CN1746653A - Electromagnetic type micromechanic impress tester and method of testing thereof - Google Patents

Electromagnetic type micromechanic impress tester and method of testing thereof Download PDF

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CN1746653A
CN1746653A CN 200410074534 CN200410074534A CN1746653A CN 1746653 A CN1746653 A CN 1746653A CN 200410074534 CN200410074534 CN 200410074534 CN 200410074534 A CN200410074534 A CN 200410074534A CN 1746653 A CN1746653 A CN 1746653A
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tester
load
main frame
micromechanic
signal
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CN100357722C (en
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张泰华
郇勇
杨业敏
刘东旭
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Institute of Mechanics of CAS
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Institute of Mechanics of CAS
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Abstract

The present invention relates to electromagnetic type micromechanic impress tester and method of testing thereof.This tester comprises that the signal generating module of computing machine links to each other with the tester main frame via power amplifier, and signal acquisition module links to each other with the tester main frame; Fix two root posts on the main frame base, the top is equipped with crossbeam, establishes hoisting gear on the crossbeam, and its lower end is connected with movable stand is vertical; Movable stand and column are slidingly matched; The movable stand bottom surface is installed electromagnetic drive mechanism, and solenoid in it and effect axle are connected, and effect axle lower end is provided with the interface of installation accessories, and a high resolution displacement transducer is installed on the electromagnetic drive mechanism framework inside casing; Sample stage is installed on the base.Owing to adopt electromagnetic drive mode, make the load resolving power be greatly improved; And owing to adopt the compression distance mensuration, can obtain the hardness and the modulus of material, and can monitor the situation of change of material property with compression distance in real time, this is that present conventional sclerometer can't be realized.

Description

Electromagnetic type micromechanic impress tester and method of testing thereof
Technical field
The present invention relates to a kind of instrument that is used for the test material mechanical property, specifically, relate to a kind of electromagnetic type micromechanic impress tester and method of testing thereof of material mechanical performance being tested with the mode of impression.
Background technology
At present, be used for the sclerometer of test material hardness, its structure is load transducer and motor driven, and the method for corresponding calculated hardness is the length by the diagonal line of measuring remaining impression or diameter, is converted into remaining impression surface area then, and then obtains hardness number H
H = P max A residual - - - ( 1 )
In the formula, P MaxBe maximum load, A ResidualBe the remaining impression surface area behind the complete discharge.The remaining area of indentation is to calculate according to the geometric configuration of concrete pressing.For example, for Vickers pressing (Vickers), relation below the remaining area of indentation and impression catercorner length d exist
A residual = d 2 2 sin α 2 - - - ( 2 )
In the formula, α is a Vickers pressing opposite angle, 136 °.
In in the past more than 100 year, this by after the remaining impression imaging (promptly with equipment such as microscope or scanning electron microscope remaining impression being observed), the mode of measuring impression size calculating hardness extensively is used in each industrial sector.Now, test all has the relevant standard can reference at different pressing, and the conversion of its hardness number all has Biao Kecha.
Along with the development of modern material Surface Engineering (vapour deposition, sputter, ion injection, high energy beam surface modification, making Nano surface, thermal spray etc.), microelectronics, integrated micro Mechatronic Systems, biology and medical material, sample itself, modified layer or coating thickness are more and more littler.Therefore, when studying the mechanical property of these materials with plunging, traditional hardness test has run into the difficulty that is difficult to overcome.The first, not all material all has tangible remaining impression border, will be difficult to determine the cornerwise starting point of remaining impression for this class material.The second, when impression was very shallow, by means of electron scanning Electronic Speculum (SEM) or scanning probe microscopy (SPM) imaging, the test of hardness will become pretty troublesome so possibly.The 3rd, a lot of sclerometers all are by manually-operated in to remaining impression imaging particularly, and this can bring personal error to measurement result undoubtedly.The 4th, classic method can not reflect the situation of change that adds material mechanical performance in the uninstall process in real time.
