CN1521500A - Low voltage and low power thermal bubble film type microfluid driving device - Google Patents
Low voltage and low power thermal bubble film type microfluid driving device Download PDFInfo
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- CN1521500A CN1521500A CNA031031242A CN03103124A CN1521500A CN 1521500 A CN1521500 A CN 1521500A CN A031031242 A CNA031031242 A CN A031031242A CN 03103124 A CN03103124 A CN 03103124A CN 1521500 A CN1521500 A CN 1521500A
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Abstract
The invention relates to a low voltage low power heat bubble thin film type micro-fluid drive apparatus, wherein the fluid arrangement includes a fluid channel, in which fluid fills and flow from and out from the opening of the fluid channel, a heat bubble thin film type actuator comprising heating plates arranged on the bottom of the confined fluid chamber, which is insulated from the fluid channel through elastic membrane and is filled with low-boiling point liquid.
Description
Technical field
The present invention relates to a kind of microfluid drive, particularly relate to a kind of low voltage and low power thermal diaphragm type microfluid drive.
Background technology
Analyze micro-total analysis system (the Micro Total Analysis Systems of detection method along with being widely used in combined chemical, genosome and proteosome technology etc., the development of μ-TAS) is day by day flourishing, and analytical instrument and system have also entered new era of micron even nanometer scale.Micro-total analysis system is that the biochemical or general chemical reaction that will carry out in the experiment is incorporated on the small chip, for example a large amount of biochemical substances fragment one ends is fixed in chip surface, and makes a material fragment and a various corpse or other object for laboratory examination and chemical testing produce reciprocation between the two by similar mode.
Need some fluid manipulation steps and carry out this experiment, make micro-total analysis system can bring into play its effect, allow material in the middle of the chip with to enter a corpse or other object for laboratory examination and chemical testing in the middle of the chip fully mixed and react.And do not having liquid handling device or similarly be difficult to make fluid to mix and the robotization of flowing under the flow mixing device.So being solution fluid treatment problem, some microfluid drives arise at the historic moment.Its function is to reduce the speed of reagent consumption and increase course of reaction.The general fluid drive unit is nothing more than being pumping system.And present stage is used in the method that drives usefulness on the chip, except the external existing general employed pump of chip, in be built in being broadly divided on the chip: mechanical type Micropump (Mechanic micropumps) and the on-mechanical pump (non-mechanicmicropumps) that declines.
Most of mechanical type Micropumps that develop are to belong to reciprocating type.The Micropump structure of many these classes is pump bodies, add actuator (actuator) and constitute with reverse checkvalve, its actuator type of drive includes Piezoelectric Driving (Piezoelectric), static driven (electrostatic), Electromagnetic Drive (Electromagnetic), air pressure driving (Pneumatic), double-metal layer driving (Bi-metal) and utilizes the modes such as memory effect of marmem (SMA).But not the mechanical type Micropump then has diffusion type pump (Diffuser Pumps), heat-vapour-pressure type pump (Thermo-pneumatic), hot kapillary pump (Thermocapillary Pumps) and pneumatic type pump (PnuematicPumps) etc.
In general, mechanical pump all belongs to uniflux, so usually can't satisfy the demand of bi-directional drive.And the operating voltage that Piezoelectric Driving and static driven formula pump need reaches more than 110 volts; And the dissipation power of electromagnetic drive type and heat-vapour-pressure type pump is about 1000 milliwatts (mW); In addition, then be to need external one large-scale source of the gas supply to be driven as the pneumatic type pump, lost maneuverability.The common shortcoming of microfluid driving pump is difficult to be integrated into portable system simultaneously for can't effectively control fluid flow direction now.
Summary of the invention
In view of the problem of above prior art, the object of the present invention is to provide a kind of low voltage and low power thermal diaphragm type microfluid drive, this device can effectively be controlled fluid flow direction.Simultaneously, the manner of execution that utilizes thermal to promote elastic film can reduce the voltage dissipation power, also has speed microcontroller combined control stream body is driven to be integrated into the advantage of portability system.
