper motor and controller thereof that concave mirror is accurately adjusted if occur departing from, utilize autocollimator accurately to measure the concave mirror error angle at last, so just accomplished that concrete steps are as follows to the real-time monitoring and the adjustment of different optical element imbalance in the chamber:
(1) at first to the monitoring of convex mirror imbalance, the monitoring that convex mirror is lacked of proper care is made of jointly the catoptron in He-Ne light source, the catoptron module, convex mirror, spectroscope, condenser lens and centroid detection CCD, and monitoring step is as follows:
A. adjust spectroscope, condenser lens finally images on the centroid detection CCD focal plane light beam through the convex mirror reflected back;
B. carry out reading in real time and calculating of facula mass center (x and y direction) by real-time monitoring software;
C. the hot spot that detects is calibrated, to determine initial zero, the facula mass center side-play amount of calculating after the later convex mirror imbalance all is for this calibration point, if facula mass center is offset, then imbalance appears in convex mirror, adjusts it to demarcating zero point with stepper motor and controller;
(2) to concave mirror imbalance monitoring, monitoring step is as follows:
A. optical cavity adjust coaxial after, (the ratio of obstruction is 1: 2 a annular beam to survey the coupling output beam with the H-S Wavefront sensor, the about 50mm of diameter), analyzes the light beam aberration, adjust output beam after coaxial as demarcation zero point of H-S Wavefront sensor with optical cavity by image acquisition and data handling machine;
B. the misalignment rate owing to convex mirror can and calculate by the described method real-time detection of above-mentioned steps (1), can at first convex mirror be recalled to so demarcation zero point in the above-mentioned steps (1) (further can real-time closed-loop control), owing to corrected the convex mirror imbalance, so at this moment, the wave front aberration that reflects of H-S Wavefront sensor is that concave mirror causes, available step motor and controller are accurately adjusted concave mirror to demarcating zero point, have therefore accomplished the concave mirror after the imbalance to be adjusted targetedly again;
(3) adopting precision is 0.1 " autocollimator accurately measure the concave mirror error angle, concrete steps are as follows:
A. the concave mirror back side is designed to polish the good optical face, and plating is adjusted autocollimator and is made concave mirror back side blur-free imaging on the focal plane of autocollimatic instrument to the high-reflecting film of He-Ne spectral line (0.6328 μ m);
B. then with the picture of the aiming of the crosshair in autocollimator concave mirror and with this position as the reading zero-bit, the concave mirror angle of lacking of proper care can be measured like this.
The present invention compared with prior art has following beneficial effect:
(1) a kind of monitoring system and monitoring method thereof of laserresonator cavity mirror misalignment of novelty have been proposed, the concave, convex chamber mirror that aligns in the confocal resonator has been accomplished in real time monitoring respectively, and the optical cavity after the imbalance is readjusted targetedly coaxial respectively, shortened the stand-by period before the laser instrument bright dipping.Reason is as follows: we discover that the hot spot that then is reflected on the centroid detection CCD will have tangible skew if imbalance appears in convex lens; And after the concave mirror appearance imbalance, the facula deviation amount that is reflected on the centroid detection CCD does not then have significant change, and obvious variation then takes place the Zernike aberration in the output beam (particularly low order Z1 or Z2 coefficient).Therefore adopted the imbalance situation of at first judging convex mirror, and it has been adjusted to initial demarcation zero point; Secondly, because the catoptron module has been made into non-adjustable or the fine-tuning mechanism of mirror, can think after again it being tightened up fully that it is compared with the concave, convex face chamber mirror with two-dimensional adjusting mechanism and will stablize manyly that its misalignment rate can be ignored.Therefore if get rid of other interference (as the air-flow) chamber in again, can think that light beam aberration that the at this moment outer Hartmann wave front sensor in chamber and wavefront reconstruction software reflect is concave mirror and lacks of proper care and cause, so just it can be adjusted to initial demarcation zero point.