Recent two decades comes, and a kind of new hardness test method occurred---compression distance mensuration (depth-sensing indentation).This method will be under pressing adds load and degree of depth continuous recording in the uninstall process, as Fig. 8, by the analysis that adds unloading curve being obtained the mechanics parameter of material.Calculate hardness H IT
H IT = P max A ( h c ) - - - ( 3 )
This formula and formula (1) are closely similar, are the represented content difference of area, the A in the formula (1) ResidualBe contact area, according to the title method of international standard ISO 14577, the hardness of its definition is called microhardness (micro hardness); And A (h c) be and P MaxCorresponding contact projection area constantly, the hardness with latter's definition is called penetration hardness (indentation hardness) here, sees formula (3).A (h c) calculating need not remaining impression is carried out imaging, but contact area is expressed as the function of depth of cup, i.e. area function A=f (h c), h cObtain from adding unloading curve.The compression distance measuring method not only can obtain the hardness of material, can also utilize to add the elastic modulus that unloading curve obtains material.Here, in order to distinguish mutually, it is referred to as to be pressed into modulus (indentation modulus) with the modulus that stretching or compression test obtain.
At present, in the hardness test field of macro-scale and micro-scale (being the most frequently used hardness test of present industry member), still do not have the hardness test instrument that adopts the compression distance mensuration, therefore, the compression distance mensuration also fails to be promoted in industry member always.
Summary of the invention
The object of the present invention is to provide a kind of electromagnetic type micromechanic impress tester and the method for testing that can measure sample hardness and modulus simultaneously, it has overcome the deficiencies in the prior art, the compression distance mensuration is applied to macroscopic view and micro-hardness testing field, has enriched the mechanics content of material impression test; The employing electromagnetic drive mode designs an apparatus, and makes the instrumentation process simplify, and noise reduces.
For achieving the above object, electromagnetic type micromechanic impress tester provided by the invention comprises computing machine, tester main frame, power amplifier; Wherein the tester main frame is electrically connected with computing machine by power amplifier; It is characterized in that: described computing machine contains signal generating module and signal acquisition module; Described tester main frame comprises one by fixing two root posts 7 on the base 9, and a movable stand 5 is installed on its column 7, and movable stand 5 is slidingly matched with column 7, and the main frame 1 that an entablature 8 is formed is installed on column 7 tops; One is installed in the sample stage 2 on the base 9, and this sample stage 2 is equipped with height adjustment mechanism; One is installed in the hoisting gear 6 on the entablature 8, the end of this hoisting gear 6 and 5 vertical connections of movable stand; One is installed in the electromagnetic drive mechanism 4 of movable stand 5 bottom surfaces, and this electromagnetic drive mechanism 4 comprises a closed cylinder, and the driving mechanism framework 22 of a circular hole is left in its bottom surface; Make drum for one, and have a cylinder at the drum center, section is the magnet steel 13 of " m " shape, leaves the gap between its cylinder and the drum, and its magnet steel 13 upper ends are fixed under framework 22 inner top surfaces; Winding around 14 on one coil brace 23 is in the cylinder of these coil brace 23 insertion magnet steel 13 and the gap of drum; The coil brace 23 bottoms effect axle 11 that is connected, this effect 11 lower end are provided with the interface of installation accessories, and can pass through from driving mechanism framework 22 bottom surface circular holes; One be divided into bilevel suspension groups of springs 12, be installed between effect axle 11 and the driving mechanism framework 22 respectively, its medi-spring one end is connected mutually with the madial wall of framework 22, the other end with act on spools 11 and link to each other; One is installed in the high resolution displacement transducer 15 of electromagnetic drive mechanism framework 22 bottom surface upsides near effect axle 11 places, and high resolution displacement transducer 15 is electrically connected with the signal acquisition module of computing machine; Signal generating module in the described computing machine links to each other with the tester main frame via power amplifier, and signal acquisition module directly links to each other with the tester main frame.
