CN1519599A - Joint face adapting device and adapting method - Google Patents
Joint face adapting device and adapting method Download PDFInfo
- Publication number
- CN1519599A CN1519599A CNA2004100019146A CN200410001914A CN1519599A CN 1519599 A CN1519599 A CN 1519599A CN A2004100019146 A CNA2004100019146 A CN A2004100019146A CN 200410001914 A CN200410001914 A CN 200410001914A CN 1519599 A CN1519599 A CN 1519599A
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- composition surface
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Abstract
To enable anyone to carry out anglement simply, surely and with high precision without relying on a skilled worker's technique or an imaging device like a CCD camera, in angle adjustment is carry out by using a gonio-stage. In carry out angle adjustment of two optical components 2, 4 by using a gonio-stage 5 which holds one optical component 2 in a manner tiltable in two directions orthogonally crossing in Z direction and also using a Z stage 6 which relatively moves the other optical component 4 in Z direction; in a state where the optical components 2, 4 are abutted on each other in the joining face and pressurized, while the joining face of one optical component 2 is tilted in two directions by the gonio-stage 5, a load in Z direction actuating on the other optical component 4 is detected by a load detector 10, so that the gonio-stage 5 is tilted at the angle minimizing the detected load in each tilted direction.
Description
Invention field
The present invention relates to the composition surface of two optical elements is merged mutually the composition surface fitting method of composition surface adapting device that extends in parallel and this device of application.
Background technology
Use in the LASER Light Source in the optical communication that semiconductor laser is assembled in the bearing, when making optical module with sleeve in welding/fiber optic splicing is fixing, for the optical axis that makes both sides consistent on straight line obliquely mutually, dislocation-free etc. during with the welding after shortening the aligning time and making aligning/joints can adopt to make the be parallel to each other composition surface adapting device of extension of composition surface.
As the known employing of adapting device of this composition surface calm the anger swivel adapter head mechanism and angle measurement platform etc.
Employing calm the anger swivel adapter head mechanism joint composition surface adapting device 41 as shown in Figure 4, at the sphere platform 42 of fixing LASER Light Source (side optical element) 2 with support air supply between its concave spherical surface 43, make sphere platform 42 come-ups become free state, fixing the contacting with sleeve (the opposing party's optical element) 4 pressures of optical fiber is fixed on the LASER Light Source 2 of being fixed on this sphere platform 42, carry out the composition surface according to the direction inclination sphere platform 42 on the composition surface of this sleeve 4 and cooperate, can carry out the composition surface with about 0.05 ° high precision and cooperate (referring to patent documentation 1).
The composition surface adapting device that adopts the angle measurement platform is arranged in addition, it shown among Fig. 5 51, with LASER Light Source 2 be fixed in have at least can towards with Z to the θ x direction of the X-axis rotation of quadrature and with Z on the angle measurement platform 52 of X tilting table 52X that the θ y direction of the Y-axis rotation of quadrature tilts and Y tilting table 52 (referring to Patent Document 2).
With LASER Light Source 2 both composition surfaces are in contact with one another to decline along Z in sleeve 4 then, adjust the angle of angle measurement platform 52 by ccd video camera (not shown) shooting.
Patent documentation 1: the spy opens flat 8-281464 communique
Patent documentation 2: the spy opens the 2001-108863 communique
But when the composition surface adapting device 41 of swivel adapter head mechanism is calmed the anger in employing, before carrying out the composition surface coordinating operation, be necessary to make sphere platform 42 to keep balances.In other words, rotation center normally is positioned at the central authorities of bonding station, but destroys when balance, and this rotation center just misplaces and can not successfully carry out the composition surface cooperation.
Particularly,, must remake balance owing to need the fixedly anchor clamps of usefulness of replacing LASER Light Source shape and the different LASER Light Source of size being carried out the composition surface when cooperating with sleeve at every turn.
On the other hand, in the composition surface adapting device 51 of using angle measurement platform 52, in the gap of breaking forth with ccd video camera between two elements by the visual composition surface of carrying out when cooperating, need masterful technique, the skill level that depends on this technology, precision, time, reproducibility aspect that the composition surface cooperates have very big difference.
In addition, when the inclined degree that is detected optical element by ccd video camera carries out the composition surface cooperation by Flame Image Process, just need use powerful lens if carry out the cooperation of high-precision composition surface, thereby need the illumination of high brightness, have again, when differentiating the inclination of LASER Light Source 2 and sleeve 4 automatically by Flame Image Process, then have the problem that erroneous judgement dust and shade etc. make the reliability shortcoming.
Summary of the invention
For this reason, the present invention is carrying out the composition surface with the angle measurement platform when cooperating, and can not rely on imaging apparatuss such as practician's skill and ccd video camera, and allow anyone can both be accurately with carry out the composition surface simple and reliablely and cooperate as technical task.Its objective is the composition surface apparatus and method that provide such.
