CN1608686A

CN1608686A - Air bag controlled micro medicine conveying executor

Info

Publication number: CN1608686A
Application number: CNA2003101027677A
Authority: CN
Inventors: 陈绍凤; 赵湛; 秦宁
Original assignee: Institute of Electronics of CAS
Current assignee: Institute of Electronics of CAS
Priority date: 2003-10-21
Filing date: 2003-10-21
Publication date: 2005-04-27
Anticipated expiration: 2023-10-21
Also published as: CN1287872C

Abstract

The present invention relates to medical equipment, and is the structure and making process of micro executor of micro silicon tip needle array. The air bag controlled micro medicine conveying executor has silicon needle array and micro channel array formed through etching as microelectronic mechanical processing technique on one side of the silicon substrate, and reactor chamber made on the other side of the silicon substrate and with PDMS as the bottom and diaphragm. Two silicon chips with etched air bag chamber constitute air bag, in which lithium chloride with crystal water is held and outside which heating platinum electrodes are deposited. The air bag expands to press the reactor chamber and alter its volume to realize the conveyance of micro medicine.

Description

A kind of trace drug of air bag controlled is carried the executor

Technical field

The present invention relates to medical instruments field, is a kind of structure and manufacture method of micro executor of micro silicon tip needle array, relates in particular to a kind of structure and manufacture method of utilizing the trace conveying medicament applicators of air bag controlled.

Background technology

When many medicines were offerd medicine, oral effect was less than having an injection.Reason is in oral process, and the medicine of some inner protein is if run into the digestion of digestive system and the metabolism of liver, and drug effect can make its effect subtract greatly when arriving disease sites.Excessive dosage can produce certain side effect to people's digestive system.The general injectable drug of having an injection that adopts because its needle point external diameter of syringe needle that adopts is bigger now, is the comparison pain when syringe needle enters human body, no matter child adult relatively fears for having an injection, child especially is because the pain child touches also and can cause unexpected injury.For the chronic patients of suffering from diabetes, senile dementia, they need continual taking medicine, and therefore need the medicine storage element to continue for medicine.Need to carry out the test of a large amount of biochips at present in the biological study field, its drug dose requires more accurate than in the past, and in the manual microinjection process, operator's manual control piston advances medicine in cell, the cell that detects by an unaided eye whether expand judge whether medicine injects and consumption what, result in hand cramps to user, in order to solve this class problem, and invented this air bag microneedle array executor.Minimum at present pin diameter also has 305 μ m, has reached the limit that traditional Technology is made, and utilizes the micropin that can make minute yardstick based on microelectromechanical systems (MEMS) technology.The micropin injection needle only penetrates horny layer, but do not penetrate skin corium, just syringe needle is not run into skin corium, drug effect can directly be passed through horny layer, the effectiveness of performance medicine, and can not allow the patient who has an injection feel pain and enter human body minimumly that can do is very thin again, very short, do not make the imperceptible pain of people to such an extent as to do not touch nerve.

Summary of the invention

The object of the present invention is to provide a kind of trace drug conveying executor's of air bag controlled structure and manufacture method.Device provided by the invention has very little yardstick, and the length of micropin is hundred micron dimensions, and external diameter is tens microns, and cavity volume is raised to micro updating for receiving.

For achieving the above object, technical solution of the present invention provides a kind of trace drug of air bag controlled and carries the executor, by silicon chip, barrier film, silicon chip, heating electrode chip, resistive layer and gasbag chamber are formed, in its gasbag chamber liquid is housed, under the heating of the sedimentary resistive layer of silicon chip, makes vaporizing liquid in the gasbag chamber, volumetric expansion makes the apotheca smaller volume, compressing medicine is wherein sprayed by micropin, injects human body, realizes the purpose of trace conveying medicine.

