CN1726348A - Valve unit and fluid control chip - Google Patents

Abstract

A valve unit and a fluid control chip include: a valve chamber having an inlet and an outlet for a fluid; a valve element accommodated in the valve chamber; a piezoelectric element for applying vibrations to the valve chamber; and a driver for driving the piezoelectric element, wherein the piezoelectric element varies the opening by varying a frequency and/or an amplitude of the vibration applied to the valve chamber and by varying the amplitude of the valve element by the varied vibration.

Description

Valve cell and fluid control chip

Technical field

The present invention relates to a kind of being arranged in and be used in the passage of transmitting fluid and be adapted to pass through the valve cell that vibration realizing opens and closes, and also relate to a kind of fluid control chip that comprises this valve cell.

Background technique

Obtained obvious improvement in recent minimum technology and precise and tiny treatment technology, people wish that these technology can merge from now on, and develop in the various application technologies.

A kind of as this integration technology, the so-called micromechanics that people have begun to note microelectromechanical systems (MEMS) technology or wherein have been integrated with semiconductor chip and microactrator.In this technology, LSI and the final controlling element of carrying out real work are integrated and are contained in one several square millimeters the thin slice.Specifically, people wish that new fusion can take place in the combination of microfluidic circuit (microfluidic circuit) and LSI circuit.

In this thin slice, be used to supply fluid at least one micropump of a passage, described that passage, a plurality of sensors are used for opening and closing the miniature valve of passage, and the LSI circuit that is used for driving them, all be integrated in the substrate, as fluid circuit.Described passage has usually at several microns pipe diameters in the hundreds of micrometer range, and micropump and miniature valve are limited by the size of this caliber.

By the way, the microstructure that this miniature valve had is different from general valve very much, unless and comprise that the problem of the reliability, serviceability etc. of escape of liquid, opening is solved, otherwise can not reach its function.In addition, unless its control is easy and accurate, otherwise this miniature valve can not be used as an element of the fluid circuit of thin slice.In addition because this miniature valve is extremely little, so need extreme high reliability, and this reliability can be subjected in general valve can uncared-for for example inertia, the influence of vibration and size error.

Therefore, in U.S. Patent number US 6279872 disclosed, people have proposed a kind of quick-acting type valve that is suitable as this miniature valve.

Accompanying drawing 18 is schematic representation of traditional quick-acting type valve.This quick-acting type valve is disposed such, and promptly chamber 101 is set in the shell 100, and the valve seat 104 of being closed by valve element 103 is set at its inside.Valve seat 104 is supported by a final controlling element 105, and described final controlling element can extend axially and shrink.Final controlling element 105 extends in response to carrying out signal and shrinks.As a result, such of can not follow with valve element 103 of valve seat 104 moves away from valve element 103 at a high speed, and the inertia that moves through of valve element 103 is delayed, and forms flowing by valve seat 104 thus.This flows valve element 103 is back into its closed position.Fluid is allowed to flow, and be subjected to this operation repeat control.In addition, this quick-acting type valve can be changed in short conversion time, and can obtain high recurrence rate.

As mentioned above, people express very big expectation to this thin slice that has wherein merged microfluidic circuit and LSI circuit.But the microstructure that this miniature valve had that is included in this thin slice is different from general valve very much, unless and comprise that the problem of the reliability, serviceability etc. of escape of liquid, opening is solved, otherwise can not reach its function.In addition, also have this problem, that is, unless its control is easy and accurate, otherwise this miniature valve can not be used as an element of the fluid circuit of thin slice.Because this miniature valve is extremely little, thus need extreme high reliability, and this reliability can be subjected in general valve can unheeded for example inertia, the influence of vibration and size error etc.

In addition, the quick-acting type valve that proposes in US6279872 can lacked internal conversion conversion time, and can obtain high recurrence rate.But, because passage is for example to close on the inlet/outlet port of circular metal plate by valve element 103 being pressed in valve seat 104, so there are some problems in the aspects such as pressure tightness during in the reliability of closing operation, in pressure surge.And, because the opening of passage is limited in the operation width (several microns to tens microns) of piezoelectric element, so the degree of accuracy of control and responsiveness are difficult to control, and obviously can be vibrated, the influence of size error etc.In addition, this quick-acting type valve has a narrow dynamic range, so the maximum flow rate that flows through the fluid of quick-acting type valve can be very not big.At this moment, if attempt causing that fluid flows with high-speed and continuous, so big TRANSFER BY PULSATING FLOW will take place.

Summary of the invention

Consider above-mentioned situation, a target of the present invention will provide a kind of valve cell exactly, and described valve cell can be easily and realized control exactly, and a wide dynamic range, high-speed response and little pulsation are provided.Another target of the present invention is that a kind of fluid control chip will be provided, and described fluid control chip can be easily and realized control exactly, replace easily, and very economical.

According to first aspect present invention, the valve cell that is provided comprises: the chamber with fluid input and outlet; A valve element that is contained in the described chamber; With the exciting bank that is used for vibrating chamber, wherein, an incline section is set at the outlet port, and, chamber is subjected to vibration under the state of incline section and by by the exciting bank vibration when mobile when being positioned at because of the hydrodynamic pressure in the chamber at the valve element, the valve element moves with respect to incline section, and described outlet is opened.

According to second aspect present invention, a kind of fluid control chip is provided, comprise following combination: a first layer with the reservoir that is used to keep fluid; Second layer with the valve system that flows that is used to control the fluid of supplying with from first layer; The 3rd layer of a reaction probe portion with the reaction (reaction) that is used for surveying the fluid of supplying with from the second layer.

According to third aspect present invention, provide a kind of valve cell to comprise: a chamber with fluid input and outlet; A valve element that is contained in the chamber; Be used for vibrating the exciting bank of chamber; With a driver that is used for driving exciting bank, described valve element is adapted to pass through by the exciting bank vibration and opens and closes the chamber outlet, wherein, exciting bank is applied to the frequency and/or the amplitude of the vibration of chamber by change, and by vibrating the amplitude that changes the valve element by means of changing, one of change in the opening/closing of outlet and change its opening.

According to fourth aspect present invention, a kind of fluid control chip is provided, comprising: a plurality of valve cells, each valve cell comprise a chamber and a valve element that is contained in the chamber with fluid input and outlet; The substrate of an equipment valve, wherein, described a plurality of valve cells are set up by this way, and promptly the angle from vibration makes them separated from one another, so that different natural frequency mutually to be provided; Be used for vibration is applied to the suprabasil exciting bank of equipping valve; With a driver that is used for driving exciting bank, when the valve element is vibrated by exciting bank, each valve element is suitable for opening and closing the chamber outlet, wherein, by utilizing a frequency vibration to be applied to the substrate of equipment valve, exciting bank can change the opening/closing state of outlet, and perhaps its extent of opening is superimposed with one or more natural frequencys of the valve cell that will control on the described frequency.

The above-mentioned aspect according to the present invention can provide a kind of valve cell and a kind of fluid control chip that can control a plurality of valve cells respectively that can realize small volume of fluid is extremely carried out accurate FLOW CONTROL.

Description of drawings

Accompanying drawing 1A is to use the perspective exploded view of general structure of fluid circuit thin slice of the valve cell of first embodiment of the invention;

Accompanying drawing 1B is the fragment perspective of the valve cell shown in Figure 1A;

Accompanying drawing 2 is schematic representation of driver of the valve cell of first embodiment of the invention;

Accompanying drawing 3A is the phasor when the valve element of the miniature valve of first embodiment of the invention is energized;

Accompanying drawing 3B shows to be applied in to the explanatory drawing of the power of valve element as shown in Figure 3A;

Accompanying drawing 4A is the fragment perspective of valve cell with ball valve element of second embodiment of the invention;

Accompanying drawing 4B is the fragment perspective of valve cell that is provided with the valve element of a circular cone sphenocephaly 3v with first embodiment of the invention;

Accompanying drawing 5A is the figure of function of the valve cell with safety check function of explanation third embodiment of the invention;

Accompanying drawing 5B is the schematic representation of the valve cell with safety check function shown in Fig. 5 A;

Accompanying drawing 5C is the explanatory drawing when the valve cell with safety check function is used in the fluid circuit;

Accompanying drawing 6A is the figure of an explanation valve element advancing means, and described valve element advancing means is used for holding the valve element according to the 4th embodiment's valve cell on discontiguous basis;

Accompanying drawing 6B is the figure of explanation such a case, wherein, is provided with the first valve element advancing means, is used for pressing the valve element by contact;

Accompanying drawing 6C is the figure of explanation such a case, wherein, is provided with the second valve element advancing means, is used for pressing the valve element by contact;

Accompanying drawing 7A is the figure of explanation such a case, and wherein, valve element advancing means is set on the holding member, and a valve cell of fifth embodiment of the invention is installed on the described holding member;

Accompanying drawing 7B is the figure of explanation such a case, and wherein, valve element advancing means is set on the holding member, and a plurality of valve cells are installed on the described holding member;

Accompanying drawing 7C is the figure of explanation such a case, and wherein, valve element advancing means is set on the thin slice of equipment valve;

Accompanying drawing 7D is the perspective view under such a case, and wherein, valve element advancing means is set at the downside of the thin slice of equipment valve;

Accompanying drawing 8A is to use the perspective exploded view of general structure of fluid circuit thin slice of the valve cell of sixth embodiment of the invention;

Accompanying drawing 8B is the fragment perspective of the valve cell shown in Fig. 8 A;

Accompanying drawing 9 is schematic representation of driver of the valve cell of sixth embodiment of the invention;

Accompanying drawing 10A is the phasor when the valve element of the miniature valve of sixth embodiment of the invention is energized;

Accompanying drawing 10B shows the explanatory drawing that is applied in to the power of valve element shown in Figure 10 A;

Accompanying drawing 11 is the figure that explain the angle of throw frequency of the valve cell be applied to sixth embodiment of the invention and act on the relation between the power on the valve;

Accompanying drawing 12A is the figure that the flow rate of the valve cell of an explanation sixth embodiment of the invention is controlled;

Accompanying drawing 12B is the figure of the start-up control (startcontrol) of a valve cell of explaining sixth embodiment of the invention;

Accompanying drawing 12C is the figure of the flow rate Waveform Control of a valve cell of explaining sixth embodiment of the invention;

Accompanying drawing 13A is one and controls the interpretation maps of a plurality of valve cells according to seventh embodiment of the invention individually by the vibration of a plurality of frequencies that described valve cell has different point of resonance separately;

Accompanying drawing 13B is one and controls the interpretation maps of a plurality of valve cells according to seventh embodiment of the invention individually by the vibration of a plurality of frequencies that described valve cell is of different sizes separately;

Accompanying drawing 13C is that an explanation makes under the situation of valve cell vibration the figure of the opening and closing of a plurality of valve cells in the vibration by the stack ripple;

Accompanying drawing 14 is cross-sectional views of key component of the structure of degassing of the miniature valve of ninth embodiment of the invention;

Accompanying drawing 15A explains when valve control according to tenth embodiment of the invention to be performed the figure that first head comes out to survey when coming out with the realization head;

Accompanying drawing 15B explains when valve control according to tenth embodiment of the invention to be performed the figure that second head comes out to survey when coming out with the realization head;

The figure that accompanying drawing 16A flow rate that is an explanation on the vibration basis and physical property are surveyed according to eleventh embodiment of the invention;

Accompanying drawing 16B is the figure according to eleventh embodiment of the invention that an explanation flow rate and physical property on the basis of intensity variation are surveyed;

Accompanying drawing 16C is the figure according to eleventh embodiment of the invention that an explanation is surveyed physical property on the basis of valve vibration;

Accompanying drawing 17A is the interpretation maps of first assembly of the valve cell of twelveth embodiment of the invention and piezoelectric element;

Accompanying drawing 17B is the interpretation maps of second assembly of the valve cell of twelveth embodiment of the invention and piezoelectric element;

Accompanying drawing 18 is schematic representation of traditional quick-acting type valve.

Embodiment

Below in conjunction with accompanying drawing the embodiment of the invention is described.

First embodiment

Accompanying drawing 1A is to use the perspective exploded view of general structure of fluid circuit thin slice (chip) of the valve cell of first embodiment of the invention.Accompanying drawing 1B is the fragment perspective of the valve cell shown in Figure 1A.