In order to solve above-mentioned problem, the present invention by the optical element that makes a side be supported to can be along the angle measurement platform that tilts to the both direction of quadrature with Z and the optical element that makes the opposing party with respect to an above-mentioned side's optical element along Z to the Z platform that relatively moves, be characterised in that and allow the composition surface of these two optical elements be in contact with one another the composition surface adapting device of doing to extend in parallel, it is had: above-mentioned Z platform is moved, the opposing party's optical element pressed on the optical element that contacts a side and under the state that pressurizes, when by the angle measurement platform composition surface of one side's optical element being tilted towards both direction, detection effect is in the Z of the opposing party's the optical element detecting device to load; And, make this angle measurement platform become the control device that angle with smallest tilts with test load according to the detection signal of above-mentioned detectors of load with respect to each vergence direction.
According to the present invention, contact under the state that a side optical element pressurizes at the optical element that makes the opposing party, when the optical element that makes a side by the angle measurement platform towards with Z when two directions of quadrature tilt, detect load with respect to each vergence direction corresponding to the inclination angle.
At this, when the composition surface of a side optical element tilts with respect to the composition surface of the opposing party's optical element, because the big more then the opposing party's in this inclination angle optical element is pressed on beneficial more on this composition surface, the load that Z makes progress also increases, on the contrary, closer to each other when parallel when mutual composition surface, the power that then pushes the opposing party's optical element diminishes, and when these two composition surfaces are parallel the load minimum.
So when monitoring Z makes progress load, the angle measurement platform is fixed to when making this load become minimum inclination angle, just can makes the composition surface of each optical element do the composition surface cooperation with respect to vergence direction respectively.
As mentioned above, owing to can carry out the composition surface cooperation by detecting minimum load according to the present invention, so can not rely on imaging apparatuss such as skill level and ccd video camera, and can by anyone simply with carry out having compared more high-precision composition surface with the swivel adapter head of calming the anger in short time and cooperate, so the dislocation can shorten the aligning time of back operation significantly effectively significantly and can suppress the YAG welding time.
Description of drawings
Fig. 1 generally shows composition surface of the present invention adapting device.
Fig. 2 is the process flow diagram that shows bright control device treatment step.
Fig. 3 is the curve map that shows bright angle and load relation.
Fig. 4 is the key diagram that shows bright existing device.
Fig. 5 is the key diagram that shows bright existing device.
The meaning of name title is as follows among the figure:
1, the composition surface adapting device; 2, LASER Light Source (side optical element); 4, sleeve (the opposing party's optical element); 5, the angle measurement platform; 5x, the X sloping platform; 5y, the Y tilting table; 6, the Z platform; 10, detectors of load; 11, control device.
Embodiment
Specify form of implementation of the present invention according to accompanying drawing below.
Fig. 1 generally shows composition surface of the present invention adapting device, and Fig. 2 is the process flow diagram that shows the treatment step of bright control device, and Fig. 3 is the curve map that shows bright angle and load relation.
Composition surface adapting device 1 shown in Figure 1 will be equipped with semiconductor laser in bearing optical communication is with LASER Light Source (side optical element) 2 and the sleeve (the opposing party's optical element) 4 that is used for fixing the optical fiber of guiding this laser, with weldings such as YAG laser instruments, be installed to the assembling light source with in the assembling device of optical assembly, be used to make LASER Light Source 2 to cooperate as the composition surface in parallel to each other with the composition surface of sleeve 4.
This composition surface adapting device 1 have the LASER Light Source of making be supported to can towards with the θ of Z to the X of quadrature, Y-axis rotation
XDirection and θ
YThe angle measurement platform 5 that direction tilts, and make sleeve 4 with respect to LASER Light Source 2 along Z to the Z platform 6 that relatively moves.
Angle measurement platform 5 has the LASER Light Source of making 2 towards θ
XThe X tilting table 5x that direction tilts and towards θ
YThe Y tilting table 5y that direction tilts is done to tilt to rotate with 0.001 ° precision by step motor 7x, 7y respectively for making it, attaches it on the XY platform 8 that moves along the XY direction.
Z platform 6 is driven by drive unit 9 liftings, be provided with simultaneously and detect Z to detectors of load (sensor) 10, under the state that Z platform 6 is moved allow sleeve 4 contact LASER Light Source 2 be pressurizeed, make LASER Light Source 2 when both direction tilts by angle measurement platform 5, but detection effect is in the load of sleeve 4.
Detectors of load 10 is connecting the control device 11 at the inclination angle of controlling each tilting table 5x, 5y, on this control device 11, connecting motor 7x, 7y and drive unit 9, can allow each tilting table 5x, 5y so that the load that detects becomes angle with smallest with respect to each vergence direction according to detectors of load 10 detection signals.