(2) the present invention has taked the method for monitoring respectively to the imbalance of concavo-convex chamber mirror, promptly adopting one side CCD in the mode of monitoring barycenter convex mirror to be lacked of proper care surveys, adopt H-S sensor measurement coupling output near field light beam phase place to survey the concave mirror imbalance, adopt the high precision autocollimator accurately to measure the concave mirror error angle, the relation curve (experiment is indicated as linearity) of the facula mass center side-play amount that the convex mirror error angle can be directly surveyed by error angle and CCD calculates, thereby has accomplished and targetedly the imbalance optical cavity has been judged and adjusted.
Description of drawings
Fig. 1 is a system architecture schematic block diagram of the present invention;
Fig. 2 is after convex mirror of the present invention tilts to lack of proper care, the relation between the facula mass center side-play amount (unit is a pixel) that imbalance angle (unit is second) and CCD detect;
Fig. 3 is the relation curve of concave mirror imbalance angle of the present invention and outer light beam corrugated, chamber PV (peak valley) value;
Fig. 4 is the concave mirror of the present invention imbalance 33.4 of tilting " time by the Hartmann sensor detection chamber outside, the light beam PHASE DISTRIBUTION that the type method wavefront reconstruction obtains;
Fig. 5 is the concave mirror error angle of the present invention's measurement and the relation of chamber outer incline Zernike coefficient;
Fig. 6 is light beam barycenter of the present invention real-time detection and calculating analysis software interface;
Fig. 7 is light beam barycenter of the present invention real-time detection and calculating analysis software programming flow diagram.
Embodiment
As shown in Figure 1, comprehensive aberration detection system is by He-Ne light source 1 in the chamber of the present invention, unstable cavity mirror, Beam matching system 6, H-S Wavefront sensor 7, spectroscope 8, autocollimator 9, image acquisition and data handling machine 10, condenser lens 11, centroid detection CCD 12, stepper motor and controller 13 thereof, 14 form, wherein unsteady cavity is by 45 ° of reflector group 2, output coupling mirror 3, convex mirror 4, concave mirror 5 constitutes, two catoptron angles are 90 ° in 45 ° of reflector group 2, convex mirror 4 is arranged in 45 ° of reflector group 2 and opens before the catoptron 1 of coupling aperture, and (the two spacing is that 200～300mm is advisable near concave mirror 5 in the position, reason is: one, chamber illuminating apparatus tool adjusting mechanism itself has certain size, so spacing can not be zero; Its two, when avoiding the main laser bright dipping because the disturbance that optical cavity middle part dynamic gain medium brings should make concave, convex chamber mirror all try one's best away from gain media; And should make system's chamber length design the long L in chamber) for unsteady cavity, make the chamber long long for designing the chamber, concave mirror 5 is arranged in before reflector group 2 catoptrons 2, output coupling mirror 3 is positioned at before the convex mirror 4 and presses close to convex mirror 4 (the two centre distance is 150～200mm, reason at first is, theoretical analysis shows that there are two in the positive-branch confocal chamber from reproducing wave mode, and the plane wave that is positioned at the convex lens place is only usually needed; Secondly, output coupling mirror and mechanical mechanism thereof are subjected to self size restrictions, can not be close to convex lens and place, for chamber length than long light cavity, the two centre distance does not impact beam quality in this tolerance limit degree), with optical axis included angle be 45 °, to realize the side-coupled output of light beam.He-Ne laser 1 is used for introducing transfers chamber light, and Beam matching system 6 matches the microlens array caliber size with incident beam, images on the CCD target surface again, and Hartmann wave front sensor 7 mainly is made of the beam system that contracts, microlens array, ccd detector.
The parameter of Hartmann sensor is: sub-aperture number 32 * 32 arrays, dynamic range ± 1.5 λ/sub-aperture, wavefront measurement precision PV＜1/10 λ, RMS＜1/20 λ, integral inclination measurement range ± 50 "; The image pick-up card model is OK-M10A, effect is that the output signal with H-S Wavefront sensor 7 is input to image acquisition and process computer 10, it and image acquisition and process computer 10 be used can realize the wavefront continuous acquisition and be transferred to image acquisition and process computer 10 in.
