CN1514219A - 固态压阻式耐高温压力传感器及其制备方法 - Google Patents
固态压阻式耐高温压力传感器及其制备方法 Download PDFInfo
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- CN1514219A CN1514219A CNA03134447XA CN03134447A CN1514219A CN 1514219 A CN1514219 A CN 1514219A CN A03134447X A CNA03134447X A CN A03134447XA CN 03134447 A CN03134447 A CN 03134447A CN 1514219 A CN1514219 A CN 1514219A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 34
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 34
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 9
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- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 6
- 239000013078 crystal Substances 0.000 abstract description 3
- 239000000377 silicon dioxide Substances 0.000 abstract description 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 2
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- 238000005516 engineering process Methods 0.000 description 16
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- 230000035882 stress Effects 0.000 description 4
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- 239000000463 material Substances 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229920002545 silicone oil Polymers 0.000 description 3
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- 239000012530 fluid Substances 0.000 description 2
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
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Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100335879C (zh) * | 2005-03-11 | 2007-09-05 | 江苏大学 | 一种改良耐高温微型低成本压力传感器的方法 |
CN100394154C (zh) * | 2005-03-14 | 2008-06-11 | 昆山双桥传感器测控技术有限公司 | 压阻式高频动态低压传感器 |
CN100465599C (zh) * | 2005-12-23 | 2009-03-04 | 昆山双桥传感器测控技术有限公司 | 压阻式土应力传感器 |
CN100561156C (zh) * | 2008-01-16 | 2009-11-18 | 西安维纳信息测控有限公司 | Soi全硅结构充硅油耐高温压力传感器 |
US7992445B2 (en) | 2006-10-02 | 2011-08-09 | Panasonic Electric Works Co., Ltd. | Pressure sensor |
CN102435380A (zh) * | 2011-10-28 | 2012-05-02 | 芜湖通和汽车管路***有限公司 | 一种高量程液压传感器及其制造方法 |
CN102539063A (zh) * | 2011-12-16 | 2012-07-04 | 西安交通大学 | 一种soi矩形膜结构高压传感器芯片 |
CN102980692A (zh) * | 2012-11-19 | 2013-03-20 | 西安微纳传感器研究所有限公司 | 一种高温耐冲击压力传感器及其制备方法 |
CN104535253A (zh) * | 2015-01-19 | 2015-04-22 | 北京大学 | 一种高温压力传感器及其加工方法 |
CN104697699A (zh) * | 2013-12-06 | 2015-06-10 | 长野计器株式会社 | 物理量测定传感器以及传感器模块 |
CN104748905A (zh) * | 2015-03-27 | 2015-07-01 | 武汉飞恩微电子有限公司 | 同时检测空调制冷剂温度和压力的传感器装置 |
CN107941384A (zh) * | 2017-12-26 | 2018-04-20 | 苏州康姆普机械有限公司 | 一种电子式压力传感器 |
CN109764998A (zh) * | 2018-12-27 | 2019-05-17 | 西安交通大学 | 一种膜片式石墨烯mems微压传感器芯片及其制备方法 |
CN110375784A (zh) * | 2019-07-19 | 2019-10-25 | 中国科学院西安光学精密机械研究所 | 一种长波红外多普勒差分干涉仪***支撑结构 |