Described electromagnetic type micromechanic impress tester, wherein the hoisting gear 6 in the tester main frame comprise handwheel 21 and with its metal screw that is connected mutually 20, screw rod 20 passes the screw of entablature 8, and matches with this screw, screw rod 20 1 ends and 5 vertical linking to each other of movable stand.
Described sample stage 2 comprises that a usefulness bolt is installed in the objective table overcoat 18 of tester main frame base central authorities, one through hole 19 is arranged in the middle of this objective table overcoat, the sidewall fluting 24 of through hole, the both sides of groove are connected by bolt 25, and this bolt of degree of tightness can be finely tuned the internal diameter of through hole; One vertical insert through hole and constitutes the cylindric objective table 16 of clearance fit with through hole, its sidewall by last part screw thread is arranged, by under part smooth; One screw thread by objective table 16 tops is connected with objective table, and top has the sample clamping nut 17 of elliptical slot, this nut cylindrical annular knurl.
Described electromagnetic type micromechanic impress tester, the magnet steel 13 in its electromagnetic drive mechanism adopts neodymium-iron-boron magnetic material to make, and magnet steel magnetizes on magnetizer and carries out burin-in process.
Described electromagnetic type micromechanic impress tester, the effect axle 11 in its electromagnetic drive mechanism is a metal shaft, on the interface of these effect axle 11 installation accessories pressing 10 is installed.
Described electromagnetic type micromechanic impress tester, the coil brace 23 in its electromagnetic drive mechanism adopts aluminum material to manufacture.
The method that material mechanical performance is tested of application electromagnetic type micromechanic impress tester provided by the invention, it is characterized in that: magnitude of load is controlled via power amplifier by computing machine, and load and displacement signal are by the signal acquisition module collection of computing machine; Described displacement signal is the output signal of high resolution displacement transducer, and described load signal is the drive signal that computer control signal generation module produces; The step of described method of testing is as follows:
(1) produces drive signal by computer control signal generation module;
(2) drive signal is amplified by power amplifier, amplifies back output one current signal;
(3) amplify the current signal of exporting the back and drive the tester host motion, pressing 10 is pressed into measured material;
(4) signal acquisition module is gathered the drive signal of displacement signal and coil;
(5) signal that collects obtains the shift value and the load value of pressing 10 by conversion;
(6) judge whether the Pass Test condition, this test condition is: the setting value when whether load reaches on-test, or whether displacement reach the setting value in when beginning, or the setting value of duration of test runs when whether reaching on-test; If be judged as be, enter next step,, get back to the first step and restart test if be judged as not;
(7) according to mechanical model shift value and the load value that records calculated, draw penetration hardness respectively and be pressed into modulus, it calculates principle and process is: the load-displacement curve that (a) is obtained sample by shift value and load value, calculate contact stiffness S by load-displacement curve, and then the contact degree of depth h when calculating peak load c, then calculate contact area again, obtain penetration hardness by maximum load value and contact area at last; (b) model of the Elastic Contact problem by axisymmetric rigidity pressing of existing arbitrary shape and elastic half-space, and the load-displacement curve that records, obtain the relational expression of elastic modulus and load, displacement, thereby obtain the value of elastic modulus, this elastic modulus is a composite modulus, be the complex response of pressing and sample elasticity distortion, known pressing be pressed into elastic modulus, can obtain the elastic modulus that is pressed into of style;
(8) output result of calculation is measured and is finished.
