CN1756859A - A kind of method of modifying inner surface of tubular workpiece and isolated plant thereof - Google Patents
A kind of method of modifying inner surface of tubular workpiece and isolated plant thereof Download PDFInfo
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- CN1756859A CN1756859A CNA200380110083XA CN200380110083A CN1756859A CN 1756859 A CN1756859 A CN 1756859A CN A200380110083X A CNA200380110083X A CN A200380110083XA CN 200380110083 A CN200380110083 A CN 200380110083A CN 1756859 A CN1756859 A CN 1756859A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/466—Radiofrequency discharges using capacitive coupling means, e.g. electrodes
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Abstract
The present invention relates to a kind of method and isolated plant thereof of modifying inner surface of tubular workpiece.This method places a Processing Room with this tubular workpiece, and a columnar electrode and can be allowed the hollow edged electrode of plasma diffusion, coaxial arrangement is in this tubular workpiece from the inside to the outside, this two electrode and radio-frequency power supply are connected, thereby in Processing Room, produce an equally distributed vertically stable state radio-frequency plasma, described hollow edged electrode is made of the circumferential uniform distribution that is distributed in cylindric strut member outside surface or the wire electrode of spiral distribution, when between tubular workpiece and hollow edged electrode, applying negative high voltage, make between hollow edged electrode and the tubular workpiece to relatively rotate, thereby relatively equably acceleration of ions is injected into inner surface of tubular workpiece.The inventive method and isolated plant thereof have been eliminated the aperture plate shade of the inner surface of tubular workpiece that is modified, make modification internal surface more evenly in addition, be particularly useful for the modification of elongated tubular product such workpiece.
Description
Technical field
The present invention relates to a kind of plasma source ion implantation technique of utilizing inner surface of tubular workpiece is carried out the method for modification, and the isolated plant of realizing this method.
Background technology
It is a kind of new material surface ion implantation technique that plasma source injects (PS II), as rolling up (1987) 4591-4596 page or leaf by J.R.Conrad at document J.Appl.Phys. (Applied Physics periodical) the 62nd, J.L.Radtke, R.A.Dodd, " Plasma source ion-implantationtechnique for surface modification of materials " literary composition that Frank J.Worzala and Ngoc C.Tran are write is introduced a kind of like this plasma source ion implantation technique.But at this moment the internal surface that directly injects tubular workpiece with PS II technology still can not be used for handling the internal surface of fineness ratio less than 0.6 pipe fitting.For addressing this problem, (publication number is the applicant: proposed a kind of based on the method for PS II technology to modifying inner surface of tubular workpiece 1382829) in disclosed Chinese invention patent application on December 4th, 2002, in the method, tubular workpiece is placed Processing Room, and with a columnar electrode and a tubulose grid electrode from the inside to the outside coaxial arrangement in tubular workpiece, this two electrode and radio-frequency power supply are connected, thereby in Processing Room, produce an equally distributed vertically stable state radio-frequency plasma, between tubular workpiece and tubulose grid electrode, apply negative high voltage again, positive ion is quickened to be injected into inner surface of tubular workpiece; But exist the shade of untreated tubulose grid electrode at the internal surface of the tubular workpiece of modification, cause the inhomogeneous of modifying inner surface of tubular workpiece.
Summary of the invention
The technical problem to be solved in the present invention is: provide a kind of plasma source ion implantation technique of utilizing to make tubular workpiece obtain the method for modifying inner surface relatively uniformly, and implement the isolated plant of this method.
Method for modifying inner surface of tubular workpiece, above-mentioned technical problem is to solve like this: this tubular workpiece is placed a Processing Room, and a columnar electrode and can be allowed the hollow edged electrode of plasma diffusion, coaxial arrangement is in this tubular workpiece from the inside to the outside, this two electrode and radio-frequency power supply are connected, thereby in Processing Room, produce an equally distributed vertically stable state radio-frequency plasma, it is characterized in that: described hollow edged electrode constitutes by being distributed in the wire electrode of arranging on the cylindric strut member outside surface, when between tubular workpiece and hollow edged electrode, applying negative high voltage, make between hollow edged electrode and the tubular workpiece to relatively rotate, thereby relatively equably acceleration of ions is injected into inner surface of tubular workpiece.