For reaching above-mentioned purpose, the present invention can realize by following measure:
A kind of low voltage and low power thermal diaphragm type microfluid drive, this drive unit includes:
One fluidic structures has a fluid passage and is connected in a fluid opening of this fluid passage, and fluid is filled in the middle of this fluid passage and via this fluid openings turnover; And
More than one thermal diaphragm type actuator, this thermal diaphragm type actuator is provided with a heating plate by an elastic film formed one airtight liquid chamber bottom and is formed, this airtight liquid chamber is to be isolated from this fluid passage and to be filled with a low-boiling point liquid by this elastic film, this heating plate is to produce bubble this elastic film to be produced compressing and the action of loosening in order to heat this low-boiling point liquid, makes the volumetric expansion of this airtight liquid chamber and shrinks to drive the fluid in this fluid passage.
This fluidic structures is formed by the thick film photoresistance.
The material of this elastic film can be selected from group that silicon rubber, dimethyl silicone polymer and poly-terephthaldehyde's alkene formed one of them.
The material of this heating plate can be selected from group that tantalum aluminium compound, hafnium boride, platinum, golden chromium compound and polysilicon form one of them.
A kind of low voltage and low power thermal diaphragm type microfluid drive, this drive unit includes:
One fluidic structures has a fluid passage and is connected in a first fluid opening and one second fluid openings at these two ends, fluid passage, and fluid is filled in the middle of this fluid passage and via this first fluid opening and the turnover of this second fluid openings; And
Three thermal diaphragm type actuators, this thermal diaphragm type actuator is provided with a heating plate by an elastic film formed one airtight liquid chamber bottom and is formed, this airtight liquid chamber is to be isolated from this fluid passage and to be filled with a low-boiling point liquid by this elastic film, this heating plate is to produce bubble this elastic film to be produced compressing and the action of loosening in order to heat this low-boiling point liquid, make the volumetric expansion of this airtight liquid chamber and shrink to drive the fluid in this fluid passage, this elastic film of this each thermal diaphragm type actuator is to form jack-up according to fluid-operated demand, smooth and recessed state.
This fluidic structures is formed by the thick film photoresistance.
The material of this elastic film can be selected from group that silicon rubber, dimethyl silicone polymer and poly-terephthaldehyde's alkene formed one of them.
The material of this heating plate can be selected from group that tantalum aluminium compound, hafnium boride, platinum, golden chromium compound and polysilicon form one of them.
By the simple design of this kind, the present invention simply method drives the central fluid of base material, that is, by the mode that elastic film is exerted pressure.When bubble produced, the fluid in the middle of the cavity body structure promptly was under pressure, and propelling fluid flows.When bubble collapse, promptly the elastic recovery owing to film itself refluxes.
Wherein, the structure of this thermal diaphragm type microfluid drive can be made of the thick film photoresistance, and with elastic film as interlayer, in order to form the function of the crooked deformation of similar diaphragm at fluidic structures.In addition, fluidic structures can be provided with a plurality of thermal diaphragm type actuators in the side under the single fluid passage, and makes thermal diaphragm type actuator produce the driving direction of bubble with the control fluid in regular turn.Bubble generates about about ten volts of required voltages, and therefore heating plate institute wasted work rate, helps chip and integrate, and have the driving frequency scope to reach the advantage that the wide range of traffic scope is controlled greatly also below 10 milliwatts.The liquid chamber structure that the present invention also can utilize thick film light group processing procedure to make fluidic structures and thermal diaphragm type actuator compared to general Micropump processing procedure, can effectively reduce Production Time and increase yield.
The invention has the advantages that: low voltage and low power thermal diaphragm type microfluid drive provided by the invention, can effectively control fluid flow direction.Simultaneously, the manner of execution that utilizes thermal to promote elastic film can reduce the voltage dissipation power, also has speed microcontroller combined control stream body is driven to be integrated into the advantage of portability system.
Below, in conjunction with specific embodiments and accompanying drawing the present invention is described in further detail.
Description of drawings
Fig. 1 and Fig. 2 are the operation chart of first embodiment of the invention;
Fig. 3 is the synoptic diagram of second embodiment of the invention;
Fig. 4 and Fig. 5 are the operation chart of second embodiment of the invention.
