CN1540408A - Conveyor for basal plate and testing equipment - Google Patents
Conveyor for basal plate and testing equipment Download PDFInfo
- Publication number
- CN1540408A CN1540408A CNA031232426A CN03123242A CN1540408A CN 1540408 A CN1540408 A CN 1540408A CN A031232426 A CNA031232426 A CN A031232426A CN 03123242 A CN03123242 A CN 03123242A CN 1540408 A CN1540408 A CN 1540408A
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- substrate
- detecting device
- pick
- conveying machine
- movable plate
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Abstract
The conveyor includes multiple rollers, a lifting unit, multiple first detectors and a second detector. The said roller and lifting unit are utilized to carry and lift base plate. First detectors detect whether there are unfilled corners in base plate. The second detector detects whether the base plate arrives preselected position, and the second detector is coupled to the lifting unit, rollers and the first detector. When reaching to preselected position, the second detector stops rollers and starts up first detector to detect whether there are unfilled corners in base plate; if no, the first detector sends signal to the lifting unit.
Description
Technical field
The present invention relates to a kind of substrate conveying machine and pick-up unit thereof, particularly relate to a kind of substrate conveying machine whether substrate that transmits unfilled corner takes place that detects thereon.
Background technology
In recent years, in the manufacture process of liquid crystal panel, along with the expansion day by day of glass substrate area, in the process that the discovery substrate transmits, the situation of unfilled corner takes place easily on board; For instance, in the Wet-type etching board, it utilizes roller as transfer mechanism; when transmitting substrate, a pressing plate must be set above roller, move along a set direction to guarantee substrate; yet this pressing plate can produce the problem that makes substrate generation unfilled corner under the situation of improper use.
In existing board, the similar functions that detection unfilled corner (fragmentation) do not arranged, know clearly it, as shown in Figure 1, when substrate 1 when a board will be transferred to another board, substrate 1 is transferred into a both allocation by roller 2, and before both arriving allocation, can roller 1 be slowed down by a deceleration detector 3, and then roller 1 is stopped by a stop detector 4, thereby make substrate 1 stop at this both on the allocation, be positioned at lifting member 5 and substrate 1 can being lifted of substrate 1 below then, and utilize not shown mechanical arm to be sent to next board; Will be appreciated that when stop detector 4 does not detect substrate 1 substrate can advance to and stop pin 6 places, substrate 1 can be unlikely by stopping pin 6 to keep and drop outside board this moment, and the board notifying operation person that can give the alarm has unusual condition.
As mentioned above, because known board does not detect the function of unfilled corner, when the substrate with unfilled corner is transferred to another board, because factors such as the size of substrate is not inconsistent, can be realized by the operator of another board, this not only causes other board operator's puzzlement, the waste in the time of also can causing worker simultaneously; In addition, when the unfilled corner of substrate enlarged, it will produce fragmentation and drop in board, and this not only needs whole board shut down and clear up, when serious, and the fragmentation of substrate even can cause damage to board.
Summary of the invention
Therefore, the object of the present invention is to provide a kind of substrate conveying machine, it can detect the substrate that transmits thereon whether unfilled corner takes place.
Another object of the present invention is to provide a kind of pick-up unit, it can not revised under the electric prerequisite of original board, detects substrate whether unfilled corner takes place.
According to the present invention, a kind of substrate conveying machine is provided, it is in order to transmit a substrate, and comprise and lift member and a plurality of first detecting device, wherein lift member in order to substrate is lifted, and whether first detecting device has unfilled corner in order to detect substrate, and with lift the member coupling, when first detecting device does not detect unfilled corner, send a signal, lift member with arrival.
In a preferred embodiment, the substrate conveying machine also comprises a plurality of switches, with the coupling of first detecting device, wherein when arbitrary first detecting device detects unfilled corner, switch is opened circuit respectively, lifts member so that signal can't be delivered to.
In addition, switch intercouples in the mode of series connection, and is respectively a relay.