In aforesaid method, the wire electrode of described hollow edged electrode adopts circumferential equally distributed wire electrode, like this, when hollow edged electrode and tubular workpiece relatively rotate, the grid electrode shade that inner surface of tubular workpiece just can not produce in the prior art to be occurred, especially when adopting the rotation tubular workpiece, can guarantee that the modification of inner surface of tubular workpiece is more even; And modifying inner surface of tubular workpiece is that segmentation is carried out, thereby for fineness ratio longer pipe shape workpiece, can carry out modification to second section internal surface again to behind one section modifying inner surface.
In aforesaid method, the wire electrode of described hollow edged electrode formula in the shape of a spiral distributes, and the pitch that two ends account for the wire electrode of wire electrode length overall 1/4～1/3 length is 1.5～2 times of pitch of interlude wire electrode, and the pitch of wire electrode can be regulated.
As a kind of improvement of aforesaid method, the negative high voltage between tubular workpiece and the hollow edged electrode is pulse or negative direct current high voltage, or alternately applies pulse negative high voltage and negative direct current high voltage between tubular workpiece and hollow edged electrode.
In order to realize a kind of isolated plant of the invention provides of aforesaid method: this device comprises a Processing Room, place columnar electrode and hollow edged electrode in this Processing Room, coaxial setting, the radio-frequency power supply that connects this two electrode, and put on negative high voltage power source between hollow edged electrode and tubular workpiece, it is characterized in that: described hollow edged electrode is made of the wire electrode that is distributed in cylindric strut member outside surface, this wire electrode is circumferential uniform distribution, or formula distributes in the shape of a spiral, and this device also comprises a drive unit that tubular workpiece and hollow edged electrode are produced relative rotation.
Just as noted earlier, owing to adopted the wire electrode of circumferential uniform distribution or spiral distribution, set drive unit can make tubular workpiece and hollow edged electrode relatively rotate, thereby can make inner surface of tubular workpiece just the grid electrode shade can not occur.
As a kind of improvement of said apparatus, described wire electrode is or/and columnar electrode is the metal tube of the hollow that is communicated with separately, simultaneously as water-cooling channel.
As another improvement of said apparatus, Processing Room is made of tubular workpiece itself, and columnar electrode and by hollow edged electrode and the coaxial setting of tubular workpiece that wire electrode constitutes like this, can make this device save Processing Room, thereby simplify this device.
As the further improvement of said apparatus, drive unit can be placed in the Processing Room, drive unit can also be connected with hollow edged electrode or tubular workpiece certainly.
In sum, the invention has the advantages that: the method for modifying inner surface of tubular workpiece of the present invention, by the hollow edged electrode of making by the wire electrode of circumferential uniform distribution or spiral distribution, with by a drive unit hollow edged electrode and tubular workpiece are relatively rotated, eliminated the aperture plate shade of the inner surface of tubular workpiece that is modified, make that the inner surface of tubular workpiece of modification is more even, improve inner surface of tubular workpiece corrosion-resisting wear-proof performance.
As long as process corresponding hollow edged electrode and columnar electrode, process the internal surface of tubular workpiece for the mode of long tube available segment processing, its separation surface can overlappingly be processed.