At first, we are described the general structure of the fluid circuit thin slice of the valve cell of use first embodiment of the invention.In accompanying drawing 1A, the thin slice (second layer of the present invention) of an installation valve of reference character 1 expression, the thin slice of described installation valve is provided with a valve system, when valve system is applied in vibration, provide a reaction force from V-arrangement inner wall surface (valve seat), and when fluid pressure was supplied to valve system, described valve system can be opened and closed by the inertia of valve element.Reference character 1a represents to form the miniature valve (valve cell of the present invention) of valve system of the thin slice 1 of equipment valve.Reference character 2a represents reservoir part (first layer of the present invention), and described reservoir partly has a reservoir A who is used to keep to be supplied to the fluid of miniature valve 1a.Reference character 2b represents a fluid circuit thin slice main body (the 3rd layer of the present invention) with fluid circuit C (reactive moieties of the present invention), described fluid circuit thin slice main body is provided with the various measured sensor B (probe portion of the present invention) that are used for, and is constituted as predetermined circuit.It should be noted, need a device, fluid is sent from reservoir part 2a with permission with pumping action.In first embodiment, used a syringe pump D as shown in Figure 1A.Described syringe pump D is configured to, and is supplied to reservoir part 2a at fluid, and after being maintained at wherein, motor D 2 is driven, to be used for extending injector D1 by gear and tooth bar D3.Therefore, the air in injector D1 is pushed out, and the fluid (liquid) among the reservoir part 2a is supplied by this air pressure.But described pump can be another kind of type.The thin slice 1 of equipment valve, reservoir part 2a and fluid circuit thin slice main body 2b are the plate-shaped member with predetermined thickness separately.In addition, though be that miniature valve 1a is described in this embodiment below, this has just represented several preferred embodiments of the present invention.Valve cell surely not is restricted to miniature valve 1a, but just passable as long as valve cell can use excitation to control.

In addition, reference character 3 is illustrated in the valve element that its two ends form sphenocephaly, and described valve element is used for realizing the opening and closing of the valve of miniature valve 1a.Reference character 4 expression piezoelectric elements (exciting bank of the present invention), described piezoelectric element are used for giving the thin slice 1 of equipment valve and control valve element 3 by apply vibration from the direction perpendicular to passage.Piezoelectric element 4 is provided with separably with respect to the thin slice 1 of equipment valve.It should be noted that sphenocephaly 3v can only be formed in one distolateral (outlet side) of valve element 3; But under this first embodiment's situation, sphenocephaly 3v is set at the two ends of valve element 3, so that the function that safety check is provided at inlet side is to sphenocephaly 3v.This will be described in the 3rd embodiment.Thin slice 1 and channel control unit of the combined formation of reservoir part 2a of equipment valve, and this channel control unit is laminated on the fluid circuit thin slice main body 2b.This assembly is done as a whole, constitutes a fluid control chip.If the thin slice 1 of equipment valve, reservoir part 2a and jet thin slice main body 2b are replaced, and for example syringe pump and piezoelectric element 4 just can repeatedly be utilized pump so.

Here will the details of valve element 3 be described.The material of valve element 3 can be any metal usually, for example, ferro-alloy, stainless steel, and aluminium, inorganic material is glass or pottery and resin etc. for example.As the standard of selecting material, but can quote good workability, fabulous surface physical characteristic is proportion for example, hydrophily and the viscous resistance that needs because use inertia, and fabulous corrosion resistance.In order to improve hydrophily, viscous resistance, and corrosion resistance can be electroplated by using metal, coating, and laser beam processing, perhaps plasma arc processing, and surface treatment is provided.If hydrophily and viscous resistance are enhanced, the action of valve element 3 will improve aspect fluid dynamic so.

Next, the details of thin slice 1 to the equipment valve is described in detail.In accompanying drawing 1B, valve body basic unit of reference character 5 expression, in described valve body basic unit, the inner passage of miniature valve 1a is formed with the form of stamped groove.Reference character 5b represents that one is gone to a grassroots level, and described going to a grassroots level covers the downside of stamped groove and form a passage.Reservoir part 2a is laminated on the upper surface of valve body basic unit 5, and covering described valve body basic unit, and the inside of groove forms passage.It should be noted that though valve body basic unit 5 is called as the basic unit that constitutes miniature valve 1a, the present invention is not restricted to this.Under the situation of another kind of valve cell, this part is known as the valve body part, rather than is known as valve body basic unit 5.

Here, the material as the valve body basic unit 5 and the 5b that goes to a grassroots level can use any inorganic material for example glass or pottery, and resin etc. also can use metal usually, ferro-alloy for example, stainless steel, and aluminium.Selecting the primary standard of material is good workability, but as other choice criteria, can quote fabulous translucidus, and corrosion resistance, observes and measures from the thin slice outside to allow photoreceptor.In addition, surface treatment is preferably by the plating of use metal, coating, laser beam processing, or plasma arc processing.Resistance is reduced aspect fluid dynamic, and the fixing of organic substance also is modified.

It should be noted,, preferably, can save the 5b that goes to a grassroots level, and cover the downside of groove by fluid circuit thin slice main body 2b though in this first embodiment, provide the 5b that goes to a grassroots level.By so doing, can reduce the quantity of number of spare parts and minimizing number of assembling steps.

Ingress port of reference character 6 expressions, this ingress port is as the passage joint that is connected to reservoir part 2a.Reference character 7 expressions have the inlet side passage of predetermined thickness and predetermined altitude.Reference character 8 expression valve chamber (chamber of the present invention) are wherein being held valve element 3.Reference character 8a represents to be formed on the V-arrangement valve seat (incline section of the present invention) in the valve chamber 8.Reference character 9 expressions have an outlet side passage of predetermined thickness and predetermined altitude.An outlet of reference character 10 expressions port, this outlet port is as the passage connecting port that is connected to fluid circuit thin slice main body 2b.It should be noted that in first embodiment, ingress port 6 and inlet side passage 7 are corresponding to inlet of the present invention, outlet side passage 9 and outlet port 10 are corresponding to outlet of the present invention.But the form of entrance and exit is not limited thereto.In addition, ingress port 6, inlet side passage 7, outlet side passage 9 and outlet port 10 integrally form with valve chamber 8.

Inlet side passage 7, valve chamber 8 and outlet side passage 9 preferably are arranged to, and channel centerline is provided with point-blank, so that rotation or oscillating motion can not occur in the valve element 3.The width of outlet passage 9 several microns in the scope of hundreds of micron, and channel width is greater than the width of outlet passage 9, but normally in similar magnitude.The length of valve element is the 2-10 doubly (fold) of channel width or near value (thereabouts) preferably.Valve element 3 is advanced from the pressure (back pressure) of ingress port 6 from behind, and its sphenocephaly 3v can be coupled to valve seat 8a glossily, and can be not gapped.In addition, though in this embodiment, valve seat 8a is V-shaped, and is symmetrical arranged with respect to center line, and valve seat 8a can be made of a simple inclined surface.Under the sort of situation, valve element 3 presents shape like the respective class.

Next, will a driver that be used for controlling first embodiment's miniature valve 1a be described.It as Fig. 2 the schematic representation of driver of the valve cell of first embodiment of the invention.In Fig. 2, reference character 4a represents a piezoelectric layer of being made and constituted piezoelectric element 4 by for example lead zirconate titanate (PZT).Reference character 4b represents to be used for voltage is applied to the electrode slices of piezoelectric layer 4a.This makes relative with the piezoelectric layer 4a that is clipped in the middle each other to electrode slices 4b, and this is to a ground connection in the electrode slices, and the purpose in order to control, and the voltage that will have predetermined driving frequency is applied to another electrode slices 4b.

One of reference character 11 expression is used for controlling the driver of position of the valve element 3 of miniature valve 1a, reference character 12 expression power supply units.Reference character 13 expression Waveform Control parts are used for changing frequency and amplitude by the curtage of power supply unit 12 supplies, or form waveform.Input part of reference character 14 expressions can be from the external control waveform shaping, and waveform shaping is realized by this Waveform Control part 13.Amplifier of reference character 15 expressions is used for controlling the amplitude by the analog control signal of Waveform Control part 13 shapings.When the driving current from amplifier 15 changed between positive and negative, piezoelectric element 4 can repeat expansion and shrink.It should be noted, be shaped to a sine-shaped analogue signal, but be a digital signal from the input of input part 14 from the output of driver 11.Because need the D/A conversion, so preferably, provide practical as far as possible digital processing, to simplify this processing procedure.

Next, the reason that the miniature valve 1a that describes first embodiment can be controlled by the excitation of piezoelectric element 4.Accompanying drawing 3A is the phasor when the valve element of the miniature valve of first embodiment of the invention is energized.Accompanying drawing 3B shows to be applied in to the explanatory drawing of the power of valve element as shown in Figure 3A.

Shown in Fig. 3 B, suppose that the valve seat 8a of miniature valve 1a has a taper angle theta, and on some time points, owing to contact with valve element 3 from the back pressure of inlet side, described valve element has taper angle theta similarly at sphenocephaly 3v place.At this moment, comprise that the thrust PV of back pressure is applied to valve element 3 from inlet side passage 7 one sides, and the vibration with frequency f c that forms owing to piezoelectric element 4 is applied to the thin slice 1 of equipping valve on the direction perpendicular to channel direction.Therefore, when from the thin slice 1 of equipment valve when seeing, valve element 3 moves with relative acceleration α v and relative velocity uv.In addition, relative acceleration α v is expressed as α v=g (T, fc), wherein, T represents the time.

By the way, the inertial force Fv that is applied to valve element 3 is expressed as Fv=mv α v.In addition, if the resistance coefficient of the fluid resistance Rd that hypothesis valve element 3 is subjected to is Kv, fluid resistance Rd is expressed as Rd=Kvuv2 so.If the friction factor hypothesis is Kf, so, frictional force Rf is Rf=Kf (Pvcos θ).

Therefore, if relative acceleration and the relative velocity of hypothesis on the direction that is parallel to valve seat 8a is α v ^*And uv ^*, mathematical formulae 1 is as the inertial force Fv on the direction that is parallel to valve seat 8a so ^*And obtaining, and relative acceleration α v ^*Be α v ^*=Fv ^*/ mv.

[mathematical formulae 1]

F _v ^*＝F _vcosθ-R _dcosθ-R _f

Therefore, if hypothesis valve element is dv in the displacement that is parallel on the valve seat 8a ^*, so just can obtain mathematical formulae 2.Can obtain mathematical formulae 3 and 4 from these.According to mathematical formulae 4, can recognize that first of mathematical formulae 4 is that (T, integration fc) is proportional, and second is that (T, integrated square fc) is proportional with g with g.

[mathematical formulae 2]

d _v ^*＝∫∫α _v ^*dTdT

[mathematical formulae 3]

F _v ^*＝(m _vg(T，f _c))cosθ-(K _v(∫g(T，f _c)dT) ²)cosθ-R _f

[mathematical formulae 4]

${d_v}^{*}=\frac{1}{2\mathrm{mv}}\∫\∫\{\left(m_{v}g(T,f_c)\right)\cos \mathrm{\θ}-\left(K_v{(\∫g(T,f_c)\mathrm{dT})}^2\right)\cos \mathrm{\θ}-R_f\}\mathrm{dTdT}$

Therefore, the displacement dv of valve element 3 ^*Can be by the variation of the frequency f c that is given by driver 11, the size of acceleration waits to be controlled.For example, if 3A in conjunction with the accompanying drawings, the phasor in the last stage of accompanying drawing 3A demonstrates so, and back pressure has been applied to valve element 3 and has closed miniature valve 1a.Phasor in the interstage demonstrates, valve chamber 8 is encouraged by piezoelectric element 4 on directions X, and this effect cause valve element 3 on the direction opposite with back pressure P from valve seat 8a capacity component, and upwards pushed away going up in the opposite direction with back pressure P side, form a big passage E thus ^*This upwards pushes away and refers to, and valve element 3 is according to frequency f c, and amplitude size etc. by sliding on valve seat 8a, perhaps by jumping up from valve seat, and move.

In addition, phasor in the next stage demonstrates, opposite with the phasor in interstage, valve chamber 8 is energized on the Y direction by piezoelectric element 4, and this effect causes that valve element 3 is encouraged by piezoelectric element 4 on the Y direction, and this effect cause valve element 3 on the direction opposite with back pressure P from valve seat 8a capacity component, and upwards pushed away going up in the opposite direction with back pressure P side, form a big passage E thus.The same with aforesaid way, valve element 3 passes through at valve seat 8a ^*Last slip is perhaps passed through from valve seat 8a ^*On jump up, and move.

Like this, be sitting in valve seat 8a and 8a when valve element 3 ^*Between central the time, first embodiment's miniature valve 1a is with regard to closing passage, and on the direction opposite with back pressure P by valve seat 8a and 8a ^*In one upwards push away, form passage E or E thus ^*Act on last thrust (the inertial force Fv on the valve element 3 ^*) and the displacement dv of valve element 3 ^*Can be by the frequency f c of control piezoelectric element 4, amplitude size, valve element sole mass, each valve seat 8a and 8a ^*Taper angle theta wait and change.Therefore, each passage E and E ^*Size, that is to say that the extent of opening of miniature valve 1a can change by adjusting these parameters, so that flow rate can be controlled.In addition, can obviously see from the phasor of accompanying drawing 3A, when first embodiment's miniature valve 1a is in state except that the closed condition that is presented at the last stage, passage E and E ^*In one are constant opening, do not interrupt in flowing.Therefore, can obtain to allow the very little stable flow velocity of pulsation.In addition, the displacement dv of valve element 3 ^*Excitation by piezoelectric element 4 changes, but displacement dv ^*Size not only depend on the size of piezoelectric element 4 self.In other words, when valve element 3 because vibration, be forced in back pressure P opposite direction on when moving up, can form than bigger passage E and the E of passage corresponding to the amplitude of piezoelectric element 4 ^*, can enlarge Peak Flow Rate thus is dynamic range.

