CN1573319A - 玻璃基板内缺陷的深度方向位置检测方法 - Google Patents
玻璃基板内缺陷的深度方向位置检测方法 Download PDFInfo
- Publication number
- CN1573319A CN1573319A CNA2004100020444A CN200410002044A CN1573319A CN 1573319 A CN1573319 A CN 1573319A CN A2004100020444 A CNA2004100020444 A CN A2004100020444A CN 200410002044 A CN200410002044 A CN 200410002044A CN 1573319 A CN1573319 A CN 1573319A
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- 239000011521 glass Substances 0.000 title claims abstract description 128
- 238000000034 method Methods 0.000 title description 37
- 239000000758 substrate Substances 0.000 claims abstract description 120
- 230000002950 deficient Effects 0.000 claims description 96
- 238000001514 detection method Methods 0.000 claims description 24
- 238000006073 displacement reaction Methods 0.000 claims description 14
- 230000007547 defect Effects 0.000 abstract description 17
- 239000012535 impurity Substances 0.000 description 13
- 238000004364 calculation method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 208000013201 Stress fracture Diseases 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Textile Engineering (AREA)
- Optics & Photonics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (3)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2003-0035066A KR100535569B1 (ko) | 2003-05-31 | 2003-05-31 | 유리 기판에 존재하는 결함의 깊이방향 위치 검출방법 |
KR0035066/2003 | 2003-05-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1573319A true CN1573319A (zh) | 2005-02-02 |
CN100483117C CN100483117C (zh) | 2009-04-29 |
Family
ID=34056780
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100020444A Expired - Lifetime CN100483117C (zh) | 2003-05-31 | 2004-01-09 | 玻璃基板内缺陷的深度方向位置检测方法 |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100535569B1 (zh) |
CN (1) | CN100483117C (zh) |
TW (1) | TWI311687B (zh) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102192972A (zh) * | 2010-02-26 | 2011-09-21 | 旭硝子株式会社 | 矩形板状物的裂纹检查方法及检查装置 |
CN103250047A (zh) * | 2010-12-09 | 2013-08-14 | 旭硝子株式会社 | 玻璃带内缺陷测定方法和玻璃带内缺陷测定*** |
CN105842885A (zh) * | 2016-03-21 | 2016-08-10 | 凌云光技术集团有限责任公司 | 一种液晶屏缺陷分层定位方法及装置 |
CN106353900A (zh) * | 2016-08-30 | 2017-01-25 | 武汉精测电子技术股份有限公司 | 一种带有坐标获取功能的图像信号生成方法及装置 |
CN106908449A (zh) * | 2017-02-17 | 2017-06-30 | 郑州旭飞光电科技有限公司 | 一种通过测量液晶玻璃板缺陷深度寻找产生缺陷的工段的方法 |
CN106996937A (zh) * | 2017-06-15 | 2017-08-01 | 福州东旭光电科技有限公司 | 一种玻璃基板内缺陷检测方法及装置 |
CN110020992A (zh) * | 2018-09-18 | 2019-07-16 | 永康市巴九灵科技有限公司 | 边缘质量辨识平台 |
CN110618141A (zh) * | 2019-09-17 | 2019-12-27 | 深圳新视智科技术有限公司 | 一种玻璃缺陷检测的方法、***、装置 |
CN110998298A (zh) * | 2017-08-24 | 2020-04-10 | 日本电气硝子株式会社 | 板状玻璃的制造方法 |
CN111337516A (zh) * | 2018-12-19 | 2020-06-26 | 英泰克普拉斯有限公司 | 玻璃盖板检查装置 |
CN112243484A (zh) * | 2018-06-05 | 2021-01-19 | 应用材料公司 | 用于使用相机焦距的绝对和相对深度测量的方法和设备 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100642500B1 (ko) * | 2005-03-02 | 2006-11-06 | (주)쎄미시스코 | 유리기판의 에지 결함 및 디스컬러 검사장치 |
US9488597B2 (en) | 2011-11-30 | 2016-11-08 | Corning Incorporated | Apparatus and methods for determining surface compliance for a glass surface |
KR101867015B1 (ko) | 2017-10-24 | 2018-06-14 | (주) 엠브이텍 | 글라스 결함 검사 장치, 검사 방법 및 검사 시스템 |
CN113484333B (zh) * | 2021-09-08 | 2021-12-14 | 苏州高视半导体技术有限公司 | 多层结构屏幕的异物缺陷区分方法、电子设备及存储介质 |
-
2003
- 2003-05-31 KR KR10-2003-0035066A patent/KR100535569B1/ko active IP Right Grant
- 2003-12-30 TW TW092137456A patent/TWI311687B/zh not_active IP Right Cessation
