CN1652986A - Conveying device - Google Patents
Conveying device Download PDFInfo
- Publication number
- CN1652986A CN1652986A CNA038105977A CN03810597A CN1652986A CN 1652986 A CN1652986 A CN 1652986A CN A038105977 A CNA038105977 A CN A038105977A CN 03810597 A CN03810597 A CN 03810597A CN 1652986 A CN1652986 A CN 1652986A
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- China
- Prior art keywords
- mentioned
- annular element
- maintaining part
- carrying device
- conveyance
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- 239000007779 soft material Substances 0.000 claims abstract description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 239000011148 porous material Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 abstract description 44
- 239000000463 material Substances 0.000 abstract description 7
- 238000012423 maintenance Methods 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 description 39
- 239000011347 resin Substances 0.000 description 23
- 229920005989 resin Polymers 0.000 description 23
- 238000000034 method Methods 0.000 description 9
- 238000005406 washing Methods 0.000 description 9
- 230000006866 deterioration Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 241000270295 Serpentes Species 0.000 description 2
- 210000001015 abdomen Anatomy 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229920001903 high density polyethylene Polymers 0.000 description 2
- 239000004700 high-density polyethylene Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000011435 rock Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 206010013786 Dry skin Diseases 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 241000150100 Margo Species 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 241001465382 Physalis alkekengi Species 0.000 description 1
- 229920008285 Poly(ether ketone) PEK Polymers 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229950000845 politef Drugs 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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- 230000009467 reduction Effects 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/02—Adaptations of individual rollers and supports therefor
- B65G39/06—Adaptations of individual rollers and supports therefor the roller sleeves being shock-absorbing, e.g. formed by helically-wound wires
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Abstract
A conveying device capable of conveying base material without damaging it, the maintenance operation thereof being easy to perform. A feed roller (23) is provided with a ring member (24) in direct contact with a glass base plate (7), and a holding member (27) for fixing the ring member (24) to a roller shaft (22), the ring member (24) being formed of soft material. Further, the ring member (24) is provided with a dividing section to make it possible to attach or detach the ring member (24) to the roller shaft (22) without detaching the roller shaft (22) from the conveying device (1). This makes it possible to convey the glass base plate (7) without damaging it and to easily perform the maintenance operation.
Description
Technical field
The present invention is relevant carrying device.
Background technology
For example, constitute the color filter that color liquid crystal is represented panel, red by coating on glass substrate, green, anticorrodent azury and manufactured.Manufacture at this and to comprise washing procedure in operation.In order to improve clean result, watering and separation procedure promptly uses the soft washing method and the UV/03 washing method of pure water also with following two kinds of methods.And UV/03 washing method herein is a kind of ultraviolet light treatment method.Promptly make organic matter degraded, and utilize the ozone and the active oxygen that produce by the airborne oxygen of ultraviolet irradiation to remove organic matter with ultraviolet ray.
Figure 13 is the oblique drawing of open state that expression is used for the apparatus for ultraviolet light treamtent of such matting.Main body 51 the insides at apparatus for ultraviolet light treamtent 50, be provided with the carrying device 53 of donor rollers 52 that possesses plural number, can be according to this being loaded in the polylith glass substrate as handled thing (not have to illustrate) on the donor rollers 52 towards the direction of arrow conveyance successively of Figure 13.
In the past, in this carrying device 53, adopted the metallic donor rollers 52 that under ultraviolet irradiation, is difficult for deterioration., because metal donor rollers 52 is hard, when contacting, easily makes glass board produce scratch, and produce the problem of the yield rate reduction of product sometimes with glass substrate.Particularly, if when must conveyance large-scale glass substrate, for preventing the bending of glass substrate, not only at the both ends few to the quality influence of product, and come the support glass substrate donor rollers 52 also must being set near inboard position, so the problem that yield rate reduces becomes bigger.Therefore, in order to avoid this problem, adopt to be difficult for producing abrasive resin system donor rollers 52., because of resinous donor rollers 52 with metal to compare deterioration fast, exist frequently to check the problem that exchanges.And, in this exchanging operation, must at first, take off supply roll shaft 54 through following numerous and diverse operation from carrying device 53, after donor rollers 52 is extracted supply shafts 54 out, new roll shaft 54 is inserted donor rollers 52, be installed to carrying device 53 again.And,, cause the such problem of work efficiency decline of device because this maintenance activity time is long.
Summary of the invention
The present invention be directed to above-mentioned situation and carry out, its purpose is to provide a kind of carrying device, and this carrying device can be finished the conveyance operation and not damage by transport object, and, carry out maintenance activity easily.
According to carrying device for the 1st the invention that solves above-mentioned problem, it is a kind of roll shaft that has disposed roller that possesses, and the contacted carrying device of being removed object of conveyance and above-mentioned roller, above-mentioned roller possesses and is removed the contacted endless member of object, and the feature of above-mentioned endless member is to be provided with the separated part that endless member is separated along diametric(al).
