CN1667350A - Micro current vortex angular transducer and implement method thereof - Google Patents
Micro current vortex angular transducer and implement method thereof Download PDFInfo
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- CN1667350A CN1667350A CN 200510066507 CN200510066507A CN1667350A CN 1667350 A CN1667350 A CN 1667350A CN 200510066507 CN200510066507 CN 200510066507 CN 200510066507 A CN200510066507 A CN 200510066507A CN 1667350 A CN1667350 A CN 1667350A
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- angular transducer
- current vortex
- swirl plate
- magnet ring
- micro current
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Abstract
The invention relates to an electric eddy current angular sensor, which uses the change of electric eddy current active area, which is formed by vortex sheet rotating with involute spiral outline, to change electric eddy current effect strength and directly measure angle for conducting superminiature volume and high accuracy great angulation measurement.
Description
Technical field
The present invention relates to a kind of angular transducer, particularly a kind of micro current vortex angular transducer and its implementation.
Background technology
Present known angular transducer mainly uses code-disc, circle grating, circle magnetic grid, rotating potentiometer or Hall element as sensing unit.The sensor of these sensing angles is because the characteristics of self are difficult to be applied to the occasion very harsh to the sensor bulk requirement, such as being used in the sector display probe of diameter less than Φ 10.
Wherein code-disc, circle grating, circle magnetic grid need use the disk of bigger prior record scale information, its diameter is more than 10mm, and use these three kinds of methods to carry out measurement of angle and need bigger read head, make that the overall volume of sensor is bigger, require very harsh occasion and inapplicable for sensor bulk.
Rotating potentiometer uses the method for contact measurement, needs certain driving force during rotation, and its life-span also be restricted, so it should not be used in high precision, the long-time system that rotatablely moves that uses as the measurement of angle element.
Though using the angular transducer of Hall element also is non-cpntact measurement, its precision is lower, generally more than 2 °.
Summary of the invention
In order to overcome existing angular transducer, the present invention proposes a kind of high precision, small size, current vortex angular transducer that measurement range is big in the deficiency aspect volume and the precision.
The technical scheme that realizes current vortex angular transducer of the present invention is as follows.
A kind of implementation method of micro current vortex angular transducer, it is characterized in that: be used in the swirl plate that rotary course has the area in the different incision inductance alternating magnetic fields, produce different eddy current effect intensity, cause the variation of inductance value, realize measurement of angle by measurement to inductance value.
The implementation method of described micro current vortex angular transducer, it is characterized in that: the swirl plate in the described incision inductance alternating magnetic field has involute contour, and the area that makes in rotary course the swirl plate in the incision inductance alternating magnetic field is linear change with the variation of the anglec of rotation.
The present invention also provides a kind of usefulness micro current vortex angular transducer that described method is realized, it is characterized in that:
One turning axle vertically sets firmly a conduction swirl plate with involute contour on this turning axle;
One toroidal inductor, this toroidal inductor are set around on the magnet ring with vortex groove;
Described turning axle and the setting of described magnet ring axes intersect with conduction swirl plate of involute contour, and the conduction swirl plate of involute contour is cut in the vortex groove of described magnet ring;
One source of high frequency current connects telefault, and the sinusoidal current of constant amplitude is provided to telefault; Connect a sinusoidal voltage amplitude pick-up unit in the two ends of telefault.
Described micro current vortex angular transducer is characterized in that: described conduction swirl plate is a kind of non-magnetic conductive metal sheet.
Described micro current vortex angular transducer is characterized in that: described magnet ring is the manganese-zinc ferrite magnet ring.
Described micro current vortex angular transducer is characterized in that: the described toroidal inductor that is set around on the magnet ring is with the copper enameled wire coiled of line footpath less than 0.1mm.
Described micro current vortex angular transducer, it is characterized in that: described source of high frequency current is made up of sinusoidal signal generator and converter, and it takes place sinusoidal signal provides the sinusoidal voltage of certain frequency to be converted to sinusoidal current through converter.
Described micro current vortex angular transducer is characterized in that: described sinusoidal voltage amplitude pick-up unit comprises the sine voltage signal demodulation module at the described telefault of connection two ends.
Current vortex angular transducer of the present invention is to utilize to have the swirl plate rotation of gradually opening the helix profile and cause that the variation of current vortex active area changes eddy current effect intensity, directly carry out measurement of angle, can realize ultra-small volume, the measurement of high-precision wide-angle.