Adopt technique scheme, make the present invention compared with prior art tool have an enormous advantage.Owing to adopt the electromagnetism load mode, the high resolution electric signal that can adopt the signal generating module generation is as drive signal, make the load resolving power of this tester be greatly improved, and the vibration noise problem that the mode of Electromagnetic Drive does not exist motor driven to bring, this is that present conventional sclerometer can't be realized.Owing to adopt the bathymetry data processing that experimentizes, thereby not only can obtain adding the displacement~curve of load in the uninstall process in real time, and can calculate the hardness and the modulus of measured material.Compare with conventional hardness test, do not need again the remaining area of indentation to be carried out imaging measurement, thereby got rid of the error that artificial observation and microscopy imaging system may cause, make and measure more accurately and reliably.And experimental implementation is more convenient, has realized that really impression can obtain the result.
Description of drawings
Fig. 1 is the test macro synoptic diagram of electromagnetic type micromechanic impress tester;
Fig. 2 is the tester host structure chart of electromagnetic type micromechanic impress tester;
Fig. 3 is the electromagnetic drive mechanism structural drawing in the tester main frame;
Fig. 4 is that the typical case who tests the commercial-purity aluminium L2 that obtains adds unloading curve;
Fig. 5 is a penetration hardness test result of testing the commercial-purity aluminium L2 that obtains;
Fig. 6 be the commercial-purity aluminium L2 that obtains of test be pressed into the modulus test result;
Fig. 7 is the distorted pattern of typical impression;
Fig. 8 is the unloading curve that adds of typical impression;
Fig. 9 is the analytical model of Sneddon;
Figure 10 is the sectional view of sample stage in the electromagnetic type micromechanic impress tester;
Figure 11 is the vertical view of sample stage in the electromagnetic type micromechanic impress tester;
Figure 12 is the method for testing process flow diagram of electromagnetic type micromechanic impress tester.
Embodiment
Below in conjunction with accompanying drawing a preferred embodiment of the present invention is elaborated:
Shown in Figure 1 is the test macro synoptic diagram of electromagnetic type micromechanic impress tester, and total system comprises computing machine, power amplifier and the tester main frame that contains signal generating module and signal acquisition module.
Wherein, signal generating module and signal acquisition module can adopt existing signal generation card and data acquisition card on the market, and in the present embodiment, signal generating module is the PCI2007A of Altay company, and signal acquisition module is the DAQ2006 of Ling Hua company.
In the present embodiment, power amplifier adopts the YE5872 of Yangzhou Radio No.2 Factory.
The structure of tester main frame comprises as shown in Figure 1 and Figure 2: the main frame 1 of metal construction, sample stage 2, electromagnetic drive mechanism 4, hoisting gear 6.Wherein main frame 1 comprises: base 9, two are fixedly mounted on column 7 on the base 9, one and are installed in two movable stand 5, entablatures 8 that are fixedly mounted on two column 7 tops on the column 7, and this entablature 8 has the sheet metal of a screw for central authorities.Movable stand 5 and two columns 7 are slidingly matched, and the fixed mechanism of regulating height is installed on it, for example have screw on movable stand, by a screw retention, make movable stand 5 can be on column 7 positioning and locking.Hoisting gear 6 comprise handwheel 21 and with its metal screw that is connected mutually 20, screw rod 20 passes the screw of entablature 8, and matches with this screw, screw rod 20 1 ends and 5 vertical linking to each other of movable stand.Hoisting gear 6 can drive movable stand 5 and move up and down along two columns 7 by the rotation of handwheel.Sample stage 2 is installed on the base 9 of main frame 1, and it contains height adjustment mechanism, and the structure of this sample stage 2 will describe in detail hereinafter.Electromagnetic drive mechanism 4 is fixedly mounted on movable stand 5 bottom surfaces.
