CN1529120A - Small-sized on-line radical shear interferometer and its aspheric surface measuring method - Google Patents
Small-sized on-line radical shear interferometer and its aspheric surface measuring method Download PDFInfo
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Abstract
The invention is a kind of small online radial cutting interferometer and the method for measuring a non-sphere, which refers to a kind of optical precise measuring device and the measuring method, the meter includes: He-Ne laser protective housing, spatial filter, collimate lens, flat reflecting mirror, light splitting prism, the measured non-sphere mirror, the convex lens, are arranged in one light channel; the light splitting prism, measured non-sphere mirror, the convex mirror, the waveband board, the filter piece, the variable conjunction, imaging lens, CCD camera are all in the other channel; the spatial filter, the convex mirror the waveband board, the variable light conjunction are set with a shift adjusting mechanism, the above all are set in the same board. The method is: (1) adjusting the radial cutting interferometer; (2) processes the image and reconstructs the three-dimension wave phase difference.
Description
Technical field
The present invention relates to a kind of optical fine measuring instrument and measuring method thereof, specifically relate to a kind of radial-shear interferometer and measure aspheric method.
Background technology
Aspheric surface plays a very important role in space optics, military optics, astronomical research field and the high-tech product for civilian use.Because aspheric shape is ever-changing, existing various detection methods all have the measuring object of its limitation.The common interferometric method that installs compensator additional makes optical design and system architecture become complicated more.For example, the interferometer measurement aperture of Wyko and Zygo company reaches Φ 500mm, and accuracy is λ/50.But complex structure costs an arm and a leg, and is difficult to online use.Learn that from existing patent the technology of research has all adopted additional hologram and other optical elements.92104991.9) and " utilizing hologram and concave surface to measure aspheric apparatus and method " (application number: 02156997.5) adopted computed hologram or concave surface optical element for example, " holographic interference apparatus of real-time detecting aspheric surface " (application number:." a kind of convex aspheric surface check interferometer " (application number: 01272267.7) adopted phase-type to roll over the mixing inspection template that spreads out.These technology need design and produce different holographic templates or optical element for different tested objects, and test environment is had very high requirement, do not possess versatility.Therefore, do not need just to become the best-of-breed technology of the online detection of aspheric surface with reference to corrugated, common light path shearing interference method that antijamming capability is strong.
Summary of the invention
Technical matters:
The purpose of this invention is to provide a kind of particularly low-cost small-sized online radial-shear interferometer of detecting of aspheric surface and measure aspheric method of optic test that is used for.
Technical scheme:
Small-sized online radial-shear interferometer of the present invention, comprise laser instrument, lens, displacement governor motion, it is characterized in that He-Ne laser instrument in this interferometer, spatial filter, collimation lens, plane mirror, Amici prism, tested aspheric mirror, convex mirror series arrangement in a light path; Amici prism, tested aspheric mirror, convex mirror, zone plate, optical filter, iris, imaging lens, CCD gamma camera series arrangement in another light path that Amici prism is told; Be equipped with the displacement governor motion on its spatial filter, convex mirror, zone plate, the iris, above each several part all is arranged on the same negative.
The aspheric method of the measurement of small-sized online radial-shear interferometer of the present invention is:
(1) regulate radial-shear interferometer:
A: after the convex mirror that will have a high surface figure accuracy places tested non-spherical lens, and the center of curvature that satisfies convex mirror overlaps with the focus of tested non-spherical lens;
B: light beam is through being returned by former road by the convex mirror reflection behind the tested non-spherical lens, and folded light beam is sheared by two zone plates, through the imaging of CCD gamma camera;
C: regulate the interference fringe that instrument displacement governor motion obtains level modulation and vertical modulation;
D: the focal length of regulating the CCD camera lens and aperture obtain the stripe image of different big or small and contrasts; Handle the poor of shear interference image with the reconstruction of three-dimensional phase of wave:
A: one dimensional fourier transform:
B: to choosing delegation in the interferogram of gathering, carry out fast Fourier transform (FFT), take absolute value the computational picture frequency spectrum;
C: utilize window function to select the one-level spectrum to carry out inverse fourier transform, arc tangent is asked a phase:
D: calculate the ratio of its real part and imaginary part, the negate tangent obtains the phase place line phase of going forward side by side and goes the parcel operation;
E: the phase of wave difference is carried out numerical integration and cycling, obtain three-dimensional corrugated face shape.
