CN1619937A - Large stroke length nano-stepping piezoelectric motor - Google Patents
Large stroke length nano-stepping piezoelectric motor Download PDFInfo
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- CN1619937A CN1619937A CN 200410072545 CN200410072545A CN1619937A CN 1619937 A CN1619937 A CN 1619937A CN 200410072545 CN200410072545 CN 200410072545 CN 200410072545 A CN200410072545 A CN 200410072545A CN 1619937 A CN1619937 A CN 1619937A
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Abstract
This invention discloses large travel nano grade step piezoelectric motor referring to micro-driving system, especially referring to nano measuring and positioning, which contains first clamp, second clamp, first driver, second driver and driving axle, wherein the first clamp is connected with first driver, second clamp is connected with second driver, the first clamp, second clamp, first driver and second driver compose push-pull relation.
Description
Technical field
The present invention relates to little drive system, specifically relate to be applied to nano measurement or nanometer positioning large stroke length nano-stepping piezoelectric motor.
Background technology
Nanometer technology is considered to the scientific and technological forward position of 21 century, and it combines science and technology field such as engineering, physics, chemistry and biology, and has begun that industrial circle is had key effect.Along with the fast development of nanometer technology, nanometer positioning and nano measurement have become the important directions and the basic problem of nanoscale science and technology research, and are widely used in fields such as optics, semi-conductor industry, mechanical industry.
No matter be nano measurement or nanometer positioning, all need a little drive system.The performance quality of microdrive directly has influence on and measures or locating accuracy.So-called microdrive refers to the device and the device that can produce little driving action.In MEMS (micro electro mechanical system), microdrive is crucial.Emphasis direction that famous both at home and abroad university and laboratory are all studied the research of the design of relevant microdrive, processing, manufacturing technology, measuring technology etc. as micromechanics and breach.Piezo-electric motor is the next-generation drive that development in recent years is got up, be a kind of micro positioner that utilizes the piezoelectric ceramic inverse piezoelectric effect to make, advantage such as have that volume is little, thrust is big, precision is high, displacement resolution is high and frequency response is fast, and do not generate heat, not producing noise, is desirable micro-displacement sensor.Linear piezoelectric motor can be divided into two kinds: a kind of design that is based on flexible hinge, the shortcoming of this structure are that range of movement is little, have only several microns.Another is to adopt the wriggling structural design, since the scientist of IBM in 1989 is used for STM with this structure first, has become the focus of various countries' research always, and has proposed multiple improvement structure.The WalkingDrive piezo-electric motor range of movement of Japan's development is bigger, is generally 30～50mm, and maximum can reach 200mm.Though piezo-electric motor has reached the level of using, and is difficult to use in wider scope owing to price comparison is expensive, change the structure of motor and select suitable material can further reduce the cost of motor.
Summary of the invention
For overcoming the deficiencies in the prior art, the object of the present invention is to provide the low price large stroke length nano-stepping piezoelectric motor.The technical solution used in the present invention is, large stroke length nano-stepping piezoelectric motor is made up of first binding clasp, second binding clasp, first driver, second driver, driving shaft and control system, first binding clasp links to each other with first driver, second binding clasp links to each other with second driver, first binding clasp, second binding clasp, first driver, second driver constitute the push-and-pull relation, driving shaft is moved, promptly when first binding clasp clamps, second binding clasp loosens, first driver promotes the driving shaft motion simultaneously, and second driver is done preliminary activities; When second binding clasp clamps, first binding clasp is in relaxation state, second driver continues to drive the driving shaft motion, first driver is done preliminary activities simultaneously, so move in circles, control system is exported two-way triangular wave, two-way square wave chronologically, after direct current amplifier amplifies, is loaded on the piezo-electric motor it is moved control.
Wherein, described push-and-pull relation can be that second binding clasp loosens when first binding clasp clamps, and first driver expands and promotes the driving shaft motion simultaneously, and second driver expands and does preliminary activities; When second binding clasp clamped, first binding clasp was in relaxation state, and second driver shrinks the motion of pulling driving shaft, and first driver is done preliminary activities simultaneously, so moves in circles.