As mentioned above, in first embodiment's miniature valve 1a, valve element 3 is to be provided with sphenocephaly 3v at its vpg connection, and valve seat 8a forms with V-arrangement, and excitation is to realize on the direction perpendicular to the flow direction in the valve chamber 8 by piezoelectric element 4.Therefore, the opening degree of the valve frequency and the amplitude that can be applied to the driving current of piezoelectric element 4 controlled.Therefore, control can be provided easily and exactly, and dynamic range is very wide, and response is very fast, because the reaction force of valve seat 8a is used unlike traditional fastoperation type valve.Even attempt strengthens pressure, fluid can not leak because of the shape of the shape of valve element 3 and valve seat 8a.A kind of known method is for example printed and can be used in the processing process of the thin slice 1 of equipping valve, thereby makes easily, and serviceability is fabulous.

In addition, in this first embodiment, piezoelectric element 4 encourages on the direction perpendicular to the flow direction in the valve chamber 8.But, much less,, so also can obtain the similar operation effect if use based on the motivational techniques that rotatablely move with Vertical direction component.

Second embodiment

Next second embodiment's miniature valve 1a is described.In second embodiment's miniature valve 1a, the shape of valve element head and the shape of valve seat are three-dimensional and are provided with.Accompanying drawing 4A is the fragment perspective of valve cell with ball valve element of second embodiment of the invention.Accompanying drawing 4B is the fragment perspective of valve cell that is provided with the valve element of a circular cone sphenocephaly 3v with first embodiment of the invention.

In accompanying drawing 4A, reference character 3a represents to have the valve element of spherical form, and by constituting miniature valve 1a in conjunction with circular cone valve seat 8a.First embodiment's valve element 3 is equipped with sphenocephaly 3v, and this sphenocephaly is fitted among the valve seat 8a with V-arrangement shape.This is because miniature valve 1a forms passage by means of two-dimensional slot.But, the inertia of the valve element 3 when these embodiments have utilized when from the side (sideways) to realize excitation, from the reaction force of valve seat 8a with from the pressure at the back side, and these embodiments are not limited to two dimension.Second embodiment has realized the utilization of these power by three-dimensional axisymmetric passage.

Ball valve element 3a can perhaps by grinding and polishing etc., relatively easily make by in conjunction with atomizing and cooling.Because it is spherical, so the making of valve element 3 and assembling are easy to.The ratio of the area of area when valve is opened and valve chamber 8 is greater than the situation of two-dimensional structure, and therefore, dynamic range can increase.

Under the situation of miniature valve 1a shown in the accompanying drawing 4B, the valve element has conical sphenocephaly, shown in the 3b among Fig. 4 B.This valve element 3b is substantially similar to ball valve element 3a.In addition, because wedge effect is bigger, so this structure is suitable for strengthening pressure.It should be noted that the wedge effect of mentioning is such effect here, that is, when being applied to inclined surface, this power can be reinforced by lever principle from the direction (in this embodiment, from the direction of back pressure P) that is different from inclined surface when a power.

The 3rd embodiment

The 3rd embodiment's miniature valve 1a has the function of control valve and safety check.Accompanying drawing 5A is the figure of function of the valve cell with safety check function of explanation third embodiment of the invention.Accompanying drawing 5B is the schematic representation of the valve cell with safety check function shown in Fig. 5 A.Accompanying drawing 5C is the explanatory drawing when the valve cell with safety check function is used in the fluid circuit.

In accompanying drawing 5A, reference character 8b represents the inlet side valve seat, and this valve seat is coupled to the 3rd embodiment's valve element 3.The 3rd embodiment's valve element 3 is the same with first embodiment at its vpg connection, is arranged to be the shape of two dimensional panel.Except the outlet side of valve chamber 8, also the inlet side in valve chamber 8 forms sphenocephaly.The safety check function is by setting into the oral-lateral sphenocephaly and inlet side valve seat 8b realizes.

When fluid when forwards upwards stopping because back pressure is applied to the back side of valve element 3 from inlet side passage 7, valve element 3 just is pressed against on the valve seat 8a so, and is closed.This is the normal function of control valve.If being activated at when being applied under this state of piezoelectric element 4, the position of valve element 3 will be removed from central authorities on the width direction of valve chamber, and is set in open mode, this open mode for forwards to the fluid supply be very necessary.Be activated under this state and continued, with accommodating fluid.Next, when the fluid supply with when being activated at some time points and being stopped, high pressure flows backward from outlet side passage 9.This state is the figure as the state of explanation when the reverse flow in Fig. 5 A institute diagrammatic sketch.At this moment, the input side sphenocephaly of valve element 3 is coupled to input side valve seat 8b, and can stop reverse flow.

Next, description had the structure that the miniature valve of safety check function should have.Shown in Fig. 5 B, the drift angle of supposing the outlet side sphenocephaly of valve element 3 is θ a, and the drift angle of input side sphenocephaly is θ b.Similarly, suppose that the angle of accepting of outlet side V-arrangement valve seat 8a is θ a, the angle of accepting of input side valve seat 8b is θ b.At this moment, θ a 〉=θ b has the requirement that the miniature valve of safety check function should satisfy.

That is, if the drift angle of input side sphenocephaly forms than the sharper angle of input side sphenocephaly drift angle, wedge effect is just bigger so.Therefore, valve just is closed reliably under very little pressure, and can prevent reverse flow more effectively.Simultaneously, when accommodating fluid forward, if the vertex angle theta b of input side sphenocephaly is littler, fluid resistance is just littler so, and the pressure loss can reduce.If θ a=θ is b, the making of valve element 3 is easy to so, and in when assembling, and miniature valve can be assembled under the situation of the direction of insertion that does not need to consider valve element 3, therefore is convenient to the making of miniature valve.

In addition, if the shape of valve element 3 is spherical, and the angle of accepting of the input side valve seat 8b of valve chamber 8 sets the angle of accepting less than the valve seat 8a that forms on the outlet side for, and wedge effect is just big so.Therefore, even just can close reliably, and can prevent reverse flow more effectively with very little pressure valve.

Accompanying drawing 5C has shown an example, and promptly wherein, two outlet side passages 9 that are provided with the miniature valve with safety check function separately can be focused at a bit, thereby mix two kinds of liquid A and B, and make its reaction.Suppose that after reaction a kind of liquid B is supply not, and another kind of liquid A is in statu quo continued supply.At this moment, be opened at the miniature valve with safety check function of liquid A one side, pressured fluid is supplied, so liquid A flows in the outlet side passage 9 of liquid B one side.If do not have the miniature valve of safety check function, liquid A will be passed the miniature valve of liquid B one side so, flows to the liquid B supply side.In order to prevent this, safety check need be set separately, but for according to the 3rd embodiment have a safety check function miniature valve, just do not need to be provided with separately safety check.

The 4th embodiment

If miniature valve 1a is closed, back pressure is just quite little, and therefore, it is not enough that independent backrest is compressed into capable closing.Therefore, the 4th embodiment's miniature valve 1a is provided with a valve element advancing means, with raising valve closing pressure, and gives and closes reliability.Accompanying drawing 6A is the figure of an explanation valve element advancing means, and described valve element advancing means is used for holding the 4th embodiment's of valve cell valve element on discontiguous basis.Accompanying drawing 6B is the figure of explanation such a case, wherein, provides the first valve element advancing means, is used for pressing the valve element by contact.Accompanying drawing 6C is the figure of explanation such a case, wherein, is provided with the second valve element advancing means, is used for pressing the valve element by contact.

In accompanying drawing 6A, reference character 16 expression valve element advancing meanss, described advancing means be set at not with miniature valve 1a state of contact under.This valve element advancing means 16 holds the valve element on discontiguous basis, and has various devices to adopt.If valve element 3 is ferrormagnetic substances, can use permanent magnet or electromagnet to be used as valve element advancing means 16 so.In addition, if valve element 3 is permanent magnets, valve element advancing means 16 is ferrormagnetic substances so, permanent magnet, perhaps electromagnet.When being drawn onto by this suction, valve element 3 is positioned at valve seat 8a and 8a ^*Between middle body the time, miniature valve 1a remains on closed condition reliably.In addition, shown in the dotted line among Fig. 6 A, if miniature valve has the safety check function, valve element 3 can seal and be closed in the input side valve seat reliably by using repulsive force so.

Above-mentioned valve element advancing means 16 is configured to, under discontiguous state, hold or push down with repulsive force, and valve element advancing means 16 be set at miniature valve 1a position spaced on.But valve element advancing means 16 can be arranged among the miniature valve 1a.In accompanying drawing 6B, reference character 16a represents propelling spring.Propelling spring 16a can give propelling force with the simplest structure by carrying out the pushing of physics from valve element 3 back, but its assembling difficulty.In addition, represent the elasticity projecting block that forms by the bump in the thin slice 1 of equipment valve at the reference character 16b shown in the accompanying drawing 6C.The input side sphenocephaly of valve element 3 can be pushed down by this elasticity projecting block 16b.In this case, the quantity of processing step increases, but assembling easily.

Therefore, under the situation of the 4th embodiment's miniature valve 1a, by valve cell advancing means 16 is provided, valve element 3 can seal and be closed in valve seat 8a and 8b reliably.Because realized closing reliably, so can improve the valve closing pressure.In addition, because the valve element can be in the precalculated position reliably when the action beginning, so the controllability of fluid (accuracy etc.) is improved.

The 5th embodiment

In the 5th embodiment's miniature valve 1a and fluid control chip, the layout of valve element advancing means is designed.Accompanying drawing 7A is the figure of explanation such a case, and wherein, valve element advancing means is set on the holding member, and a valve cell of fifth embodiment of the invention is installed on the described holding member.Accompanying drawing 7B is the figure of explanation such a case, and wherein, valve element advancing means is set on the holding member, and a plurality of valve cells are installed on the described holding member.Accompanying drawing 7C is the figure of explanation such a case, and wherein, valve element advancing means is set on the thin slice of equipment valve.Accompanying drawing 7D is the perspective view under such a case, and wherein, valve element advancing means is set at the downside of the thin slice of equipment valve.

In accompanying drawing 7A and 7B, reference character 2b ^*Represent a holding member, described holding member is used for fixing the thin slice 1 of equipment valve, i.e. fluid control chip.In accompanying drawing 7A, valve element advancing means 16 is arranged on the position of side surface of thin slice 1 of equipment valve separably, and the thin slice of described equipment valve is disposed in holding member 2b ^*On, and only be provided with a miniature valve 1a.Valve element advancing means 16 can have all kinds that advance on the non-contact basis hereto, as the 4th embodiment is described.If valve element 3 is ferromagnets, can use permanent magnet or electromagnet so as valve element advancing means 16.If valve element 3 is permanent magnets, valve element advancing means 16 can be a ferromagnet so, permanent magnet, or electromagnet.Because the valve element advancing means 16 under accompanying drawing 7A situation is installed to holding member 2b ^*So when replacing fluid control chip, valve element advancing means 16 can repeatedly be utilized.

Next, in accompanying drawing 7B, valve element advancing means 16 is arranged on the position of side surface of thin slice 1 of equipment valve separably, and the thin slice 1 of described equipment valve is disposed in holding member 2b ^*On, and be provided with a plurality of (being two in this example) miniature valve 1a.Under this situation, as understanding,, can only open a miniature valve 1a, and keep another miniature valve 1a to be closed by changing the factors such as driver frequency of piezoelectric element 4 from mathematical formulae 4.Therefore, the miniature valve 1a that opens can control by selecting driver frequency etc.Under the situation of accompanying drawing 7B, because valve element advancing means 16 is set at holding member 2b ^*On, so when replacing fluid control chip, valve element advancing means 16 can repeatedly be utilized.In addition, because do not need a plurality of valve element advancing meanss 16, so this arranges meeting more economically.

In addition, the thin slice 1 or the fluid control chip of equipment valve are arranged to remain on slidably holding member 2b ^*On, and piezoelectric element 4 self is only realized the operation of excitation thin slice.At this moment, because the amplitude of piezoelectric element 4 is ad infinitum little, only in several microns to tens microns scope, so, do not need to allow valve element advancing means 16 follow moving of thin slice.

In addition, below this situation also be applicable to this embodiment certainly, wherein, the equipment valve thin slice 1 be fluid control chip, be fixed to holding member 2b ^*, and with holding member 2b ^*Encouraged by piezoelectric element 4 together.

Accompanying drawing 7C has shown this situation, and wherein, valve element advancing means 16 is set on the thin slice 1 of equipment valve.In this case, even, also propelling force can be applied to valve element 3, so that the closed condition of valve element 3 can be kept by thin slice separately using under the situation of fluid control chip separately.Therefore, because when abandoning used fluid control chip, the fluid in the thin slice can be held, so the fluid control chip of high safety can be provided.