And,, certainly, also be contained among the 1st invention of the present invention if above-mentioned roller is only formed situation by above-mentioned endless member.
The 2nd invention, as the described carrying device of the 1st invention, its roller has holding member, above-mentioned holding member, cut apart by the 1st maintaining part and the 2nd maintaining part that can be fixed in above-mentioned the 1st maintaining part and to form, above-mentioned endless member can be folded and be installed on the above-mentioned holding member by above-mentioned the 1st maintaining part and above-mentioned the 2nd portion of holding.
The 3rd invention, as the described carrying device of the 1st invention, above-mentioned roller has holding member, wherein side at above-mentioned endless member and above-mentioned holding member, be provided with along the outstanding extension of the direction of axle, simultaneously, be provided with the recess that can embed above-mentioned extension the opposing party.
The 4th invention as the described carrying device of the 2nd invention, a wherein side of above-mentioned endless member and above-mentioned holding member, is provided with along the outstanding extension of the direction of axle, simultaneously, is provided with the recess that can embed above-mentioned extension the opposing party.
The 5th invention, as the described carrying device of the 4th invention, above-mentioned the 1st holding member can be fixed on the above-mentioned roll shaft, and above-mentioned endless member can be fixed on the above-mentioned holding member, and above-mentioned extension or above-mentioned recess are set on above-mentioned first holding member.
The 6th invention, in the described carrying device of the 1st invention, the quilt with in the conveyance of above-mentioned endless member is removed the contacted part of object, is formed owing to contact the soft material of appropriateness that causes damage with above-mentioned endless member by the conveyance body by avoiding above-mentioned.As " can avoid above-mentioned by the conveyance body owing to contact the soft material of appropriateness that causes damage with above-mentioned endless member ", can be enumerated as fluorine resin polyimide resin, the resin material of poly ether-ketone (PEK) (PEEK) resin etc. herein.
The 7th the invention, as the 1st the invention described carrying device in, on the outline line of above-mentioned cutting part with conveyance in above-mentioned by the contacted part of conveyance body, exceed the plane that includes above-mentioned roll shaft S. A..Endless member with by the contacted situation of conveyance body under, no matter how narrow endless member is with the position that contacted by the conveyance body, certain width must be arranged.Therefore, even for example, the cutting part of cutting apart endless member along diametric(al) is a circle etc., and is not comprised by the plane that division plane forms under the situation of S. A. of roller, also is equivalent to the 7th above-mentioned invention.
The 8th invention as the described carrying device of the 2nd invention, is characterized in that above-mentioned the 2nd maintaining part can be fixed on above-mentioned the 1st maintaining part with screw.
The 9th invention, carrying device as the 8th invention, on above-mentioned the 1st maintaining part or above-mentioned the 2nd maintaining part, be provided with the mounting hole that large diameter hole and path hole link, the above-mentioned mounting hole maintaining part that is provided with is fixed on another maintaining part with the screw that runs through above-mentioned mounting hole, and above-mentioned screw is by screw portion, take the lead screw with the head bigger than the diameter of above-mentioned screw portion constitutes, above-mentioned head is allowed and is inserted logical hole, above-mentioned big footpath, and is limited to insert logical above-mentioned path hole.
The 10th invention, as the carrying device of described any one invention of the 1st～9 invention, the above-mentioned cutting part that is set on the above-mentioned annulus material is a place.
Carrying device according to the 11st invention, possessed the roll shaft that is provided with roller, conveyance above-mentioned with roller contacted by the carrying device of conveyance body in, above-mentioned in above-mentioned roller and the conveyance is made of resin by the contacted part of conveyance body, the part that this is made of resin is clipped and fixes by the non-resin parts.
In the case, may not be divided into parts more than two to these non-resin parts, form ditch on the non-resin parts, by being partially submerged in the ditch that resin constitutes, this kind situation also is equivalent to the 11st invention of the present invention above-mentioned.
Invention according to the 1st because endless member is provided with separated part, and needn't be taken off roll shaft from carrying device, and the dismounting endless member just can be installed on roll shaft.Thus one, just easily exchange the operation of endless member.
Invention according to the 2nd, endless member are to be clipped configuration by the 1st maintaining part and the 2nd maintaining part.At this moment,, be fixed on the 1st maintaining part,, can be fixed near endless member and by the position of the contacted part of conveyance body (with reference to Fig. 5) compared with roll shaft for the 2nd maintaining part.Therefore, can be accurately fixedly endless member with by the contact part bit position of conveyance body.Its result, can fixedly separated accurately in the part that contacted by the conveyance body, prevent that deviation owing to the position at separated part two ends from causing, by the instability of conveyance body when the conveyance.If the 2nd maintaining part is not fixed on the 1st maintaining part, the 1st all is fixed under the situation of (different with the 2nd invention) on the roll shaft with the both sides of 2 maintaining part, since all be fixed in 2 maintaining parts away from endless member and the part of being joined by the conveyance body, just can not fixedly separated accurately two ends and the part of being joined by the conveyance body.