-
2004
- 2004-01-09 CN CNB2004100020444A patent/CN100483117C/zh not_active Expired - Lifetime
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102192972B (zh) * | 2010-02-26 | 2015-01-28 | 旭硝子株式会社 | 矩形板状物的裂纹检查方法及检查装置 |
CN102192972A (zh) * | 2010-02-26 | 2011-09-21 | 旭硝子株式会社 | 矩形板状物的裂纹检查方法及检查装置 |
CN103250047A (zh) * | 2010-12-09 | 2013-08-14 | 旭硝子株式会社 | 玻璃带内缺陷测定方法和玻璃带内缺陷测定*** |
CN105842885B (zh) * | 2016-03-21 | 2018-11-27 | 凌云光技术集团有限责任公司 | 一种液晶屏缺陷分层定位方法及装置 |
CN105842885A (zh) * | 2016-03-21 | 2016-08-10 | 凌云光技术集团有限责任公司 | 一种液晶屏缺陷分层定位方法及装置 |
CN106353900A (zh) * | 2016-08-30 | 2017-01-25 | 武汉精测电子技术股份有限公司 | 一种带有坐标获取功能的图像信号生成方法及装置 |
CN106353900B (zh) * | 2016-08-30 | 2019-08-13 | 武汉精测电子集团股份有限公司 | 一种带有坐标获取功能的图像信号生成方法及装置 |
CN106908449B (zh) * | 2017-02-17 | 2019-09-06 | 福州东旭光电科技有限公司 | 一种通过测量液晶玻璃板缺陷深度寻找产生缺陷的工段的方法 |
CN106908449A (zh) * | 2017-02-17 | 2017-06-30 | 郑州旭飞光电科技有限公司 | 一种通过测量液晶玻璃板缺陷深度寻找产生缺陷的工段的方法 |
CN106996937A (zh) * | 2017-06-15 | 2017-08-01 | 福州东旭光电科技有限公司 | 一种玻璃基板内缺陷检测方法及装置 |
CN110998298A (zh) * | 2017-08-24 | 2020-04-10 | 日本电气硝子株式会社 | 板状玻璃的制造方法 |
CN110998298B (zh) * | 2017-08-24 | 2023-01-06 | 日本电气硝子株式会社 | 板状玻璃的制造方法 |
CN112243484A (zh) * | 2018-06-05 | 2021-01-19 | 应用材料公司 | 用于使用相机焦距的绝对和相对深度测量的方法和设备 |
CN112243484B (zh) * | 2018-06-05 | 2022-08-19 | 应用材料公司 | 用于使用相机焦距的绝对和相对深度测量的方法和设备 |
US11582378B2 (en) | 2018-06-05 | 2023-02-14 | Applied Materials, Inc. | Methods and apparatus for absolute and relative depth measurements using camera focus distance |
TWI804631B (zh) * | 2018-06-05 | 2023-06-11 | 美商應用材料股份有限公司 | 用於使用相機焦距的絕對和相對深度測量的方法和設備 |
CN110020992A (zh) * | 2018-09-18 | 2019-07-16 | 永康市巴九灵科技有限公司 | 边缘质量辨识平台 |
CN111337516A (zh) * | 2018-12-19 | 2020-06-26 | 英泰克普拉斯有限公司 | 玻璃盖板检查装置 |
CN110618141A (zh) * | 2019-09-17 | 2019-12-27 | 深圳新视智科技术有限公司 | 一种玻璃缺陷检测的方法、***、装置 |
CN110618141B (zh) * | 2019-09-17 | 2022-08-05 | 深圳新视智科技术有限公司 | 一种玻璃缺陷检测的方法、***、装置 |
Also Published As
Publication number | Publication date |
---|---|
CN100483117C (zh) | 2009-04-29 |
JP2004361384A (ja) | 2004-12-24 |
TW200426497A (en) | 2004-12-01 |
KR20040103143A (ko) | 2004-12-08 |
TWI311687B (en) | 2009-07-01 |
JP4571401B2 (ja) | 2010-10-27 |
KR100535569B1 (ko) | 2005-12-08 |
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Legal Events
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: SUMSUNG KANGNING PRECISION MATERIAL CO., LTD. Free format text: FORMER NAME: SAMSUNG CORNING PRECISION GLASS |
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CP01 | Change in the name or title of a patent holder |
Address after: Gyeongbuk, South Korea Patentee after: SAMSUNG CORNING PRECISION MATERIALS Co.,Ltd. Address before: Gyeongbuk, South Korea Patentee before: SAMSUNG CORNING PRECISION GLASS CO.,LTD. |
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C56 | Change in the name or address of the patentee |
Owner name: KANGNING PRECISION MATERIAL CO., LTD. Free format text: FORMER NAME: SAMSUNG CORNING PRECISION MATERIALS CO., LTD. |
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CP03 | Change of name, title or address |
Address after: Chungnam, South Korea Patentee after: CORNING PRECISION MATERIALS Co.,Ltd. Address before: Gyeongbuk, South Korea Patentee before: SAMSUNG CORNING PRECISION MATERIALS Co.,Ltd. |
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CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20090429 |