The present invention is a kind of small radial shearing interferometer, is made up of optics/mechanical system and image processing system two parts: optics and mechanical part are realized the shear interference of light beam and are produced interference image; The image processing part is gathered and is handled image, analyzes tested surface shape information.
The present invention adopts the double wave band plate of parallel placement to produce radial shear interference.Zone plate can play two effects---lens and optical splitter, promptly light beam by zone plate after a part directly advance, diffraction takes place in a part.Reference light passes through first zone plate then by second zone plate diffraction, and thing light is passed through second zone plate again by first zone plate diffraction.These light produce interference fringe in the overlapping interference of the core of image plane.When making zone plate, calculate wavestrip number and each wavestrip radius earlier, after each wavestrip radius is amplified by a certain percentage, draw the polar plot of zone plate, send a manuscript to the compositor film, obtain the zone plate finished product by the miniature plate-making of industry again.The zone plate of Zhi Zuoing has precision height, characteristics that cost is low like this, satisfies appliance requires.
Optics of the present invention and mechanical part are made up of He-Ne laser instrument, various optical element and mechanical organ.When measuring non-spherical lens, light beam is successively by optical elements such as spatial filter, collimation lens, plane mirror, Amici prism, non-spherical lens, convex mirror, zone plate, optical filter, diaphragm, imaging lenses in the light path.In difficult adjustings such as wave filter, zone plate, catoptron, diaphragms or need the place of precision positioning to use one dimension or two-dimentional accurate displacement mechanism.The making of element and use have taken into full account the small-sized and light design philosophy of instrument, and the bottom of optical system is a steel substrate, are convenient to the firm of instrument and move.As long as light path is improved a little, can measurement plane mirror and spherical mirror.
The collection and the disposal system of image mainly are made up of CCD gamma camera, image collection card, computing machine and imgae processing software.The image that image collection card receives CCD carries out the A/D conversion, sends into computing machine after becoming digital signal.Handle interference fringe with Fourier transform fringe phase analytical approach.Select whether will carry out medium filtering according to image quality and remove noise, carry out a filtering usually and get final product.Select one dimension figure image point to carry out fast Fourier transform (FFT) then, take absolute value, extract after the conversion+1 or-1 grade of frequency spectrum, and it is transformed to the basic point position by bandpass filter.Frequency spectrum after extracting is carried out invert fast fourier transformation, obtain the PHASE DISTRIBUTION in a certain cross section by arctan function.If the result of One Dimension Analysis is reasonable, the operation with regard to One Dimension Analysis capable of circulation draws data matrix, and constructs three-dimensional wave with this and differ figure.According to the relation of corrugated phase deviation and corrugated face shape difference, choose the zone that comprises interference image, the phase of wave difference is carried out numerical integration and cycling, can draw three-dimensional corrugated face shape then.
Beneficial effect:
The present invention adopts the double wave band plate to produce radial shear interference, has simplified apparatus structure effectively, and has strengthened the ability of instrument adaptation working environment; Adopting industry to send a manuscript to the compositor the zone plate made from miniature plate-making technology has sufficiently high precision and has reduced cost.This invention is a ray machine zooming integrated technique, gathers stripe image by CCD, and computing machine shows and processing whole audience bar graph.Position, the corrugated phase detection technique of usage space modulation has realized the real-time detection of interferogram, makes simultaneously that apparatus structure is simple more, cost is lower.Imgae processing software has good graphical interfaces and abundant man-machine conversation operation, can obtain three dimensional Phase information and corrugated face shape information.Experiment show this interferometer can measurement plane, sphere and aspherical degree and the not very big aspheric surface of relative aperture, measuring accuracy reaches λ/5 (P-V) and λ/10 (RMS).