According to the 3rd or the 4th invention, a wherein side of endless member and holding member is provided with axially outstanding extension, and the opposing party is provided with the recess that can embed this extension.Here, endless member is because of there being separated part, its be heated or with easily produced distortion by the interference of conveyance body etc., according to aforesaid formation, because extension is embedded in recess in advance, and limited the deviation of endless member, endless member is able to when keeping its shape and positively is fixed on the holding member.In view of the above, can prevent the distortion of endless member and conveyance sleekly by the conveyance body.
Invention according to the 5th, the 1st maintaining part moved about can not be fixed on the roll shaft, on this holding member, be inlaid with endless member.According to such formation, can maintain endless member and do not depart from roll shaft core, conveyance substrate sleekly.
Invention according to the 6th can not damage by the conveyance body and conveyance.
The 7th the invention, as the 1st the invention carrying device in, on the outline line of above-mentioned separated part with conveyance in above-mentioned by the contacted part of conveyance body, exceed the plane that includes above-mentioned roll shaft S. A..When ambient temperature change etc. causes that endless member shrinks, on separated part, produce opening.If here, separated part is formed in the plane of the S. A. that comprises roll shaft, because this peristome is towards the conveyance direction perpendicular to glass substrate, worry can produce during by the conveyance body in conveyance and rock., the invention according to the 7th because on the outline line of separated part with conveyance in by the contacted part of conveyance body, exceeded the plane that includes above-mentioned roll shaft S. A., thus by the conveyance body just always which limit on the separation limit of separated both sides support.
Therefore, the invention according to the 7th, can avoid rock and conveyance sleekly by the conveyance body.
According to the 8th invention, even do not take off the 2nd maintaining part, even or not exclusively take off screw, as long as loosening a little screw, just can remove by the 1st and the 2nd maintaining part, and then commutative endless member the fixing of endless member.Therefore, can shorten the exchange necessary time of endless member significantly.
Invention according to the 9th is not taken the lead screw even do not take down, and passes back and forth from hole, big footpath by making screw head, can be easily the installation of the 2nd maintaining part on the 1st maintaining part, and dismounting.Thus, maintenance work is become is more prone to.
Invention according to the 10th is because the separated part that is arranged on the endless member is a place, so even maintaining part is to the compressing absent-mindedness of endless member in the use of carrying device, endless member can not come off from roll shaft yet.
Invention according to the 11st, because the part of being made up of resin on the roller is disposed by the parts clamping of non-resin, so even the electromagnetic wave irradiation device of ultraviolet ray etc. is used to the present invention, by electricity such as ultraviolet ray grow resin part that ripple shone by limit to necessary and minimum, thereby suppress the deterioration of the part formed by resin.
The simple declaration of figure
The 1st figure is the washing equipment lateral plan of the 1st example.
The 2nd figure is the oblique drawing of ultraviolet cineration device.
The 3rd figure is the oblique drawing of donor rollers.
The 4th figure is the exploded perspective view of donor rollers.
The 5th figure is the cross-sectional side view of donor rollers.
The 6th figure is the cross-sectional side view that shows with the situation of carrying device conveyance glass substrate.
The 7th～9 figure is the figure of operation of the exchange work of expression boxing ring portion timber.
The 10th and 11 figure are exploded perspective views of the donor rollers of the 2nd example.
The 12nd figure is the exploded perspective view of donor rollers of other example.
The 13rd figure is the oblique drawing of the carrying device before the expression.
Embodiment
＜the 1 example 〉
Below, with reference to Fig. 1～Fig. 9, the 1st example of the carrying device of the present invention 1 specialized is described in detail.
Carrying device 1 of the present invention is a kind of the possessed washing equipment 2 that glass substrate 7 (being equivalent to of the present invention by the conveyance body) that Liquid Crystal Display (LCD) is used cleans, device of conveyance glass substrate 7.
As shown in Figure 1, washing equipment 2 is by constituting with the lower device configuration.From the front is ultraviolet cineration device 3, and its left side has infrared ray preparation heating arrangement 4 in succession, disposes cooling mechanism 5 on the right side, on the right side of cooling mechanism 5 soft cleaning device 6 is arranged in succession again.
3,4, possess carrying device 1 respectively in each device of 5,6, glass substrate 7 quilts all form a continuous wash line along the conveyance successively to the right from the left side of the direction shown in arrow among the figure.Below, be that example describes with ultraviolet cineration device 3.
