CN1701432A - Transport device and drive mechanism - Google Patents

Abstract

A transportation apparatus (20) for a substrate (W) to be treated includes a rotatable base (24). Bendable/stretchable first and second arm mechanisms (26, 28) are installed on the rotatable base. The first and second arm mechanisms respectively have, in that order from the rotatable base side, base end arms (26A, 28A), intermediate arms (26B, 28B), and picks (26C, 28C) that are pivotably connected to each other. The picks are arranged so as to support the substrate to be treated. A link mechanism (30) is connected to the base end arms of the first and second arm mechanisms so as to drive the first and second arm mechanisms. A first drive source (32) for driving and rotating the rotatable base is provided. A second drive source (34) for driving the link mechanism so as to bend and stretch the first and second arm mechanisms is provided.

Description

Carrying device and driving mechanism

Technical area

The present invention relates to carrying device and driving mechanism, especially relate to the carrying device and the driving mechanism that in semiconductor processing system, utilize.So-called here semiconductor processes means by forming semiconductor layer, insulating barrier, conductive layer etc., all processing of implementing in order to make structures such as comprising semiconductor device or the distribution that is connected with semiconductor device, electrode on this processed substrate with the figure of regulation on the processed substrate of the glass substrate of wafer or LCD (Liquid crystal display) or FPD (Flat PanelDisplay) usefulness etc.

Background technology

In making the semiconductor processing system of semiconductor device etc., carry out phoresying of processed substrate such as semiconductor wafer.For example wafer phoresys in atmospheric pressure atmosphere or in vacuum environment under clean conditions, and it is indoor to move into processing.Perhaps from process chamber, take out wafer on the contrary, take out of determined location.The carrying device that is used to phoresy semiconductor wafer is for example open in following patent documentation 1 to 4.

Figure 33 is the stereogram that illustrates with carrying device one example of the prior art of patent documentation 1 and 3 disclosed device same types.Carrying device 2 has to stretch bends the arm 8 that connects base end arm 4 and intermediate arm 6 formations.Beak arm (beak arm) 10 rotatably is installed on the front end of arm 8.On beak portion arm 10 two ends, form the beak 10A of portion, 10B.Arm 8 all becomes one and can rotate.In case it is in the wrong that arm 8 is stretched,, make beak portion arm 10 advance or retreat to prescribed direction then by pulley built-in in it or connect the belt transmission of drive force.

On the motor source 12 that drives carrying device 2, set 2 motor (not shown).First motor is as noted above, arm 8 is all rotated, to desired direction orientation.Second motor arm 8 that makes as noted above bends and stretches.

If with carrying device 2, then can be the changing the outfit of semiconductor wafer W of under form shown in following, carrying out in the process chamber.That is, at first, arm 10 1 sides' of beak portion the beak portion for example 10A of beak portion is in vacant state, and untreated wafer W remains on the opposing party's beak 10B of portion.Secondly, bend beak portion arm 8, at first in process chamber, take out the wafer W of handling by stretching., the vacant 10A of beak portion is advanced here in process chamber, accept the wafer W of handling by this vacant 10A of beak portion.And, the 10A of beak portion is retreated, take out the wafer W of handling from process chamber.

Secondly, as shown in figure 33, under the state of folding arm 8, make that this arm is all does 180 degree rotations, in above-mentioned process chamber to keeping the 10B of the beak portion orientation of untreated wafer W.Secondly, bend above-mentioned arm 8 by stretching once more, untreated wafer is moved in the process chamber., the above-mentioned beak 10B of portion is advanced here, the 10B of beak portion is gone up the untreated wafer that keeps move in the process chamber.And making becomes the vacant 10B of beak portion and keeps out of the way, and phoresys release in view of the above.

The carrying device of other type is for example open on following patent documentation 2 and 4.In this carrying device, keep a pair of beak portion of wafer different with the situation of above-mentioned patent documentation 1 and 3, they are not in same horizontal plane but dispose overlappingly up and down, can make it towards same direction like this.Use 3 motor as drive source, carry out the forward-reverse action of all spinning movements of device and each beak portion.

The 5th, 899, No. 658 specifications of [patent documentation 1] United States Patent (USP)

[patent documentation 2] spy opens the 2000-72248 communique

[patent documentation 3] spy opens flat 7-142551 communique

[patent documentation 4] spy opens flat 10-163296 communique

In the carrying device shown in Figure 33 or patent documentation 1 and 3 etc., there is following problem.That is,, must make beak portion arm 10 do 180 degree rotations for wafer and the untreated wafer handled in the process chamber are changed operation.Because such high rotation angle is lost time, so can not change operation rapidly.Especially, because wafer size become greater to 300mm from diameter 200mm, its weight also increases, so rotary speed can not improve.In addition, wafer remains in either party's the beak portion always when the expanding-contracting action of arm 8, so the expanding-contracting action speed of arm 8 can not be too high.In patent documentation 2 and 4 disclosed carrying devices, need 3 motor on the other hand, therefore correspondingly improved the price of device as drive source.

Summary of the invention

The purpose of this invention is to provide when changing processed substrate the carrying device that the anglec of rotation of base station can be less.

Another object of the present invention provides and reduces the motor number that becomes drive source, can seek to reduce installation cost and all light-weighted carrying devices.

Another object of the present invention provides without encoder etc., can detect the driving mechanism of the relative position relation of a plurality of driving shafts.

The 1st aspect of the present invention is in the carrying device of processed substrate, has:

The rotatable rotary base station;

Be installed in the 1st and the 2nd arm mechanism in the wrong of stretching on the aforementioned rotation base station, the aforementioned the 1st possesses respectively from aforementioned rotation base station side with the 2nd arm mechanism and to begin sequentially the base end arm, intermediate arm and the beak portion that rotatably are connected mutually, and aforementioned beak portion supports aforementioned processed substrate ground to dispose;

With drive the aforementioned the 1st and the mode of the 2nd arm mechanism be connected the aforementioned the 1st and the linkage of the aforementioned base end arm of the 2nd arm mechanism;

The 1st drive source that aforementioned rotation base station rotation is driven;

Drive the 2nd drive source of aforementioned linkage, so that make the aforementioned the 1st and the 2nd arm mechanism stretch in the wrong.

The 2nd aspect of the present invention is to have the driving mechanism that detects the position of rotation function, and it has:

Make the inboard and the outside driving shaft of the mutual rotatable hollow tubular of coaxial shape;

A plurality of drive sources that engage with aforementioned inboard and outside driving shaft respectively;

The test pattern that on the inner face of aforementioned outside driving shaft, sets;

In order to be taken into the reverberation from aforementioned test pattern, the light that sets on aforementioned inboard driving shaft passes through window;

Make by aforementioned lights and pass through the reflection part of the light of window along the direction of principal axis reflection of aforementioned inboard driving shaft;

Acceptance is by the light accepting part of the light of aforementioned reflection part reflection;

According to the output of aforementioned light accepting part, obtain the position detection part of position relation of the direction of rotation of aforementioned inboard and outside driving shaft.

The driving mechanism of the 2nd aspect can be used as the 1st aspect carrying device driving mechanism and assemble.

Description of drawings

Fig. 1 is illustrated in the carrying device of the 1st execution mode of the present invention the plane graph of two arm mechanism contraction states.

Fig. 2 is illustrated in the carrying device shown in Figure 1, the plane graph of a side arm mechanism elongation state.

Fig. 3 is the sectional drawing that carrying device shown in Figure 1 is shown.

Fig. 4 is the in-built sectional drawing of rotation base station that carrying device shown in Figure 1 is shown.

Fig. 5 is illustrated in the carrying device of the 2nd execution mode of the present invention the stereogram of two arm mechanism contraction states.

Fig. 6 is illustrated in the carrying device shown in Figure 5, the plane graph of a side arm mechanism elongation state.

Fig. 7 is the schematic partial sectional view that carrying device shown in Figure 5 is shown.

Fig. 8 A～Fig. 8 D schematically illustrates the figure of a succession of operate condition of carrying device shown in Figure 5.

Fig. 9 is illustrated in the carrying device of the 3rd execution mode of the present invention the figure of two arm mechanism contraction states.

Figure 10 is illustrated in the carrying device shown in Figure 9, the plane graph of side's arm mechanism elongation state.

Figure 11 is the schematic partial sectional view that mainly is illustrated in the linkage part of carrying device shown in Figure 9.

Figure 12 illustrates in the carrying device of the present invention's the 4th execution mode the plane graph of two arm mechanism contraction states.

Figure 13 is the side view that carrying device shown in Figure 12 is shown.

Figure 14 is illustrated in the carrying device shown in Figure 12, the plane graph of a side arm mechanism elongation state.

Figure 15 illustrates in the carrying device of the present invention's the 5th execution mode, the plane graph of a side arm mechanism elongation state.