By the way, can make valve element advancing means 16 just by the surface of substrate 5b under the sheet of magnetization shown in the perspective view of Fig. 7 D.In this case, be necessary magnetic circuit is arranged to be parallel to valve element 3.

Like this, in the 5th embodiment's miniature valve 1a, by the position of valve design element advancing means 16, can replace fluid control chip separately, thereby bigger economic advantages are provided.In addition, also can for example when abandoning, obtain advantage aspect the Security of maintenance fluid in raising.It should be noted that this miniature valve technology is applied to time other valve system of millimeter level.

This embodiment's the miniature valve according to the present invention is because the valve element by vibration, moves towards chamber inlet at incline section, so can be reliably and regulate opening apace.In addition, control is easy to and is very accurate, wide dynamic range, and response is quick, and pulsation diminishes.The valve element contacts with incline section reliably, and therefore, even pressure is enhanced, escape of liquid can not take place yet, and making is easy to, and serviceability is fabulous.When chamber vibrates, the valve element is moved towards inlet.Can control this at an easy rate by the variation of vibration flows.

In addition, an end of valve element forms wedge shape at its vpg connection, so the tapered end of sphenocephaly can contact with incline section.Therefore,, can obtain reliable contact, so even pressure is enhanced, fluid can not leak yet by means of wedge effect.If the valve element forms sphere, the making of valve element and assembling become easy so.Similarly, if the valve element forms taper shape, the making of valve element and assembling become easily so, and control also is easy to.Because it is big that wedge effect becomes, so can improve pressure.

In addition, because exciting bank can separate with chamber, so when carrying out the replacement of valve body part, exciting bank can be reused.If exciting bank is a piezoelectric element, can provide control electronically so, and control is easy and accurate.In addition, because the driver that is used to produce the control waveform that will be applied to exciting bank is provided, so can provide control easily by control waveform.

In addition, shape of each end of valve element is a wedge shape, any in sphere and the taper shape, and be formed with the incline section that can contact with the valve element.Therefore, by inlet side shape and incline section, can provide the safety check function.In addition, shape of each end of valve element is wedge shape or taper shape, and the drift angle of valve element inlet side is less than the drift angle of its outlet side, and simultaneously, the angle of incline section that is formed on the chamber inlet side is less than the angle of the incline section that is formed on the chamber outlet side.Therefore, wedge effect is very big, thereby even under very little pressure, just valve can cut out reliably, and can prevent reverse flow more effectively.During accommodating fluid, if the angle of inlet side is less, fluid resistance is just less so, and can reduce the pressure loss on direction forward.

In addition, the shape of valve element is spherical, and the angle of incline section that is formed on inlet side is less than the angle of the incline section that is formed on outlet side.Therefore, wedge effect is very big, therefore, even also valve can cut out reliably, and can prevent reverse flow more effectively under very little pressure.

In addition, be used for advancing the valve element advancing means of valve element towards the chamber outlet because provide, thus can close reliably, and can improve closing pressure.Because when the action beginning, the valve element is in the precalculated position reliably, so the controllability of fluid (accuracy etc.) is improved.If valve element advancing means is an electromagnet, and the valve element is ferromagnet or permanent magnet, so can be on the non-contact basis propelling force be applied to the valve element.Therefore, can close reliably, and can improve closing pressure.In addition, because when the action beginning, the valve element is in the precalculated position reliably, so the controllability of fluid (accuracy etc.) is improved.If valve element advancing means is a permanent magnet, when the magnetic by the control electromagnet provides the safety check function, can prevent to take place in the opposite direction escape of liquid reliably so.

In addition, if valve element advancing means is a permanent magnet, and the valve element is provided with ferromagnet or permanent magnet, so can be on the non-contact basis propelling force be applied to the valve element.Therefore, can close reliably, and can improve closing pressure.In addition, because when the action beginning, the valve element is in the precalculated position reliably, so the controllability of fluid (accuracy etc.) is improved.In addition, if valve element advancing means is a ferromagnet, and the valve element is provided with permanent magnet, so can be on the non-contact basis propelling force be applied to the valve element.Therefore, can close reliably, and can improve closing pressure.In addition, because when the action beginning, the valve element is in the precalculated position reliably, so the controllability of fluid (accuracy etc.) is improved.

In addition, because valve element advancing means is propelling spring or elasticity projecting block, thus can close reliably, and can improve closing pressure.In addition, because when the action beginning, the valve element is in the precalculated position reliably, so the controllability of fluid (accuracy etc.) is improved.

Next, according to the fluid control chip of the embodiment of the invention,, so valve cell can experience littler escape of liquid, and allow to improve pressure, and the replacement of described valve cell is easy to and very economical because valve cell and channel part are provided.Therefore, fluid control chip is done as a wholely to be used under the situation of less escape of liquid and high pressure.In addition, if the reservoir part that is used to keep fluid is provided, valve cell can experience littler escape of liquid so, and allows to improve pressure, and the replacement of described reservoir is easy to and very economical.Therefore, fluid control chip is done as a wholely to be used under the situation of less escape of liquid and high pressure.Because advance the valve element advancing means of valve element to be set at the valve cell outside towards the chamber outlet, so by valve element advancing means is installed in the valve cell outside, fluid control chip can be formed easy replacement, use easily and economic fluid control chip.

In addition, fluid control chip is by the first layer with the reservoir that is used to keep fluid, have the second layer of the valve system that is used to control the fluid stream of supplying by first layer and be used to cause reactive moieties of reacting or the probe portion that is used for detection reaction by the fluid experience of second layer supply.Therefore, relevant portion is replaced easily, and can combine repetition and use economically.In addition, if each layer can be separated from one another, relevant layers is replaced easily so, and can combine repetition and use economically.

In addition, because the upside of valve system is covered by the lower surface of first layer,, covered by the lower surface of first layer then so tunnel-shaped becomes open mode.Therefore, can reduce the quantity of number of spare parts and installation step.Similarly, because the upside of reactive moieties and/or probe portion is covered by the lower surface of this second layer,, covered by the lower surface of the second layer then so tunnel-shaped becomes open mode.Therefore, can reduce the quantity of number of spare parts and installation step.

In addition, because the valve element advancing means that is used to vibrate fluid control chip is provided, and exciting bank is set at the fluid control chip outside, so by exciting bank is installed in the outside, fluid control chip can form easy replacement, uses easily and economic fluid control chip.Described exciting bank is installed separably with respect to fluid control chip.Because described exciting bank is separable with respect to fluid control chip,, use easily and economic fluid control chip so fluid control chip can form easy replacement.

In addition, because valve element advancing means is provided at the fluid control chip outside,, use easily and economic fluid control chip so by valve element advancing means is installed in the outside, fluid control chip can form easy replacement.Because described valve element advancing means is installed separably with respect to fluid control chip, and described exciting bank is separable with respect to fluid control chip, so fluid control chip can form easy replacement, use easily and economic fluid control chip.

The 6th embodiment

Accompanying drawing 8A is to use the perspective exploded view of general structure of fluid circuit thin slice of the valve cell of sixth embodiment of the invention.Accompanying drawing 8B is the fragment perspective of the valve cell shown in Fig. 8 A.

Below, we are described the general structure of the fluid circuit thin slice of the valve cell of use sixth embodiment of the invention.

In accompanying drawing 8A, the thin slice of reference character 21 expression equipment valves, the thin slice of described equipment valve is provided with a valve system, when valve system is applied in vibration, provide a reaction force from V-arrangement inner wall surface (valve seat), and when hydrodynamic pressure was supplied to valve system, described valve system can be opened and closed by the inertia of valve element.Reference character 21a represents to form the miniature valve of valve system of the thin slice 21 of equipment valve.Reference character 22a represents the reservoir part, and described reservoir partly has a reservoir Z who is used to keep to be supplied to the fluid of miniature valve 21a.Reference character 22b represents to have the fluid circuit thin slice main body of fluid circuit C, and described fluid circuit thin slice main body is provided with the various measured sensor B that are used for, and is constituted as predetermined circuit.It should be noted, need a equipment, fluid is sent from reservoir part 22a with permission with pumping action.In the 6th embodiment, used a syringe pump D as shown in Fig. 8 A.

Described syringe pump D is configured to, and is supplied to reservoir part 22a at fluid, and after being maintained at wherein, motor D 2 is driven, to be used for extending injector D1 by gear and tooth bar D3.

Therefore, the air in injector D1 is pushed out, and the fluid (liquid) among the reservoir part 22a is supplied by this air pressure.But described pump can be another kind of type.In addition, an outlet side reservoir part 22c (seeing accompanying drawing 14) can be set on the lower surface of fluid circuit thin slice, as following in the 9th embodiment, describe.The thin slice 21 of equipment valve, reservoir part 22a and fluid circuit thin slice main body 22b are the plate-shaped member with predetermined thickness separately.

In addition, though be that miniature valve 21a is described in this embodiment below, this shows several preferred embodiments of the present invention.Valve cell surely not is restricted to miniature valve 21a, but just passable as long as valve cell can use excitation to control.

In addition, reference character 23 is illustrated in the valve element that its two ends form sphenocephaly, and described valve element is used for realizing the opening and closing of the valve of miniature valve 21a.Reference character 24 expression piezoelectric elements (exciting bank of the present invention), described piezoelectric element are used for giving the thin slice 21 of equipment valve and control valve element 23 by apply vibration from the direction perpendicular to passage.Piezoelectric element 24 is provided with separably with respect to the thin slice 21 of equipment valve.It should be noted that sphenocephaly 23v can only be formed in one distolateral (outlet side) of valve element 23; But under this 6th embodiment's situation, sphenocephaly 23v is set at the two ends of valve element 23, so that the function that safety check is provided at inlet side is to sphenocephaly 23v.Thin slice 21 and channel control unit of the combined formation of reservoir part 22a of equipment valve, and this channel control unit is laminated on the fluid circuit thin slice main body 22b.This assembly is done as a whole, constitutes a fluid control chip.

In addition, have such a case, wherein, fluid control chip is laminated on the outlet side reservoir part 22c.If the thin slice 21 of equipment valve, reservoir part 22a and jet thin slice main body 22b are replaced, pump so, and for example syringe pump and piezoelectric element 24 just can repeatedly be utilized.

Next, the details of thin slice 21 to the equipment valve is described in detail.In accompanying drawing 8B, valve body basic unit of reference character 25 expression, in described valve body basic unit, the inner passage of miniature valve 21a is formed with the form of stamped groove.Reference character 25b represents that one is gone to a grassroots level, and described going to a grassroots level covers the downside of stamped groove and form a passage.Reservoir part 22a is laminated on the upper surface of valve body basic unit 25, and covering described valve body basic unit, and the inside of groove forms passage.It should be noted that though valve body basic unit 25 is called as the basic unit that constitutes miniature valve 21a, the present invention is not restricted to this.Under the situation of a kind of valve cell except that miniature valve 21a, this part is known as valve body basic unit, rather than is known as valve body basic unit 25.

Ingress port of reference character 26 expressions, this ingress port is as the passage joint that is connected to reservoir part 22a.Reference character 27 expressions have the inlet side passage of predetermined thickness and predetermined altitude.Valve chamber of reference character 28 expressions is wherein being held valve element 23.Reference character 28a represents to be formed on a V-arrangement valve seat in the valve chamber 28.Reference character 29 expressions have an outlet side passage of predetermined thickness and predetermined altitude.An outlet of reference character 30 expressions port, this outlet port is as the passage connecting port that is connected to fluid circuit thin slice main body 22b.It should be noted that in the 6th embodiment, ingress port 26 and inlet side passage 27 are corresponding to inlet of the present invention, outlet side passage 29 and outlet port 30 are corresponding to outlet of the present invention.But the form of entrance and exit is not limited thereto.In addition, ingress port 26, inlet side passage 27, outlet side passage 29 and outlet port 30 integrally form with valve chamber 28.

Inlet side passage 27, valve chamber 28 and outlet side passage 29 preferably are arranged to, and channel centerline is provided with point-blank, thus rotation or oscillating motion can not occur in the valve element 23.The width of outlet passage 29 several microns in the scope of hundreds of micron, and channel width is greater than this, but normally in similar magnitude.The length of valve element preferably channel width or near value 2-10 doubly.Valve element 23 is promoted from the pressure (back pressure) of ingress port 26 from behind, and its sphenocephaly 23v can be coupled to valve seat 28a glossily by wedge effect, and can be not gapped.

In other words, this is because when being applied to inclined surface, this power is increased by lever principle from the direction (in this embodiment, from the direction of the back pressure P shown in the accompanying drawing 10) that is different from inclined surface when a power.In addition, though in this embodiment, valve seat 28a is V-shaped, and is symmetrical arranged with respect to center line, and valve seat 28a can be made of a simple inclined surface.Under the sort of situation, valve element 23 presents shape like the respective class.