Embodiment
Please refer to Fig. 1 and Fig. 2, be the operation chart of first embodiment of the invention, its fluidic structures 110 comprises allows fluid passage 111 that fluid passes through and the fluid inlet and outlet 112 that the fluid turnover is provided; Be provided with thermal diaphragm type actuator in abutting connection with its fluid passage 111, by the bottom of an airtight liquid chamber 120 heating plate 121 be set and formed, the top of its airtight liquid chamber 120 is the elastic film 122 that is separated out the fluid passage.Make heating plate 121 provide enough energy to make liquid in the liquid chamber 120 reach a specified temp by electrode 124 again and produce bubble 123, simultaneously, as shown in Figure 1, promotion elastic film 122 expands liquid chamber 120 because bubble 123 rises, and the volume of fluid passage 111 then compresses extrapolates liquid; And, as shown in Figure 2, liquid chamber 120 compressions after bubble collapse, the volume of fluid passage 111 then expands liquid is sucked; The pressure direction of elastic film 122 changes the turnover of may command fluid.
Wherein, elastic film can use silicon rubber (silicone rubber), dimethyl silicone polymer (Polydimethyl siloxane, PDMS) or poly-terephthaldehyde's alkene elastic materials such as (Parylene).The heating plate part can be selected tantalum aluminium compound (TaAl), hafnium boride (HfB2), platinum (Pt), golden chromium compound (AuCr) and polysilicon (polysilicon).Simultaneously, the liquid in the liquid chamber must be selected low-boiling point liquid.
Fluidic structures also can be provided with a plurality of thermal diaphragm type actuators below the single fluid passage, and makes thermal diaphragm type actuator produce the driving direction of bubble with the control fluid in regular turn.Please refer to Fig. 3, it is the synoptic diagram of second embodiment of the invention, be in fluidic structures 210, to comprise the fluid passage 211 that allows fluid pass through, provide first of fluid turnover to import and export 212 and second and import and export 213, and be provided with into the first thermal diaphragm type actuator of row in regular turn, the second thermal diaphragm type actuator and the 3rd thermal diaphragm type actuator are controlled the turnover of fluid, utilize electrode 224 each heating plate 221 of control, 231,241 to provide energy to make each liquid chamber 220,230, liquid in 240 reaches a specified temp and produces bubble promotion elastic film 222,232,242; Its fluid drives state please refer to Fig. 4 and Fig. 5, it is the operation chart of second embodiment of the invention, and at first, the state of fluid motion as shown in Figure 4, make the elastic film 222 of the first thermal diaphragm type actuator recessed, fluid is imported and exported 212 by first and is entered the fluid passage; And elastic film 232 jack-up of the second thermal diaphragm type actuator, the function of generation non-return valve; Simultaneously, the elastic film 242 of the 3rd thermal diaphragm type actuator is jack-up also, makes fluid import and export 213 by second and leaves the fluid passage; Then, as shown in Figure 5, make elastic film 222 jack-up of the first thermal diaphragm type actuator, and the elastic film 232 of the second thermal diaphragm type actuator recovers smooth or recessed, make fluid flow to elastic film 242 tops of the 3rd thermal diaphragm type actuator, can control the amount that fluid passes through by the degree of adjusting each elastic film jack-up; 242 of the elastic films of the 3rd thermal diaphragm type actuator are recessed to hold fluid, make the first thermal diaphragm type actuator, the second thermal diaphragm type actuator and the 3rd thermal diaphragm type actuator return to as shown in Figure 4 action situation again, can make fluid import and export 213 by second smoothly and flow out.So, promptly circulate into the thermal diaphragm type microfluid drive of similar pumping function.And Fig. 4 and Fig. 5 make the flowing mode reverse operating, can carry out the fluid motion of other direction.
Though preferred embodiment of the present invention discloses as above; but it is not in order to limit the present invention; any personnel that are familiar with correlation technique; without departing from the spirit and scope of the present invention; certainly carry out suitable change and retouching, therefore scope of patent protection of the present invention should be as the criterion with the determined scope of claim.
Claims (8)
1, a kind of low voltage and low power thermal diaphragm type microfluid drive is characterized in that this drive unit includes:
One fluidic structures has a fluid passage and is connected in a fluid opening of this fluid passage, and fluid is filled in the middle of this fluid passage and via this fluid openings turnover; And
More than one thermal diaphragm type actuator, this thermal diaphragm type actuator is provided with a heating plate by an elastic film formed one airtight liquid chamber bottom and is formed, this airtight liquid chamber is to be isolated from this fluid passage and to be filled with a low-boiling point liquid by this elastic film, this heating plate is to produce bubble this elastic film to be produced compressing and the action of loosening in order to heat this low-boiling point liquid, makes the volumetric expansion of this airtight liquid chamber and shrinks to drive the fluid in this fluid passage.