Figure 16 is the carrying device that is used for illustrating shown in Figure 15, the schematic partial sectional view of connection status between linear motor of using as the 2nd drive source and the linkage.

Figure 17 illustrates in the carrying device of the present invention's the 6th execution mode the plane graph of two arm mechanism contraction states.

Figure 18 is illustrated in the carrying device shown in Figure 17, the plane graph of a side arm mechanism elongation state.

Figure 19 is the schematic partial sectional view that carrying device shown in Figure 17 is shown.

Figure 20 A～Figure 20 G is the figure that a succession of operate condition of carrying device shown in Figure 17 schematically is shown.

Figure 21 is illustrated in the carrying device of the 7th execution mode of the present invention the plane graph of two arm mechanism contraction states.

Figure 22 is illustrated in the carrying device of the 8th execution mode of the present invention the plane graph of two arm mechanism contraction states.

Figure 23 is illustrated in the carrying device shown in Figure 22, the stereogram of side's arm mechanism elongation state.

Figure 24 A～Figure 24 E is the figure that a succession of operate condition of carrying device of Figure 12 schematically is shown.

Figure 25 illustrates except linkage, the device comparative test result's of the 7th and the 8th execution mode that forms under same size figure.

Figure 26 is the amplification profile diagram that the driving mechanism of embodiments of the present invention is shown.

Figure 27 is the key diagram that is used to illustrate as position relation between the test pattern of driving mechanism major part shown in Figure 26 and the reflection part.

Figure 28 is the plane graph of the state when linearity being shown launching test pattern shown in Figure 27.

Figure 29 is the stereogram when the side drive axle all makes test pattern formation in addition.

Figure 30 is the expanded view of the test pattern when detecting structure and utilize as position transducer.

Figure 31 is the amplification profile diagram that driving mechanism variation shown in Figure 26 is shown.

Figure 32 A～Figure 32 D illustrates the state plane figure that linearity is deployed in test pattern when example of using in the driving mechanism shown in Figure 31.

Figure 33 is the stereogram that carrying device one example of prior art is shown.

Embodiment

Below, with reference to accompanying drawing embodiments of the present invention are illustrated.In the following description, to having the substantially additional prosign of composed component of same function and formation, only just in addition repeat specification in the case of necessary.

＜the 1 execution mode 〉

Fig. 1 is illustrated in the plane graph that makes two arm mechanism contraction states on the carrying device of the present invention's the 1st execution mode.Fig. 3 is the sectional drawing that carrying device shown in Figure 1 is shown.

Carrying device 20 is included in the rotation base station 24 that rotatable support is gone up in substrate 22 (with reference to Fig. 3).Rotatable and can stretch and support a pair of arm mechanism in the wrongly on the base station 24 in rotation, that is: the 1st arm mechanism 26 and the 2nd arm mechanism 28.Set linkage 30 so that make the 1st and the 2nd arm mechanism 26,28 stretch in the wrong selectively.For 24 rotations of rotation base station are driven, set the 1st drive source 32 (with reference to Fig. 3).For drive link mechanism 30, and make it shake rotation, it is in the wrong that the 1st and the 2nd arm mechanism 26,28 is stretched, and set the 2nd drive source 34 (with reference to Fig. 3).

Substrate 22 is made of base plate of the carrying room that sets in the unit equipment N-type semiconductor N treatment system for example etc.Maintain under the vacuum state in this carrying room, around this carrying room, connect a plurality of process chambers (not shown).On the through hole 36 that forms on the substrate 22, insert logical 2 driving shafts that make coaxially 38,40.Below substrate 22 on the side through seal members 42 such as for example O type rings, the motor box 44 that is made of the hollow form basket is installed airtightly.In motor box 44, accommodate the 1st and the 2nd drive source 32,34.

The the 1st and the 2nd drive source 32,34 for example is made of stepping motor (pulse motor) respectively, respectively by stator 32A, and 34A and rotor 32B, 34B constitutes.The rotor 32B of the 1st drive source 32 is connected with the outside driving shaft 38 of hollow form (tubulose).The rotor 34B of the 2nd drive source is connected with inboard driving shaft 40.Between two driving shafts 38,40, bearing 46 is housed, rotatably supports mutually.Outside driving shaft 38 is rotatably supported on substrate 22 1 sides by the bearing (not shown) with magnetic fluid seal.The the 1st and the 2nd drive source 32,34 or two driving shafts, 38,40 grades are as the part of driving mechanism described later and constitute.

On the upper end of two rotating shafts 38,40, set rotation base station 24.Rotation base station 24 has Rack, and is inner here as hollow state, only extends the length of regulation to radial direction.Driving shaft 38 upper ends, the outside directly are connected and fixed with rotation base station 24, and both are integral rotation.And the top of inboard driving shaft 40 connects in the rotation base station 24, support by 48 pairs of rotation base stations 24 of bearing, and rotatable mutually.Therefore, inboard driving shaft 40 becomes all pivot C1 of carrying device.On the base end part side of rotation base station 24, separate predetermined distance, 2 fixed axis 50,52 are erected, install and fix.The the 1st and the 2nd arm mechanism 26,28 rotatably is installed respectively on fixed axis 50,52.

The 1st arm mechanism 26 is mainly by the intermediate arm 26B and the actual mounting of hollow form base end arm 26A, same hollow form and keep the 26C of beak portion of wafer W to constitute.The base end part of base end arm 26A rotatably is supported on the fixed axis 50 through bearing 50A.Fixing large pulley 54 on fixed axis 50 becomes one with fixed axis 50.

On the leading section of base end arm 26A, rotatably set the rotating shaft 56 that connects upward through bearing 56A.Fixing truckle 58 on rotating shaft 56 rotates with rotating shaft 56 with becoming one.Between truckle 58 and large pulley 54, hang up and connect belt 60, transferring power.The diameter ratio of truckle 58 and large pulley 54 is 1: 2, and 58 pairs of large pulleys 54 of truckle rotate with 2 times the anglec of rotation.

The inside that the upper end of rotating shaft 56 connects intermediate arm 26B base end part sets, its upper end be fixed on intermediate arm 26B above.Intermediate arm 26B and rotating shaft 56 rotate with becoming one.Truckle 62 rotatably is supported on the rotating shaft 56 through bearing 56B.Truckle 62 is fixed on the upper end of the fixed axis 64 of hollow form, and coaxial configuration is made in the inside that rotating shaft 56 connects this fixed axis.Fixed axis 64 has specific length, and its lower end connects and is fixed on the top and integrated of base end arm 26A downwards when intermediate arm 26B extends.Between rotating shaft 56 and fixed axis 64 bearing 56C is housed, fixed axis 64 rotatably is supported on the intermediate arm 26B through bearing 64A.

Rotating shaft 66 rotatably is supported on the leading section of intermediate arm 26B by bearing 66A.It is outstanding that the upper end of rotating shaft 66 connects the top, fixedly sets the base end part of the 26C of beak portion thereon on the end.Fixing large pulley 68 on rotating shaft 66.Between large pulley 68 and truckle 62, hang up and connect belt 70, transferring power.The diameter ratio of truckle 62 and large pulley 68 is 1 to 2, and 68 pairs of truckles 62 of large pulley rotate with 1/2 times corner.In view of the above, under the state of fixing rotation base station 24, if it is in the wrong with linkage 30 the 1st arm mechanism 26 to be stretched as described later, then the 26C of beak portion advances and retreats to a direction.

On the other hand, the 2nd arm mechanism 28 is symmetrical, similarly constitutes with the 1st arm mechanism 26.That is: the 2nd arm mechanism 28 mainly by hollow form base end arm 28A, same hollow form intermediate arm 28B and in fact mounting keep the 28C of beak portion of wafer W to constitute.The base end part of base end arm 28A is rotatably supported by bearing 52A on fixed axis 52.Large pulley 74 is fixing on fixed axis 52, becomes one with fixed axis 52.

The rotating shaft 76 of Guan Tonging rotatably is provided on the leading section of base end arm 28A by bearing 76A upward.Truckle 78 is fixed on the rotating shaft 76, rotates with rotating shaft 76 with becoming one.Between truckle 78 and large pulley 74, hang up and connect belt 80, transferring power.The diameter ratio of truckle 78 and large pulley 74 is 1 to 2, and 78 pairs of large pulleys 74 of truckle rotate with 2 times of anglecs of rotation.