Next, will a driver that be used for controlling the 6th embodiment's miniature valve 21a be described.It as Fig. 9 the schematic representation of driver of the valve cell of sixth embodiment of the invention.In Fig. 9, reference character 24a represents a piezoelectric layer of being made and constituted piezoelectric element 24 by for example lead zirconate titanate (PZT).Reference character 24b represents to be used for voltage is applied to the electrode slices of piezoelectric layer 24a.This makes relative with the piezoelectric layer 24a that is clipped in the middle each other to electrode slices 24b, and this is to a ground connection in the electrode slices, and the purpose in order to control, and the voltage that will have predetermined driving frequency is applied to another electrode slices 24b.

Reference character 31 expression is used for controlling the driver of position of the valve element 23 of miniature valve 21a, reference character 32 expression power supply units.Reference character 33 expression Waveform Control parts are used for changing frequency and amplitude by the curtage of power supply unit 32 supplies, or the shaping waveform.Input part of reference character 34 expressions, described input part can be by determining each control action, and from the external control waveform shaping, waveform shaping is realized by this Waveform Control part 33.Amplifier of reference character 35 expressions is used for controlling the amplitude by the analog control signal of Waveform Control part 33 shapings.When the driving current from amplifier 35 changed between positive and negative, piezoelectric element 24 can repeat expansion and shrink.

One of reference character 36 expression is used for the display unit that shows on the display unit (not shown).Central control section (control section of the present invention) that is used for the total system of controlling and driving device 31 of reference character 37 expressions.Reference character 37a represents D/A converter.One of reference character 38 expression is used to store the control program that is applicable to central control section 37 and the storage area of data.Reference character 38a represents a valve control table that is used to store the control data of each control action that is applicable to miniature valve 21a.It should be noted that central control section 37 constitutes a function implement device, described function implement device is by operating to central processing unit (CPU) from storage area 38 reading control program.

Therefore, central control section 37, input part 34, display unit 36, storage area 38 and valve control table 38a can be by the formations such as PC of separating with driver 31.Like this, driver 31 is separable.In addition, the driving of driver 31 output is analogue signal, and the control signal of central control section 37 is a data-signal, therefore, need carry out the D/A conversion in the centre.Preferably, provide practical as far as possible digital processing in central control section 37 1 sides, to simplify this simulation process process.

If the 6th embodiment's driver 31 is operated, the series of valves that is controlled so and its a series of control actions all are displayed on the display device.Select with regard to allowing which valve realize what action, and 34 provide necessary setting from the input part.Central authorities' control section 37 obtains the setting value and the control data of input from valve control table 38a, determines to be applied to the driving current of piezoelectric element 24, and by means of Waveform Control part 33 shaping waveforms.

In the 6th embodiment, as describing below, the amplitude A dr and the frequency f dr that are used for the driving current of valve control are read and control.Piezoelectric element 24 is vibrated by driving current, has amplitude A and frequency f c during vibration.Basically, formula fdr=fc remains valid, and though Adr is exaggerated, it is also proportional with A basically.

Therefore, at first will can be by from the excitation of piezoelectric element 24, particularly can describe by regulating the basic principle that amplitude A and frequency f c become controlled to the 6th embodiment's miniature valve 21a.

Accompanying drawing 10A is the phasor when the valve element of the miniature valve of sixth embodiment of the invention is energized.Accompanying drawing 10B shows the explanatory drawing that is applied in to the power of valve element shown in Figure 10 A.

Shown in Figure 10 B, suppose that the valve seat 28a of miniature valve 21a has a taper angle theta, and on some time points, owing to contact with valve element 23 from the back pressure of inboard, described valve element has taper angle theta similarly at sphenocephaly 23v place.At this moment, comprise that the thrust PV of back pressure is applied to valve element 23 from inlet side passage 27 1 sides, and the vibration with amplitude A and frequency f c that forms owing to piezoelectric element 24 is applied to the thin slice 21 of equipping valve on the direction perpendicular to channel direction.Therefore, when from the thin slice 21 of equipment valve when seeing, valve element 23 moves with relative acceleration α v and relative velocity uv.Relative acceleration α v and relative velocity uv are the functions of amplitude A and frequency f c.

By the way, the inertial force Fv that is applied to valve element 23 is expressed as Fv=mv α v.In addition, if the resistance coefficient of the fluid resistance Rd that hypothesis valve element 23 is subjected to is Kv, fluid resistance Rd is expressed as Rd=Kvuvn (n is the different measured value that depends on fluid) so.If the friction factor hypothesis is Kf, so, friction factor Rf is Rf=Kf (Pvcos θ).

Therefore, in order to analyze the motion of valve element 23, the balance of the value on the direction that is parallel to valve seat 28a at first is considered.If suppose that relative acceleration and relative velocity on the direction that is parallel to valve seat 28a are α v ^*And uv ^*, mathematical formulae 5 is as the inertial force Fv on the direction that is parallel to valve seat 28a so ^*And obtaining, and relative acceleration α v ^*Be α v ^*=Fv ^*/ mv.

[mathematical formulae 5]

F _v ^*＝F _vcosθ-R _dcosθ-R _f

Therefore, if the displacement of hypothesis valve element 23 on the direction that is parallel to valve seat 28a is dv ^*, so just can obtain mathematical formulae 6.

[mathematical formulae 6]

d _v ^*＝∫u _v ^*dT＝∫∫α _v ^*dTdT

Can obtain mathematical formulae 7 and 8 from these.According to mathematical formulae 8, can recognize that first of mathematical formulae 8 is and mv α v ^*The proportional inertia item of integration, and second be and Kvuv ^*The proportional fluid resistance item of the integration of n, and the 3rd be and the proportional frictional force item of frictional force.

[mathematical formulae 7]

${F_v}^{*}=\left(m_v{{\mathrm{\α}}_v}^{*}\right)\cos \mathrm{\θ}-\left(K_v{u_v}^{{*}^n}\right)\cos \mathrm{\θ}-R_f$

[mathematical formulae 8]

${d_v}^{*}=\∫\∫\left(m_v{{\mathrm{\α}}_v}^{*}\right)\cos \mathrm{\θdTdT}-\∫\∫\left(K_v{u_v}^{{*}^n}\right)\cos \mathrm{\θdTdT}+{\∫\∫R}_f\mathrm{dTdT}$

Valve element 23 on the direction that is parallel to valve seat 28a according to the dv of mathematical formulae 7 ^*Carry out displacement, but valve element 23 is being expressed by mathematical formulae 9 and 10 perpendicular to relative acceleration α v on the direction that flows and relative velocity uv.The displacement dv of valve element 23 on its width direction passes through dv ^*Cos θ expresses.

[mathematical formulae 9]

${\mathrm{\α}}_v=\frac{d2}{\mathrm{dt}2}\left({d_v}^{*}\cos \mathrm{\θ}\right)$

[mathematical formulae 10]

$u_v=\frac{d}{\mathrm{dt}}\left({d_v}^{*}\cos \mathrm{\θ}\right)$

But, unavoidably will by discrete method for example infinitesimal calculus separate each mathematical formulae 7 and 8 and mathematical formulae 9 and 10.Therefore, before obtaining digital solution, amplitude A and frequency f c fix, and according to mathematical formulae 7, it are carried out qualitative analysis.

Accompanying drawing 11 is the figure that explain the angle of throw frequency of the valve cell be applied to sixth embodiment of the invention and act on the relation between the power on the valve.

If use angular frequency below (ω=2pfc), so, less than predetermined ω 1, promptly under the situation of ω＜ω 1, first inertial force of mathematical formulae 3 takes effect, and trends towards causing motion in angular frequency for task of explanation.But because energy shortage, the 3rd frictional force overcomes inertial force, so the displacement of valve element 23 can not take place.Certainly, second fluid resistance can not take place yet.Therefore, relative angle speed alpha v and relative velocity uv are 0s.In other words, valve element 23 is in the inactive zone of valve, and at this moment, it stops on the valve seat 28a, and keeps motionless.

Next, under the situation of ω 1＜ω＜ω 2, it is big that first inertial force becomes, and surpass the size of the 3rd frictional force, so motion takes place.After this, second fluid resistance also takes place.This zone becomes a valve operating area.Relative angle speed alpha v and relative velocity uv are the functions of angular frequency.The vibration that has amplitude A and angular frequency that is applied by piezoelectric element 4 can be a function, and this function can present any waveform.But, as from mathematical formulae 6, recognizing, uv ^*Be the differential of this function, and proportional with the product of the differential of ω self and ω function.In addition, because second has Kvuv ^*N is as its element, so clearly, second has a proportional element of component with the n power of ω.It seems from this point, be apparent that, angular frequency during near ω 1 second have a little value, but it trends towards having a big value to angular frequency very soon during near ω 2, at this moment.This fluid resistance has constituted and has been used for the component that check valve element 23 is opened.

On the contrary, first inertial force is the second-order differential of oscillation function, and very complicated.But, as from uv ^*Become big true understandable the same pro rata with the product of the differential of ω self and ω function, first inertial force becomes big gradually with respect to ω usually.This inertial force constitutes the component of opening valve element 23.

Therefore, as shown in figure 11, for miniature valve 21a, it is possible opening or closing valve when ω 1.As ω during greater than this ω 1, a such state continues, and is used to open the component of valve element 23 greater than the fluid resistance component in described this state.As angular frequency convergence ω 2, and fluid resistance is when sharply increasing, and the component that is used to open valve element 23 is cancelled, and its active constituent begins to reduce, and reaches 0 when ω 2.

When ω 2＜ω, first inertial force becomes less than the 3rd frictional force, and motion stops.Under this state, be used to open the power deficiency of miniature valve 21a, and stop motion.Therefore, this zone is valve inoperation zone.

Next, as frequency f c fixedly the time, investigate based on the variation of amplitude A.At this moment, suppose that amplitude A is not the function of time t, but a steady state value.When amplitude A fixedly the time, this variation is quite analogous to the variation of frequency f c.Compare with predetermined A1, under the situation of A＜A1, first inertial force in mathematical formulae 7 takes effect, and trends towards realizing motion.But because energy shortage, the 3rd frictional force overcomes inertial force, so the displacement of valve element 23 can not take place.Certainly, second fluid resistance can not take place yet.This zone is valve inoperation zone.

Simultaneously, under the situation of A1≤A≤A2, first inertial force, promptly inertial force trends towards opening the component of valve element 23, becomes very big, and surpasses the size of the 3rd frictional force, so motion takes place.After this, second fluid resistance also takes place.It is big that inertial force and A become pro rata.But, be understandable that because fluid resistance has one-component, the component of the n power (n-thpower) of this component and A is proportional, thus amplitude during near A1 second have a little value, but it has a big value to amplitude very soon during near A2.Therefore, utilize miniature valve 21a, can between A1 and A2, open valve element 23, and the power that is used to open valve element 23 becomes 0 when A2.

When A2＜A, first inertial force becomes less than the 3rd frictional force, and motion stops.Under this state, be used to open the power deficiency of miniature valve 21a, and stop motion.Therefore, this zone is valve inoperation zone.

Like this, be understandable that the valve operating area is in the scope of ω 1≤ω≤ω 2 or A1≤A≤A2.But, in order to control, advantageously, angular frequency or amplitude A and directed force F v ^*Should be as one man aspect their relation corresponding to (one to one) each other.Therefore, preferably, the 6th embodiment's miniature valve 21a should be controlled in such scope, wherein, and directed force F v ^*Just increase, that is, in the scope of ω 1≤ω≤ω m, perhaps, similarly, be controlled in such scope with respect to angular frequency, wherein, directed force F v ^*Just increase, promptly in the scope of A1≤A≤Am with respect to amplitude A.But, following situation is also arranged, can use ω m＜ω≤ω 2 or Am＜A≤A2.In addition, if miniature valve 21a will be closed, if control to ω=ω 1 or still less so, perhaps, and ω 2 or more, perhaps A=A1 or still less, perhaps, and A2 or more, just enough.

As understandable, by changing amplitude A or the angular frequency that driver 31 applies, the displacement dv of valve element 23 from the description of front ^*Opening of energy control valve.For example, if 10A with reference to the accompanying drawings, the phasor that accompanying drawing 10A went up in the stage demonstrates, and back pressure has been applied to valve element 23, thereby closes miniature valve 21a.Phasor in the interstage demonstrates, valve chamber 28 is energized on directions X by piezoelectric element 24, and this action cause valve element 23 with opposite direction from the back pressure P of valve seat 28a on be subjected to a force component, and on the opposite direction of back pressure P, upwards pushed away, formed a big passage E thus ^*By the way, this upwards pushes away the meaning and is, valve element 23 is by sliding on valve seat 28a, perhaps in some cases, by jumping up from valve seat 28a according to the angular frequency of driving current, the size of its amplitude A etc., and moves.

In addition, phasor in the next stage demonstrates, opposite with the phasor in the interstage, valve chamber 28 is energized on the Y direction by piezoelectric element 24, and this action cause valve element 23 with opposite direction from the back pressure P of valve seat 28a on be subjected to a force component, and with the opposite direction of back pressure P on upwards pushed away, form a big passage E thus.It should be noted that in the process of control valve, opening of valve is can be by quality, each valve seat 28a and the 28a of selector valve element self ^*Taper angle theta etc. and change that valve characteristic regulates.

