CN1709691A - Mould release membrance, and its preparing process and equipment - Google Patents
Mould release membrance, and its preparing process and equipment Download PDFInfo
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- CN1709691A CN1709691A CN 200510040841 CN200510040841A CN1709691A CN 1709691 A CN1709691 A CN 1709691A CN 200510040841 CN200510040841 CN 200510040841 CN 200510040841 A CN200510040841 A CN 200510040841A CN 1709691 A CN1709691 A CN 1709691A
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Abstract
The present invention provides a separative film, the technology and the equipment. It can deposit a flat solid sediment of fluorocarbon on the face of the film, and this technology is steady. Because the acting material is the solid sediment of fluorocarbon, although at high temperature, this film can keep steady-going and it has the resistance from inorganic and organic chemistry, and make the detached produce with the mould easily to suit to the stability at high temperature.
Description
Technical field
The present invention relates to a kind of mould release membrance and manufacture craft thereof and equipment.
Background technology
Circuit board manufacturing at present, electronic assemblies are with adhesive sticker, resin cast, car surface spraying industry, and portion uses mould release membrance in a large number, and to this kind film, general requirement is to be that 120～200 ℃, pressure are for from the normal pressure to 40kg/cm in temperature
2Physicochemical environment under, require this film and the goods that covered not to cohere.Present a kind of method is to adopt polytetrafluoroethylene film, and polytetrafluoroethylene film costs an arm and a leg: another kind of method is to adopt at the surface-coated fluid, fluorine-containing of film or the technology of silicon-containing surfactant to make mould release membrance, although its cost is lower, there is following defective in this technology:
1,, moves to the problem that goods pollution that product surface causes and product properties are affected so exist in use because of liquid surfactant because there is liquid surfactant in film surface;
2,,, thereby cause the mould release membrance unstable properties so when carrying, cut, store and using, the liquid surfactant of film surface is easily because of being adsorbed by other material or bump to wipe away and lose because what play demoulding effect is liquid surfactant.
Summary of the invention
The object of the invention provides a kind of mould release membrance and manufacture craft and equipment, and its process stabilizing is reliable, and the surface property of mould release membrance under hot conditions is stable, anti-inorganic and the organic chemistry erosion performance is good.
Technical scheme of the present invention is: a kind of mould release membrance, comprise thin layer, and it also comprises the solid fluorine carbon sedimentary deposit at least one side surface that is deposited on described thin layer.
A kind of making apparatus of mould release membrance, it comprises the plasma treatment chamber, the material retractable control chamber, be provided with baffle plate between described plasma treatment chamber and the material retractable control chamber, having slit on this baffle plate passes for film, be provided with first group of sparking electrode in the described plasma treatment chamber, second group of sparking electrode, live-roller, make that film can be by passing through between first group of sparking electrode and second group of sparking electrode, described first group of sparking electrode, second group of sparking electrode respectively with first terminals of high-frequency ac power, second terminals are connected, in the plasma treatment chamber, to produce glow discharge, produce plasma, have inlet channel and bleed-off passage on the plasma treatment chamber wall in described plasma treatment chamber, described inlet channel is connected with source of the gas, and bleed-off passage and vacuum source are connected.
A kind of manufacture craft of mould release membrance, the plasma treatment chamber is vacuumized, in described plasma treatment chamber, feed fluorocarbon gas, first sparking electrode in the plasma treatment chamber, second sparking electrode are connected high-frequency ac power, discharge and generation plasma between two sparking electrodes, pending film makes solid fluorine carbon sedimentary deposit be deposited at least one side surface of film through the gap between described two sparking electrodes.
The present invention compared with prior art, has following advantage: can form one deck solid fluorine carbon sedimentary deposit at film surface, its process stabilizing is reliable, the mountain is a solid fluorine carbon sedimentary deposit in release effect, so the mould release membrance surface property is stable, anti-inorganic and the organic chemistry erosion performance is good under the hot conditions.
