CN1490585A - Continuous heating treating furnaces - Google Patents

Continuous heating treating furnaces Download PDF

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Publication number
CN1490585A
CN1490585A CNA021314837A CN02131483A CN1490585A CN 1490585 A CN1490585 A CN 1490585A CN A021314837 A CNA021314837 A CN A021314837A CN 02131483 A CN02131483 A CN 02131483A CN 1490585 A CN1490585 A CN 1490585A
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CN
China
Prior art keywords
cooling
furnace body
continuous heating
air
treating furnaces
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Pending
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CNA021314837A
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Chinese (zh)
Inventor
山本章仁
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JTEKT Thermo Systems Corp
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Koyo Thermo Systems Co Ltd
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Publication date
Application filed by Koyo Thermo Systems Co Ltd filed Critical Koyo Thermo Systems Co Ltd
Priority to CNA021314837A priority Critical patent/CN1490585A/en
Publication of CN1490585A publication Critical patent/CN1490585A/en
Pending legal-status Critical Current

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Abstract

A continuous heat treating furnace for heat treating and slow cooling can adapt different temp curves and use ordinary air for lower cost. In its slow cooling region, two indirect air cooling mechanisms are parallelly arranged, which has a central transverse cooling tube array. The heater is arranged on bottom of furnace body.