Description of drawings
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail:
Fig. 1 is the schematic diagram of prior art to the modifying inner surface of tubular workpiece method
Fig. 2 is the synoptic diagram of expression modifying inner surface of tubular workpiece isolated plant of the present invention
Fig. 3 is the partial schematic diagram of expression another isolated plant of modifying inner surface of tubular workpiece of the present invention
Fig. 4 is the x-ray photoelectron spectroscopy figure of N1s
Fig. 5 is the x-ray photoelectron spectroscopy figure of Ti2p
The surface topography that Fig. 6 is arrived by the atomic force microscope observation of growth TiN on the Si base at the aperture plate shade place of blocking
Fig. 7 is the surface topography that is not arrived by the atomic force microscope observation of growth TiN on the Si base at the aperture plate place of blocking
The accompanying drawing sign
1, plasma body 2, the negative high voltage pulse power 3,
4, tubular workpiece 5, radio-frequency power supply 6, stopping condenser
7, fine setting needle-valve 8, columnar electrode 9, hollow edged electrode
10, Processing Room 11, vacuum extractor 12, motor
14, the water-in of argon bottle 15, nitrogengas cylinder 16, hollow edged electrode
17, the water-in 19 of the water outlet 18 of hollow edged electrode, columnar electrode, the water outlet of columnar electrode
20, working gas air outlet 21, working gas inlet mouth
Embodiment
In order better to understand the improvement that the present invention does with respect to prior art, earlier (publication number is: 1382829), utilize the plasma source ion implantation technique that the method for modifying inner surface of tubular workpiece is done an explanation to the Chinese invention patent application mentioned in the background technology.Fig. 1 is the principle of above-mentioned prior art to the modifying inner surface of tubular workpiece method, and wherein, Figure 1A stereographic map, Fig. 2 B are side-view.At first tubular workpiece to be processed 4 is placed in the Processing Room 10, and a columnar electrode 8 is placed the center of tubular workpiece 4, columnar electrode 8 and 4 of tubular workpieces be provided with a tubulose grid electrode 9 that constitutes by metal grid mesh ', thereby columnar electrode 8, tubulose grid electrode 9 ' and tubular workpiece 4 coaxial arrangement from inside to outside.This tubulose grid electrode 9 ' be connected with a radio-frequency power supply 5 with columnar electrode 8, wherein, columnar electrode 8 is connected with the power utmost point of radio-frequency power supply 5 by a stopping condenser 6, and tubulose grid electrode 9 ' be connected with ground 3, thereby tubulose grid electrode 9 ' and columnar electrode 8 between radio frequency discharge, produce an equally distributed vertically plasma body 1.In addition, the negative pole of negative high voltage power source 2 is connected with tubular workpiece 4, the plus earth of negative high voltage 2, thus positive ion is quickened to be injected into the internal surface of tubular workpiece 4.Because tubulose grid electrode 9 ' existence, will on the internal surface of tubular workpiece 4, form the aperture plate shade, thereby cause the inhomogeneous of modifying inner surface of tubular workpiece.
For solving the problem of non-uniform of this modifying inner surface of tubular workpiece, in the device of modifying inner surface of tubular workpiece of the present invention, with the tubulose grid electrode 9 of prior art among Fig. 1 ' change into the hollow edged electrode 9 that circumferential equally distributed wire electrode as shown in Figure 2 constitutes, and when between tubular workpiece 4 and hollow edged electrode 9, applying negative high voltage, drive hollow edged electrode 9 or tubular workpiece 4 with motor 12, make between hollow edged electrode 9 and the tubular workpiece 4 to relatively rotate.Be that tubular workpiece 4 is static shown in Fig. 2, motor 12 drives hollow edged electrode 9 and rotates; But also can be that hollow edged electrode 9 does not rotate, rotate and drive tubular workpiece 4 by motor 12.
The isolated plant example of Fig. 2 and two kinds of modifying inner surface of tubular workpiece methods of the present invention shown in Figure 3, it mainly comprises a Processing Room 10, columnar electrode 8, hollow edged electrode 9, motor 12, radio-frequency power supply 5, negative high voltage power source 2, vacuum extractor 11 and working gas source 14 and 15; Wire electrode shown in Figure 2 is circumferential uniform distribution; Wire electrode shown in Figure 3 formula in the shape of a spiral distributes, the pitch that these two ends account for the wire electrode of wire electrode length overall 1/4～1/3 length is 1.5～2 times of pitch of interlude wire electrode, wherein be provided with water-cooling channel, in use, after water is constantly made cooling process from water-in 16 water inlets of hollow edged electrode to hollow edged electrode, discharge from the water outlet 17 of hollow edged electrode again, also water-cooling channel can be set simultaneously in columnar electrode, water is constantly made cooling process from water-in 18 water inlets of columnar electrode and is discharged from the water outlet 19 of columnar electrode.