Description of drawings
Accompanying drawing 1 is looked schematic diagram for the master of the making apparatus of mould release membrance of the present invention;
Accompanying drawing 2 is the cutaway view of the A-A direction in the accompanying drawing 1;
Accompanying drawing 3 is the schematic diagram of high-frequency ac power;
Accompanying drawing 4 is the main cutaway view of mould release membrance of the present invention;
Wherein: 1, emptying roller; 2, material receiving roller; 3, the roller that tests the speed; 4, baffle plate; 5, inlet channel; 6, bleed-off passage; 7, first group of sparking electrode; 8, live-roller; 9, slit; 10, slit; 11, source of the gas; 12, outer coupled poles; 13, vavuum pump; 14, high-frequency ac power; 15, outer magnet; 16, inner magnet; 17, cage; 18, decelerator; 19, power source; 20, interior coupled poles; 21, chamber walls; 22, power transmission shaft; 23, static seal device; 24, plasma treatment chamber wall; 25, material retractable control chamber wall; 26, magnetic drive device; 27, first terminals; 28, second terminals; 29, second group of sparking electrode; 30, thin layer; 31, solid fluorine carbon sedimentary deposit; 32, plasma treatment chamber; 33, material retractable control chamber;
The specific embodiment
Referring to accompanying drawing 4, a kind of mould release membrance, comprise thin layer 30, described thin layer 30 is a kind of in polyester film, nylon film, polypropylene film, the polycarbonate film, and this mould release membrance also comprises the solid fluorine carbon sedimentary deposit 31 at least one side surface that is deposited on described thin layer 30.The thickness of described thin layer 30 is 10～200 microns, and the thickness of described solid fluorine carbon sedimentary deposit 31 is 0.01～1 micron.Because what play anti-glutinous effect is solid fluorine carbon sedimentary deposit 31, thus under the hot conditions mould release membrance surface property stablize, anti-inorganic and the organic chemistry erosion performance is good.
Referring to accompanying drawing 1-accompanying drawing 3, a kind of making apparatus of mould release membrance, it comprises plasma treatment chamber 32, material retractable control chamber 33, is provided with baffle plate 4 between described plasma treatment chamber 32 and the material retractable control chamber 33, has slit 9, slit 10 on this baffle plate 4 and passes for film.
Be provided with first group of sparking electrode 7, second group of sparking electrode 29, live-roller 8 in the described plasma treatment chamber 32, described first group of sparking electrode 7, second group of sparking electrode 29 have multi-disc respectively, described first group of sparking electrode 7 and second group of sparking electrode 29 each sheet are provided with at intervals, described live-roller 8 has a plurality of, and film can be passed through by the gap between first group of sparking electrode 7 and the second group of sparking electrode 29.Described first group of sparking electrode 7, second group of sparking electrode 29 are connected with first terminals 27, second terminals 28 of high-frequency ac power 14 respectively, to produce glow discharge in plasma treatment chamber 32, produce plasma.Have inlet channel 5 and bleed-off passage 6 on the plasma treatment chamber wall 24 in described plasma treatment chamber 32, described inlet channel 5 is connected with source of the gas 11, bleed-off passage 6 and vacuum source 13 are connected, and make plasma treatment chamber wall 24 and material retractable control chamber wall 25 form and keep vacuum environment.
Be provided with emptying roller 1, material receiving roller 2 in the described material retractable control chamber 33, described material receiving roller 2 is in transmission connection with power source 19 mutually by magnetic drive device 26.Described magnetic drive device 26 comprises outer magnet 15, inner magnet 16, described outer magnet 15 is provided with outer coupled poles 12, described inner magnet 16 is provided with interior coupled poles 20, be provided with cage 17 between described outer magnet 15, the inner magnet 16, be connected with decelerator 18 mutually on the described inner magnet 16, be connected with power transmission shaft 22 on the described decelerator 18, in described emptying roller 1, the material receiving roller 2 at least one is in transmission connection mutually with described power transmission shaft 22, and described outer magnet 15 is in transmission connection mutually with described power source 19.