As shown in Figure 1, positive-branch confocal unstable resonator detection of cavity mirror's misalignment method of the present invention, step is as follows:
(1) in unsteady cavity imbalance monitoring system, to the monitoring of convex mirror imbalance by He-Ne light source 1, catoptron 1 in the catoptron module 2, convex mirror 4, spectroscope 8, condenser lens 11 and centroid detection CCD 12 constitute jointly, adjust spectroscope 8, condenser lens 11 images on the centroid detection CCD12 focal plane light beam through convex mirror 4 reflected backs, real-time software by exploitation carries out reading of facula mass center position and calculating in real time then, the hot spot that detects is calibrated (determine initial zero, the facula mass center side-play amount that calculates after later convex mirror 4 imbalances all is for this initial zero).
(2) in native system, as follows: as after the optical cavity adjustment is coaxial, to survey the annular beam that coupling is exported, analyze the light beam aberration by image acquisition and data handling machine 10 with the H-S Wavefront sensor outside the chamber 7 to the monitoring method of concave mirror 5 imbalances.Adjust output beam after coaxial as demarcation zero point of Hartmann wave front sensor 7 with optical cavity.Because the misalignment rate of convex mirror 4 can and calculate by method real-time detection described in the above-mentioned steps (1), just can at first convex mirror 4 be recalled to the demarcation zero point (but further real-time closed-loop control) in the step (1).Because calibrated convex mirror 4 imbalances, so at this moment the light beam aberration that reflects of H-S Wavefront sensor 7 is that concave mirror 5 causes, and has therefore accomplished pointedly the chamber mirror after the imbalance to be adjusted.
(3) adopting precision is 0.1 " autocollimator 9 accurately measure concave mirrors 5 imbalance angles; concrete grammar is as follows: the back side of concave mirror 5 is designed to polish good optical face and the plating high-reflecting film to the He-Ne spectral line; adjust autocollimator 9 and make concave mirror back side blur-free imaging on autocollimator 9 focal planes, utilize the picture of the crosshair aiming concave mirror 5 in the autocollimator 9 then and with this position as demarcating zero point.For magnifier module group 2, owing to discover that its imbalance not only directly influences He-Ne and transfers the chamber optically-coupled to enter optical cavity, and the mode of oscillation in the optical cavity is had very remarkable influence.Therefore for reducing influence factor, catoptron module 2 is generally all made non-adjustable or micro-adjusting mechanism, and after the first adjustment of optical cavity finishes, as far as possible magnifier module group 2 is tightened up.
Shown in Figure 2, after convex mirror 4 inclination imbalances, the relation between the facula mass center side-play amount (unit is a pixel) that imbalance angle (unit is second) and barycenter CCD12 detect.As seen the linear relationship of the two is better, and choosing of control algolithm provided reference when this made the optical cavity automatic mechanism to next step.Data have been made least square fitting, and the pass is: y=-0.385+0.638x-0.002x
2
Fig. 3 is the relation curve of concave mirror 5 imbalance angles of the present invention and outer light beam corrugated, chamber PV (peak valley) value, here quantitative examination the relation between cavity mirror misalignment amount and the chamber outer light beam aberration, wherein the angle modulation of concave mirror tilt misalignment is measured by autocollimator, the chamber outer light beam adopts Hartmann sensor to survey, and carries out obtaining corrugated PV value again behind the wavefront reconstruction with type method.The result shows that output beam phase place PV value and concave mirror Tilt Disturbance amount present quafric curve distribution (least square fitting curve y
1=ax
1 2+ bx
1+ c; A, b, c is respectively 0.0002,0.0069, and 0.3415).Under the situation of proofreading and correct the convex lens imbalance, the light beam PV aberration that Hartmann sensor is measured outside the chamber has reflected the imbalance degree of concave mirror in the chamber from another point of view.