Description

Continuous heating treating furnaces
Technical field
The present invention relates to a kind of glass substrate that comprises at the heat treated of interior flat work (for example plasma panel) and the continuous heating treating furnaces (being also referred to as slow cool furnace sometimes) of ensuing slow cooling, especially, the slow cooling zone that relates to this continuous heating treating furnaces.
Background technology
The workpiece that contains glass substrate for plasma panel etc., if produce distortion in the heat treatment, can cause representing the distortion of device, so, under the fixed temperature conditions after the heating, special requirement according to fixed temperature curve with the even temperature slowly cooling workpiece that distributes.So the temperature curve fixed in order to obtain will cool off in slow cooling zone at the workpiece of heat treated district heating.Spy in patent opens in the 2001-147083 communique, discloses: for slow cooling, from the nozzle that is arranged on the blow-out nozzle on the ingress pipe that extends along the roof stove horizontal direction of furnace body and is arranged on sidewall but air of blast-cold in stove.
Summary of the invention
The spy of above-mentioned patent opens in the 2001-147083 communique, because from but air of the nozzle blast-cold that is arranged on the blow-out nozzle on the ingress pipe that extends along roof stove horizontal direction and is arranged on sidewall, so can not corresponding workpiece, the change of the combination of treatment conditions etc., the problem that exists the even temperature of the stove horizontal direction that is difficult to obtain workpiece to distribute.A problem in addition is; because in stove, import directly cooling air, so in order to prevent from that dust from sneaking in the stove or workpiece pollution, to use to purify air when cooling off air; for guaranteeing that cooling capacity needs a large amount of flowing to purify air, operating cost uprises.
The object of the present invention is to provide a kind of continuous heating treating furnaces, it can corresponding various temperature curves, and, also can use not to be the common air that purifies air can reduce operating cost.
Being characterized as of continuous heating treating furnaces of the present invention: gentle slow cool down district, heat treated district is provided with along the work transporting direction in the furnace body, in slow cooling zone, the indirect air cooling mechanism that stove lateral center portion has the cooling capacity higher than both sides is set in parallel in the work transporting face.
According to continuous heating treating furnaces of the present invention, because workpiece is cooled by the indirect air cooling mechanism that stove lateral center portion has the cooling capacity higher than both sides, so, can carry out the cooling of the workpiece central portion of difficult cooling really, guarantee that the horizontal direction even temperature distributes.And, can use common air rather than purify air by indirect air cooling mechanism, operating cost can reduce.
It is a plurality of to be with the workpiece after the slow cooling heat treated that the slow cooling zone of purpose has, and the slow cooling zone with above-mentioned formation can be whole slow cooling zone, also can be the slow cooling zone of part.The workpiece of lift-launch on brace table can be that one deck also can be a multilayer, and under the situation that multilayer is piled up, the workpiece on upper strata has the tendency that is difficult to cool off, and has better effects.Even one deck but above-below direction are the occasion of the workpiece of layer structure or package assembly, the temperature of upside has the tendency that is difficult to reduce, and can obtain the same effect of situation of piling up with multilayer.
The indirect air cooling mechanism that has the cooling capacity higher as stove lateral center portion than both sides, for example, can be set to have simultaneously the cooling tube array of the roof lateral center portion that is arranged at furnace body and the structure of the box cooler of the roof both sides that are arranged at furnace body.Cooling tube is heat resisting pipes such as stainless steel tube, and a plurality of cooling tubes are configured to side by side and directly expose in stove, like this, can add simultaneously the refrigerating gas in the bassoon flow and with stove in heat transfer area.In addition, do not require that sidepiece has high cooling capacity than central portion, by will can carry out suitable cooling, and cost being minimized also in indirect air cooling mechanism such as the box cooler of the internal flow cooling air of the case of the heat-resisting steel sheet and plate of stainless steel etc. as sidepiece.Indirect air cooling mechanism is not limited to this kind combination, so long as stove lateral center portion has the structure of the cooling capacity higher than both sides, can adopt various formations.For example, if central portion and both sides are the cooler (cooling tube array or box cooler) of same form, can make cooling capacity different owing to having or not of the fin that disposes in the air quantity that flows in the quantity of path, each path and the path etc.
Indirect air cooling mechanism is provided with the occasion of cooling tube array at the horizontal direction central portion of the roof of furnace body, and preferably the direction of principal axis of cooling tube is provided with along the conveyance direction.Like this, can more flexibly control the temperature of stove horizontal direction.
When indirect air cooling mechanism was arranged at the roof of furnace body, heating arrangements was arranged at the bottom of furnace body.In contrast, that is, when indirect air cooling mechanism is arranged at the bottom of furnace body, heating arrangements can be arranged at the roof of furnace body.Preferably heating arrangements is arranged at the bottom of furnace body.By cooling body and heating arrangements and usefulness, can satisfy desired temperature curve, and, can realize really that stove horizontal direction even temperature distributes.
Description of drawings
Fig. 1 is the vertical cross-section view of continuous heating treating furnaces of the present invention.
Fig. 2 is the plane of the cooling device of continuous heating treating furnaces of the present invention.
Fig. 3 constitutes for the band that shows continuous heating treating furnaces of the present invention and the figure of an example of gained temperature curve.
The specific embodiment
With reference to the following drawings embodiments of the present invention are described.Below in the explanation, claim Fig. 1 about be about, after the left side of the paper table side of Fig. 1, following and Fig. 3 of Fig. 2 all is called, the paper dorsal part of Fig. 1, Fig. 2 go up and before the right side of Fig. 3 all is called.