2, low voltage and low power thermal diaphragm type microfluid drive as claimed in claim 1 is characterized in that this fluidic structures is formed by the thick film photoresistance.
3, low voltage and low power thermal diaphragm type microfluid drive as claimed in claim 1, the material that it is characterized in that this elastic film be selected from group that silicon rubber, dimethyl silicone polymer and poly-terephthaldehyde's alkene formed one of them.
4, low voltage and low power thermal diaphragm type microfluid drive as claimed in claim 1, the material that it is characterized in that this heating plate be selected from group that tantalum aluminium compound, hafnium boride, platinum, golden chromium compound and polysilicon form one of them.
5, a kind of low voltage and low power thermal diaphragm type microfluid drive is characterized in that this drive unit includes:
One fluidic structures has a fluid passage and is connected in a first fluid opening and one second fluid openings at these two ends, fluid passage, and fluid is filled in the middle of this fluid passage and via this first fluid opening and the turnover of this second fluid openings; And
Three thermal diaphragm type actuators, this thermal diaphragm type actuator is provided with a heating plate by an elastic film formed one airtight liquid chamber bottom and is formed, this airtight liquid chamber is to be isolated from this fluid passage and to be filled with a low-boiling point liquid by this elastic film, this heating plate is to produce bubble this elastic film to be produced compressing and the action of loosening in order to heat this low-boiling point liquid, make the volumetric expansion of this airtight liquid chamber and shrink to drive the fluid in this fluid passage, this elastic film of this each thermal diaphragm type actuator is to form jack-up according to fluid-operated demand, smooth and recessed state.
6, low voltage and low power thermal diaphragm type microfluid drive as claimed in claim 5 is characterized in that this fluidic structures is formed by the thick film photoresistance.
7, low voltage and low power thermal diaphragm type microfluid drive as claimed in claim 5, the material that it is characterized in that this elastic film be selected from group that silicon rubber, dimethyl silicone polymer and poly-terephthaldehyde's alkene formed one of them.
8, low voltage and low power thermal diaphragm type microfluid drive as claimed in claim 5, the material that it is characterized in that this heating plate be selected from group that tantalum aluminium compound, hafnium boride, platinum, golden chromium compound and polysilicon form one of them.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03103124 CN1261767C (en) | 2003-01-30 | 2003-01-30 | Low voltage and low power thermal bubble film type microfluid driving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03103124 CN1261767C (en) | 2003-01-30 | 2003-01-30 | Low voltage and low power thermal bubble film type microfluid driving device |
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| Publication Number | Publication Date |
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| CN1521500A true CN1521500A (en) | 2004-08-18 |
| CN1261767C CN1261767C (en) | 2006-06-28 |
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| CN 03103124 Expired - Fee Related CN1261767C (en) | 2003-01-30 | 2003-01-30 | Low voltage and low power thermal bubble film type microfluid driving device |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102006936A (en) * | 2007-11-22 | 2011-04-06 | 皇家飞利浦电子股份有限公司 | Valve for a microfluidic system |
| CN101583797B (en) * | 2006-10-26 | 2013-02-13 | 赛尔诺瓦有限公司 | Wax micro actuator |
| CN103016287A (en) * | 2012-12-31 | 2013-04-03 | 北京工业大学 | Induction heating phase-change type micro jet driver |
| CN103140721A (en) * | 2010-06-15 | 2013-06-05 | 翱泰温控器(深圳)有限公司 | Thick film heaters |
| CN104321652A (en) * | 2012-02-09 | 2015-01-28 | 加利福尼亚大学董事会 | High-speed on demand droplet generation and single cell encapsulation driven by induced cavitation |
| CN105835032A (en) * | 2016-03-18 | 2016-08-10 | 浙江大学滨海产业技术研究院 | Driving device used for microrobot in liquid |