Fig. 2 is the process flow diagram that shows the treatment step of bright control device 11.
LASER Light Source 2 and sleeve 4 are individually fixed on angle measurement platform 5 and the Z platform 6, connect switch (not shown), the processing of beginning Fig. 2, in step STP1 Z platform 6 is descended, when reaching the contact load (for example 2000mg) that presets, detectors of load 10 detected load then transfer to step STP3 in step STP2 if judgement sleeve 4 contacts with LASER Light Source 2, in step STP3 Z platform 6 being descended pressurizes, when the test load of detectors of load 10 reaches predetermined when adding compressive load (for example 200g), transfer to step STP4.
In step STP4, at first make Y tilting table 5y keep intact, allow tilting table 5x tilt, simultaneously according to the detection signal stored angles-load data of detectors of load 10 by predetermined angular range (for example ± 1～± 10 ℃).
Fig. 3 (a) is the curve map that shows the angle-load data of trying to achieve, and reads inclination angle [theta] xmin in step STP5 according to the minimal point Pxmin of this curve, in step STP6 X tilting table 5x is tilted by inclination angle [theta] ximn, ends the motion of θ x direction.
Equally, in step STP7,5x is fixed in inclination angle [theta] ymin with the X tilting table, makes Y tilting table 5y scope (for example ± 1～± 10 °) at a predetermined angle, simultaneously according to the detection signal of detectors of load 10, and the stored angles load data.
In step STP8, Pymin reads inclination angle [theta] ymin based on this minimal point then, in step STP9 Y tilting table 5y is tilted by inclination angle [theta] ymin, ends the motion of Y direction.
In step STP10, the processing of repeating step STP4～9 in order to improve precision is transferred to step STP11 in the moment of having carried out twice then.
Step STP11～14th is used for obtaining more accurately the inclination angle [theta] xmin corresponding to minimal point Pxmin, Pymin, the treatment for correcting of θ ymin.
Specifically, detected angle-load data in step STP4 and step STP7, shown in Fig. 3 (b), when becoming in predetermined angular range with respect to a detected minimum load of vergence direction when constant, then the inclination angle [theta] xmin that reads corresponding to minimal point Pxmin, Pymin, θ ymin can be set in arbitrarily angled in this angular range.
For this reason, in step STP11, read test load with respect to directions X and equal the benchmark load bigger (for example inclination angle [theta] xa, the θ xb of Pxa, the Pxb during minimum load+150g) at 2 than minimum load, calculate its central angle θ xc, get inclination angle [theta] xmin=θ xc, transfer to step STP12, allow X tilting table 5x tilt, carry out the centering of directions X by inclination angle [theta] xmin.
Then in step STP13, similarly read test load and equal the benchmark load bigger (for example inclination angle [theta] ya, the θ yb of Pya, the Pyb during minimum load+150g) at 2 than minimum load with respect to the Y direction, calculate its central angle θ yc, get inclination angle [theta] ymin=θ yc, transfer to step STP14, allow Y tilting table 5y tilt, carry out the centering of θ y direction and finish the composition surface and cooperate and handle by inclination angle [theta] ym.
By above processing, no matter the composition surface of LASER Light Source 2 is to become on the direction of θ x or θ y abreast that the composition surface cooperates with respect to the composition surface of sleeve 4.
After the composition surface cooperates processing to finish, Z platform 6 is risen, between LASER Light Source 2 and sleeve 4, move XY platform 8 with the position of load-independent, make the optical axis that inserts sleeve 4 interior optical fiber (not shown) lifting/revolutions carrying out LASER Light Source 2 and optical fiber in advance involutory simultaneously, after being folded from the direction of periphery 3 with the YAG laser illumination, if the sleeve 4 and the aglet (not shown) of inserting optical fiber front end wherein each other, LASER Light Source 2 and sleeve 4 each other welding good after, just finished optical module.
Be that the situation that just detectors of load 10 is arranged on the Z platform 6 is described in the above description, even but be to be installed on the angle measurement platform 5, for the Z that acts on sleeve 4 to load also can detect by its reacting force, and the two is of equal value technically.
In addition, be just to describe by the situation that motor 7x, 7y drive each tilting table 5x, 5y of angle measurement platform 5 when cooperating carrying out the composition surface above, but when implementing composition surface of the present invention fitting method, be not limited to the above, also can be by manually regulating the inclination angle in the test load of monitoring detectors of load 10.
Have again, can also be not limited to LASER Light Source 2 but can be used for carrying out any optical element such as light emitting diode, avalanche photodide cooperate with the composition surface of sleeve 4, or carrying out LASER Light Source 2 cooperates with the composition surface of lens mount, and makes this lens mount and sleeve 4 carry out situation that the composition surface cooperates etc. to make any optical element carry out the composition surface each other to cooperate.