Therefore, by the above-mentioned angular frequency and the amplitude A of driving current of control piezoelectric element 24, various valves controls become feasible, for example can flow rate control, start-up control, flow rate waveform etc.Accompanying drawing 12A is the figure that the flow rate of the valve cell of an explanation sixth embodiment of the invention is controlled.Accompanying drawing 12B is the figure of the start-up control of a valve cell of explaining sixth embodiment of the invention.Accompanying drawing 12C is the figure of the flow rate Waveform Control of a valve cell of explaining sixth embodiment of the invention.

Showing in accompanying drawing 12A, vibrate to miniature valve 21a if apply high frequency from piezoelectric element 24, valve element 23 can receive a big energy so, and can experience the vibration with large amplitude.Therefore, miniature valve 21a allows fluid in big open condition current downflow.On the contrary, clearly, if applied low frequency vibration, valve element 23 experiences small vibrations so, thereby allows fluid in little open condition current downflow.

Similarly be that when applying the vibration with large amplitude from piezoelectric element 24 and give miniature valve 21a, valve element 23 experience have the vibration of large amplitude, so miniature valve 21a allows fluid in big open condition current downflow.Simultaneously, if applied the vibration of little amplitude, valve element 23 experience have the vibration of little amplitude so, thereby allow fluid in big open condition current downflow.

Like this, the 6th embodiment's miniature valve 21a can realize flow rate control by the size of controlled angle frequencies omega and amplitude A.The size of angular frequency or amplitude A and the relation between the flow rate are stored among the valve control table 38a of storage area 38 as the amplitude A dr of control waveform and the relation between the frequency f dr.When from the input part 34 when importing, central control section 37 causes Waveform Control part 33 controlling and driving electric currents.

If miniature valve 21a is in closed condition, valve element 23 closely contacts with valve seat 28a with surface tension by propelling force PV so.Because this reason, when miniature valve 21a was activated, even the driving current of target vibration and frequency is applied suddenly, growth (build-up) characteristic when starting was bad.Therefore, shown in Figure 12 B, rising characteristic is improved by the high frequency vibration that only applies scheduled time T when starting.Subsequently, apply the principal oscillation of predetermined angle frequencies omega.This can realize by the control amplitude similarly.

In other words,, can realize apace increasing, and, flow with set rate to allow fluid with after-applied principal oscillation by when starting, only applying the vibration of the large amplitude A of scheduled time T.

In addition, under the controlled situation that flows,, there are situation that needs interrupted flow (TRANSFER BY PULSATING FLOW) and the situation that needs the very little continuous-flow of TRANSFER BY PULSATING FLOW about the flow rate waveform (flow rate figure) that flows.Therefore, if when driving current is set to the electric current of interrupted waveform shown in Figure 12 C, the vibration of piezoelectric element 24 just becomes interrupted vibration.After this, valve element 23 open during, this flows and to become interrupted flowing.On the contrary, under the situation of the Ac of routine, the some parts of the passage of miniature valve 21a is always opened, thereby can obtain stable flow rate, and at this moment, it is very little to pulse.In addition, in flow rate by applying gradually the control waveform that increases and by offsetting subsequently under the situation that it is stabilized, and the little variable-current that superposes thereon, so, valve element 23 can be moved to an offset position.Like this, can shown in Figure 13 C, realize having the continuous-flow of infinitely small pulsation.

As mentioned above, the opening of the 6th embodiment's miniature valve 21a control valve, and control the amplitude A or the angular frequency of piezoelectric element 24 by the control waveform that applies by driver 31, and then realize flow rate control.By applying a large amplitude or high-frequency control waveform, can obtain a big flow rate, can obtain a little flow rate by having the driving current of little amplitude or small frequency simultaneously.In addition, flow the scheduled time and will vibrate greatly and impose on piezoelectric element 24, can improve rising characteristic by the driving current that when starting, allows to have high frequency or large amplitude.

According to the control of the 6th embodiment's valve, the amplitude of valve element 23 can change by being encouraged by piezoelectric element 24, but the size of amplitude is not decided by the amplitude of piezoelectric element 24 self separately.That is, when valve element 23 because vibration and with the opposite direction of back pressure P on when being caused to move upwardly, can form a ratio corresponding to the bigger passage of the passage of the amplitude of piezoelectric element 24, can enlarge maximum flow rate thus, i.e. dynamic range.

The 7th embodiment

Next will describe the 7th embodiment's miniature valve, described miniature valve is used for controlling a plurality of miniature valves individually by superposeing a plurality of frequencies.Accompanying drawing 13A is one and controls the interpretation maps of a plurality of valve cells according to seventh embodiment of the invention individually by the vibration of a plurality of frequencies that described valve cell has different point of resonance separately.Accompanying drawing 13B is one and controls the interpretation maps of a plurality of valve cells according to seventh embodiment of the invention individually by the vibration of a plurality of frequencies that described valve cell is of different sizes separately.Accompanying drawing 13C is that an explanation makes under the situation of valve cell vibration the figure of the opening and closing of a plurality of valve cells in the vibration by the stack ripple.

In accompanying drawing 13A, reference character 21a to 21d represents miniature valve, and its valve body substrate 25 that is formed in the thin slice 21 of equipping valve has different separately natural frequencys.Each miniature valve 21a to 21d is provided with valve body substrate 25, in the vibration angle, and described substrate and separated from one another.Miniature valve 21a to 21d is respectively corresponding to the vibration of different angular frequency a1 to ω a4, and separately individually or resonance side by side.Piezoelectric element 24 is arranged on the side surface of the thin slice 21 of equipping valve, and is provided with the lower surface that a plurality of fluid circuit thin slice main body 22b that are used for measured sensor B and fluid circuit C are laminated on the thin slice 21 of equipment valve.But, preferably, for example, cantilever structure is set, thereby the vibration of piezoelectric element 24 helps the vibration respectively of miniature valve 21a to 21d.

In the 7th embodiment, the pair of L-shaped groove is formed on the both sides of miniature valve 21b and outlet side passage 29, so the Effective face width of miniature valve 21b is reduced.Miniature valve 21c width on the whole forms very for a short time.In addition, the length of miniature valve 21d on flow direction forms very shortly.In addition, a device that is used to change different natural frequencies can be set.

The thin slice 21 of equipment valve is a whole substrate on the whole.When miniature valve 21a to 21d was set in this substrate with said structure, miniature valve 21a to 21d was provided with by mutual different natural frequency.

Shown in Figure 13 C, if be superimposed with the piezoelectric element 24 that the control waveform of one or more angular frequency a1 to ω a4 is allowed to flow through the thin slice 21 of above-mentioned equipment valve on it, and vibrated thus, be opened with these angular frequency a1 to ω a4 resonance and corresponding miniature valve with natural frequency identical among the miniature valve 21a to 21d so with angular frequency a1 to ω a4.Certainly, if among angular frequency a1 to the ω a4 is applied individually, among the miniature valve 21a to 21d is opened so.At this moment, if in conjunction with the control of amplitude A, and amplitude A changes for each miniature valve 21a to 21d, and so, opening of each miniature valve 21a to 21d can be controlled separately.

It should be noted,, under by the alternate manner situation that for example shape, weight and material change by natural frequency, also can obtain the similar operation effect though the situation to cantilever structure is described in the 7th embodiment.

In accompanying drawing 13B, reference character 23A to 23D represents to constitute the valve element of miniature valve 21a to 21d.Reference character 28A to 28D represents the valve chamber of miniature valve 21a to 21d.Reference character 28a to 28d and 28a ^*To 28d ^*Represent manyly to relative valve seat, these valve seats constitute miniature valve 21a to 21d.

Miniature valve 21a to 21d under the situation of accompanying drawing 13B also has different natural frequencys.But the specification of the element of member that can be by changing valve element 23A to 23D, valve chamber 28A to 28D and valve and so on changes natural frequency.For example, can be by the quality of selector valve element 23A to 23D, particularly their concrete weight and shape comprise size, angle Φ etc. are perhaps by changing valve seat 28a to 28d and 28a ^*To 28d ^*Angle θ and their surface roughness with and the surface physics attribute, different natural frequencys is provided.

Shown in Figure 13 C, if be superimposed with the piezoelectric element 24 that the driving current of one or more angular frequency a1 to ω a4 is allowed to flow through the thin slice 21 of above-mentioned equipment valve thereon, and vibrated thus, so, just being opened among these miniature valves 21a to 21d with these angular frequency a1 to ω a4 resonance and corresponding miniature valve with natural frequency identical with angular frequency a1 to ω a4.In conjunction with the control of amplitude A, can realize comprising the interior control that is controlled at of opening by simultaneously individually.

In addition, in the thin slice 21 of equipment valve, an opening F is set at passage one end, so the inside of passage is to atmosphere opening.Therefore, comprise that the thing that fluid from each chamber interior is mixed to the smell of liquid mixture wherein just is released in the air.

The 8th embodiment

The 8th embodiment is the valve control under first little vibrational mode, and under described little vibrational mode, little vibration is applied to miniature valve 21a.The similar of the 8th embodiment's valve element 21a is in the structure shown in the accompanying drawing 8A, thus following will be with reference to the accompanying drawings 8 to 12C, 12A with reference to the accompanying drawings particularly.

In the control of valve under first little vibrational mode, when opening and closing valve, little amplitude vibration particularly has the frequency that is different from principal oscillation and little vibration of amplitude, is applied in individually or by being superimposed upon in the principal oscillation.

The little vibration that is used under first little vibrational mode does not have the power that is enough to open miniature valve 21a size.When the valve that flows through when fluid is closed, only stops the principal oscillation meeting and cause between valve element 23 and valve seat 28a, producing a little affinity ((seatability) is very poor for taking a seat property).That is, can not look to producing wedge effect, promptly when back pressure P was applied to this power on the inclined surface, this power was enhanced by lever principle.On the other hand, when valve is opened, owing to press the propelling force PV of valve element 23, and the surface tension between valve element 23 and valve seat 28a makes its very difficult valve of opening smoothly, very difficult activated valve element 23.

In this 8th embodiment, when little vibration when the down periods are applied in, the affinity between valve element 23 and the valve seat 28a is enhanced, and can improve wedge effect.Therefore, can provide higher pressure resistance.When opening, significantly frictional force is reduced, and can open miniature valve 21a smoothly, allows under high pressure to carry out valve control thus.

In the 6th embodiment's start-up control, can improve rising characteristic by between the starting period, applying the vibration that has high-frequency vibration or have large amplitude A.But under first little vibrational mode of the 8th embodiment, valve is opened under the situation of tension force smoothly not having, rather than improves for example rising characteristic and rapidity.

The 9th embodiment

Valve control in the 9th embodiment is the valve control under second little vibrational mode.

The similar of the 9th embodiment's miniature valve 21a is in the structure shown in the accompanying drawing 12A, thus following will be with reference to the accompanying drawings 8 to 13C, 13A with reference to the accompanying drawings particularly.

The control of valve under second little vibrational mode is such control, and wherein, the vibration with little amplitude is applied in individually, or by being applied in the principal oscillation that is superimposed upon piezoelectric element 24, thereby from passage, degas.In addition, in order to make this degassification more effective, the 9th embodiment's miniature valve 21a is provided with the structure of degassing in passage.Accompanying drawing 14 is cross-sectional views of key component of the structure of degassing of the miniature valve of ninth embodiment of the invention.

Before fluid flow through chamber, a kind of gas normally air was filled in the chamber.Unless this air is discharged from, otherwise be difficult to allow fluid to flow.But if miniature valve 1a is opened fully, and fluid is caused outwards and flows, and so disadvantageously, fluid flows among each inductor B and the fluid circuit C, thereby allows accurate control become very difficult.

Therefore, in the 9th embodiment, the vibration with little amplitude that does not have the power that is enough to open miniature valve 21a is applied in individually or by stack, to degas from chamber.The little vibration of utilization under this second little vibrational mode, air separately between valve element 23 and the valve seat 28a to outflow.When fluid was full of, vibration just was suppressed naturally, and miniature valve 21a then presents closed condition.By realizing that this vibrates slightly, air can be discharged from, but fluid can not be from the gap between valve element 23 and the valve seat 28a to outflow.In addition, by apply vibration for a long time under this second little vibrational mode, the front end of fluid just outwards oozes out from the gap between valve element 23 and the valve seat 28a, can cause that thus liquid head comes out.Like this, when start-up control, can make the time point of startup accurate, thereby allow high-precision control.

It should be noted, the structure of degassing can be set, as shown in figure 14 in the passage of miniature valve 21a.In accompanying drawing 14, reference character 22c represents outlet side reservoir part, and described memory portion has one and is used for preserving the reservoir D to the fluid of outflow from miniature valve 21a.Gas of reference character 39 expressions, described gas is made with for example polyethylene and polypropylene etc., and it allows the gas infiltration to pass, but not allowing liquid to penetrate passes.Reference character 40 expressions are arranged on the passage of the fluid circuit C among the fluid circuit thin slice main body 22b.

