CN1603808A - Zinc oxide gas sensing device - Google Patents
Zinc oxide gas sensing device Download PDFInfo
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- CN1603808A CN1603808A CN 03134985 CN03134985A CN1603808A CN 1603808 A CN1603808 A CN 1603808A CN 03134985 CN03134985 CN 03134985 CN 03134985 A CN03134985 A CN 03134985A CN 1603808 A CN1603808 A CN 1603808A
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- zinc oxide
- zinc
- measuring device
- dielectric base
- gas measuring
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Abstract
This invention relates to zinc oxide gas sensing apparatus, which comprises the following: an isolation base; two electrodes on the isolation base surface; a nanometer zinc oxide film coated on the isolation base and two electrodes; column or pipe zinc oxide nanometer fiber distributing with high density. The nanometer zinc oxide film can increase the gas flow volume between the zinc oxide particles and improve the accuracy of the gas sensing apparatus.
Description
[technical field]
The present invention relates to a kind of gas measuring device, relate in particular to a kind of gas measuring device that comprises the Nano-class zinc oxide fiber.
[background technology]
The gas sensing device is to utilize the device that causes the characteristic of its change of properties after the gas sensor adsorbed gas and make.The gas sensing device detects at vehicle exhaust, extensive application aspect the control of industrial furnace combustion atmosphere and the air purification.
Zinc paste (Zinc Oxide) gas sensing device is a kind of be usually used in detecting CO, NO
2Gas sensing equipment Deng gas.It is the sensing membrane material that zinc paste gas sensing device adopts zinc paste, and its principle is:, zinc oxide surface makes material carrier concentration that corresponding the variation be taken place after adsorbing corresponding gas, thereby causes the sensing membrane conductivity to change.When zinc paste sensing membrane structure is comparatively loose, when having a fixed gap between the zinc oxide fine particles, will help the absorption of detected gas.Therefore, the sponginess of zinc paste sensing film becomes one of the response speed that influences zinc paste gas sensing device and key factor of sensitivity.
As depicted in figs. 1 and 2, existing zinc paste sensor comprises: an alumina insulation substrate 10; Be formed at two electrodes 11,12 on alumina insulation substrate 10 surfaces; The Zinc oxide film 14 of one capping oxidation aluminium dielectric base 10 and two electrodes 11,12.At present, traditional zinc paste sensor preparation method is plated in nanocrystal zinc on the alumina substrate that is printed on electrode, makes zinc paste gas sensing device in the mode of heating gradually then in air.Because zinc is easy to oxidation in air, at first form the zinc paste protective seam on its top layer, this protective seam coats and the zinc of protection internal layer is difficult for oxidized.So generally speaking, nanocrystal zinc needs higher sintering temperature, can guarantee that just nanocrystal zinc is completely oxidized to nanocrystal zinc paste.But, when high temperature heat-agglomerating, because of temperature too high, the rate of heat addition is fast,, destroy the zinc paste pore space structure easily, form compact texture, and the particle size of nanocrystal zinc paste also can increase along with the raising of sintering temperature, causes intercrystalline pore space structure to disappear, and reduces the sensitivity of sensor.
So, a kind of short texture is provided, has the gas measuring device of higher sensitivity in fact for necessary.
[summary of the invention]
The object of the present invention is to provide a kind of short texture, highly sensitive gas measuring device.
For realizing the object of the invention, the invention provides a kind of zinc paste gas measuring device, it comprises: a dielectric base; Be formed at two electrodes on dielectric base surface; One covers the Nano-class zinc oxide film of dielectric base and two electrodes; Above-mentioned Nano-class zinc oxide film is that column or tubulose have the zinc oxide nano fiber array that high density is arranged.
Compared with prior art, the zinc oxide nano fiber array that zinc paste gas measuring device of the present invention utilizes high density to arrange, this zinc oxide nano fiber array comprises column or hollow tubular structure, help the absorption of gas between the zinc oxide nano fiber array, thus the sensitivity that can improve the zinc paste gas measuring device.
[description of drawings]
Fig. 1 is the side schematic view of the zinc paste sensor of prior art.
Fig. 2 is the vertical view of the zinc paste sensor of Fig. 1.
Fig. 3 is the side schematic view of zinc paste sensor of the present invention.
Fig. 4 is the local enlarged diagram in side of the zinc paste sensor of Fig. 3.
[embodiment]
The present invention is described in further detail below in conjunction with accompanying drawing.
