CN1587950A - Interferometric method using partial compensation lens to realize nno-spherical surface shape - Google Patents
Interferometric method using partial compensation lens to realize nno-spherical surface shape Download PDFInfo
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- CN1587950A CN1587950A CN 200410068823 CN200410068823A CN1587950A CN 1587950 A CN1587950 A CN 1587950A CN 200410068823 CN200410068823 CN 200410068823 CN 200410068823 A CN200410068823 A CN 200410068823A CN 1587950 A CN1587950 A CN 1587950A
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Abstract
A interference measuring method of inspherical face form realized by using partial compensating lens belongs to electrooptical technical field, having no requirement that large aberration wave front of inspherical face form has to be compensated completely by compensating lens, but allowing residual wave difference not larger than fifty wavelengthes exists, changing traditional small wave difference interference measuring system into large wave difference by using digit Mohr phase shift phase shift method. The invention has the structure of compensating lens simplified. The difficulty of design, processing of which decreased and the measuring range of which extended; by using refraction principle, interference fringe is very clean because of no perturbance from other light created by holographic element, and which has little lose; the measuring accuracy is high and stability is good; it can be used to measure varies of rotational symmetric aspheric surface especially for aspheric surface with large relative aperture and convex inaspheric surface with large inaspheric ratio.
Description
Affiliated technical field
The present invention belongs to photoelectricity for a kind of interferometric method that utilizes the part offset lens to realize aspheric surface
Technical field.
Background technology
Interferometric method measurement optical component surface shape has simply, the precision advantages of higher, is extensive use of at present.Because traditional interferometer can only be done the measurement of little wave aberration, during simple small echo aberration such as measurement plane and sphere surface, interferometer light path is simpler, but measurement for aspheric surface, be compensated for as wave aberration with the complicated corrugated of big wave aberration that zero-compensation lens produce aspheric surface is zero corrugated, make comparisons with index plane in interferometer, aspheric type error of the irregularly shaped expression of interference fringe directly measured tested aspheric face shape error thus.Because the zero-compensation lens have high compensation ability, thereby complex structure, its foozle is very little simultaneously, near the limit, so the design of zero-compensation lens, processing and dress school are very difficult.The zero-compensation lens can only compensate a certain aspheric surface, and measurement range is little.The aspheric surface measurement that is usually used in little relative aperture, little aspherical degree, for object lens of large relative aperture, the convex aspheric surface of big aspherical degree, Design and Machining zero-compensation lens almost are impossible.The method that solves this difficult problem at present is exactly the big wave aberration that cooperates spherical lens compensation aspheric surface to produce with holographic element, holographic element adopts the numerical control method manufacturing, almost can compensate any aspheric surface, but because its diffraction principle is limit, except that useful tested corrugated, also have the diffraction light on zero level, senior corrugated etc. in the transmitted light of holographic element, this just makes tested corrugated have bigger veiling glare to disturb, interference fringe is unclean, and is second-rate.In addition, because diffraction efficiency is not high, twice of light is diffracted again, and the loss of backspace light wave is bigger.
The present invention adopts part offset lens principle to measure aspheric surface, and purpose is to simplify the structure of offset lens, reduces design, the difficulty of processing of compensating glass, can expand its measurement range to a certain compensating glass simultaneously; Owing to adopt refraction principle, the veiling glare that does not have holographic element to produce disturbs, and makes interference fringe very clean, and loss simultaneously is very little; And the measuring accuracy height, good stability; Almost can be used for measuring various rotational symmetric aspheric surfaces, especially can measure object lens of large relative aperture, the convex aspheric surface of big aspherical degree.
Summary of the invention
The part penalty method, do not require that offset lens is certain for tested aspheric big aberration corrugated full remuneration, it is poor to allow the residue ripple that is not more than 50 wavelength, and traditional small echo poor (being not more than 10 wavelength) interferometer measuration system is become big ripple poor (being not more than 50 wavelength) interferometer measuration system.The measuring process of small echo difference interferometry is that a tested corrugated and an index plane compare, and big ripple difference interferometry then is that compare on a tested corrugated and a theoretical corrugated.Accurately obtain the theoretical corrugated that part compensation back remains the ripple difference according to actual optical interference circuit and tested aspheric surface parameter, residue ripple difference and tested aspheric face shape error after the actual measurement corrugated is contained interferometer and partly compensated, theoretical corrugated and actual measurement corrugated are relatively, systematic error in the interferometer is cancelled, and both differences just are actual tested aspheric face shape error.Adopt digital More's synthetic method that theory is remained the ripple difference and calculate virtual interference fringe by actual interference optics, be stored in the computing machine, do the striped stack with the actual interference fringe that obtains in the actual interferometer and obtain Moire fringe, the actual tested corrugated that just can Direct observation and the interference fringe on theoretical corrugated, Moire fringe irregularly shaped are expressed as tested aspheric face shape error.Because the part offset lens does not require that its compensation rate is less demanding, so its optical system structure is simpler, processes, it is also easier to debug with tested aspheric big wave aberration full remuneration.
This method can be carried out the interferometry light path of aspheric surface with graceful Green of common Thailand and Feisuo interferometer.
