CN1633486A - 金属基板化学-机械抛光方法 - Google Patents
金属基板化学-机械抛光方法 Download PDFInfo
- Publication number
- CN1633486A CN1633486A CNA038037963A CN03803796A CN1633486A CN 1633486 A CN1633486 A CN 1633486A CN A038037963 A CNA038037963 A CN A038037963A CN 03803796 A CN03803796 A CN 03803796A CN 1633486 A CN1633486 A CN 1633486A
- Authority
- CN
- China
- Prior art keywords
- polishing
- colloidal silica
- chemical
- mechanical polishing
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 80
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 40
- 239000002184 metal Substances 0.000 title claims abstract description 40
- 239000000758 substrate Substances 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 68
- 239000000203 mixture Substances 0.000 claims abstract description 48
- 239000008119 colloidal silica Substances 0.000 claims abstract description 38
- 239000002245 particle Substances 0.000 claims abstract description 26
- 239000012212 insulator Substances 0.000 claims abstract description 22
- 239000007900 aqueous suspension Substances 0.000 claims abstract description 19
- 239000004065 semiconductor Substances 0.000 claims abstract description 7
- 238000004377 microelectronic Methods 0.000 claims abstract description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 24
- 239000010937 tungsten Substances 0.000 claims description 24
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 23
- 230000002378 acidificating effect Effects 0.000 claims description 18
- 239000000377 silicon dioxide Substances 0.000 claims description 12
- 230000004888 barrier function Effects 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000005260 corrosion Methods 0.000 claims description 6
- 230000007797 corrosion Effects 0.000 claims description 6
- 239000003112 inhibitor Substances 0.000 claims description 6
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- 239000000725 suspension Substances 0.000 claims description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 4
- GDFCWFBWQUEQIJ-UHFFFAOYSA-N [B].[P] Chemical compound [B].[P] GDFCWFBWQUEQIJ-UHFFFAOYSA-N 0.000 claims description 4
- ICIWUVCWSCSTAQ-UHFFFAOYSA-M iodate Chemical group [O-]I(=O)=O ICIWUVCWSCSTAQ-UHFFFAOYSA-M 0.000 claims description 4
- 239000005360 phosphosilicate glass Substances 0.000 claims description 4
- JLKDVMWYMMLWTI-UHFFFAOYSA-M potassium iodate Chemical compound [K+].[O-]I(=O)=O JLKDVMWYMMLWTI-UHFFFAOYSA-M 0.000 claims description 4
- 239000001230 potassium iodate Substances 0.000 claims description 4
- 235000006666 potassium iodate Nutrition 0.000 claims description 4
- 229940093930 potassium iodate Drugs 0.000 claims description 4
- 239000005368 silicate glass Substances 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 238000009966 trimming Methods 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- NALMPLUMOWIVJC-UHFFFAOYSA-N n,n,4-trimethylbenzeneamine oxide Chemical compound CC1=CC=C([N+](C)(C)[O-])C=C1 NALMPLUMOWIVJC-UHFFFAOYSA-N 0.000 claims description 3
- 239000011697 sodium iodate Substances 0.000 claims description 3
- 235000015281 sodium iodate Nutrition 0.000 claims description 3
- 229940032753 sodium iodate Drugs 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000004411 aluminium Substances 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 2
- 239000002253 acid Substances 0.000 abstract description 11
- 239000007800 oxidant agent Substances 0.000 abstract 1