See also Fig. 3 and Fig. 4, the gas sensing device 3 of first embodiment of the invention, it comprises: a dielectric base 30; Two electrodes 31,32 that form on dielectric base 30 surfaces; One covers the Nano-class zinc oxide film 34 of dielectric base 30 and two electrodes 31,32, and above-mentioned Nano-class zinc oxide film 34 comprises column or the tubulose zinc oxide nano fiber array that high density is arranged.
Wherein, dielectric base 30 can be a thin plate or rete, material by good insulation preformance is made, in addition, because of generally need being heated to uniform temperature, gas sensing device 3 just can carry out good detection, so the material of dielectric base 31 is good to possess good heat conductance simultaneously again, preferable material comprises aluminium oxide, quartz, pottery or silicon nitride etc.
Electrode 31,32 can generally be to form by sedimentation or sputtering method by predetermined pattern on dielectric base 30 surfaces by material preparations such as platinum (Pt), gold (Au) or its alloys.
Nano-class zinc oxide film 34 comprises the column or the tubulose zinc oxide nano fiber (figure does not indicate) of many orderly arrangements, described zinc oxide nano fiber is formed directly into the surface of dielectric base 30 and two electrodes 31,32, and the diameter range of zinc oxide nano fiber is generally 20～150 nanometers, and length can reach 10 microns.Between the adjacent zinc oxide nano fiber and the zinc oxide nano fiber of cannulated structure inside forms certain interval, thereby helps adsorbing detected gas.
The preparation process of gas sensing device 3 is as follows:
At first, provide a dielectric base 30, it can be a thin plate or rete.It is made by the material of good insulation preformance usually, as aluminium oxide, quartz, pottery or silicon nitride etc.In addition, gas sensing device 3 generally need be heated to uniform temperature just can carry out good detection, so the material of dielectric base 31 is again to possess good heat conductance simultaneously.
Secondly, form electrode 31,32 on dielectric base 30 surfaces.Electrode 31,32 can be pressed predetermined pattern by sedimentation or sputtering method by materials such as platinum (Pt), gold (Au) or its alloys and form on dielectric base 30 surfaces, and formed electrode rete is preferably thick film, and its thickness can be 400～7000 nanometers.In addition, electrode 31,32 all right configured electrodes leads, the change according to actual needs of the quantity of electrode, pattern and thickness.
Then, adopt magnetron sputtering method to prepare Zinc oxide film 34.Use suitable subacid solution that dielectric base 30 and two electrodes 31,32 are cleaned before the preparation, also dry up with washed with de-ionized water again with highly purified nitrogen.Sputtering parameter has different selections according to different magnetron sputtering apparatus, and present embodiment can adopt: the purity of metallic zinc target is 99.999%, and target diameter is 100 millimeters; As the reacting gas and the sputter gas of reactive deposition process, oxygen argon gas ratio is 3: 1 respectively for oxygen, argon gas, and sputtering power is 600W, and substrate temperature is controlled at 200～300 ℃, and substrate keeps rotation in deposition process.The Zinc oxide film that makes is that column or tubulose have the zinc oxide nano fiber array that high density is arranged.
Above-mentioned Zinc oxide film 34 also can adopt the chemical vapour deposition technique preparation.There is surface deposition the substrate 30 of two electrodes 31,32 to put into the aluminium boat of gas-phase reaction stove, and 0.5～2.5 centimetre distance arranged from aluminium boat center; Get the oxide powder and zinc of identical weight and dag again and be the reaction starting material, pulverize and be transferred in the aluminium boat; And the feeding argon gas heats above-mentioned reaction starting material and substrate to 880～905 ℃ of temperature.Thermal reduction reaction at high temperature takes place in oxide powder and zinc and dag, generates zinc fume, and zinc fume contacts with substrate and two electrode surfaces and grows into the zinc oxide nano fiber array, and this growth course generally took place in 2～10 minutes.The zinc oxide nano fiber array that generates vertically gathers at two electrodes and substrate surface, and the zinc oxide nano fiber diameter range is 20～150 nanometers, and length can reach 10 microns.
The present invention can also utilize other coating technique growing nano grade Zinc oxide film, can reach this equally Bright technique effect. Gas measuring device of the present invention is nanofiber array owing to Zinc oxide film, and Have column or cannulated structure, so that between the adjacent zinc oxide nano fiber or in the cannulated structure The pore space structure of section is kept, and adsorbs oxygen so be conducive to gas between the zinc oxide nano fiber array The sensitivity of changing the zinc gas measuring device improves greatly.