Embodiment below in conjunction with above-mentioned concrete modifying inner surface of tubular workpiece device, modifying inner surface of tubular workpiece method of the present invention is described in detail: at first tubular workpiece 4 is placed Processing Room 10, and columnar electrode 8 and the hollow edged electrode 9 and the coaxial from inside to outside setting of tubular workpiece 4 that will make by titanium, aluminium or chromium usually.By vacuum extractor 11 Processing Room 10 is vacuumized, for example be evacuated to 10-3Pa; Then, charge into working gas in this Processing Room 10, the most frequently used working gas is the mixed gas that nitrogen, argon gas or their constitute, and opens argon bottle 14 and nitrogengas cylinder 15, and working gas 20 charges into Processing Room 10 through working gas inlet mouth 21 from the air outlet.Can change the size of air pressure and airshed by fine setting needle-valve 7, make the air pressure of working gas maintain 10Pa-90Pa;
Then, connect radio-frequency power supply 5, its radio frequency power is chosen as between 100-200 watt usually, thereby produces an equally distributed vertically stable state radio-frequency plasma 1 in Processing Room; This plasma body 1 can spread to inner surface of tubular workpiece by hollow edged electrode, and diffusion plasma body 1 is uniformly vertically, and this is uniform with regard to the dosage that has guaranteed to incide tubular workpiece 4 internal surfaces; At this moment, connect the power supply of motor 12, control hollow edged electrode 9 slowly rotates, and tubular workpiece 4 is connected with the negative pole of negative high voltage power source 2, this negative high voltage voltage is pulse negative high voltage voltage, as 60 hertz of-10 kilovolts, frequency, generally be negative several ten thousand volts, also can be the negative direct current high voltage power supply, as-2000 volts negative direct current high voltage power supply, generally be that negative hundreds of is to negative several kilovolts.Thereby between the internal surface of hollow edged electrode 9 and tubular workpiece 4, promptly form even radial electric field, positive ion is quickened to be injected into tubular workpiece 4 internal surfaces acceleration of ions.After machining, can close high-voltage power supply, radio-frequency power supply, take out tubular workpiece.
For tubular workpiece than columnar electrode 8 and hollow edged electrode 9 length, then can adopt the staging treating mode, for example earlier the half section internal surface in tubular workpiece 4 left sides be carried out modification, and then modification is carried out for half section in the right side, its interface can overlappingly be processed, and also can be divided into three sections, four sections processing according to different situations.
Certainly, in above-mentioned modifying process, wire electrode can add water cooling as water-cooling channel or/and columnar electrode is adopted the metal tube of the hollow that is interconnected in modification, strengthens the power of modification; Can also directly tubular workpiece itself be used as Processing Room, thereby this isolated plant can save Processing Room.In addition, the drive unit that motor is such places outside the Processing Room usually, if but with no oily motor, also can be placed on outside the Processing Room.
At last, to analyzing with the internal surface of the inventive method modification tubular workpiece.
(1) x-ray photoelectron of N1s and Ti2p can be seen Fig. 3 and Fig. 4 respectively by spectrogram, and the N1s peak is a combined at 396.6eV, and Ti-N associative key bound energy is 454eV, and Ti-O associative key bound energy is 458.5eV, and the peak of 2p3/2 is at 458.05eV among the figure, so TiO
2Composition is more, and this mainly is because inner surface of tubular workpiece is oxidized, but we have seen the existence of TiN phase, and this is identical with the generation composition that discharges with grid electrode RF.
(2) in the prior art, when grid electrode 9 ' and tubular workpiece 4 between the less or plasma density of distance lower the time, because ion implantation translational motion can be seen tangible aperture plate shade at inner surface of tubular workpiece, Fig. 5 and Fig. 6 are illustrated respectively in that the epontic TiN film of same Si is sheltered from by aperture plate and are not blocked the surface topography that the atomic force microscope in dwelling is seen by aperture plate, obviously, grain growing shown in Figure 5 is lax, grain growing shown in Figure 6 is tight, and the ununiformity of this surface filming certainly will cause the ununiformity of surface chemistry performance and mechanical property.And the present invention with the piped aperture plate change do an electrode and make it to rotate after, the tubular workpiece woman surface topography of processing is then evenly closely.
More than experiment and analytical results show: the method for a kind of modifying inner surface of tubular workpiece provided by the invention, no matter process the tubular workpiece of what shape, as long as process corresponding hollow edged electrode and columnar electrode, just can really thoroughly realize inner surface of tubular workpiece modification uniformly and effectively.