Described trace drug is carried the executor, the array that its silicon chip lower surface is made up of several micropins, and the micropin needle point is downward, and small cap is arranged on the syringe needle; Micropin endoporus rear portion connects the microchannel, and several microchannels communicate with apotheca, and are evenly distributed in the bottom of apotheca; Apotheca is the open chamber volume in top, in medicine is arranged; There is an insulating barrier on the upper and lower surface of silicon chip; The silicon chip upper surface is by diaphragm seal, and there is the open gasbag chamber in a top diaphragm center position, and gasbag chamber also is in center, apotheca top; The barrier film upper surface is firm with another silicon chip bonding again; Another silicon chip upper surface has the heating electrode chip, and the lower surface centre bit is equipped with resistive layer, and the heating electrode chip is electrically connected with resistive layer; The top of gasbag chamber is uncovered for resistive layer covers, and liquid is arranged in the gasbag chamber.

Described trace drug is carried the executor, and its described air bag is that silicon chip and PDMS (polydimethylsiloxane) form, and promptly silicon chip that has corroded a gasbag chamber and PDMS thin film bonding is formed, and indoor loading contains the lithium chloride of water of crystallization.

Described trace drug is carried the executor, and its described encapsulation barrier film is the PDMS thin film.

Described trace drug is carried the executor, and its described resistive layer is the platinum resistive layer.

Air bag of the present invention drives the microneedle array trace and carries medicine, and microneedle array can be used as a kind of medicament slow release device application at biomedical sector.

Description of drawings

Fig. 1 carries executor's structural section sketch map for the trace drug of air bag controlled of the present invention;

Fig. 2 carries the split sketch map of actuator structure for the trace drug of air bag controlled of the present invention.

The specific embodiment

As Fig. 1, the present invention's microelectromechanical systems (MEMS) technology of sampling is made micropin 3, microchannel 2 and apotheca 8 on silicon chip 1; Micropin 3 links to each other with the apotheca 8 of opposite side by the microchannel 2 suitable with silicon chip 1 thickness in silicon chip 1 one sides; Biological sample or medicine in order to detect are arranged in the apotheca 8, make the barrier film 5 of sample or medicine with PDMS, there is a loading to contain the gasbag chamber 6 of water of crystallization lithium chloride outside the barrier film 5, gasbag chamber 6 is mainly formed by the mould that PDMS casts in SU-8, the loam cake of gasbag chamber 6 is silicon chips 10 of another deposition platinum heating electrode 7, make gasbag chamber 6 expansion compressing reative cells that volume is changed, realize the purpose of trace conveying medicine.

As shown in Figure 1 and Figure 2, the trace drug of air bag controlled of the present invention carries the executor by silicon chip 1, PDMS barrier film 5, silicon chip 10, heating electrode chip 7, compositions such as platinum resistive layer 9 and gasbag chamber 6, wherein, the array that silicon chip 1 lower surface is made up of several micropins 3, micropin 3 needle points are downward, and silicon nitride or silicon oxide small cap are arranged on the syringe needle; Micropin 3 endoporus rear portions connect microchannel 2, and a plurality of microchannels 2 communicate with apotheca 8, and are evenly distributed in the bottom of apotheca 8; Apotheca 8 is the open room in top, in biological sample or medicine in order to detect are arranged; There is one deck silicon nitride dielectric layer 4 on silicon chip 1 upper and lower surface; Silicon chip 1 upper surface is by 5 sealings of PDMS barrier film, and barrier film 5 centre bits are equipped with the open gasbag chamber 6 in a top, and gasbag chamber 6 also is in center, apotheca 8 top.After 5 sealings of PDMS barrier film, affixed with another silicon chip 10 again on it.Silicon chip 10 upper surfaces have heating electrode chip 7, and the lower surface centre bit is equipped with platinum resistive layer 9, and heating electrode chip 7 is electrically connected with platinum resistive layer 9.The top of gasbag chamber 6 is uncovered to be that platinum resistive layer 9 covers, and the lithium chloride liquid that contains water of crystallization is arranged in it.