The main body 11 of ultraviolet ray cineration device 3 is the case shape, is provided with opening above, and disposes as 2 reception rooms 12 decorated with lanterns (with reference to Fig. 2) that stop up that peristome.Front from main body 11, be positioned at the lamp reception room 12 in its left side, its left border rear and front end portion is supported by the 11A of front side wall portion and the 11B of back face wall portion of Link chain device amount by main body 11, the first from left of the top peristome of main body 11 half can be by this lamp reception room 12 at left to switch.On the other hand, front from main body 11, be positioned at the lamp reception room 12 on its right side, its margo dexter rear and front end portion is supported by the 11A of front side wall portion and the 11B of back face wall portion of Link chain device amount by main body 11, and half can pass through this lamp reception room 12 at the right switch right side of the top peristome of main body 11.And, between the 11A of front side wall portion and the 11B of back face wall portion of the rear and front end of each lampshade 12 one and main body 11, be respectively arranged with the support 17 of well-known pneumatic buffer formula, support 17 actions that both helped the open direction of lampshade 12, can maintain the open state of lampshade 12 again by this.
When lampshade 12 detent positions, be in the part of its bottom, dispose the many lamps 13 that are used for ultraviolet irradiation.This lamp 13 is long U oxbow lamps, and its length distance of 21 on the frame wall of roller path therewith is roughly isometric, and but, its lamp head 13A is positioned at the front portion of main body 11, and the 13B of its glass lamp portion bending of turning back in the back of body 11 forms.Its lamp head 13A is fixed on the fixed part 14 of lampshade 12 with screw, and the rear end of the 13B of glass lamp portion is fixed on and keeps on the hoop 15, and this keeps hoop 15 then is to be fixed on the lower faceplate 12A of lampshade 12 with screw.The electric wire group who links to each other with lamp head 13A (not diagram) is clustered in lampshade 12 front portions, is connected with the interior supply unit (not shown) of body 11 with the pliability snake belly tube 16 of 11 of bodies by being located at lampshade 12 front ends again.
Simultaneously, be provided with the cooling water channel that is not illustrated in lampshade 12 the insides, the water supply pipe 18 of this cooling water channel and drain hose 19 are to draw from the rear end of the lampshade of tossing about 12 that is positioned at above-mentioned snake belly tube 16, its be connected with apparatus for supplying cool water in the body 11 (not shown).
Carrying device 1 is combined and is installed on the body 11.In the inside of body 11, be provided with 2 transport frame walls 21, it is a pair of along the 11A of the front side wall portion frame wall parallel with back face wall 11B.Between this transport frame wall 21, be inserted with several cylindrical roll shafts 22 along fore-and-aft direction, it is supported by bearing (not diagram) and rotatable separately.On each roll shaft 22, roughly a plurality of transfer rollers 23 (being equivalent to roller of the present invention) are installed by homogeneous pitch, by actuating device drive roller shaft 22 rotations that are arranged on body 11 the insides, but and conveyance is loaded in the glass substrate 7 on the roller 23.
Holding member 27, the circular thing that integral body is made for corrosion-resistant steel, by the set collar 28 (being equivalent to the 1st maintaining part of the present invention) that is fixed on the roll shaft 22, and set collar 28 matches therewith, and the adapter plate 36 (being equivalent to the 2nd maintaining part of the present invention) that is used for the flat stationary annular parts 24 of seeking something far and wide when it is within reach is formed.
Set collar 28 has the internal diameter that equates substantially with the external diameter of roll shaft 22, reaches the external diameter than annular element 24 little circles.One side of this set collar 28 is the attachment faces 29 that are used to install annular element 24.On this attachment face 29,, machine away the part that equates with annular element 24 thickness and form stage portion 30 along the diameter outside.
Simultaneously, in the inboard field of stage portion 30, be formed with the groove 31 (being equivalent to recess of the present invention) that a circle can embed the flange 25 of annular element 24.When groove 31 is integrated with flange 25, above-mentioned annular element 24 is set on this stage portion 30.
Simultaneously,, be formed with screw hole 33, take the lead screw 32 and be fixed on the hole 32 to enable an adapter plate 36 usefulness at the inboard slightly institute's allocation of groove 31.This screw hole 33 is bored in equally spaced 3 places on the same circumference.
At the reverse side of the attachment face 29 of set collar 28, inboard radially is formed with the outstanding tube portion 34 of a perimetral roller direction of principal axis.Roll shaft 22 is closely embedded the inside of this one 34, and by this, set collar 28 is fixed on the roll shaft 22 with core, and can not move about in diametric(al).The position that is in central authorities substantially in the long hand direction of this one 34, open the check screw of a perforation and used hole 35, tighten by the check screw of packing in this fixed screw holes 35 (not diagram), 28 of set collars are fixed on the roll shaft 22, do as a whole and rotate.