The inside that the upper end of rotating shaft 76 connects intermediate arm 28B base end part sets, and its upper end is fixed on above the intermediate arm 28B.The rotation that becomes one of intermediate arm 28B and rotating shaft 76.Truckle 82 rotatably is supported on the rotating shaft 76 through bearing 76B.Truckle 82 is fixed on internally by rotating shaft 76 and makes the upper end of the hollow form fixed axis 84 of coaxial configuration.Fixed axis 84 has specific length, when its lower end perforation intermediate arm 28B extends, is fixed on the top and integrated of base end arm 28A downwards.Between rotating shaft 76 and fixed axis 84 bearing 76C is housed, fixed axis 84 is rotatably supported through bearing 84A on intermediate arm 28B.

Rotating shaft 86 rotatably is supported on the leading section of intermediate arm 28B through bearing 86A.It is outstanding that the upper end of rotating shaft 86 connects the top, fixes, sets the base end part of the 26C of beak portion on this upper end.Large pulley 88 is fixed on the rotating shaft 86.Between large pulley 88 and truckle 82, hang up and connect belt 90, transferring power.The diameter ratio of truckle 82 and large pulley 88 is 1 to 2, and 88 pairs of truckles 82 of large pulley rotate with 1/2 times corner.In view of the above, under the state of fixing rotation base station 24, if stretch the 2nd arm mechanism 28 in the wrong with linkage 30 as described later, then the 28C of beak portion advances and retreats to a direction.

As shown in Figure 1, two 26C of beak portion, 28C is configured on the same plane (horizontal plane) mutually.Each 26C of beak portion, the direct of travel difference of 28C, its angular aperture θ for example also by the decision of wafer W size, is set in about 60 degree.Angular aperture θ for example sets in 60～less than, 180 degree scopes in the scope of not disturbing mutual wafer.

Mainly as shown in Figure 1 by drive link 92 and connected 2 follower link 94A by the 2nd drive source 34 (with reference to Fig. 3) rotation driving, 94B constitutes linkage 30.Drive link 92 rotatably is supported on the rotation base station 24.Fig. 4 is the rotation base station 24 in-built sectional drawings that carrying device shown in Figure 1 is shown.

As shown in Figure 4, rotating shaft 96 rotatably is provided on the leading section of rotation base station 24 through bearing 96A.Follow-up pulley 98 is provided on the rotating shaft 96 regularly.Drive on 100 driving shafts 40 that are provided in regularly in the rotation base station 24 that slide.Between drive pulley 100 and follow-up pulley 98, hang up connection belt 102, transmit the power of the 2nd drive source 34.That is: form Poewr transmission mechanisms by drive pulley 100, follow-up pulley 98 and connection belt 102 here.

The upper end of rotating shaft 96 is outstanding to rotation base station 24 tops, and the base end part of drive link 92 is connected with this upper end, and both rotate with becoming one.Therefore by making driving shaft 40 rotatings, drive link 92 is also rotated to both forward and reverse directions.Drive link 92 has specific length.Two follower link 94A, the base end part of 94B anchor 104A that respectively hangs oneself, 104B and bearing (not shown) and establish on the leading section that rotatably is provided in drive link 92 under the state.Follower link 94A, 94B has specific length.

The leading section of one side's follower link 94A rotatably with above the central portion of the base end arm 26A of the 1st arm mechanism 26 is connected (with reference to Fig. 3) through anchor 106A and bearing 106B.The leading section of another follower link 94B rotatably with above the central portion of the base end arm 28A of the 2nd arm mechanism 28 is connected (with reference to Fig. 3) through anchor 108A and bearing 108B.

In view of the above, if carrying device makes drive link 92 rotations, then for example action as illustrated in fig. 2.Fig. 2 is the plane graph that is illustrated in an arm mechanism elongation state on the carrying device shown in Figure 1.If promptly make drive link 92 a side only with the predetermined angular rotation, when a 26C of beak portion is advanced significantly, the 28C of another beak portion distance slightly of only drawing back.If make drive link 92 the opposing party only with the predetermined angular rotation, each 26C of beak portion then, 28C carries out and above-mentioned opposite action.That is: by making linkage 30 positive and negative rotations, make the 1st and the 2nd arm mechanism 26,28 stretch in the wrong selectively.

Secondly, the action to the 1st execution mode that constitutes shown in above is illustrated.

At first, make carrying device 20 when prescribed direction is located, the 1st and the 2nd drive source 32,34 shown in Figure 3 rotates synchronously.In view of the above, make 24 rotations of rotation base station in the time of prescribed direction, the 1st and the 2nd arm mechanism 26,28 points to prescribed direction at folded state (contraction state).

Secondly, make side's beak portion, for example the 26C of beak portion extends as illustrated in fig. 2, advances.Therefore, at first make under the 1st drive source 32 halted states, the 2nd drive source 34 is only rotated with predetermined angular or regulation rotation number to prescribed direction.This rotary driving force passes to rotating shaft 96 through driving shaft 40, drive pulley 100, connection belt 102 and follow-up pulley 98, makes its rotation.

At this moment, the drive link 92 of the linkage 30 that is connected with rotating shaft 96 one is rotated shown in arrow A among Fig. 2.Therefore, the follower link 94A that is connected with drive link 92 geosyncline direction release as shown by arrow B.The base end arm 26A of the 1st arm mechanism 26 of the leading section of connection follower link 94A, rotates shown in arrow C (with reference to Fig. 2) as fulcrum with fixed axis 50 (with reference to Fig. 3).

So, the large pulley 54 in the base end arm 26A relatively rotates (in fact large pulley 54 does not rotate, base end arm 26A rotation).This rotary driving force passes to intermediate arm 26B through connection belt 60, truckle 58, in addition, through truckle 62, connection belt 70 and large pulley 68, is delivered to rotating shaft 66.In view of the above, base end arm 26A, intermediate arm 26B and the 26C of beak portion become as shown in Figure 2 elongation state from folded state.Its result, the 26C of beak portion keeps intact to same direction, and the shape ground that is in line as shown by arrow D advances.In view of the above, can be inserted into the 26C of beak portion in the predetermined process chamber (not shown).

At this moment, the such the opposing party's who is understood from comparison diagram 1 and Fig. 2 the 2nd arm mechanism 28 moves to the position that only rearward retreats with slight distance.Secondly, if make the 2nd drive source 34 to opposite spin, then the 1st arm mechanism 26 limits trend is shunk with above-mentioned opposite limit, path.

When the opposing party's the 2nd arm mechanism 28 is forwards extended, can carry out and above-mentioned opposite operation.In addition, each 26C of beak portion of the 1st and the 2nd arm mechanism 26,28,28C be along the line segment L1 by all pivot C1 of device, advances separately on the L2 or retreat mobile.

Action shown in above for example during the wafer in changing process chamber, is compared with the carrying device of prior art, can promptly carry out the replacing operation of wafer W.That is: after taking out the wafer W of handling, if make carrying device 20 all only with the angular aperture θ of beak portion, for example 60 degree rotations then can make another beak portion that keeps untreated wafer W directed in process chamber.In addition, crystal W is remained in a side the beak portion, another beak portion is in vacant state, and when this sky beak portion being advanced or retreat, the amount of movement of the beak portion of maintenance wafer W one side is as noted above only to be trace.Therefore, advance or backward movement even carry out vacant beak portion at high speed, wafer can not fall from another beak portion dislocation yet.Therefore can more promptly carry out the replacing of wafer W like that.

＜the 2 execution mode 〉

Fig. 5 is the carrying device that is illustrated in the present invention's the 2nd execution mode, makes the stereogram of two arm mechanism contraction states.Fig. 6 is illustrated in the carrying device shown in Figure 5, makes the plane graph of a side arm mechanism elongation state.Fig. 7 is the schematic partial sectional view that carrying device shown in Figure 5 is shown.

Below be the 2nd execution mode part different with the 1st execution mode.That is: in the 1st execution mode, the base end part of the 1st and the 2nd arm mechanism 26,28 rotatably is supported in two different axles on the rotation base station 24 separately, promptly on the fixed axis 50,52.In in the 2nd execution mode, the base end part of the 1st and the 2nd arm mechanism 26,28 rotatably is supported on the same fixed axis.In addition, in the 1st execution mode, the 26C of beak portion, 28C are at grade towards different direction configurations.In the 2nd execution mode, the 26C of beak portion, 28C is overlay configuration up and down, and towards same direction.The 26C of beak portion like this, 28C is stacked state up and down, also is same structure in other execution mode of explanation after this.

As shown in Figure 7, on rotation base station 24, fixedly be equipped with 1 fixed axis 110 with erecting.Fixed axis 110 is set at longer than each fixed axis 50,52 (with reference to Fig. 3) of the 1st execution mode.In addition, in fact fixed axis 110 sets for rotation base station 24 drive shaft rotating 38 are misplaced to transverse direction.This point is identical with the situation of the 1st execution mode.