Figure 4 shows that concave mirror 5 tilt misalignment angle modulation are 33.4 " time (recording) by autocollimator 9, corrugated PV and RMS (peak valley and root mean square) value is respectively 0.8 λ and 0.11 λ (removing the 1st, 2 rank inclined aberrations).
Fig. 5 distributes for the far-field spot that is further calculated by the Zernike coefficient.
Shown in Figure 6, be real-time detection of light beam barycenter and calculating analysis software interface, can calculate in real time, the display beams barycenter is at the position offset (about 15 frame/seconds) of x and y direction, can carry out continuous acquisition and preservation to data, and can adjust the imbalance convex lens, make it return back to initial coaxial or demarcation state.
As shown in Figure 7, real-time software of the present invention programming flow diagram is as follows:
1. adjust (the chamber mirror is not lacked of proper care) when coaxial at optical cavity, concave mirror 4 beam reflected are again through spectroscope 8, and condenser lens 11 images on the CCD12 focal plane, and this focused beam is at first surveyed through image pick-up card, and probe software reads the capture card detection image again.
2. at first select image threshold, carry out threshold value according to the image situation that detects and select, cardinal rule is after adding upper threshold value, and image can not saturatedly be unlikely to too dark (the gray scale maximal value gets final product) again about 200.Next selects centroid calculation zone (program adopts a variable size square region, can mouse drag), makes hot spot be positioned at the center, zoning and adjust the zoning frame to be suitable size.For effectively reducing facula mass center calculated amount, the error of calculation and influence of background noise, the zoning frame should not selected excessive.
3. calculate facula mass center coordinate (x by (I) formula
c, y
c):
In the following formula, x
i, y
iBe (i, j) coordinate of individual pixel on the CCD target surface; I
IjBe (i, j) light intensity signal received of individual pixel-by-pixel basis on the CCD target surface.
4. to the calibration of reference beam hot spot, promptly determine to demarcate light beam (x
0, y
0) position, the facula mass center side-play amount of calculating after the later convex mirror imbalance all is for this initial zero.
5. calculate light beam barycenter (x to be measured
1, y
1) the position, facula mass center departs from (x so
p, y
p) be
x
p＝x
1-x
0?y
p＝y
1-y
0 (II)
6. according to the light spot image that reads capture card
Calculate facula mass center bias
In program interface, show
Read the next frame light spot image, so circulation has promptly realized the program real-time.Through estimation, this program is to light beam centroid position side-play amount x
pAnd y
pComputing velocity about 15 frame/seconds, accomplished real-time substantially.Program mainly again three modules constitute promptly: facula mass center demarcating module, centroid offset calculate and display module in real time, and module is gathered and preserved to the barycenter change sequence.In program interface, can show in real time: light beam centroid position side-play amount x
pAnd y
p(thereby monitor chamber convex mirror misalignment degree in real time and readjust it coaxial); The light spot image that detects; Side-play amount x
pAnd y
pChange curve etc. in time.