On the other hand, adapter plate 36 is made into one and has and the set collar 28 dull and stereotyped annulus of equal outer diameters substantially.The internal diameter of adapter plate 36, more bigger than the external diameter of roll shaft 22, so that on set collar 28, axially be easy to during installation or removal adapter plate 36 slide.On this adapter plate 36,, be formed with and take the lead screw 32 and insert general-duty mounting holes 37 with the screw hole 33 corresponding positions of set collar 28.This mounting hole 37 is made into the flask shape that big small sircle hole links.The diameter of macropore 37A is bigger slightly than taking the lead the head 32A of screw 32; The diameter of aperture 37B was both big, littler than head 32A again than taking the lead the 32B of screw portion of fish screw 32.
Secondly, effect and the effect with regard to this example of above-mentioned formation is illustrated.
If when coming cleaning glass substrate 7, on the conveying roller 23 of carrying device 1, carry top glass substrate 7 driver with the washing equipment 2 of this example.So the rotation by roll shaft 22 drives, be fixed on the roll shaft 22 and just rotation of conveying roller 23 that can integrated rotation.Thus, be stated from the conveying roller 23 glass substrate 7 as shown in Figure 1 by from left side conveyance to the right side.And during the inside of glass substrate by each device 3,4,5,6, glass substrate 7 is handled successively.That is, glass substrate 7 is heated processing when preparing heating arrangement 4 the insides by infrared ray, is then carried out the ashing treatment of anticorrodent to ultraviolet cineration device 3 the insides by conveyance.Then, to the cooling of cooling mechanism 5 the insides, conveyance is to soft cleaning device 6 the inside washing dryings again by conveyance.
At this moment,, and do not contact, have only soft annular element 24 to contact (with reference to Fig. 6) with glass substrate 7 with glass substrate 7 because metal holding member 27 is littler than annular element 24 diameters.Having avoided glass substrate 7 thus is transferred roller 23 and damages.
Simultaneously, annular element 24, the ring 28 that is fixed, and the adapter plate 36 that can be fixed on the set collar 28 clips configuration.At this moment, for adapter plate 36 is fixed on the set collar 28,, more can be fixed near annular element 24 and glass substrate 7 contacted parts (with reference to Fig. 5) compared with roll shaft 22.Therefore, but the precision position of stationary annular parts 24 and glass substrate 7 contact portions well.Its result, the part that contacts with glass substrate 7 in can very accurately fixedly separated 26 two ends can prevent because glass substrate 7 vibrations during conveyance that the deviation of the position at the two ends of separated part 26 causes.
Simultaneously, because annular element 24 has separated part 26, and easily be heated or the interference of base material produces distortion.; because annular element 24 is provided with flange 25; this flange 25 is embedded on the groove 31 of set collar 28, so annular element 24 is limited with respect to the motion of set collar 28, and makes annular element 24 both keep its shape positively to be fixed on the holding member 27.Thereby, can prevent the distortion of annular element 24, and conveyance glass substrate 7 sleekly.
Particularly, because annular element 24 is embedded in a side of the set collar 28 that can not be fixed in roll shaft 22 with moving about, so can prevent the core deviation of annular element 24 with respect to roll shaft 22.Simultaneously, flange 25 and groove 31 are to be formed on full week, and make annular element 24 keep toroidal really.Vibration when in view of the above, can prevent conveyance glass substrate 7.
Because the separated part 26 that is arranged on the annular element 24 is places, and has the following advantages.Even the i.e. compressing of 36 pairs of annular elements 24 of adapter plate absent-mindedness in carrying device uses can not cause annular element 24 to come off from roll shaft 22 yet.
Because annular element 24 is heated or the influence of ultraviolet ray etc. and deterioration takes place more in early days, exchanges by the following method.
At first, unclamp a little and take the lead screw 32, rotational fixation plate 36 is to taking the lead the corresponding to position of macropore 37A (Fig. 7 with reference to) of head 32A and mounting hole 37 of screw 32.Under this state, slip adapter plate 36 allows takes the lead the head 32A of screw 32 by macropore 37A, throws off (with reference to Fig. 8) from set collar 28.Then, take off annular element 24 from set collar 28.And, turn on the separated part 26 of annular element 24, extend to and separate limit 26A, the gap of 26B can be passed through roll shaft 22, and from then on roll shaft 22 is passed through in the space, takes off annular element 24 (with reference to Fig. 9).
After this, the order through opposite with dismounting new annular element 24, is installed on the holding member 27.That is, expand the separated part 26 of open loop-shaped component 24, make roll shaft 22 from entering in the annulus here, and annular element 24 is installed on the roll shaft 22.Secondly, make groove 31 consistent, annular element 24 is embedded on the set collar 28 with flange 25.Then, allow and take the lead the head 32A of screw 32 and pass through, adapter plate 36 is slided to set collar 28, make it to contact with attachment face 29 from macropore 37A.And rotational fixation plate 36 makes takes the lead the 32B of screw portion of screw 32 and enters into the position of aperture 37B, and adapter plate 36 is not remained on can come off.At last, take the lead screw 32 by tightening, and fold annular element 24 fixing by adapter plate 36 and set collar 28.