On 1 fixed axis 110, fixedly mount the large pulley 54 of the 1st arm mechanism 26 and the large pulley 74 of the 2nd arm mechanism 28 up and down side by side.As the center, set the base end arm 26A of the 1st arm mechanism 26 and the base end arm 28A of the 2nd arm mechanism 28 with each large pulley 54 and 74.Because the 1st and the 2nd arm mechanism 26,28 is superimposed up and down mutually, is necessary to prevent mutual interference.Therefore, connect cardinal extremity and intermediate arm 26A, 26B and 28A, the length setting of the fixed axis 64,84 of 28B are a little long slightly.

In the 1st execution mode, two follower link 94A of linkage 30, the leading section of 94B rotatably support on the upper face side of 28A (with reference to Fig. 3) jointly at base end arm 26A.In the 2nd execution mode, also as shown in Figure 7, base end arm 26A, 28A height level's difference each other.Therefore, the leading section of a side follower link 94A rotatably is supported on the following side of base end arm 26A.The leading section of another follower link 94B and the situation of the 1st execution mode similarly rotatably are supported on the upper face side of base end arm 28A.In view of the above, two 26C of beak portion, 28C are highly different, can be to same direction forward-reverse.In the 2nd execution mode, because two 26C of beak portion in when action, height level's unanimity of 28C is used to make all mobile Z axle travel mechanisms (not shown) of direction (Z direction) up and down of this device so set.

Fig. 8 A～Fig. 8 D schematically illustrates the figure of a succession of operate condition of conveyer shown in Figure 5.At Fig. 8 A 28 elongations of the 2nd arm mechanism, the state that the 1st arm mechanism 26 shrinks are shown.In a single day linkage 30 is rotated round about thus, then shown in Fig. 8 B, the 2nd arm mechanism 28 begins to shrink thereupon, in addition, the 1st arm mechanism 26 begins elongation.At this moment, the 26C of beak portion of the 1st arm mechanism 26 temporarily retreats a little.

In addition, if linkage 30 rotates round about, then shown in Fig. 8 C, the 2nd arm mechanism 28 further continues to shrink, and the 1st arm mechanism 26 continues elongation.Present two 26C of beak portion this moment, 28C is superimposed state up and down.In addition, if linkage 30 rotates round about, then shown in Fig. 8 D, the 2nd arm mechanism 28 becomes the maximum collapse state, and the 1st arm mechanism 26 becomes the maximum elongation state.

So, two 26C of beak portion, 28C replaces.In actual act because at the time point shown in Fig. 8 C, adjust two 26C of beak portion, the height level of 28C, thus this device all only a little upward or the below move.

So, the situation in the 2nd execution mode, two motor that only pass through the 1st and the 2nd drive source 32,34 can make has 2 26C of beak portion arranged side by side superimposedly up and down respectively, and the 1st, the 2 two arm mechanism 26,28 of 28C stretched in the wrong.Therefore, device construction is oversimplified, also can be reduced cost.

＜the 3 execution mode 〉

Fig. 9 is illustrated in the carrying device of the 3rd execution mode of the present invention the plane graph of two arm mechanism contraction states.Figure 10 is illustrated in the carrying device shown in Figure 9 the plane graph of an arm mechanism elongation state.Figure 11 is the part sectional drawing that the linkage part of carrying device shown in Figure 9 mainly is shown.

In the 3rd execution mode, with the 2nd execution mode situation similarly, the 26C of beak portion, 28C are superimposed up and down, the base end part of the 1st and the 2nd arm mechanism 26,28 makes coaxial rotatable.The discrepancy that the 3rd execution mode and the 1st and the 2nd execution mode are very big is only being replaced the drive link 92 of linkage 30 (with reference to Fig. 1, Fig. 6) on this point with little small rod mechanism 112.That is: with Fig. 4 more as can be known,, replace drive link 92 shown in Figure 4 here, dispose small rod mechanism 112 shown in Figure 11.

Small rod mechanism 112 is made of the 1st connecting rod (link lever) the 114 and the 2nd connecting rod 116, and two arms 114,116 can be stretched in the wrongly and connect.Specifically, the 1st connecting rod 114 makes hollow state.The upper end of rotating shaft 96 of the leading section of rotation base station 24 connects in the base end part of the 1st connecting rod 114 and sets.The inboard above the 1st connecting rod 114 is fixed, is installed in the upper end of rotating shaft 96.In view of the above, the 1st connecting rod 114 and rotating shaft 96 are become one, rotation.

Through bearing 118, rotatably set large pulley 120 on the rotating shaft 96 in the 1st connecting rod 114.On the periphery of rotating shaft 96, set the outboard shafts 122 that makes coaxial hollow form with it.When outboard shafts 122 lower ends were fixed on above the rotation base station 24, the upper end was fixed on the large pulley 120.

Between rotating shaft 96 and the outboard shafts 122 and between the breakthrough part of outboard shafts 122 and the 1st connecting rod 114 bearing 124A is being set separately, 124B, diaxon make rotatable mutually.On the leading section of the 1st connecting rod 114, rotatably set rotating shaft 128 through bearing 126.On rotating shaft 128, fix, set truckle 130.Between truckle 130 and large pulley 120, hang up the belt 132 of connection, transmission of drive force.The diameter ratio of truckle 130 and large pulley 120 is set in 1 to 2.The upper end of rotating shaft 128 is outstanding upward.Fixing on this part, as to connect the 2nd connecting rod 116 base end part.In view of the above, rotating shaft 128 and the 2nd connecting rod 116 rotation that becomes one.

Fixed axis 133 is set with erecting.The base end part of one side's follower link 94A rotatably is installed through bearing 134A on the lower portion of fixed axis 133.Make the 1st arm mechanism 26 stretch in the wrong by follower link 94A.The base end part of another follower link 94B rotatably is installed through bearing 134B at the upper portion of fixed axis 133.Make the 2nd arm mechanism 28 stretch in the wrong by follower link 94B.Under the situation of illustrated example, two follower link 94A, the leading section of 94B rotatably are supported in base end arm 26A separately, on the upper face side of 26B., these also can rotatably be supported on the following side, also can differently be supported in mutually on upper face side and the following side.

The situation of the 3rd execution mode, if positive and negative rotation drives the 2nd drive source 34 (with reference to Fig. 3), then small rod mechanism 112 stretches in the wrong.At this moment two follower link 94A of linkage 30 move back and forth on the straight line 140 of the fulcrum P1 of 94B base end part in Figure 10.In view of the above, the 1st and the 2nd arm mechanism 26,28 alternately extends, and bending is shunk.

So, the situation of the 3rd execution mode, 2 motor that only pass through the 1st and the 2nd drive source 32,34 can make has 2 26C of beak portion arranged side by side superimposedly up and down separately, and the 1st and the 2nd liang of arm mechanism 26,28 of 28C stretched in the wrong.Therefore, device construction is oversimplified, cost price is reduced.

＜the 4 execution mode 〉

Figure 12 is illustrated in the plane graph that makes two arm mechanism contraction states on the carrying device of the present invention's the 4th execution mode.Figure 13 is the side view that carrying device shown in Figure 12 is shown.Figure 14 is illustrated on the carrying device shown in Figure 12, makes the plane graph of an arm mechanism elongation state.

In the 4th execution mode, with the situation of the 3rd execution mode similarly, the 26C of beak portion, 28C is superimposed up and down, in addition, sets small rod mechanism 112 on linkage 30.The 4th execution mode and the 3rd execution mode dissimilarity are: the 1st and the 2nd arm mechanism 26 not only, 28 with respect to the rotation base station 24 on same fixed axis, support, and with the 1st execution mode situation similarly, on 2 fixed axis 50,52 that are arranged side by side, rotatably support independently of one another.

The 1st arm mechanism 26 is by base end arm 26A, intermediate arm 26B, and the 26C of beak portion, the base end part 26D of the 26C of beak portion constitutes.The 2nd arm mechanism 28 is by base end arm 28A, intermediate arm 28B, and the 28C of beak portion, the base end part 28D of the 28C of beak portion constitutes.Configuration the 2nd arm mechanism 28 above the 1st arm mechanism 26, the two superimposed up and down 26C of beak portion, 28C sets mutually without interfering with each other.

The 4th execution mode can be brought into play the action effect same with the 3rd execution mode.That is: only by two motor of the 1st and the 2nd drive source 32,34, can make two 26C of beak portion arranged side by side superimposedly up and down, the 1st and the 2nd liang of arm mechanism 26,28 of 28C stretched in the wrong.Device construction is oversimplified, cost is reduced.

＜the 5 execution mode 〉

Figure 15 is illustrated in the plane graph that makes an arm mechanism elongation state on the carrying device of the present invention's the 5th execution mode.Figure 16 is the part sectional drawing that is used to illustrate connection status between linear motor of using as the 2nd drive source on the carrying device shown in Figure 15 and linkage.