What control system adopted is 8031 single-chip computer control systems, the output of square wave is to get with two pins timing negates of P1 mouth, triangular wave then is that what keyboard and demonstration were selected for use is 8279 chips by the sync buffering output acquisition of two D/A conversion chip DAC0832 that extend out.Direct current amplifier is to adopt four road special dc high voltage amplifiers.
Control system is exported the two-way triangular wave chronologically, the two-way square wave is meant that control system is to finish the control of follow procedure successively
System:
Open interruption
Scene protection
Judge whether to be 1/2 cycle;
Two pin negates of P1 mouth, the output square wave;
Judge that triangular wave reaches peak value and subtracts 1, otherwise add 1;
Generate chip to triangular wave and send number; Judge whether counter overflows, and if not, counter adds 1, returns and export square wave,, interrupt returning if then recover on-the-spot.
First binding clasp, second binding clasp, first driver, second driver can symmetry be placed, and promptly first binding clasp, first driver, second driver, second binding clasp are placed successively.
First binding clasp, second binding clasp are selected the stacked block piezoelectric crystal of the bigger multi-disc of deformation for use.
The present invention can bring following effect: owing to adopt first binding clasp, second binding clasp, first driver, second activation configuration of push-and-pull working method, thereby the present invention has simple in structurely, and cost is low, simultaneously, and the characteristics that range of movement is bigger.
Description of drawings
Fig. 1 piezo-electric motor fine motion schematic diagram
Fig. 2 piezoelectric motor configuration schematic diagram
Fig. 3 piezo-electric motor driving voltage waveform figure
Fig. 4 hardware control system structure chart
Fig. 5 experimental rig connection diagram
Fig. 6 displacement is with frequency variation curve
Fig. 7 displacement is with the change in voltage curve
Fig. 8 piezo-electric motor moving displacement curve
Fig. 9 control system timer produces the waveform flow chart
Embodiment
Further specify the present invention below in conjunction with drawings and Examples.
The large stroke length nano-stepping piezoelectric motor of introducing in the present patent application adopts " pushing away-La " alternating movement principle, can realize the nanoscale continuous motion in the above stroke range of 10mm.Fields such as this motor can be processed at nano-machine, electronic device production, MEMS (micro electro mechanical system), nano material, nanobiology, nano measurement are applicable.Motion principle:
Because piezoelectric has advantages such as little, the no thermal source of volume, ultrahigh resolution, therefore can be used for realizing little driving.This paper has carried out technological improvement on the basis of " looper principle ", produce four tunnel pumping signals by control system, adopts novel " pushing away-La " principle to realize the nanoscale continuously and smoothly motion of motor." push away-La " that principle as shown in Figure 1.Piezo-electric motor is by two binding clasp C
1, C
2With two driver A
1, A
2Form.As binding clasp C
1During clamping, binding clasp C
2Loosen, simultaneously driver A
1Expand, promote the driving axial left movement, at this moment, driver A
2Expand (this is a preliminary activities); Next step is as binding clasp C
2During clamping, step up device C
1Then be in relaxation state, driver A
2Shrink, because C
2Clamping, so continue to promote the driving axial left movement, driver A simultaneously
1Shrink (this also is a preliminary activities); Next step, the same first step, i.e. C
1Clamp C
2Loosen A
2And A
1Expand, promote the driving shaft motion ...And so forth, alternately " push away " and " drawing ", thereby make driving shaft continuous motion left constantly.
Structural design:
According to above-mentioned principle, can design piezoelectric motor configuration, as shown in Figure 2.Piezo-electric motor comprises two binding clasp (C
1, C
2) and two driver (A
1, A
2), form a unit by a binding clasp and a driver.Because principle, the structure of these two unit and the function that should satisfy are in full accord, so two unit symmetries are placed, so both strengthened the actuating force of motor, increased traveling comfort again.