In accompanying drawing 14, the fluid that outwards flows from the outlet port that is connected to passage 40 is stored in the reservoir D provisionally.Gas 39 is set up by this way, promptly will cover this reservoir D.Because reservoir D is covered by this gas 39, the gas under second little vibrational mode is discharged situation and just can be reinforced.In addition, because cover the outlet side that gas 39 of reservoir D is set at miniature valve 21a, so the air in the downstream side that air may accumulate can be discharged to the outside.It should be noted, replace gas, also can obtain similar effects by forming micropore.Another kind of substrate etc. can be laminated on gas 39.

In addition, be used at the 9th embodiment's miniature valve 21a under the situation of the fluid circuit thin slice that is used for handling bacterium, if but gas 39 is formed a film that transmits air do not transmit liquid and bacterium, liquid and bacterium can provide a secure flows body loop thin slice that is used for biological processes so, because can not leak into the outside.

The tenth embodiment

The tenth embodiment's valve control is complementary control, is used for carrying out effectively the 9th embodiment's valve control, comes out to cause liquid head.Accompanying drawing 15A explains when valve control according to tenth embodiment of the invention to be performed the figure that first head comes out to survey when coming out with the realization head.Accompanying drawing 15B explains when valve control according to tenth embodiment of the invention to be performed the figure that second head comes out to survey when coming out with the realization head.

In accompanying drawing 15A, reference character 41 expressions are used for the vibration detecting device of detection threshold vibration.Be used to survey the MIC microphone of sound, be arranged on valve seat 28a or 28a ^*Position X on piezoelectric element or the like all suitable for vibration detecting device 41.Vibration detecting device 41 can be the device that is suitable for surveying the variation in electric field or the magnetic field.When being full of liquid (shown in Figure 15 A time) state from the state transitions of gas vibration to hydraulic vibration and the passage, vibration detecting device 41 detects the variation in the vibration.It should be noted that the position that head comes out to survey can be set in the position Y that is positioned at X downstream, position a little, thereby survey the position that leakage takes place.Come out under the situation that position X is detected at head, liquid feeding validity is improved, even and come out interference after-applied at head, can not leak yet.But, come out under the situation that position Y is detected at head, when having started the motion of liquid after head comes out, liquid can move very smoothly, so liquid feeding validity becomes higher.If it is separable that vibration detecting device 41 is made into, when other member of miniature valve 21a and fluid control chip was replaced, vibration detecting device 41 can utilize again so.

In accompanying drawing 15B, reference character 42a represents light emitting element, and reference character 43b represents light receiving elements.Received by light receiving elements 42b from the light of light emitting element 42a emission.Specifically, the optical tarnsmission of liquid and air can be detected, to survey coming out of head.As an alternative, the change of refractive of liquid and air or be transmitted into valve seat 28a and can be by light receiving elements 42b detection (not having display light receiving element 42b the figure) from the variation of the reflection of light rate of valve seat 28a reflection.Detection can realize in the mode identical with aforesaid way in arbitrary position among position X and the Y.If it is separable that light emitting devices 42a and light receiving elements 42b are made into, when other member of miniature valve 21a and fluid control chip was replaced, they can utilize again so.

The 11 embodiment

The 11 embodiment's miniature valve 21a is used for carrying out effectively valve control, and is used for surveying flow rate and physical property, with the accuracy that improves liquid feeding accuracy and analyze by thin slice.The figure that accompanying drawing 16A flow rate that is an explanation on the vibration basis and physical property are surveyed according to eleventh embodiment of the invention.Accompanying drawing 16B is the figure according to eleventh embodiment of the invention that an explanation flow rate and physical property on the basis of intensity variation are surveyed.Accompanying drawing 16C is the figure according to eleventh embodiment of the invention that an explanation is surveyed physical property on the basis of valve vibration.

In accompanying drawing 16A, reference character 43 expression is used for surveying the vibration detecting device of valve element 23 vibrations of miniature valve 21a.Flow of liquid is crossed valve chamber 28 and is surveyed by vibration detecting device 43, and flow rate and physical property are surveyed from its valve vibration characteristics.Shown in Figure 16 A, the valve vibration of moving at the liquid of time point T1 is detected, and at time point T2 and time point T3, the valve vibration further is repeated to survey.If the curve of this variation and this moment temperature be known, can calculate viscosity and flow rate so, and by the use this can recognition material as a clue.

Next, shown in Figure 16 B, reference character 44a represents that one is used for launching light surveying the light emitting element of flow rate and physical property, and reference character 44b represents to be used for receiving the light receiving elements from the light of light emitting element 44a.The intensity variation that takes place when fluid flows through valve chamber 28 is detected by light receiving elements 44b, and flow rate and physical property are determined from its intensity variation characteristic.Shown in Figure 16 B, the light intensity that moves at the fluid of time point T1 is detected, and at time point T2 and time point T3, light intensity further is repeated to survey.If the curve of this variation and temperature at that time are known, can calculate viscosity and flow rate so, and by using this can recognition material as a clue.

As an alternative, when flow of fluid, flow rate and physical property can be determined on the basis that is set at the predetermined transit time of fluid that two locational sniffer (not shown)s detect.In this case, light detection device etc. can be used as sniffer, but sniffer is not subjected to special restriction.Preferably, if detecting location is arranged in two positions that are positioned at chamber 8 inlet side upstreams, the control of the valve in downstream chamber 28 is just easy so.

Determine that by measurement time the structure of physical property is described to being used for above, but physical property can be determined from the relation of input and output.In accompanying drawing 16C, note 45a in accompanying drawing border represents for example piezoelectric element etc. of an exciting bank, and reference character 45b represents that one is used for by surveyed the vibration detecting device of the vibration that occurs in valve element 23 by the vibration of exciting bank 45a input.It should be noted that vibration detecting device 45b is suitable for surveying the variation in the vibration.If in this relation of input and output, consider temperature and similar factor, can come recognition material from the viscosity and the similar characteristics of liquid so.In order automatically to realize this identification to material, the relation between vibration input and vibration detecting value or the vibration change detection value, and make from the temperature recognition material and become possible physical property table, with valve control table 38a, be arranged in advance in the storage area 38.The state detection device involving vibrations sniffer 43 of eleventh embodiment of the invention, light emitting element 44a, light receiving elements 44b and vibration detecting device 45b.If it is separable that this state detection device is made into, when other member of miniature valve 21a and fluid control chip was replaced, this state detection device just can utilize again so.

In the 11 embodiment, because physical property is determined, and flow rate is detected, so improved the accuracy of liquid feeding and/or the accuracy of analysis.

The 12 embodiment

In the 12 embodiment's miniature valve 21a, in the assembly of piezoelectric element 24, designed a kind of measurer, to improve the accuracy of valve control.Accompanying drawing 17A is the interpretation maps according to first assembly of the valve cell of twelveth embodiment of the invention and piezoelectric element.Accompanying drawing 17B is the interpretation maps according to second assembly of the valve cell of twelveth embodiment of the invention and piezoelectric element.

When the thin slice 21 of equipment valve was replaced, piezoelectric element 24 need be removed and be installed on the thin slice 21 of a new equipment valve.At this moment, the flow direction of miniature valve 21a need be perpendicular to piezoelectric element 24.Therefore, piezoelectric element 24 must first and foremost be installed on the side surface of the thin slice 21 of equipping valve exactly, and perpendicular.In its assembling process, its assembling process requires the micron order degree of accuracy.For the user of miniature valve 21a, realize when replacing thin slice that this assembling is very difficult.

In accompanying drawing 17A and 17B, reference character 46 expressions are used for fixing the fixed component of piezoelectric element 24.Reference character 46a represents a guide that is formed on the fixed component 46.Shown in Figure 17 A, the installation surface of fixed component 46 forms extension and the shrinkage direction that is parallel to piezoelectric element 24 exactly, and perpendicular to extending and the reference line of shrinkage direction is formed on crestal line or plane, for example, each in two parallel side of rectangular parallelepiped protrusion part.At this moment, two of the thin slice 21 of equipment valve last lower planes also form parallel plane exactly.In addition, shown in Figure 17 B, guide 46a is arranged on the fixed component 46, and these guides 46a make perpendicular to extend and the direction of shrinkage direction on the thin slice 21 of equipping valve be installed exactly become possibility.It should be noted that the thin slice 21 of fixed component 46 and equipment valve is preferably made and can be taken apart each other.

Utilize the 12 embodiment's miniature valve 21a, the assembling of piezoelectric element 24 can be from realizing perpendicular to the extension of piezoelectric element 24 and the direction of shrinkage direction.That is, the reference line that piezoelectric element 24 can be by setting fixed component 46 is to the reference line (flow direction) of the thin slice 21 of equipment valve, and the Vertical direction from the following or upper surface of the thin slice 21 of equipment valve is arranged on the installation surface of fixed component 46.In this case, because surface contact, and because just make reference line consistent each other, assembling process is extremely easy, and is assembled into possibility under the prerequisite of not introducing the micron order assembly error.

At this moment, if assembling is embodied as, the center of gravity of the thin slice 21 of the extension of piezoelectric element 24 and shrinkage front and equipment valve intersects, and the vibration distribution of equipping so in the thin slice 21 of valve just can be more near even distribution.In addition, similarly, if the fixed component of piezoelectric element 24 46 is made by high hardness material, and the thin slice 21 of equipment valve is fixed on the position of three or more, if valve cell is fixed on one by in these fixed position area surrounded, even the hardness of fluid control chip is very little so, the vibration distribution in the thin slice 21 of equipment valve also can be even.

According to this embodiment's valve cell, can be by changing the frequency and/or the amplitude of vibration, quick adjustment opening.In addition, control easily and accurately, dynamic range broadens, and pulsation diminishes, and response is very fast.

Because exciting bank is a piezoelectric element, so control can easily realize.Because exciting bank and/or driver can separate, so when the member of valve cell was replaced, exciting bank and/or driver can utilize again.

Because vibration is to be applied on the direction perpendicular to fluid flow direction, so can farthest utilize oscillating component.

In addition, vibration applies by change frequency when changing flow rate, in scheduled frequency range, and when closing, the process of motivation is to utilize the outer frequency of frequency range to be implemented or to be stopped.Therefore, only, just can realize the control of the opening and closing of valve cell simply by selecting frequency.By making it, can increase and the flow rate increase by control frequency equably corresponding to each other.

Similarly, only, just can realize the control of the opening and closing of valve cell simply by selecting amplitude.By making it, can control amplitude increase and flow rate increase equably corresponding to each other.

Because realize the frequency of excitation or frequency or the amplitude that amplitude is higher than the principal oscillation in frequency range, thus can obtain fast to increase, and can steadily apply principal oscillation subsequently.

Because change vibration, can produce continuous-flow and/or interrupted flowing, so it is obtained that pulsation and continuous-flow can be used as a kind of form of Waveform Control by exciting bank.In addition, because before opening and in the predetermined period afterwards, applied and had the frequency that can reduce contact friction force between valve element and the chamber inner wall and the vibration of amplitude, so can reduce the frictional force between valve element and the valve seat.Like this, even pressure is enhanced, also can open valve cell reposefully.

Before closing and in the predetermined period afterwards, applied and had the frequency that can reduce contact friction force between valve element and the chamber inner wall and the vibration of amplitude.Therefore, when applying little vibration, can increase the affinity (affinity) between valve element and the valve seat, can improve wedge effect, and the high pressure resistance can be provided in the down periods.

In the predetermined period of a time point of a time point before opening after closing outlet, applied and had the frequency that can reduce contact friction force between valve element and the chamber inner wall and the vibration of amplitude.Therefore, even pressure is enhanced, valve cell also can be opened reposefully, and can close reliably.

Because the frequency that superposeed and amplitude are different from the frequency of principal oscillation and the vibration of amplitude, so even pressure is enhanced, valve cell also can open and close reposefully.

When in the chamber during full of liquid, if vibration be applied in from outlet discharge gas and do not allow liquid from chamber to outflow, so, have only air through the very little gap that between valve element and valve seat, forms because of little vibration to outflow.In addition, when liquid was full of, the vibration nature just was suppressed.Subsequently, valve cell is set at closed condition, but liquid that can not between valve element and the valve seat to outflow.

A gaseous emission partly is set in the passage of downstream side, liquid that can not infiltration it, and have only the gas infiltration it and be discharged from.Therefore, the liquid that can not in inside leaks into the outside, and can prevent that gas in the passage is compressed and hinders fluid to move.

Be set up because be used to survey the head of the fluid header sniffer that comes out, so can survey the head of fluid.Therefore, fluid feeding degree of accuracy is improved, even and surveying interference after-applied, leak of liquid can not take place.

Sniffer is set on the position that is positioned at chamber outlet downstream because head comes out, so the head of fluid can be detected, so fluid feeding degree of accuracy is improved, and after detection, fluid can be fed reposefully.