The 5th execution mode is the formation same substantially with the 3rd execution mode, yet mainly contains following difference.That is, in the 3rd execution mode, as shown in figure 10, and two follower link 94A of small rod mechanism 112 and linkage 30, the base end part of 94B connects.In the wrong by small rod mechanism 112 is stretched, follower link 94A, the base end part of 94B moves back and forth along straight line 140.In contrast, at the 5th execution mode, as Figure 15 and shown in Figure 16, set along straight line 140 can accurate control position linear motor 142.Linear motor 142 plays the function as the 2nd drive source 34 shown in Fig. 3.

On the moving body 142A of linear motor 142, be mounted with steady arm 144.Fixed axis 133 is set with erecting.The same with explanation on Figure 11, by bearing 134A, 134B, the rotatable follower link 94A of difference, the base end part of 94B is installed, is fixed on the fixed axis 133.

The situation of the 5th execution mode is used linear motor 142 as the 2nd drive source.That is, two follower link 94A of linkage 30, the base end part side of 94B directly rotatably is supported in moving body 142A one side of linear motor 142, moving body 142A moving linearly.The 2nd drive source 34 in Fig. 3 and illustrated in fig. 4, the motor box 44 not in this case, the drive link 100 in the rotation base station 24, follow-up pulley 98 and connect belt 102.Therefore, that works makes device constitute simplification more.

The situation of the 5th execution mode moves back and forth by the moving body 142A that makes linear motor 142, makes two follower link 94A, and the base end part of 94B is reciprocating along straight line 140.In view of the above, with the situation of the 3rd execution mode (with reference to Figure 10) similarly, can make the 1st and the 2nd arm mechanism 26,28 do to stretch and bend action.So, the situation of the 5th execution mode is two motor of the linear motor 142 by becoming the 1st drive source 32 and the 2nd drive source only, can make to have up and down two 26C of beak portion arranged side by side superimposedly separately, the 1st and the 2nd two arm mechanisms 26,28 of 28C are stretched in the wrong.Device construction is oversimplified, cost is reduced.

＜the 6 execution mode 〉

Figure 17 is illustrated in the plane graph that makes two arm mechanism contraction states on the carrying device of the present invention's the 6th execution mode.Figure 18 is the plane graph that is illustrated in an arm mechanism elongation state on the carrying device shown in Figure 17.Figure 19 is the part sectional drawing that carrying device shown in Figure 17 is shown.

The 6th execution mode is similarly to constitute with the 4th execution mode, and mainly different on following point.That is, at the 4th execution mode, the actuating force of the 2nd drive source 34 is delivered to two follower link 94A, 94B through drive pulley 100, connection belt 102, follow-up pulley 98, the small rod mechanism 112 of rotation base station 24.And in the 6th execution mode, two follower link 94A, the drive link 92 by the 1st execution mode shown in Figure 1 between the driving shaft 40 of the base end part of 94B and the 2nd drive source 34 connects.

In other words, the direct driving shaft 40 with the 2nd drive source 34 of the base end part of drive link 92 is connected and fixed.In view of the above, drive link 92 rotatably is supported on the pivot part of rotation base station 24.Same with the 1st execution mode shown in Figure 1, on the leading section of drive link 92, make anchor 104A, 104B (with reference to Figure 18) sets with erecting.Two follower link 94A, the base end part of 94B rotatably are supported in each anchor 104A separately through bearing 150 respectively, on the 104B.One side's arm 94A only is shown at Figure 19.

Under the situation of the 6th execution mode also with the situation of the 4th execution mode similarly, the base end part of the 1st and the 2nd arm mechanism 26,28 is according to rotatably being supported by different axles with respect to rotation base station 24 modes arranged side by side.Two 26C of beak portion, 28C disposes up and down superimposedly, stretches in the wrong to same direction.At each base end arm 26A, set the connection projection 152,154 of extending on the cardinal principle central portion of 28A to horizontal direction.On supplementary projection 152,154, rotatably support follow-up pulley 94A through bearing (not shown) respectively, the leading section of 94B.

In the situation of the 6th execution mode, also do the action same substantially with the 4th execution mode.; the situation of the 6th execution mode is because drive link 92 is the center rotation with the driving shaft 40 of the 2nd drive source 34, so two follower link 94A; the base end part of 94B is different with the situation of the 4th execution mode, moves back and forth along the circular-arc track that with driving shaft 40 is the center.In view of the above, the 1st and the 2nd arm mechanism 26,28 is stretched in the wrong round about.

Figure 20 A～Figure 20 G schematically illustrates the figure of a succession of operate condition of carrying device shown in Figure 17.At Figure 20 A 26 elongations of the 1st arm mechanism, the state that the 2nd arm mechanism 28 shrinks are shown.Thus, if make drive link 92 rotations, linkage 30 is rotated round about, then shown in Figure 20 B, the 1st arm mechanism 26 begins to shrink thereupon, and the 2nd arm mechanism 28 moves hardly.

In addition, if make drive link 92 rotations, linkage 30 is rotated round about, then shown in Figure 20 C, the 1st arm mechanism 26 continues further to shrink, and 28 of the 2nd arm mechanisms begin elongation a little.Then, if drive link 92 is rotated again, then shown in Figure 20 D, at this time point, two 26C of beak portion, 28C become closed state up and down.Here, the 1st and the 2nd arm mechanism 26,28 becomes the considerable state that shrinks together.

In addition, if make drive link 92 rotations, linkage 30 is rotated round about, then shown in Figure 20 E～Figure 20 G, the 1st arm mechanism 26 is kept contraction state, and in contrast, the 2nd arm mechanism 28 little by little extends, and becomes the longest state that reaches.So, two 26C of beak portion, 28C are alternately.In the action of reality because at the time point shown in Figure 20 D, adjust two 26C of beak portion, the height level of 28C, this device all only upward or the below mobile a little.

So, the situation of the 6th execution mode only by 32,34 two motor of the 1st and the 2nd drive source, can make to have two 26C of beak portion arranged side by side superimposedly up and down separately, and the 1st and the 2nd liang of arm mechanism 26,28 of 28C stretched in the wrong.Device construction is oversimplified, cost is reduced.Because drive link 92 is connected with the driving shaft 40 of the 2nd drive source 34, so not by pulley or connect the Poewr transmission mechanism that belt constitutes, that works constitutes more device to oversimplify.

＜the 7 execution mode 〉

Figure 21 is illustrated in the carrying device of the present invention's the 7th execution mode, makes the plane graph of two arm mechanism contraction states.Connection state in vertical direction between the 1st and the 2nd drive source of this device and rotation base station and the 1st, the 2nd arm mechanism becomes as shown in Figure 3 substantially.The the 1st and the 2nd drive source of this device and rotation base station and an arm mechanism become as shown in Figure 19 substantially at the connection state of vertical direction.

The 7th execution mode and the 1st execution mode are similar, and the base end arm 26A of the 1st and the 2nd arm mechanism 26,28,28A on rotation base station 24 (is circular at Figure 21), at grade with the axle of sowing discord mutually as the center, rotatably support.To mutual different directions configuration, the 26C of beak portion, the angular aperture of 28C are set in 60～180 degree at grade for the 26C of beak portion of the 1st and the 2nd arm mechanism 26,28,28C., the 7th execution mode is different with the 1st execution mode, the rotating shaft of the drive link 92 of linkage 30 and the rotating shaft coaxle shape ground configuration that drives base station 24.

The action of the 1st and the 2nd arm mechanism 26,28 of the 7th execution mode becomes the 1st execution mode and the 6th execution mode is added such together action.That is: for example, from make the 1st and the 2nd arm mechanism 26,28 both shrink, initial condition shown in Figure 21 sets out, and makes 28 elongations of the 2nd arm mechanism, and the 28C of beak portion is forwards moved.At this moment, although the 1st arm mechanism 26 is kept contraction state in fact since with the rotation of rotation base station 24 simultaneously, the angle broadening between base end arm 26A and the intermediate arm 26B, institute so that the 26C of beak portion retreat.This action is similar with action shown in Figure 20 D～Figure 20 G.But the 26C of beak portion is directed forward not, but points to tilted direction as shown in Figure 2.

According to the 7th execution mode, compare with the 1st execution mode, have the advantage of so-called unitary construction compactness.According to the 7th execution mode, compare with the 6th execution mode, when using the 1st and the 2nd arm 26,28, conversion has the so-called all advantages of lowering or hoisting gear that do not need.

＜the 8 execution mode 〉

Figure 22 is illustrated in the carrying device of the present invention's the 8th execution mode the plane graph of two arm contraction states.Figure 23 is illustrated in the carrying device shown in Figure 22 the stereogram of an arm mechanism elongation state.The the 1st and the 2nd drive source of this device and rotation base station and the 1st and the 2nd arm mechanism become substantially as shown in Figure 3 at the connection state of vertical direction.The the 1st and the 2nd drive source of this device and rotation base station and an arm mechanism become substantially as shown in figure 19 at the connection state of vertical direction.