Wherein, the structure of electromagnetic drive mechanism 4 comprises as shown in Figure 3: the driving mechanism framework of manufacturing with metal 22 cylindraceous, effect axle 11, coil brace 23, suspension groups of springs 12, magnet steel 13, coil 14, high resolution displacement transducer 15.Wherein a circular hole is left in driving mechanism framework 22 bottom surfaces, can be made for axle 11 to pass through, and the top of this framework 22 is fixed on the bottom surface of movable stand 5.Magnet steel 13 is to adopt neodymium-iron-boron magnetic material to make, and magnet steel through burin-in process, will keep high stability magnetic induction density after magnetizing on the magnetizer.The shaped design of magnet steel 13 becomes the structure of a right cylinder magnetic pole overcoat one drum coaxial with it, leave the gap between this right cylinder magnetic pole and the drum, can insert for coil brace 23, magnet steel 13 is " m " shape along the section of diameter, and magnet steel 13 upper ends are fixed on the downside of framework 22 end faces.Coil brace 23 is a metal tub, and its bottom is connected with the top of effect axle 11, and the upper end is mounted on the right cylinder magnetic pole of magnet steel 13.Be weight reduction, coil brace 23 can adopt aluminum material.Coil 14 is wrapped on the coil brace 23.Effect axle 11 is a metal shaft, and its lower end is provided with the interface of installation accessories, can select to install different annexes according to the test needs.In the present embodiment, on the effect axle 11 pressing 10 is installed.Suspension groups of springs 12 is divided into two-layer up and down, and each layer is made up of 3 springs at least, is installed in respectively between effect axle 11 and the driving mechanism framework 22, and its lateral stiffness is 10 5N/m, its longitudinal rigidity 150N/m; The one end is connected mutually with the madial wall of framework 22, and the other end links to each other with effect axle 11.The incorporate diaphragm spring that suspension groups of springs 12 can adopt copper sheet to do also can adopt the wire tensioning form.Effect axle 11 can be supported by suspension groups of springs 12, and its motion in the horizontal direction is restricted, and in the vertical direction can free movement.High resolution displacement transducer 15 is a non-contact measurement apparatus, is installed in electromagnetic drive mechanism framework 22 bottom surface upsides near effect axle 11 places.Effect axle 11 times is pressing 10 fixedly.
Shown in Figure 10 and 11, in the tester main frame, sample stage 2 comprises objective table overcoat 18, cylindric objective table 16, sample clamping nut 17.Objective table overcoat 18 usefulness bolts 21 are fixedly mounted on base central authorities, are through hole 19 in the middle of the objective table overcoat 18, and cylindric objective table 16 (one section screw thread is arranged at its top, and the bottom is smooth) is vertical to be inserted wherein, and bottom smooth part and through hole constitute clearance fit; The sidewall fluting 24 of through hole, the both sides of groove are connected by bolt 25, and elasticity bolt 25 can be finely tuned the internal diameter of through hole, thereby reaches the purpose of holding objective table tightly.When regulating height, looser a bolt, the height of up-down adjustment objective table, determine the position after, tight a bolt the locking objective table again.The sample clamping nut is connected with objective table by the screw thread of objective table side wall upper part, and its top has elliptical slot, to expose the measured surface of sample; Sample clamping nut cylindrical annular knurl is convenient to manual operation.When sample is installed, only need with sample testing towards on be placed on the objective table upper face center, tighten the sample clamping nut, just sample can be fixedly secured on objective table.This design not only can guarantee sample install and highly regulate operation after still can keep the level of measured surface, and installation and removal operate all very convenient.
Before testing, as Fig. 2, shown in Figure 3, earlier tested sample 3 is fixed on the objective table, test surfaces upwards.Regulate the high and low position of objective table, make sample be within the impulse stroke of pressing.If sample is bigger, can regulate the height of movable stand 5 by hoisting gear 6, equally can be so that sample is within the impulse stroke of pressing.After these preliminary works are finished, begin to test.
Figure 12 shows the process flow diagram of the method for testing of a preferred embodiment of the invention, and concrete steps are as described below:
In step 101, produce drive signal by computer control signal generation module.Its size is by the needed maximum load decision of test.