Claims (12)
1, a kind of method of modifying inner surface of tubular workpiece, this method may further comprise the steps: at first processed tubular workpiece is placed a Processing Room, and a columnar electrode and can be allowed the hollow edged electrode of plasma diffusion, coaxial arrangement is in this tubular workpiece from the inside to the outside; By vacuum extractor Processing Room is evacuated to 10
-3Pa; Then, in this Processing Room 10, charge into working gas; It is characterized in that: this two electrode and radio-frequency power supply are connected, thereby produced an equally distributed vertically stable state radio-frequency plasma in Processing Room, this plasma body spreads to inner surface of tubular workpiece vertically by hollow edged electrode; When between tubular workpiece and hollow edged electrode, applying negative high voltage, connect the power supply of drive unit, thereby relatively equably acceleration of ions is injected into inner surface of tubular workpiece, after machining.
2. by the method for the described modifying inner surface of tubular workpiece of claim 1, it is characterized in that: the air pressure of working gas maintains 10Pa-90Pa in the described Processing Room.
3. by the method for the described modifying inner surface of tubular workpiece of claim 1, it is characterized in that: described radio frequency power is elected as between 100-200 watt usually.
4. press the method for the described modifying inner surface of tubular workpiece of claim 1, it is characterized in that: described negative high voltage voltage is pulse negative high voltage voltage, 60 hertz of-10 kilovolts, frequency, generally be negative several ten thousand volts, or be the negative direct current high voltage power supply, at-2000 volts negative direct current high voltage power supply, generally be that negative hundreds of is to negative several kilovolts.
5, according to the method for the described modifying inner surface of tubular workpiece of claim 1, it is characterized in that: described modifying inner surface of tubular workpiece is that segmentation is carried out.
6, according to the method for each described modifying inner surface of tubular workpiece in the claim 1 to 5, its feature also is: the negative high voltage between described tubular workpiece and the hollow edged electrode is pulse or negative direct current high voltage, or alternately applies pulse negative high voltage and negative direct current high voltage between tubular workpiece and hollow edged electrode.
7, a kind of isolated plant of realizing the described modifying inner surface of tubular workpiece method of claim 1, this device comprises a Processing Room, place in this Processing Room, the columnar electrode of coaxial setting and hollow edged electrode, connect the radio-frequency power supply of this two electrode and put on hollow edged electrode and tubular workpiece between negative high voltage power source, it is characterized in that: described hollow edged electrode is made of the wire electrode that is distributed in cylindric strut member outside surface, this wire electrode is circumferential uniform distribution, or formula distributes in the shape of a spiral, and this device also comprises a drive unit that tubular workpiece and hollow edged electrode are produced relative rotation.
8, according to the isolated plant of the described realization modifying inner surface of tubular workpiece of claim 7 method, it is characterized in that: described hollow edged electrode is or/and columnar electrode is the metal tube of the hollow that is communicated with separately, simultaneously as water-cooling channel.
9, according to the isolated plant of the described realization modifying inner surface of tubular workpiece of claim 7 method, it is characterized in that: described Processing Room is made of tubular workpiece itself, columnar electrode and the hollow edged electrode and the coaxial setting of tubular workpiece that are made of wire electrode.
10, according to the isolated plant of the described modifying inner surface of tubular workpiece method of claim 7, it is characterized in that: described drive unit is positioned at Processing Room, and is connected with hollow edged electrode or tubular workpiece.
11, according to the isolated plant of each described modifying inner surface of tubular workpiece method in the claim 7 to 10, its feature also is: the pitch of the described distribution electrode of formula in the shape of a spiral silk can be regulated.