The 8th execution mode and the 7th execution mode are similar, and the base end arm 26A of the 1st and the 2nd arm mechanism 26,28,28A are the center with the axle that leaves mutually on circle rotation base station 24 at grade, rotatably support.Towards mutual different directions configuration, the 26C of beak portion, the angular aperture of 28C are set in the scope of 60～180 degree at grade for the 26C of beak portion of the 1st and the 2nd arm mechanism 26,28,28C.The rotating shaft of the drive link 92 of linkage 30 disposes with the rotating shaft coaxle shape ground of rotation base station 24.

, the 8th execution mode is different with the 7th execution mode, 2 follower link 94A, and 94B makes U word shape, is configured on the different height levels, and sets across mutually.Specifically, as shown in figure 22, the follower link 94A that is connected with the 1st arm mechanism 26 surmounts centre line C L 92 with respect to drive link 92 and is supporting near the 2nd arm mechanism 28 places' axles.Similarly, the follower link 94B that is connected with the 2nd arm mechanism 28 surmounts centre line C L 92 near the supporting of the 1st arm mechanism 26 places axles with respect to drive link 92.Here, centre line C L 92 is 26C of beak portion under the initial condition of the 1st and the 2nd arm mechanism 26,28 both contractions, that connect the 1st and the 2nd arm mechanism 26,28, the center CA of 28C, the vertical bisecting line of the line segment CA-CB of CB.

Figure 24 A～Figure 24 E is the figure that a succession of operate condition of carrying device shown in Figure 12 schematically is shown.Figure 24 A illustrates the initial condition that makes 26,28 both contractions of the 1st and the 2nd arm mechanism.From this initial condition, if rotation base station 24 is to counterclockwise rotating, then the 2nd arm mechanism 28 elongations are forwards moved the 28C of beak portion, and the 1st arm mechanism 26 is kept contraction state (with reference to Figure 24 B～Figure 24 E) in fact on the other hand.At this moment, because follower link 94A, 94B is according to state configuration shown in above-mentioned, so the translational acceleration that produces at the 26C of beak portion of the 1st arm mechanism 26 diminishes.

For its reason is described, be conceived to connect respectively the rotating shaft O of drive link 92, line segment O-OA and the line segment O-OB of the tie point OB of tie point OA between base end arm 26A and the 2nd follower link 94A and base end arm 26B and the 2nd follower link 94B.The carrying device of the 8th execution mode constitutes: comprise the tie point OA that do not extend a side (contraction side) mechanism or the line segment O-OA of OB or the variable quantity of O-OB and diminish in the 1st and the 2nd arm mechanism 26,28.For example in the action example shown in Figure 24 A～Figure 24 E, if begin to make 24 rotations of rotation base station from the contraction state shown in Figure 24 A, then along with 28 elongations of the 2nd arm mechanism, the length of the 2nd arm mechanism 28 side line section O～OB increases.But the length of the 1st arm mechanism 26 side line section O-OA till the elongation state of the 2nd arm mechanism 28 shown in Figure 24 E, not too changes.

The result of Gou Chenging in the 1st arm mechanism 26 1 sides of contraction side, is accompanied by the rotation of rotation base station 24 like this, carries out action shown below.That is: at first, shown in Figure 24 A～Figure 24 C, the angle between base end arm 26A and the intermediate arm 26B is broadening gradually, the 26C of beak portion displacement slightly backward., shown in Figure 24 C～Figure 24 E, the angle stenosis gradually between base end arm 26A and the intermediate arm 26B, the 26C of beak portion displacement slightly is so that return the place ahead.Figure 24 C illustrates the rotating shaft O of drive link 92, the tie point OA between base end arm 26A and the 2nd follower link 94A, 3 the dead point states of point-blank arranging of the tie point O1 between drive link 92 and the follower link 94A.

So, at the 8th execution mode, from the 1st and the 2nd arm mechanism 26,28 both initial conditions of shrinking begin, and at the 2nd arm mechanism between 28 elongating stages, the 1st arm mechanism 26 (makes 3 O shown in Figure 24 C sandwiching the dead point state, change between the state state that OA, O1 arrange in a straight line).Therefore, the 26C of beak portion of the 1st arm mechanism 26 of contraction side retreats at first a little, then the so-called slow motion that advances a little.The stroke of the 26C of beak portion also becomes little stroke.Begin from the 1st and the 2nd arm mechanism 26,28 both initial conditions of contraction, even the 28C of beak portion of the 2nd arm mechanism 28 also carries out same action under the situation of the 1st arm mechanism 26 elongations.

In order to confirm above-mentioned effect, except linkage, form the device of the 7th and the 8th execution mode with same size, compare test.In this test, both shrink initial condition and begin from the 1st and the 2nd arm mechanism 26,28, make 26 elongations of the 1st arm mechanism, measure the arm stroke of the 1st and the 2nd arm mechanism 26,28 of this moment.

Figure 25 is the figure that the result of this comparative test is shown.Among Figure 25, L71, L81 illustrate the arm stroke of the 1st arm mechanism 26 of the 7th and the 8th execution mode device respectively.L72, L82 illustrate the arm stroke of the 2nd arm mechanism 28 of the 7th and the 8th execution mode device respectively.Among Figure 25, transverse axis illustrate the rotation base station 24 the anglec of rotation (°), the longitudinal axis illustrates arm stroke (mm).

As shown in figure 25, for example the 1st arm mechanism 26 needed arm strokes are got under the situation of 600mm, in the device of the 7th and the 8th execution mode, rotation base station 24 rotates about 70 degree respectively and about 80 degree necessitate.Therebetween, the arm stroke of the 2nd arm mechanism 28 of the 7th execution mode device increases progressively up to the about 400mm of maximum.On the other hand, the stroke of the 2nd arm mechanism 28 of the 8th execution mode device is got the about 100mm of maximum at the time point of about 40 degree of rotation base station 24 rotations, reduces thereafter again.

So, at the 8th execution mode, between elongating stage, the beak portion of another arm mechanism slowly moves, and the maximum of its arm stroke is also little at an arm mechanism.Therefore, the translational acceleration that produces in this beak portion also diminishes, and makes in the beak portion wafer W be difficult to dislocation.Therefore make device action accelerate to become possibility like that, can boost productivity.

The common item of the＜the 1 to the 8th execution mode 〉

Can use as the bearing of the 1st and the 2nd arm mechanism 26,28 and to impose on the aluminum alloy housing surface that hard sulfuric acid alumite (alumite) handles.If constitute shell with aluminium alloy, when then can suppress to collapse because of arm mechanism that deadweight causes, the inertia when reducing to move can improve the conveyance precision of arm mechanism.Though in processing, often in process chamber, form magnetic field,, then can prevent shaking of the arm mechanism that produces because of magnetic field if use aluminum alloy housing.In addition, impose on the surface on the shell of alumite processing, film owing to grease fully floods alumite, so can prolong the additional life-span of grease.

In the 1st to the 8th execution mode, situation about being arranged in the vacuum environment with carrying device is that example is illustrated.Also can be arranged on carrying device and replace vacuum environment in the atmospheric environment.At the 1st to the 8th execution mode, be that example is illustrated with the situation that semiconductor wafer is come in and gone out change wafer between process chamber.Also can be irrelevant with process chamber, in carrying device, be provided with on the path in the wafer transfer way.

＜driving mechanism 〉

Vertical in the respective embodiments described above, the carrying device of the processed substrate of conveyance is illustrated, then the driving mechanism that uses in this carrying device is described in detail.

In normally used existing driving mechanism, if to make 2 coaxial reel structures is example, then in order to confirm the rotation number of each driving shaft, the anglec of rotation etc. set encoder (absolute type absolute or incremental increment) on the drive source of each driving shaft.From the output signal of this encoder, obtain between each driving shaft relative position relation etc. by calculation.So owing to be provided with encoder, make all complex structureizations of driving mechanism, cost improves.Owing to also need the space that is provided with of encoder class, have no alternative but maximize.In addition, must on driving shaft, connect soft distribution for the signal of sending out own coding device class.Therefore this driving shaft itself can not be the structure of limited rotation.

In the driving mechanism of the present invention, when constructing all simplification, can easily discern the relative position relation of the direction of rotation between each driving shaft by making with optical pickocff.By knowing the relative position relation of this each driving shaft, can confirm origin position or the 1st and the 2nd arm mechanism state.Do not disturb the safe condition of arm mechanism etc. even for example can confirm flashboard that two arm mechanisms state, either party's arm mechanism folding, that shrink extend long status and close process chamber yet.

