CN1737664A - Active light shield dedusting equipment - Google Patents
Active light shield dedusting equipment Download PDFInfo
- Publication number
- CN1737664A CN1737664A CN 200510091960 CN200510091960A CN1737664A CN 1737664 A CN1737664 A CN 1737664A CN 200510091960 CN200510091960 CN 200510091960 CN 200510091960 A CN200510091960 A CN 200510091960A CN 1737664 A CN1737664 A CN 1737664A
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- light shield
- foreign matter
- gas
- brush
- cleaner
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Abstract
This invention discloses one source light cover dust-removing device, which comprises the following parts: dust scanner and dust-removing brush located on one surface to remove the cover surface dust and to test cover surface clearness; the other dust scanner and dust-removing brush located on other surface of cover to remove dust. When the cover is located with protective film, the device can uses the dust-removing brush and scanner to clear and test the dust.
Description
Technical field
The present invention relates to a kind of light shield dedusting equipment, particularly a kind of active light shield dedusting equipment.
Background technology
Along with optical technology and development of semiconductor, liquid crystal indicator (Liquid CrystalDisplay; LCD) be widely used on the electronic product display device.And even to the large-scale LCD of LCD TV of being favored by increasing people, the size of display panels is increasing from the employed small-sized LCD of general desktop PC.
Because the panel size of flat-panel screens is increasing at present, therefore, its light shield size also must increase thereupon, and meanwhile, its manufacturing cost is also more expensive.When carrying out little shadow operation, the pattern on light shield surface is if having foreign matter (particles) to exist or be damaged and will cause the pattern distortion of panel circuit, and its result will make yield rate in the panel manufacture process (yield) descend, and therefore whole front panel scraps even.
Generally speaking, the reason that mask pattern is impacted is mainly from air pollutants, crystallization deposition thing, scratch and electrostatic breakdown or the like.Though most of light shield all is placed on obsolete the time in the box for photomask so as to obtaining protection.Yet will there be foreign matter in the light shield surface inevitably and influences the pattern distribution of light shield, and then causes the decrease in yield of panel.
Therefore; in the prior art; in order to protect light shield to avoid dust pollution; a kind of scheme is to use dust-proof protective film (pellicle); it can prevent effectively that dust from falling on the light shield and influence the pattern distribution of light shield; to increase the rate that manufactures a finished product of panel, the number of times of required cleaning and check in the time of can reducing the light shield use simultaneously.But in this scheme, still there are the problem of dust pollution in the surface of light shield or the surface of diaphragm.
In the production run of panel, the staff must carry out the cleaning of light shield again and again according to the check result of visual or instrument and equipment, for example blow down with air gun.Yet; when using air gun to remove the light shield surface dirt; since the gases at high pressure of air gun directly towards the surface of light shield with light shield surface that dust is blown off, therefore, if the gaseous tension of air gun is too little; can not remove dust effectively; if pressure is too big, then will damage the pattern on light shield surface, light shield perhaps blows off diaphragm; more possible because diaphragm touches the pattern on the light shield, and cause mask pattern to suffer damage.And unload repeatedly and load so that foreign matter is removed, more will increase the impaired probability of light shield.
Summary of the invention
As mentioned above, because the panel size of flat-panel screens is increasing, therefore, required light shield size also must be increasing, makes manufacturing cost improve.And, if the light shield picture on surface is subjected to the pattern distortion that foreign substance pollution will cause the panel circuit, more will makes decrease in yield in the panel production run, and then further increase the production cost of panel.
In view of the above, the purpose of this invention is to provide a kind of active light shield dedusting equipment, to check effectively and the foreign matter of removing on the light shield.
Another purpose of the present invention provides a kind of active light shield dedusting equipment, and it utilizes foreign matter scanner and dedusting air-brush to carry out the detection and the removing of light shield Superficial Foreign Body simultaneously.
Another object of the present invention provides a kind of active light shield dedusting equipment, and it has the dedusting air-brush of pressure stable output, to avoid damaging the pattern on the light shield, also can avoid damaging diaphragm.