- 238000007517 polishing process Methods 0.000 abstract 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 8
- 239000000428 dust Substances 0.000 description 8
- 239000000654 additive Substances 0.000 description 6
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 5
- 229910017604 nitric acid Inorganic materials 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 229910021485 fumed silica Inorganic materials 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000003115 biocidal effect Effects 0.000 description 1
- 239000003139 biocide Substances 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 235000010755 mineral Nutrition 0.000 description 1
- 229940031815 mycocide Drugs 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000003352 sequestering agent Substances 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 230000000153 supplemental effect Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- ing And Chemical Polishing (AREA)
Abstract
Description
测试 | 磨料微粒平均直径(纳米) | 钨抛光速度(埃/分钟) | TEOS抛光速度(埃/分钟) | 钨/TEOS选择性 |
1 | 7 | 2400 | 90 | 26/1 |
2 | 9 | 2800 | 110 | 25/1 |
3 | 12 | 3300 | 250 | 13/1 |
4 | 25 | 2000 | 1000 | 2/1 |
5 | 50 | 1000 | 1700 | 0.6/1 |
测试 | pH | 钨抛光速度(埃/分钟) | TEOS抛光速度(埃/分钟) | 钨/TEOS选择性 |
6 | 7 | 8 00 | 460 | 1.7/1 |
7 | 2.1 | 2800 | 110 | 25/1 |
测试 | 胶体硅石重量浓度 | 钨抛光速度(埃/分钟) | TEOS抛光速度(埃/分钟) | 钨/TEOS选择性 |
8 | 15% | 3500 | 2000 | 1.7/1 |
9 | 2.7% | 3300 | 250 | 13/1 |
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0201790A FR2835844B1 (fr) | 2002-02-13 | 2002-02-13 | Procede de polissage mecano-chimique de substrats metalliques |
FR0201790 | 2002-02-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1633486A true CN1633486A (zh) | 2005-06-29 |
CN1326212C CN1326212C (zh) | 2007-07-11 |
Family
ID=27620173
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038037963A Expired - Lifetime CN1326212C (zh) | 2002-02-13 | 2003-02-12 | 金属基板化学-机械抛光方法 |
Country Status (13)
Country | Link |
---|---|
US (1) | US7077727B2 (zh) |
EP (1) | EP1476519B1 (zh) |
JP (1) | JP2005518089A (zh) |
KR (1) | KR101030733B1 (zh) |
CN (1) | CN1326212C (zh) |
AT (1) | ATE464361T1 (zh) |
AU (1) | AU2003245744A1 (zh) |
DE (1) | DE60332092D1 (zh) |
DK (1) | DK1476519T3 (zh) |
FR (1) | FR2835844B1 (zh) |
MY (1) | MY135387A (zh) |
TW (1) | TWI271796B (zh) |
WO (1) | WO2003068881A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100425405C (zh) * | 2006-08-03 | 2008-10-15 | 南京航空航天大学 | 冷冻纳米磨料抛光垫及其制备方法 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005268667A (ja) * | 2004-03-19 | 2005-09-29 | Fujimi Inc | 研磨用組成物 |
US7300876B2 (en) * | 2004-12-14 | 2007-11-27 | Sandisk 3D Llc | Method for cleaning slurry particles from a surface polished by chemical mechanical polishing |
KR100770571B1 (ko) * | 2006-06-05 | 2007-10-26 | 테크노세미켐 주식회사 | 텅스텐의 화학적 기계적 연마슬러리 조성물 |
KR100948814B1 (ko) * | 2006-09-27 | 2010-03-24 | 테크노세미켐 주식회사 | 텅스텐 배선 형성용 슬러리 조성물 및 이를 이용한 반도체소자의 제조 방법 |
US20080096385A1 (en) * | 2006-09-27 | 2008-04-24 | Hynix Semiconductor Inc. | Slurry composition for forming tungsten pattern and method for manufacturing semiconductor device using the same |
JP5097616B2 (ja) * | 2008-05-13 | 2012-12-12 | 株式会社オハラ | リチウムイオン伝導性ガラスセラミックス体の製造方法 |
US8865013B2 (en) | 2011-08-15 | 2014-10-21 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Method for chemical mechanical polishing tungsten |
WO2013147046A1 (ja) * | 2012-03-30 | 2013-10-03 | ニッタ・ハース株式会社 | 研磨組成物 |