In another preferred embodiment, the substrate conveying machine also comprises a plurality of rollers and one second detecting device, wherein roller is in order to transmit substrate, and whether second detecting device arrives a both allocation in order to detect substrate, and be coupled with roller, when second detecting device detects substrate and both arrives allocation, roller is stopped.
Second detecting device is with mode and first detecting device coupling of series connection, and in order to the detection substrate whether unfilled corner arranged, and when second detecting device detects unfilled corner, the signal of first detecting device can't be delivered to lift member.
First detecting device is separately positioned on and is positioned at both corners of the substrate of allocation.
The substrate conveying machine also comprises one the 3rd detecting device, and itself and roller are coupled, and uses so that roller slows down.
In another preferred embodiment, the substrate conveying machine also comprises a control module, and it is coupled with lifting member, wherein when first detecting device does not detect unfilled corner, makes control module and lifts conducting between the member.
In another preferred embodiment, first detecting device is to be provided with in paired mode, and is spaced apart 5mm between the first adjacent detecting device.
In another preferred embodiment, the substrate conveying machine also comprises a body and position adjustment assembly, and wherein body is provided with and lifts member, and position adjustment assembly is arranged on the body in a movable manner, and be respectively equipped with first detecting device on it, in order to adjust the position of first detecting device.
The position is adjusted assembly and is comprised a substrate and a movable plate respectively, and wherein substrate is arranged on the body in a movable manner, and movable plate is arranged in the substrate in a movable manner, and first detecting device movably is arranged on the movable plate respectively.
Be formed with one first guide groove on the body, and be formed with one first guide rail corresponding in the substrate, on first guide groove, move, substrate can be moved on this body by first guide rail with first guide groove.
In addition, above-mentioned position is adjusted assembly and is also comprised one first align member, passes substrate and body construction, in order to substrate is positioned on the body.
Be formed with one second guide groove in the substrate, and be formed with one second guide rail corresponding on the movable plate, on second guide groove, move, movable plate can be moved in substrate by second guide rail with second guide groove.
The position is adjusted assembly and is also comprised one second align member, passes movable plate and combines with substrate, in order to movable plate is positioned in the substrate.
Be formed with one the 3rd guide groove on the movable plate, use for first detecting device and pass, and first detecting device can be moved on movable plate.
The invention provides a kind of pick-up unit in addition, it is applicable to a board, and wherein board is in order to transmitting a substrate, and has the member of lifting and a plurality of roller, and above-mentioned detection device comprises a plurality of first detecting devices and one second detecting device; Whether first detecting device has unfilled corner in order to detect substrate, whether second detecting device arrives a both allocation in order to detect substrate, and respectively with lift member, roller, the coupling of first detecting device, wherein when second detecting device detects substrate and both arrives allocation, roller is stopped, and whether have unfilled corner, send a signal when first detecting device does not detect unfilled corner if starting first detecting device detection substrate, lift member to reach.
In order to make the above and other objects of the present invention, feature and advantage can more obvious easy to understand, below especially exemplified by a preferred embodiment, and conjunction with figs. be elaborated as follows.
Description of drawings
Fig. 1 is the synoptic diagram of known substrate conveying machine;
Fig. 2 is the synoptic diagram of substrate conveying machine of the present invention;
Fig. 3 is the synoptic diagram that assembly is adjusted in position of the present invention;
Fig. 4,5 is the synoptic diagram of pick-up unit of the present invention;
Fig. 6 is a display base plate when transmitting on board, the action synoptic diagram of each assembly.
Embodiment
Fig. 2,3,4,5 shows substrate conveying machine 100 of the present invention, in order to transmit a substrate 1, it comprise a plurality of rollers 110, lift member 120, a plurality of first detecting device 130, one second detecting device 140, one the 3rd detecting device 150, two stop pin 160, a plurality of switch 170, a body 180, a plurality of position and adjust an assembly 190 and a control module 210, wherein assembly 190 is adjusted and control module 210 constitutes pick-up unit of the present invention in first detecting device 130, second detecting device 140, the 3rd detecting device 150, switch 170, position.