Referring to accompanying drawing 1-accompanying drawing 4, plasma treatment chamber 32 is vacuumized, in plasma treatment chamber 32, reach after the vacuum that satisfies the vacuum requirement, feed fluorocarbon gas in described plasma treatment chamber 32, described fluorocarbon gas is at least a or two above mixtures in carbon tetrafluoride, perfluoroethane, tetrafluoroethene, the hexafluoropropene.First group of sparking electrode in the plasma treatment chamber 32 7, second group of sparking electrode 29 are connected high-frequency ac powers 14, produce glow discharge between two sparking electrodes and produce plasma, the composition of plasma depends on from the gas componant of inlet channel 5 inputs.Inlet channel 5 is connected with control set for adjusting through mass flowmenter with source of the gas 11 or gas generating unit, and the gas of composition and stability of flow is provided in plasma treatment chamber wall 24.Pending film makes solid fluorine carbon sedimentary deposit 31 be deposited at least one side surface of film through the gap between described two sparking electrodes.
The plasma that in plasma treatment chamber 32, gas is discharged and produce, can produce the active fluorine carbon component that much contains free radical, this fluorine carbon active component carries out grafting and polymerisation at film surface, generate a kind of very thin fluorine carbon film, glow discharge in the plasma treatment chamber 32 is except generation contains the active fluorine carbon component of free radical, also generate other as foreign gases such as hydrogen fluoride, these foreign gases are extracted out via vacuum source 13.
When in described plasma treatment chamber 32, feeding fluorocarbon gas, also feed the gas that participates in assistant depositing, the gas of described participation assistant depositing adopts hydrocarbon substance or carbon oxygen species, be generally one or more the mixture in methane, carbon dioxide, acetylene, the hydrogen, and the gas componant of assistant chemical vapor deposition not necessarily.Shared volume ratio is 99%～30% in the gas of described fluorocarbon gas in feeding plasma treatment chamber 32, and shared volume ratio is 1～70% in the gas of the gas of described participation assistant depositing in feeding plasma treatment chamber 32.
In plasma treatment chamber 32 surface treatment of film being remained on air pressure is that 5～100 handkerchiefs, temperature are to carry out under 10～180 ℃ the condition, and the processing time is 30～600 seconds.
In material retractable control chamber 33, put on pending film on the emptying roller 1, film passes from slit 9 through the roller 3 that tests the speed, enter carry out surface treatment in the plasma treatment chamber 32 after, from rollback on the slit 10 to material receiving roller 2.The roller 3 that tests the speed provides the linear velocity signal of film to power source 19, makes the power source can governing speed and stablize the speed of material receiving roller 2, emptying roller 1.
Emptying roller 1, material receiving roller 2 are if adopt the shaft drive that directly passes material retractable control chamber 33 that power is provided, and then a place that contacts with material retractable control chamber wall 25 needs sealing, and this position is easy to take place the problem that dynamic seal (packing) was lost efficacy.And magnetic drive device 26 belongs to contactless conveyer, magnetic drive device 26 in the making apparatus of the present invention is except the function with buffering absorbing, its maximum characteristics are that he can be with inner magnet 16 and power transmission shaft 22 complete closed, under the situation that does not have the machinery contact, by magnetic force coupling the output kinetic energy of power source 19 is passed to power transmission shaft 22, and change dynamic seal (packing) into reliable and stable static sealing, thoroughly solved axle dynamic seal (packing) ageing failure and the leakage problem that causes.
Whole production step and technology controlling and process
With reference to shown in Figure 1, open vacuum source 13, when vacuum is extracted into 3.0 handkerchiefs or when lower, feed plasma working gas (gaseous mixtures of above-mentioned one or more gases), working gas is fed plasma treatment chamber 32 with big flow velocity, after 30 seconds,, the working gas pressure of treatment region is fixed on the numerical value that needs by the quality of regulation flowmeter.First group of sparking electrode 7, second group of sparking electrode 29 are connected high-frequency ac powers 14 and discharged, by regulating high-frequency ac power 14, thereby parameters such as discharge power are fixed on the numerical value that needs.Pending web-like plastic sheeting is fixed on the blowing rod 1, then film is passed the roller 3 that tests the speed of measuring linear velocity, and the transmission speed of film is fixed on needed numerical value by power source 19, to guarantee that film is needed numerical value in the time of staying of region of discharge, film enters plasma treatment chamber 32 through slit 9, wear material according to the route between the live-roller shown in the figure 8, by slit 10 film is drawn plasma treatment chamber 32 at last, again winding film to material receiving roller 2.