12, according to the isolated plant of the described modifying inner surface of tubular workpiece method of claim 11, it is characterized in that: the pitch that the wire electrode that described formula in the shape of a spiral distributes, two ends account for the wire electrode of wire electrode length overall 1/4～1/3 length is 1.5～2 times of pitch of interlude wire electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200380110083XA CN100422382C (en) | 2003-03-04 | 2003-11-10 | Tubular workpiece internal surface modifying method and its special-purpose device |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN03105058.1 | 2003-03-04 | ||
| CNB031050581A CN1209491C (en) | 2003-03-04 | 2003-03-04 | Method and special apparatus for modifying inner surface of tubular workpiece |
| CNB200380110083XA CN100422382C (en) | 2003-03-04 | 2003-11-10 | Tubular workpiece internal surface modifying method and its special-purpose device |
| PCT/CN2003/000947 WO2004079040A1 (en) | 2003-03-04 | 2003-11-10 | A method and special apparatus for modifying the internal surface of tubular workpiece |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1756859A true CN1756859A (en) | 2006-04-05 |
| CN100422382C CN100422382C (en) | 2008-10-01 |
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ID=32932354
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031050581A Expired - Fee Related CN1209491C (en) | 2003-03-04 | 2003-03-04 | Method and special apparatus for modifying inner surface of tubular workpiece |
| CNB200380110083XA Expired - Fee Related CN100422382C (en) | 2003-03-04 | 2003-11-10 | Tubular workpiece internal surface modifying method and its special-purpose device |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031050581A Expired - Fee Related CN1209491C (en) | 2003-03-04 | 2003-03-04 | Method and special apparatus for modifying inner surface of tubular workpiece |
Country Status (3)
| Country | Link |
|---|---|
| CN (2) | CN1209491C (en) |
| AU (1) | AU2003303989A1 (en) |
| WO (1) | WO2004079040A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102149247A (en) * | 2011-04-08 | 2011-08-10 | 东南大学 | Device and method for generating low-energy high-density plasma by multi-level ionization |
| WO2013097659A1 (en) * | 2011-12-30 | 2013-07-04 | Qiu Yonghong | Mass analyzer with coil-shaped electric field |
| CN104108053A (en) * | 2014-06-19 | 2014-10-22 | 华中科技大学 | Plasma and pulse discharge composite polishing method for large-scale complicated metal surface |
| CN108342896A (en) * | 2018-02-13 | 2018-07-31 | 南通大学 | Tubing surfaces externally and internally plasma processing apparatus and its application method |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7626135B2 (en) * | 2006-05-10 | 2009-12-01 | Sub-One Technology, Inc. | Electrode systems and methods of using electrodes |
| CN102560403A (en) * | 2010-12-31 | 2012-07-11 | 中央民族大学 | Method for modifying inner surface of bottle-shaped workpiece |
| CN106973481A (en) * | 2017-03-10 | 2017-07-21 | 浙江理工大学 | A kind of atmospheric pressure plasma system for tubular material surface continuous modification |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05253680A (en) * | 1992-03-12 | 1993-10-05 | Hitachi Ltd | Method and apparatus for modifying tube inside surface |
| GB9924999D0 (en) * | 1999-10-22 | 1999-12-22 | Aea Technology Plc | Reactor for the plasma treatment of gases |
| CN1137284C (en) * | 2001-04-27 | 2004-02-04 | 中国科学院物理研究所 | Method for modifying inner surface of tubular workpiece |
| CN2577436Y (en) * | 2002-09-30 | 2003-10-01 | 哈尔滨工业大学 | Apparatus for injecting ions onto inner surface of tubular workpiece using high-voltage glow-discharge |
| CN1180124C (en) * | 2002-09-30 | 2004-12-15 | 哈尔滨工业大学 | Tube type work piece inner surface beam ion implantation installation |
-
2003
- 2003-03-04 CN CNB031050581A patent/CN1209491C/en not_active Expired - Fee Related
- 2003-11-10 WO PCT/CN2003/000947 patent/WO2004079040A1/en not_active Application Discontinuation
- 2003-11-10 AU AU2003303989A patent/AU2003303989A1/en not_active Abandoned
- 2003-11-10 CN CNB200380110083XA patent/CN100422382C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102149247A (en) * | 2011-04-08 | 2011-08-10 | 东南大学 | Device and method for generating low-energy high-density plasma by multi-level ionization |
| WO2013097659A1 (en) * | 2011-12-30 | 2013-07-04 | Qiu Yonghong | Mass analyzer with coil-shaped electric field |
| CN104108053A (en) * | 2014-06-19 | 2014-10-22 | 华中科技大学 | Plasma and pulse discharge composite polishing method for large-scale complicated metal surface |
| CN108342896A (en) * | 2018-02-13 | 2018-07-31 | 南通大学 | Tubing surfaces externally and internally plasma processing apparatus and its application method |
| CN108342896B (en) * | 2018-02-13 | 2019-12-31 | 南通大学 | Plasma treatment device for inner and outer surfaces of tubular fabric and using method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2004079040A1 (en) | 2004-09-16 |
| AU2003303989A1 (en) | 2004-09-28 |
| CN1209491C (en) | 2005-07-06 |
| CN1526852A (en) | 2004-09-08 |
| CN100422382C (en) | 2008-10-01 |
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