Figure 26 is the amplification profile diagram that the embodiment of the present invention driving mechanism is shown.Figure 27 is the key diagram that is used to illustrate as position relation between the test pattern of driving mechanism major part shown in Figure 26 and the reflection part.Figure 28 is the plane graph that state when test pattern linearity shown in Figure 27 launched is shown.

Below Shuo Ming driving mechanism can use in all carrying devices of aforesaid the 1st to the 8th execution mode.Be applicable to that with this driving mechanism Fig. 1 is that example is illustrated to the situation of the 1st execution mode shown in Figure 4 here.

As shown in figure 26, it is rotatable hollow tubular, a plurality of that driving mechanism 160 comprises that coaxial shape makes mutually, is 2 driving shaft 38,40 on illustrated example.The 1st drive source 32 and the 2nd drive source 34 are coupled with outside driving shaft 38 and inboard driving shaft 40 separately.For the coupling of driving shaft 38,40, not only comprise the direct-coupled situation of mechanicalness, and comprise the situation of magnetic coupling one class non-contact type coupling.

From illuminating part 162, detect light L1 and in inboard driving shaft 40, radiate along direction of principal axis.Detect light L1 and reflect to prescribed direction by reflection part 166, the detection light L1 of reflection passes through window 168 by light laterally.The inner face of side drive axle 38 sets the test pattern 170 of irradiating and detecting light L1 outside.Seek and the opposite path of detection light L1 from the reverberation L2 of test pattern 170, make light accepting part 164 be subjected to light.For example the position detection part 172 by being made of for example microcomputer etc. according to the output of light accepting part 164, detects the position relation of the direction of rotation of driving shaft 38,40.

Specifically, the hollow tubular two bearing 46 mutual rotatable supports of driving shaft 38,40 by getting involved at two between centers.Inboard driving shaft 40 is connected with the 2nd drive source 34, in view of the above, does positive and negative rotation.Outside driving shaft 38 is connected with the 1st drive source 32, in view of the above, does positive and negative rotation.

Illuminating part 162 and light accepting part 164 are arranged in the lump as also fixing on the bottom side of the motor box 44 of accommodating the 1st and the 2nd drive source 32,34 baskets.Can be with one-piece type reflection sensor as illuminating part 162 and light accepting part 164.Light accepting part 164 is along the direction of principal axis radiation detection light L1 of the inboard driving shaft 40 of hollow tubular.Preferably use the good laser of rectilinear propagation as detecting light L1, yet also can use diffused light.In addition, the wavelength of detection light L1 can be set in Zone Fulls such as infrared spectral range, visible region, ultraviolet range.

Reflection part 166 is made of for example speculum.Its inclination is installed and fixed, so that the inner face side of the internal side drive axle 40 of reflecting surface becomes for example angle of 45 degree.Reflection part 166 radially at right angles reflecting of driving shaft 40 to the inside detects light L1.Formation is passed through window 168 by the light that for example circular open constitutes on detection light L1 and the part that the sidewall of inboard driving shaft 40 contact of parts 166 reflection of being reflected.Light passes through window 168 so long as detection light L1 can be by getting final product.For example form under the situation of inboard driving shaft 40, detect the sidewall that light L1 sees through driving shaft 40 by transparent materials such as transparent plastic resin or quartz glasss.Therefore, there is no need on driving shaft 40 opening to be set, sidewall all becomes light and passes through window.

The inner face of side drive axle 38 can set test pattern 170 along its all direction by on the contact portion of light by the detection light L1 of window 168 outside.As shown in figure 28, test pattern 170 has the light echo area 170A of portion of reflection detection light L1 and the light absorption district 170B of absorption detecting light L1.Two regional 170A here, 170B has the length of regulation separately.

As in the 1st execution mode explanation, by make inboard driving shaft 40 at both forward and reverse directions only with the anglec of rotation rotation of regulation, the 1st and the 2nd arm mechanism 26,28 (is stretched in the wrong selectively with reference to Fig. 1～Fig. 3).For example the length setting of light echo area 170A is in following scope, promptly, even close the slide valve (not shown) between the process chamber that can be divided in the carrying room circumferential arrangement, do not make the scope of this slide valve and 26, the 28 phase mutual interference (conflict) of the 1st and the 2nd arm mechanism with opening and closing yet.On the other hand, the length setting of light absorption district 170B does not promptly make the scope (zone) of slide valve and 26, the 28 phase mutual interference of the 1st and the 2nd arm mechanism in following scope.

Therefore, position detection part 172 is discerned the relative position of the direction of rotation of two driving shafts 38,40 according to the output of acceptance from the light accepting part 164 of the reverberation L2 of test pattern 170, and making judgement could close slide valve becomes possibility.This judged result is communicated to the main frame of all actions of control semiconductor processing system etc.

Secondly, the action to the driving mechanism 160 that constitutes shown in above is illustrated.

At first, as explanation on the 1st execution mode, under the state of fixing outside driving shaft 38 (rotation base station 24 :), inboard driving shaft 40 is only rotated with predetermined angular at both forward and reverse directions with reference to Fig. 1.In view of the above, it is in the wrong that the 1st and the 2nd arm mechanism 26,28 is stretched selectively, for example, take out of move into handle indoor.When changing the 1st and the 2nd arm mechanism 26,28 directions, make two driving shafts 38,40 synchronous, only rotate with predetermined angular.At this moment under the state of the same posture of keeping 26,28 bendings of the 1st and the 2nd arm mechanism, it is all to desired direction rotation.

On the carrying device that carries out such elemental motion, be necessary to hold the 1st and the 2nd arm mechanism 26,28 always and become what kind of posture.Especially under the situation of closing the slide valve of distinguishing carrying room and process chamber or make under the situations of arm mechanism 26,28 all rotations particularly necessary.

In order to discern the position relation of two driving shafts, 38,40 direction of rotation, radiation is from the detection light L1 of illuminating part 162.Detect light L1 and in inboard driving shaft 40, pass through along its direction of principal axis, parts 166 reflections that are reflected, conversion is 90 degree direct of travels substantially.By window 168, side drive axle 38 inner faces shine the test pattern 170 that sets along its all direction to the detection light L1 of its direct of travel of conversion outside by light.In the time of on detecting the light echo area 170A that light L shines test pattern 170, detect light L1 reflection, become reverberation L2, advance, on light accepting part 164, accept light with above-mentioned light path is reverse.On the other hand, when detection light L1 shines light absorption district 170B, be absorbed because detect light L, so do not produce reverberation L2.

The position detection part 172 of accepting light accepting part 164 outputs is discerned the position relation of 38,40 direction of rotation of two driving shafts according to output.On driving mechanism 160, illuminating part 162 and light accepting part 164 are as zone (zone) identification sensor performance function.For example do not accept under the situation of reverberation L2 at light accepting part 164, the direction of the reflecting surface of reflection part 166 is pointed to the interior part in zone of light absorption district 170B among Figure 28.This fact means that the arm mechanism of the either party in 2 arm mechanisms 26,28 is elongated to more than the specific length.At this moment because worry and close slide valve interference (conflict) is arranged, so the Do not switch off slide valve perhaps makes arm mechanism 26,28 all rotate.

In contrast, when light accepting part 164 was accepted reverberation L2, the direction of the reflecting surface of reflection part 166 was pointed to the interior part in zone of light echo area 170A among Figure 28.This fact means that two arm mechanisms 26,28 are crooked together, become below the specific length.At this moment, because do not worry to disturb (conflict),, arm mechanism 26,28 is all rotated so also allow to close slide valve.

So, can discern the relative position relation of 38,40 of two driving shafts, promptly two arm mechanisms 26,28 stretches state in the wrong.At this moment, can not want big encoder of needed high price in the existing driving mechanism and size etc.Its result not only can make simple structureization, significantly reduces cost, and can make contributions to miniaturization and save space.

Usually, the 1st and the 2nd drive source 32,34 is made of stepping motor or servomotor.At this moment, use the judgment standard of the judged result of position detection part 72 as the interlock function.For example, suppose that main frame cuts out the processing of slide valve according to the processing on the software.Produce the interference (conflict) between arm mechanism and the slide valve when sending in this case, the signal of " not accepting reverberation L2 " at position detection part 172.Therefore, according to the judged result of position detection part 72, constitute and to interlock by circuit, so that do not close slide valve.

In driving mechanism shown in Figure 26 160, test pattern 170 forms along the inner face of outside driving shaft 38.Also can will all form with the outside driving shaft 38 of light at least as test pattern 170 by window 168 opposed parts.Figure 29 is the stereogram that side drive axle 38 all forms situation beyond illustrating as test pattern 170.In Figure 29, thereby light echo area 170A is set by the catoptrical mode of surface grinding according to internal face at least.And light absorption district 170B according to internal face at least deceive alumite handle (driving shaft 38 is under the situation of aluminum) thus light absorbing mode set.