Still a further object of the present invention provides a kind of active light shield dedusting equipment, and it utilizes exhaust apparatus and seal casinghousing effectively foreign matter directly to be discharged, and causes secondary pollution to avoid foreign matter in cleaner.
According to above purpose, provided by the inventionly be used to remove that the cleaner of foreign matter comprises foreign matter scanner that is positioned at the light shield surface and the dedusting air-brush that is disposed at foreign matter scanner one side on the light shield, this dedusting air-brush is towards the surperficial blow gas of light shield, to remove the lip-deep foreign matter of light shield, and the foreign matter scanner is followed the dedusting air-brush, to detect the cleanliness on light shield surface.
Cleaner can also be provided with another foreign matter scanner and another dedusting air-brush being positioned on another surface of light shield, to remove another surperficial foreign matter of light shield.On the surface of light shield diaphragm can also be installed, avoid foreign substance pollution with the protection light shield, this cleaner also can utilize dedusting air-brush and foreign matter scanner that the foreign matter on the diaphragm is removed and checked.
Dedusting air-brush and foreign matter scanner can be incorporated in the linear mobile device, and it can be moved along the light shield surface is parallel.The dedusting air-brush also can be connected with the gas delivery tube road, so that required gas to be provided, and for example nitrogen, preferably deionization gas.The air regulating device of adjusting gaseous tension and flow also can be installed on the gas delivery tube road, and measure and the pressure of demonstration gas and/or the gas measuring equipment of flow.Described foreign matter scanner can be laser scanning device or image camera.
This active light shield dedusting equipment also can comprise exhaust apparatus and seal casinghousing.Seal casinghousing seals active light shield dedusting equipment, and exhaust apparatus links to each other with seal casinghousing, discharges from seal casinghousing with the foreign matter that the dedusting air-brush is removed.Exhaust apparatus can comprise wind-collecting cover and gas outlet.Wind-collecting cover is arranged at the front end outside of seal casinghousing, and just dust removing effects to increase collection wind area, is improved in the place ahead in dedusting air-brush dedusting path.Wind-collecting cover is connected with gas outlet, so that foreign matter directly and is apace discharged from seal casinghousing.
The present invention has disclosed a kind of active light shield dust collection method on the other hand, to remove the foreign matter on light shield surface.The method comprises the following steps: at first to provide light shield; Utilize the dedusting air-brush to remove the lip-deep foreign matter of light shield then; Utilize the foreign matter scanner to follow the dedusting air-brush simultaneously and scan afterwards the light shield surface, to detect the cleanliness on light shield surface.The method also comprises utilizes another and the synchronous dedusting air-brush of aforementioned dedusting air-brush, to remove another surperficial foreign matter of light shield, and utilize another foreign matter scanner simultaneously, follow this another dedusting air-brush and scan another surface of light shield afterwards, to detect its surperficial cleanliness.When the mounted on surface of light shield has diaphragm, also can utilize the method to carry out the removing of diaphragm Superficial Foreign Body and the detection of its cleanliness.
Therefore, cleaner of the present invention and method dedusting simultaneously and detect the foreign matter on light shield surface, thereby can improve the cleanliness on light shield surface effectively more can be saved cleaning and be checked light shield required man-hour.If cooperate the control of gaseous tension, can also avoid light shield or diaphragm surface to be damaged, further improved the serviceable life of light shield.Seal casinghousing and exhaust apparatus are set foreign matter directly can also be discharged light shield dedusting equipment, thereby can avoid the secondary pollution of foreign matter.
Description of drawings
The present invention is above-mentioned to be become apparent with other purpose, feature, advantage and embodiment in order to make, and below in conjunction with accompanying drawing preferred implementation is elaborated.
Fig. 1 is the intraware synoptic diagram of a preferred implementation of active light shield dedusting equipment of the present invention;
Fig. 2 is the schematic appearance of preferred implementation shown in Figure 1.