Manufacture method of the present invention is as follows:

At a 8 * 10mm ²The upper and lower surface of silicon chip 1, at first deposit one deck 1000 silicon oxides; Second step utilized LPCVD to deposit the thick silicon nitride dielectric layer of 1000 4; The 3rd goes on foot the lower surface at silicon chip 1, photoetching, etching and isotropic etch micropin 3 arrays, and micropin 3 long 40 μ m form a silicon nitride or the little medicated cap of silicon oxide, with the sealing syringe needle on micropin 3 syringe needles; The 4th step deposited 1000 silicon nitrides again; The 5th step was carried out photoetching, etch silicon nitride, silicon oxide and anisotropic etch microchannel 2, apotheca 8 at the upper surface of silicon chip 1; The 6th step oxidation 3000 ; The 7th step deposited silicon nitride insulating barrier 4 thick 1000 ; The 8th step photoetching, etching microneedle array; Dark diffused with boron 20 μ m of the 9th step; The tenth step was continued corrosion microneedle array and micropin passage, to molding.

Method with radio-frequency sputtering on another silicon chip 10 prepares platinum thin layer 9, and makes heating electrode chip 7 figures by lithography and get final product.

Make barrier film 5 and gasbag chamber 6,, produce the mould of apotheca barrier film 5 and gasbag chamber 6, use the PDSM cast molding then at first 20 μ m thick SU-8 glue whirl coating, exposure.

Gasbag chamber 6 also can be silicon chip and PDMS forms, and promptly silicon chip that has corroded a gasbag chamber and PDMS thin film bonding is formed.

Put into biological sample or medicine in order to detect in apotheca 8, reuse PDMS barrier film 5 encapsulation apothecas 8 are fixed on the micropin chip; Put into the lithium chloride liquid that contains water of crystallization in gasbag chamber 6, the platinum resistive layer 9 of the gasbag chamber 6 of PDMS barrier film 5 and silicon chip 10 belows is aimed at affixed, heating electrode chip 7 leads are drawn, trace carries the medicine executor promptly to complete.

During use, the place to go small cap, carry the medicine executor to place human body trace, the saturating horny layer of micropin 3 thorns starts power supply, its heating electrode chip 7 makes 9 heatings of platinum resistive layer, to gasbag chamber 6 heating, the lithium chloride liquid that contains water of crystallization in the gasbag chamber 6 begins gasification and expands, and makes apotheca 8 smaller volume, compressing biological sample or medicine in order to detect wherein spurted into human body by micropin 3, realizes the purpose of trace conveying medicine.

Claims

1, a kind of trace drug of air bag controlled is carried the executor, by silicon chip, and barrier film, silicon chip, the heating electrode chip, resistive layer and gasbag chamber are formed, it is characterized in that, liquid is housed in the gasbag chamber, under the heating of the sedimentary resistive layer of silicon chip, makes vaporizing liquid in the gasbag chamber, volumetric expansion makes the apotheca smaller volume, compressing medicine is wherein sprayed by micropin, injects human body, realizes the purpose of trace conveying medicine.

2, trace drug as claimed in claim 1 is carried the executor, it is characterized in that, and the microneedle array that the silicon chip lower surface is made up of several micropins, the micropin needle point is downward, and small cap is arranged on the syringe needle; Micropin endoporus rear portion connects the microchannel, and the microchannel communicates with apotheca, and is evenly distributed in the bottom of apotheca; Apotheca is the open chamber volume in top, in medicine is arranged; There is an insulating barrier on the upper and lower surface of silicon chip; The silicon chip upper surface is by diaphragm seal, and there is the open gasbag chamber in a top diaphragm center position, and gasbag chamber also is in center, apotheca top; The barrier film upper surface is affixed with another silicon chip again; Another silicon chip upper surface has the heating electrode chip, and the lower surface centre bit is equipped with resistive layer, and the heating electrode chip is electrically connected with resistive layer; The top of gasbag chamber is uncovered for resistive layer covers, and liquid is arranged in the gasbag chamber.

3. trace drug as claimed in claim 1 is carried the executor, it is characterized in that, described air bag is that silicon chip and PDMS form, and promptly silicon chip that has corroded a gasbag chamber and PDMS thin film bonding is formed, and indoor loading contains the lithium chloride of water of crystallization.

4. trace drug as claimed in claim 1 is carried the executor, it is characterized in that described encapsulation barrier film is the PDMS thin film.

5. trace drug as claimed in claim 1 or 2 is carried the executor, it is characterized in that described resistive layer is the platinum resistive layer.