Description of drawings:
Fig. 1 is an optical system light path design drawing of the present invention.Wherein have: He-Ne laser instrument 1, spatial filter 2, collimation lens 3, plane mirror 4, Amici prism 5, tested aspheric mirror 6, convex mirror 7, zone plate 8,9, optical filter 10, iris 11, imaging lens 12, CCD gamma camera 13, fill color are represented the displacement governor motion.
Fig. 2 is the polar plot of the zone plate that uses in this instrument.
Fig. 3 is the interference image processing flow chart.
Embodiment
Small-sized online radial-shear interferometer, comprise laser instrument, lens, displacement governor motion, it is characterized in that He-Ne laser instrument 1 in this interferometer, spatial filter 2, collimation lens 3, plane mirror 4, Amici prism 5, tested aspheric mirror 6, convex mirror 7 series arrangement in a light path; Amici prism 5, tested aspheric mirror 6, convex mirror 7, zone plate 8,9, optical filter 10, iris 11, imaging lens 12, CCD gamma camera 13 series arrangement in another light path that Amici prism 5 is told; Be equipped with the displacement governor motion on its spatial filter 2, convex mirror 7, zone plate 8, the iris 11, above each several part all is arranged on the same negative.Each parts in the optical system light path of the present invention are as follows:
He-Ne laser instrument 1 (long 280mm, power 1.5mw, wavelength 632.8nm);
Spatial filter 2 (40X object lens and 25 μ pin holes comprise three-dimensional adjusting mechanism);
Two gummed achromatism collimation lenses 3 (diameter of phi 25.4mm, focal length F10mm);
Plane mirror 4 (diameter of phi 25.4mm);
Single wavelength Amici prism 5 (length of side 25.4mm, wavelength 632.8nm);
Tested non-spherical lens 6;
Convex mirror 7 (radius-of-curvature is long less than Jiao of tested non-spherical lens);
Neutral density filter 10 (transmissivity T0.1%);
Iris 11 (diameter of phi 1～12mm);
Imaging lens 12 (diameter of phi 25.4mm, focal length F7.5mm);
CCD gamma camera 13 (the quick logical MTV-1881EX in Taiwan comprises the SE5018 camera lens);
Fill color is represented the displacement governor motion.
Fig. 2 is the polar plot of the zone plate that uses in this instrument.Wherein:
Diameter D10mm, focal length F200mm, total endless belt several 196.
Fig. 3 is the interference image processing flow chart.Wherein:
Medium filtering uses 3 * 3 templates;
256 of Fourier transform picture elements;
The bandpass filter size is finished by man-machine conversation;
SPA sudden phase anomalies judgment value when phase place goes to wrap up is 4.
1, the control method of radial-shear interferometer:
The control method of interferometer is described in conjunction with Fig. 1.The light beam that uses 1.5mw single mode He-Ne laser instrument 1 to send is through being collimated by lens 3 after spatial filter 2 expansion bundles, the filtering.Amici prism 5 is isolated system with the upwards reflection of a part of light, and a part of light directly advances.After the convex mirror 7 that will have a high surface figure accuracy places tested non-spherical lens 6, and the center of curvature that satisfies convex mirror overlaps with aspheric focus.Light beam carries its information through after the aspheric surface, is returned by former road by the convex mirror reflection, passes through beam splitter once more, and light path changes 90 °.Two zone plates 8,9 of parallel placement will comprise the light beam of measured lens surface information to be sheared, and behind optical filter 10 and diaphragm 11, passes through imaging len 12 again, imports computing machine into after being received by CCD gamma camera 13.