Description of reference numerals
100 active light shield dedusting equipments, 110 first linear mobile devices
112 driven units, 114 support slippers
116 slide rails, 120 second linear mobile devices
124 support slippers, 126 slide rails
130 dedusting air-brush, 132 gas delivery tube roads
134 gas measuring equipments, 136 air regulating devices
140 dedusting air-brush, 142 gas delivery tube roads
144 gas measuring equipments, 146 air regulating devices
150 foreign matter scanners, 160 foreign matter scanners
170 diaphragms, 180 light shields
210 seal casinghousings, 220 wind-collecting covers
230 gas outlets
Embodiment
The foreign matter on the light shield can effectively be removed and check to active light shield dedusting equipment of the present invention, avoids the pollution of foreign matter initiatively to protect light shield.The dedusting air-brush that utilization has a stable output pressure can also avoid damaging the pattern on the light shield, and can avoid causing the infringement of diaphragm.Below with reference to accompanying drawing design of the present invention is described clearly in detail also.
Fig. 1 is the intraware synoptic diagram of a preferred implementation of active light shield dedusting equipment of the present invention, and Fig. 2 is the schematic appearance of preferred implementation for this reason.
As shown in Figure 1, the active light shield dedusting equipment 100 of the present invention foreign matter scanner 150 that comprises dedusting air-brush 130 and be installed on dedusting air-brush 130 rears.When utilizing light shield 180 to carry out the transfer of panel pattern, at first light shield 180 is loaded so far in the active light shield dedusting equipment 100, utilize the first linear mobile device 110 and second linear mobile device 120 linear mobile dedusting air-brush 130 and the foreign matter scanners 150, its surface along light shield 180 is moved.Dedusting air-brush 130 blows to the surface of light shield 180 earlier with predetermined blast, with the foreign matter on removing light shield 180 surfaces, and foreign matter scanner 150 follows dedusting air-brush 130 closely further to determine the cleanliness on light shield 180 surfaces.If met in the manufacturing process the requirement of cleanliness through the light shield 180 after the cleaning, then light shield 180 can be loaded into the exposure process that carries out panel in the exposure bench.If light shield 180 does not meet in the manufacturing process the requirement of cleanliness, directly carry out the dedusting second time and detecting operation, so that the surface energy of light shield 180 meets in the manufacturing process requirement to cleanliness.
In addition, this active light shield dedusting equipment 100 also can comprise and is positioned at light shield 180 another surperficial dedusting air-brush 140 and foreign matter scanners 160, to carry out another the surperficial dedusting and the detecting operation of light shield 180.Dedusting air-brush 140 also is incorporated in the first linear mobile device 110 and the second linear mobile device 120 with foreign matter scanner 160, with mobile dedusting air-brush 140 of linearity and foreign matter scanner 160, its another surface along light shield 180 is moved.Because dedusting air-brush 140 can be scheduled to another surface that blast blows to light shield 180,, can not make blast excessive or not enough because of the change of operating personnel's difference or on-stream pressure to remove the foreign matter on surface.
When the mounted on surface of light shield 180 had diaphragm 170, dedusting air-brush 140 or dedusting air-brush 130 can avoid diaphragm 170 to break away from or cause diaphragm 170 to be attached on the pattern on light shield 180 surfaces and damage pattern from light shield 180 by means of effective control of pressure effectively.Certainly, diaphragm 170 is not limited to be installed in a side of light shield 180, and it also can be installed in the both sides of light shield 180, and perhaps, diaphragm 170 is not all installed in light shield 180 both sides, and these schemes all do not exceed design of the present invention and protection domain.
Moreover foreign matter scanner 150 is preferably laser scanning device or image camera with foreign matter scanner 160.The first linear mobile device 110 also can comprise driven unit 112, support slipper 114 and slide rail 116.The second linear mobile device 120 also can comprise support slipper 124 and slide rail 126.The first linear mobile device 110 utilizes support slipper 114 and support slipper 124 to combine with dedusting air-brush 130,140 and foreign matter scanner 150,160 respectively with the second linear mobile device 120, it is moved along the surperficial parallel of light shield 180, and driven unit 112 then provides and moves required power.