The present invention compares the beneficial effect that has with background technology: used have gradually open the helix profile the conduction swirl plate as swirl plate, use the areal effect of current vortex to realize angular detection.It can realize very little volume, and wherein the volume of swirl plate can be less than 4mm * 4mm * 0.3mm, and the volume of magnet ring can be less than Φ 3mm * 1mm, and this sensor can be embedded in other parts of equipment, further reduces its volume.In addition, high-precision swirl plate profile can guarantee that the precision of this kind angular transducer can reach below 0.1 °; Select the swirl plate of high rotation angle degree, can guarantee that the measurement range of this kind angular transducer reaches more than 300 °.
For feature effect of the present invention is had further understanding, enumerate specific embodiment now and be described with reference to the accompanying drawings as follows.
Description of drawings
Fig. 1 is the angle sensor cellular construction synoptic diagram of embodiments of the invention.
Fig. 2 is the circuit block diagram of angular transducer.
Fig. 3 is the output characteristics of angular transducer shown in Figure 1.
Embodiment
The implementation method of a kind of micro current vortex angular transducer provided by the present invention be utilize one with the synchronous swirl plate of rotation of measured object, this swirl plate difference with the anglec of rotation in rotary course has the different areas of cutting in the inductance alternating magnetic fields, make and produce different eddy current effect intensity, to cause that inductance value changes, when importing a certain size high-frequency current to inductance, then the voltage magnitude at inductance two ends will change with the anglec of rotation, can realize measurement of angle by the measurement to voltage magnitude.
For the metering circuit that makes voltage is simplified, swirl plate in the described incision inductance alternating magnetic field has the involute contour with respect to rotation center, the area that makes in rotary course the swirl plate in the incision inductance alternating magnetic field is linear change with the variation of the anglec of rotation, thus the direct numerical value of the correspondence one-tenth anglec of rotation of the numerical value that makes the voltage magnitude of surveying.
The present invention also provides a kind of micro current vortex angular transducer of realizing with said method (as shown in Figure 1), this current vortex angular transducer has a turning axle 2, vertically sets firmly a current vortex sheet 1 that has with respect to the involute contour 6 of rotation center on this turning axle 2; This turning axle 2 is hubbed in the axis hole of sensor housing, and its overhanging end is for the object that connects tested angle.One toroidal inductor 4, this toroidal inductor 4 are set around on the magnet ring 3 with vortex groove 5; Described turning axle 2 with conduction swirl plate 1 of involute contour is provided with (as the quadrature setting) with described magnet ring axes intersect, and make in the vortex groove 5 of the described magnet ring 3 of conduction swirl plate 1 incision, and can change area in the incision vortex groove 5 linearly with the difference of the corner of turning axle 2 with involute contour.Area big more (being that the degree of depth the is dark more) inductance value that then telefault presented of the conduction swirl plate in incision vortex groove 5 is more little, when keeping joining high-frequency current amplitude in the telefault when constant, then the voltage at telefault two ends also will be with the linear variation of the anglec of rotation, and the numerical value of the voltage of surveying is the numerical value of the correspondence one-tenth anglec of rotation directly.
In Fig. 1 specific embodiment, described magnet ring is the manganese-zinc ferrite magnet ring, and the width of set vortex groove 5 is slightly larger than the thickness of swirl plate 1 on the magnet ring.Described conduction swirl plate is a kind of non-magnetic conductive metal sheet, and its thickness should be greater than 1.5 times of skin depths.In order to guarantee the linearity, the involute contour 6 of swirl plate is cut the degree of depth of vortex groove 5 in swirl plate 1 swing process should be less than the degree of depth of vortex groove 5 itself.
The described toroidal inductor 4 that is set around on the magnet ring be with line footpath less than the copper enameled wire of 0.1mm around formation.Preferably, it is the copper core enameled wire coiling of 0.06mm that telefault 4 adopts diameter, the coiling number of turns 100 circles.Apply the current signal of 150KHz at telefault 4 two ends, carry out amplitude demodulation, promptly can obtain telefault 4 variation inductance amounts, promptly obtained the pendulum angle of swirl plate by voltage signal to telefault 4 two ends.