For binding clasp, selected the stacked block piezoelectric crystal of the bigger multi-disc of deformation for use, when giving the electrifying electrodes of piezoelectric crystal piece, they can produce distortion-stretching, extension simultaneously or shrink, and finish the action of holding tightly and loosening driving shaft.For driver, selected the tubular piezoelectric ceramic, suitably select the wall thickness and the length of piezoelectric element, make it to satisfy the requirement that produces moderate finite deformation and actuating force.Drive control signal:
The supply power voltage waveform that matches with above-mentioned motion principle as shown in Figure 3.Fig. 3 top is a voltage waveform of supplying with binding clasp C1, C2 piezoelectric crystal piece, and Fig. 3 below is a voltage waveform of supplying with driver A1, A2 tubular piezo-electric crystal.When transition region Tr, because C1 and C2 clamp simultaneously, so A1 pushes away with A2 is pull-shaped and becomes to make a concerted effort drive shaft rod motion simultaneously.Because overlap joint in A1, the A2 motion and supply driver is triangular wave,, thereby guaranteed the stationarity of moving so the motor motion state is continuous uniform motion.If when C1 and C2, A1 and A2 drive waveforms are exchanged simultaneously, driving shaft will move round about.Control system is formed:
As shown in Figure 4, the function of control system should satisfy four road timing waveform requirements that Fig. 3 proposes, and promptly exports two-way triangular wave, two-way square wave, and output chronologically.Four road timing waveforms that control system produces are loaded on the piezo-electric motor after direct current amplifier amplifies, make its finish advance or retreat, functions such as single step or continuous motion.What hardware system adopted is 8031 single-chip computer control systems, and the output of square wave is to get with two pins timing negates of P1 mouth, and triangular wave then is the sync buffering output acquisition by two D/A conversion chip DAC0832 that extend out.What keyboard and demonstration were selected for use is 8279 chips.Direct current amplifier is to adopt four road special dc high voltage amplifiers.Software systems adopt Kei1 C advanced language programming, produce required waveform with the timer interrupt mode.
The program circuit of control system as shown in Figure 9.
Piezo-electric motor performance test and analysis:
Fig. 5 is the used experimental rig connection diagram of piezo-electric motor performance test.
It is that PZT four tunnel amplifies power supply that used direct current amplifies power supply, and four tunnel frequency response can reach 2kHz; Output ripple＜the 1.0VP-P of its square wave (50 week), the output ripple＜0.1VP-P of triangular wave (50 week).What capacitance gage was selected for use is 7DC-2000 type high-accuracy capacitor micrometer, and its resolution can reach 4nm/mV.
Utilize above device, the kinetic characteristic of piezo-electric motor is tested.
The relation test of piezo-electric motor moving displacement and driving frequency
In the test, keep driving voltage amplitude constant, and change the driving voltage frequency.In the frequency range of 1～40Hz, the every change of frequency 5Hz carries out one-shot measurement, respectively at the piezo-electric motor single step displacement that records under 200V and the 300V driving voltage and the relation curve between the driving frequency as shown in Figure 6.
As seen from Figure 6, when driving voltage amplitude one timing, the step pitch of piezo-electric motor reduces with the raising of driving frequency.The relation test of piezo-electric motor moving displacement and driving voltage:
The driving voltage fixed-frequency is at 5Hz, and the every raising of driving voltage amplitude 50V measures once, and piezo-electric motor single step displacement that records and the relation curve between the driving voltage are as shown in Figure 7.
As seen from Figure 7, when one timing of driving voltage frequency, the step pitch of piezo-electric motor increases with the increase of driving voltage.The actuating speed test of piezo-electric motor:
Find that by test the actuating speed of piezo-electric motor is not only relevant with the size of driving voltage, and is also relevant with driving frequency.In rated voltage, actuating speed is monotonic increase with the increase of driving voltage.Simultaneously, (be 30Hz in the test) when driving frequency is worth less than certain, actuating speed also can be accelerated with the raising of driving frequency, but when driving frequency surpasses this value (30Hz), the raising of driving frequency can influence the raising of actuating speed on the contrary.This mainly is because this motor adopts is the relay motion principle, has a driving frequency upper limit during work and exists.
Table 1 is depicted as under the 300V driving voltage, the motor drive speed during the different driving frequency.
Motor drive speed under the table 1 300V voltage during different driving frequency
Frequency f/Hz 15 10 15 20 25 30 35 40
Speed ν/μ m/s 1.3 3.3 5.7 8.0 9.5 11.5 12.5 11.8 12.8
As can be seen from the table, the actuating speed of this motor can reach 12 μ m/s.Strengthen voltage and can further improve actuating speed, but will see that used piezoelectric element allows great driving voltage, otherwise can damage piezoelectric element, even cause puncture.