As mentioned above, because on annular element 26, be formed with separated part 26, just can take off roll shaft 22, and only carry out the installation of annular element 24, field-strip from carrying device 1.Simultaneously, because the mounting hole 37 that is arranged on the adapter plate 36 is the flask shape, just needn't takes off and take the lead screw 32, and can on set collar 28, carry out the operation of installation or removal adapter plate 36 from set collar 28.
According to this example as above, make by soft resin with the annular element 24 of glass substrate 7 direct contacts, and, make exchange work carry out easily by on this annular element 24, separated part 26 being set.Therefore, can conveyance glass substrate 7 and make it not damage, and, can carry out maintenance work easily.
Moreover, according to this example, because the annular element of resin 24, by stainless set collar 28 and the configuration of stainless adapter plate 36 clampings, and make the part that electromagnetic wave shone on the annular element 24 be limited in Min., and suppressed the deterioration of annular element 24 by ultraviolet ray etc.
And, in this example, though be that example is illustrated with the carrying device 1 that possesses ultraviolet cineration device 3, but the carrying device on other the device 4,5,6 also has same formation, also can receive same action effect.
Simultaneously, in this example, the conveyance glass substrate 7 by the rotation of conveying roller 23, but, if glass substrate 7 is by the power conveyance beyond the roller, roller just is used to the position adjustment of glass substrate 7, can obtain effect of the present invention (the 2nd example, and other example too) equally.
＜the 2 example 〉
Below, with reference to Figure 10 and Figure 11, the 2nd example of the present invention is illustrated.
The difference of the 1st example and this example is that separated part 41 is configured to oblique direction of principal axis in annular element 40.
Because the change of ambient temperature, annular element 40 produces when shrinking, and causes separated part 41 to produce opening sometimes.Here, if 1 example is arranged to separated part 41 along the direction of principal axis of annular element 40 as the because this opening portion towards with the perpendicular direction of the conveyance direction of glass substrate 7, worry that then glass substrate 7 can produce vibration when conveyance., if separated part 41 be arranged to oblique in annular element 40 axially, then always have two segmentation side 41A, among the 41B wherein at least one is supporting glass substrate 7.Because this cause, can avoid vibration and conveyance glass substrate 7 sleekly.
＜other examples 〉
Technical scope of the present invention is not limited in above-mentioned example, below the content put down in writing also be contained in the scope of technology of the present invention.In addition, technical scope of the present invention relates to impartial scope.
(1) in the above-mentioned example, though only be provided with place's separated part 26 on annular element 24, but, as shown in figure 12, separated part 42 also can be arranged on 2 places, perhaps, is provided with more than 3 places also passable.Such formation is suitable for, and particularly, annular element 43 is made of harder materials such as PEEK resins, does not just twist motionless situation if do not add big strength.
(2) in the above-mentioned example,, but, also can recess be set in adapter plate one side though be provided with groove 31 in a side of set collar 28.Simultaneously, also can be provided with protrusion, recess is set in annular element one side in holding member one side.And, also can recess or protrusion all be set the both sides of holding member and adapter plate, be provided with in the both sides of annular element can with the protrusion or the recess of above-mentioned parts tabling.
(3) in the above-mentioned example, flange 25 and groove 31, though be set on the full week of annular element 24 and set collar 28, but, only the part setting on circumference also can.
(4) in the above-mentioned example, be provided with in a side of set collar 28 and take the lead screw 32, be provided with mounting hole 37, but, also can mounting hole be set, take the lead screw in adapter plate one side setting in set collar one side in adapter plate 36 1 sides.
(5) in the above-mentioned example, though annular element 24 form by the PTFE resin, but, also can with other resins.Resin material that can fine use concrete as, as the sepura (registered trade mark) of polyimide resin, high density polyethylene (HDPE) (UPE) etc.And, when being used to inner carrying device for hi-heat infrared ray preheating device 4, preferably use PEEK resin with outstanding resistance to heat.Also can use and sneak into fiber etc., carry out annealing in process, the resin that upgradings such as bridge formation are handled.
(6) in the above-mentioned example, holding member 27 is made by corrosion-resistant steel, but, also can adopt aluminium, pottery etc.
(7) conveying roller is installed on the roll shaft, the position of each roll shaft top roll is staggered also passable mutually axially.So, just can avoid the scratch that always contacts and cause with conveying roller owing to by transport object in certain location.
Industry is utilized possibility
As mentioned above, according to carrying device of the present invention, useful with removed object as conveyance Device is specially adapted to, when being removed the situation that object is the easy injured object such as glass, and to quilt Transport object is carried out the operation of UV treatment.
Claims (10)
- One kind have the band roller roll shaft, conveyance and above-mentioned roller are contacted by the carrying device of conveyance body, described roller, have with conveyance in above-mentioned by the contacted annular element of conveyance body, on above-mentioned annular element, be provided with along the separated part of diametric(al) disjunction.