For required gas can be provided effectively, for example nitrogen, preferred deionization gas, and the gaseous tension of control dedusting air-brush 130,140, in active light shield dedusting equipment 100, be connected dedusting air-brush 130 and dedusting air-brush 140 with gas transfer conduit 142 by gas delivery tube road 132 respectively, be separately installed with gas measuring equipment 134 and air regulating device 136 on gas delivery tube road 132 and the gas delivery tube road 142, and gas measuring equipment 144 and air regulating device 146.
In addition, gas measuring equipment 134,144 can be tensimeter, and to show the gaseous tension in the pipeline, they can also comprise flowmeter, to show the flow of gas in the pipeline.Air regulating device 136,146 then can utilize flowrate control valve, for example throttling valve to come the flow and the pressure of gas in the pilot piping; dedusting air-brush 130,140 is worked under predetermined pressure; providing suitable blast to remove light shield 180 lip-deep foreign matters, and be unlikely the damage that causes light shield 180 patterns or diaphragm.
Referring to Fig. 2, as shown in the drawing, active light shield dedusting equipment 100 also is provided with seal casinghousing 210, so that light shield 180, dedusting air-brush 130,140 and foreign matter scanner 150,160 are sealed in wherein, utilize the wind-collecting cover 220 and gas outlet 230 shown in exhaust apparatus, for example figure simultaneously, they are installed on seal casinghousing 210 the place ahead with respect to dedusting air-brush 130,140, the foreign matter that makes dedusting air-brush 130,140 be removed is discharged seal casinghousing 210 through wind-collecting cover 220 and gas outlet 230, to avoid causing secondary pollution.Wind-collecting cover 220 has increased leaving area effectively, can make foreign matter evenly and apace discharge seal casinghousing 210 by gas outlet 230.
Active light shield dedusting equipment of the present invention utilizes the dedusting air-brush to remove the foreign matter on light shield surface effectively earlier, when the dedusting air-brush is removed foreign matter, the foreign matter scanner carries out the detection of light shield surface clearness immediately, the cleanliness on light shield surface have not only been improved effectively, and saved cleaning and checked light shield required man-hour, improve the effective working of light shield effectively, thereby can improve the output of panel.If cooperate the control of gaseous tension more can avoid the surface of light shield or diaphragm to be damaged, thereby can further improve the serviceable life of light shield.Directly discharge light shield dedusting equipment and be installed in the seal casinghousing and be positioned at the foreign matter that the exhaust apparatus in dedusting air-brush the place ahead also can be removed the dedusting air-brush, thereby can avoid foreign matter to pollute the light shield surface again by exhaust apparatus.Active light shield dedusting equipment of the present invention also can reduce the loading of light shield on board and the number of times of unloading effectively, has reduced the impaired probability of light shield.
Such just as understood by those skilled in the art, more than only preferred implementation of the present invention is described, and be not to be limitation of the present invention.All equivalents of under the prerequisite that does not exceed design of the present invention and scope the present invention being made or modification all should fall in the protection domain that is defined by claims.
Claims (10)
1. one kind is applicable to the cleaner of removing the foreign matter on the light shield, comprising:
Be positioned at the first foreign matter scanner of the first surface of described light shield; And
Be arranged at the first dedusting air-brush of the described first foreign matter scanner, one side, this air-brush is towards the described first surface blow gas of described light shield, to remove the foreign matter on the described first surface, the described first foreign matter scanner is followed the described first dedusting air-brush, to detect the cleanliness of described first surface.
2. cleaner as claimed in claim 1 wherein, also comprises:
Be positioned at the second foreign matter scanner of the second surface of described light shield, also comprise diaphragm on the second surface of described light shield; And
Be arranged at the second dedusting air-brush of the described second foreign matter scanner, one side; this air-brush is towards the second surface blow gas of described light shield; to remove the lip-deep foreign matter of described diaphragm; wherein; the described second foreign matter scanner is followed the described second dedusting air-brush, with the cleanliness on the described surface of detecting described diaphragm.
3. cleaner as claimed in claim 2 wherein, also comprises:
Be disposed at the linear mobile device of the described first foreign matter scanner and the second foreign matter scanner both sides, so that described scanner moves along described light shield is parallel.