The linearity of piezo-electric motor motion:
Finding by a large amount of tests, is to push away-motion principle of La relay-type though this motor adopts, because system design cleverly, the moving displacement that has guaranteed this motor is linear, and promptly this motor has been realized continuously and smoothly's motion.
Fig. 8 is under the driving voltage of 200V, 10Hz, the piezo-electric motor moving displacement curve that records.During measurement, control its motion, record one secondary data of every two step of motion of motor by the piezo-electric motor controller.As seen from Figure 8, the moving displacement of motor is linear.
The actuating force of piezo-electric motor:
In the test, will drive the measurement that force measurement changes counterweight weight into, counterweight will be strengthened gradually from little, observe the fine motion situation of motor simultaneously with capacitance gage by a pulley mechanism.The maximum driving force that records piezo-electric motor at last is 1.4N.
The minimum step pitch of piezo-electric motor:
Find in the test, when piezo-electric motor is lower than 50V at driving voltage, the data instability, and also under the frequency that has, motor has stagnates motionless phenomenon.Simultaneously, known by the test of front, the step pitch of piezo-electric motor reduces with the raising of driving frequency, increases with the increase of driving voltage.But, carry out minimum step pitch under the metastable 5Hz that can only fetch data, the 50V driving voltage and measure owing to be subjected to the influence of capacitance gage resolving power.It is as shown in table 2 to record data.
Two step displacement values under table 2 50V, the 5Hz driving voltage
Test number (TN) 123456789 10
Two step displacement s/nm 12 12 12 8 12 888 12 8
As can be seen from Table 2, the minimum step pitch of this motor can reach 6nm.If with the more detecting instrument measurement of high resolution, and further improve driving frequency, can obtain littler step pitch.
Execution mode
This piezo-electric motor adopts " pushing away-La " the relay motion principle based on the novelty of inchworm motion principle, reaches structural design cleverly by whistle control system, has realized the at the uniform velocity continuous motion of motor, and has obtained the good motion linearity.
This piezo-electric motor stroke can reach millimeters up to a hundred in theory greater than 10mm, and in fact mainly the size by driving shaft is determined.
The step pitch of this piezo-electric motor reduces with the raising of driving frequency, increases with the increase of driving voltage, and minimum step pitch can reach several nanometers.
The actuating force of this motor can reach 1.4N.
By regulating the amplitude and the frequency of driving voltage, can change the actuating speed of motor, can reach at present more than the 12 μ m/s.
Claims (6)
1. large stroke length nano-stepping piezoelectric motor, it is characterized in that, form by first binding clasp, second binding clasp, first driver, second driver, driving shaft and control system, first binding clasp links to each other with first driver, second binding clasp links to each other with second driver, first binding clasp, second binding clasp, first driver, second driver constitute the push-and-pull relation, driving shaft is moved, promptly when first binding clasp clamps, second binding clasp loosens, first driver promotes the driving shaft motion simultaneously, and second driver is done preliminary activities; When second binding clasp clamps, first binding clasp is in relaxation state, second driver continues to drive the driving shaft motion, first driver is done preliminary activities simultaneously, so move in circles, control system is exported two-way triangular wave, two-way square wave chronologically, after direct current amplifier amplifies, is loaded on the piezo-electric motor it is moved control.
2. large stroke length nano-stepping piezoelectric motor according to claim 1, it is characterized in that described push-and-pull relation is that second binding clasp loosens when first binding clasp clamps, first driver expands and promotes the driving shaft motion simultaneously, and second driver expands and does preliminary activities; When second binding clasp clamped, first binding clasp was in relaxation state, and second driver shrinks the motion of pulling driving shaft, and first driver is done preliminary activities simultaneously, so moves in circles.
3. large stroke length nano-stepping piezoelectric motor according to claim 1, it is characterized in that, what control system adopted is 8031 single-chip computer control systems, the output of square wave is to get with two pins timing negates of P1 mouth, triangular wave then is that what keyboard and demonstration were selected for use is 8279 chips by the sync buffering output acquisition of two D/A conversion chip DAC0832 that extend out.Direct current amplifier is to adopt four road special dc high voltage amplifiers.