CN110926691A (zh) * | 2014-09-30 | 2020-03-27 | 长野计器株式会社 | 物理量测量装置 |
CN111076856A (zh) * | 2011-11-23 | 2020-04-28 | 无锡芯感智半导体有限公司 | 漂自补偿soi压力传感器 |
CN111566486A (zh) * | 2018-01-12 | 2020-08-21 | 克诺尔商用车制动***有限公司 | 具有绝缘的内凹槽和外凹槽的速度传感器 |
CN113483941A (zh) * | 2021-06-29 | 2021-10-08 | 苏州源森特科技有限公司 | 一种集成asic芯片的无引线封装动态压力传感器 |
CN115342954A (zh) * | 2022-08-23 | 2022-11-15 | 西安交通大学 | 基于光-机-电-热多物理场耦合的mems耐高温压力传感器 |
-
2003
- 2003-07-31 CN CN03134447.XA patent/CN1209609C/zh not_active Expired - Fee Related
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100335879C (zh) * | 2005-03-11 | 2007-09-05 | 江苏大学 | 一种改良耐高温微型低成本压力传感器的方法 |
CN100394154C (zh) * | 2005-03-14 | 2008-06-11 | 昆山双桥传感器测控技术有限公司 | 压阻式高频动态低压传感器 |
CN100465599C (zh) * | 2005-12-23 | 2009-03-04 | 昆山双桥传感器测控技术有限公司 | 压阻式土应力传感器 |
US7992445B2 (en) | 2006-10-02 | 2011-08-09 | Panasonic Electric Works Co., Ltd. | Pressure sensor |
CN100561156C (zh) * | 2008-01-16 | 2009-11-18 | 西安维纳信息测控有限公司 | Soi全硅结构充硅油耐高温压力传感器 |
CN102435380A (zh) * | 2011-10-28 | 2012-05-02 | 芜湖通和汽车管路***有限公司 | 一种高量程液压传感器及其制造方法 |
CN111076856A (zh) * | 2011-11-23 | 2020-04-28 | 无锡芯感智半导体有限公司 | 漂自补偿soi压力传感器 |
CN111076856B (zh) * | 2011-11-23 | 2021-09-21 | 无锡芯感智半导体有限公司 | 温漂自补偿soi压力传感器 |
CN102539063A (zh) * | 2011-12-16 | 2012-07-04 | 西安交通大学 | 一种soi矩形膜结构高压传感器芯片 |
CN102539063B (zh) * | 2011-12-16 | 2013-10-16 | 西安交通大学 | 一种soi矩形膜结构高压传感器芯片 |
CN102980692B (zh) * | 2012-11-19 | 2015-08-19 | 西安微纳传感器研究所有限公司 | 一种高温耐冲击压力传感器及其制备方法 |
CN102980692A (zh) * | 2012-11-19 | 2013-03-20 | 西安微纳传感器研究所有限公司 | 一种高温耐冲击压力传感器及其制备方法 |
US10113926B2 (en) | 2013-12-06 | 2018-10-30 | Nagano Keiki Co., Ltd. | Ceramic sensor module including diaphragm and cylindrical portion integrated with the diaphragm |
CN104697699A (zh) * | 2013-12-06 | 2015-06-10 | 长野计器株式会社 | 物理量测定传感器以及传感器模块 |
CN110926691A (zh) * | 2014-09-30 | 2020-03-27 | 长野计器株式会社 | 物理量测量装置 |
CN110926691B (zh) * | 2014-09-30 | 2021-12-31 | 长野计器株式会社 | 物理量测量装置 |
CN104535253A (zh) * | 2015-01-19 | 2015-04-22 | 北京大学 | 一种高温压力传感器及其加工方法 |
CN104748905A (zh) * | 2015-03-27 | 2015-07-01 | 武汉飞恩微电子有限公司 | 同时检测空调制冷剂温度和压力的传感器装置 |
CN107941384A (zh) * | 2017-12-26 | 2018-04-20 | 苏州康姆普机械有限公司 | 一种电子式压力传感器 |
CN111566486A (zh) * | 2018-01-12 | 2020-08-21 | 克诺尔商用车制动***有限公司 | 具有绝缘的内凹槽和外凹槽的速度传感器 |
CN109764998A (zh) * | 2018-12-27 | 2019-05-17 | 西安交通大学 | 一种膜片式石墨烯mems微压传感器芯片及其制备方法 |
CN110375784A (zh) * | 2019-07-19 | 2019-10-25 | 中国科学院西安光学精密机械研究所 | 一种长波红外多普勒差分干涉仪***支撑结构 |
CN113483941A (zh) * | 2021-06-29 | 2021-10-08 | 苏州源森特科技有限公司 | 一种集成asic芯片的无引线封装动态压力传感器 |
CN115342954A (zh) * | 2022-08-23 | 2022-11-15 | 西安交通大学 | 基于光-机-电-热多物理场耦合的mems耐高温压力传感器 |
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