- 2. the carrying device of putting down in writing according to claim 1, described roller has holding member, above-mentioned holding member, by the 1st maintaining part and, the 2nd maintaining part that can be fixed on this 1st maintaining part is cut apart formation, above-mentioned annular element is by above-mentioned the 1st maintaining part and above-mentioned the 2nd maintaining part clamping and be installed on the above-mentioned holding member.
- 3. the carrying device of putting down in writing according to claim 1, the side in above-mentioned annular element and the above-mentioned holding member is provided with the protrusion that stretches out along the direction of axle, simultaneously at opposite side, is provided with above-mentioned protrusion and embeds possible recess.
- 4. the carrying device of putting down in writing according to claim 2 a wherein side of above-mentioned annular element and above-mentioned holding member, is provided with the protrusion that stretches out along the direction of axle, simultaneously the opposing party, is provided with above-mentioned protrusion and embeds possible recess.
- 5. the carrying device of putting down in writing according to claim 4, above-mentioned the 1st maintaining part can be fixed on the above-mentioned roll shaft, and above-mentioned annular element can be fixed on the above-mentioned holding member, and above-mentioned protrusion or above-mentioned recess are arranged on above-mentioned the 1st maintaining part.
- 6. the carrying device of putting down in writing according to claim 1, on the above-mentioned annular element, be made of soft material by the contacted part of conveyance body with above-mentioned in the conveyance, this soft material has can avoid the above-mentioned damage that causes when being contacted with above-mentioned annular element by the conveyance body.
- 7. the carrying device of putting down in writing according to claim 1, on the outline line of above-mentioned separated part, the above-mentioned part of being joined by the conveyance body with in the conveyance is not converged in the plane of the axis of revolution that has comprised above-mentioned roll shaft.
- 8. the carrying device of putting down in writing according to claim 2, above-mentioned the 2nd maintaining part, available screw is fixed on above-mentioned the 1st maintaining part.
- 9. the carrying device of being put down in writing according to Claim 8, on above-mentioned the 1st maintaining part or the 2nd maintaining part, be provided with the mounting hole that macropore and aperture are formed by connecting, be provided with on the maintaining part of above-mentioned mounting hole, fixed thereon by another maintaining part of key screw that connects above-mentioned mounting hole, above-mentioned screw, be to take the lead screw by screw portion with than what this screw portion big head of diameter constituted, above-mentioned head is permitted slotting wearing by above-mentioned big footpath pore volume, and is inserted logical by the restriction of above-mentioned path hole.
- 10. according to any carrying device of being put down in writing of claim 1-9, the above-mentioned separated part that is located on the above-mentioned annular element is a place.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP138363/2002 | 2002-05-14 | ||
| JP2002138363A JP2003327320A (en) | 2002-05-14 | 2002-05-14 | Conveying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1652986A true CN1652986A (en) | 2005-08-10 |
| CN100420615C CN100420615C (en) | 2008-09-24 |
Family
ID=29416860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB038105977A Expired - Fee Related CN100420615C (en) | 2002-05-14 | 2003-05-12 | Conveying device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2003327320A (en) |
| KR (1) | KR100983419B1 (en) |
| CN (1) | CN100420615C (en) |
| TW (1) | TWI277588B (en) |
| WO (1) | WO2003095341A1 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101256051B (en) * | 2007-03-01 | 2010-06-02 | 松下电器产业株式会社 | Heat treatment device |
| CN102205914A (en) * | 2010-03-31 | 2011-10-05 | 珠海赛纳打印科技股份有限公司 | Paper feeder |
| CN102205913A (en) * | 2010-03-31 | 2011-10-05 | 珠海赛纳打印科技股份有限公司 | Paper-feeding roller device |
| CN101643148B (en) * | 2008-08-06 | 2012-04-18 | 平田机工株式会社 | Conveying system |
| CN101693488B (en) * | 2009-11-02 | 2012-07-04 | 友达光电股份有限公司 | Roller conveying device |