In step 102, the drive signal that produces in the step 101 is amplified by power amplifier, makes it can produce enough load.Amplify back output one current signal;
In step 103, the current signal of output drives the tester host motion after power amplifier amplifies.In Fig. 3, the magnetic field of magnet steel 13 cylinders and drum gap location can be approximately uniform magnetic field, and its magnetic line of force is a horizontal radial.The uniform magnetic field place that coil 14 places magnet steel 13 to form, when the current signal after amplifying passed through coil 14, coil 14 was subjected to an electromagnetic force effect straight down, thus induced effect axle 11 moves downward, and pressing 10 is pressed into measured material.
In step 104, signal acquisition module is gathered the drive signal of displacement and coil.The drive signal of coil is the current signal of gathering with signal acquisition module (on coil) that passes through coil, displacement signal is the output signal with the displacement transducer of signal acquisition module collection, is the output voltage signal of capacitive displacement transducer in the present embodiment.
In step 105, the signal that collects in the step 104 obtains the shift value and the load value of pressing 10 by conversion.Wherein shift value obtains by the displacement signal that collects in the step 104, and load value obtains by the driving current signal of the coil that collects.According to electromagnetic theory as can be known, the electric current and the coil total length (being that the every circumference of coil multiply by the number of turn) that pass through in load value and magnetic field intensity, the coil are directly proportional, when magnetic field intensity and the timing of coil total length, record the electric current that passes through in the coil and can calculate the size of load value.
In step 106, judge whether the Pass Test condition.This test condition is: the setting value when whether load reaches on-test, or whether displacement reach the setting value in when beginning, or the setting value of duration of test runs when whether reaching on-test.If be judged as is to enter step 107; If be judged as not, get back to step 101 and restart test.
In step 107, according to mechanical model shift value and the load value that records to be calculated, its principle and concrete steps will be explained below.
In step 108, by the calculating of step 107, obtain the penetration hardness of measured material and be pressed into modulus, and output result of calculation, test job finishes.
In the step 107, according to mechanical model to the shift value that records with load value carries out calculating principle and step is as follows:
In the step in front, the signal acquisition module of usefulness computing machine is gathered the drive signal on the coil, can obtain being applied to the load on the sample by converting; The size of displacement high-resolution displacement sensor record; So just can obtain adding the displacement-curve of load in the uninstall process, as shown in Figure 4, then data be handled (its principle will describe in detail hereinafter), just can obtain the penetration hardness of tested sample and be pressed into mechanics parameter such as modulus, shown in Fig. 5,6.
Directly tested sample is loaded by the driving current signal of control tester, by the compression distance of high resolution displacement sensor sample, thus the load-displacement curve of acquisition sample.Utilize load-displacement curve, can obtain the penetration hardness of measured material and be pressed into modulus by certain calculating again.
As shown in Figure 8, horizontal ordinate is represented the degree of depth h (being displacement h) of pressing in sample, the load P of ordinate role of delegate on pressing; Two curves among Fig. 8 are respectively loading curve and unloading curve; P MaxBe maximum load; h MaxFor corresponding to P MaxDepth of cup, promptly maximum compression distance; h fBe remaining compression distance; h cBe the contact degree of depth, as shown in Figure 7; ε is the geometric constant relevant with the pressing type; S is a contact stiffness.
In order from P-h curve (load-displacement curve), to calculate hardness and modulus, at first should set up the relation of the uninstall process degree of depth and load according to test figure
P=B(h-h f) m (4)
In the formula, B, h fAnd m is a fitting parameter.Usually, with 25% to 50% of least square fitting unloading curve top.
Contact stiffness S calculates according to the differential of formula (4)
S = ( dP dh ) | h = h max = Bm ( h - h f ) m - 1 | h = h max - - - ( 5 )
After obtaining contact stiffness S, the contact degree of depth h in the time of can calculating peak load c
h c = h max - h s = h max - ϵ P max S - - - ( 6 )
Coefficient ε in the formula is only relevant with the shape of pressing.For the circular cone pressing, ε=2 (π-2)/π: to cylinder pressing ε=1.00; To rotary paraboloid pressing ε=0.75.It should be noted that formula (6) only is applicable to the situation of the contact degree of depth less than compression distance, can not illustrate the plasticity phenomenon of projection.