First detecting device 130 as shown in Figure 2, in the present embodiment, it is provided with quantity is six, in order on three corners detecting substrate 1 whether unfilled corner is arranged, and respectively with lift 170 couplings of member 120, switch, when first detecting device 130 does not detect unfilled corner, send a signal, can lift member 120, make and lift member 120 and can lift substrate 1 to reach.
As shown in Figure 3, per two first detecting devices 130 are arranged at a position to be adjusted on the assembly 190, the position is adjusted assembly 190 and is arranged in a movable manner on the body 180, in order to adjust the position of first detecting device 130, and comprise a substrate 191, two movable plates 192, two first align members 193 and four second align members 194, wherein substrate 191 is made of three planes, one plane of substrate 191 is parallel with the end face of body 180, and other the two planes then end face with body 180 are vertical.
With reference to figure 3, be formed with two first guide grooves 181 on the body 180, be formed with two the first guide rail 191as corresponding in the substrate 191 (owing to overlap with first guide groove 181 with first guide groove 181, at chart display at same position), move on first guide groove 181 by the first guide rail 191a, substrate 191 can be moved on body 180, and pass substrate 191 by first align member 193 and combine, substrate 191 can be positioned both on the allocation of body 180 with body 180; Be formed with two second guide groove 191b in the substrate 191, be formed with the one second guide rail 192a corresponding on each movable plate 192 respectively (owing to overlap with the second guide groove 191b with the second guide groove 191b, at chart display at same position), move on the second guide groove 191b by the second guide rail 192a, movable plate 192 can be moved in substrate 191, and, movable plate 192 can be positioned both on the allocation of substrate 191 because second align member 194 passes movable plate 192 and combine with substrate 191; First detecting device 130 is formed with one the 3rd guide groove 192b on the movable plate 192 respectively, uses for first detecting device 130 and pass, so that can move on movable plate 192.
Will be appreciated that first align member and second align member can be screws, in body and substrate, be respectively equipped with positioning screw hole, can and substrate and movable plate be positioned respectively in body and the substrate by the engagement of screw and screw; In addition, first detecting device itself can be the structure of two-part, so that locate on the 3rd guide groove.
In addition, as shown in Figure 2, first detecting device 130 is separately positioned on and arrives both corners of the substrate 1 of allocation, and is provided with in paired mode, and the interval between the first adjacent detecting device 130 can be as small as 5mm.
With reference to figure 4, each first detecting device 130a, 130b, 130c, 130d, 130e, 130f can be coupled with a switch 170a, 170b, 170c, 170d, 170e, 170f respectively, when arbitrary first detecting device 130 detects unfilled corner, corresponding switch 170 is opened circuit, lift member 120 so that signal can't be delivered to.
As shown in Figure 4, switch 170 intercouples in the mode of series connection, and can be respectively a relay, as shown in Figure 5.
Be arranged at reference to figure 2, the second detecting devices 140 and arrive both corners of the substrate 1 of allocation, and with roller 110 couplings, whether arrive a both allocation in order to detect substrate 1, when second detecting device 140 detects substrates 1 and both arrives allocation, roller 110 is stopped.
As shown in Figure 4, second detecting device 140 is coupled via each switch 170 and first detecting device 130 respectively in the mode of series connection, in order to a corner of detecting substrate 1 whether unfilled corner is arranged, when there is unfilled corner in this corner that second detecting device 140 detects substrate 1, the signal of first detecting device 140 can't be delivered to lifts member 120.
With reference to figure 2, the three detecting devices 150 and roller 110 couplings, use so that roller 110 slows down.
With reference to figure 5, control module 210 is the control center of substrate conveying machine 100, can be coupled with above-mentioned each assembly respectively, and comprise a controller 211 (PLC), a demoder (SDS) 212 and an input/output bus port (SAB) 213, when first detecting device 130 does not detect unfilled corner, make control module 210 and lift conducting between the member 120, lift substrate 1 so that lift member 120.