4. cleaner as claimed in claim 3, wherein, described linear mobile device comprises driven unit.
5. cleaner as claimed in claim 2 wherein, also comprises:
Be connected in the described first dedusting air-brush and the second dedusting air-brush, so that the gas delivery tube road of gas to be provided; And
Be installed on the described gas delivery tube road, with the pressure of adjustments of gas and the air regulating device of flow.
6. cleaner as claimed in claim 5, wherein, described gas delivery tube road also comprises the gas measuring equipment, to measure and to show the pressure and the flow of gas.
7. cleaner as claimed in claim 1, wherein, described gas is nitrogen.
8. cleaner as claimed in claim 1, wherein, described gas is deionization gas.
9. cleaner as claimed in claim 1, wherein, also comprise exhaust apparatus and seal casinghousing, the described active light shield dedusting equipment of sealing housing seal, and described exhaust apparatus is connected with described seal casinghousing, being discharged from described seal casinghousing by those foreign matters of gas clean-up.
10. cleaner as claimed in claim 9, wherein, described exhaust apparatus also comprises wind-collecting cover and gas outlet, and this wind-collecting cover is arranged at the front end outside of described seal casinghousing, and be connected with described gas outlet, so that foreign matter is stably discharged by described wind-collecting cover and gas outlet from described seal casinghousing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100919604A CN100437279C (en) | 2005-08-15 | 2005-08-15 | Active light shield dedusting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100919604A CN100437279C (en) | 2005-08-15 | 2005-08-15 | Active light shield dedusting equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1737664A true CN1737664A (en) | 2006-02-22 |
| CN100437279C CN100437279C (en) | 2008-11-26 |
Family
ID=36080502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100919604A Expired - Fee Related CN100437279C (en) | 2005-08-15 | 2005-08-15 | Active light shield dedusting equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100437279C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102419511A (en) * | 2011-06-07 | 2012-04-18 | 上海华力微电子有限公司 | Method for removing dust particles on surface of optical lithography mask slice |
| CN111373303A (en) * | 2017-11-24 | 2020-07-03 | 浜松光子学株式会社 | Foreign matter removing method and method for manufacturing optical detection device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55102233A (en) * | 1979-01-30 | 1980-08-05 | Matsushita Electric Ind Co Ltd | Removing method of dust |
| US5024968A (en) * | 1988-07-08 | 1991-06-18 | Engelsberg Audrey C | Removal of surface contaminants by irradiation from a high-energy source |
| DE69229272T2 (en) * | 1991-09-05 | 2000-02-03 | Baxter International Inc., Deerfield | TOPICAL FIBRINOGEN COMPLEX |
| JP4876265B2 (en) * | 2001-08-08 | 2012-02-15 | 国際技術開発株式会社 | Sheet member dust removing device and sheet member inspection device |
| CH696188A5 (en) * | 2002-07-29 | 2007-02-15 | Brooks Pri Automation Switzerl | Detection and cleaning device in a handling apparatus for photomasks. |
| JP4062437B2 (en) * | 2003-01-21 | 2008-03-19 | シャープ株式会社 | Substrate cleaning apparatus and substrate processing facility |
| JP2005040744A (en) * | 2003-07-24 | 2005-02-17 | Thai Toyo Denso Co Ltd | Air blow cleaning device |
-
2005
- 2005-08-15 CN CNB2005100919604A patent/CN100437279C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102419511A (en) * | 2011-06-07 | 2012-04-18 | 上海华力微电子有限公司 | Method for removing dust particles on surface of optical lithography mask slice |
| CN111373303A (en) * | 2017-11-24 | 2020-07-03 | 浜松光子学株式会社 | Foreign matter removing method and method for manufacturing optical detection device |
| US11294170B2 (en) | 2017-11-24 | 2022-04-05 | Hamamatsu Photonics K.K. | Method for removing foreign matter and method for manufacturing optical detection device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100437279C (en) | 2008-11-26 |
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Granted publication date: 20081126 Termination date: 20200815 |