After treating that the processing of rolling film finishes, close power source 19, close vacuum source 13, when the mixed pressure in the cavity reaches 200 handkerchiefs, close the air intake valve between inlet channel 5 and the source of the gas 11, keep after 30 seconds and open air intake valve, when treating that the interior air pressure of cavity is consistent with the external world, take out the film of handling well.
Example 1:
A certain size rolling polyester film is put into the material retractable control chamber, open vacuum source then, system is evacuated to 3.0 handkerchiefs, and methane and tetrafluoroethene gas are sent in the wall of plasma treatment chamber, cleans the residual gas in the plasma treatment chamber.After cleaning finishes, by the quality of regulation flowmeter, the gas pressure in the plasma treatment chamber is fixed as 60 handkerchiefs, opens high-frequency ac power (power is 300 watts) then, every section mylar is 3 minutes in the time that region of discharge stops.Processing remains on film and keeps 30 seconds in the mist after finishing, and gets sample one.
Example 2:
A certain size rolling polypropylene film is put into the material retractable control chamber, beat then and rise vacuum source, system is evacuated to 3.0 handkerchiefs, is that 1: 1 the HFC-236fa and the mist of methane are sent in the plasma treatment chamber with ratio, cleans the residual gas in the plasma treatment chamber.After cleaning finishes, by the quality of regulation flowmeter, the gas pressure in the plasma treatment chamber is fixed as 80 handkerchiefs, opens high-frequency ac power (power is 500 watts) then, every section polypropylene fibre film is in time that region of discharge stops minute.After processing finishes, film is remained on keeps 30 seconds in the mist, take out then sample two.
Example 3:
A certain size rolling nylon film is put into the plasma treatment chamber, open vacuum source then, system is evacuated to 3.0 handkerchiefs, and the mist of tetrafluoeopropene, hexafluoro methane and hydrogen is sent into the plasma treatment chamber, the residual gas in the cleaning reaction chamber.After cleaning finishes, by the quality of regulation flowmeter, the gas pressure in the reaction chamber is fixed as 100 handkerchiefs, opens high-frequency ac power then, power is 500 watts, and every section nylon film is in 3 minutes time that region of discharge stops.After processing finishes, film is remained on keeps 30 seconds in the mist, take out then sample three.
Above-mentioned three kinds of samples all reach the at high temperature surperficial effect of sticking other goods.
Claims (13)
1, a kind of mould release membrance comprises thin layer (30), it is characterized in that: it also comprises the solid fluorine carbon sedimentary deposit (31) at least one side surface that is deposited on described thin layer (30).
2, mould release membrance according to claim 1 is characterized in that: the thickness of described thin layer (30) is 10～200 microns, and the thickness of described solid fluorine carbon sedimentary deposit (31) is 0.01～1 micron.
3, mould release membrance according to claim 1 is characterized in that: described thin layer (30) is a kind of in polyester film, nylon film, polypropylene film, the polycarbonate film.
4, a kind of making apparatus of mould release membrance, it is characterized in that: it comprises plasma treatment chamber (32), material retractable control chamber (33), be provided with baffle plate (4) between described plasma treatment chamber (32) and the material retractable control chamber (33), this baffle plate has slit (9 on (4), 10) pass for film, be provided with first group of sparking electrode (7) in the described plasma treatment chamber (32), second group of sparking electrode (29), live-roller (8), make film to pass through by the gap between first group of sparking electrode (7) and the second group of sparking electrode (29), described first group of sparking electrode (7), second group of sparking electrode (29) respectively with first terminals (27) of high-frequency ac power (14), second terminals (28) are connected, in plasma treatment chamber (32), to produce glow discharge, produce plasma, have inlet channel (5) and bleed-off passage (6) on the plasma treatment chamber wall (24) in described plasma treatment chamber (32), described inlet channel (5) is connected with source of the gas (11), and bleed-off passage (6) and vavuum pump group (13) are connected.
5, the making apparatus of mould release membrance according to claim 4, it is characterized in that: described first group of sparking electrode (7), second group of sparking electrode (29) have multi-disc respectively, described first group of sparking electrode (7) is provided with at intervals with each sheet of second group of sparking electrode (29), and described live-roller (8) has a plurality of.