In driving mechanism shown in Figure 26 160, the detection structure of illuminating part 162, light accepting part 164 etc. had the area sensor use in the zone of certain width as detection.Also can make as the position transducer that detects certain position (position) and be used for replacing it with this detection structure.Under these circumstances, can position with this certain position as initial point.Figure 30 is the expanded view that the test pattern 170 when detecting structure and use as position transducer is shown.As shown in figure 30, with light accepting part 164 discernible minute widths, wire forms light absorption district 170B on a position of test pattern 170 regulations, and this position is got and made initial point.Thus, other zone becomes light echo area 170A.In addition, the relation of light absorption district 170B and light echo area 170A is formed on the contrary.

So, by using as position transducer to detect structure, the initial point that carries out the relative position of two driving shafts 38,40 produces, and promptly can produce the initial point of two arm mechanisms 26,28.As such initial point, for example as shown in Figure 1, can set the state that two arm mechanisms 26,28 are crooked comparably together, shrink that makes.

In driving mechanism shown in Figure 26 160,, set light accepting part 164 for having or not of detection of reflected light L2.Also can replace it, imageing sensor is set, so that be taken into the image of test pattern 170.Figure 31 is the amplification profile diagram that driving mechanism variation shown in Figure 26 is shown according to such viewpoint.Figure 32 A～Figure 32 D illustrates the plane graph of state that linearity launches the example of the test pattern used in the driving mechanism shown in Figure 31.

As shown in figure 31, replace light accepting part 164 (with reference to Figure 26), set the imageing sensor 180 that constitutes by for example ccd video camera, the image of identification test pattern 170.When the part of test pattern 170 is dark, wish to set the illuminace component that is used for this partial illumination.Therefore, replacing illuminating part 164 (with reference to Figure 26) for example to set LED (light-emitting diode) etc. on Figure 31 can throw light on and have regional such illuminace component 182 of area to a certain degree.By illumination light L3 the part of test pattern 170 is thrown light on from illuminace component 182.When test pattern 170 is bright by external illumination, do not need illuminace component 182.

When like this imageing sensor 180 being set, position detection part 172 can carry out identification or the identification of different color or the identification of different graphic etc. of different brightness.If test pattern 170 becomes Figure 28 or structure shown in Figure 30,, can discern light echo area 170A or light absorption district 170 here then according to the brightness difference.In addition, also can shown in Figure 32 A～Figure 32 D, constitute test pattern 170.

At Figure 32 A, test pattern 170 is for example divided into " black ", " grey ", " white " three zones.These three zones are discerned by the brightness difference.In addition, also can form above-mentioned each zone with brightness different " grey ".At Figure 32 B, test pattern 170 is divided into three different zones of color of " redness ", " blue look ", " yellow ".These three zones are discerned by the color difference.

Figure 32 C and Figure 32 D illustrate the test pattern 170 when detecting structure and use as position transducer.The situation configuration " ★ " of Figure 32 C, " ● " and " ▲ " three kinds of different graphics.Under the situation of Figure 32 D, " 1 ", the literal of " 2 " and " 3 " disposes as figure.Can be on these test pattern 170 by three positions of the different detections of figure.Respectively from a left side,, can distribute that each arm mechanism 26,28 is desirable stretches state in the wrong accordingly under the situation of Figure 32 C and Figure 32 D with each initial point 1～3 with for example initial point 1, initial point 2, initial point 3 correspondences.

Above-mentioned driving mechanism is that example is illustrated with coaxial 2 reel structures.Yet under the situation more than 3, also can use the present invention.In addition, in the respective embodiments described above, be that example is illustrated with the semiconductor wafer as processed substrate, yet be not limited to this,, also can use the present invention under the situations such as LCD substrate transmitting glass substrate.

The possibility of industrial utilization

According to the present invention, can be provided in and change when the processed substrate carrying device that the anglec of rotation of base station is little.According to the present invention, can detect the driving mechanism of a plurality of driving shaft relative position relations without encoder.

Claims (22)

1, a kind of carrying device of processed substrate is characterized in that, possesses:

The rotatable rotary base station;

On described rotation base station, install, can stretch the 1st and the 2nd arm mechanism in the wrong, the described the 1st possesses separately from described rotation base station side with the 2nd arm mechanism and to begin sequentially the base end arm, intermediate arm and the beak portion that rotatably are connected mutually, and described beak portion is provided with according to the mode of the described processed substrate of support;

With the described the 1st linkage that is connected with the described base end arm of the 2nd arm mechanism, so that drive the described the 1st and the 2nd arm mechanism;

The 1st drive source that described rotation base station rotation is driven;

The 2nd drive source that described linkage is driven is so that make the described the 1st and the 2nd arm mechanism stretch in the wrong.

2, device according to claim 1 is characterized in that, described linkage and the described the 1st and the 2nd arm mechanism interlock, and the described the 1st and of the 2nd arm mechanism when being in elongation state in fact, another is in contraction state in fact.

3, device according to claim 2, it is characterized in that, described linkage possesses the drive link that drives by the rotation of described the 2nd drive source, and connects described drive link and the described the 1st and the 1st and the 2nd follower link of the described base end arm of the 2nd arm mechanism respectively.

4, device according to claim 3 is characterized in that, the rotating shaft coaxle shape ground configuration of the rotating shaft of described drive link and described rotation base station.

5, device according to claim 3 is characterized in that, described linkage rotatably is connected with described rotation base station, and the rotating shaft of described drive link is configured on the position that the rotating shaft with described rotation base station staggers.

6, device according to claim 3 is characterized in that, described drive link is made of single connecting rod in fact.

7, device according to claim 3 is characterized in that, described drive link possesses interconnective a plurality of connecting rod.

8, device according to claim 3, it is characterized in that, described the 1st follower link is with respect to described drive link, surmounting center line supports at described the 2nd arm mechanism one side shaft, described the 2nd follower link is with respect to described drive link, surmount center line and support at described the 1st arm mechanism one side shaft, at this, described center line be the described the 1st with initial condition that the 2nd arm mechanism shrinks under, be connected the described the 1st with the vertical bisecting line of the line segment at the beak portion center of the 2nd arm mechanism.

9, device according to claim 8 is characterized in that, the described the 1st and the 2nd follower link is configured on the differing heights level and mutually intersects.

10, device according to claim 1 is characterized in that, described the 2nd drive source possesses turning motor.

11, device according to claim 1 is characterized in that, described the 2nd drive source possesses linear motor.

12, device according to claim 1 is characterized in that, the described base end arm of the described the 1st and the 2nd arm mechanism is rotatably supported as the center with the axle that leaves mutually in same plane on described rotation base station.

13, device according to claim 12 is characterized in that, the described the 1st with the described beak portion of the 2nd arm mechanism at grade towards different direction configurations, the angle of release of described beak portion is set in the scopes of 60～180 degree.

14, device according to claim 1 is characterized in that, the described base end arm of the described the 1st and the 2nd arm mechanism is superimposed up and down mutually on described rotation base station, is rotatably supported as the center with identical axle.

15, device according to claim 14 is characterized in that, the described beak portion of the described the 1st and the 2nd arm is superimposed up and down mutually, towards same direction configuration.

16, a kind of driving mechanism with detection position of rotation function is characterized in that having:

Make the inboard and the outside driving shaft of the mutual rotatable hollow tubular of coaxial shape;

The a plurality of drive sources that are coupled respectively with described inboard and outside driving shaft;

The test pattern that on the inner face of described outside driving shaft, sets;

In order to be taken into the reverberation from described test pattern, the light that sets on described inboard driving shaft passes through window;

Make by described light and pass through the reflection part of the light of window along the direction of principal axis reflection of described inboard driving shaft;

The light accepting part of the light that acceptance is reflected by described reflection part;

According to the output of described light accepting part, obtain the position detection part of position relation of the direction of rotation of described inboard and outside driving shaft.

17, mechanism according to claim 16 is characterized in that, also possesses:

Illuminating part along the direction of principal axis radiating light of described inboard driving shaft;

Light from described illuminating part is reflected to radial direction,, shine the reflection part on the described test pattern by described light transmission window.

18, mechanism according to claim 16 is characterized in that, described light accepting part possesses the imageing sensor of the image that detects described test pattern.

19, mechanism according to claim 18 is characterized in that, also possesses illumination light is shone illuminace component on the described test pattern.

20, mechanism according to claim 18 is characterized in that, described test pattern possesses the not arrangement in homochromy zone.

21, mechanism according to claim 18 is characterized in that, described test pattern possesses the arrangement of different graphic.

22, mechanism according to claim 18 is characterized in that, described test pattern possesses the arrangement of different luminance areas.

Images