| CN102689779A (en) * | 2012-05-31 | 2012-09-26 | 深圳市华星光电技术有限公司 | Idler wheel for conveying glass substrates |
| CN102807088A (en) * | 2012-08-03 | 2012-12-05 | 昆山圣源机械有限公司 | Flat car convenient for discharging |
| CN102910430A (en) * | 2012-10-29 | 2013-02-06 | 深圳市华星光电技术有限公司 | Roller structure used for carrying and conveying glass substrate |
| CN103387150A (en) * | 2012-05-11 | 2013-11-13 | 富士施乐株式会社 | Sheet transport device and image forming apparatus |
| CN113183528A (en) * | 2021-05-08 | 2021-07-30 | 南京卓能机械设备有限公司 | Separating traction device |
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| JP2006306541A (en) * | 2005-04-27 | 2006-11-09 | San Techno System Kk | Substrate conveying roller, and substrate treatment device |
| KR100725953B1 (en) | 2005-08-03 | 2007-06-11 | 여동구 | Roller of conveyor |
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| KR100711291B1 (en) * | 2005-09-30 | 2007-04-25 | 세메스 주식회사 | Apparatus for bearing shaft for conveying glass substrate |
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| KR101858588B1 (en) | 2018-01-18 | 2018-05-16 | 김정연 | A roller to be fixed to the shafts of conveying device |
| KR101867981B1 (en) * | 2018-03-29 | 2018-06-15 | 김정연 | A roller used in conveying device |
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| JPS461960Y1 (en) * | 1970-04-20 | 1971-01-22 | ||
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| JPS5524020Y2 (en) * | 1975-12-23 | 1980-06-09 | ||
| JPS59183417U (en) * | 1983-05-25 | 1984-12-06 | 堀 錬士 | Belt support roller |
| JPH0127219Y2 (en) * | 1985-02-21 | 1989-08-15 | ||
| DE8905555U1 (en) * | 1989-05-03 | 1989-06-22 | Gebhardt Fördertechnik GmbH, 74889 Sinsheim | Kit for retrofitting accumulation roller conveyors |
| JPH0320118A (en) * | 1989-06-16 | 1991-01-29 | Koyo Seiko Co Ltd | Roller bearing for cross joint shaft |
| JPH10203631A (en) * | 1997-01-24 | 1998-08-04 | Kubota Corp | Slit type tire roller |
| JPH10203630A (en) * | 1997-01-24 | 1998-08-04 | Kubota Corp | Slit type tire roller |
| JP2000001217A (en) * | 1998-06-16 | 2000-01-07 | Clean Technology Kk | Transport roller in uv cleaning apparatus |
| CN2480338Y (en) * | 2001-04-24 | 2002-03-06 | 金祖科 | Rubber idler |
| JP2003020112A (en) * | 2001-07-11 | 2003-01-21 | Clean Technology Kk | Conveyance roller in uv cleaning device |
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- 2002-05-14 JP JP2002138363A patent/JP2003327320A/en active Pending
-
2003
- 2003-05-12 KR KR1020047018237A patent/KR100983419B1/en active IP Right Grant
- 2003-05-12 WO PCT/JP2003/005885 patent/WO2003095341A1/en active Application Filing
- 2003-05-12 CN CNB038105977A patent/CN100420615C/en not_active Expired - Fee Related
- 2003-05-14 TW TW092113054A patent/TWI277588B/en not_active IP Right Cessation
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101256051B (en) * | 2007-03-01 | 2010-06-02 | 松下电器产业株式会社 | Heat treatment device |
| CN101643148B (en) * | 2008-08-06 | 2012-04-18 | 平田机工株式会社 | Conveying system |
| CN101693488B (en) * | 2009-11-02 | 2012-07-04 | 友达光电股份有限公司 | Roller conveying device |
| CN102205914A (en) * | 2010-03-31 | 2011-10-05 | 珠海赛纳打印科技股份有限公司 | Paper feeder |
| CN102205913A (en) * | 2010-03-31 | 2011-10-05 | 珠海赛纳打印科技股份有限公司 | Paper-feeding roller device |
| CN102205914B (en) * | 2010-03-31 | 2014-04-30 | 珠海赛纳打印科技股份有限公司 | Paper feeder |
| CN103387150A (en) * | 2012-05-11 | 2013-11-13 | 富士施乐株式会社 | Sheet transport device and image forming apparatus |
| WO2013177814A1 (en) * | 2012-05-31 | 2013-12-05 | 深圳市华星光电技术有限公司 | Roller for conveying glass substrate |
| CN102689779A (en) * | 2012-05-31 | 2012-09-26 | 深圳市华星光电技术有限公司 | Idler wheel for conveying glass substrates |
| CN102807088A (en) * | 2012-08-03 | 2012-12-05 | 昆山圣源机械有限公司 | Flat car convenient for discharging |
| CN102910430A (en) * | 2012-10-29 | 2013-02-06 | 深圳市华星光电技术有限公司 | Roller structure used for carrying and conveying glass substrate |
| CN102910430B (en) * | 2012-10-29 | 2015-06-10 | 深圳市华星光电技术有限公司 | Roller structure used for carrying and conveying glass substrate |
| CN113183528A (en) * | 2021-05-08 | 2021-07-30 | 南京卓能机械设备有限公司 | Separating traction device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20040108807A (en) | 2004-12-24 |
| KR100983419B1 (en) | 2010-09-20 |
| TWI277588B (en) | 2007-04-01 |
| CN100420615C (en) | 2008-09-24 |
| WO2003095341A1 (en) | 2003-11-20 |
| JP2003327320A (en) | 2003-11-19 |
| TW200307637A (en) | 2003-12-16 |
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