Claims (7)
1. zinc paste gas measuring device is characterized in that comprising:
One dielectric base;
Be formed on two electrodes on dielectric base surface;
One covers the Nano-class zinc oxide film of dielectric base and two electrodes, and above-mentioned Nano-class zinc oxide film is column or tubulose zinc oxide nano fiber array.
2. zinc paste gas measuring device as claimed in claim 1 is characterized in that the material of dielectric base can be aluminium oxide, quartz, pottery or silicon nitride.
3. zinc paste gas measuring device as claimed in claim 1 is characterized in that described electrode is to be formed on above-mentioned dielectric base surface by sedimentation or sputtering method.
4. zinc paste gas measuring device as claimed in claim 1 is characterized in that the material of described electrode can be platinum (Pt), gold (Au) or its alloy material.
5. zinc paste gas measuring device as claimed in claim 1 is characterized in that the preparation method of Nano-class zinc oxide film comprises magnetron sputtering method and chemical vapour deposition technique.
6. zinc paste gas measuring device as claimed in claim 1 is characterized in that the zinc oxide nano fiber diameter range is 20～150 nanometers.
7. zinc paste gas measuring device as claimed in claim 1 is characterized in that zinc oxide nano fiber length can reach 10 microns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031349854A CN1296702C (en) | 2003-09-30 | 2003-09-30 | Zinc oxide gas sensing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031349854A CN1296702C (en) | 2003-09-30 | 2003-09-30 | Zinc oxide gas sensing device |
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| Publication Number | Publication Date |
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| CN1603808A true CN1603808A (en) | 2005-04-06 |
| CN1296702C CN1296702C (en) | 2007-01-24 |
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| CNB031349854A Expired - Fee Related CN1296702C (en) | 2003-09-30 | 2003-09-30 | Zinc oxide gas sensing device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100417939C (en) * | 2005-10-25 | 2008-09-10 | 中国科学院合肥物质科学研究院 | Field-ionization nano gas sensor and manufacturing method |
| CN100434163C (en) * | 2007-01-26 | 2008-11-19 | 福建师范大学 | Preparing method of zinc oxide nano fiber film used as photocatalyst |
| CN103439024A (en) * | 2013-09-04 | 2013-12-11 | 浙江工商大学 | Nano-zinc-oxide temperature sensor and manufacturing process thereof |
| CN101555034B (en) * | 2008-04-09 | 2014-04-30 | 清华大学 | Method for preparing zinc oxide nano structure |
| CN104391010A (en) * | 2014-11-19 | 2015-03-04 | 上海纳米技术及应用国家工程研究中心有限公司 | Cr2O3-ZnO composite nano material as well as preparation method and application thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102288648A (en) * | 2011-07-07 | 2011-12-21 | 刘文超 | Zinc oxide nanostructure gas sensor and manufacturing method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR960007784B1 (en) * | 1993-07-02 | 1996-06-12 | 포항종합제철 주식회사 | Co gas sensor and its manufacturing method |
| GB9418292D0 (en) * | 1994-09-10 | 1994-10-26 | Atomic Energy Authority Uk | Formaldehyde vapour detector |
| KR20010033717A (en) * | 1997-12-31 | 2001-04-25 | 알프레드 엘. 미첼슨 | Metal oxide sensor for detecting nitrogen oxides |
| CN1122731C (en) * | 2000-12-16 | 2003-10-01 | 昆明理工大学 | Process for preparing monocrystal filament of zinc oxide directly from zinc sulfide |
-
2003
- 2003-09-30 CN CNB031349854A patent/CN1296702C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100417939C (en) * | 2005-10-25 | 2008-09-10 | 中国科学院合肥物质科学研究院 | Field-ionization nano gas sensor and manufacturing method |
| CN100434163C (en) * | 2007-01-26 | 2008-11-19 | 福建师范大学 | Preparing method of zinc oxide nano fiber film used as photocatalyst |
| CN101555034B (en) * | 2008-04-09 | 2014-04-30 | 清华大学 | Method for preparing zinc oxide nano structure |
| CN103439024A (en) * | 2013-09-04 | 2013-12-11 | 浙江工商大学 | Nano-zinc-oxide temperature sensor and manufacturing process thereof |
| CN104391010A (en) * | 2014-11-19 | 2015-03-04 | 上海纳米技术及应用国家工程研究中心有限公司 | Cr2O3-ZnO composite nano material as well as preparation method and application thereof |
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| CN1296702C (en) | 2007-01-24 |
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