Then calculate contact area again, contact area is by area function A=f (h c) determine, be also referred to as the shape function of pressing sometimes.For desirable Bo Shi pressing, A = 24.56 h c 2 , Desirable Vickers pressing, A = 24.50 h c 2 . Because manufacturing deficiency and use wearing and tearing, ideal situation is often departed from the pressing end, so to shallow impression, need set up area function correction.ISO 14577 spells out, and when depth of cup>6 μ m, can regard pressing as ideal form.
After obtaining contact area A, just can calculate the hardness H of material by (3) formula IT
From adding the modulus that unloading curve can also obtain material.Nineteen sixty-five, Sneddon analyzes the Elastic Contact problem of axisymmetric rigidity pressing of arbitrary shape and elastic half-space, as shown in Figure 9, has provided the relation between load and the pressing compression distance.Wherein, when the pressing end is cylinder, there is following relation of plane to exist
P = 2 Ea 1 - υ 2 h - - - ( 7 )
In the formula, P is a load; E is the elastic modulus of measured material; υ is the Poisson ratio of measured material; H is the elastic displacement that is pressed into.The contact projection area A can be shown π a by simple table 2, then a = A π . Formula (7) both sides are carried out differentiate to compression distance h and are got
dP dh = 2 π A E ( 1 - υ 2 ) - - - ( 8 )
Though this formula is to be derived out by the cylinder pressing, has been proved to be and has used the rotary body pressing that the side is described by smooth function, and do not relied on the geometric configuration of pressing.
But pressing can produce elastic deformation and be attached in the Displacement Measurement in process of press in, need consider the influence of this part distortion when therefore calculating hardness and modulus.Custom is introduced composite modulus E r, as the complex response of pressing and sample elasticity distortion.
1 E r = ( 1 - υ 2 ) E + ( 1 - υ i 2 ) E i - - - ( 9 )
E in the formula i, υ iBe respectively the elastic modulus and the Poisson ratio of pressing, for the adamas pressing that generally adopts, its elastic modulus is 1141GPa, and Poisson ratio is 0.07.Thus, formula (8) becomes:
dP dh = 2 π A E r - - - ( 10 )
Formula (9) and formula (10) do not rely on the geometric configuration of pressing, do not rely on projection (pile-up) or depression (sink-in) behavior of material yet.Can obtain the modulus E of material by (9) and (10) simultaneous.
Though electromagnetic type micromechanic impress tester provided by the invention is specially adapted to utilize the compression distance mensuration that material mechanical performance is tested, but be applicable to too and utilize traditional remaining impression imaging method to measure material hardness, this is that those skilled in the art understand easily.

Claims (7)

1. an electromagnetic type micromechanic impress tester comprises computing machine, tester main frame, power amplifier; Wherein the tester main frame is electrically connected with computing machine by power amplifier; It is characterized in that: described computing machine contains signal generating module and signal acquisition module; Described tester main frame comprises one by fixing two root posts (7) on the base (9), and its column (7) is gone up installation one movable stand (5) and is slidingly matched with column (7), and the main frame (1) that an entablature (8) is formed is installed on column (7) top; One is installed in the sample stage (2) on the base (9), and this sample stage (2) is equipped with height adjustment mechanism; One is installed in the hoisting gear (6) on the entablature, end of this hoisting gear (6) and vertical connection of movable stand (5); One is installed in the electromagnetic drive mechanism (4) of movable stand (5) bottom surface, comprises a closed cylinder, and the driving mechanism framework (22) of a circular hole is left in its bottom surface; A center has the round barrel shape magnet steel (13) of cylinder, and its section is " m " shape; Magnet steel (13) upper end is fixed under framework (22) inner top surface; One coil brace (23) is gone up winding around (14), and this coil brace (23) inserts in the cylinder and the space between the bucket wall of magnet steel (13); Coil brace (23) the bottom effect axle (11) that is connected, this effect (11) lower end is provided with the interface of installation accessories, and can pass through from the bottom surface circular hole of driving mechanism framework (22); One be divided into bilevel, be installed in the groups of springs between effect axle (11) and the driving mechanism framework (22); One is installed on electromagnetic drive mechanism framework (22) inner bottom surface, and near acting on the high resolution displacement transducer (15) that axle (11) is located; Signal generating module in the described computing machine links to each other with the tester main frame via power amplifier, and signal acquisition module directly links to each other with the tester main frame.