Fig. 2 is the circuit diagram of micro current vortex angular transducer of the present invention, one source of high frequency current is connected to the two ends of described telefault, described source of high frequency current is made up of sinusoidal signal generator 7 and converter 8, sinusoidal signal generator 7 provides the sinusoidal voltage of certain frequency, be converted to sinusoidal current through converter 8, to supply with the constant high-frequency current of telefault 4 one.Connect a sinusoidal voltage amplitude pick-up unit in the two ends of telefault 4.Described sinusoidal voltage amplitude pick-up unit is the demodulation module 9 that detects the sinusoidal voltage amplitude, sine voltage signal demodulation module 9 connects telefault, sine voltage signal demodulation module 9 picks up this voltage signal and it is carried out demodulation, and demodulation is output as the voltage signal linear corresponding with the swirl plate pivot angle.
Fig. 3 is the output characteristics of the angular transducer among Fig. 1.By selecting the rational swirl plate involute contour 6 and vortex groove 5 degree of depth, the anglec of rotation that the maximum energy measurement of this kind current vortex angular transducer is 300 °.By the swirl plate involute contour 6 of machining high-precision, the measuring accuracy of this kind current vortex angular transducer can reach 0.1 °.
Claims (8)
1, a kind of implementation method of micro current vortex angular transducer, it is characterized in that: be used in the swirl plates that rotary course has an area in the different incision inductance alternating magnetic fields and in alternating magnetic field, produce different eddy current effect intensity, cause the variation of inductance value, realize measurement of angle by measurement to inductance value.
2, the implementation method of micro current vortex angular transducer according to claim 1, it is characterized in that: the swirl plate in the described incision inductance alternating magnetic field has involute contour, and the area that makes in rotary course the swirl plate in the incision inductance alternating magnetic field is linear change with the variation of the anglec of rotation.
3, a kind of micro current vortex angular transducer that method realized with claim 1 is characterized in that:
One turning axle vertically sets firmly a conduction swirl plate with involute contour on this turning axle;
One toroidal inductor, this toroidal inductor are set around on the magnet ring with vortex groove;
Described turning axle and the setting of described magnet ring axes intersect with conduction swirl plate of involute contour, and the conduction swirl plate of involute contour is cut in the vortex groove of described magnet ring;
One source of high frequency current connects telefault, and the sinusoidal current of constant amplitude is provided to telefault; Connect a sinusoidal voltage amplitude pick-up unit in the two ends of telefault.
4, micro current vortex angular transducer according to claim 3 is characterized in that: described conduction swirl plate is a kind of non-magnetic conductive metal sheet.
5, micro current vortex angular transducer according to claim 3 is characterized in that: described magnet ring is manganese-Zn ferrite magnet ring.
6, micro current vortex angular transducer according to claim 3 is characterized in that: the described toroidal inductor that is set around on the magnet ring is with the copper enameled wire coiled of line footpath less than 0.1mm.
7, micro current vortex angular transducer according to claim 3, it is characterized in that: described source of high frequency current is made up of sinusoidal signal generator and converter, and it takes place sinusoidal signal provides the sinusoidal voltage of certain frequency to be converted to sinusoidal current through converter.
8, micro current vortex angular transducer according to claim 3 is characterized in that: described sinusoidal voltage amplitude pick-up unit is the demodulating equipment that detects the sinusoidal voltage amplitude.
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CN 200510066507 CN1667350A (en) | 2005-04-27 | 2005-04-27 | Micro current vortex angular transducer and implement method thereof |
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CN 200510066507 CN1667350A (en) | 2005-04-27 | 2005-04-27 | Micro current vortex angular transducer and implement method thereof |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109641333A (en) * | 2016-08-23 | 2019-04-16 | Smc株式会社 | Clamping device |
CN110645890A (en) * | 2019-09-30 | 2020-01-03 | 北京瑞控信科技有限公司 | Corner measuring device based on electric eddy current |
CN111623698A (en) * | 2020-05-22 | 2020-09-04 | 北京控制工程研究所 | Eddy current displacement sensor circuit with nonlinear correction function |
-
2005
- 2005-04-27 CN CN 200510066507 patent/CN1667350A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109641333A (en) * | 2016-08-23 | 2019-04-16 | Smc株式会社 | Clamping device |
CN110645890A (en) * | 2019-09-30 | 2020-01-03 | 北京瑞控信科技有限公司 | Corner measuring device based on electric eddy current |
CN111623698A (en) * | 2020-05-22 | 2020-09-04 | 北京控制工程研究所 | Eddy current displacement sensor circuit with nonlinear correction function |
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