| US10071359B2 (en) | 2013-03-15 | 2018-09-11 | The Regents Of The University Of California | High-speed on demand microfluidic droplet generation and manipulation |
| CN109070075A (en) * | 2016-04-14 | 2018-12-21 | 惠普发展公司，有限责任合伙企业 | Microfluidic device with capillary chamber |
| US10226768B2 (en) | 2009-08-08 | 2019-03-12 | The Regents Of The University Of California | Pulsed laser triggered high speed microfluidic switch and applications in fluorescent activated cell sorting |
| CN110023753A (en) * | 2016-11-24 | 2019-07-16 | 牛津纳米孔技术公司 | For controlling the device and method in membrane channels insertion film |
| CN110240112A (en) * | 2018-03-09 | 2019-09-17 | 中国科学院苏州纳米技术与纳米仿生研究所 | Film driving structure, the manufacturing method of film driving structure and ink discharge device |
| CN111677655A (en) * | 2020-06-23 | 2020-09-18 | 东北电力大学 | One-way micro-flow pump adopting polyurethane material as power |
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2003
- 2003-01-30 CN CN 03103124 patent/CN1261767C/en not_active Expired - Fee Related
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101583797B (en) * | 2006-10-26 | 2013-02-13 | 赛尔诺瓦有限公司 | Wax micro actuator |
| CN102006936A (en) * | 2007-11-22 | 2011-04-06 | 皇家飞利浦电子股份有限公司 | Valve for a microfluidic system |
| US10226768B2 (en) | 2009-08-08 | 2019-03-12 | The Regents Of The University Of California | Pulsed laser triggered high speed microfluidic switch and applications in fluorescent activated cell sorting |
| CN103140721A (en) * | 2010-06-15 | 2013-06-05 | 翱泰温控器(深圳)有限公司 | Thick film heaters |
| US10232368B2 (en) | 2011-02-11 | 2019-03-19 | The Regents Of The University Of California | High-speed on demand droplet generation and single cell encapsulation driven by induced cavitation |
| CN106732223B (en) * | 2012-02-09 | 2019-09-24 | 加利福尼亚大学董事会 | The generation of high speed drop-on-demand and unicellular encapsulating driven by the cavitation induced |
| CN104321652A (en) * | 2012-02-09 | 2015-01-28 | 加利福尼亚大学董事会 | High-speed on demand droplet generation and single cell encapsulation driven by induced cavitation |
| CN104321652B (en) * | 2012-02-09 | 2017-03-15 | 加利福尼亚大学董事会 | The high speed drop-on-demand driven by the cavitation for inducing is generated and unicellular encapsulating |
| CN106732223A (en) * | 2012-02-09 | 2017-05-31 | 加利福尼亚大学董事会 | The generation of high speed drop-on-demand and unicellular encapsulating driven by the cavitation for inducing |
| CN103016287A (en) * | 2012-12-31 | 2013-04-03 | 北京工业大学 | Induction heating phase-change type micro jet driver |
| US10071359B2 (en) | 2013-03-15 | 2018-09-11 | The Regents Of The University Of California | High-speed on demand microfluidic droplet generation and manipulation |
| US10780413B2 (en) | 2013-03-15 | 2020-09-22 | The Regents Of The University Of California | High-speed on demand microfluidic droplet generation and manipulation |
| CN105835032A (en) * | 2016-03-18 | 2016-08-10 | 浙江大学滨海产业技术研究院 | Driving device used for microrobot in liquid |
| CN109070075A (en) * | 2016-04-14 | 2018-12-21 | 惠普发展公司，有限责任合伙企业 | Microfluidic device with capillary chamber |
| CN109070075B (en) * | 2016-04-14 | 2020-12-01 | 惠普发展公司，有限责任合伙企业 | Microfluidic device with capillary chamber |
| US11440008B2 (en) | 2016-04-14 | 2022-09-13 | Hewlett-Packard Development Company, L.P. | Microfluidic device with capillary chamber |
| CN110023753A (en) * | 2016-11-24 | 2019-07-16 | 牛津纳米孔技术公司 | For controlling the device and method in membrane channels insertion film |
| CN110023753B (en) * | 2016-11-24 | 2020-10-30 | 牛津纳米孔技术公司 | Apparatus and method for controlling insertion of membrane channels into membranes |
| CN110240112A (en) * | 2018-03-09 | 2019-09-17 | 中国科学院苏州纳米技术与纳米仿生研究所 | Film driving structure, the manufacturing method of film driving structure and ink discharge device |
| CN110240112B (en) * | 2018-03-09 | 2022-08-19 | 中国科学院苏州纳米技术与纳米仿生研究所 | Thin film driving structure, method for manufacturing thin film driving structure, and ink jet apparatus |
| CN111677655A (en) * | 2020-06-23 | 2020-09-18 | 东北电力大学 | One-way micro-flow pump adopting polyurethane material as power |
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| CN1261767C (en) | 2006-06-28 |
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