2, the adjusting of interference image and collection
One dimension in the regulating system, two-dimension translational mechanism, the accurately position of definite related elements.Regulate the horizontal shift mechanism of zone plate 8 or the vertical lifting mechanism of zone plate 9, obtain the interference fringe of level modulation and vertical modulation.The focal length of regulating the CCD camera lens and aperture obtain the stripe image of different big or small and contrasts.
Collimation and condenser lens play very big influence to image quality, and in interferometer, what we used is high-quality small-bore pair of gummed achromat.The CCD gamma camera is very sensitive device, if interference light too by force or too, all can influence the processing of image.Under the certain situation of collimation lens focal length, the microcobjective multiplying power on wave filter is less, and then collimated light beam is thinner, and light intensity is concentrated, and is unfavorable for the processing of interference pattern.According to experimental phenomena relatively, we determine to select for use the microcobjective of 40X and the pin hole of 25 μ to form wave filter.Similar reason, according to the interference pattern contrast that different optical filters produce, we finally select transmitance for use is that 0.1% optical filter generates comparatively desirable image.
3, the design of zone plate, method for making
Design, the method for making of zone plate are described in conjunction with Fig. 2.The two zone plate diameter 10mm that the present invention uses, focal length is respectively 150mm and 200mm.(1) uses computed in software to go out number of rings and each ring radius of zone plate, and keep a record; (2) use vector plotting software that zone plate is amplified certain multiple and draw, will carry out necessary setting to software in the process, to eliminate the issuable error of drawing; (3) institute's drawing sample is sent a manuscript to the compositor film at 1: 1, use industrial miniature plate-making technology to make the zone plate finished product.The zone plate made of method thus, focus error can be controlled in below 0.5%.
4, the reconstruction that differs of the processing of shear interference image and three-dimensional wave
The processing procedure of shear interference image is described in conjunction with Fig. 3.Image collection card adopts the high speed image capture card based on pci bus, the video input signals that meets pal mode and TSC-system formula, frequency with 14.74MHz (pal mode) or 12.273MHz (TSC-system formula) is sampled, carry out A/D conversion then, by pci bus pictorial data is sent to the VGA card and shows in real time or be sent to real-time storage in the internal memory of computing machine.Programme as the programming development platform of system software with visual c++, finishing image shows, gathers and handle, and abundant man-machine conversation operation is provided, wherein used Visual C++ and MATLAB interface function programming technique to make up three-dimensional wave and differed and corrugated face shape.
Treatment step is: (1) is chosen row image point and is carried out fast Fourier transform (FFT) in interferogram, take absolute value the computational picture frequency spectrum; (2) utilize window function to select the one-level spectrum to carry out inverse fourier transform, calculate the ratio of its real part and imaginary part, the negate tangent obtains the phase place line phase of going forward side by side and goes the parcel operation; (3) the phase of wave difference is carried out numerical integration and cycling, obtain three-dimensional corrugated face shape.
Claims (2)
1, a kind of small-sized online radial-shear interferometer, comprise laser instrument, lens, displacement governor motion, it is characterized in that He-Ne laser instrument (1) in this interferometer, spatial filter (2), collimation lens (3), plane mirror (4), Amici prism (5), tested aspheric mirror (6), convex mirror (7) series arrangement in a light path; Amici prism (5), tested aspheric mirror (6), convex mirror (7), zone plate (8,9), optical filter (10), iris (11), imaging lens (12), CCD gamma camera (13) series arrangement in another light path that Amici prism (5) is told; Its spatial filter (2), convex mirror (7), zone plate (8), iris are equipped with the displacement governor motion on (11), and above each several part all is arranged on the same negative.