Claims (3)
1. based on positive-branch confocal unstable resonator detection of cavity mirror's misalignment system, it is characterized in that: it is by He-Ne light source (1), unstable cavity mirror (2,3,4,5), Beam matching system (6), H-S Wavefront sensor (7), spectroscope (8), autocollimator (9), image acquisition and data handling machine (10), condenser lens (11), centroid detection CCD (12), adjusting the stepper motor of convex mirror (4) and the stepper motor and the controller (14) thereof of controller (13) and adjustment concave mirror (5) thereof forms, wherein unstable cavity mirror is by 45 ° of reflector group (2), output coupling mirror (3), convex mirror (4), concave mirror (5) constitutes, He-Ne light source (1) in 45 ° of reflector group (2) before, 45 ° of reflector group (2) are the magnifier module group, by two angles is that 90 ° catoptron 1 and 2 constitutes, have the hole on the catoptron 1 in 45 ° of reflector group (2), convex mirror (4) is positioned at concave mirror (5) before also near concave mirror (5), the resonator cavity chamber is long long for designing the chamber, output coupling mirror (3) is positioned at convex mirror (4) before and the convex mirror of trying one's best (4), with optical axis included angle be 45 °; Beam matching system (6) is positioned at output coupling mirror (3) the place ahead, and H-S Wavefront sensor (7) is positioned at Beam matching system (6) before; Spectroscope (8) is positioned between He-Ne light source (1) and the catoptron module (2), centroid detection CCD (12) is positioned on the focal plane of condenser lens (11), condenser lens (11) is positioned between spectroscope (8) and the centroid detection CCD (12), the hot spot that centroid detection CCD (12) detects carries out image acquisition and analyzing and processing by image acquisition and data handling machine (10), adjust the stepper motor and the controller (13) thereof of convex mirror (4) the chamber mirror of the convex mirror (4) after lacking of proper care is accurately adjusted, adjust the stepper motor and the controller (14) thereof of concave mirror (5) the chamber mirror of the concave mirror (5) after lacking of proper care is accurately adjusted.
2. according to claim 1 based on positive-branch confocal unstable resonator detection of cavity mirror's misalignment system, it is characterized in that: the diameter of perforate is Φ 1.5mm on the middle catoptron 1 of described 45 ° of reflector group (2).
3. based on positive-branch confocal unstable resonator detection of cavity mirror's misalignment method, it is characterized in that may further comprise the steps:
(1) monitoring of at first convex mirror (4) being lacked of proper care, monitoring to convex mirror (4) imbalance constitutes by the catoptron 1 in He-Ne light source (1), the catoptron module (2), convex mirror (4), spectroscope (8), condenser lens (11) and centroid detection CCD (12) are common, and monitoring step is as follows:
A. adjust spectroscope (8), condenser lens (11) finally images on centroid detection CCD (12) focal plane light beam through convex mirror (4) reflected back;
B. carry out reading in real time and calculating of facula mass center by real-time monitoring software;
C. the hot spot that detects is calibrated, to determine demarcating zero point, the facula mass center side-play amount of calculating after convex mirror (4) imbalance later on all is for this demarcation zero point, if facula mass center is offset, then imbalance appears in convex mirror (4), adjusts it to demarcating zero point with stepper motor and controller (13);
(2) to concave mirror (5) imbalance monitoring, monitoring step is as follows:
A. optical cavity adjust coaxial after, survey the coupling output beam with H-S Wavefront sensor (7), analyze the light beam aberration by image acquisition and data handling machine (10), adjust output beam after coaxial as demarcation zero point of H-S sensor (7) with optical cavity;
B. since the misalignment rate of convex mirror (4) by the described method real-time detection of above-mentioned steps (1) and calculate, so at first convex mirror (4) is recalled to the demarcation zero point in the above-mentioned steps (1), owing to corrected convex mirror (4) imbalance, at this moment the wave front aberration that reflects of H-S Wavefront sensor (7) is that concave mirror (5) causes, accurately adjust concave mirror (5) with stepper motor and controller (14), make H-S Wavefront sensor (7) get back to it and demarcate zero point, therefore accomplished again the concave mirror (5) after the imbalance to be adjusted targetedly;
(3) adopting precision is 0.1 " autocollimator (9) accurately measure concave mirror (5) error angle, concrete steps are as follows:
A. concave mirror (5) back side is designed to polish the good optical face, and plating is adjusted autocollimator (9) and is made concave mirror (5) back side blur-free imaging on the focal plane of autocollimator (9) to the high-reflecting film of He-Ne spectral line;
B. use the picture of the crosshair aiming concave mirror (5) in the autocollimator (9) then and with this position as the reading zero-bit, concave mirror (5) angle of lacking of proper care can be measured like this.
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