CN1746612A - 测量装置的控制方法 - Google Patents
测量装置的控制方法 Download PDFInfo
- Publication number
- CN1746612A CN1746612A CNA2005100042804A CN200510004280A CN1746612A CN 1746612 A CN1746612 A CN 1746612A CN A2005100042804 A CNA2005100042804 A CN A2005100042804A CN 200510004280 A CN200510004280 A CN 200510004280A CN 1746612 A CN1746612 A CN 1746612A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- measurement point
- measuring
- measuring head
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/0205—Interferometers characterised by particular mechanical design details of probe head
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/60—Analysis of geometric attributes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0181—Memory or computer-assisted visual determination
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Geometry (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Quality & Reliability (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
Claims (4)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004261844A JP4551164B2 (ja) | 2004-09-09 | 2004-09-09 | 測定装置 |
JP261844/2004 | 2004-09-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1746612A true CN1746612A (zh) | 2006-03-15 |
CN100498214C CN100498214C (zh) | 2009-06-10 |
Family
ID=36157893
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100042804A Active CN100498214C (zh) | 2004-09-09 | 2005-01-05 | 测量装置的控制方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4551164B2 (zh) |
KR (1) | KR101186420B1 (zh) |
CN (1) | CN100498214C (zh) |
TW (1) | TWI335416B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101865669A (zh) * | 2009-04-14 | 2010-10-20 | 株式会社三丰 | 同步移动装置和图像测量设备 |
CN105488832A (zh) * | 2014-10-03 | 2016-04-13 | 奥多比公司 | 光学数字尺 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4875900B2 (ja) * | 2006-02-06 | 2012-02-15 | オリンパス株式会社 | 複数ヘッド顕微鏡装置および複数ヘッド顕微鏡装置の制御方法 |
JP5319063B2 (ja) * | 2006-11-30 | 2013-10-16 | 株式会社日立国際電気 | 線幅測定装置 |
JP2008209295A (ja) * | 2007-02-27 | 2008-09-11 | Hitachi Kokusai Electric Inc | 寸法測定装置 |
KR101007861B1 (ko) * | 2008-09-26 | 2011-01-18 | 조영신 | 열 영상 촬영장치 및 촬영방법 |
JP2011099812A (ja) * | 2009-11-09 | 2011-05-19 | Sokkia Fine System:Kk | 二次元座標測定機 |
KR101225805B1 (ko) * | 2012-02-28 | 2013-01-23 | 주식회사 커미조아 | 토크 피드백을 이용하여 겐트리 장치의 틸트를 보정하는 방법 및 이를 이용한 겐트리 장치 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62165106A (ja) * | 1986-01-17 | 1987-07-21 | Kobe Steel Ltd | 形状測定装置 |
JP2533101B2 (ja) * | 1987-01-20 | 1996-09-11 | 株式会社 ヒューテック | 寸法測定装置 |
JP2889083B2 (ja) * | 1993-06-25 | 1999-05-10 | 株式会社ソキア | 二次元座標測定機 |
JPH07174519A (ja) * | 1993-12-21 | 1995-07-14 | Toyota Motor Corp | 基板の電子部品実装状態検査装置における撮像カメラ制御装置 |
JP3442163B2 (ja) * | 1994-10-11 | 2003-09-02 | 富士通株式会社 | 位置合わせ方法および装置 |
JPH09101115A (ja) * | 1995-10-04 | 1997-04-15 | Nikon Corp | 画像測定装置 |
JPH1047940A (ja) | 1996-08-05 | 1998-02-20 | Saginomiya Seisakusho Inc | 測定プレート、ホイールアラインメント測定装置及びホイールアラインメント測定方法 |
JPH10170223A (ja) * | 1996-12-14 | 1998-06-26 | Ricoh Co Ltd | 位置決めシステム及び位置決め方法 |
JPH10213423A (ja) | 1997-01-27 | 1998-08-11 | Suzuki Motor Corp | 三次元形状の計測装置及び計測方法 |
US20040086166A1 (en) * | 2002-11-01 | 2004-05-06 | Photon Dynamics, Inc. | Method and apparatus for flat patterned media inspection |
-
2004
- 2004-09-09 JP JP2004261844A patent/JP4551164B2/ja active Active
- 2004-11-18 KR KR1020040094529A patent/KR101186420B1/ko active IP Right Grant
-
2005
- 2005-01-05 CN CNB2005100042804A patent/CN100498214C/zh active Active
- 2005-01-06 TW TW094100318A patent/TWI335416B/zh active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101865669A (zh) * | 2009-04-14 | 2010-10-20 | 株式会社三丰 | 同步移动装置和图像测量设备 |
CN105488832A (zh) * | 2014-10-03 | 2016-04-13 | 奥多比公司 | 光学数字尺 |
CN105488832B (zh) * | 2014-10-03 | 2020-10-23 | 奥多比公司 | 光学数字尺 |
Also Published As
Publication number | Publication date |
---|---|
KR20060023505A (ko) | 2006-03-14 |
JP2006078303A (ja) | 2006-03-23 |
CN100498214C (zh) | 2009-06-10 |
KR101186420B1 (ko) | 2012-09-27 |
TW200609494A (en) | 2006-03-16 |
JP4551164B2 (ja) | 2010-09-22 |
TWI335416B (en) | 2011-01-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SOKKIA PRECISION SYSTEMS CO., LTD. Free format text: FORMER OWNER: SOKKIA TOPCON CO., LTD. Effective date: 20101201 |
|
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee |
Owner name: SOKKIA TOPCON CO., LTD. Free format text: FORMER NAME: SOKKIA CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Kanagawa Patentee after: SOKKIA TOPCON Co.,Ltd. Address before: Kanagawa Patentee before: Sokkia Co.,Ltd. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20101201 Address after: Kanagawa Patentee after: Sokkia Precision System Co.,Ltd. Address before: Kanagawa Patentee before: SOKKIA TOPCON Co.,Ltd. |
|
C56 | Change in the name or address of the patentee |
Owner name: SINTO S-PRECISION, LTD. Free format text: FORMER NAME: SOKKIA PRECISION SYSTEMS CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Kanagawa Patentee after: SINTO S-PRECISION, Ltd. Address before: Kanagawa Patentee before: Sokkia Precision System Co.,Ltd. |