Between the input/output bus port 213 and second detecting device 140 of control module 210, except transmitting signal, also transmit electric power.Switch 170 is the form of a relay as shown in Figure 5, needs the part 171 in a loop that switch 170 electric power are passed through, and just can make part 172 conductings between second detecting device 140 and control module 210; In addition, if switch 170 has electric power to pass through on the part 171 in loop, then must be by signal triggering one fiber optic circuit 221 of first detecting device 130, and this fiber optic circuit 221 can touch the transistor 222 that is positioned on the loop, has electric power to pass through and make on the part 171; In addition, on the loop, also be provided with a diode 223, electric power on the loop can be transmitted along a set direction, utilize above-mentioned formation to decide control module 210 whether must drive and to lift member 120 by the testing result of first detecting device 130 and second detecting device 140.
The formation of substrate conveying machine of the present invention illustrates its manner of execution below with reference to Fig. 6 as mentioned above.
As shown in Figure 6,, at first can be detected, at this moment the first detecting device 130a, 130b conducting switch 170a, the 170b corresponding with it by the first detecting device 130a, 130b when substrate 1 is sent to a final position (above-mentioned both allocations) from an initial position; Then, the substrate 1 that moves on is detected by the first detecting device 130c, 130d, at this moment the first detecting device 130c, 130d conducting switch 170c, the 170d corresponding with it; Then, the substrate 1 that moves on is detected by the 3rd detecting device 150c, and the 3rd detecting device 150 will slow down roller 110 by control module 210 this moment, after this, substrate 1 is detected by the first detecting device 130e, makes the switch 170e conducting corresponding with the first detecting device 130e; At last, substrate 1 is detected by the first detecting device 130f, make the switch 170f conducting corresponding with the first detecting device 130f, shown in Fig. 6 b, and substrate 1 is detected by second detecting device 140, this moment, second detecting device 140 stopped roller 110 by control module 210, substrate 1 both stops on the allocation, each first detecting device 130 judges this moment whether substrate 1 has unfilled corner, when each first detecting device 130 and second detecting device 140 all do not detect unfilled corner, control module 210 and lift conducting between the member 120, the signal of first detecting device 130 reaches and lifts member 120, and then makes and lift member 120 substrate 1 is lifted.
Will be appreciated that when above-mentioned arbitrary first detecting device 130 detects unfilled corner will the switch corresponding with it 170 be opened circuit, its signal can't be delivered to and lift member 120, and then make and lift member 120 and substrate 1 can't be lifted, and can give the alarm.When second detecting device 140 detected unfilled corner, it also made by control module 210 and lifts member 120 and substrate 1 can't be lifted.
As mentioned above, utilize in four corners of substrate the detecting device that can detect fragmentation is set, when in the inner generation of board unfilled corner, can find the very first time, and can effectively dispose as early as possible, therefore reduce the generation of unfilled corner product.
Because detecting device is arranged at a position and adjusts on the assembly, its position can arbitrarily be adjusted, and can the unfilled corner of diverse location carry out suitable detection when detecting on line operation thus.
In addition, because the present invention is the unfilled corner problem that detects substrate by the mode of outside serial connection switch, therefore do not need to revise significantly the electric and controller on the board, just one-tenth that can be minimum was finished the improvement to them originally.
Though the present invention discloses with preferred embodiment; but be not in order to limit the present invention; any those skilled in the art is not breaking away from the spirit and scope of the invention, can make and changing and modification, so protection scope of the present invention is defined with accompanying claims.
Claims (34)
1. a pick-up unit is applicable to a board, and this board is in order to transmitting a substrate, and has the member of lifting and a plurality of roller, and this pick-up unit comprises:
Whether a plurality of first detecting devices have unfilled corner in order to detect this substrate; And
One second detecting device, whether arrive a both allocation in order to detect this substrate, and respectively with lift member, roller, the coupling of first detecting device, wherein when second detecting device detects substrate and both arrives allocation, roller is stopped, and whether have unfilled corner, when first detecting device does not detect unfilled corner, send signal arrival and lift member if starting first detecting device detection substrate.
2. pick-up unit as claimed in claim 1 wherein also comprises a plurality of switches, with the coupling of first detecting device, wherein when arbitrary first detecting device detects unfilled corner, switch is opened circuit respectively, lifts member so that signal can't be delivered to.