Illustrated in figures 1 and 2 is the slow cooling zone of continuous heating treating furnaces, and the formation of the slow cooling zone (1) of continuous heating treating furnaces comprises: diapire (2a), furnace body (2) with roof (2b) and left and right sides sidewall (2c), be positioned at the carrying device (3) of the locator (4) of furnace body (2) fore-and-aft direction conveyance load-carrying workpiece (W), be arranged on the central portion cooling device (5) of roof (2b) the lateral center portion of furnace body (2), be arranged on the sidepiece cooling device (6) of roof (2b) left and right sides sidepiece of furnace body (2), and be arranged on heater (7) on the diapire (2a) of furnace body (2).
The diapire (2a) of furnace body (2) and the inside of left and right sides sidewall (2c) are provided with the dustproof wall of heat resistant glass etc.Be provided with a plurality of bands (the temperature control unit of length direction) at furnace body (2) upper edge fore-and-aft direction (length direction).A plurality of temperature are controlled unit and are flocked together, and formation preheats between treatment region respectively, are eased up in the slow cool down interval in the heat treated interval.Fig. 3 is that the band of this continuous heating treating furnaces of expression constitutes and an example of the temperature curve that can set, during band constitutes shown on figure, draws the corresponding band (z) of a quadrangle of oblique line.In addition, in this example through workpiece (W) being preheating to institute's fixed temperature (for example 400 ℃) and to remove being treated to the preheating between treatment region of purpose (S1) and ensuing workpiece being heated to higher temperature (for example 600 ℃) to carry out the heat treated interval (S2) that this heat treated is a purpose of bonding agent etc., after slow cooling zone between (S3), workpiece (W) slowly cooled off with institute's certainty ratio in one minute.
Furnace body (2) inside, horizontal direction is symmetrical to be divided into 3 parts, and left side and right side have same structure.
Each cooling device (5) (6) is not direct air blowing, but adopts by carrying out heat exchange and the inner indirect cooling device of cool furnace body (2) with the interior flow air of path that is arranged in the cooling device (5) (6).In addition, in order to ensure higher cooling function, the central portion cooling device (5) of stove lateral center portion is made of the heat resisting pipe of stainless steel etc., and form a plurality of horizontal cooling tube (5a) that stretches along length direction horizontal direction separate decide the cooling tube array of arranged spaced, sidepiece cooling device (6) is formed by the box cooler (6a) at case internal flow cooling air, and this case is made of the heat-resisting steel sheet and plate of stainless steel etc.Central portion cooling device (5) adopts a plurality of cooling tubes (5a) directly to expose structure in furnace body inside, can obtain the flow of refrigerating gas in the big pipe and big heat transfer area simultaneously.Below the relative workpiece (W) of the box cooler (6a) of sidepiece cooling device (6) is heat-transfer area, compares for the cooling tube of heat-transfer area (5a) with whole, and relative cooling capacity is poor.The sidepiece cooling device (6) on central portion cooling device (5), the left side and the sidepiece cooling device (6) on the right can be distinguished adjusting independently of each other.
Be provided with entrance side house steward (8) and outlet side house steward (9) in the front and back end of central portion cooling device (5), the inlet tube of vertical configuration (10) and outlet (11) link to each other with all shape cooling tube arranged side by side (5a) by this house steward (8) (9).Supply with the common air of inlet tube (10) by the air feeder (12) that constitutes by air blast and pipe arrangement etc.Supply with box cooler (6a) tempering air from the air source identical by pipe arrangement with air door or control valve with supplying with inlet tube (10).When supplying with each cooling device (5) (6) air, can adopt any one of pressurization or suction.In addition, the air feeder of each cooling device (5) (6) can be to have omitted air door or control valve and the direct structure of supplying tubing air, perhaps, is to regulate the structure of air mass flow by frequency converter etc., and its structure is not defined.Certainly, the contrary configuration of entrance and exit also can.
Heater (7) has at horizontal direction a plurality of (for example 4) planar heater (7a) with decided arranged spaced, in view of the above, can adjust the output of horizontal direction.
A slow cooling zone promptly belongs to the temperature control unit of length direction between slow cooling zone, have the conveyance direction fixed length, typical, each this length is provided with two central portion cooling devices (5).That is, on a slow cooling zone, be provided with two central portion cooling devices (5) along the conveyance direction.About sidepiece cooling device (6) too.Like this, not only at the stove horizontal direction, guaranteeing that along the conveyance direction is also easier the even temperature of workpiece (W) distributes.And cooling device (5) (6) miniaturization also has wieldy advantage.Heater (7) also is that each this length is set up two.
According to above-mentioned continuous heating treating furnaces, heat from upper and lower surface by the heater that is arranged on interval diapire of heat treated and roof, to workpiece (W) carry out fixed heat treated, afterwards, conveyance is to slowly between the cooling zone.Slowly between the cooling zone, by obtaining fixed temperature curve, with heating by heater (7), be intended to capture the cooling of the heat that workpiece (W) and locator (4) bring from the heat treated interval by cooling device (5) (6), like this, cross over the integral body of fore-and-aft direction and left and right directions along temperature curve as shown in Figure 3 workpiece (W) is handled uniformly, afterwards, conveyance is to the cooling zone.
In addition, heater (7) not necessarily is arranged on all slow cooling zones that constitute between slow cooling zone, if obtain fixed temperature curve, can suitably select to be provided with the slow cooling zone of heater.In any case, according to formation of the present invention, can tackle the change of treatment conditions or workpiece kind flexibly, satisfy desired temperature curve, and, can realize really that stove horizontal direction even temperature distributes.
In addition, in the above-described embodiment, though given example is that horizontal direction is divided into 3 parts, be not limited thereto, as required can be further thin departmentalism can will all be divided into 4 parts or 5 parts etc.Also have, a band also is not limited to 2 parts interior cutting apart of conveyance direction, may be partitioned into more than 3 parts, does not cut apart and also can.In addition, in the stove outside of central portion and sidepiece cooling device (5) (6), can be provided with adiabatic outer as required.