Sniffer is vibration detecting device or light detection device because head comes out, so fluid header even also can survey exactly on the non-contact basis.

Because the head sniffer is separable, so when the member of valve cell was replaced, the head sniffer that comes out can reuse.Survey because the physical property of fluid or speed are the change of state from the chamber that is detected by the state detection device, survey so the change of state in the chamber waits by vibration detecting, light detection.The physical property of fluid or speed can be surveyed from change of state and the detect cycle surveyed.Physical property also can be by providing the device that is used for applying change of state and surveying by surveying as the change of state of the response of predetermined input.

Because the state detection device is the vibration detecting device that is used for surveying vibration, or light detection device, so fluid header even can on the non-contact basis, survey exactly.

Because the state detection device is separable, so when the member of valve cell was replaced, the state detection device can reuse.

When valve cell was controlled, the valve control data can be regulated from speed and the physical property surveyed, so the degree of accuracy in the valve control can improve.Valve control table in the storage area can be updated, so the degree of accuracy in the valve control can be enhanced.

Utilize common actuator come to chamber width be several microns miniature valves to the hundreds of micron control be very the difficulty, but control can be provided simply.

In addition, because sniffer is provided for measuring the transmission time of two fluids between the point, be flow rate so can survey the speed of fluid.At this sniffer is under the situation of light detection device, and measurement can realize on the non-contact basis.Because sniffer is set on the position in chamber inlet downstream, so the control of the valve of downstream side chamber is easy to.State in chamber and the passage changes and is detected, and the physical property of fluid or speed can be surveyed from the change of state and the detect cycle that detect.Because sniffer is separable, so when the member of valve cell was replaced, sniffer can reuse.

In addition, according to this embodiment's fluid control chip, controlling object can be simply determines from a plurality of valve cells, and can be by the single exciting bank of independent use, come freely to control respectively by frequency of utilization.Be applied to each valve cell that to control because have the vibration that changes amplitude, so can regulate opening apace by changing amplitude.In addition, control easily and accurately, dynamic range broadens, and pulsation diminishes, and response is very fast.

Comprise that natural frequency that the presumptive area of substrate of the equipment valve of at least one valve cell has is different from the natural frequency in zone of the substrate of the equipment valve that comprises other valve cell.Therefore, controlling object can be simply determines from a plurality of zones of the substrate of equipment valve, and can be by the single exciting bank of independent use, come freely to control respectively by frequency of utilization.

Because the quality of valve element, shape, proportion and surface roughness, and the shape of chamber and surface roughness at least one be changed, so natural vibration can change simply.Natural vibration can be changed under the situation of substrate of for example not dividing the equipment valve and intensity reduction.

Provide to have a fixed component that is parallel to the surface of direction of vibration, and the substrate of equipment valve is installed on the installation surface of fixed component.Therefore, anyone can easily carry out the suprabasil operation that exciting bank is assembled into the equipment valve.Because fixed component can separate each other with the substrate of equipment valve, so when the substrate of equipment valve of replacement fluid control chip, the user can repeatedly be utilized exciting bank, so the structure very economical.

The frequency or the amplitude of vibration are changed, and the amplitude of valve element changes by the vibration that changes, to change the opening/closing state or the opening degree of outlet.Therefore, opening can be regulated apace by the frequency and/or the amplitude that change vibration.In addition, control easily and accurately, dynamic range broadens, and pulsation diminishes, and response is very fast.

By in scheduled frequency range, changing frequency, apply vibration, and when closing, utilize the outer frequency of frequency range to realize or stop excitation.Therefore, the control of the opening and closing of valve cell can be only by selecting frequency to realize simply.

By in the predetermined amplitude scope, changing amplitude, apply vibration, and when closing, utilize the outer amplitude of amplitude range to realize or stop excitation.Therefore, the control of the opening and closing of valve cell can be only by selecting amplitude to realize simply.

A plurality of miniature valves are set in the substrate of equipment valve by this way, and are promptly separated from one another in the vibration angle, thereby different natural frequency mutually is provided.Therefore, controlling object can be simply determines from a plurality of valve cells, and can be by the single exciting bank of independent use, come freely to control respectively by frequency of utilization.

Because the position of centre of gravity of the direction of vibration of exciting bank and the main structure body that comprises the substrate of equipping valve at least is consistent each other, so that the vibration distribution in the fluid control chip becomes is even.

Because have be used for will the equipment valve substrate be fixed to three or more fixed position of holding member, so even the hardness of fluid control chip is very little, the distribution of vibration also can become even by supported at three point.

Because the substrate of equipment valve can separate, so when the member of fluid control chip was replaced, holding member can reuse.Because vibration is to be applied in from the direction perpendicular to the fluid flow direction the chamber, so can farthest utilize oscillating component.In addition, it is obtained that pulsation and continuous-flow can be used as a kind of form of Waveform Control.

On the basis of above-mentioned technology, can carry out many corrections and variation to the present invention.Therefore it being understood that within the scope of the present invention the present invention can be implemented in the mode except that top specifically described content.

Claims (44)

1. valve cell comprises:

Chamber with fluid input and outlet;

A valve element that is contained in the described chamber,

Wherein, an incline section is set at the outlet port, and

When the state that is positioned at described incline section and closes described outlet because of the hydrodynamic pressure in the described chamber at described valve element when described chamber was subjected to vibrating, described valve element moved with respect to described incline section, and described outlet is opened.

2. valve cell according to claim 1, wherein, when described chamber was subjected to vibrating, described valve element slided on described incline section, and described outlet simultaneously is opened.

3. valve cell according to claim 1, wherein, when described chamber was subjected to vibrating, described valve element jumped up from described incline section, and described outlet simultaneously is opened.

4. valve cell according to claim 1, wherein, the shape of described valve element one end is any in wedge shape, sphere and the taper shape.

5. valve cell according to claim 1, wherein,

The shape of each end in the described valve element two ends is any in wedge shape, sphere and the taper shape,

Described inlet and described outlet port at described chamber form an incline section, and described incline section contacts with described valve element.

6. valve cell according to claim 1, wherein,

The shape of described valve element is spherical,

Be formed on the angle that angle that the described incline section of described chamber inlet side constitutes constitutes less than the described incline section that is formed on described chamber outlet side.

7. valve cell according to claim 1, wherein,

Shape of each end of described valve element be in wedge shape and the taper shape any, the drift angle of described valve element input side one end is less than the drift angle of its outlet side one end, and

Be formed on the angle that angle that the incline section of described chamber inlet side constitutes constitutes less than the described incline section that is formed on described chamber outlet side.

8. valve cell according to claim 1 also comprises: a valve element advancing means that is used for advancing described valve element towards the described outlet of described chamber,

9. valve cell according to claim 8, wherein, any one is to be made by magnetic material in described valve element advancing means and the described valve element, and is subjected among both the attraction of other one magnetive attraction.

10. valve cell according to claim 8, wherein, described valve element advancing means is one of in propelling spring and the elasticity projecting block.

11. valve cell according to claim 1 wherein, forms continuous-flow and/or interrupted flowing from the variation that flows through vibration of the fluid of described outlet.

12. valve cell according to claim 1 wherein, by vibrating described chamber to change frequency at the scheduled frequency range that is used for moving described valve element, is changed from the flow rate of the fluid of described outlet.

13. valve cell according to claim 12, wherein, by stopping the vibration of described chamber, perhaps by utilizing the frequency outside scheduled frequency range to vibrate, described outlet is closed.

14. valve cell according to claim 1, wherein, by in the predetermined amplitude scope that can move described valve element, change amplitude, and by the described chamber of vibration, be changed from the flow rate of the fluid of described outlet.

15. valve cell according to claim 14 wherein, by stopping the vibration of described chamber, perhaps vibrates at the extraneous amplitude of predetermined amplitude by utilizing, described outlet is closed.

16. valve cell according to claim 1, wherein, before opening described outlet and in the predetermined period afterwards by described valve element, the described chamber of frequency vibration that is higher than the principal oscillation frequency in frequency range by utilization, the described chamber of amplitude vibration that perhaps is higher than the principal oscillation amplitude in amplitude range by utilization promotes moving of described valve element.

17. valve cell according to claim 1, wherein, before opening described outlet and in the predetermined period afterwards,, reduce the contact friction force between described valve element and the described chamber inner wall by applying vibration with preset frequency and amplitude by described valve element.

18. valve cell according to claim 1, wherein, before closing described outlet and in the predetermined period afterwards, apply vibration, reduce the contact friction force between described valve element and the described chamber inner wall with preset frequency and amplitude by giving described chamber by described valve element.

19. a valve cell comprises:

Chamber with fluid input and outlet;

A valve element that is contained in the described chamber; With

A sniffer that is used for measuring the transit time between two points of fluid in passage, described passage comprises described chamber and leads to described inlet and described outlet.

20. valve cell according to claim 19, wherein, described sniffer is disposed on the position that is positioned at the described inlet of described chamber upstream.

21. valve cell according to claim 19, wherein, one is definite by described sniffer in flow rate of fluid and the physical property.

22. valve cell according to claim 19, wherein, described sniffer is separable.

23. a valve cell comprises:

Chamber with fluid input and outlet; With

A valve element that is contained in the described chamber;

Wherein, when the frequency of the vibration that is applied to described chamber and/or amplitude are changed, one of opening/closing state of described outlet with and opening degree be changed, and the amplitude of described valve element changes by the vibration that changes.

24. valve cell according to claim 23 also comprises: a described outlet towards described chamber advances the valve element advancing means of described valve element.

25. valve cell according to claim 23, wherein: any one is to be made by magnetic material in described valve element advancing means and the described valve element, and is subjected among both the attraction of other one magnetive attraction.

26. a valve cell comprises:

Chamber with fluid input and outlet;

A valve element that is contained in the described chamber; With

An exciting bank that is used for vibrating described chamber,

Wherein, an incline section is set at described outlet port, and the state that is positioned at described incline section at described valve element because of the hydrodynamic pressure in the described chamber when described chamber is vibrated and by by the vibration of described exciting bank when mobile, described valve element moves with respect to described incline section, and described outlet is opened.

27. valve cell according to claim 26, wherein, described exciting bank described chamber of vibration on perpendicular to the direction of the flow direction of fluid.

28. valve cell according to claim 26, wherein, described exciting bank can separate with respect to described chamber.

29. valve cell according to claim 26, wherein, described exciting bank has a driver that is used for producing control (vibration) waveform.

30. a valve cell comprises:

Chamber with fluid input and outlet;

A valve element that is contained in the described chamber;

Be used for vibrating the exciting bank of described chamber; With

A driver that is used for driving described exciting bank, described valve element are adapted to pass through by described exciting bank and vibrate the described outlet that opens and closes described chamber,

Wherein, be applied to the frequency and/or the amplitude of the vibration of described chamber by change, and by changing the amplitude of described valve element by means of the vibration that changes, described exciting bank change one of opening/closing state of described outlet with and extent of opening.

31. valve cell according to claim 30, wherein, by the variation of vibration, from the mobile formation continuous-flow and/or interrupted the flowing of the fluid of described outlet.

32. valve cell according to claim 30, wherein, described exciting bank can separate with one of described driver.

33. valve cell according to claim 30, wherein, described exciting bank superposes in principal oscillation one and has the frequency that is different from principal oscillation and the vibration of frequency of amplitude and amplitude.

34. valve cell according to claim 30, wherein, described exciting bank applies a kind of like this vibration, that is, gas is not released from described outlet, and when being full of fluid in the described chamber, fluid can not emitted in described chamber.

35. valve cell according to claim 30, wherein, gaseous emission partly is set in the downstream side passage of described chamber, thereby liquid that can not penetrates described gaseous emission part, and has only gas to penetrate described gaseous emission part, and is emitted.

36. valve cell according to claim 30 also comprises: the head sniffer that comes out, be used for when described chamber is full of fluid, survey the head of fluid.

37. valve cell according to claim 36, wherein, the described head sniffer that comes out is arranged on the position that is positioned at the described outlet of described chamber downstream.

38. valve cell according to claim 36, wherein, the described head sniffer that comes out is based on one of device of vibration detecting device and light detection device.

39. valve cell according to claim 36, wherein, the described head sniffer that comes out can separate.

40. valve cell according to claim 30, also comprise, a state detection device, be used for when described chamber is full of fluid, surveying the change of state in the described chamber, and the change of state from the described chamber that detects by described state detection device, one of the physical property of detection fluid and flow velocity.

41. according to the described valve cell of claim 40, wherein, described state detection device is one of to be used for surveying in the vibration detecting device of vibration and the light detection device.

42. according to the described valve cell of claim 40, wherein, described state detection device can separate.

43. valve cell according to claim 30, wherein, described driver has a control section, be used for controlling the drive waveforms of described exciting bank, and the basic adjusted valve control data of described control section one of in flow rate of fluid that detects by described state detection device and physical property.

44. valve cell according to claim 30, wherein, described chamber is the chamber with a miniature valve, and the width of described chamber arrives in the scope of hundreds of micron at several microns.

Images