2. by the described electromagnetic type micromechanic impress tester of claim 1, it is characterized in that: described hoisting gear (6) comprise handwheel (21) with its metal screw that is connected mutually (20), screw rod (20) passes the screw of entablature (8), and match the other end of screw rod (20) and vertical linking to each other of movable stand (5) with this screw.
3. by the described electromagnetic type micromechanic impress tester of claim 1, it is characterized in that: described sample stage (2) comprises that a usefulness bolt is installed in the objective table overcoat (18) of tester main frame base central authorities, one through hole (19) is arranged in the middle of this objective table overcoat (18), the sidewall fluting (24) of through hole (19), the both sides of groove are connected by the bolt that can finely tune the through hole internal diameter (25); One vertical insert through hole (19) and constitutes the cylindric objective table (16) of clearance fit with through hole, and there is one section screw thread objective table (16) upper end, and the lower end is smooth; Its upper end screw thread and sample clamping nut (17) screw togather this nut cylindrical annular knurl.
4. by the described electromagnetic type micromechanic impress tester of claim 1, it is characterized in that: described magnet steel (13) adopts neodymium-iron-boron magnetic material to make.
5. by the described electromagnetic type micromechanic impress tester of claim 1, it is characterized in that: described effect axle (11) is a metal shaft, also is included on the interface of installation accessories of this effect spool (11) pressing (10) is installed.
6. by the described electromagnetic type micromechanic impress tester of claim 1, it is characterized in that: the coil brace in the described electromagnetic drive mechanism (23) adopts aluminum material to manufacture.
7. use the method that the measurement of electromagnetic type micromechanic impress tester is tested material mechanical performance for one kind, may further comprise the steps:
(1) produces drive signal by computer control signal generation module;
(2) drive signal is amplified by power amplifier, amplifies back output one current signal;
(3) amplify the current signal of exporting the back and drive the tester host motion, pressing (10) is pressed into measured material;
(4) signal acquisition module is gathered the drive signal of displacement signal and coil;
(5) signal that collects obtains the shift value and the load value of pressing (10) by conversion;
(6) judge whether the Pass Test condition, this test condition is: the setting value when whether load reaches on-test, or whether displacement reach the setting value in when beginning, or the setting value of duration of test runs when whether reaching on-test; If be judged as be, enter next step,, get back to the first step and restart test if be judged as not;
(7) according to mechanical model shift value and the load value that records calculated by following:
(a) obtain the load-displacement curve of sample by shift value and load value, calculate contact stiffness S by load-displacement curve, and then the contact degree of depth h when calculating peak load c, then calculate contact area again, obtain penetration hardness by maximum load value and contact area at last;
(b) model of the Elastic Contact problem by axisymmetric rigidity pressing of existing arbitrary shape and elastic half-space, and the load-displacement curve that records, obtain the relational expression of elastic modulus and load, displacement, thereby obtain the value of elastic modulus, this elastic modulus is a composite modulus, be the complex response of pressing and sample elasticity distortion, known pressing be pressed into elastic modulus, can obtain the elastic modulus that is pressed into of style;
(8) output result of calculation, end of test (EOT).
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