This method realizes according to the following steps:
The first step: go out the virtual interfere striped by interferometer light path, tested aspheric normal data and part offset lens Structure Calculation;
Second step: it is synthetic that the actual interference fringe that obtains with actual interferometer is done digital More, realizes that actual measurement corrugated and theoretical corrugated subtract each other, and the systematic error in the interferometer is cancelled, and Moire fringe is actual aspheric surface and the aspheric interference fringe of standard;
The 3rd step: handle out tested aspheric surface error by digital phase shift again.
Residue wave aberration after the part compensation is bigger, and feasible interference fringe with plane wave is closeer, and the resolution that receives the CCD of interference fringe has determined the minimum interference fringe spacing, thereby has also determined residue slope of wave surface size.According to the resolution of CCD, determine interference fringe at interval, or the slope on corrugated, and with this design considerations as the part offset lens, design part offset lens is not to be preferably criterion with picture element, but is criterion with the backspace slope of wave surface, as long as the slope on corrugated is controlled in the allowed band.
The radius of part compensating glass, the center is thick does not require equally with design load with the material refractive index, as long as accurately measure, thereby makes requirement and is minimized.This part compensating interferometer measuring method both can have been measured aspheric shape, and whether the wave aberration that also can measure lens is qualified with testing lens, can also be used for the procedure inspection of debuging of optical system.
Effective effect of the present invention:
1, tested aspheric shape is not restricted to a certain certain surface shape;
2, both can measure aspheric shape, whether the wave aberration that also can measure lens is qualified with testing lens, can also be used for the procedure inspection of debuging of optical system;
3, measuring system precision height, good stability can be used for measuring various rotational symmetric aspheric surfaces, especially can measure object lens of large relative aperture, the convex aspheric surface of big aspherical degree.
Description of drawings
Fig. 1 is a schematic diagram, wherein: the actual interferometer of 1-, 2-virtual interfere instrument, 3-numeral More movable phase interfere, the tested aspheric surface control information of 4-.
Embodiment
The present invention is further described below in conjunction with the drawings and specific embodiments.
This method realizes according to the following steps:
The first step: go out the virtual interfere striped by interferometer light path, tested aspheric normal data and part offset lens Structure Calculation;
Second step: it is synthetic that the actual interference fringe that obtains with actual interferometer is done digital More, realizes that actual measurement corrugated and theoretical corrugated subtract each other, and the systematic error in the interferometer is cancelled, and Moire fringe is actual aspheric surface and the aspheric interference fringe of standard;
The 3rd step: handle out tested aspheric surface error by digital phase shift again.
The advantage that the present invention has is: tested aspheric shape is not limited a certain certain surface shape, both can measure aspheric shape, and whether the wave aberration that also can measure lens is qualified with testing lens, can also be used for the procedure inspection of debuging of optical system; Measuring system precision height, good stability almost can be used for measuring various rotational symmetric aspheric surfaces, especially can measure object lens of large relative aperture, the convex aspheric surface of big aspherical degree.
Claims (3)
1. interferometric method that utilizes the part offset lens to realize aspheric surface, it is characterized in that: utilization part penalty method, do not require that promptly offset lens is certain for tested aspheric big aberration corrugated full remuneration, but it is poor to allow the residue ripple that is not more than 50 wavelength, traditional small echo difference interferometer measuration system is become the interferometric method of big ripple difference interferometer measuration system.
2. according to claim 1, the big ripple difference in the big ripple difference interferometer measuration system refers to that to be not more than 50 wavelength ripples poor.
3. according to claim 1, a kind of interferometric method that utilizes the part offset lens to realize aspheric surface is to realize according to the following steps:
The first step: go out the virtual interfere striped by interferometer light path, tested aspheric normal data and part offset lens Structure Calculation;
Second step: it is synthetic that the actual interference fringe that obtains with actual interferometer is done digital More, realizes that actual measurement corrugated and theoretical corrugated subtract each other, and the systematic error in the interferometer is cancelled, and Moire fringe is actual aspheric surface and the aspheric interference fringe of standard;
The 3rd step: handle out tested aspheric surface error by digital phase shift again.