CN103692327A (zh) * | 2013-11-29 | 2014-04-02 | 广东鸿泰科技股份有限公司 | 压铸模具散热筋条的抛光方法 |
CN103753356A (zh) * | 2014-01-21 | 2014-04-30 | 曼盛包装(上海)有限公司 | 一种透明pmma注射成型合模线的抛光消除方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5340370A (en) * | 1993-11-03 | 1994-08-23 | Intel Corporation | Slurries for chemical mechanical polishing |
US5858813A (en) * | 1996-05-10 | 1999-01-12 | Cabot Corporation | Chemical mechanical polishing slurry for metal layers and films |
FR2754937B1 (fr) * | 1996-10-23 | 1999-01-15 | Hoechst France | Nouveau procede de polissage mecano-chimique de couches de materiaux isolants a base de derives du silicium ou de silicium |
US6309560B1 (en) * | 1996-12-09 | 2001-10-30 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry useful for copper substrates |
US5993685A (en) * | 1997-04-02 | 1999-11-30 | Advanced Technology Materials | Planarization composition for removing metal films |
AU3055599A (en) * | 1998-04-01 | 1999-10-25 | Asahi Kasei Kogyo Kabushiki Kaisha | Method of manufacturing interconnection structural body |
US6355075B1 (en) * | 2000-02-11 | 2002-03-12 | Fujimi Incorporated | Polishing composition |
US6409781B1 (en) * | 2000-05-01 | 2002-06-25 | Advanced Technology Materials, Inc. | Polishing slurries for copper and associated materials |
US6692546B2 (en) * | 2001-08-14 | 2004-02-17 | Advanced Technology Materials, Inc. | Chemical mechanical polishing compositions for metal and associated materials and method of using same |
US9267909B2 (en) * | 2012-07-13 | 2016-02-23 | Saudi Arabian Oil Company | Apparatus, method and system for detecting salt in a hydrocarbon fluid |
-
2002
- 2002-02-13 FR FR0201790A patent/FR2835844B1/fr not_active Expired - Lifetime
-
2003
- 2003-02-11 MY MYPI20030459A patent/MY135387A/en unknown
- 2003-02-11 TW TW092102770A patent/TWI271796B/zh not_active IP Right Cessation
- 2003-02-12 CN CNB038037963A patent/CN1326212C/zh not_active Expired - Lifetime
- 2003-02-12 JP JP2003567997A patent/JP2005518089A/ja active Pending
- 2003-02-12 AU AU2003245744A patent/AU2003245744A1/en not_active Abandoned
- 2003-02-12 WO PCT/IB2003/000535 patent/WO2003068881A1/en active Application Filing
- 2003-02-12 KR KR1020047012558A patent/KR101030733B1/ko active IP Right Grant
- 2003-02-12 EP EP03739621A patent/EP1476519B1/en not_active Expired - Lifetime
- 2003-02-12 AT AT03739621T patent/ATE464361T1/de active
- 2003-02-12 DK DK03739621.5T patent/DK1476519T3/da active
- 2003-02-12 US US10/500,986 patent/US7077727B2/en not_active Expired - Lifetime
- 2003-02-12 DE DE60332092T patent/DE60332092D1/de not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100425405C (zh) * | 2006-08-03 | 2008-10-15 | 南京航空航天大学 | 冷冻纳米磨料抛光垫及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2003068881A1 (en) | 2003-08-21 |
KR20040089631A (ko) | 2004-10-21 |
JP2005518089A (ja) | 2005-06-16 |
FR2835844A1 (fr) | 2003-08-15 |
AU2003245744A1 (en) | 2003-09-04 |
EP1476519A1 (en) | 2004-11-17 |
CN1326212C (zh) | 2007-07-11 |
US7077727B2 (en) | 2006-07-18 |
MY135387A (en) | 2008-04-30 |
TW200400553A (en) | 2004-01-01 |
ATE464361T1 (de) | 2010-04-15 |
FR2835844B1 (fr) | 2006-12-15 |
KR101030733B1 (ko) | 2011-04-26 |
TWI271796B (en) | 2007-01-21 |
US20050085166A1 (en) | 2005-04-21 |
DE60332092D1 (de) | 2010-05-27 |
DK1476519T3 (da) | 2010-06-07 |
EP1476519B1 (en) | 2010-04-14 |
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