Claims (4)

1. continuous heating treating furnaces, it is characterized in that: gentle slow cool down district, heat treated district is provided with along the work transporting direction in the furnace body, in slow cooling zone, the indirect air cooling mechanism that stove lateral center portion has the cooling capacity higher than both sides is set in parallel in the work transporting face.
2. according to the continuous heating treating furnaces of claim 1, it is characterized in that: indirect air cooling mechanism comprises the cooling tube array of the roof lateral center portion that is arranged at furnace body and is arranged at the box cooler of the roof both sides of furnace body.
3. according to the continuous heating treating furnaces of claim 2, it is characterized in that: the direction of principal axis of cooling tube is provided with along the conveyance direction.
4. according to the continuous heating treating furnaces of claim 1, it is characterized in that: heating arrangements is arranged at the diapire of furnace body.
CNA021314837A 2002-10-16 2002-10-16 Continuous heating treating furnaces Pending CN1490585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNA021314837A CN1490585A (en) 2002-10-16 2002-10-16 Continuous heating treating furnaces

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Application Number Priority Date Filing Date Title
CNA021314837A CN1490585A (en) 2002-10-16 2002-10-16 Continuous heating treating furnaces

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CN1490585A true CN1490585A (en) 2004-04-21

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101016187B (en) * 2006-02-08 2011-05-18 光洋热***株式会社 Heat treatment apparatus
CN101016191B (en) * 2006-02-09 2011-06-08 光洋热***株式会社 Heat treatment apparatus
CN102531363A (en) * 2011-12-30 2012-07-04 洛阳兰迪玻璃机器股份有限公司 Temperature setting method of continuous glass tempering furnace
CN104040276A (en) * 2011-12-21 2014-09-10 蒂森克虏伯钢铁欧洲股份公司 Nozzle Device For A Furnace For Heat Treating A Steel Flat Product And Furnace Equipped With Such A Nozzle Device
CN104048503A (en) * 2014-06-30 2014-09-17 四川珩必鑫电子科技有限公司 Circuit board tunnel baking oven
TWI635247B (en) * 2017-10-02 2018-09-11 財團法人工業技術研究院 Solidifying equipment
CN110857841A (en) * 2018-08-22 2020-03-03 日本碍子株式会社 Continuous heating furnace and method for operating same

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101016187B (en) * 2006-02-08 2011-05-18 光洋热***株式会社 Heat treatment apparatus
CN101016191B (en) * 2006-02-09 2011-06-08 光洋热***株式会社 Heat treatment apparatus
CN104040276A (en) * 2011-12-21 2014-09-10 蒂森克虏伯钢铁欧洲股份公司 Nozzle Device For A Furnace For Heat Treating A Steel Flat Product And Furnace Equipped With Such A Nozzle Device
CN104040276B (en) * 2011-12-21 2016-09-07 蒂森克虏伯钢铁欧洲股份公司 It is heat-treated the smelting furnace spray nozzle device of flat product and is furnished with the smelting furnace of this spray nozzle device
CN102531363A (en) * 2011-12-30 2012-07-04 洛阳兰迪玻璃机器股份有限公司 Temperature setting method of continuous glass tempering furnace
CN104048503A (en) * 2014-06-30 2014-09-17 四川珩必鑫电子科技有限公司 Circuit board tunnel baking oven
CN104048503B (en) * 2014-06-30 2016-01-20 四川珩必鑫电子科技有限公司 A kind of circuit board tunnel oven
TWI635247B (en) * 2017-10-02 2018-09-11 財團法人工業技術研究院 Solidifying equipment
US10591216B2 (en) 2017-10-02 2020-03-17 Industrial Technology Research Institute Solidifying device
CN110857841A (en) * 2018-08-22 2020-03-03 日本碍子株式会社 Continuous heating furnace and method for operating same

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