4. large stroke length nano-stepping piezoelectric motor according to claim 3 is characterized in that, control system is exported the two-way triangular wave chronologically, the two-way square wave is meant that control system is to finish the control system of follow procedure successively:
Open interruption
Scene protection
Judge whether to be 1/2 cycle;
Two pin negates of P1 mouth, the output square wave;
Judge that triangular wave reaches peak value and subtracts 1, otherwise add 1;
Generate chip to triangular wave and send number;
Judge whether counter overflows, and if not, counter adds 1, returns and export square wave,, interrupt returning if then recover on-the-spot.
5. large stroke length nano-stepping piezoelectric motor according to claim 1 and 2, it is characterized in that, first binding clasp, second binding clasp, first driver, second driver can symmetry be placed, and promptly first binding clasp, first driver, second driver, second binding clasp are placed successively.
6. according to claim 1,2 or 3 described large stroke length nano-stepping piezoelectric motors, it is characterized in that first binding clasp, second binding clasp are selected the stacked block piezoelectric crystal of the bigger multi-disc of deformation for use.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410072545XA CN100388612C (en) | 2004-10-28 | 2004-10-28 | Large stroke length nano-stepping piezoelectric motor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410072545XA CN100388612C (en) | 2004-10-28 | 2004-10-28 | Large stroke length nano-stepping piezoelectric motor |
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|---|---|
| CN1619937A true CN1619937A (en) | 2005-05-25 |
| CN100388612C CN100388612C (en) | 2008-05-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410072545XA Expired - Fee Related CN100388612C (en) | 2004-10-28 | 2004-10-28 | Large stroke length nano-stepping piezoelectric motor |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101083440B (en) * | 2006-05-29 | 2010-07-07 | 天津大学 | Rotary type piezoelectric micro-angle driving apparatus |
| CN102035429A (en) * | 2010-12-28 | 2011-04-27 | 天津大学 | Dynamically tuned cylindric ultrasonic motor |
| CN109676402A (en) * | 2017-10-18 | 2019-04-26 | 南京伶机宜动驱动技术有限公司 | Without magnetic motion platform and combinations thereof structure and control method |
| CN109675147A (en) * | 2017-10-18 | 2019-04-26 | 杨斌堂 | Suitable for the actuator and piston type injection device and control method under magnetic field environment |
| CN114337358A (en) * | 2021-11-30 | 2022-04-12 | 江西晶浩光学有限公司 | Drive control method and device of piezoelectric motor, MCU and storage medium |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101699743B (en) * | 2009-11-11 | 2011-12-07 | 西安交通大学 | Symmetric tension-compression double piezoelectric pile actuator |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5589723A (en) * | 1994-03-29 | 1996-12-31 | Minolta Co., Ltd. | Driving apparatus using transducer |
| US6051909A (en) * | 1996-12-27 | 2000-04-18 | Minolta Co., Ltd. | Drive device using electromechanical transducer |
| JPH11289780A (en) * | 1998-03-31 | 1999-10-19 | Minolta Co Ltd | Driver using electromechanical converting element |
-
2004
- 2004-10-28 CN CNB200410072545XA patent/CN100388612C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101083440B (en) * | 2006-05-29 | 2010-07-07 | 天津大学 | Rotary type piezoelectric micro-angle driving apparatus |
| CN102035429A (en) * | 2010-12-28 | 2011-04-27 | 天津大学 | Dynamically tuned cylindric ultrasonic motor |
| CN102035429B (en) * | 2010-12-28 | 2013-02-13 | 天津大学 | Dynamically tuned cylindric ultrasonic motor |
| CN109676402A (en) * | 2017-10-18 | 2019-04-26 | 南京伶机宜动驱动技术有限公司 | Without magnetic motion platform and combinations thereof structure and control method |
| CN109675147A (en) * | 2017-10-18 | 2019-04-26 | 杨斌堂 | Suitable for the actuator and piston type injection device and control method under magnetic field environment |
| CN109676402B (en) * | 2017-10-18 | 2024-08-06 | 南京伶机宜动驱动技术有限公司 | Non-magnetic motion platform and combined structure and control method thereof |
| CN114337358A (en) * | 2021-11-30 | 2022-04-12 | 江西晶浩光学有限公司 | Drive control method and device of piezoelectric motor, MCU and storage medium |
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| Publication number | Publication date |
|---|---|
| CN100388612C (en) | 2008-05-14 |
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