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100567932C (en) * | 2008-05-28 | 2009-12-09 | 中国科学院光电技术研究所 | Fan-shaped off-axis aspherical mirror splicing measurement system |
| CN100580407C (en) * | 2005-10-31 | 2010-01-13 | 中国科学院光电技术研究所 | Heavy-calibre deep type aspherical mirror detecting system |
| CN102506750A (en) * | 2011-10-28 | 2012-06-20 | 中国科学院长春光学精密机械与物理研究所 | Partial-compensation aspherical reflector surface shape detection method |
| CN105466351A (en) * | 2015-11-17 | 2016-04-06 | 北京理工大学 | Refracting-reflecting partial compensator used for detecting surface shape error of convex aspheric surface and design method |
| CN105547183A (en) * | 2015-12-21 | 2016-05-04 | 中国科学院长春光学精密机械与物理研究所 | Adjustment method for resetting spatial position of detected aspheric surface |
| CN107421436A (en) * | 2017-05-16 | 2017-12-01 | 北京理工大学 | Aspherical interferometer measuration system and method based on the spatial light modulator plane of reference |
| CN107764203A (en) * | 2017-10-27 | 2018-03-06 | 北京理工大学 | Dual wavelength phase shift interference non-spherical measuring method and device based on part penalty method |
| CN108507488A (en) * | 2018-03-05 | 2018-09-07 | 中国科学院上海光学精密机械研究所 | Axicon lens surface testing system based on axial scan and detection method |
| CN108562240A (en) * | 2018-01-24 | 2018-09-21 | 北京理工大学 | Splice the digital Moire phase-shifting interference measuring method of method based on two step carrier waves |
| CN109029291A (en) * | 2018-08-16 | 2018-12-18 | 北京理工大学 | The aspherical parameter error interferometric method positioned in conjunction with laser differential confocal |
| CN109737892A (en) * | 2019-01-08 | 2019-05-10 | 北京卫星环境工程研究所 | Surface shape measurement method is interfered in digital Moire phase shift based on zone location fitting algorithm |
| CN110646805A (en) * | 2019-09-04 | 2020-01-03 | 宁波核芯光电科技有限公司 | Frequency modulation continuous wave laser ranging system based on virtual sweep frequency light source |
| CN111238397A (en) * | 2020-02-10 | 2020-06-05 | 北京理工大学 | Transient digital Moire phase-shifting interferometry device and method for optical element surface shape |
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2004
- 2004-07-08 CN CN 200410068823 patent/CN1587950A/en active Pending
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100580407C (en) * | 2005-10-31 | 2010-01-13 | 中国科学院光电技术研究所 | Heavy-calibre deep type aspherical mirror detecting system |
| CN100567932C (en) * | 2008-05-28 | 2009-12-09 | 中国科学院光电技术研究所 | Fan-shaped off-axis aspherical mirror splicing measurement system |
| CN102506750A (en) * | 2011-10-28 | 2012-06-20 | 中国科学院长春光学精密机械与物理研究所 | Partial-compensation aspherical reflector surface shape detection method |
| CN105466351A (en) * | 2015-11-17 | 2016-04-06 | 北京理工大学 | Refracting-reflecting partial compensator used for detecting surface shape error of convex aspheric surface and design method |
| CN105466351B (en) * | 2015-11-17 | 2018-02-09 | 北京理工大学 | For detecting the refraction-reflection type part compensator and design method of convex aspheric surface face shape error |
| CN105547183A (en) * | 2015-12-21 | 2016-05-04 | 中国科学院长春光学精密机械与物理研究所 | Adjustment method for resetting spatial position of detected aspheric surface |
| CN105547183B (en) * | 2015-12-21 | 2017-11-28 | 中国科学院长春光学精密机械与物理研究所 | A kind of method of adjustment for resetting tested aspherical space position |
| CN107421436A (en) * | 2017-05-16 | 2017-12-01 | 北京理工大学 | Aspherical interferometer measuration system and method based on the spatial light modulator plane of reference |
| CN107764203A (en) * | 2017-10-27 | 2018-03-06 | 北京理工大学 | Dual wavelength phase shift interference non-spherical measuring method and device based on part penalty method |
| CN107764203B (en) * | 2017-10-27 | 2019-08-23 | 北京理工大学 | Dual wavelength phase shift interference non-spherical measuring method and device based on part penalty method |
| CN108562240A (en) * | 2018-01-24 | 2018-09-21 | 北京理工大学 | Splice the digital Moire phase-shifting interference measuring method of method based on two step carrier waves |
| CN108562240B (en) * | 2018-01-24 | 2019-08-23 | 北京理工大学 | Digital Moire phase-shifting interference measuring method based on two step carrier waves splicing method |
| CN108507488A (en) * | 2018-03-05 | 2018-09-07 | 中国科学院上海光学精密机械研究所 | Axicon lens surface testing system based on axial scan and detection method |
| CN108507488B (en) * | 2018-03-05 | 2019-12-20 | 中国科学院上海光学精密机械研究所 | System and method for detecting surface shape of conical mirror based on axial scanning |
| CN109029291A (en) * | 2018-08-16 | 2018-12-18 | 北京理工大学 | The aspherical parameter error interferometric method positioned in conjunction with laser differential confocal |
| CN109737892A (en) * | 2019-01-08 | 2019-05-10 | 北京卫星环境工程研究所 | Surface shape measurement method is interfered in digital Moire phase shift based on zone location fitting algorithm |
| CN110646805A (en) * | 2019-09-04 | 2020-01-03 | 宁波核芯光电科技有限公司 | Frequency modulation continuous wave laser ranging system based on virtual sweep frequency light source |
| CN110646805B (en) * | 2019-09-04 | 2023-01-24 | 宁波核芯光电科技有限公司 | Frequency modulation continuous wave laser ranging system based on virtual sweep frequency light source |
| CN111238397A (en) * | 2020-02-10 | 2020-06-05 | 北京理工大学 | Transient digital Moire phase-shifting interferometry device and method for optical element surface shape |
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