2, a kind of aspheric method of measurement that is used for the small-sized online radial-shear interferometer of claim 1 is characterized in that its method step is:
(1) regulate radial-shear interferometer:
A: after the convex mirror (7) that will have a high surface figure accuracy places tested non-spherical lens (6), and the center of curvature that satisfies convex mirror (7) overlaps with the focus of tested non-spherical lens (6);
B: light beam is returned by former road by convex mirror (7) reflection through tested non-spherical lens (6) back, and folded light beam is sheared by two zone plates (8,9), through CCD gamma camera (13) imaging;
C: regulate the interference fringe that instrument displacement governor motion obtains level modulation and vertical modulation;
D: the focal length of regulating CCD gamma camera (13) camera lens and aperture obtain the stripe image of different big or small and contrasts;
(2) handle the poor of shear interference image with the reconstruction of three-dimensional phase of wave:
A: one dimensional fourier transform:
B: to choosing delegation in the interferogram of gathering, carry out fast Fourier transform (FFT), take absolute value the computational picture frequency spectrum;
C: utilize window function to select the one-level spectrum to carry out inverse fourier transform, arc tangent is asked a phase:
D: calculate the ratio of its real part and imaginary part, the negate tangent obtains the phase place line phase of going forward side by side and goes the parcel operation;
E: the phase of wave difference is carried out numerical integration and cycling, obtain three-dimensional corrugated face shape.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100385224C (en) * | 2005-12-16 | 2008-04-30 | 华南师范大学 | Bipoint-source interference detection method and device of spherical reflection mirror |
| CN101408405B (en) * | 2007-10-09 | 2011-01-26 | 财团法人工业技术研究院 | Optical type aspherical measuring system and platform thereof |
| CN102303224A (en) * | 2011-05-31 | 2012-01-04 | 哈尔滨工业大学 | Device and method for integrally machining and measuring optical parts |
| CN103968776A (en) * | 2013-01-08 | 2014-08-06 | 浙江科技学院 | Novel on-machine detection device for aspheric optical molds |
| CN107656288A (en) * | 2017-09-15 | 2018-02-02 | 中国科学院长春光学精密机械与物理研究所 | A kind of new shearing Beam Imaging System and target image acquisition methods |
| CN107702641A (en) * | 2016-08-09 | 2018-02-16 | 广西师范大学 | A kind of system and method for detecting non-spherical lens transmission corrugated |
| CN111238363A (en) * | 2018-11-28 | 2020-06-05 | 中国科学院光电技术研究所 | Multi-wave radial shearing interferometer based on Fresnel zone plate |
-
2003
- 2003-10-08 CN CNB2003101060016A patent/CN1280604C/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100385224C (en) * | 2005-12-16 | 2008-04-30 | 华南师范大学 | Bipoint-source interference detection method and device of spherical reflection mirror |
| CN101408405B (en) * | 2007-10-09 | 2011-01-26 | 财团法人工业技术研究院 | Optical type aspherical measuring system and platform thereof |
| CN102303224A (en) * | 2011-05-31 | 2012-01-04 | 哈尔滨工业大学 | Device and method for integrally machining and measuring optical parts |
| CN102303224B (en) * | 2011-05-31 | 2013-09-04 | 哈尔滨工业大学 | Device and method for integrally machining and measuring optical parts |
| CN103968776A (en) * | 2013-01-08 | 2014-08-06 | 浙江科技学院 | Novel on-machine detection device for aspheric optical molds |
| CN107702641A (en) * | 2016-08-09 | 2018-02-16 | 广西师范大学 | A kind of system and method for detecting non-spherical lens transmission corrugated |
| CN107702641B (en) * | 2016-08-09 | 2020-08-18 | 广西师范大学 | System and method for detecting transmission wave surface of aspheric lens |
| CN107656288A (en) * | 2017-09-15 | 2018-02-02 | 中国科学院长春光学精密机械与物理研究所 | A kind of new shearing Beam Imaging System and target image acquisition methods |
| CN107656288B (en) * | 2017-09-15 | 2020-01-14 | 中国科学院长春光学精密机械与物理研究所 | Novel shearing light beam imaging system and target image acquisition method |
| CN111238363A (en) * | 2018-11-28 | 2020-06-05 | 中国科学院光电技术研究所 | Multi-wave radial shearing interferometer based on Fresnel zone plate |
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