Claims (4)
1. composition surface adapting device, it be by the optical element that makes a side be supported to can be along the angle measurement platform that tilts to the both direction of quadrature with Z and the optical element that makes the opposing party with respect to an above-mentioned side's optical element along Z to the Z platform that relatively moves, extend in parallel and allow the composition surface of these two optical elements be in contact with one another, this composition surface adapting device is characterized in that comprising: detecting device, above-mentioned Z platform is moved, the opposing party's optical element pressed on the optical element that contacts a side be under the state of pressurization, when the composition surface of the optical element that makes a side by the angle measurement platform when both direction tilts, detection effect in the Z of the opposing party's optical element to load; And control device, with respect to each vergence direction, make this angle measurement platform become angle with smallest with test load according to the detection signal of above-mentioned detectors of load.
2. composition surface according to claim 1 adapting device, it is characterized in that above-mentioned control device comprises:, make the angle measurement platform make the means for correcting of inclination by the central angle at 2 equal and bigger inclination angles of test load than minimum load when being a timing in predetermined angular range with respect to a detected minimum load of vergence direction.
3. composition surface fitting method, it is the composition surface of two optical elements to be in contact with one another extend in parallel, it is characterized in that, place the following time of state of contact pressurization at optical element with two sides, the optical element that makes a side towards and Z tilt to the both direction of quadrature, the load that makes progress by the Z that acts on the opposing party's optical element for each vergence direction becomes the tilt composition surface of above-mentioned side's optical element of angle with smallest simultaneously.
4. composition surface according to claim 3 fitting method, wherein when in predetermined angular range, becoming one regularly, the composition surface of an above-mentioned side's optical element is equated and the central angle at two the inclination angle bigger than minimum load tilts by test load with respect to a detected minimum load of vergence direction.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20239/2003 | 2003-01-29 | ||
| JP2003020239A JP4053898B2 (en) | 2003-01-29 | 2003-01-29 | Surface matching apparatus and surface matching method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1519599A true CN1519599A (en) | 2004-08-11 |
Family
ID=32949921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2004100019146A Pending CN1519599A (en) | 2003-01-29 | 2004-01-15 | Joint face adapting device and adapting method |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4053898B2 (en) |
| CN (1) | CN1519599A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104246906A (en) * | 2013-04-17 | 2014-12-24 | 株式会社理学 | X-ray optical component device and x-ray analysis apparatus |
| CN106461894A (en) * | 2015-03-24 | 2017-02-22 | 住友电工光电子器件创新株式会社 | Method for assembling optical module |
| CN106501961A (en) * | 2016-11-23 | 2017-03-15 | 深圳市恒宝通光电子股份有限公司 | A kind of center calibrating installation and laser instrument coupling table apparatus |
| CN106575627A (en) * | 2014-06-10 | 2017-04-19 | 株式会社新川 | Bonding device and method for estimating landing point position of bonding tool |
| CN106797712A (en) * | 2014-08-11 | 2017-05-31 | 株式会社新川 | The erecting device of electronic component |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4713346B2 (en) * | 2005-04-19 | 2011-06-29 | 株式会社フジクラ | Optical component aligning device and optical component manufacturing method |
| WO2023038019A1 (en) * | 2021-09-08 | 2023-03-16 | 古河電気工業株式会社 | Fusion splicer and method for connecting optical fibers |
-
2003
- 2003-01-29 JP JP2003020239A patent/JP4053898B2/en not_active Expired - Fee Related
-
2004
- 2004-01-15 CN CNA2004100019146A patent/CN1519599A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104246906A (en) * | 2013-04-17 | 2014-12-24 | 株式会社理学 | X-ray optical component device and x-ray analysis apparatus |
| CN104246906B (en) * | 2013-04-17 | 2016-08-24 | 株式会社理学 | X-ray optics arrangement and x-ray analysis equipment |
| CN106575627A (en) * | 2014-06-10 | 2017-04-19 | 株式会社新川 | Bonding device and method for estimating landing point position of bonding tool |
| CN106575627B (en) * | 2014-06-10 | 2019-01-22 | 株式会社新川 | Engagement device and estimate bonding tool drop point site method |
| CN106797712A (en) * | 2014-08-11 | 2017-05-31 | 株式会社新川 | The erecting device of electronic component |
| CN106461894A (en) * | 2015-03-24 | 2017-02-22 | 住友电工光电子器件创新株式会社 | Method for assembling optical module |
| CN106461894B (en) * | 2015-03-24 | 2018-08-17 | 住友电工光电子器件创新株式会社 | The method for assembling optical module |
| CN106501961A (en) * | 2016-11-23 | 2017-03-15 | 深圳市恒宝通光电子股份有限公司 | A kind of center calibrating installation and laser instrument coupling table apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004233505A (en) | 2004-08-19 |
| JP4053898B2 (en) | 2008-02-27 |
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