6, the making apparatus of mould release membrance according to claim 4 is characterized in that: be provided with emptying roller (1), material receiving roller (2) in the described material retractable control chamber (33).
7, the making apparatus of mould release membrance according to claim 6 is characterized in that: described emptying roller (1), material receiving roller (2) are in transmission connection with power source (19) mutually by magnetic drive device (26) respectively.
8, the making apparatus of mould release membrance according to claim 7, it is characterized in that: described magnetic drive device (26) comprises outer magnet (15), inner magnet (16), described outer magnet (15) is provided with outer coupled poles (12), described inner magnet (16) is provided with interior coupled poles (20), described outer magnet (15), be provided with cage (17) between the inner magnet (16), be connected with decelerator (18) on the described inner magnet (16) mutually, be connected with power transmission shaft (22) on the described decelerator (18), described emptying roller (1), in the material receiving roller (2) at least one is in transmission connection mutually with described power transmission shaft (22), and described outer magnet (15) is in transmission connection mutually with described power source (19).
9, a kind of manufacture craft of mould release membrance, it is characterized in that: plasma treatment chamber (32) are vacuumized, in described plasma treatment chamber (32), feed fluorocarbon gas, first group of sparking electrode (7) in plasma treatment chamber (32), second group of sparking electrode (29) are connected high-frequency ac power (14), discharge and generation plasma between two sparking electrodes, pending film makes solid fluorine carbon sedimentary deposit (31) be deposited at least one side surface of film through the gap between described two sparking electrodes.
10, the manufacture craft of mould release membrance according to claim 9 is characterized in that: the fluorocarbon gas in the described feeding plasma treatment chamber (32) is at least a or two above mixtures in carbon tetrafluoride, perfluoroethane, tetrafluoroethene, the hexafluoropropene.
11, the manufacture craft of mould release membrance according to claim 9, it is characterized in that: when in described plasma treatment chamber (32), feeding fluorocarbon gas, also feed to participate in the gas of assistant depositing, the gas of described participation assistant depositing is one or more the mixture in methane, carbon dioxide, acetylene, ethene, the hydrogen.
12, the manufacture craft of mould release membrance according to claim 11, it is characterized in that: shared volume ratio is 99%～30% in the gas of described fluorocarbon gas in feeding plasma treatment chamber (32), and shared volume ratio is 1～70% in the gas of the gas of described participation assistant depositing in feeding plasma treatment chamber (32).
13, the manufacture craft of mould release membrance according to claim 9, it is characterized in that: in plasma treatment chamber (32) surface treatment of film being remained on air pressure is that 5～100 handkerchiefs, temperature are to carry out under 10～180 ℃ the condition, and the processing time is 30～600 seconds.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100408416A CN100409725C (en) | 2005-06-27 | 2005-06-27 | Mould release membrance, and its preparing process and equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100408416A CN100409725C (en) | 2005-06-27 | 2005-06-27 | Mould release membrance, and its preparing process and equipment |
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| CN1709691A true CN1709691A (en) | 2005-12-21 |
| CN100409725C CN100409725C (en) | 2008-08-06 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103185122A (en) * | 2012-03-31 | 2013-07-03 | 北京普纳森电子科技有限公司 | Magnetically-coupled vacuum transmission device applicable to plasma processing equipment |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1021100C (en) * | 1988-02-05 | 1993-06-02 | 株式会社半导体能源研究所 | Plasma processing method and apparatus |
| CN2096842U (en) * | 1991-06-25 | 1992-02-19 | 兰州磁性器件研究所 | High-pressure magnetic transmission sealing device |
| KR20040086279A (en) * | 2002-01-30 | 2004-10-08 | 미쓰비시 가가꾸 폴리에스테르 필름 가부시키가이샤 | Release film |
| CN2570279Y (en) * | 2002-09-13 | 2003-09-03 | 徐小前 | Macromolecular anti-sticking film |
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2005
- 2005-06-27 CN CNB2005100408416A patent/CN100409725C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103185122A (en) * | 2012-03-31 | 2013-07-03 | 北京普纳森电子科技有限公司 | Magnetically-coupled vacuum transmission device applicable to plasma processing equipment |
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| Publication number | Publication date |
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| CN100409725C (en) | 2008-08-06 |
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Granted publication date: 20080806 |