3. pick-up unit as claimed in claim 2, wherein switch intercouples in the mode of series connection.
4. pick-up unit as claimed in claim 2, wherein switch is respectively a relay.
5. pick-up unit as claimed in claim 1, wherein whether second detecting device has unfilled corner with mode and first detecting device coupling of series connection in order to the detection substrate, when second detecting device detects unfilled corner, the signal of first detecting device can't be delivered to lift member.
6. pick-up unit as claimed in claim 1, wherein first detecting device is separately positioned on and is positioned at both corners of the substrate of allocation.
7. pick-up unit as claimed in claim 1 wherein also comprises one the 3rd detecting device, and itself and roller are coupled, and uses so that roller slows down.
8. pick-up unit as claimed in claim 1, wherein board also comprises a control module, its with lift member coupling, when first detecting device does not detect unfilled corner, control module and lift conducting between the member.
9. pick-up unit as claimed in claim 1, wherein first detecting device is provided with in paired mode, is spaced apart 5mm between the first adjacent detecting device.
10. pick-up unit as claimed in claim 1, wherein board also comprises a body, and pick-up unit comprises that also a position adjusts assembly, is arranged in a movable manner on the body, is respectively equipped with first detecting device on it, in order to adjust the position of first detecting device.
11. pick-up unit as claimed in claim 10, wherein adjustment assembly in position comprises respectively:
One substrate is arranged on the body in a movable manner; And
One movable plate is arranged in the substrate in a movable manner, and first detecting device movably is arranged on the movable plate respectively.
12. pick-up unit as claimed in claim 11 wherein is formed with one first guide groove on the body, be formed with one first guide rail corresponding with first guide groove in the substrate, moves on first guide groove by first guide rail, and substrate can be moved on body.
13. pick-up unit as claimed in claim 11, wherein adjustment assembly in position also comprises one first align member, and it passes substrate and combines with body, in order to substrate is positioned on the body.
14. pick-up unit as claimed in claim 11 wherein is formed with one second guide groove in the substrate, be formed with one second guide rail corresponding with second guide groove on the movable plate, moves on second guide groove by second guide rail, and movable plate can be moved in substrate.
15. pick-up unit as claimed in claim 11, wherein adjustment assembly in position also comprises one second align member, and it passes movable plate and combines with substrate, in order to movable plate is positioned in the substrate.
16. pick-up unit as claimed in claim 11 wherein is formed with one the 3rd guide groove on the movable plate, with so that first detecting device passes, first detecting device can move on movable plate.
17. a substrate conveying machine comprises:
One lifts member, in order to a substrate is lifted; And
A plurality of first detecting devices, whether have unfilled corner, and be coupled with lifting member if detecting substrate, wherein when first detecting device does not detect unfilled corner, send signal arrival and lift member.
18. substrate conveying machine as claimed in claim 17 wherein also comprises a plurality of switches, with the coupling of first detecting device, wherein when arbitrary first detecting device detects unfilled corner, switch is opened circuit respectively, lifts member so that signal can't be delivered to.
19. substrate conveying machine as claimed in claim 18, wherein switch intercouples in the mode of series connection.
20. substrate conveying machine as claimed in claim 18, wherein switch is respectively a relay.
21. substrate conveying machine as claimed in claim 17 wherein also comprises a plurality of rollers, in order to transmit substrate.
22. substrate conveying machine as claimed in claim 21 wherein also comprises one second detecting device, whether arrives a both allocation in order to detect substrate, and with the roller coupling, wherein when second detecting device detection substrate both arrives allocation, roller is stopped.
23. substrate conveying machine as claimed in claim 22, wherein second detecting device is with the mode and the coupling of first detecting device of series connection, in order to detect substrate whether unfilled corner is arranged, when second detecting device detected unfilled corner, the signal of first detecting device can't be delivered to and lift member.
24. substrate conveying machine as claimed in claim 22, wherein first detecting device is separately positioned on and is positioned at both corners of the substrate of allocation.
