CN1584507A - 一种用于光纤传感的新型法布里-珀罗腔结构 - Google Patents
一种用于光纤传感的新型法布里-珀罗腔结构 Download PDFInfo
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- CN1584507A CN1584507A CN 200410027445 CN200410027445A CN1584507A CN 1584507 A CN1584507 A CN 1584507A CN 200410027445 CN200410027445 CN 200410027445 CN 200410027445 A CN200410027445 A CN 200410027445A CN 1584507 A CN1584507 A CN 1584507A
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- metal film
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 19
- 229910052751 metal Inorganic materials 0.000 claims abstract description 87
- 239000002184 metal Substances 0.000 claims abstract description 87
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 4
- 229910052737 gold Inorganic materials 0.000 claims abstract description 4
- 229910052709 silver Inorganic materials 0.000 claims abstract description 4
- 239000000835 fiber Substances 0.000 claims description 22
- 230000003287 optical effect Effects 0.000 claims description 19
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- 239000011651 chromium Substances 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 239000010931 gold Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 150000002739 metals Chemical class 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910001252 Pd alloy Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 229910000838 Al alloy Inorganic materials 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229910000990 Ni alloy Inorganic materials 0.000 abstract 2
- 229910000599 Cr alloy Inorganic materials 0.000 abstract 1
- 238000007747 plating Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 55
- 238000005259 measurement Methods 0.000 description 43
- 230000004044 response Effects 0.000 description 36
- 238000002310 reflectometry Methods 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 230000008033 biological extinction Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 230000007704 transition Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 235000019892 Stellar Nutrition 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000012938 design process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
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Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2004100274455A CN1323286C (zh) | 2004-06-03 | 2004-06-03 | 一种用于光纤传感的新型法布里-珀罗腔结构 |
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CNB2004100274455A CN1323286C (zh) | 2004-06-03 | 2004-06-03 | 一种用于光纤传感的新型法布里-珀罗腔结构 |
Publications (2)
Publication Number | Publication Date |
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CN1584507A true CN1584507A (zh) | 2005-02-23 |
CN1323286C CN1323286C (zh) | 2007-06-27 |
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CNB2004100274455A Expired - Fee Related CN1323286C (zh) | 2004-06-03 | 2004-06-03 | 一种用于光纤传感的新型法布里-珀罗腔结构 |
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CN (1) | CN1323286C (zh) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100526821C (zh) * | 2006-10-20 | 2009-08-12 | 中山大学 | 一种薄膜型光纤温度传感器及其温度感应方法 |
CN102323468A (zh) * | 2011-09-14 | 2012-01-18 | 电子科技大学 | 一种光纤法珀电压传感器 |
CN106645029A (zh) * | 2016-12-07 | 2017-05-10 | 大连理工大学 | 一种熔接式的开腔光纤efpi折射率传感器 |
CN107796300A (zh) * | 2016-09-02 | 2018-03-13 | Abb瑞士股份有限公司 | 使用环路增益来确定干涉对比度的闭环干涉型传感器 |
CN108956534A (zh) * | 2018-08-23 | 2018-12-07 | 天津工业大学 | 一种基于开放腔法珀干涉仪的折射率测量方法 |
CN109282794A (zh) * | 2018-11-05 | 2019-01-29 | 山东省科学院激光研究所 | 光纤测倾装置及差分测倾*** |
CN110108383A (zh) * | 2018-02-01 | 2019-08-09 | 桂林电子科技大学 | 基于长f-p腔光纤白光干涉型高温高灵敏度温度传感器 |
CN110954505A (zh) * | 2019-11-21 | 2020-04-03 | 河海大学 | 一种监测液体折射率的装置及方法 |
CN113720493A (zh) * | 2021-08-13 | 2021-11-30 | 武汉理工大学 | 基于光纤端面微纳谐振结构的传感器及其制备方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4017562A1 (de) * | 1990-05-31 | 1991-12-05 | Standard Elektrik Lorenz Ag | Optische einrichtung |
TW245772B (zh) * | 1992-05-19 | 1995-04-21 | Akzo Nv | |
US6438149B1 (en) * | 1998-06-26 | 2002-08-20 | Coretek, Inc. | Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter |
CN1417617A (zh) * | 2001-11-01 | 2003-05-14 | 鸿富锦精密工业(深圳)有限公司 | 智能型薄膜滤波装置 |
JP3869286B2 (ja) * | 2002-03-04 | 2007-01-17 | 古河電気工業株式会社 | Fbgの取付け構造 |
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2004
- 2004-06-03 CN CNB2004100274455A patent/CN1323286C/zh not_active Expired - Fee Related
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100526821C (zh) * | 2006-10-20 | 2009-08-12 | 中山大学 | 一种薄膜型光纤温度传感器及其温度感应方法 |
CN102323468A (zh) * | 2011-09-14 | 2012-01-18 | 电子科技大学 | 一种光纤法珀电压传感器 |
CN107796300A (zh) * | 2016-09-02 | 2018-03-13 | Abb瑞士股份有限公司 | 使用环路增益来确定干涉对比度的闭环干涉型传感器 |
CN106645029A (zh) * | 2016-12-07 | 2017-05-10 | 大连理工大学 | 一种熔接式的开腔光纤efpi折射率传感器 |
CN110108383A (zh) * | 2018-02-01 | 2019-08-09 | 桂林电子科技大学 | 基于长f-p腔光纤白光干涉型高温高灵敏度温度传感器 |
CN108956534A (zh) * | 2018-08-23 | 2018-12-07 | 天津工业大学 | 一种基于开放腔法珀干涉仪的折射率测量方法 |
CN109282794A (zh) * | 2018-11-05 | 2019-01-29 | 山东省科学院激光研究所 | 光纤测倾装置及差分测倾*** |
CN110954505A (zh) * | 2019-11-21 | 2020-04-03 | 河海大学 | 一种监测液体折射率的装置及方法 |
CN113720493A (zh) * | 2021-08-13 | 2021-11-30 | 武汉理工大学 | 基于光纤端面微纳谐振结构的传感器及其制备方法 |
CN113720493B (zh) * | 2021-08-13 | 2022-08-09 | 武汉理工大学 | 基于光纤端面微纳谐振结构的传感器及其制备方法 |
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Publication number | Publication date |
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CN1323286C (zh) | 2007-06-27 |
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Assignee: Shandong Taikoo Aircraft Engineering Co., Ltd. Assignor: Sun Yat-sen University Contract fulfillment period: 2009.8.21 to 2014.8.21 contract change Contract record no.: 2009440001395 Denomination of invention: Fabry-perot cavity structure for optical fibre sensing Granted publication date: 20070627 License type: Exclusive license Record date: 2009.9.4 |
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Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2009.8.21 TO 2014.8.21; CHANGE OF CONTRACT Name of requester: SHANDONG TAIKOO AIRCRAFT ENGINEERING CO., LTD. Effective date: 20090904 |
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