25. substrate conveying machine as claimed in claim 21 wherein also comprises one the 3rd detecting device, itself and roller are coupled, and use so that roller slows down.
26. substrate conveying machine as claimed in claim 17 wherein also comprises a control module, its with lift member coupling, wherein when first detecting device does not detect unfilled corner, control module and lift conducting between the member.
27. substrate conveying machine as claimed in claim 17, wherein first detecting device is provided with in paired mode, is spaced apart 5mm between the first adjacent detecting device.
28. substrate conveying machine as claimed in claim 17 wherein also comprises:
One body which is provided with and lifts member; And
Assembly is adjusted in one position, is arranged in a movable manner on the body, is respectively equipped with first detecting device on it, in order to adjust the position of first detecting device.
29. substrate conveying machine as claimed in claim 28, wherein adjustment assembly in position comprises respectively:
One substrate is arranged on the body in a movable manner; And
One movable plate is arranged in the substrate in a movable manner, and first detecting device movably is arranged on the movable plate respectively.
30. substrate conveying machine as claimed in claim 29 wherein is formed with one first guide groove on the body, be formed with one first guide rail corresponding with first guide groove in the substrate, moves on first guide groove by first guide rail, and substrate can be moved on body.
31. substrate conveying machine as claimed in claim 29, wherein adjustment assembly in position also comprises one first align member, and it passes substrate and combines with body, in order to substrate is positioned on the body.
32. substrate conveying machine as claimed in claim 29 wherein is formed with one second guide groove in the substrate, be formed with one second guide rail corresponding with second guide groove on the movable plate, moves on second guide groove by second guide rail, and movable plate can be moved in substrate.
33. substrate conveying machine as claimed in claim 29, wherein adjustment assembly in position also comprises one second align member, and it passes movable plate and combines with substrate, in order to movable plate is positioned in the substrate.
34. substrate conveying machine as claimed in claim 29 wherein is formed with one the 3rd guide groove on the movable plate, with so that first detecting device passes, first detecting device can be moved on movable plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031232426A CN1326223C (en) | 2003-04-24 | 2003-04-24 | Conveyor for basal plate and testing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031232426A CN1326223C (en) | 2003-04-24 | 2003-04-24 | Conveyor for basal plate and testing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1540408A true CN1540408A (en) | 2004-10-27 |
| CN1326223C CN1326223C (en) | 2007-07-11 |
Family
ID=34321245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031232426A Expired - Fee Related CN1326223C (en) | 2003-04-24 | 2003-04-24 | Conveyor for basal plate and testing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1326223C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1987436B (en) * | 2006-12-27 | 2010-04-21 | 友达光电股份有限公司 | Base board detector and glass base board detector |
| CN109597284A (en) * | 2019-02-02 | 2019-04-09 | 东旭（昆山）显示材料有限公司 | A kind of pre- alignment device of exposure machine and exposure machine |
| CN109850573A (en) * | 2018-12-04 | 2019-06-07 | 武汉华星光电半导体显示技术有限公司 | Conveying machine |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0968804A (en) * | 1995-09-04 | 1997-03-11 | Hitachi Ltd | Resist coating device |
| JP2002134392A (en) * | 2000-10-23 | 2002-05-10 | Nikon Corp | Apparatus and method for measuring position, aligner and device manufacturing method |
| JP2002261141A (en) * | 2001-03-02 | 2002-09-13 | Nikon Corp | Semiconductor device inspection apparatus |
-
2003
- 2003-04-24 CN CNB031232426A patent/CN1326223C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1987436B (en) * | 2006-12-27 | 2010-04-21 | 友达光电股份有限公司 | Base board detector and glass base board detector |
| CN109850573A (en) * | 2018-12-04 | 2019-06-07 | 武汉华星光电半导体显示技术有限公司 | Conveying machine |
| CN109597284A (en) * | 2019-02-02 | 2019-04-09 | 东旭（昆山）显示材料有限公司 | A kind of pre- alignment device of exposure machine and exposure machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1326223C (en) | 2007-07-11 |
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